KR102115745B1 - 정전 척 - Google Patents

정전 척 Download PDF

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Publication number
KR102115745B1
KR102115745B1 KR1020147014245A KR20147014245A KR102115745B1 KR 102115745 B1 KR102115745 B1 KR 102115745B1 KR 1020147014245 A KR1020147014245 A KR 1020147014245A KR 20147014245 A KR20147014245 A KR 20147014245A KR 102115745 B1 KR102115745 B1 KR 102115745B1
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South Korea
Prior art keywords
substrate
electrode
electrostatic
power source
chuck
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KR1020147014245A
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Korean (ko)
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KR20140088583A (ko
Inventor
사메르 바나
발렌틴 토도로우
드미트리 루보미르스키
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어플라이드 머티어리얼스, 인코포레이티드
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Jigs For Machine Tools (AREA)
KR1020147014245A 2011-10-28 2012-10-17 정전 척 Active KR102115745B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161552567P 2011-10-28 2011-10-28
US61/552,567 2011-10-28
US13/646,330 US20130107415A1 (en) 2011-10-28 2012-10-05 Electrostatic chuck
US13/646,330 2012-10-05
PCT/US2012/060682 WO2013062833A1 (en) 2011-10-28 2012-10-17 Electrostatic chuck

Publications (2)

Publication Number Publication Date
KR20140088583A KR20140088583A (ko) 2014-07-10
KR102115745B1 true KR102115745B1 (ko) 2020-05-27

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ID=48168340

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147014245A Active KR102115745B1 (ko) 2011-10-28 2012-10-17 정전 척

Country Status (6)

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US (1) US20130107415A1 (enExample)
JP (1) JP6154390B2 (enExample)
KR (1) KR102115745B1 (enExample)
CN (1) CN103890928B (enExample)
TW (1) TWI574345B (enExample)
WO (1) WO2013062833A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220127744A (ko) 2021-03-10 2022-09-20 (주)아이씨디 머트리얼즈 부쉬형 dc 포트를 갖는 정전척 및 이의 제조방법
KR20220127745A (ko) 2021-03-10 2022-09-20 (주)아이씨디 머트리얼즈 모듈형 dc 포트를 갖는 정전척 및 이의 제조방법

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