JP2015079997A - オーバーヘッドホイスト搬送車 - Google Patents
オーバーヘッドホイスト搬送車 Download PDFInfo
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- JP2015079997A JP2015079997A JP2015012714A JP2015012714A JP2015079997A JP 2015079997 A JP2015079997 A JP 2015079997A JP 2015012714 A JP2015012714 A JP 2015012714A JP 2015012714 A JP2015012714 A JP 2015012714A JP 2015079997 A JP2015079997 A JP 2015079997A
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- overhead hoist
- storage container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F7/00—Methods or arrangements for processing data by operating upon the order or content of the data handled
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Abstract
Description
202 ストッカー
203 貯蔵容器
204 オーバーヘッド搬送システム
205 搬送車
208 トラック
210 FOUP
214 天井
220 第1のフロアー
226 第2のフロアー
250 第1のプーリー
251 第2のプーリー
252 ストッカーハウジング
254 ベルト
Claims (26)
- 以下を備えるマテリアル自動化取扱システム:
複数の貯蔵容器を含み、各貯蔵容器は、少なくともマテリアルの1ユニットを保持するようになっている少なくとも一つの貯蔵ユニット;及び
少なくとも一つのオーバーヘッドホイストを含み、このオーバーヘッドホイストは、所定の位置へ搬送するために複数の貯蔵容器の選ばれた一つにおける少なくとも一つのマテリアル・ユニットに直接にアクセスできるオーバーヘッドホイスト搬送サブシステム。 - できるオーバーヘッドホイストが貯蔵ユニット内に貯蔵するために選ばれた貯蔵容器へ少なくとも一つのマテリアル・ユニットを直接に配置するようになっている請求項1のシステム。
- 前記選ばれたマテリアル・ユニットは、前記貯蔵ユニットの外部へ動かすことで前記オーバーヘッドホイストへ向け直接に動かすようになっている請求項1のシステム。
- 前記貯蔵ユニットは、さらに、少なくとも一つの軸方向に前記マテリアル・ユニットを動かす機構を含む請求項3のシステム。
- 前記選ばれた貯蔵容器は、前記貯蔵ユニット内に配置の固定棚を備える請求項1のシステム。
- 前記オーバーヘッド搬送サブシステムは、前記オーバーヘッドホイストに結合した移送ステージを含み、この移送ステージは、オーバーヘッドホイストを第1の位置へ動かして前記固定棚の少なくとも一つのマテリアル・ユニットにアクセスできるようになっている請求項5のシステム。
- 前記移送ステージは、さらに、前記オーバーヘッドホイストを第2の位置へ動かして、該ホイストで前記貯蔵ユニットから少なくとも一つのマテリアル・ユニットを取り出すようになっている請求項6のシステム。
- 前記少なくとも一つの貯蔵ユニットは、縦型回転コンベヤストッカーを備えている請求項1のシステム。
- 前記縦型回転コンベヤストッカーは、選ばれた貯蔵容器を前記ストッカーの上位領域へ動かし、これによって前記オーバーヘッドホイストが前記選ばれた貯蔵容器の上位にある位置から少なくとも一つのマテリアル・ユニットにアクセスできるようになっている請求項8のシステム。
- 前記オーバーヘッドホイスト搬送サブシステムは、さらに、トラックと前記オーバーヘッドホイストを前記トラックにそって搬送する搬送車を含み、前記トラックの少なくとも一部は、前記ストッカーの上位領域において、前記選ばれた貯蔵容器の実質的な直上に位置するようになる請求項9のシステム。
- 前記縦型回転コンベヤストッカーは、選ばれた貯蔵容器を前記ストッカーの一方の側面に沿う第1の位置へ動かして、前記オーバーヘッドホイストが前記選ばれた貯蔵容器にそう第2の位置から少なくとも一つのマテリアル・ユニットにアクセスできるようになっている請求項8のシステム。
- 前記オーバーヘッドホイスト搬送サブシステムは、さらに、トラックと前記オーバーヘッドホイストを前記トラックにそって搬送する搬送車を含み、前記トラックの少なくとも一部は、前記ストッカーにそう前記第1の位置に近接の前記ストッカーの長さ方向軸と実質的に平行に配置されている請求項11のシステム。
- 前記オーバーヘッドホイストは、前記少なくとも一つのマテリアル・ユニットを保持することができるグリッパー部を含む請求項1のシステム。
- 前記マテリアル・ユニットは、カセットポッドを備える請求項1のシステム。
- 以下の工程を備えるマテリル自動化取扱システムの操作方法:
マテリアル貯蔵ユニット内にある複数の貯蔵容器の選ばれた一つによりマテリアルの少なくとも一つのユニットを保持し;
オーバーヘッドホイスト搬送サブシステムに含まれているオーバーヘッドホイストにより選ばれた貯蔵容器から直接に少なくとも一つのマテリアル・ユニットへアクセスし;そして
前記少なくとも一つのマテリアル・ユニットをオーバーヘッドホイスト搬送サブシステムにより所定の位置へ搬送すること。 - 前記貯蔵ユニット内へ続いて貯蔵するために、前記選ばれた貯蔵容器へ直にオーバーヘッドホイストにより前記少なくとも一つのマテリアル・ユニットを提供する工程をさらに含む請求項15の方法。
