JP2016519340A - 勾配層を有する耐擦傷性物品 - Google Patents
勾配層を有する耐擦傷性物品 Download PDFInfo
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- JP2016519340A JP2016519340A JP2016512949A JP2016512949A JP2016519340A JP 2016519340 A JP2016519340 A JP 2016519340A JP 2016512949 A JP2016512949 A JP 2016512949A JP 2016512949 A JP2016512949 A JP 2016512949A JP 2016519340 A JP2016519340 A JP 2016519340A
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
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- C03C2217/21—Oxides
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- C03C2217/00—Coatings on glass
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- C03C2217/00—Coatings on glass
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- C03C2217/00—Coatings on glass
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- C03C2218/00—Methods for coating glass
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- C03C2218/154—Deposition methods from the vapour phase by sputtering
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Abstract
Description
基板110は、非晶質基板、結晶質基板またはそれらの組合せを含んでもよい。基板110は、人工材料および/または天然に存在する材料から形成されてもよい。いくつかの特定の実施形態において、基板110は、プラスチックおよび/または金属基板を特に排除してもよい。1つ以上の実施形態において、基板は、約1.45〜約1.55の範囲の屈折率を示す。特定の実施形態において、基板110は、少なくとも5、少なくとも10、少なくとも15または少なくとも20の試料を使用して、ボールオンリング試験を使用して測定した場合、1つ以上の対向する主要面上の表面において、0.5%以上、0.6%以上、0.7%以上、0.8%以上、0.9%以上、1%以上、1.1%以上、1.2%以上、1.3%以上、1.4%以上1.5%以上または2%以上の破損に対する平均歪みを示してもよい。特定の実施形態において、基板110は、1つ以上の対向する主要面上のその表面において、約1.2%、約1.4%、約1.6%、約1.8%、約2.2%、約2.4%、約2.6%、約2.8%または約3%以上の破損に対する平均歪みを示してもよい。
CSおよびCTの関係は、式(1):
CT=(CS・DOL)/(t−2DOL) (1)
(式中、tはガラス物品の物理的厚さ(μm)である)によって与えられる。本開示の様々な項において、CTおよびCSはメガパスカル(MPa)で表され、物理的厚さtは、マイクロメートル(μm)またはミリメートル(mm)のいずれかで表され、そしてDOLはマイクロメートル(μm)で表される。
図5〜6に示すように、光学フィルム120は、複数の層130、140、150を含んでもよい。追加的な層が光学フィルム120に含まれてもよい。そのうえ、いくつかの実施形態において、1つ以上のフィルムまたは層が、基板110の、光学フィルム120とは反対の側面上に(すなわち、主要表面114に)配置されてもよい。
実施例A1および比較例A2は、約900MPaの圧縮応力および約45μmのDOLを有する化学的に強化されたアルミノボロシリケートガラス基板を提供することによって形成された。実施例A1は、SiuAlvOxNyの組成勾配を含む屈折率勾配を有する光学変性層を含んだ。実施例A1の光学フィルムの組成勾配は、120の副層を使用して形成された。耐擦傷性層は、屈折率勾配副層上で形成された。光学フィルムは、表1で示されるプロセス製法を使用して形成された。表1で示される各「ステップ」は、層または副層に相当する。ステップ0−120の場合、120の副層が形成された。ステップ121において、耐擦傷性層が形成された。比較例A2は、偏光解析法で測定した場合、約502nmの厚さを有する、SiuAlvOxNyの実質的に均一な組成を有する単層を含んだ。比較例A2は、チャンバーに酸素を流さず、そして約3mT(399.9mPa)の圧力を有するチャンバーに、約40sccm(67.6×10−3Pa・m3/秒)のN2および20sccm(33.8×10−3Pa・m3/秒)のArを流すことによって、スパッタリングすることによって形成された。約180WのRFがSiターゲットに供給され、そして約480WのDCがAlターゲットに供給された。析出時間は約7200秒であった。
