JP5719336B2 - 発光装置 - Google Patents
発光装置 Download PDFInfo
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- JP5719336B2 JP5719336B2 JP2012235992A JP2012235992A JP5719336B2 JP 5719336 B2 JP5719336 B2 JP 5719336B2 JP 2012235992 A JP2012235992 A JP 2012235992A JP 2012235992 A JP2012235992 A JP 2012235992A JP 5719336 B2 JP5719336 B2 JP 5719336B2
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- 239000004065 semiconductor Substances 0.000 claims description 326
- 229910052751 metal Inorganic materials 0.000 claims description 321
- 239000002184 metal Substances 0.000 claims description 321
- 239000000758 substrate Substances 0.000 claims description 166
- 230000001681 protective effect Effects 0.000 claims description 51
- 238000005530 etching Methods 0.000 claims description 23
- 150000004767 nitrides Chemical class 0.000 claims description 23
- 239000010410 layer Substances 0.000 description 650
- 238000004519 manufacturing process Methods 0.000 description 54
- 238000000034 method Methods 0.000 description 46
- 238000000926 separation method Methods 0.000 description 29
- 150000001875 compounds Chemical class 0.000 description 26
- 229910052594 sapphire Inorganic materials 0.000 description 19
- 239000010980 sapphire Substances 0.000 description 19
- 230000008569 process Effects 0.000 description 13
- 150000002739 metals Chemical class 0.000 description 12
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 11
- 229910002601 GaN Inorganic materials 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 239000007769 metal material Substances 0.000 description 8
- 239000002356 single layer Substances 0.000 description 7
- 238000000605 extraction Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000003491 array Methods 0.000 description 5
- 239000006227 byproduct Substances 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000036961 partial effect Effects 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 229910001316 Ag alloy Inorganic materials 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004158 TaO Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
- H01L33/60—Reflective elements
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- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- H01L33/0093—Wafer bonding; Removal of the growth substrate
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- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
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- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
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- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H01L2933/0033—Processes relating to semiconductor body packages
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- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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Description
127a 活性層
129a 第2導電型下部半導体層
131 第1反射金属層
133 絶縁層
135 保護金属層
137a 第1電極パッド
137b 第2電極パッド
138a 第1電極パッド
138b 第2電極パッド
139 配線
141 中間絶縁層
143 第2反射金属層
145 保護金属層
147 ボンディング金属
149 ボンディング金属
151 基板
LS1、LS2 発光セル
R 粗面
Claims (17)
- 基板と、
前記基板の上に配置されたボンディング層と、
前記ボンディング層の上に配置された第1接続金属と、
前記第1接続金属の一部と接触する保護金属層と、
