JP2015135524A - マイクロリソグラフィ投影露光装置および投影レンズのための測定装置 - Google Patents
マイクロリソグラフィ投影露光装置および投影レンズのための測定装置 Download PDFInfo
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Abstract
【解決手段】マイクロリソグラフィ投影露光装置は、液浸動作のために構成されている投影レンズ(20)を含む。この目的で、液浸液(34)が、像側の投影レンズ(20)の最終レンズ(L5;54)と露光される感光層(26)との間に位置する液浸空間(44)に導入される。液浸液(34)内で生じる温度勾配に起因する屈折率の変動を低減するために、投影露光装置(10)は伝熱要素(50;501;502;503;504)を含み、それにより液浸液(34)の区域は指定の様態で加熱または冷却される。
【選択図】図3
Description
Claims (34)
- マイクロリソグラフィ投影露光装置であって、
投影光(13)を生成する照明システム(12)と、
感光層(26)上にマスク(24)を結像させる、複数の光学素子(L1〜L5;54)を含む投影レンズ(20)と、
像側の投影レンズ(20)の最終光学素子(L5;54)と感光層(26)との間に形成され、液浸液(34)で満たされる液浸空間(44)と
を備え、
液浸空間(44)の区域における温度を選択的に変えるための伝熱要素(50;501;502;503;504)を設けたことを特徴とするマイクロリソグラフィ投影露光装置。 - 伝熱要素(50;501)は、液浸動作の間に液浸液(34)と接触するような形で液浸空間(44)に配置されていることを特徴とする請求項1に記載の投影露光装置。
- 伝熱要素は加熱ワイヤ(501)であることを特徴とする請求項2に記載の投影露光装置。
- 液浸空間(44)は、伝熱要素(502)が配置されている壁(62)によって横方向に区画されていることを特徴とする請求項1に記載の投影露光装置。
- 伝熱要素はペルチェ素子(503)であることを特徴とする請求項1に記載の投影露光装置。
- 伝熱要素(503)は、伝熱要素(503)と区域との間で熱放射によって熱が交換されるように、液浸空間(44)からある距離で配置されていることを特徴とする請求項1に記載の投影露光装置。
- 伝熱要素(503)と液浸空間(44)との間に配置されて、熱放射の方向を変化させる方向性光学素子(66)を設けたこと特徴とする請求項6に記載の投影露光装置。
- 方向性光学素子(66)は正の屈折力を有することを特徴とする請求項7に記載の投影露光装置。
- 伝熱要素は加熱または冷却される平面放熱器(502)であることを特徴とする請求項6〜8のいずれか1項に記載の投影露光装置。
- 伝熱要素(503)の温度を測定する熱センサ(65)を設けたことを特徴とする請求項6〜9のいずれか1項に記載の投影露光装置。
- 熱センサ(65)は伝熱要素の加熱または冷却出力を調整する制御装置に接続されていることを特徴とする請求項10に記載の投影露光装置。
- 伝熱要素(504)は感光層(26)が適用される支持体(30)を位置決めするウェハステージ(70)に配置されることを特徴とする上記請求項のいずれか1項に記載の投影露光装置。
- 伝熱要素(504)は感光層(26)上に照明された明視野(58)とほぼ同じ対称を有することを特徴とする請求項12に記載の投影露光装置。
- 伝熱要素は、加熱または冷却媒体を前記ウェハステージ(70)内部で導通させるウェハステージ(70)に収容された複数のコンジット(504)を含むことを特徴とする請求項12また13に記載の投影露光装置。
- マイクロリソグラフィ投影露光装置であって、
投影光(13)を生成する照明システム(12)と、
複数の光学素子(L1〜L5;54)を含み、感光層(26)上にマスク(24)を結像させる投影レンズ(20)と、
像側の投影レンズ(20)の最終光学素子(L5;54)と感光層(26)との間に形成されて、液浸液(34)で満たされる液浸空間(44)と
を備え、
液浸空間(44)を少なくとも部分的に包囲し、
投影レンズ(20)の下面(49)に配置され、
感光層(26)に向けて延びる、
蒸発バリヤ(72)を設けたことを特徴とする、マイクロリソグラフィ投影露光装置。 - 蒸発バリヤ(72)は互いにある距離をおいて配置されている同心の少なくとも複数のリング(741〜744)を含むことを特徴とする請求項15に記載の投影露光装置。
- マイクロリソグラフィ用投影露光装置であって、
投影光(13)を生成する照明システム(12)と、
複数の光学素子(L1〜L5;54)を含み、感光層(26)上にマスク(24)を結像させる投影レンズ(20)と、
像側の投影レンズ(20)の最終光学素子(L5;54)と感光層(26)との間に形成されて、液浸液(34)で満たされる液浸空間(44)と
を備え、
液浸空間(44)を包囲し、それと流体連通している外室(78)が液浸液の蒸気相を含むように構成されているマイクロリソグラフィ用投影露光装置。 - 液浸液の蒸気相を外室(78)に供給する供給装置(84)を設けたことを特徴とする請求項17に記載の投影露光装置。
- 外室(78)における液浸液の蒸気相の圧力は、外室(78)内で支配的な温度時の液浸液の蒸気相の飽和蒸気圧に少なくともほぼ等しいように調整可能であることを特徴とする請求項17または18に記載の投影露光装置。
- 液浸空間(44)は液浸空間内に到る管(36)のための開口(96)が設けられている壁(94)によって区画されており、開口(96)の寸法は、液浸液(34)が管(36)と壁(94)との間に残存する隙間(98)に進入できるが、粘着力のために前記隙間(98)から流出できないような量だけ管(36)の外部寸法よりも大きいことを特徴とする、上記請求項のいずれか1項に記載の投影露光装置。
- 液浸液(34)用の容器(100)が液浸空間(44)の上方に配置され、その液浸空間と流体連通しており、それにより液浸液(34)は単に重力の結果として容器(100)から液浸空間(44)内に流れることができることを特徴とする上記請求項のいずれか1項に記載の投影露光装置。
- 液浸液(34)を検出する検出器(120)を設けたこと特徴とする上記請求項のいずれか1項に記載の投影露光装置。
