JP4153303B2 - 走査型電子顕微鏡を用いた非真空環境内のサンプルの検査のための装置および方法 - Google Patents
走査型電子顕微鏡を用いた非真空環境内のサンプルの検査のための装置および方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title description 49
- 238000007689 inspection Methods 0.000 title description 13
- 239000000463 material Substances 0.000 claims description 67
- 238000010894 electron beam technology Methods 0.000 claims description 29
- 229920001721 polyimide Polymers 0.000 claims description 15
- 239000012530 fluid Substances 0.000 claims description 14
- 239000004642 Polyimide Substances 0.000 claims description 13
- 230000003993 interaction Effects 0.000 claims description 12
- 239000012298 atmosphere Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 claims description 7
- -1 polyethylene Polymers 0.000 claims description 5
- 239000004952 Polyamide Substances 0.000 claims description 4
- 239000004962 Polyamide-imide Substances 0.000 claims description 4
- 229920002647 polyamide Polymers 0.000 claims description 4
- 229920002312 polyamide-imide Polymers 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims description 3
- 229920000573 polyethylene Polymers 0.000 claims description 3
- 229920000128 polypyrrole Polymers 0.000 claims description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims 1
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical group OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 claims 1
- 239000012528 membrane Substances 0.000 abstract description 149
- 239000000523 sample Substances 0.000 description 147
- 210000004027 cell Anatomy 0.000 description 132
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 51
- 229910001868 water Inorganic materials 0.000 description 43
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 38
- 229910052737 gold Inorganic materials 0.000 description 32
- 239000010931 gold Substances 0.000 description 32
- 238000002372 labelling Methods 0.000 description 27
- 239000002245 particle Substances 0.000 description 21
- 238000005192 partition Methods 0.000 description 20
- 229910052799 carbon Inorganic materials 0.000 description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 17
- 238000003384 imaging method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 239000000243 solution Substances 0.000 description 13
- 230000004888 barrier function Effects 0.000 description 12
- 239000011324 bead Substances 0.000 description 12
- 230000001464 adherent effect Effects 0.000 description 11
- 239000002609 medium Substances 0.000 description 11
- 238000002360 preparation method Methods 0.000 description 11
- 239000008055 phosphate buffer solution Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 238000001493 electron microscopy Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 239000012472 biological sample Substances 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 230000005855 radiation Effects 0.000 description 7
- YBJHBAHKTGYVGT-ZKWXMUAHSA-N (+)-Biotin Chemical compound N1C(=O)N[C@@H]2[C@H](CCCCC(=O)O)SC[C@@H]21 YBJHBAHKTGYVGT-ZKWXMUAHSA-N 0.000 description 6
- 239000000839 emulsion Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 229940079593 drug Drugs 0.000 description 5
- 239000003814 drug Substances 0.000 description 5
- 239000003921 oil Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 108010090804 Streptavidin Proteins 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 4
- 239000012736 aqueous medium Substances 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000004422 calculation algorithm Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000001727 in vivo Methods 0.000 description 4
- 239000003562 lightweight material Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 4
- 239000003550 marker Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 3
- 102000016359 Fibronectins Human genes 0.000 description 3
- 108010067306 Fibronectins Proteins 0.000 description 3
- 108010052285 Membrane Proteins Proteins 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229960002685 biotin Drugs 0.000 description 3
- 235000020958 biotin Nutrition 0.000 description 3
- 239000011616 biotin Substances 0.000 description 3
- 210000000170 cell membrane Anatomy 0.000 description 3
- 230000001413 cellular effect Effects 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 238000000635 electron micrograph Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000006260 foam Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 235000003642 hunger Nutrition 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000003834 intracellular effect Effects 0.000 description 3
- 210000003098 myoblast Anatomy 0.000 description 3
- 230000008823 permeabilization Effects 0.000 description 3
- 239000008194 pharmaceutical composition Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000004626 scanning electron microscopy Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000006228 supernatant Substances 0.000 description 3
