KR102676392B1 - 펜타-치환된 디실란을 사용한 규소-함유 막의 증기 증착 - Google Patents

펜타-치환된 디실란을 사용한 규소-함유 막의 증기 증착 Download PDF

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KR102676392B1
KR102676392B1 KR1020187019584A KR20187019584A KR102676392B1 KR 102676392 B1 KR102676392 B1 KR 102676392B1 KR 1020187019584 A KR1020187019584 A KR 1020187019584A KR 20187019584 A KR20187019584 A KR 20187019584A KR 102676392 B1 KR102676392 B1 KR 102676392B1
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approximately
silicon
containing film
forming composition
reactor
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KR20180099716A (ko
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진-마크 지랄드
창히 코
이반 오슈체프코브
카주타카 야나기타
신고 오쿠보
나오토 노다
줄리엔 가티뉴
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레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드
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    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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