JP6364167B2 - 環境制御型荷電粒子観察システム - Google Patents
環境制御型荷電粒子観察システム Download PDFInfo
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- JP6364167B2 JP6364167B2 JP2013202952A JP2013202952A JP6364167B2 JP 6364167 B2 JP6364167 B2 JP 6364167B2 JP 2013202952 A JP2013202952 A JP 2013202952A JP 2013202952 A JP2013202952 A JP 2013202952A JP 6364167 B2 JP6364167 B2 JP 6364167B2
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- Prior art keywords
- sample
- charged particle
- sample holder
- gas
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/18—Vacuum control means
- H01J2237/188—Differential pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2806—Secondary charged particle
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04664—Failure or abnormal function
- H01M8/04671—Failure or abnormal function of the individual fuel cell
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
2 荷電粒子装置試料室
3 試料ホールダ先端キャップ
4 試料ホールダ
5 真空ポンプ
6 バルブ
7ガス圧コントロールバルブ
8 微小圧力測定素子用接続コネクタ
9 試料加熱用接続コネクタ
10 ガス貯蔵部
11 圧力計
12試料加熱用温度コントロールユニット
13 二次電子検出器
14画像表示部
15 二次電子
16 加熱用ヒータ(試料搭載部)
17 加熱用ヒータ固定ネジ
18 荷電粒子通路孔(微小オリフィス)
19 荷電粒子通路兼ガス排気孔
20 試料
21 Oリング
22 試料ホールダ先端キャップ固定用ネジ
23 ガス排気孔
24 微小圧力測定素子
25 ガス排出用パイプ
26 ガス導入用パイプ
27 試料ホールダ先端キャップ固定用ネジ穴
28 荷電粒子源
29 コンデンサレンズA
30 コンデンサレンズB
31 荷電粒子通路兼ガス排気孔
32 隔膜
33 試料ホールダ先端キャップ保管箱
34 マイクロプローブ
35 荷電粒子B
Claims (8)
- 荷電粒子装置の試料室において、試料近傍を大気圧環境に制御するためのガス導入パイ
プとガス排出用パイプを有し、第一の荷電粒子通路孔と試料から発せられる二次電子が通過可能な微小オリフィスを試料上部に共有し、試料上部の微小オリフィスよりも穴径を大きくすることでガス導入時の排気を積極的に行える第二の荷電粒子通路孔を試料下部に有する試料ホールダ。 - 上記請求項1において、
試料を加熱できるヒータを有することにより、試料加熱時おけるガス雰囲気中での試料
の状態を観察可能な試料ホールダ。 - 上記請求項1において、
試料下部に位置する前記第二の荷電粒子通路孔とは別にガス排気孔を1個以上有する試料ホールダ。 - 上記請求項1において、
試料近傍の圧力を確認するための微小圧力測定素子を有する試料ホールダ。 - 荷電粒子装置において、荷電粒子発生源から発する荷電粒子の照射方向と試料中心が同
軸上に位置しないよう配置された荷電粒子通路孔と、試料近傍を大気圧環境に制御するためのガス導入パイプとガス排出用パイプを有し、前記荷電粒子通路孔と試料から発せられる二次電子が通過可能な微小オリフィスを試料の上方または下方のいずれか一方側に共有し、試料に対し前記微小オリフィスの反対側に荷電粒子が透過可能な隔膜を有する試料ホールダ。 - 上記請求項5において、
前記微小オリフィスと前記隔膜を有する試料ホールダ先端部キャップを、試料を覆うように取り付けることにより、前記試料に対する前記微小オリフィスと前記隔膜との位置関係を上下に入れ替えられる試料ホールダ。 - 上記請求項1において、
前記試料ホールダ先端に取り付ける試料ホールダ先端部のキャップは、微小オリフィスの穴径が異なるものを複数準備することで、目的に応じて選択が可能な試料ホールダ。 - 上記請求項1または請求項5において、
異なる荷電粒子により加工から観察まで一連の流れを行うことができ、荷電粒子の照射
方向に対し任意に試料方向を変更できる構造を有する試料ホールダ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013202952A JP6364167B2 (ja) | 2013-09-30 | 2013-09-30 | 環境制御型荷電粒子観察システム |
PCT/JP2014/063148 WO2015045477A1 (ja) | 2013-09-30 | 2014-05-19 | 試料ホールダ及び荷電粒子装置 |
DE112014003586.6T DE112014003586B4 (de) | 2013-09-30 | 2014-05-19 | Probenhalter und mit geladenen Teilchen arbeitende Vorrichtung |
US14/912,553 US9721752B2 (en) | 2013-09-30 | 2014-05-19 | Sample holder and charged particle device |
CN201480046171.6A CN105493225B (zh) | 2013-09-30 | 2014-05-19 | 试样支架以及带电粒子装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013202952A JP6364167B2 (ja) | 2013-09-30 | 2013-09-30 | 環境制御型荷電粒子観察システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015069832A JP2015069832A (ja) | 2015-04-13 |
JP6364167B2 true JP6364167B2 (ja) | 2018-07-25 |
Family
ID=52742636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013202952A Active JP6364167B2 (ja) | 2013-09-30 | 2013-09-30 | 環境制御型荷電粒子観察システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US9721752B2 (ja) |
JP (1) | JP6364167B2 (ja) |
CN (1) | CN105493225B (ja) |
DE (1) | DE112014003586B4 (ja) |
