JP2007523249A5 - - Google Patents

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Publication number
JP2007523249A5
JP2007523249A5 JP2006554142A JP2006554142A JP2007523249A5 JP 2007523249 A5 JP2007523249 A5 JP 2007523249A5 JP 2006554142 A JP2006554142 A JP 2006554142A JP 2006554142 A JP2006554142 A JP 2006554142A JP 2007523249 A5 JP2007523249 A5 JP 2007523249A5
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JP
Japan
Prior art keywords
surfactant
mold
imprint
believed
imprint template
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JP2006554142A
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Japanese (ja)
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JP2007523249A (ja
JP5426814B2 (ja
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Priority claimed from US10/784,911 external-priority patent/US8076386B2/en
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Publication of JP5426814B2 publication Critical patent/JP5426814B2/ja
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JP2006554142A 2004-02-23 2005-02-14 インプリントリソグラフィ用の材料 Expired - Fee Related JP5426814B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/784,911 US8076386B2 (en) 2004-02-23 2004-02-23 Materials for imprint lithography
US10/784,911 2004-02-23
PCT/US2005/004415 WO2005082992A1 (en) 2004-02-23 2005-02-14 Materials for imprint lithography

Related Child Applications (1)

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JP2012139488A Division JP5753132B2 (ja) 2004-02-23 2012-06-21 インプリントリソグラフィ用の材料

Publications (3)

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JP2007523249A JP2007523249A (ja) 2007-08-16
JP2007523249A5 true JP2007523249A5 (enExample) 2013-11-21
JP5426814B2 JP5426814B2 (ja) 2014-02-26

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JP2006554142A Expired - Fee Related JP5426814B2 (ja) 2004-02-23 2005-02-14 インプリントリソグラフィ用の材料
JP2012139488A Expired - Lifetime JP5753132B2 (ja) 2004-02-23 2012-06-21 インプリントリソグラフィ用の材料
JP2014258521A Expired - Lifetime JP6326700B2 (ja) 2004-02-23 2014-12-22 インプリントリソグラフィ用の材料

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JP2012139488A Expired - Lifetime JP5753132B2 (ja) 2004-02-23 2012-06-21 インプリントリソグラフィ用の材料
JP2014258521A Expired - Lifetime JP6326700B2 (ja) 2004-02-23 2014-12-22 インプリントリソグラフィ用の材料

Country Status (6)

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US (1) US8076386B2 (enExample)
EP (2) EP2261280B1 (enExample)
JP (3) JP5426814B2 (enExample)
MY (1) MY141006A (enExample)
TW (1) TWI324622B (enExample)
WO (1) WO2005082992A1 (enExample)

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* Cited by examiner, † Cited by third party
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