前記保護金属層の一部と接触する反射金属層と、
前記保護金属層および前記反射金属層に接触し、前記第1接続金属を介して互いに電気的に接続された複数の第1導電型窒化物半導体層と、
複数の前記第1導電型窒化物半導体層の上にそれぞれ配置された複数の活性層と、
複数の前記活性層の上にそれぞれ配置され、第1の面に粗面を備えた複数の第2導電型窒化物半導体層と、
前記第2導電型窒化物半導体層に電気的に接続された第2接続金属と、
前記第1導電型窒化物半導体層の一部と前記保護金属層の一部とを覆う第1絶縁層と、
前記第2導電型窒化物半導体層と重ならない部分に形成され、前記第2導電型窒化物半導体層と前記第2接続金属を介して電気的に接続され、前記第1の面と同じ側に露出された第1電極と、
前記第1接続金属と前記第2接続金属とを絶縁する第2絶縁層と、
前記第2絶縁膜において前記第1接続金属と前記第2接続金属とを電気的に接続する開口部と、
前記開口部において前記第2接続金属の上に形成され、前記第2接続金属を介して前記第1接続金属に電気的に接続され、前記第1の面と同じ側に露出された第2電極と、
を備えることを特徴とする発光装置。 - 前記第1絶縁層は前記第2導電型窒化物半導体層の第2の面に接触し、前記第2の面は前記第2導電型窒化物半導体層の前記粗面が形成された第1の面の反対側にあることを特徴とする請求項1に記載の発光装置。
- 前記第1絶縁層は前記第2導電型窒化物半導体層の複数の離隔した第2の面に接触することを特徴とする請求項2に記載の発光装置。
- 前記第2接続金属が複数の前記第2導電型窒化物半導体層を互いに電気的に接続することを特徴とする請求項1に記載の発光装置。
- 前記第1絶縁層は前記活性層の側面を覆うことを特徴とする請求項1に記載の発光装置。
- 前記第2接続金属を介して前記第2導電型窒化物半導体層に接続される第2電極をさらに有することを特徴とする請求項1に記載の発光装置。
- 前記第1接続金属と前記ボンディング金属とは、前記第1導電型窒化物半導体層と前記基板との間の領域を充填することを特徴とする請求項1に記載の発光装置。
- 前記第2電極が前記第2導電型窒化物半導体層と前記第2接続金属を介して電気的に接続され、前記第1の面と同じ側に露出されることを特徴とする請求項6に記載の発光装置。
- 第2絶縁層をさらに備え、前記保護金属層は前記第1絶縁層と前記第2絶縁層との間に配置されることを特徴とする請求項8に記載の発光装置。
- 前記第2導電型窒化物半導体層は、前記粗面が形成された第1の面よりも深いエッチング部を備えることを特徴とする請求項1に記載の発光装置。
- 前記第2導電型窒化物半導体層は、第1の高さを備える第1の部分と、前記第1の高さより大きい第2の高さを備える第2の部分と、を備えることを特徴とする請求項1に記載の発光装置。
- 前記第1の部分は前記第1絶縁層を露出することを特徴とする請求項11に記載の発光装置。
- 前記基板の上に配置されたメサエッチング構造をさらに備え、前記メサエッチング構造は前記第2導電型窒化物半導体層の前記粗面が形成された第1の面の反対側にあることを特徴とする請求項1に記載の発光装置。
- 前記メサエッチング構造は前記第1絶縁層の上に配置されることを特徴とする請求項13に記載の発光装置。
- 前記第1絶縁層は、前記保護金属層に直接接触する前記第1導電型窒化物半導体層の一部に隣接して配置されることを特徴とする請求項13に記載の発光装置。
- 第1の反射金属層は、前記保護金属層に直接接触する前記第1導電型窒化物半導体層の一部に隣接して配置されることを特徴とする請求項15に記載の発光装置。
- 前記保護金属層の一部と前記第1絶縁層とは、前記第2絶縁層の上に配置されることを特徴とする請求項16に記載の発光装置。
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KR1020080095926A KR101017394B1 (ko) | 2008-09-30 | 2008-09-30 | 발광 소자 및 그것을 제조하는 방법 |
KR20080095927A KR101093117B1 (ko) | 2008-09-30 | 2008-09-30 | 교류용 발광 소자 및 그것을 제조하는 방법 |
KR10-2008-0095926 | 2008-09-30 | ||
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JP5719336B2 true JP5719336B2 (ja) | 2015-05-20 |
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JP2012235992A Active JP5719336B2 (ja) | 2008-09-30 | 2012-10-25 | 発光装置 |
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US8802465B2 (en) * | 2005-01-11 | 2014-08-12 | SemiLEDs Optoelectronics Co., Ltd. | Method for handling a semiconductor wafer assembly |
TWI440210B (zh) | 2007-01-22 | 2014-06-01 | Cree Inc | 使用發光裝置外部互連陣列之照明裝置及其製造方法 |
KR101017395B1 (ko) * | 2008-12-24 | 2011-02-28 | 서울옵토디바이스주식회사 | 복수개의 발광셀들을 갖는 발광 소자 및 그것을 제조하는 방법 |
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Publication number | Publication date |
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US9059015B2 (en) | 2015-06-16 |
US20100078656A1 (en) | 2010-04-01 |
JP2010087515A (ja) | 2010-04-15 |
US20120007109A1 (en) | 2012-01-12 |
JP2013016875A (ja) | 2013-01-24 |
US9431377B2 (en) | 2016-08-30 |
US20110169040A1 (en) | 2011-07-14 |
US9337175B2 (en) | 2016-05-10 |
US20140110729A1 (en) | 2014-04-24 |
US20140209941A1 (en) | 2014-07-31 |
JP5123269B2 (ja) | 2013-01-23 |
US20160343922A1 (en) | 2016-11-24 |
US8648369B2 (en) | 2014-02-11 |
US8288781B2 (en) | 2012-10-16 |
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