CN103524149B - 基底基板、电子器件及其制造方法以及电子设备 - Google Patents

基底基板、电子器件及其制造方法以及电子设备 Download PDF

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Publication number
CN103524149B
CN103524149B CN201310246968.8A CN201310246968A CN103524149B CN 103524149 B CN103524149 B CN 103524149B CN 201310246968 A CN201310246968 A CN 201310246968A CN 103524149 B CN103524149 B CN 103524149B
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CN
China
Prior art keywords
film
metal level
metal layer
electronic device
substrate
Prior art date
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Expired - Fee Related
Application number
CN201310246968.8A
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English (en)
Chinese (zh)
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CN103524149A (zh
Inventor
镰仓知之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Publication of CN103524149A publication Critical patent/CN103524149A/zh
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Expired - Fee Related legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing of the conductive pattern
    • H05K3/245—Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • H05K3/246—Reinforcing conductive paste, ink or powder patterns by other methods, e.g. by plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0509—Holders or supports for bulk acoustic wave devices consisting of adhesive elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10083—Electromechanical or electro-acoustic component, e.g. microphone
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10371—Shields or metal cases
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1131—Sintering, i.e. fusing of metal particles to achieve or improve electrical conductivity
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1147—Sealing or impregnating, e.g. of pores
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/321—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
CN201310246968.8A 2012-07-02 2013-06-20 基底基板、电子器件及其制造方法以及电子设备 Expired - Fee Related CN103524149B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-148512 2012-07-02
JP2012148512A JP6024242B2 (ja) 2012-07-02 2012-07-02 電子デバイスの製造方法

Publications (2)

Publication Number Publication Date
CN103524149A CN103524149A (zh) 2014-01-22
CN103524149B true CN103524149B (zh) 2016-12-28

Family

ID=49777928

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310246968.8A Expired - Fee Related CN103524149B (zh) 2012-07-02 2013-06-20 基底基板、电子器件及其制造方法以及电子设备

Country Status (4)

Country Link
US (1) US9549481B2 (enExample)
JP (1) JP6024242B2 (enExample)
CN (1) CN103524149B (enExample)
TW (1) TWI492676B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014013795A (ja) * 2012-07-03 2014-01-23 Seiko Epson Corp ベース基板、電子デバイスおよび電子機器
KR20230041083A (ko) * 2014-12-18 2023-03-23 소니그룹주식회사 고체 촬상 소자, 및 전자 장치
WO2017022504A1 (ja) * 2015-07-31 2017-02-09 株式会社村田製作所 電子部品及びその製造方法
EP3246767B1 (fr) * 2016-05-19 2019-01-09 The Swatch Group Research and Development Ltd. Procédé de fabrication d'une piece d'horlogerie dotée d'un élément d'habillage creux ou en relief
JP6772574B2 (ja) * 2016-06-16 2020-10-21 株式会社村田製作所 圧電振動子及びその製造方法
JP2019047309A (ja) 2017-09-01 2019-03-22 株式会社村田製作所 圧電振動子
CN111362715A (zh) * 2020-03-16 2020-07-03 研创科技（惠州）有限公司 一种基于纳米金属的封装方法
JP2020150554A (ja) * 2020-05-29 2020-09-17 株式会社村田製作所 圧電振動子及びその製造方法
WO2022102444A1 (ja) * 2020-11-10 2022-05-19 株式会社村田製作所 電子部品モジュール、および、電子部品モジュールの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270831A (ja) * 1997-03-27 1998-10-09 Hitachi Ltd セラミック配線板のめっき方法
CN1576393A (zh) * 2003-07-02 2005-02-09 罗姆和哈斯电子材料有限责任公司 陶瓷的金属镀覆
CN1636253A (zh) * 2001-04-26 2005-07-06 埃普科斯股份有限公司 多层电气元件及其制造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645283A (ja) 1992-07-27 1994-02-18 Nec Corp 半導体装置の製造方法
JP3323871B2 (ja) 1993-03-15 2002-09-09 株式会社東芝 半導体素子の製造方法
JP3466452B2 (ja) * 1997-12-24 2003-11-10 京セラ株式会社 配線基板の製造方法
JP2003152145A (ja) 2001-08-31 2003-05-23 Sumitomo Electric Ind Ltd 半導体放熱用基板とその製造方法及びパッケージ
JP2003155575A (ja) 2001-11-16 2003-05-30 Ngk Insulators Ltd 複合材料及びその製造方法
JP2003297158A (ja) 2002-04-01 2003-10-17 Canon Inc グリッド電極を有する透明導電膜及びその製造方法
JP2004127953A (ja) * 2002-07-29 2004-04-22 Kyocera Corp 配線基板
JP2004200644A (ja) * 2002-10-22 2004-07-15 Kyocera Corp 配線基板
JP2005252121A (ja) 2004-03-08 2005-09-15 Sumitomo Metal Electronics Devices Inc 半導体素子収納用パッケージ及びその製造方法
US7293359B2 (en) * 2004-04-29 2007-11-13 Hewlett-Packard Development Company, L.P. Method for manufacturing a fluid ejection device
JP2006086480A (ja) 2004-09-17 2006-03-30 Ngk Spark Plug Co Ltd セラミック配線基板及びその製造方法
JP4817043B2 (ja) 2005-08-30 2011-11-16 日立金属株式会社 セラミクス基板およびセラミクス基板を用いた電子部品とセラミクス基板の製造方法
JP4471004B2 (ja) 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP2011199672A (ja) 2010-03-19 2011-10-06 Seiko Instruments Inc ガラス基板の接合方法、ガラス接合体、パッケージの製造方法、パッケージ、圧電振動子、発振器、電子機器及び電波時計
US9634412B2 (en) * 2011-07-15 2017-04-25 Tessera, Inc. Connector structures and methods

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270831A (ja) * 1997-03-27 1998-10-09 Hitachi Ltd セラミック配線板のめっき方法
CN1636253A (zh) * 2001-04-26 2005-07-06 埃普科斯股份有限公司 多层电气元件及其制造方法
CN1576393A (zh) * 2003-07-02 2005-02-09 罗姆和哈斯电子材料有限责任公司 陶瓷的金属镀覆

Also Published As

Publication number Publication date
US20140003004A1 (en) 2014-01-02
TW201404251A (zh) 2014-01-16
TWI492676B (zh) 2015-07-11
JP6024242B2 (ja) 2016-11-09
CN103524149A (zh) 2014-01-22
JP2014011383A (ja) 2014-01-20
US9549481B2 (en) 2017-01-17

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Granted publication date: 20161228

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CF01 Termination of patent right due to non-payment of annual fee