CN108367317B - 具有外围电连接到柔性印刷电路板的环形超声波阵列的紧凑型超声波装置及其组装方法 - Google Patents

具有外围电连接到柔性印刷电路板的环形超声波阵列的紧凑型超声波装置及其组装方法 Download PDF

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CN108367317B
CN108367317B CN201780004668.5A CN201780004668A CN108367317B CN 108367317 B CN108367317 B CN 108367317B CN 201780004668 A CN201780004668 A CN 201780004668A CN 108367317 B CN108367317 B CN 108367317B
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J·A·布朗
J·R·莱德贝特
C·D·埃默里
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Abstract

公开了超声波装置及其相关组装方法，借此，超声波换能器的环形电极阵列以紧凑配置电连接到柔性印刷电路板。所述柔性电路板包括细长柔性段和远侧分布段，其中所述分布段附接到围绕所述超声波换能器的至少一部分的外围支撑环。所述分布段包括多个空间分布式接触垫，并且在所述接触垫与所述环形阵列的所述环形电极之间设置电连接件。可设置接触所述环形阵列电极且从其处延伸的背衬材料，并且所述细长柔性段的远侧部分可被封装在所述背衬材料中，使得所述远侧部分从所述外围支撑环向内延伸，而不接触所述电连接件且不接触所述阵列表面。

Description

具有外围电连接到柔性印刷电路板的环形超声波阵列的紧凑 型超声波装置及其组装方法
通过引用对任何优先权申请的并入
本申请要求于2016年1月18日提交的美国临时专利申请号62/280,038的优先权益，该专利申请的全部内容通过引用并入本文中。
背景技术
本发明公开的若干实施例涉及具有环形阵列的超声波换能器的组装和电互连。
发明内容
公开了超声波装置及其相关组装方法的实施例(例如，例子)，其中超声波换能器的环形电极阵列以紧凑配置电连接(例如，引线接合或导电环氧树脂胶合等)到柔性印刷电路板。该柔性电路板包括细长柔性段和远侧分布段，其中该分布段附接到围绕该超声波换能器的至少一部分的外围支撑环。该分布段包括多个空间分布式接触垫，并且在这些接触垫与该环形阵列的这些环形电极之间设置电连接器(例如，引线接合或导电环氧树脂)。可提供与这些环形阵列电极接触且从其处延伸的背衬材料，并且该细长柔性段的远侧部分可被封装在该背衬材料中，使得该远侧部分从该外围支撑环向内延伸，而不接触这些电连接器(例如，引线接合或导电环氧树脂)且不接触该阵列表面。
因此，在一个实施例方面中，提供了一种超声波装置，其包括：超声波换能器，其包括环形超声波阵列，其中所述环形超声波阵列至少部分地由被设置在压电层的第一表面上的多个同心环形电极限定，并且其中接地平面电极被设置在所述压电层的第二表面上；外围支撑环，其围绕所述超声波换能器的至少一部分；以及柔性印刷电路板，其包括：细长柔性段；以及分布段，其与所述外围支撑环的至少一部分接触，使得延伸穿过所述细长柔性段的多个导电路径通过所述分布段路由到位于所述外围支撑环上的不同位置处的相应接触垫；其中每个环形电极电连接(例如，引线接合或导电环氧树脂胶合)到相应的接触垫；并且其中所述柔性印刷电路板的至少一个导电路径是与所述接地平面电极电接触的接地导电路径。
