CZ20031455A3 - Zařízení a způsob pro zkoumání vzorků v nevakuovém prostředí s použitím skenovacího elektronového mikroskopu - Google Patents
Zařízení a způsob pro zkoumání vzorků v nevakuovém prostředí s použitím skenovacího elektronového mikroskopu Download PDFInfo
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- CZ20031455A3 CZ20031455A3 CZ20031455A CZ20031455A CZ20031455A3 CZ 20031455 A3 CZ20031455 A3 CZ 20031455A3 CZ 20031455 A CZ20031455 A CZ 20031455A CZ 20031455 A CZ20031455 A CZ 20031455A CZ 20031455 A3 CZ20031455 A3 CZ 20031455A3
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2807—X-rays
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25087900P | 2000-12-01 | 2000-12-01 | |
| US30645801P | 2001-07-20 | 2001-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CZ20031455A3 true CZ20031455A3 (cs) | 2003-10-15 |
Family
ID=26941209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CZ20031455A CZ20031455A3 (cs) | 2000-12-01 | 2001-11-30 | Zařízení a způsob pro zkoumání vzorků v nevakuovém prostředí s použitím skenovacího elektronového mikroskopu |
Country Status (10)
| Country | Link |
|---|---|
| US (3) | US6992300B2 (enExample) |
| EP (1) | EP1340241B1 (enExample) |
| JP (2) | JP4153303B2 (enExample) |
| CN (1) | CN1511332A (enExample) |
| AT (1) | ATE510298T1 (enExample) |
| AU (2) | AU2101902A (enExample) |
| CA (1) | CA2436237A1 (enExample) |
| CZ (1) | CZ20031455A3 (enExample) |
| IL (1) | IL156027A0 (enExample) |
| WO (1) | WO2002045125A1 (enExample) |
Families Citing this family (162)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2367686B (en) * | 2000-08-10 | 2002-12-11 | Leo Electron Microscopy Ltd | Improvements in or relating to particle detectors |
| US7230242B2 (en) | 2002-06-05 | 2007-06-12 | Quantomix Ltd | Methods for SEM inspection of fluid containing samples |
| IL150056A0 (en) | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
| US11243494B2 (en) | 2002-07-31 | 2022-02-08 | Abs Global, Inc. | Multiple laminar flow-based particle and cellular separation with laser steering |
| US20070125947A1 (en) * | 2003-02-20 | 2007-06-07 | David Sprinzak | Sample enclosure for a scanning electron microscope and methods of use thereof |
| US20050017173A1 (en) * | 2003-07-15 | 2005-01-27 | Nalin Kumar | Individually addressable nanoelectrode array |
| US7274447B2 (en) * | 2004-06-21 | 2007-09-25 | Swce | Material porosity pressure impulse testing system |
| WO2007008216A2 (en) * | 2004-07-29 | 2007-01-18 | California Institute Of Technology | Low stress, ultra-thin, uniform membrane, methods of fabricating same and incorporation into detection devices |
| US7586097B2 (en) | 2006-01-05 | 2009-09-08 | Virgin Islands Microsystems, Inc. | Switching micro-resonant structures using at least one director |
| US7791290B2 (en) | 2005-09-30 | 2010-09-07 | Virgin Islands Microsystems, Inc. | Ultra-small resonating charged particle beam modulator |
| US7626179B2 (en) | 2005-09-30 | 2009-12-01 | Virgin Island Microsystems, Inc. | Electron beam induced resonance |
| US20090045349A1 (en) * | 2004-08-26 | 2009-02-19 | David Sprinzak | Sample enclosure for inspection and methods of use thereof |
| NL1027025C2 (nl) * | 2004-09-13 | 2006-03-14 | Univ Delft Tech | Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan. |
| US7381970B2 (en) * | 2005-01-31 | 2008-06-03 | Summer Schneider | Specimen stage for charged-particle scanning microscopy |
| US20060172315A1 (en) * | 2005-02-01 | 2006-08-03 | Anderson Amy L | Methods for staining cells for identification and sorting |
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| CN118348039B (zh) * | 2024-05-06 | 2025-11-07 | 中国科学院上海高等研究院 | 一种扫描电镜原位厚液层的液体环境样品的显微分析方法 |
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2001
- 2001-11-30 AU AU2101902A patent/AU2101902A/xx active Pending
- 2001-11-30 CZ CZ20031455A patent/CZ20031455A3/cs unknown
- 2001-11-30 IL IL15602701A patent/IL156027A0/xx active IP Right Grant
- 2001-11-30 AT AT01998987T patent/ATE510298T1/de not_active IP Right Cessation
- 2001-11-30 CN CNA018199062A patent/CN1511332A/zh active Pending
- 2001-11-30 CA CA002436237A patent/CA2436237A1/en not_active Abandoned
- 2001-11-30 WO PCT/IL2001/001108 patent/WO2002045125A1/en not_active Ceased
- 2001-11-30 JP JP2002547196A patent/JP4153303B2/ja not_active Expired - Fee Related
- 2001-11-30 EP EP01998987A patent/EP1340241B1/en not_active Expired - Lifetime
- 2001-11-30 AU AU2002221019A patent/AU2002221019B2/en not_active Ceased
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2003
- 2003-05-27 US US10/448,313 patent/US6992300B2/en not_active Expired - Lifetime
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2004
- 2004-05-06 US US10/841,769 patent/US6989542B2/en not_active Expired - Lifetime
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2005
- 2005-08-19 US US11/207,611 patent/US7253418B2/en not_active Expired - Fee Related
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2008
- 2008-04-03 JP JP2008097275A patent/JP2008171830A/ja active Pending
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| AU2002221019B2 (en) | 2007-02-08 |
| US6992300B2 (en) | 2006-01-31 |
| US6989542B2 (en) | 2006-01-24 |
| US20040217297A1 (en) | 2004-11-04 |
| JP2004515049A (ja) | 2004-05-20 |
| EP1340241A4 (en) | 2009-01-14 |
| AU2101902A (en) | 2002-06-11 |
| IL156027A0 (en) | 2003-12-23 |
| US20060033038A1 (en) | 2006-02-16 |
| JP2008171830A (ja) | 2008-07-24 |
| US20040046120A1 (en) | 2004-03-11 |
| JP4153303B2 (ja) | 2008-09-24 |
| EP1340241B1 (en) | 2011-05-18 |
| EP1340241A1 (en) | 2003-09-03 |
| US7253418B2 (en) | 2007-08-07 |
| ATE510298T1 (de) | 2011-06-15 |
| CN1511332A (zh) | 2004-07-07 |
| CA2436237A1 (en) | 2002-06-06 |
| WO2002045125A1 (en) | 2002-06-06 |
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