JP2015069832A - 環境制御型荷電粒子観察システム - Google Patents
環境制御型荷電粒子観察システム Download PDFInfo
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- JP2015069832A JP2015069832A JP2013202952A JP2013202952A JP2015069832A JP 2015069832 A JP2015069832 A JP 2015069832A JP 2013202952 A JP2013202952 A JP 2013202952A JP 2013202952 A JP2013202952 A JP 2013202952A JP 2015069832 A JP2015069832 A JP 2015069832A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/18—Vacuum control means
- H01J2237/188—Differential pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2806—Secondary charged particle
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04298—Processes for controlling fuel cells or fuel cell systems
- H01M8/04313—Processes for controlling fuel cells or fuel cell systems characterised by the detection or assessment of variables; characterised by the detection or assessment of failure or abnormal function
- H01M8/04664—Failure or abnormal function
- H01M8/04671—Failure or abnormal function of the individual fuel cell
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
2 荷電粒子装置試料室
3 試料ホールダ先端キャップ
4 試料ホールダ
5 真空ポンプ
6 バルブ
7ガス圧コントロールバルブ
8 微小圧力測定素子用接続コネクタ
9 試料加熱用接続コネクタ
10 ガス貯蔵部
11 圧力計
12試料加熱用温度コントロールユニット
13 二次電子検出器
14画像表示部
15 二次電子
16 加熱用ヒータ(試料搭載部)
17 加熱用ヒータ固定ネジ
18 荷電粒子通路孔(微小オリフィス)
19 荷電粒子通路兼ガス排気孔
20 試料
21 Oリング
22 試料ホールダ先端キャップ固定用ネジ
23 ガス排気孔
24 微小圧力測定素子
25 ガス排出用パイプ
26 ガス導入用パイプ
27 試料ホールダ先端キャップ固定用ネジ穴
28 荷電粒子源
29 コンデンサレンズA
30 コンデンサレンズB
31 荷電粒子通路兼ガス排気孔
32 隔膜
33 試料ホールダ先端キャップ保管箱
34 マイクロプローブ
35 荷電粒子B
Claims (9)
- 荷電粒子装置の試料室において、試料近傍を大気圧環境に制御するためのガス導入パイプとガス排出用パイプを有し、荷電粒子通路孔と試料から発せられる二次電子を検出可能な微小オリフィスを試料上部に共有し、試料上部の微小オリフィスよりも穴径を大きくすることでガス導入時の排気を積極的に行える荷電粒子通路孔を有する試料ホールダ。
- 上記請求項1において、
試料を加熱できるヒータを有することにより、試料加熱時おけるガス雰囲気中での試料の状態を観察可能な試料ホールダ。 - 上記請求項1において、
試料下部に位置する荷電粒子通路孔とは別にガス排気孔を1個以上有する試料ホールダ。 - 上記請求項1において、
試料近傍の圧力を確認するための微小圧力測定素子を有する試料ホールダ。 - 荷電粒子装置において、荷電粒子発生源から発する荷電粒子の照射方向と試料中心が同軸上に位置しないよう荷電粒子通路孔が配置された荷電粒子装置と、試料近傍を大気圧環境に制御するためのガス導入パイプとガス排出用パイプを有し、荷電粒子通路孔と試料から発せられる二次電子を検出可能な微小オリフィスを試料上部に共有し、試料下部に荷電粒子が透過可能な隔膜を有する試料ホールダ。
- 上記請求項5において、
試料ホールダ先端部のキャップは、目的に応じ、試料に対し隔膜部分を上下に入れ替えられる構造を有する。 - 上記請求項1において、
試料ホールダ先端部のキャップは、微小オリフィスの穴径が異なるものを複数準備することで、目的に応じて選択が可能な試料ホールダ。 - 上記請求項1または請求項5において、
異なる荷電粒子により加工から観察まで一連の流れを行うことができ、荷電粒子の照射方向に対し任意に試料方向を変更できる構造を有する試料ホールダ。 - 試料を保持する試料保持部と、該試料保持部を内包し、試料近傍の環境を制御し、該試料の上部に所定の大きさの孔を有する環境制御部と、を有する試料ホールダと、
荷電粒子を発生する荷電粒子発生源と、
該荷電粒子発生源から発生した荷電粒子の照射方向を調整するレンズと、
該試料から発生した二次電子を検出する検出器と、
を備え、
前記荷電粒子発生源から照射される荷電粒子の照射方向と前記試料ホールダの前記孔とは軸がずれており、前記荷電粒子発生源から発生した荷電粒子の照射方向を前記レンズによって調整することにより、前記荷電粒子発生源から発生した荷電粒子が前記孔を通って前記試料に照射され、前記試料から発生した二次電子は前記孔を通って前記試料ホールダから放出され、前記検出器によって検出されるように構成されていること、
を特徴とする荷電粒子装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013202952A JP6364167B2 (ja) | 2013-09-30 | 2013-09-30 | 環境制御型荷電粒子観察システム |
US14/912,553 US9721752B2 (en) | 2013-09-30 | 2014-05-19 | Sample holder and charged particle device |
DE112014003586.6T DE112014003586B4 (de) | 2013-09-30 | 2014-05-19 | Probenhalter und mit geladenen Teilchen arbeitende Vorrichtung |
CN201480046171.6A CN105493225B (zh) | 2013-09-30 | 2014-05-19 | 试样支架以及带电粒子装置 |
PCT/JP2014/063148 WO2015045477A1 (ja) | 2013-09-30 | 2014-05-19 | 試料ホールダ及び荷電粒子装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013202952A JP6364167B2 (ja) | 2013-09-30 | 2013-09-30 | 環境制御型荷電粒子観察システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015069832A true JP2015069832A (ja) | 2015-04-13 |