在各种实施例中，一种超声波装置包括：超声波换能器，其包括环形超声波阵列，其中该环形超声波阵列至少部分地由被设置在压电层的第一表面上的多个同心环形电极限定，并且其中接地平面电极被设置在该压电层的第二表面上；外围支撑环，其围绕该超声波换能器的至少一部分；以及柔性印刷电路板。在实施例中，该柔性印刷电路板包括细长柔性段和分布段，该分布段与该外围支撑环的至少一部分接触，使得延伸穿过该细长柔性段的多个导电路径通过该分布段路由到位于该外围支撑环上的不同位置处的相应接触垫。在实施例中，每个环形电极电连接(例如，引线接合和/或导电环氧树脂胶合)到相应的接触垫。在实施例中，该柔性印刷电路板的至少一个导电路径是与该接地平面电极电接触的接地导电路径。
在实施例中，该装置还包括背衬材料，其接触该第一表面且从其处延伸，其中该细长柔性段的远侧部分被封装在该背衬材料中，使得该细长柔性段的该远侧部分从该外围支撑环(例如，平行于且沿着该第一表面)向内延伸并且在该背衬材料内背离该第一表面向外(例如，垂直地)向外弯曲，而不接触这些引线接合且不接触该第一表面。在实施例中，该多个导电路径在该分布段内双向路由。在实施例中，该细长柔性段的该远侧部分包括多个分支远侧段，该多个分支远侧段在不同位置处与该外围支撑环接触，其间限定了间隙。在实施例中，这些分支远侧段中的一个或多个仅包括两个导电路径。在实施例中，该两个导电路径被双向路由到不同的接触垫。在实施例中，在每个间隙内形成一个或多个引线接合。在实施例中，该细长柔性段的该远侧部分在该背衬材料内相对于该第一表面在范围为90度与180度之间的角度内弯曲。在实施例中，该细长柔性段被封装在该背衬材料内且从该背衬材料的远侧表面露出，而不会延伸超过该背衬材料的侧表面。在实施例中，该细长柔性段相对于该第一表面以大约90度的角度从该背衬材料露出。在实施例中，该细长柔性段相对于该第一表面以大于或等于大约90度的角度从该背衬材料露出。在实施例中，该细长柔性段的该远侧部分的初始曲率半径小于8mm。在实施例中，该外围支撑环的接触该分布段的接触表面在空间上偏离该第一表面。在实施例中，该细长柔性段从该外围支撑环向外延伸。在实施例中，该外围支撑环具有小于1mm的横向宽度。在实施例中，该外围支撑环完全围绕该超声波换能器。在实施例中，该超声波换能器为圆盘形，并且其中该外围支撑环是环状物的至少一部分。在实施例中，该环状物的外径小于10mm。在实施例中，该外围支撑环是导电的，并且其中该外围支撑环与该接地导电路径和该接地平面电极电连通。在实施例中，该多个同心环形电极以稀疏配置设置，由此限定稀疏环形超声波阵列。
通过参考具体实施方式和附图可实现对本公开的功能和有利方面的进一步理解。
附图说明
图1示出了具有环形超声波阵列的超声波换能器的例子。
图2A和图2B示出了(A)围绕具有环形超声波阵列的超声波换能器的外围支撑环，以及(B)适于安装到外围支撑环且电连接(例如，引线接合或导电环氧树脂胶合)到环形超声波阵列的环形电极的柔性印刷电路板。
图3A和图3B分别示出了在电连接之前(例如，引线接合或导电环氧树脂胶合)组件的前视图和后视图，其中超声波换能器被外围支撑环围绕，该外围支撑环上面安装有柔性印刷电路板。
图4A和图4B分别示出了在电连接之后(例如，引线接合或导电环氧树脂胶合)组件的俯视图和侧视图，其中超声波换能器被外围支撑环围绕，该外围支撑环上面安装有柔性印刷电路板。
图5A和图5B分别示出了在引入背衬材料之后组件的俯视图和侧视图，其中超声波换能器被外围支撑环围绕，该外围支撑环上面安装有柔性印刷电路板。
图6示出了接地平面电极和匹配层的添加。
