KR100663358B1 - 셀 다이오드들을 채택하는 상변이 기억소자들 및 그 제조방법들 - Google Patents

셀 다이오드들을 채택하는 상변이 기억소자들 및 그 제조방법들 Download PDF

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KR100663358B1
KR100663358B1 KR1020050015564A KR20050015564A KR100663358B1 KR 100663358 B1 KR100663358 B1 KR 100663358B1 KR 1020050015564 A KR1020050015564 A KR 1020050015564A KR 20050015564 A KR20050015564 A KR 20050015564A KR 100663358 B1 KR100663358 B1 KR 100663358B1
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word lines
semiconductor
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semiconductor patterns
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KR20060094424A (ko
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변현근
조우영
김두응
신윤승
곽충근
강상범
조백형
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삼성전자주식회사
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Priority to KR1020050015564A priority Critical patent/KR100663358B1/ko
Priority to US11/324,112 priority patent/US7427531B2/en
Priority to EP06002902A priority patent/EP1696441A1/en
Priority to JP2006043096A priority patent/JP2006237605A/ja
Priority to CNB2006100095948A priority patent/CN100557811C/zh
Publication of KR20060094424A publication Critical patent/KR20060094424A/ko
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Priority to US12/196,137 priority patent/US7994493B2/en
Priority to JP2012224841A priority patent/JP2013033991A/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20—Multistable switching devices, e.g. memristors
    • H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/061—Shaping switching materials
    • H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/821—Device geometry
    • H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/881—Switching materials
    • H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/70—Resistive array aspects
    • G11C2213/72—Array wherein the access device being a diode

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
KR1020050015564A 2005-02-24 2005-02-24 셀 다이오드들을 채택하는 상변이 기억소자들 및 그 제조방법들 Expired - Fee Related KR100663358B1 (ko)

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Application Number Priority Date Filing Date Title
KR1020050015564A KR100663358B1 (ko) 2005-02-24 2005-02-24 셀 다이오드들을 채택하는 상변이 기억소자들 및 그 제조방법들
US11/324,112 US7427531B2 (en) 2005-02-24 2005-12-30 Phase change memory devices employing cell diodes and methods of fabricating the same
EP06002902A EP1696441A1 (en) 2005-02-24 2006-02-14 Phase change memory device and a method of fabricating the same
JP2006043096A JP2006237605A (ja) 2005-02-24 2006-02-20 セルダイオードを採用する相変移記憶素子及びその製造方法
CNB2006100095948A CN100557811C (zh) 2005-02-24 2006-02-24 使用单元二极管的相变存储器件的制造方法
US12/196,137 US7994493B2 (en) 2005-02-24 2008-08-21 Phase change memory devices employing cell diodes and methods of fabricating the same
JP2012224841A JP2013033991A (ja) 2005-02-24 2012-10-10 セルダイオードを採用する相変移記憶素子及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050015564A KR100663358B1 (ko) 2005-02-24 2005-02-24 셀 다이오드들을 채택하는 상변이 기억소자들 및 그 제조방법들

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KR20060094424A KR20060094424A (ko) 2006-08-29
KR100663358B1 true KR100663358B1 (ko) 2007-01-02

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US (2) US7427531B2 (enExample)
EP (1) EP1696441A1 (enExample)
JP (2) JP2006237605A (enExample)
KR (1) KR100663358B1 (enExample)
CN (1) CN100557811C (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101069645B1 (ko) 2008-12-26 2011-10-04 주식회사 하이닉스반도체 열적 부담을 줄일 수 있는 상변화 메모리 소자 및 그 제조방법

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