実施例B1および比較例B2は、強化アルミノシリケートガラス基板を使用して形成された。実施例B1は、実施例A3に使用されるものと同一プロセス製法を使用して形成され、約3μmの厚さを有する光学フィルムを含んだ。比較例EB2は、Al2O3の第1の層(約115nmの厚さを有する)、AlOxNyの第2の層(約2μmの厚さを有する)、およびSiO2の第3の層(約32nmの厚さを有する)を含む3層フィルムを含んだ。比較例B2は、表2Aおよび表2Bで示されるプロセス製法によって形成された。
実施例C1、C2およびC3は、光吸収(したがって、色)に及ぼす光学フィルムの熱処理の影響を評価するために製造された。各実施例C1、C2およびC3は、実施例Aで使用されたものと同一の基板を使用して製造された。SiuAlvOxNyの単層を、各基板上に異なる温度で析出した。フィルムは約1.6の屈折率を有し、約2sccm(3.38×10−3Pa・m3/秒)のアルゴン流、40sccm(67.6×10−3Pa・m3/秒)の窒素流および8sccm(13.52×10−3Pa・m3/秒)の酸素流を使用して製造された。約10mTorr(1333.2mPa)の圧力を有するチャンバー中で、約40WのDC電力をSiターゲットに供給し、そして約480WのDC電力をAlターゲットに供給した。各実施例の析出時間は、30分であり、そして実施例C1、C2およびC3のそれぞれで、フィルムを25℃、100℃および200℃で析出した。
屈折率勾配を有する光学フィルムで実施例D1を調製し、かつそれを含み、上記副層は、ガラス基板の屈折率に近い屈折率を有する。実施例D1は、実施例B〜Cで使用されたものと同一の基板を含み、かつ多孔性Al2O3副層を含む光干渉層を有する光学フィルムを含んだ。多孔性Al2O3副層は、ガラス基板の屈折率と同様の屈折率を有するように、約25℃で9.5e−4Torr(1266.54e−4Pa)のチャンバー圧力を用いて、150sccm(253.5×10−3Pa・m3/秒)の酸素流および100sccm(169×10−3Pa・m3/秒)のアルゴン流の下でeビーム蒸発を使用して形成された。多孔性副層は透明であり、550nmで約1.47の測定された屈折率を示し、これは25〜30%の多孔性度を示す。図15は、実施例D1の屈折率を示す。
モデル化された実施例E1〜E2は、表3で示すように、多孔性勾配および種々の材料の組合せによって形成された屈折率勾配を有する光学フィルムを含んだ。これらのフィルムの密度または多孔性を変化させることによる、これらの種々の材料のために達成可能な屈折率は、単層フィルム析出実験を通して、変化された、または制御されたチャンバー圧力および/または析出速度でeビーム蒸発を使用することによって実験的に確立された。モデル化された実施例E1は、多孔性勾配を有するAl2O3の第1の副層を含み、約1.51〜約1.6の屈折率勾配範囲を提供した。モデル化された実施例E1は、多孔性勾配を有するTa2O5の第2の副層も含み、約1.6〜1.95の屈折率勾配範囲を提供した。モデル化された実施例E2は、Y2O3の第1の副層およびTa2O5の第2の副層を含み、約1.45〜約2.0の屈折率勾配を提供した。
実施例F1〜F3は、屈折率勾配を有する光学変性層、耐擦傷性層およびキャッピング層を有する光学フィルムを含む、物品の反射率スペクトルおよび色シフトを理解するためのモデリングを使用した。モデリングは、様々な材料および強化アルミノボロシリケート(「ABS」)ガラス基板から形成された層から収集された屈折率データをベースとした。
実施例G1〜G3は、耐擦傷性層の種々の厚さの影響が物品の硬度および光学特性にあるかどうかを評価するために製造された。実施例G1〜G5は、それぞれ、実施例Bで使用されたものと同一の基板および上記実施例におけるものと同様のAJAスパッタリング析出プロセス、さらに以下に記載するプロセスパラメーターを使用して製造された。実施例G1は、ABS基板上に配置されるSiuAlvOxNyを含む光学フィルムを含んだ。SiuAlvOxNy光学フィルムは、アルミニウム含有量勾配および酸素含有量勾配を含み、これは、約1.51〜約2.0の範囲のSiuAlvOxNyフィルムの屈折率勾配をもたらした。プロフィロメトリーで測定した場合、SiuAlvOxNyフィルムの全厚さは約2.26μmであった。実施例G1の光学フィルムは、(約100nm以上の厚さにおいて均一な屈折率または組成を有するいずれの層も含む)他のいずれの層も含まず、表11で示すように、硬度およびヤング率に関して試験された。実施例G1の光学フィルムは、本明細書に記載されるスパッタリングプロセスを使用して形成された。実施例G1を形成するためのプロセス条件は表12で示され、これには、アルゴン、酸素および窒素ガスの流速、ならびにAlおよび/またはSiターゲットに供給される電力(RFまたはDC)が含まれる。
Claims (10)
- 表面を有する基板と、
前記表面上に配置されて、コーティングされた表面を形成する光学フィルムであって、前記基板上に配置された第1の屈折率を有する第1の表面と、前記第1の屈折率より高い屈折率を有する第2の表面とを備えた光学フィルムと、
を含む物品において、