图7A和图7B示出了其中柔性印刷电路板的细长段的远侧部分从外围环向内延伸以密封在背衬材料内的示例实施例。
图8A和图8B示出了图7A和图7B中所示的实施例的俯视图和侧视图。
图9示出了具有分支远侧段的柔性印刷电路板的示例实施例，每个分支远侧段具有两个导电信号路径。
图10示出了具有分支远侧段的柔性印刷电路板的另一个示例实施例，每个分支远侧段具有十六个导电信号路径和四个导电信号路径。
图11示出了用于将印刷电路板的分布段安装到外围支撑环的示例组装夹具。
图12A至图12E示出了实施方式方法的若干组装步骤的照片，该方法包括涉及添加背衬材料的步骤。
图13和图14A至图14C示出了包括添加背衬材料的若干示例组装步骤的图示。
图15示出了如图11中单独描绘的八个组装夹具，每个组装夹具包含为了回流焊接而安装有柔性印刷电路板的外围支撑环。
图16A和图16B示出了其中每个环形阵列包括编码信息的导电特征的示例实施例。
具体实施方式
将参考下面讨论的细节描述本公开的各种实施例和方面。以下描述和附图是对本公开的说明，而不应当被解释为限制本公开。描述了许多具体细节以提供对本公开的各种实施例的透彻理解。然而，在某些范例下，为了提供对本公开的实施例的简要讨论，没有描述公知的或常规的细节。
如本文所使用，术语“包括(comprises和comprising)”应当被解释为包括性和开放性的，而不是排他性的。具体地，当在说明书和权利要求书中使用时，术语“包括(comprises和comprising)”及其变体意指包括指定特征、步骤或部件。这些术语不应当被解释为排除其它特征、步骤或部件的存在。
如本文所使用，术语“示例性”意指“用作例子、实例或说明”，而不应当被解释为比本文中所公开的其它配置更优选或更有利。
如本文所使用，术语“约”和“大约”意指涵盖可能存在于数值范围的上限和下限中的变化，诸如性质、参数和尺寸的变化。除非另有指定，否则术语“约”和“大约”意指加或减10％或更少。
应当理解的是，除非另外指定，否则任何指定的范围或群组都是单独地参考范围或群组的每个成员以及其中所涉及的每个可能的子范围或子范围且类似地关于其中的任何子范围或子组的速记方式。除非另有指定，否则本公开涉及且明确地引入每个具体成员以及子范围或子组的组合。
如本文所使用，术语“近似”在与数量或参数一起使用时是指跨越该数量或参数的大约十分之一到十倍的范围。
在本公开的各种示例实施例中，描述了超声波装置，其中环形超声波阵列的电极电连接(例如，引线接合或导电环氧树脂胶合)到柔性印刷电路板。提供了用于在环形超声波阵列的环形电极与柔性印刷电路板的接触垫之间形成电连接件(例如，引线接合或导电环氧树脂)的各种配置和制造方法，其中接触垫由外围支撑环支撑且在空间上分布在其周围，该外围支撑环围绕超声波换能器的至少一部分。
图1示出了包括环形超声波阵列的超声波换能器100的例子。示例超声波换能器100包括具有第一侧110的压电层105，在第一侧110上设置有一组同心环形电极115。压电层105的另一个表面(未示出)上面设置有电极(例如，接地平面电极)。同心环形电极115至少部分地限定环形超声波阵列的环形阵列元件。该阵列可为割痕(kerfed)阵列，或者可为无割痕(kerfless)阵列。超声波换能器100可包括一个或多个附加层(诸如阻抗匹配层)和背衬材料(例如，声学背衬材料)。
如图2A、图2B、图3A和图3B中所示，可通过使用外围支撑环促进将环形电极115电连接(例如，引线接合或导电环氧树脂胶合)到柔性印刷电路板的接触垫。如图3A中所示，外围支撑环130被设置成使得其围绕超声波换能器100的至少一部分。外围支撑环130被塑形为支撑柔性印刷电路板的远侧区域。外围支撑环130可整体上或在其一部分上导电。
