JP2005093997A5 - - Google Patents

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Publication number
JP2005093997A5
JP2005093997A5 JP2004247632A JP2004247632A JP2005093997A5 JP 2005093997 A5 JP2005093997 A5 JP 2005093997A5 JP 2004247632 A JP2004247632 A JP 2004247632A JP 2004247632 A JP2004247632 A JP 2004247632A JP 2005093997 A5 JP2005093997 A5 JP 2005093997A5
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JP
Japan
Prior art keywords
projection apparatus
lithographic projection
final element
glass plate
quartz glass
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JP2004247632A
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English (en)
Japanese (ja)
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JP2005093997A (ja
JP3946212B2 (ja
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Priority claimed from US10/698,012 external-priority patent/US6954256B2/en
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Publication of JP2005093997A5 publication Critical patent/JP2005093997A5/ja
Application granted granted Critical
Publication of JP3946212B2 publication Critical patent/JP3946212B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004247632A 2003-08-29 2004-08-27 リソグラフィック投影装置 Expired - Lifetime JP3946212B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03255377 2003-08-29
US10/698,012 US6954256B2 (en) 2003-08-29 2003-10-31 Gradient immersion lithography

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007057545A Division JP4586032B2 (ja) 2003-08-29 2007-03-07 リソグラフィック装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2005093997A JP2005093997A (ja) 2005-04-07
JP2005093997A5 true JP2005093997A5 (enExample) 2007-02-15
JP3946212B2 JP3946212B2 (ja) 2007-07-18

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ID=34424773

Family Applications (3)

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JP2004247771A Pending JP2005079589A (ja) 2003-08-29 2004-08-27 リソグラフィック装置及びデバイス製造方法
JP2004247632A Expired - Lifetime JP3946212B2 (ja) 2003-08-29 2004-08-27 リソグラフィック投影装置
JP2008258276A Pending JP2009016871A (ja) 2003-08-29 2008-10-03 リソグラフィック装置及びデバイス製造方法

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JP2004247771A Pending JP2005079589A (ja) 2003-08-29 2004-08-27 リソグラフィック装置及びデバイス製造方法

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Application Number Title Priority Date Filing Date
JP2008258276A Pending JP2009016871A (ja) 2003-08-29 2008-10-03 リソグラフィック装置及びデバイス製造方法

Country Status (5)

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US (2) US6954256B2 (enExample)
EP (1) EP1510871B1 (enExample)
JP (3) JP2005079589A (enExample)
CN (1) CN100495213C (enExample)
SG (1) SG109610A1 (enExample)

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