JP6024242B2 - 電子デバイスの製造方法 - Google Patents

電子デバイスの製造方法 Download PDF

Info

Publication number
JP6024242B2
JP6024242B2 JP2012148512A JP2012148512A JP6024242B2 JP 6024242 B2 JP6024242 B2 JP 6024242B2 JP 2012148512 A JP2012148512 A JP 2012148512A JP 2012148512 A JP2012148512 A JP 2012148512A JP 6024242 B2 JP6024242 B2 JP 6024242B2
Authority
JP
Japan
Prior art keywords
metal layer
film
electronic device
base substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012148512A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014011383A (ja
JP2014011383A5 (enExample
Inventor
知之 鎌倉
知之 鎌倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012148512A priority Critical patent/JP6024242B2/ja
Priority to US13/922,622 priority patent/US9549481B2/en
Priority to CN201310246968.8A priority patent/CN103524149B/zh
Priority to TW102123368A priority patent/TWI492676B/zh
Publication of JP2014011383A publication Critical patent/JP2014011383A/ja
Publication of JP2014011383A5 publication Critical patent/JP2014011383A5/ja
Application granted granted Critical
Publication of JP6024242B2 publication Critical patent/JP6024242B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/245—Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • H05K3/246—Reinforcing conductive paste, ink or powder patterns by other methods, e.g. by plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0509—Holders or supports for bulk acoustic wave devices consisting of adhesive elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10083—Electromechanical or electro-acoustic component, e.g. microphone
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10371—Shields or metal cases
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1131—Sintering, i.e. fusing of metal particles to achieve or improve electrical conductivity
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1147—Sealing or impregnating, e.g. of pores
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
JP2012148512A 2012-07-02 2012-07-02 電子デバイスの製造方法 Expired - Fee Related JP6024242B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012148512A JP6024242B2 (ja) 2012-07-02 2012-07-02 電子デバイスの製造方法
US13/922,622 US9549481B2 (en) 2012-07-02 2013-06-20 Method for producing base substrate, method for producing electronic device, base substrate, and electronic apparatus
CN201310246968.8A CN103524149B (zh) 2012-07-02 2013-06-20 基底基板、电子器件及其制造方法以及电子设备
TW102123368A TWI492676B (zh) 2012-07-02 2013-06-28 基座基板之製造方法、電子裝置之製造方法、基座基板及電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012148512A JP6024242B2 (ja) 2012-07-02 2012-07-02 電子デバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2014011383A JP2014011383A (ja) 2014-01-20
JP2014011383A5 JP2014011383A5 (enExample) 2015-06-18
JP6024242B2 true JP6024242B2 (ja) 2016-11-09

Family

ID=49777928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012148512A Expired - Fee Related JP6024242B2 (ja) 2012-07-02 2012-07-02 電子デバイスの製造方法

Country Status (4)

Country Link
US (1) US9549481B2 (enExample)
JP (1) JP6024242B2 (enExample)
CN (1) CN103524149B (enExample)
TW (1) TWI492676B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2788972C2 (ru) * 2021-03-30 2023-01-26 Олег Дмитриевич Гурин Термоэлектрический преобразователь на основе нерегулярной твердотельной сверхрешетки

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014013795A (ja) * 2012-07-03 2014-01-23 Seiko Epson Corp ベース基板、電子デバイスおよび電子機器
US10109669B2 (en) * 2014-12-18 2018-10-23 Sony Corporation Solid-state imaging device and electronic apparatus
WO2017022504A1 (ja) * 2015-07-31 2017-02-09 株式会社村田製作所 電子部品及びその製造方法
CH712475A2 (fr) * 2016-05-19 2017-11-30 Swatch Group Res & Dev Ltd Procédé de fabrication d'une pièce pour l'horlogerie dotée d'un élément d'habillage creux ou en relief.
JP6772574B2 (ja) * 2016-06-16 2020-10-21 株式会社村田製作所 圧電振動子及びその製造方法
JP2019047309A (ja) 2017-09-01 2019-03-22 株式会社村田製作所 圧電振動子
CN111362715A (zh) * 2020-03-16 2020-07-03 研创科技（惠州）有限公司 一种基于纳米金属的封装方法
JP2020150554A (ja) * 2020-05-29 2020-09-17 株式会社村田製作所 圧電振動子及びその製造方法
WO2022102444A1 (ja) * 2020-11-10 2022-05-19 株式会社村田製作所 電子部品モジュール、および、電子部品モジュールの製造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645283A (ja) 1992-07-27 1994-02-18 Nec Corp 半導体装置の製造方法
JP3323871B2 (ja) 1993-03-15 2002-09-09 株式会社東芝 半導体素子の製造方法
JPH10270831A (ja) * 1997-03-27 1998-10-09 Hitachi Ltd セラミック配線板のめっき方法
JP3466452B2 (ja) * 1997-12-24 2003-11-10 京セラ株式会社 配線基板の製造方法
DE10120517B4 (de) 2001-04-26 2013-06-06 Epcos Ag Elektrischer Vielschicht-Kaltleiter und Verfahren zu dessen Herstellung
JP2003152145A (ja) 2001-08-31 2003-05-23 Sumitomo Electric Ind Ltd 半導体放熱用基板とその製造方法及びパッケージ
JP2003155575A (ja) 2001-11-16 2003-05-30 Ngk Insulators Ltd 複合材料及びその製造方法
JP2003297158A (ja) 2002-04-01 2003-10-17 Canon Inc グリッド電極を有する透明導電膜及びその製造方法
JP2004127953A (ja) * 2002-07-29 2004-04-22 Kyocera Corp 配線基板
JP2004200644A (ja) * 2002-10-22 2004-07-15 Kyocera Corp 配線基板
JP2005022956A (ja) * 2003-07-02 2005-01-27 Rohm & Haas Electronic Materials Llc セラミックの金属化
JP2005252121A (ja) 2004-03-08 2005-09-15 Sumitomo Metal Electronics Devices Inc 半導体素子収納用パッケージ及びその製造方法
US7293359B2 (en) * 2004-04-29 2007-11-13 Hewlett-Packard Development Company, L.P. Method for manufacturing a fluid ejection device
JP2006086480A (ja) 2004-09-17 2006-03-30 Ngk Spark Plug Co Ltd セラミック配線基板及びその製造方法
JP4817043B2 (ja) 2005-08-30 2011-11-16 日立金属株式会社 セラミクス基板およびセラミクス基板を用いた電子部品とセラミクス基板の製造方法
JP4471004B2 (ja) 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP2011199672A (ja) 2010-03-19 2011-10-06 Seiko Instruments Inc ガラス基板の接合方法、ガラス接合体、パッケージの製造方法、パッケージ、圧電振動子、発振器、電子機器及び電波時計
US9634412B2 (en) * 2011-07-15 2017-04-25 Tessera, Inc. Connector structures and methods