图2B中示出了合适的柔性印刷电路板140的例子。示例柔性印刷电路板140具有细长柔性段145和分布段150(其也可为柔性的)。分布段150具有接触垫160的空间分布阵列，这些接触垫160与柔性印刷电路板的导电路径电连通。细长柔性段145的近侧区域可包括多个近侧接触垫。
分布段150被塑形为使得其可被安装或以其它方式固定到外围支撑环130。图3A和图3B示出了其中分布段150被安装到外围支撑环的配置(外围支撑环在图3A中位于分布段150下方)。分布段150的接触垫160在空间上围绕超声波换能器100的外周界分布，由此促进电连接(例如，引线接合或导电环氧树脂胶合)。
图3B示出了相对于图3A的对应后视图，其中接地平面电极120在外围支撑环130附近可见。此第二表面(图3B中所示)是超声波束将被发射和/或接收的表面。
如下所述，在一些实施例中，外围支撑环130可为导电的且与柔性印刷电路的接地导电路径和超声波换能器的接地平面电极120电连通。例如，分布段150的底表面可包括暴露的导电区域，该暴露的导电区域可通过导电键合装置(诸如，焊接)附接到导电外围支撑环，并且导电外围支撑环的底表面与超声波换能器的接地平面电极120之间的电连接可经由金属的蒸发沉积来进行(此蒸发步骤可在用如下面更详细描述的环氧树脂背衬材料浸润之后执行，使得在超声波换能器与外围支撑环之间的间隙至少部分地填充有背衬材料，金属可沉积在该背衬材料上以形成电连接件)。
围绕超声波换能器的外围区域的接触垫160的空间分布促进将接触垫160电连接(例如，引线接合或导电环氧树脂胶合)到环形阵列元件115。这在图4A和图4B中示出，其中在超声波换能器的接触垫160与环形电极115之间示出电连接件170(例如，引线接合170或导电环氧树脂170)。应当注意的是，图4B是省略柔性印刷电路板的细长段的横截面轮廓。图5A和图5B示出了可如何添加背衬材料180以接触超声波换能器的第一表面且封装电连接件(例如，引线接合或导电环氧树脂)。图6示出了将接地电极120添加到压电层的第二侧以及添加匹配层190。
在其中环形支撑环导电的实施例中，在外围支撑环130的内部与超声波换能器100的外部之间保持空间间隙(图2A中未示出)。此外，虽然压电层105被示为具有圆盘形，但是将理解的是，其它形状(例如，可采用正方形或矩形)。然而，为了减小整个装置的横截面尺寸(例如，直径)，采用圆形形状将是有利的。
在图2A到图7中所示出的示例实施例中，柔性印刷电路板140的细长柔性段145连接到分布段150，使得细长柔性段从外围支撑环向外延伸。然而，在下文描述的其它示例实施例中，细长柔性段145可连接到分布段150，使得细长柔性段145的远侧部分被封装在背衬材料内，且使得细长柔性段145的远侧部分从外围支撑环130向内(例如，平行于且沿着换能器表面)延伸且在背衬材料内背离超声波换能器的第一表面110向外(例如，垂直于换能器表面)弯曲。在一个实施例中，细长柔性段145可连接到分布段150，使得细长柔性段145的远侧部分被封装在背衬材料内，且使得细长柔性段145的远侧部分平行于且沿着换能器表面从外围支撑环130延伸，且在背衬材料内背离超声波换能器的第一表面110垂直于换能器表面弯曲。
图7A和图7B中示出了这种实施例的例子，其中图7A示出了包括柔性印刷电路板140的全长的装置，而图7B示出了细节(A)，其示出了细长柔性段140的远侧部分148如何连接到分布段150。如图7B中所示，细长柔性段145的远侧部分148从外围支撑环130向内延伸(例如，平行且沿着换能器表面)。此远侧部分148可背离超声波换能器的第一表面向外(例如，垂直于换能器表面)弯曲，使得细长柔性段的远侧部分148避免与电连接件170(例如，引线接合170或导电环氧树脂170)接触且不接触超声波换能器的第一表面110。
