JP2023145534A5 - - Google Patents

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JP2023145534A5
JP2023145534A5 JP2023115633A JP2023115633A JP2023145534A5 JP 2023145534 A5 JP2023145534 A5 JP 2023145534A5 JP 2023115633 A JP2023115633 A JP 2023115633A JP 2023115633 A JP2023115633 A JP 2023115633A JP 2023145534 A5 JP2023145534 A5 JP 2023145534A5
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chamber
protective layers
chamber component
component
protective
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JP2023115633A
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JP2023145534A (ja
JP7691453B2 (ja
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JP2023115633A 2013-06-20 2023-07-14 プラズマ耐食性希土類酸化物系薄膜コーティング Active JP7691453B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361837595P 2013-06-20 2013-06-20
US61/837,595 2013-06-20
US14/306,583 US9850568B2 (en) 2013-06-20 2014-06-17 Plasma erosion resistant rare-earth oxide based thin film coatings
US14/306,583 2014-06-17
JP2021000036A JP7368398B2 (ja) 2013-06-20 2021-01-04 プラズマ耐食性希土類酸化物系薄膜コーティング

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JP2021000036A Division JP7368398B2 (ja) 2013-06-20 2021-01-04 プラズマ耐食性希土類酸化物系薄膜コーティング

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JP2023145534A JP2023145534A (ja) 2023-10-11
JP2023145534A5 true JP2023145534A5 (enExample) 2023-10-19
JP7691453B2 JP7691453B2 (ja) 2025-06-11

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JP2016521573A Active JP6496308B2 (ja) 2013-06-20 2014-06-19 プラズマ耐食性希土類酸化物系薄膜コーティング
JP2019003509A Active JP6820359B2 (ja) 2013-06-20 2019-01-11 プラズマ耐食性希土類酸化物系薄膜コーティング
JP2021000036A Active JP7368398B2 (ja) 2013-06-20 2021-01-04 プラズマ耐食性希土類酸化物系薄膜コーティング
JP2023115633A Active JP7691453B2 (ja) 2013-06-20 2023-07-14 プラズマ耐食性希土類酸化物系薄膜コーティング

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JP2016521573A Active JP6496308B2 (ja) 2013-06-20 2014-06-19 プラズマ耐食性希土類酸化物系薄膜コーティング
JP2019003509A Active JP6820359B2 (ja) 2013-06-20 2019-01-11 プラズマ耐食性希土類酸化物系薄膜コーティング
JP2021000036A Active JP7368398B2 (ja) 2013-06-20 2021-01-04 プラズマ耐食性希土類酸化物系薄膜コーティング

Country Status (6)

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US (5) US9850568B2 (enExample)
JP (4) JP6496308B2 (enExample)
KR (3) KR102586972B1 (enExample)
CN (2) CN111900084B (enExample)
TW (5) TW202325541A (enExample)
WO (1) WO2014205212A1 (enExample)

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