JP6154390B2 - 静電チャック - Google Patents

静電チャック Download PDF

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Publication number
JP6154390B2
JP6154390B2 JP2014538840A JP2014538840A JP6154390B2 JP 6154390 B2 JP6154390 B2 JP 6154390B2 JP 2014538840 A JP2014538840 A JP 2014538840A JP 2014538840 A JP2014538840 A JP 2014538840A JP 6154390 B2 JP6154390 B2 JP 6154390B2
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JP
Japan
Prior art keywords
substrate
electrode
electrostatic chuck
dielectric member
power source
Prior art date
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Active
Application number
JP2014538840A
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English (en)
Japanese (ja)
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JP2015501546A5 (enExample
JP2015501546A (ja
Inventor
セイマー バンナ
セイマー バンナ
バレンティン トドロー
バレンティン トドロー
ディミトリー ルボミルスキー
ディミトリー ルボミルスキー
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Applied Materials Inc
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Applied Materials Inc
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Publication of JP2015501546A5 publication Critical patent/JP2015501546A5/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
JP2014538840A 2011-10-28 2012-10-17 静電チャック Active JP6154390B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161552567P 2011-10-28 2011-10-28
US61/552,567 2011-10-28
US13/646,330 2012-10-05
US13/646,330 US20130107415A1 (en) 2011-10-28 2012-10-05 Electrostatic chuck
PCT/US2012/060682 WO2013062833A1 (en) 2011-10-28 2012-10-17 Electrostatic chuck

Publications (3)

Publication Number Publication Date
JP2015501546A JP2015501546A (ja) 2015-01-15
JP2015501546A5 JP2015501546A5 (enExample) 2015-12-03
JP6154390B2 true JP6154390B2 (ja) 2017-06-28

Family

ID=48168340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014538840A Active JP6154390B2 (ja) 2011-10-28 2012-10-17 静電チャック

Country Status (6)

Country Link
US (1) US20130107415A1 (enExample)
JP (1) JP6154390B2 (enExample)
KR (1) KR102115745B1 (enExample)
CN (1) CN103890928B (enExample)
TW (1) TWI574345B (enExample)
WO (1) WO2013062833A1 (enExample)

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* Cited by examiner, † Cited by third party
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CN103890928B (zh) 2017-11-21
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