- WWJZWCUNLNYYAU-UHFFFAOYSA-N temephos Chemical compound C1=CC(OP(=S)(OC)OC)=CC=C1SC1=CC=C(OP(=S)(OC)OC)C=C1 WWJZWCUNLNYYAU-UHFFFAOYSA-N 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 108091008794 FGF receptors Proteins 0.000 description 2
- 102000044168 Fibroblast Growth Factor Receptor Human genes 0.000 description 2
- 102000010789 Interleukin-2 Receptors Human genes 0.000 description 2
- 108010038453 Interleukin-2 Receptors Proteins 0.000 description 2
- 102000018697 Membrane Proteins Human genes 0.000 description 2
- 238000000342 Monte Carlo simulation Methods 0.000 description 2
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- 206010057249 Phagocytosis Diseases 0.000 description 2
- 108010039918 Polylysine Proteins 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004125 X-ray microanalysis Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003833 cell viability Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 210000004978 chinese hamster ovary cell Anatomy 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000001506 fluorescence spectroscopy Methods 0.000 description 2
- 239000012737 fresh medium Substances 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 230000004941 influx Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 210000004698 lymphocyte Anatomy 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000005374 membrane filtration Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 239000003068 molecular probe Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000012634 optical imaging Methods 0.000 description 2
- 238000000399 optical microscopy Methods 0.000 description 2
- 210000003463 organelle Anatomy 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 229920002866 paraformaldehyde Polymers 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- 230000008782 phagocytosis Effects 0.000 description 2
- 229920000656 polylysine Polymers 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 238000011002 quantification Methods 0.000 description 2
- 239000002096 quantum dot Substances 0.000 description 2
- 102000005962 receptors Human genes 0.000 description 2
- 108020003175 receptors Proteins 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 210000002966 serum Anatomy 0.000 description 2
- JJGWLCLUQNFDIS-GTSONSFRSA-M sodium;1-[6-[5-[(3as,4s,6ar)-2-oxo-1,3,3a,4,6,6a-hexahydrothieno[3,4-d]imidazol-4-yl]pentanoylamino]hexanoyloxy]-2,5-dioxopyrrolidine-3-sulfonate Chemical compound [Na+].O=C1C(S(=O)(=O)[O-])CC(=O)N1OC(=O)CCCCCNC(=O)CCCC[C@H]1[C@H]2NC(=O)N[C@H]2CS1 JJGWLCLUQNFDIS-GTSONSFRSA-M 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 210000001519 tissue Anatomy 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 241000212384 Bifora Species 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 108060006698 EGF receptor Proteins 0.000 description 1
- 102000001301 EGF receptor Human genes 0.000 description 1
- 102000009465 Growth Factor Receptors Human genes 0.000 description 1
- 108010009202 Growth Factor Receptors Proteins 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 230000002292 Radical scavenging effect Effects 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229930006000 Sucrose Natural products 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 239000000227 bioadhesive Substances 0.000 description 1
- 230000004071 biological effect Effects 0.000 description 1
- 230000031018 biological processes and functions Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 238000005136 cathodoluminescence Methods 0.000 description 1
- 239000006143 cell culture medium Substances 0.000 description 1
- 230000030833 cell death Effects 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013065 commercial product Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002872 contrast media Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000009089 cytolysis Effects 0.000 description 1
- 210000000805 cytoplasm Anatomy 0.000 description 1
- 210000004292 cytoskeleton Anatomy 0.000 description 1
- 210000000172 cytosol Anatomy 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000023077 detection of light stimulus Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000007876 drug discovery Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000001803 electron scattering Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 210000003743 erythrocyte Anatomy 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000007850 fluorescent dye Substances 0.000 description 1
- 238000001215 fluorescent labelling Methods 0.000 description 1
- 102000034287 fluorescent proteins Human genes 0.000 description 1