- 検出器(120)は液浸液(34)が既定の閉じた領域を離れたかどうかを決定できるように構成されていることを特徴とする請求項22に記載の投影露光装置。
- 閉じた領域は投影レンズ(20)の下方で感光層(26)上に配置されることを特徴とする請求項23に記載の投影露光装置。
- 検出器(120)は互いにほぼ平行して配設された2個の導体(122、124)を含むことを特徴とする請求項23または24に記載の投影露光装置。
- 検出器(120)は導体(122、124)間のキャパシタンスを測定する測定回路(126)を含むことを特徴とする請求項25に記載の投影露光装置。
- マイクロリソグラフィ露光装置の投影レンズ(20)の結像特性を決定する測定装置であって、投影レンズ(20)の像側に配置される試験光学部品(140;140’)を備えており、
液浸液(34)が、像側の投影レンズ(20)の最終光学素子(54)と試験光学部品(140;140’)との間に形成された液浸空間(44)に導入され、
測定装置は液浸空間(44)の区域における温度を選択的に変化させる伝熱要素(148)を含むことを特徴とする測定装置。 - 試験光学部品(140;140’)は光に少なくとも部分的に透明な区域(150)を含み、光に透明な区域(150)は、その光に透明な区域(150)が構成されている材料よりも高い熱伝導率を有する材料から構成されている別の区域(142’)によって少なくとも部分的に包囲されていることとを特徴とする請求項27に記載の測定装置。
- 試験光学部品は点回折干渉計のピンホールマスク(140;140’)であることを特徴とする請求項28に記載の測定装置。
- マイクロリソグラフィ投影露光装置(10)のための投影レンズ(20)を製造する方法であって、
a)複数の光学素子から投影レンズを組み立てるステップと、
b)投影レンズ(20)の像側に配置される試験光学部品(140;140’)を含む測定装置に投影レンズを取り付けるステップと、
c)像側の投影レンズ(20)の最終光学素子(54)と試験光学部品(140;140’)との間に残存する液浸空間(44)に液浸液(34)を導入するステップと、
d)伝熱要素(50;501;502;503;504)によって液浸空間(44)の区域における液浸液(34)の温度を選択的に変化させるステップと、
e)投影レンズ(20)の結像特性を決定するステップと、
f)投影レンズ(20)の少なくとも1個の光学素子の位置を調整するステップと
を含む方法。 - 請求項30に記載の方法を使用して製造された投影レンズ。
- 微細構造化構成部品のマイクロリソグラフィ製造のための方法であって、
a)投影レンズ(20)を設けるステップと、
b)投影レンズ(20)の物体平面(22)にマスク(24)を配置するステップと、 c)像側の投影レンズ(20)の最終光学素子(L5;54)と投影レンズ(20)の像面(22)に配置される感光層(26)との間に形成された液浸空間(44)に液浸液(34)を導入するステップと、
d)伝熱要素(50;501;502;503;504)によって液浸空間(44)の区域における液浸液(34)の温度を選択的に変化させるステップと、
e)マスク(24)を感光層(26)上に投影するステップと
を含む方法。 - 液浸液(34)は、上記請求項32のe)に記載のいかなる投影も行われない時間間隔の間にのみポンプによって液浸空間において循環させられることを特徴とする請求項32に記載の方法。
- 請求項32または33に記載の方法によって製造されることを特徴とする微細構造化構成部品。
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- 2005-01-13 EP EP05700864A patent/EP1706793B1/en not_active Not-in-force
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- 2005-01-13 KR KR1020107006021A patent/KR101135232B1/ko not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
EP1706793A2 (en) | 2006-10-04 |
US20080309894A1 (en) | 2008-12-18 |
KR101135232B1 (ko) | 2012-04-12 |
EP1706793B1 (en) | 2010-03-03 |
US20130120723A1 (en) | 2013-05-16 |
WO2005071491A2 (en) | 2005-08-04 |
DE602005019689D1 (de) | 2010-04-15 |
KR20100046263A (ko) | 2010-05-06 |
JP2011166165A (ja) | 2011-08-25 |
CN1938646B (zh) | 2010-12-15 |
ATE459898T1 (de) | 2010-03-15 |
KR20100049652A (ko) | 2010-05-12 |
US20070070316A1 (en) | 2007-03-29 |
US20100141912A1 (en) | 2010-06-10 |
TW200525309A (en) | 2005-08-01 |
US20170082930A1 (en) | 2017-03-23 |
JP5898853B2 (ja) | 2016-04-06 |
US10345710B2 (en) | 2019-07-09 |
US8330935B2 (en) | 2012-12-11 |
WO2005071491A3 (en) | 2006-05-26 |
KR101204157B1 (ko) | 2012-11-22 |
US9436095B2 (en) | 2016-09-06 |
JP2007519238A (ja) | 2007-07-12 |
JP5992066B2 (ja) | 2016-09-14 |
CN1938646A (zh) | 2007-03-28 |
JP4843503B2 (ja) | 2011-12-21 |
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