JP2005085789A5 - - Google Patents

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Publication number
JP2005085789A5
JP2005085789A5 JP2003312635A JP2003312635A JP2005085789A5 JP 2005085789 A5 JP2005085789 A5 JP 2005085789A5 JP 2003312635 A JP2003312635 A JP 2003312635A JP 2003312635 A JP2003312635 A JP 2003312635A JP 2005085789 A5 JP2005085789 A5 JP 2005085789A5
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Prior art keywords
substrate
liquid
exposure apparatus
porous body
optical element
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JP2003312635A
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Japanese (ja)
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JP2005085789A (ja
JP4378136B2 (ja
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Priority to JP2003312635A priority Critical patent/JP4378136B2/ja
Priority claimed from JP2003312635A external-priority patent/JP4378136B2/ja
Priority to US10/931,572 priority patent/US7053983B2/en
Publication of JP2005085789A publication Critical patent/JP2005085789A/ja
Priority to US11/354,471 priority patent/US20060132741A1/en
Publication of JP2005085789A5 publication Critical patent/JP2005085789A5/ja
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Publication of JP4378136B2 publication Critical patent/JP4378136B2/ja
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Expired - Lifetime legal-status Critical Current

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JP2003312635A 2003-09-04 2003-09-04 露光装置及びデバイス製造方法 Expired - Lifetime JP4378136B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003312635A JP4378136B2 (ja) 2003-09-04 2003-09-04 露光装置及びデバイス製造方法
US10/931,572 US7053983B2 (en) 2003-09-04 2004-09-01 Liquid immersion type exposure apparatus
US11/354,471 US20060132741A1 (en) 2003-09-04 2006-02-14 Liquid immersion type exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003312635A JP4378136B2 (ja) 2003-09-04 2003-09-04 露光装置及びデバイス製造方法

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Publication Number Publication Date
JP2005085789A JP2005085789A (ja) 2005-03-31
JP2005085789A5 true JP2005085789A5 (enExample) 2006-10-05
JP4378136B2 JP4378136B2 (ja) 2009-12-02

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JP2003312635A Expired - Lifetime JP4378136B2 (ja) 2003-09-04 2003-09-04 露光装置及びデバイス製造方法

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US (2) US7053983B2 (enExample)
JP (1) JP4378136B2 (enExample)

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