- 108091006047 fluorescent proteins Proteins 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 210000004940 nucleus Anatomy 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000007764 o/w emulsion Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000000242 pagocytic effect Effects 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000001194 polyoxyethylene (40) stearate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000012679 serum free medium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004557 single molecule detection Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010421 standard material Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 125000000185 sucrose group Chemical group 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000009747 swallowing Effects 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
- 238000004846 x-ray emission Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2807—X-rays
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25087900P | 2000-12-01 | 2000-12-01 | |
| US30645801P | 2001-07-20 | 2001-07-20 | |
| PCT/IL2001/001108 WO2002045125A1 (en) | 2000-12-01 | 2001-11-30 | Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008097275A Division JP2008171830A (ja) | 2000-12-01 | 2008-04-03 | 走査型電子顕微鏡を用いた非真空環境内のサンプルの検査のための装置および方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004515049A JP2004515049A (ja) | 2004-05-20 |
| JP2004515049A5 JP2004515049A5 (enExample) | 2005-12-22 |
| JP4153303B2 true JP4153303B2 (ja) | 2008-09-24 |
Family
ID=26941209
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002547196A Expired - Fee Related JP4153303B2 (ja) | 2000-12-01 | 2001-11-30 | 走査型電子顕微鏡を用いた非真空環境内のサンプルの検査のための装置および方法 |
| JP2008097275A Pending JP2008171830A (ja) | 2000-12-01 | 2008-04-03 | 走査型電子顕微鏡を用いた非真空環境内のサンプルの検査のための装置および方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008097275A Pending JP2008171830A (ja) | 2000-12-01 | 2008-04-03 | 走査型電子顕微鏡を用いた非真空環境内のサンプルの検査のための装置および方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (3) | US6992300B2 (enExample) |
| EP (1) | EP1340241B1 (enExample) |
| JP (2) | JP4153303B2 (enExample) |
| CN (1) | CN1511332A (enExample) |
| AT (1) | ATE510298T1 (enExample) |
| AU (2) | AU2101902A (enExample) |
| CA (1) | CA2436237A1 (enExample) |
| CZ (1) | CZ20031455A3 (enExample) |
| IL (1) | IL156027A0 (enExample) |
| WO (1) | WO2002045125A1 (enExample) |
Families Citing this family (162)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2367686B (en) * | 2000-08-10 | 2002-12-11 | Leo Electron Microscopy Ltd | Improvements in or relating to particle detectors |
| US7230242B2 (en) | 2002-06-05 | 2007-06-12 | Quantomix Ltd | Methods for SEM inspection of fluid containing samples |
| IL150056A0 (en) | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
| US11243494B2 (en) | 2002-07-31 | 2022-02-08 | Abs Global, Inc. | Multiple laminar flow-based particle and cellular separation with laser steering |
| US20070125947A1 (en) * | 2003-02-20 | 2007-06-07 | David Sprinzak | Sample enclosure for a scanning electron microscope and methods of use thereof |
| US20050017173A1 (en) * | 2003-07-15 | 2005-01-27 | Nalin Kumar | Individually addressable nanoelectrode array |
| US7274447B2 (en) * | 2004-06-21 | 2007-09-25 | Swce | Material porosity pressure impulse testing system |
| WO2007008216A2 (en) * | 2004-07-29 | 2007-01-18 | California Institute Of Technology | Low stress, ultra-thin, uniform membrane, methods of fabricating same and incorporation into detection devices |
| US7586097B2 (en) | 2006-01-05 | 2009-09-08 | Virgin Islands Microsystems, Inc. | Switching micro-resonant structures using at least one director |
| US7791290B2 (en) | 2005-09-30 | 2010-09-07 | Virgin Islands Microsystems, Inc. | Ultra-small resonating charged particle beam modulator |
| US7626179B2 (en) | 2005-09-30 | 2009-12-01 | Virgin Island Microsystems, Inc. | Electron beam induced resonance |
| US20090045349A1 (en) * | 2004-08-26 | 2009-02-19 | David Sprinzak | Sample enclosure for inspection and methods of use thereof |
| NL1027025C2 (nl) * | 2004-09-13 | 2006-03-14 | Univ Delft Tech | Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan. |
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| CN114113182A (zh) * | 2021-10-22 | 2022-03-01 | 合肥国轩高科动力能源有限公司 | 一种用于扫描电镜拍摄硅基负极材料的定位处理方法 |
| CN118348039B (zh) * | 2024-05-06 | 2025-11-07 | 中国科学院上海高等研究院 | 一种扫描电镜原位厚液层的液体环境样品的显微分析方法 |
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- 2001-11-30 AU AU2101902A patent/AU2101902A/xx active Pending
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Also Published As
| Publication number | Publication date |
|---|---|
| AU2002221019B2 (en) | 2007-02-08 |
| US6992300B2 (en) | 2006-01-31 |
| US6989542B2 (en) | 2006-01-24 |
| US20040217297A1 (en) | 2004-11-04 |
| JP2004515049A (ja) | 2004-05-20 |
| EP1340241A4 (en) | 2009-01-14 |
| AU2101902A (en) | 2002-06-11 |
| IL156027A0 (en) | 2003-12-23 |
| US20060033038A1 (en) | 2006-02-16 |
| JP2008171830A (ja) | 2008-07-24 |
| US20040046120A1 (en) | 2004-03-11 |
| EP1340241B1 (en) | 2011-05-18 |
| CZ20031455A3 (cs) | 2003-10-15 |
| EP1340241A1 (en) | 2003-09-03 |
| US7253418B2 (en) | 2007-08-07 |
| ATE510298T1 (de) | 2011-06-15 |
| CN1511332A (zh) | 2004-07-07 |
| CA2436237A1 (en) | 2002-06-06 |
| WO2002045125A1 (en) | 2002-06-06 |
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