CN101412472B - 衬底输送装置 - Google Patents

衬底输送装置 Download PDF

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Publication number
CN101412472B
CN101412472B CN200810178322XA CN200810178322A CN101412472B CN 101412472 B CN101412472 B CN 101412472B CN 200810178322X A CN200810178322X A CN 200810178322XA CN 200810178322 A CN200810178322 A CN 200810178322A CN 101412472 B CN101412472 B CN 101412472B
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CN
China
Prior art keywords
mentioned
substrate
glass substrate
piece
arm
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Expired - Fee Related
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CN200810178322XA
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English (en)
Chinese (zh)
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CN101412472A (zh
Inventor
安田守
藤崎畅夫
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Olympus Corp
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Olympus Corp
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Publication of CN101412472A publication Critical patent/CN101412472A/zh
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Publication of CN101412472B publication Critical patent/CN101412472B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN200810178322XA 2002-04-18 2003-04-16 衬底输送装置 Expired - Fee Related CN101412472B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002-116581 2002-04-18
JP2002116581 2002-04-18
JP2002116581 2002-04-18

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN038087073A Division CN1646400B (zh) 2002-04-18 2003-04-16 衬底输送装置

Publications (2)

Publication Number Publication Date
CN101412472A CN101412472A (zh) 2009-04-22
CN101412472B true CN101412472B (zh) 2012-11-28

Family

ID=29243459

Family Applications (4)

Application Number Title Priority Date Filing Date
CN200810178322XA Expired - Fee Related CN101412472B (zh) 2002-04-18 2003-04-16 衬底输送装置
CN2008101766582A Expired - Fee Related CN101407283B (zh) 2002-04-18 2003-04-16 衬底输送装置
CN038087073A Expired - Fee Related CN1646400B (zh) 2002-04-18 2003-04-16 衬底输送装置
CN200810177914XA Expired - Fee Related CN101407284B (zh) 2002-04-18 2003-04-16 衬底输送装置

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN2008101766582A Expired - Fee Related CN101407283B (zh) 2002-04-18 2003-04-16 衬底输送装置
CN038087073A Expired - Fee Related CN1646400B (zh) 2002-04-18 2003-04-16 衬底输送装置
CN200810177914XA Expired - Fee Related CN101407284B (zh) 2002-04-18 2003-04-16 衬底输送装置

Country Status (5)

Country Link
JP (4) JP4384504B2 (ko)
KR (3) KR100848228B1 (ko)
CN (4) CN101412472B (ko)
TW (1) TWI226303B (ko)
WO (1) WO2003086917A1 (ko)

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* Cited by examiner, † Cited by third party
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JP4743716B2 (ja) * 2007-03-06 2011-08-10 東京エレクトロン株式会社 基板処理装置
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JP7503361B2 (ja) 2020-01-28 2024-06-20 株式会社ディスコ 搬送機構
JP7437186B2 (ja) * 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置
CN112278862B (zh) * 2020-10-13 2022-09-27 南京多脉智能设备有限公司 无摩擦气动式玻璃面板载具机械手
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CN101407284B (zh) 2012-09-05
CN101407283B (zh) 2013-07-10
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WO2003086917B1 (fr) 2004-04-08
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KR100848229B1 (ko) 2008-07-24
TWI226303B (en) 2005-01-11

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