JP2014523112A5 - - Google Patents

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JP2014523112A5
JP2014523112A5 JP2014515843A JP2014515843A JP2014523112A5 JP 2014523112 A5 JP2014523112 A5 JP 2014523112A5 JP 2014515843 A JP2014515843 A JP 2014515843A JP 2014515843 A JP2014515843 A JP 2014515843A JP 2014523112 A5 JP2014523112 A5 JP 2014523112A5
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substrate
mask
water
layer
soluble
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JP2014515843A
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JP2014523112A (ja
JP6357099B2 (ja
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JP2014515843A 2011-06-15 2012-05-25 レーザ・プラズマエッチングによる基板のダイシング用水溶性マスク Active JP6357099B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/160,891 2011-06-15
US13/160,891 US8703581B2 (en) 2011-06-15 2011-06-15 Water soluble mask for substrate dicing by laser and plasma etch
PCT/US2012/039746 WO2012173768A2 (en) 2011-06-15 2012-05-25 Water soluble mask for substrate dicing by laser and plasma etch

Related Child Applications (1)

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JP2015063684A Division JP6113214B2 (ja) 2011-06-15 2015-03-26 レーザ・プラズマエッチングによる基板のダイシング用水溶性マスク

Publications (3)

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JP2014523112A JP2014523112A (ja) 2014-09-08
JP2014523112A5 true JP2014523112A5 (enExample) 2015-03-12
JP6357099B2 JP6357099B2 (ja) 2018-07-11

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JP2014515843A Active JP6357099B2 (ja) 2011-06-15 2012-05-25 レーザ・プラズマエッチングによる基板のダイシング用水溶性マスク
JP2015063684A Active JP6113214B2 (ja) 2011-06-15 2015-03-26 レーザ・プラズマエッチングによる基板のダイシング用水溶性マスク

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JP2015063684A Active JP6113214B2 (ja) 2011-06-15 2015-03-26 レーザ・プラズマエッチングによる基板のダイシング用水溶性マスク

Country Status (6)

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US (2) US8703581B2 (enExample)
JP (2) JP6357099B2 (enExample)
KR (2) KR102036728B1 (enExample)
CN (3) CN103563054A (enExample)
TW (2) TWI541881B (enExample)
WO (1) WO2012173768A2 (enExample)

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