现在参考图8A，提供了俯视图，其示出了细长柔性段148的远侧部分相对于外围支撑环130的配置。该图还示出了柔性印刷电路板的各种导电路径到柔性印刷电路板的分布段150内的不同接触垫160的路由。该图示出了从每个接触垫(175A到175H)延伸到相应的环形电极(例如，参见172)的电连接件(例如，引线接合或导电环氧树脂)。在本示例实施例中，外围支撑环130是导电的，并且在超声波换能器的外周界与外围支撑环125的内边缘之间设置了间隙125，以将外围支撑环130与环形电极115电隔离(然而应当注意，在用背衬材料浸润之后，在外围支撑环130与形成在超声波换能器的第二侧上的接地平面电极之间形成电接触件)。
如图8A中所示，柔性印刷电路板的导电路径可在分布段150内双向路由，使得一些导电路径在一个外围方向上路由在分布段150内，而其它导电路径在相反的外围方向上路由在分布段150中。例如，可在每个方向上路由偶数个导电路径。这种实施例可能有利于减小或最小化外围支撑环130的横向宽度151(在与外围方向垂直的方向上测量)，因为最小横向宽度151与在给定方向上路由的导电路径的数量成比例或以其它方式相关。例如，外围支撑环可具有小于2mm、小于1mm、小于750微米或小于500微米的横向宽度。在其中外围支撑环为环状物的一些示例实施方式中，环状物的外径可被选择为20mm、小于10mm、小于7mm或小于5mm。
在一些实施例中，柔性印刷电路的细长段的远侧部分148可为单个段。然而，在其它实施例中，诸如在图8A中所示的实施例，远侧部分148可被分开以提供多个分支远侧段(例如，分支远侧段148A和148B)，其在不同位置接触外围支撑环。可采用在分支远侧段148A和148B之间形成的间隙来电连接(例如，引线接合或导电环氧树脂胶合)环形电极的至少一部分。
在一个示例实施方式中，可选择分支远侧段的数量，使得至少一个分支远侧段仅包括两个导电路径(可选地加上形成在单独层上的接地路径)，使得当这两个导电路径在分布段内双向路由时，每个方向上仅布置一个导电路径。这种示例实施例在实现薄外围支撑环时可能是有益的。图9中示出这种实施例的例子。图10示出了其中十六个导电通道被分成四个分支远侧段的另一个示例实施方式。
图8B示出了图8A中所示的实施例的横截面视图，其中横截面是穿过一个电连接件(例如，引线接合或导电环氧树脂)截取的。从图中可看出，细长柔性段的远侧部分148最初可定位成在200处所示的区域中与外围支撑环130接触。然而，在组装期间，远侧部分148背离超声波换能器的表面110弯曲(参见箭头205)，由此允许背衬材料浸润远侧部分148下方的区域，从而接触表面110。在一个实施例中，当在垂直于表面110的方向离开时，远侧部分148的定向允许屈曲PCB的弯曲半径大于换能器130的整个弯曲半径。在技术实施例中，这减少了屈曲PCB上的应力，从而提高了可靠性并简化了制造工艺。在实施例中，这允许屈曲垂直于换能器表面向后定向，同时保持较大的屈曲弯曲半径。下面进一步详细描述若干示例制造和组装步骤。可在外围支撑环130的上表面与超声波换能器的第一表面110之间设置空间偏移量195(例如，帮助浸润远侧部分148下方靠近分布段150的背衬材料)。替代地，外围支撑环的厚度可大约等于超声波换能器的厚度。
图11到图15示出了提供背衬材料的示例过程中的各个步骤，该背衬材料封装柔性印刷电路板的细长柔性段的远侧部分。根据本示例方法，柔性印刷电路板的分布段最初附接到外围支撑环。例如，如果外围支撑环由金属(例如，铜)形成，则分布段可被焊接到外围支撑环。例如，可使用安装夹具(诸如图13中所示的示例安装夹具)来实现此步骤。