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2788972C2 (ru) * 2021-03-30 2023-01-26 Олег Дмитриевич Гурин Термоэлектрический преобразователь на основе нерегулярной твердотельной сверхрешетки

Also Published As

Publication number Publication date
US9549481B2 (en) 2017-01-17
JP2014011383A (ja) 2014-01-20
TWI492676B (zh) 2015-07-11
CN103524149A (zh) 2014-01-22
US20140003004A1 (en) 2014-01-02
CN103524149B (zh) 2016-12-28
TW201404251A (zh) 2014-01-16

Similar Documents

Publication Publication Date Title
JP6024242B2 (ja) 電子デバイスの製造方法
JP6003194B2 (ja) ベース基板、電子デバイスおよびベース基板の製造方法
JP6119108B2 (ja) 電子デバイス、電子機器、ベース基板の製造方法および電子デバイスの製造方法
CN103368517B (zh) 电子器件、电子设备以及电子器件的制造方法
CN103531705B (zh) 基底基板、电子器件和电子设备
JP2013211441A (ja) パッケージ、パッケージの製造方法、電子デバイスおよび電子機器
CN105322909A (zh) 电子器件封装用基板、电子器件封装、电子器件及制造方法
JP2015231009A (ja) 電子デバイスパッケージ用基板および電子デバイスパッケージ用基板の製造方法
JP2014011421A (ja) 電子デバイスの製造方法、蓋体用基板、電子デバイスおよび電子機器
JP2015231001A (ja) 電子デバイスおよび電子デバイスの製造方法
JP2015231191A (ja) 電子デバイスおよび電子デバイスの製造方法
JP2015149318A (ja) 配線基板、配線基板の製造方法、電子デバイス、電子機器および移動体
JP2015056501A (ja) 回路基板、回路基板の製造方法、電子デバイス、電子機器および移動体
JP2018074012A (ja) 電子デバイス用パッケージ、電子デバイス、電子機器、および移動体
JP2015153805A (ja) 配線基板の製造方法、配線基板、電子デバイス、電子機器および移動体
JP2014197581A (ja) 蓋体集合体、パッケージの製造方法および電子デバイスの製造方法
JP2015153806A (ja) 配線基板の製造方法、配線基板、電子デバイス、電子機器および移動体
JP2015056577A (ja) 回路基板の製造方法、回路基板、電子デバイス、電子機器および移動体
JP2015231010A (ja) 電子デバイスパッケージ用基板、電子デバイスパッケージ、電子デバイスおよび電子デバイスの製造方法
JP2013235884A (ja) 基板の製造方法、充填装置および電子デバイス
JP2014192438A (ja) パッケージの製造方法、電子デバイスの製造方法、電子デバイス、電子機器および移動体
JP2015002313A (ja) 電子部品の製造方法、電子部品、および電子機器
JP2014192505A (ja) パッケージの製造方法、電子デバイスの製造方法、電子デバイス、電子機器および移動体
JP2013187702A (ja) 電子部品の製造方法、電子部品および電子機器
JP2014107416A (ja) 電子デバイス、電子機器、移動体及び電子デバイスの製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150422

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150422

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160620

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160628

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160826

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20160913

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20160926

R150 Certificate of patent or registration of utility model

Ref document number: 6024242

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees