JP2008263215A - 研磨液及び研磨方法 - Google Patents
研磨液及び研磨方法 Download PDFInfo
- Publication number
- JP2008263215A JP2008263215A JP2008143402A JP2008143402A JP2008263215A JP 2008263215 A JP2008263215 A JP 2008263215A JP 2008143402 A JP2008143402 A JP 2008143402A JP 2008143402 A JP2008143402 A JP 2008143402A JP 2008263215 A JP2008263215 A JP 2008263215A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- polishing
- polishing liquid
- skeleton
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 312
- 239000007788 liquid Substances 0.000 title claims abstract description 99
- 238000007517 polishing process Methods 0.000 title description 7
- 229910052751 metal Inorganic materials 0.000 claims abstract description 98
- 239000002184 metal Substances 0.000 claims abstract description 98
- 150000001875 compounds Chemical class 0.000 claims abstract description 53
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 29
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 29
- 239000007800 oxidant agent Substances 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- ZRALSGWEFCBTJO-UHFFFAOYSA-N guanidine group Chemical group NC(=N)N ZRALSGWEFCBTJO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 125000002883 imidazolyl group Chemical group 0.000 claims abstract description 8
- 125000000714 pyrimidinyl group Chemical group 0.000 claims abstract description 8
- 150000007824 aliphatic compounds Chemical class 0.000 claims abstract description 7
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical group C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 150000001491 aromatic compounds Chemical class 0.000 claims abstract description 5
- 125000003226 pyrazolyl group Chemical group 0.000 claims abstract description 5
- 239000010410 layer Substances 0.000 claims description 73
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 66
- 239000002253 acid Substances 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 53
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 45
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 claims description 44
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 claims description 42
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims description 42
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 claims description 42
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims description 36
- 230000004888 barrier function Effects 0.000 claims description 36
- 239000004744 fabric Substances 0.000 claims description 34
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 31
- 239000011229 interlayer Substances 0.000 claims description 31
- 239000010949 copper Substances 0.000 claims description 27
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims description 27
- 239000002904 solvent Substances 0.000 claims description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 25
- 229910052802 copper Inorganic materials 0.000 claims description 25
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 claims description 24
- 150000007513 acids Chemical class 0.000 claims description 24
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 23
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 claims description 22
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 claims description 22
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 claims description 22
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- 239000011975 tartaric acid Substances 0.000 claims description 22
- 235000002906 tartaric acid Nutrition 0.000 claims description 22
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims description 21
- 239000001530 fumaric acid Substances 0.000 claims description 21
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- 239000004310 lactic acid Substances 0.000 claims description 21
- 235000014655 lactic acid Nutrition 0.000 claims description 21
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 claims description 20
- 239000001630 malic acid Substances 0.000 claims description 20
- 235000011090 malic acid Nutrition 0.000 claims description 20
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 claims description 18
- 239000001361 adipic acid Substances 0.000 claims description 18
- 235000011037 adipic acid Nutrition 0.000 claims description 18
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 claims description 18
- 150000003863 ammonium salts Chemical class 0.000 claims description 14
- 239000012964 benzotriazole Substances 0.000 claims description 14
- -1 2-ethyl Chemical group 0.000 claims description 13
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 13
- 239000000377 silicon dioxide Substances 0.000 claims description 13
- 150000002148 esters Chemical class 0.000 claims description 12
- 229920003169 water-soluble polymer Polymers 0.000 claims description 12
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 11
- 150000003852 triazoles Chemical group 0.000 claims description 11
- 229910052721 tungsten Inorganic materials 0.000 claims description 10
- 239000010937 tungsten Substances 0.000 claims description 10
- XLSZMDLNRCVEIJ-UHFFFAOYSA-N 4-methylimidazole Chemical compound CC1=CNC=N1 XLSZMDLNRCVEIJ-UHFFFAOYSA-N 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 8
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 8
- LLPKQRMDOFYSGZ-UHFFFAOYSA-N 2,5-dimethyl-1h-imidazole Chemical compound CC1=CN=C(C)N1 LLPKQRMDOFYSGZ-UHFFFAOYSA-N 0.000 claims description 6
- NSPMIYGKQJPBQR-UHFFFAOYSA-N 4H-1,2,4-triazole Chemical compound C=1N=CNN=1 NSPMIYGKQJPBQR-UHFFFAOYSA-N 0.000 claims description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 6
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 6
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 claims description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical compound NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910001080 W alloy Inorganic materials 0.000 claims description 5
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 5
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 5
- 229920002401 polyacrylamide Polymers 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- ASOKPJOREAFHNY-UHFFFAOYSA-N 1-Hydroxybenzotriazole Chemical compound C1=CC=C2N(O)N=NC2=C1 ASOKPJOREAFHNY-UHFFFAOYSA-N 0.000 claims description 4
- QWENRTYMTSOGBR-UHFFFAOYSA-N 1H-1,2,3-Triazole Chemical compound C=1C=NNN=1 QWENRTYMTSOGBR-UHFFFAOYSA-N 0.000 claims description 4
- SLLDUURXGMDOCY-UHFFFAOYSA-N 2-butyl-1h-imidazole Chemical compound CCCCC1=NC=CN1 SLLDUURXGMDOCY-UHFFFAOYSA-N 0.000 claims description 4
- PQAMFDRRWURCFQ-UHFFFAOYSA-N 2-ethyl-1h-imidazole Chemical compound CCC1=NC=CN1 PQAMFDRRWURCFQ-UHFFFAOYSA-N 0.000 claims description 4
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 claims description 4
- QZHOHUNTQUNLLN-UHFFFAOYSA-N 2-methylsulfanyl-5,7-diphenyl-[1,2,4]triazolo[1,5-a]pyrimidine Chemical compound N12N=C(SC)N=C2N=C(C=2C=CC=CC=2)C=C1C1=CC=CC=C1 QZHOHUNTQUNLLN-UHFFFAOYSA-N 0.000 claims description 4
- FUOZJYASZOSONT-UHFFFAOYSA-N 2-propan-2-yl-1h-imidazole Chemical compound CC(C)C1=NC=CN1 FUOZJYASZOSONT-UHFFFAOYSA-N 0.000 claims description 4
- MKBBSFGKFMQPPC-UHFFFAOYSA-N 2-propyl-1h-imidazole Chemical compound CCCC1=NC=CN1 MKBBSFGKFMQPPC-UHFFFAOYSA-N 0.000 claims description 4
- LRUDIIUSNGCQKF-UHFFFAOYSA-N 5-methyl-1H-benzotriazole Chemical compound C1=C(C)C=CC2=NNN=C21 LRUDIIUSNGCQKF-UHFFFAOYSA-N 0.000 claims description 4
- LHCPRYRLDOSKHK-UHFFFAOYSA-N 7-deaza-8-aza-adenine Chemical compound NC1=NC=NC2=C1C=NN2 LHCPRYRLDOSKHK-UHFFFAOYSA-N 0.000 claims description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 4
- 239000005751 Copper oxide Substances 0.000 claims description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 4
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- SRNKZYRMFBGSGE-UHFFFAOYSA-N [1,2,4]triazolo[1,5-a]pyrimidine Chemical compound N1=CC=CN2N=CN=C21 SRNKZYRMFBGSGE-UHFFFAOYSA-N 0.000 claims description 4
- 229910000431 copper oxide Inorganic materials 0.000 claims description 4
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- 239000005017 polysaccharide Substances 0.000 claims description 4
- 150000003839 salts Chemical class 0.000 claims description 4
- 150000003482 tantalum compounds Chemical class 0.000 claims description 4
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- POFDSYGXHVPQNX-UHFFFAOYSA-N triazolo[1,5-a]pyrimidine Chemical compound C1=CC=NC2=CN=NN21 POFDSYGXHVPQNX-UHFFFAOYSA-N 0.000 claims description 4
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- MLIWQXBKMZNZNF-KUHOPJCQSA-N (2e)-2,6-bis[(4-azidophenyl)methylidene]-4-methylcyclohexan-1-one Chemical compound O=C1\C(=C\C=2C=CC(=CC=2)N=[N+]=[N-])CC(C)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 MLIWQXBKMZNZNF-KUHOPJCQSA-N 0.000 claims description 3
- OWRCNXZUPFZXOS-UHFFFAOYSA-N 1,3-diphenylguanidine Chemical compound C=1C=CC=CC=1NC(=N)NC1=CC=CC=C1 OWRCNXZUPFZXOS-UHFFFAOYSA-N 0.000 claims description 3
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- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