在将柔性印刷电路板附接到外围支撑环之后，该外围支撑环被定位成(至少部分地)围绕超声波换能器。例如，如图12A中所示，超声波换能器可被放置在双面胶带220上，并且外围支撑环可被放置在双面胶带上以便围绕超声波换能器。然后可执行电连接(例如，引线接合或导电环氧树脂胶合)。
如图12B、图12C和图13中所示，然后可将可移除模具250(诸如硅酮模具)放置在组件上。模具250可填充有背衬材料(例如，声学背衬材料)，诸如环氧树脂背衬。应当理解的是，可采用各种各样的背衬材料。在一些实施例中，背衬材料是声学背衬材料。然后可移除模具250以产生组装的装置。如图14A到图14C中所示，背衬材料180被设置成使得其接触超声波换能器的第一表面110，并且背衬材料180可完全封装电连接件170(例如，引线接合170或导电环氧树脂170)。
应当理解的是，可移除模具的使用仅仅说明一种非限制性示例组装方法。在另一种示例方法中，外壳可被设置成其在背衬材料固化之后形成围绕背衬材料的外壳。
如图12D和图12E中所示，细长柔性段的远侧部分148可被弯曲以便将远侧部分拉离超声波换能器的第一表面，且促进背衬材料的浸润。例如，细长柔性段的远侧部分可弯曲，使得细长柔性段通过背衬材料的远侧表面以相对于超声波换能器的第一表面大约90度、小于90度、大于或等于90度或者介于90和180度之间的角度露出。细长柔性段的远侧部分可根据小于8mm、小于5mm、小于3mm或小于2mm的初始曲率半径弯曲。
如图14A到图14C中所示，细长柔性段的远侧部分可被封装在背衬材料内，使得其从背衬材料的远侧表面露出而不延伸超过背衬材料的侧表面。图14C示出了其中细长柔性段相对于超声波换能器的第一表面以大约180度的角度从背衬材料露出的非限制性示例实施方式。
图15示出了如图11中单独描绘的八个组装夹具，每个组装夹具包含为了回流焊接而安装有柔性印刷电路板的外围支撑环。
虽然许多前述实施例采用了封装柔性印刷电路板的细长柔性段的一部分的背衬层，但是也可使用背衬空气配置来实现其它示例实施例。例如，外壳或引导件可附接到外围支撑环，其中外壳或引导件包括一个或多个特征以弯曲和支撑细长柔性段的远侧区域。
如图16A和图16B中所示，环形电极之间的一个或多个环形区域可用诸如文本、条形码和其它符号等导电标记进行编码。这些导电标记可被包括在用于形成环形电极的掩模中，并且标记可唯一地识别给定晶片上的每个环形阵列。在图16A和图16B中所示的示例实施方式中，标记是一系列点，其中每个点编码7位标识符的一位，其中“1”由存在导电点指示，并且“零”由不存在导电点指示。
本文中公开的示例实施例可用于环形超声波换能器的电连接和封装，其中成本和尺寸被减小或最小化。在一些实施方式中，可通过使用无割痕环形阵列和/或使用稀疏环形阵列来实现尺寸和/或成本降低。稀疏环形阵列是环形阵列，其中环形电极较薄且其间分开相对较大的间隙。例如，稀疏环形阵列可被定义为环形阵列，该环形阵列的环形电极覆盖由外部环形环界定的区域内小于换能器表面的一半。在一个实施例中，这具有减小对于给定深度在每个元件上的延迟方差的效果，由此降低了旁瓣的水平，这限制了图像中的动态范围(对比度)。在一个实施例中，这具有缩短对于给定深度在每个元件上的相移的效果，由此直接降低了旁瓣的水平，这限制了图像中的动态范围(对比度)。
上面描述的具体实施例已经通过举例的方式示出，并且应当理解的是，这些实施例可具有各种修改和替代形式。另外应当理解的是，权利要求书不旨在限于所公开的特定形式，而是涵盖落入本公开的精神和范围内的所有修改、等同物和替换。