JP6364167B2 JP6364167B2 (ja) | 2018-07-25 |
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ID=52742636
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Application Number | Title | Priority Date | Filing Date |
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JP2013202952A Active JP6364167B2 (ja) | 2013-09-30 | 2013-09-30 | 環境制御型荷電粒子観察システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US9721752B2 (ja) |
JP (1) | JP6364167B2 (ja) |
CN (1) | CN105493225B (ja) |
DE (1) | DE112014003586B4 (ja) |
WO (1) | WO2015045477A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018207309A1 (ja) * | 2017-05-11 | 2018-11-15 | 株式会社日立ハイテクノロジーズ | 試料ホルダ、電子顕微鏡 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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NL2015258A (en) * | 2014-08-03 | 2016-07-07 | Protochips Inc | Method for safe control of gas delivery to an electron microscope sample holder. |
WO2019010390A1 (en) * | 2017-07-06 | 2019-01-10 | Protochips, Inc. | ELECTRONIC MICROSCOPE SAMPLE HOLDER FLUID MANAGEMENT WITH INDEPENDENT PRESSURE AND FLOW CONTROL |
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US5225683A (en) * | 1990-11-30 | 1993-07-06 | Jeol Ltd. | Detachable specimen holder for transmission electron microscope |
JP2011014244A (ja) * | 2009-06-30 | 2011-01-20 | Hitachi High-Technologies Corp | 荷電粒子銃及び荷電粒子線装置 |
WO2012120726A1 (ja) * | 2011-03-04 | 2012-09-13 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡用試料ホルダーおよび試料観察方法 |
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US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
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GB0318134D0 (en) * | 2003-08-01 | 2003-09-03 | Gatan Uk | Specimen tip and tip holder assembly |
TW200639901A (en) * | 2005-05-09 | 2006-11-16 | Li Bing Huan | Device for operating gas in vacuum or low-pressure environment and for observation of the operation |
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-
2013
- 2013-09-30 JP JP2013202952A patent/JP6364167B2/ja active Active
-
2014
- 2014-05-19 US US14/912,553 patent/US9721752B2/en active Active
- 2014-05-19 CN CN201480046171.6A patent/CN105493225B/zh active Active
- 2014-05-19 DE DE112014003586.6T patent/DE112014003586B4/de not_active Expired - Fee Related
- 2014-05-19 WO PCT/JP2014/063148 patent/WO2015045477A1/ja active Application Filing
Patent Citations (3)
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US5225683A (en) * | 1990-11-30 | 1993-07-06 | Jeol Ltd. | Detachable specimen holder for transmission electron microscope |
JP2011014244A (ja) * | 2009-06-30 | 2011-01-20 | Hitachi High-Technologies Corp | 荷電粒子銃及び荷電粒子線装置 |
WO2012120726A1 (ja) * | 2011-03-04 | 2012-09-13 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡用試料ホルダーおよび試料観察方法 |
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WO2018207309A1 (ja) * | 2017-05-11 | 2018-11-15 | 株式会社日立ハイテクノロジーズ | 試料ホルダ、電子顕微鏡 |
Also Published As
Publication number | Publication date |
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DE112014003586B4 (de) | 2017-04-06 |
CN105493225B (zh) | 2017-11-17 |
DE112014003586T5 (de) | 2016-06-02 |
WO2015045477A1 (ja) | 2015-04-02 |
CN105493225A (zh) | 2016-04-13 |
JP6364167B2 (ja) | 2018-07-25 |
US20160211109A1 (en) | 2016-07-21 |
US9721752B2 (en) | 2017-08-01 |
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