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- C09G1/02—Polishing compositions containing abrasives or grinding agents
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/04—Aqueous dispersions
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
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- C09K3/1463—Aqueous liquid suspensions
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- C—CHEMISTRY; METALLURGY
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- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- ing And Chemical Polishing (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Disintegrating Or Milling (AREA)
Abstract
【解決手段】(イ)酸化剤、(ロ)酸化金属溶解剤、(ハ)金属防食剤、及び水を含有し、pHが2〜5である研磨液であって、
(ハ)金属防食剤が、トリアゾール骨格を有する芳香族化合物の群から選ばれた1種以上と、トリアゾール骨格を有する脂肪族化合物、ピリミジン骨格を有する化合物、イミダゾール骨格を有する化合物、グアニジン骨格を有する化合物、チアゾール骨格を有する化合物及びピラゾール骨格を有する化合物の群から選ばれた1種以上とを含む研磨液。
【選択図】なし
Description
(ハ)金属防食剤が、トリアゾール骨格を有する芳香族化合物の群(C群)から選ばれた1種以上と、トリアゾール骨格を有する脂肪族化合物、ピリミジン骨格を有する化合物、イミダゾール骨格を有する化合物、グアニジン骨格を有する化合物、チアゾール骨格を有する化合物及びピラゾール骨格を有する化合物の群(D群)から選ばれた1種以上とを含む研磨液。
マロン酸とコハク酸、マロン酸とグルタル酸、マロン酸とアジピン酸、マロン酸と乳酸、マロン酸とフマル酸、マロン酸とフタル酸、クエン酸とコハク酸、クエン酸とグルタル酸、クエン酸とアジピン酸、クエン酸と乳酸、クエン酸とフマル酸、クエン酸とフタル酸、リンゴ酸とコハク酸、リンゴ酸とグルタル酸、リンゴ酸とアジピン酸、リンゴ酸と乳酸、リンゴ酸とフマル酸、リンゴ酸とフタル酸、グリコール酸とコハク酸、グリコール酸とグルタル酸、グリコール酸とアジピン酸、グリコール酸と乳酸、グリコール酸とフマル酸、グリコール酸とフタル酸、酒石酸とコハク酸、酒石酸とグルタル酸、酒石酸とアジピン酸、酒石酸と乳酸、酒石酸とフマル酸、酒石酸とフタル酸。
(ハ)金属防食剤として上記C群から選ばれた1種以上及び上記D群から選ばれた1種以上を含むこととの少なくとも一方を満たす研磨液であることを特徴とする。
ポリアスパラギン酸、ポリグルタミン酸、ポリリシン、ポリリンゴ酸、ポリメタクリル酸、ポリアミド酸、ポリマレイン酸、ポリイタコン酸、ポリフマル酸、ポリ(p−スチレンカルボン酸)、ポリアクリル酸、ポリアミド酸、及びポリグリオキシル酸等のポリカルボン酸;
ポリアクリルアミド、アミノポリアクリルアミド、ポリアクリル酸アンモニウム塩、ポリアクリル酸ナトリウム塩、ポリメタクリル酸アンモニウム塩、ポリメタクリル酸ナトリウム塩、ポリアミド酸アンモニウム塩、ポリアミド酸ナトリウム塩等に例示される、ポリカルボン酸の塩、エステル及び誘導体;
ポリビニルアルコール、ポリビニルピロリドン及びポリアクロレイン等のビニル系ポリマ;
それらのエステル及びそれらのアンモニウム塩などが挙げられる。
[実施例1〜6及び比較例1〜6]
研磨液重量に対して、(イ)酸化剤として過酸化水素水(試薬特級、30%水溶液)を25重量%、(ロ)酸化金属溶解剤として表1〜2に示す組成の酸、及び(ハ)金属防食剤として表1〜2に示す量のベンゾトリアゾール(BTA)、さらに平均重量分子量20,000の水溶性ポリマを0.4重量%、平均粒径60nmのコロイダルシリカ砥粒を0.2重量%、計100重量%になるように残部に純水を配合して実施例1〜6及び比較例1〜6の研磨液を調製した。研磨液のpHは、純水混合後に、表1〜2に示す値になるようにアンモニア水(25%)で調整した。
研磨液重量に対して、(イ)酸化剤として過酸化水素水(試薬特級、30%水溶液)を25重量%、(ロ)酸化金属溶解剤及び(ハ)金属防食剤として表3に示す各組成、さらに平均重量分子量20,000の水溶性ポリマを0.4重量%、平均粒径60nmのコロイダルシリカ砥粒を0.2重量%、計100重量%になるように残部に純水を配合して実施例7〜8及び比較例7〜8の研磨液を調製した。研磨液のpHは、純水混合後に、表3に示す値になるようにアンモニア水(25%)で調整した。なお、表中の%は重量%を示す。
(1)パターン無し5インチ(12.7cm)シリコン基板: シリコン基板/二酸化ケイ素膜厚300nm/バリア層:窒化タンタル膜厚25nm/銅膜厚1.2μm
(2)パターン付5インチ(12.7cm)シリコン基板: 深さ0.5μmの溝が形成されたシリコン基板/二酸化ケイ素膜厚300nm/バリア層:窒化タンタル膜厚25nm/銅膜厚1.2μmを用意した。
研磨液供給量:50cc/分
研磨装置:デットウェイト式実験用研磨装置(研磨定盤径:φ40cm)
研磨布:発泡ポリウレタン樹脂(ロデール社製型番IC1000)
研磨圧力:21kPa
基体と研磨定盤との相対速度:36m/分、定盤回転速度:60rpm
(研磨液評価項目)
エッチング速度:攪拌した上記研磨液(室温、25℃、攪拌100rpm)に、上記2種の基体を浸漬し、浸漬前後の銅層膜厚差を電気抵抗値から換算して求めた。2種の基体からはほぼ同じ値が得られ、パターン無しの基体の値を採用した。
2 研磨定盤
3 キャリア
4 ローラー
5 圧電素子
6 研磨布
7 重り
8 圧力出力計
9 キャリア・ホルダー支柱
10 ウエハ
11 ガイドリング付きパッキングフィルム
Claims (16)
- (イ)酸化剤、(ロ)酸化金属溶解剤、(ハ)金属防食剤、及び水を含有し、pHが2〜5である研磨液であって、
(ハ)金属防食剤が、トリアゾール骨格を有する芳香族化合物の群(C群)から選ばれた1種以上と、トリアゾール骨格を有する脂肪族化合物、ピリミジン骨格を有する化合物、イミダゾール骨格を有する化合物、グアニジン骨格を有する化合物、チアゾール骨格を有する化合物及びピラゾール骨格を有する化合物の群(D群)から選ばれた1種以上とを含むことを特徴とする研磨液。 - (ロ)酸化金属溶解剤が、以下から選ばれる酸の組み合わせを含むか、または以下から選ばれる組み合わせの少なくとも一方が酸のアンモニウム塩である組み合わせを含む請求項1記載の研磨液:
