JP2005534111A - 液体流量制御器および精密分注装置およびシステム - Google Patents

液体流量制御器および精密分注装置およびシステム Download PDF

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Publication number
JP2005534111A
JP2005534111A JP2004523603A JP2004523603A JP2005534111A JP 2005534111 A JP2005534111 A JP 2005534111A JP 2004523603 A JP2004523603 A JP 2004523603A JP 2004523603 A JP2004523603 A JP 2004523603A JP 2005534111 A JP2005534111 A JP 2005534111A
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Japan
Prior art keywords
valve
fluid
pressure
proportional
control valve
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Pending
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JP2004523603A
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Japanese (ja)
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JP2005534111A5 (https=
Inventor
ラベルダイアー，マーク
マクローリン，ロバート・エフ
ゴンネッラ，ジョージ
ガシュギー，イラジ
マーズ，ジェニファー
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マイクロリス・コーポレーション
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Publication of JP2005534111A publication Critical patent/JP2005534111A/ja
Publication of JP2005534111A5 publication Critical patent/JP2005534111A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y10T137/776—Control by pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Fluid Pressure (AREA)
  • Flow Control (AREA)
JP2004523603A 2002-07-19 2003-07-18 液体流量制御器および精密分注装置およびシステム Pending JP2005534111A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39705302P 2002-07-19 2002-07-19
PCT/US2003/022579 WO2004010474A2 (en) 2002-07-19 2003-07-18 Liquid flow controller and precision dispense apparatus and system

Publications (2)

Publication Number Publication Date
JP2005534111A true JP2005534111A (ja) 2005-11-10
JP2005534111A5 JP2005534111A5 (https=) 2009-07-23

Family

ID=30770985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004523603A Pending JP2005534111A (ja) 2002-07-19 2003-07-18 液体流量制御器および精密分注装置およびシステム

Country Status (8)

Country Link
US (4) US7543596B2 (https=)
EP (1) EP1540705A4 (https=)
JP (1) JP2005534111A (https=)
KR (1) KR100714985B1 (https=)
CN (2) CN100374768C (https=)
AU (1) AU2003268000A1 (https=)
TW (1) TWI294792B (https=)
WO (1) WO2004010474A2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017534816A (ja) * 2014-07-07 2017-11-24 ナノテック・アナリシス・ソチエタ・ア・レスポンサビリタ・リミタータ・センプリフィカータＮＡＮＯＴＥＣＨ ＡＮＡＬＹＳＩＳ Ｓ．ｒ．ｌ．ｓ． ガス流を制御するためのデバイス、デバイスを利用するシステム及び方法
JP2021085813A (ja) * 2019-11-29 2021-06-03 株式会社フジキン 流量測定器

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* Cited by examiner, † Cited by third party
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