IL156027A0 - Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope - Google Patents

Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope

Info

Publication number
IL156027A0
IL156027A0 IL15602701A IL15602701A IL156027A0 IL 156027 A0 IL156027 A0 IL 156027A0 IL 15602701 A IL15602701 A IL 15602701A IL 15602701 A IL15602701 A IL 15602701A IL 156027 A0 IL156027 A0 IL 156027A0
Authority
IL
Israel
Prior art keywords
electron microscope
scanning electron
examination
samples
vacuum environment
Prior art date
Application number
IL15602701A
Other languages
English (en)
Original Assignee
El Mul Technologies Ltd
Yeda Res & Dev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by El Mul Technologies Ltd, Yeda Res & Dev filed Critical El Mul Technologies Ltd
Publication of IL156027A0 publication Critical patent/IL156027A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2807—X-rays

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
IL15602701A 2000-12-01 2001-11-30 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope IL156027A0 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25087900P 2000-12-01 2000-12-01
US30645801P 2001-07-20 2001-07-20
PCT/IL2001/001108 WO2002045125A1 (en) 2000-12-01 2001-11-30 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope

Publications (1)

Publication Number Publication Date
IL156027A0 true IL156027A0 (en) 2003-12-23

Family

ID=26941209

Family Applications (1)

Application Number Title Priority Date Filing Date
IL15602701A IL156027A0 (en) 2000-12-01 2001-11-30 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope

Country Status (10)

Country Link
US (3) US6992300B2 (enExample)
EP (1) EP1340241B1 (enExample)
JP (2) JP4153303B2 (enExample)
CN (1) CN1511332A (enExample)
AT (1) ATE510298T1 (enExample)
AU (2) AU2101902A (enExample)
CA (1) CA2436237A1 (enExample)
CZ (1) CZ20031455A3 (enExample)
IL (1) IL156027A0 (enExample)
WO (1) WO2002045125A1 (enExample)

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AU2101902A (en) 2002-06-11
US7253418B2 (en) 2007-08-07
WO2002045125A1 (en) 2002-06-06
ATE510298T1 (de) 2011-06-15
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EP1340241B1 (en) 2011-05-18
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