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1.一种超声波装置，包括：
超声波换能器，包括环形超声波阵列，其中所述环形超声波阵列至少部分地由被设置在压电层的第一表面上的多个同心环形电极限定，并且其中接地平面电极被设置在所述压电层的第二表面上；
外围支撑环，围绕所述超声波换能器的至少一部分；以及
柔性印刷电路板，包括：
细长柔性段；以及
分布段，与所述外围支撑环的至少一部分接触，使得延伸穿过所述细长柔性段的多个导电路径通过所述分布段路由到位于所述外围支撑环上的不同位置处的相应接触垫；
其中每个环形电极电连接到相应的接触垫；并且
其中所述柔性印刷电路板的至少一个导电路径是与所述接地平面电极电接触的接地导电路径，
所述超声波装置还包括背衬材料，所述背衬材料接触所述第一表面且从所述第一表面延伸，其中所述细长柔性段的远侧部分被封装在所述背衬材料中，使得所述细长柔性段的所述远侧部分从所述外围支撑环向内平行于且沿着所述第一表面延伸，并且在所述背衬材料内背离所述第一表面垂直地向外弯曲，而不接触引线接合且不接触所述第一表面。
2.根据权利要求1所述的超声波装置，其中所述多个导电路径在所述分布段内双向路由。
3.根据权利要求1或2所述的超声波装置，其中所述细长柔性段的所述远侧部分包括多个分支远侧段，所述多个分支远侧段在不同位置处与所述外围支撑环接触，其间限定了间隙。
4.根据权利要求3所述的超声波装置，其中所述分支远侧段中的一个或多个仅包括两个导电路径。
5.根据权利要求4所述的超声波装置，其中所述两个导电路径双向路由到不同的接触垫。
6.根据权利要求3所述的超声波装置，其中在每个间隙内形成一个或多个引线接合。
7.根据权利要求1至2中任一项所述的超声波装置，其中所述细长柔性段的所述远侧部分在所述背衬材料内相对于所述第一表面在范围为90度与180度之间的角度内弯曲。
8.根据权利要求1至2中任一项所述的超声波装置，其中所述细长柔性段被封装在所述背衬材料内且从所述背衬材料的远侧表面露出，而不会延伸超过所述背衬材料的侧表面。
9.根据权利要求8所述的超声波装置，其中所述细长柔性段相对于所述第一表面以90度的角度从所述背衬材料露出。
10.根据权利要求8所述的超声波装置，其中所述细长柔性段相对于所述第一表面以大于或等于90度的角度从所述背衬材料露出。
11.根据权利要求1至2中任一项所述的超声波装置，其中所述细长柔性段的所述远侧部分的初始曲率半径小于8mm。
12.根据权利要求1至2中任一项所述的超声波装置，其中所述外围支撑环的接触所述分布段的接触表面在空间上偏离所述第一表面。
13.根据权利要求1所述的超声波装置，其中所述细长柔性段从所述外围支撑环向外延伸。
14.根据权利要求1至2中任一项所述的超声波装置，其中所述外围支撑环具有小于1mm的横向宽度。
15.根据权利要求1至2中任一项所述的超声波装置，其中所述外围支撑环完全围绕所述超声波换能器。
16.根据权利要求1至2中任一项所述的超声波装置，其中所述超声波换能器为圆盘形，并且其中所述外围支撑环是环状物的至少一部分。
17.根据权利要求16所述的超声波装置，其中所述环状物的外径小于10mm。
18.根据权利要求1至2中任一项所述的超声波装置，其中所述外围支撑环是导电的，并且其中所述外围支撑环与所述接地导电路径和所述接地平面电极电连通。
19.根据权利要求1至2中任一项所述的超声波装置，其中所述多个同心环形电极以稀疏配置设置，由此限定稀疏环形超声波阵列。
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