JP2016139786A - コイル部品及びその製造方法 - Google Patents
コイル部品及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000004020 conductor Substances 0.000 claims abstract description 64
- 238000007747 plating Methods 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims description 17
- 229910000859 α-Fe Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 76
- 238000000034 method Methods 0.000 description 29
- 239000000463 material Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 230000000994 depressogenic effect Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000002952 polymeric resin Substances 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910018605 Ni—Zn Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910007565 Zn—Cu Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000006247 magnetic powder Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000805 composite resin Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000009824 pressure lamination Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/02—Fixed inductances of the signal type without magnetic core
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
- H05K1/113—Via provided in pad; Pad over filled via
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/06—Coil winding
- H01F41/082—Devices for guiding or positioning the winding material on the former
- H01F41/084—Devices for guiding or positioning the winding material on the former for forming pancake coils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/165—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed inductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
- H01F2017/002—Details of via holes for interconnecting the layers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/08—Magnetic details
- H05K2201/083—Magnetic materials
- H05K2201/086—Magnetic materials for inductive purposes, e.g. printed inductor with ferrite core
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09672—Superposed layout, i.e. in different planes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Coils Or Transformers For Communication (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
110 コイル導体
111 ビアパッド
112 ビア
120 絶縁層
130 ベース基材
Claims (14)
- ビアパッドを含む多層構造のコイル導体と、
各層の前記ビアパッド間を連結するビアと、を含み、隣接する二つの層の前記ビアパッドは一部または全部が重なり、前記ビアパッドを介して連続する二つの層の前記ビアは互いにずれて配置される、コイル部品。 - 全層の前記ビアは互いに異なる垂直線上に配置される、請求項1に記載のコイル部品。
- 前記ビアの側端と前記ビアパッドの側端が一直線上に位置する、請求項1または2に記載のコイル部品。
- 前記ビアの幅は前記ビアパッドの幅の半分である、請求項1から3のいずれか1項に記載のコイル部品。
- 前記コイル導体は絶縁層に内設され、前記絶縁層はベース基材上に備えられる、請求項1から4のいずれか1項に記載のコイル部品。
- 前記ベース基材はフェライト焼結体である、請求項5に記載のコイル部品。
- ビアパッドを含む多層構造のコイル導体と、
各層の前記ビアパッド間を連結するビアと、を含み、隣接する二つの層の前記ビアパッドは一部または全部が重なり、前記ビアパッドを介して連続する二つの層の前記ビアは互いにずれて配置され、且つ、偶数層に位置する前記ビアまたは奇数層に位置する前記ビアは同一の垂直線上に配置される、コイル部品。 - 前記ビアの側端と前記ビアパッドの側端が一直線上に位置する、請求項7に記載のコイル部品。
- 前記ビアの幅は前記ビアパッドの幅の半分である、請求項7または8に記載のコイル部品。
- 前記コイル導体は絶縁層に内設され、前記絶縁層はベース基材上に備えられる、請求項7から9のいずれか1項に記載のコイル部品。
- 前記ベース基材はフェライト焼結体である、請求項10に記載のコイル部品。
- 第1絶縁層上に第1ビアパッドを含む第1コイル導体を形成し、前記第1コイル導体を覆蓋する第2絶縁層を、前記第1絶縁層上に形成する段階と、
前記第1ビアパッド上に形成されたビアを通じて層間連結され、前記第1ビアパッドと一部または全部が重なる第2ビアパッドを含む第2コイル導体を、前記第2絶縁層上に形成する段階と、
前記第2コイル導体を覆蓋する第3絶縁層を、前記第2絶縁層上に形成し、前記ビアと重ならないビアホールを形成して前記第2ビアパッドの一部領域を露出させる段階と、
前記ビアホールにめっきされて形成されたビアを通じて層間連結され、前記第2ビアパッドと一部または全部が重なる第3ビアパッドを含む第3コイル導体を、前記第3絶縁層上に形成し、前記第3コイル導体を覆蓋する第4絶縁層を、前記第3絶縁層上に形成する段階と、を含む、コイル部品の製造方法。 - 前記第3コイル導体を形成する段階は、前記ビアホールの内壁と前記第3絶縁層上にシード層を形成する段階と、前記シード層上にレジスト層を付着した後に前記レジスト層をパターニングする段階と、パターニングされた前記レジストのパターンの間に金属を成長させる段階と、前記レジストを除去した後、外部に露出した前記シード層をエッチングする段階と、を含む、請求項12に記載のコイル部品の製造方法。
- 前記第1コイル導体を形成する前に、ベース基材上に前記第1絶縁層を形成し、前記第1絶縁層上に前記第1コイル導体を形成する、請求項12または13に記載のコイル部品の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2015-0012772 | 2015-01-27 | ||
KR1020150012772A KR101642643B1 (ko) | 2015-01-27 | 2015-01-27 | 코일 부품 및 이의 제조 방법 |
Publications (1)
Publication Number | Publication Date |
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JP2016139786A true JP2016139786A (ja) | 2016-08-04 |
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JP2015229395A Pending JP2016139786A (ja) | 2015-01-27 | 2015-11-25 | コイル部品及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9986640B2 (ja) |
JP (1) | JP2016139786A (ja) |
KR (1) | KR101642643B1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2020194866A (ja) * | 2019-05-28 | 2020-12-03 | 株式会社オートネットワーク技術研究所 | 変成器 |
JP2022143260A (ja) * | 2021-03-17 | 2022-10-03 | 株式会社村田製作所 | インダクタ部品およびその製造方法 |
JP7435528B2 (ja) | 2021-04-05 | 2024-02-21 | 株式会社村田製作所 | インダクタ部品 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN209496722U (zh) * | 2016-08-18 | 2019-10-15 | 株式会社村田制作所 | 层叠线圈 |
JP7066528B2 (ja) * | 2018-05-31 | 2022-05-13 | 日東電工株式会社 | 配線回路基板、その製造方法および配線回路シート |
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US20160217905A1 (en) | 2016-07-28 |
KR101642643B1 (ko) | 2016-07-29 |
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