前記物品が、Berkovitchインデンターで、前記コーティングされた表面にインデントをつけ、前記コーティングされた表面の前記表面から少なくとも約100nmのインデント深さを有するインデントを形成することによって測定した場合、約12GPa〜約30GPaの硬度を有し、
前記物品が、光学波長域において少なくとも80%の平均透過率を示し、かつAシリーズ発光物、Bシリーズ発光物、Cシリーズ発光物、Dシリーズ発光物およびFシリーズ発光物からなる群から選択される国際照明委員会発光物の下、直入射から約2度〜約60度の範囲の入射照明角度で見た場合、約2以下の色シフトを示し、
色シフトが、方程式√((a*2−a*1)2+(b*2−b*1)2)(式中、a*1およびb*1は、直入射で見た時の前記物品の座標を表し、かつa*2およびb*2は、前記入射照明角度で見た時の前記物品の座標を表す)を使用して算出されることを特徴とする物品。 - 前記物品が、光学波長域において約10パーセントポイント以下の平均振動振幅を有する平均透過率または平均反射率であって、前記光学波長域における約100nmの選択された波長における前記透過率が、約5パーセントポイントの最大振動振幅を有し、前記光学波長域における約100nmの選択された波長における前記透過率が、約3パーセントポイントの最大振動振幅を有する、平均透過率または平均反射率のいずれか1つを示すことを特徴とする、請求項1に記載の物品。
- 前記光学フィルムが、約0.5μm〜約3μmの範囲の厚さを有することを特徴とする、請求項1または2に記載の物品。
- 前記光学フィルムが、約0.2/μm〜約0.5/μmの範囲の平均レートで、前記厚さに沿って前記第1の表面から前記第2の表面まで増加する屈折率を含む屈折率勾配を有することを特徴とする、請求項1〜3のいずれか一項に記載の物品。
- 前記光学フィルムが光学変性層を備え、前記光学変性層が、前記第1の表面と、前記第1の表面の反対の前記第2の表面とを含むことを特徴とする、請求項1〜4のいずれか一項に記載の物品。
- 前記光学フィルムが耐擦傷性層をさらに備えることを特徴とする、請求項1〜5のいずれか一項に記載の物品。
- 基板表面を有する基板と、
前記表面上に配置されて、コーティングされた表面を形成する光学フィルムと
を含む物品において、
前記光学フィルムが、Si、Al、NおよびOの少なくとも2つを含んでなる組成勾配を含み、
前記物品が、Berkovitchインデンターで、前記コーティングされた表面にインデントをつけ、前記コーティングされた表面の前記表面から少なくとも約100nmのインデント深さを有するインデントを形成することによって前記コーティングされた表面上で測定した場合、約12GPa〜約30GPaの範囲の硬度を示し、
前記物品が、光学波長域において少なくとも80%の平均透過率を示し、かつAシリーズ発光物、Bシリーズ発光物、Cシリーズ発光物、Dシリーズ発光物およびFシリーズ発光物からなる群から選択される国際照明委員会発光物の下、直入射から約2度〜約60度の範囲の入射照明角度で見た場合、約2以下の色シフトを示し、
色シフトが、方程式√((a*2−a*1)2+(b*2−b*1)2)(式中、a*1およびb*1は、直入射で見た時の前記物品の座標を表し、かつa*2およびb*2は、前記入射照明角度で見た時の前記物品の座標を表す)を使用して算出されることを特徴とする物品。 - 前記光学フィルムが、前記基板表面に隣接する第1の表面と、第2の表面と、前記第1の表面から前記第2の表面まで延在する屈折率勾配とを含み、前記第2の表面における前記屈折率が、前記第1の表面の前記屈折率より高いことを特徴とする、請求項7に記載の物品。
- 前記屈折率勾配が、プラスの勾配を含み、かつ約1.5〜約2.0の範囲にあることを特徴とする、請求項8に記載の物品。
- 前記光学フィルムが、多孔性勾配、密度勾配および弾性率勾配の少なくとも1つから選択される勾配を含んでなることを特徴とする、請求項7〜9のいずれか一項に記載の物品。
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US9703011B2 (en) | 2017-07-11 |
EP2994783A1 (en) | 2016-03-16 |
KR20210037751A (ko) | 2021-04-06 |
US20140334006A1 (en) | 2014-11-13 |
KR20160005076A (ko) | 2016-01-13 |
CN105408774B (zh) | 2018-04-17 |
TW201520585A (zh) | 2015-06-01 |
KR102382056B1 (ko) | 2022-04-01 |
WO2014182520A1 (en) | 2014-11-13 |
CN108585479B (zh) | 2021-10-08 |
CN105408774A (zh) | 2016-03-16 |
US20170269266A1 (en) | 2017-09-21 |
TWI610087B (zh) | 2018-01-01 |
JP2019035984A (ja) | 2019-03-07 |
CN108585479A (zh) | 2018-09-28 |
KR102236343B1 (ko) | 2021-04-06 |
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