WO (1) | WO2015045477A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016022458A1 (en) * | 2014-08-03 | 2016-02-11 | Protochips, Inc. | Method for safe control of gas delivery to an electron microscope sample holder |
WO2018207309A1 (ja) * | 2017-05-11 | 2018-11-15 | 株式会社日立ハイテクノロジーズ | 試料ホルダ、電子顕微鏡 |
WO2019010390A1 (en) * | 2017-07-06 | 2019-01-10 | Protochips, Inc. | ELECTRONIC MICROSCOPE SAMPLE HOLDER FLUID MANAGEMENT WITH INDEPENDENT PRESSURE AND FLOW CONTROL |
Family Cites Families (20)
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HU168264B (ja) * | 1974-03-28 | 1976-03-28 | ||
US4071766A (en) * | 1974-03-28 | 1978-01-31 | Mta Kozponti Kemiai Kutato Intezet | Micro-chamber for electron optical examinations particularly for the electron microscopic examination of biological objects |
US4705949A (en) * | 1985-11-25 | 1987-11-10 | The United States Of America As Represented By The Secretary Of Commerce | Method and apparatus relating to specimen cells for scanning electron microscopes |
US5225683A (en) * | 1990-11-30 | 1993-07-06 | Jeol Ltd. | Detachable specimen holder for transmission electron microscope |
US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
JP3762601B2 (ja) * | 2000-01-17 | 2006-04-05 | シャープ株式会社 | 電子顕微鏡用試料ホルダ、および、電子顕微鏡観察方法 |
CN1511332A (zh) * | 2000-12-01 | 2004-07-07 | Ү���о�����չ����˾ | 采用扫描电子显微镜在非真空环境下检验样品的装置和方法 |
IL150056A0 (en) * | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
JP2005529341A (ja) * | 2002-06-05 | 2005-09-29 | クアントミックス・リミテッド | サンプルを含む流体のsem検査のための方法 |
GB0318134D0 (en) * | 2003-08-01 | 2003-09-03 | Gatan Uk | Specimen tip and tip holder assembly |
KR100661986B1 (ko) | 2005-05-09 | 2006-12-27 | 리 빙-환 | 진공 또는 저압 환경에서의 기체 조작 및 이의 관찰을 위한장치 |
TW200639901A (en) * | 2005-05-09 | 2006-11-16 | Li Bing Huan | Device for operating gas in vacuum or low-pressure environment and for observation of the operation |
JP4850654B2 (ja) * | 2006-10-23 | 2012-01-11 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および荷電粒子線装置用試料保持装置 |
EP2105944A1 (en) * | 2008-03-28 | 2009-09-30 | FEI Company | Environmental cell for a particle-optical apparatus |
JP5124507B2 (ja) * | 2009-02-16 | 2013-01-23 | 株式会社日立ハイテクノロジーズ | 電子線装置および電子線装置用試料保持装置 |
JP2011014244A (ja) * | 2009-06-30 | 2011-01-20 | Hitachi High-Technologies Corp | 荷電粒子銃及び荷電粒子線装置 |
JP5560033B2 (ja) * | 2009-12-21 | 2014-07-23 | 株式会社日立ハイテクノロジーズ | 冷却試料ホールダ及び試料の冷却加工方法 |
JP5260575B2 (ja) | 2010-02-24 | 2013-08-14 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡、および試料ホルダ |
US9159530B2 (en) * | 2011-03-04 | 2015-10-13 | Hitachi High-Technologies Corporation | Electron microscope sample holder and sample observation method |
JP5824262B2 (ja) | 2011-07-08 | 2015-11-25 | 日本電子株式会社 | 試料観察方法および圧力測定用ホルダ |
-
2013
- 2013-09-30 JP JP2013202952A patent/JP6364167B2/ja active Active
-
2014
- 2014-05-19 WO PCT/JP2014/063148 patent/WO2015045477A1/ja active Application Filing
- 2014-05-19 CN CN201480046171.6A patent/CN105493225B/zh active Active
- 2014-05-19 DE DE112014003586.6T patent/DE112014003586B4/de not_active Expired - Fee Related
- 2014-05-19 US US14/912,553 patent/US9721752B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9721752B2 (en) | 2017-08-01 |
DE112014003586B4 (de) | 2017-04-06 |
CN105493225A (zh) | 2016-04-13 |
JP2015069832A (ja) | 2015-04-13 |
US20160211109A1 (en) | 2016-07-21 |
DE112014003586T5 (de) | 2016-06-02 |
CN105493225B (zh) | 2017-11-17 |
WO2015045477A1 (ja) | 2015-04-02 |
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