KR100929728B1 - 대면적 기판 처리 시스템용 로드락 챔버 - Google Patents
대면적 기판 처리 시스템용 로드락 챔버 Download PDFInfo
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- KR100929728B1 KR100929728B1 KR1020040083492A KR20040083492A KR100929728B1 KR 100929728 B1 KR100929728 B1 KR 100929728B1 KR 1020040083492 A KR1020040083492 A KR 1020040083492A KR 20040083492 A KR20040083492 A KR 20040083492A KR 100929728 B1 KR100929728 B1 KR 100929728B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
Abstract
Description
Claims (52)
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- 로드락 챔버로서,진공 챔버에 결합되는 제 1 측벽, 팩토리 인터페이스에 결합되는 제 2 측벽, 및 상기 제 1 및 제 2 측벽에 결합되는 제 3 측벽을 갖는 챔버 바디;상기 챔버 바디에 형성된 수직으로 적층된 N개의 기판 전달 챔버 - 상기 N은 2 이상의 정수임 - ; 및인접한 기판 전달 챔버들을 주위와 절연시키고 분리시키는 N-1개의 내부 벽; 및각각의 기판 전달 챔버에 배치된 하나 이상의 정렬 메커니즘을 포함하고,각각의 내부 벽의 상부면은 상기 제 1 및 제 2 측벽 사이에서 연장되는 다수의 그루브를 포함하며, 상기 그루브는 기판 전달 로봇의 엔드 이펙터의 일부 또는 전부를 수용하며,상기 정렬 메커니즘의 각각은,상기 제 3 측벽을 통해 상기 챔버 바디에 형성된 리세스로 연장하는 샤프트;상기 리세스로부터 상기 챔버 바디로 연장하는 샤프트에 결합된 레버;상기 레버의 제 1 단부에 결합되는 2개의 롤러; 및상기 제 3 측벽의 외측부 상의 상기 샤프트에 결합된 액추에이터를 더 포함하고,상기 액추에이터는 상기 챔버 바디에 배치된 기판의 인접한 에지에 대해 상기 롤러를 압박하는,로드락 챔버.
- 제 18 항에 있어서, 상기 정렬 메커니즘은,상기 챔버 바디에 결합되는 하우징으로서, 이를 통하는 샤프트를 갖는 하우징; 및상기 챔버 바디로부터 진공 누설을 막기 위해 상기 하우징 및 샤프트 사이에 배치된 밀봉부를 더 포함하는 것을 특징으로 하는 로드락 챔버.
- 제 18 항에 있어서,상기 샤프트가 상기 챔버 바디와 피봇가능하게 결합되는 것을 특징으로 하는 로드락 챔버.
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- 로드락 챔버로서,진공 챔버에 결합되는 제 1 측벽, 팩토리 인터페이스에 결합되는 제 2 측벽을 가지는 챔버 바디로서, 내부에 N개의 수직으로 적층된 기판 전달 챔버가 형성된 챔버 바디 - 상기 N은 2 이상의 정수임 - ;인접한 기판 전달 챔버들을 주위와 절연시키고 분리시키는 N-1개의 내부 벽;상기 챔버 바디를 통해 형성되며 상기 기판 전달 챔버 안팎으로 기판을 전달하기 위한 2개 이상의 액서스 포트;상기 기판 전달 챔버에 배치된 기판 지지체;상기 제 1 및 제 2 측벽 사이에서 연장되는 다수의 그루브;상기 기판 지지체를 기준으로 예정된 위치로 기판을 선택적으로 이동시키도록 구성되며 상기 기판 전달 챔버에 배치된 제 1 정렬 메커니즘 및 제 2 정렬 메커니즘; 및상기 기판 전달 챔버 외측에 배치되며 상기 제 1 정렬 메커니즘에 결합되는 제 1 액추에이터를 포함하고,상기 그루브는 기판 전달 로봇의 엔드 이펙터의 일부 또는 전부를 수용하는,로드락 챔버.
- 제 40 항에 있어서, 상기 제 1 정렬 메커니즘은,상기 챔버 바디를 통해 형성된 슬롯을 거쳐 연장되며 제 1 단부에서 상기 제 1 액추에이터와 결합되는 레버;상기 기판 지지체의 평면에 수직인 회전축을 가지며, 상기 레버의 제 2 단부와 결합되는 2개의 롤러;상기 슬롯 상에 밀봉가능하게 배치된 하우징; 및상기 챔버 바디로부터 진공 누설 없이 상기 레버와 상기 제 1 액추에이터의 결합을 용이하게 하는 밀봉부를 더 포함하는 것을 특징으로 하는 로드락 챔버.
- 제 41 항에 있어서,상기 레버는 상기 챔버 바디와 피봇가능하게 결합되는 것을 특징으로 하는 로드락 챔버.
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Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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US51272703P | 2003-10-20 | 2003-10-20 | |
US60/512,727 | 2003-10-20 | ||
US10/832,795 US7207766B2 (en) | 2003-10-20 | 2004-04-26 | Load lock chamber for large area substrate processing system |
US10/832,795 | 2004-04-26 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070050235A Division KR100978708B1 (ko) | 2003-10-20 | 2007-05-23 | 대면적 기판 처리 시스템용 로드락 챔버 |
Publications (2)
Publication Number | Publication Date |
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KR20050037964A KR20050037964A (ko) | 2005-04-25 |
KR100929728B1 true KR100929728B1 (ko) | 2009-12-03 |
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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KR1020040083492A KR100929728B1 (ko) | 2003-10-20 | 2004-10-19 | 대면적 기판 처리 시스템용 로드락 챔버 |
KR1020070050235A KR100978708B1 (ko) | 2003-10-20 | 2007-05-23 | 대면적 기판 처리 시스템용 로드락 챔버 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020070050235A KR100978708B1 (ko) | 2003-10-20 | 2007-05-23 | 대면적 기판 처리 시스템용 로드락 챔버 |
Country Status (6)
Country | Link |
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US (2) | US7207766B2 (ko) |
EP (1) | EP1526565A3 (ko) |
JP (2) | JP2005175440A (ko) |
KR (2) | KR100929728B1 (ko) |
CN (2) | CN100382234C (ko) |
TW (1) | TWI294865B (ko) |
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- 2004-10-20 CN CNB2004100981437A patent/CN100382234C/zh active Active
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Also Published As
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US20070140814A1 (en) | 2007-06-21 |
JP2009200518A (ja) | 2009-09-03 |
KR20070075368A (ko) | 2007-07-18 |
KR20050037964A (ko) | 2005-04-25 |
TWI294865B (en) | 2008-03-21 |
CN101145506A (zh) | 2008-03-19 |
TW200530105A (en) | 2005-09-16 |
KR100978708B1 (ko) | 2010-08-31 |
US7207766B2 (en) | 2007-04-24 |
CN101145506B (zh) | 2012-09-05 |
EP1526565A2 (en) | 2005-04-27 |
CN1638025A (zh) | 2005-07-13 |
CN100382234C (zh) | 2008-04-16 |
EP1526565A3 (en) | 2011-07-06 |
US7651315B2 (en) | 2010-01-26 |
JP2005175440A (ja) | 2005-06-30 |
US20050095088A1 (en) | 2005-05-05 |
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