マロン酸とコハク酸、マロン酸とグルタル酸、マロン酸とアジピン酸、マロン酸と乳酸、マロン酸とフマル酸、マロン酸とフタル酸、クエン酸とコハク酸、クエン酸とグルタル酸、クエン酸とアジピン酸、クエン酸と乳酸、クエン酸とフマル酸、クエン酸とフタル酸、リンゴ酸とコハク酸、リンゴ酸とグルタル酸、リンゴ酸とアジピン酸、リンゴ酸と乳酸、リンゴ酸とフマル酸、リンゴ酸とフタル酸、グリコール酸とコハク酸、グリコール酸とグルタル酸、グリコール酸とアジピン酸、グリコール酸と乳酸、グリコール酸とフマル酸、グリコール酸とフタル酸、酒石酸とコハク酸、酒石酸とグルタル酸、酒石酸とアジピン酸、酒石酸と乳酸、酒石酸とフマル酸、酒石酸とフタル酸。 - 前記C群が、ベンゾトリアゾール、1−ヒドロキシベンゾトリアゾール及び5−メチルベンゾトリアゾールから選ばれる少なくとも1種である請求項1記載の研磨液。
- 前記D群のトリアゾール骨格を有する脂肪族化合物が、1,2,3−トリアゾール、1,2,4−トリアゾール、3−アミノ−1H−1,2,4−トリアゾール及び4−アミノ−4H−1,2,4−トリアゾールから選ばれる少なくとも1種である請求項1または3記載の研磨液。
- 前記ピリミジン骨格を有する化合物が、4−アミノピラゾロ[3,4−d]ピリミジン、1,2,4−トリアゾロ[1,5−a]ピリミジン、2−メチル−5,7−ジフェニル−(1,2,4)トリアゾロ(1,5−a)ピリミジン、2−メチルスルファニル−5,7−ジフェニル−(1,2,4)トリアゾロ(1,5−a)ピリミジンから選ばれる少なくとも1種である請求項1、3、4のいずれか記載の研磨液。
- 前記イミダゾール骨格を有する化合物が、2−メチルイミダゾール、2−エチルイミダゾール、2−(イソプロピル)イミダゾール、2−プロピルイミダゾール、2−ブチルイミダゾール、4−メチルイミダゾール、2,4−ジメチルイミダゾール、2−エチル−4−メチルイミダゾールから選ばれる少なくとも1種である請求項1、3〜5のいずれか記載の研磨液。
- 前記グアニジン骨格を有する化合物が、1,3−ジフェニルグアニジン、1−メチル−3−ニトログアニジンから選ばれる少なくとも1種である請求項1、3〜6のいずれか記載の研磨液。
- pHが3〜4.5であり、かつ研磨液中の金属防食剤の濃度が0.01〜0.50重量%である請求項1〜7のいずれか記載の研磨液。
- (イ)金属酸化剤が、過酸化水素、過硫酸アンモニウム、硝酸第二鉄、硝酸、過ヨウ素酸カリウム、次亜塩素酸及びオゾン水から選ばれる少なくとも1種である請求項1〜8のいずれか記載の研磨液。
- 重量平均分子量が500以上の水溶性ポリマを少なくとも1種類含有する請求項1〜9のいずれか記載の研磨液。
- 重量平均分子量が500以上の水溶性ポリマが、多糖類、ポリカルボン酸、ポリカルボン酸のエステル、ポリカルボン酸の塩、ポリアクリルアミド、及びビニル系ポリマから選ばれた少なくとも1種である請求項10記載の研磨液。
- アルミナ、シリカ及びセリアから1種類以上選ばれる固体砥粒を含む請求項1〜11のいずれか記載の研磨液。
- 研磨定盤の研磨布上に請求項1〜12のいずれか記載の研磨液を供給しながら、基体の被研磨面を研磨布に押圧した状態で研磨布と基体とを相対的に動かして被研磨面を研磨することを特徴とする研磨方法。
- 表面が凹部および凸部からなる層間絶縁膜と、前記層間絶縁膜を表面に沿って被覆するバリア層と、前記凹部を充填してバリア層を被覆する金属層とを有する基板の金属層を研磨して前記凸部のバリア層を露出させる第1研磨工程と、該第1研磨工程後に、少なくともバリア層および凹部の金属層を研磨して凸部の層間絶縁膜を露出させる第2研磨工程とを含み、第1研磨工程および第2研磨工程の少なくとも一方の工程で請求項1〜12のいずれか記載の研磨液を用いて研磨することを特徴とする研磨方法。
- 前記金属層が、銅、銅合金、銅の酸化物、銅合金の酸化物から選ばれる少なくとも1種を含む請求項14項記載の研磨方法。
- 前記バリア層が、1種の組成からなる単層構造または2種以上の組成からなる積層構造であり、バリア層の組成がタンタル、窒化タンタル、タンタル合金、その他のタンタル化合物、チタン、窒化チタン、チタン合金、その他のチタン化合物、タングステン、窒化タングステン、タングステン合金、その他のタングステン化合物のうちから選ばれる請求項14または15記載の研磨方法。
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EP1505639B1 (en) | 2008-08-06 |
JP4449745B2 (ja) | 2010-04-14 |
DE60322695D1 (de) | 2008-09-18 |
AU2003235964A1 (en) | 2003-11-17 |
EP1505639A4 (en) | 2007-05-09 |
WO2003094216A1 (fr) | 2003-11-13 |
US20080003924A1 (en) | 2008-01-03 |
CN101037585B (zh) | 2010-05-26 |
TW200307032A (en) | 2003-12-01 |
JPWO2003094216A1 (ja) | 2005-09-08 |
US20050181609A1 (en) | 2005-08-18 |
EP1881524A1 (en) | 2008-01-23 |
US8696929B2 (en) | 2014-04-15 |
US20070295934A1 (en) | 2007-12-27 |
KR100720985B1 (ko) | 2007-05-22 |
ATE403936T1 (de) | 2008-08-15 |
CN1650403A (zh) | 2005-08-03 |
ATE470236T1 (de) | 2010-06-15 |
US7367870B2 (en) | 2008-05-06 |
CN101037585A (zh) | 2007-09-19 |
EP1881524B1 (en) | 2010-06-02 |
KR20050006203A (ko) | 2005-01-15 |
CN100336179C (zh) | 2007-09-05 |
JP4853494B2 (ja) | 2012-01-11 |
DE60332881D1 (de) | 2010-07-15 |
EP1505639A1 (en) | 2005-02-09 |
TWI303660B (en) | 2008-12-01 |
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