- 前記選ばれた貯蔵容器により前記オーバーヘッドホイストへ直に前記少なくとも一つのマテリアル・ユニットを提供する工程をさらに含み、前記選ばれた貯蔵容器は、可動の棚を備えている請求項15の方法。
- 前記貯蔵ユニットに含まれている機構により、少なくとも一つの軸方向に前記棚を動かす工程をさらに含む請求項17の方法。
- 移送ステージにより前記オーバーヘッドホイストを第1の位置へ動かして前記ホイストが前記選ばれた貯蔵容器から直に少なくとも一つのマテリアル・ユニットにアクセスする工程をさらに含み、前記選ばれた貯蔵容器は、固定の棚を備えている請求項15の方法。
- 前記オーバーヘッドホイストを前記移送ステージにより第2の位置へ動かして、前記ホイストが前記貯蔵ユニットから前記少なくとも一つのマテリアル・ユニットを取り出せるようにした工程をさらに含む請求項19の方法。
- 前記選ばれた貯蔵容器を前記貯蔵ユニットに含まれている回転コンベヤ機構により前記貯蔵ユニットの上位領域へ動かし、これによって前記オーバーヘッドホイストが前記選ばれた貯蔵容器の上方位置から前記少なくとも一つのマテリアル・ユニットにアクセスできるようになる工程をさらに含む請求項15の方法。
- トラックに沿って走行する搬送車、オーバーヘッドホイストで搬送される搬送車及び前記オーバーヘッドホイスト搬送サブシステムに含まれているトラックにより前記オーバーヘッドホイストを動かす工程をさらに含み、前記トラックの少なくとも一部が前記貯蔵ユニットの上位領域にある前記選ばれた貯蔵容器の実質的な直上位置に位置するようになっている請求項21の方法。
- 前記選ばれた貯蔵容器を前記貯蔵ユニットに含まれている回転コンベヤ機構により前記貯蔵ユニットの側面にそって第1の位置へ動かし、これによって前記オーバーヘッドホイストが前記選ばれた貯蔵容器にそう第2の位置から前記少なくとも一つのマテリアル・ユニットにアクセスできるようになる工程をさらに含む請求項15の方法。
- トラックにそって走行する搬送車、オーバーホイストが搬送する搬送車及び前記オーバーヘッドホイスト搬送サブシステムに含まれているトラックにより前記オーバーヘッドホイストを動かす工程をさらに含み、前記トラックの少なくとも一部が前記貯蔵ユニットの側面に沿う第1の位置に近接して前記貯蔵容器と実質的に平行に位置するようになっている請求項23の方法。
- 前記オーバーヘッドホイストのグリッパー部により前記少なくとも一つのマテリアル・ユニットをグリップする工程をさらに含む請求項15の方法。
- 前記オーバーヘッドホイストのグリッパー部により前記少なくとも一つのマテリアル・ユニットをグリップする工程をさらに含み、前記マテリアル・ユニットは、カセットポッドを備えている請求項25の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US38999302P | 2002-06-19 | 2002-06-19 | |
US60/389,993 | 2002-06-19 | ||
US41799302P | 2002-10-11 | 2002-10-11 | |
US60/417,993 | 2002-10-11 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014003564A Division JP5892479B2 (ja) | 2002-06-19 | 2014-01-10 | オーバーヘッドホイスト搬送車 |
Publications (2)
Publication Number | Publication Date |
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JP2015079997A true JP2015079997A (ja) | 2015-04-23 |
JP6256706B2 JP6256706B2 (ja) | 2018-01-10 |
Family
ID=30003132
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004515615A Expired - Lifetime JP4831521B2 (ja) | 2002-06-19 | 2003-03-20 | 縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム |
JP2011115010A Expired - Lifetime JP5796886B2 (ja) | 2002-06-19 | 2011-05-23 | オーバーヘッドホイスト搬送車 |
JP2011231707A Expired - Lifetime JP5796892B2 (ja) | 2002-06-19 | 2011-10-21 | オーバーヘッドホイスト搬送車 |
JP2012269548A Expired - Lifetime JP5435414B2 (ja) | 2002-06-19 | 2012-12-10 | マテリアル取扱システム |
JP2014003564A Expired - Lifetime JP5892479B2 (ja) | 2002-06-19 | 2014-01-10 | オーバーヘッドホイスト搬送車 |
JP2015012714A Expired - Lifetime JP6256706B2 (ja) | 2002-06-19 | 2015-01-26 | マテリアル取扱システム |
Family Applications Before (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004515615A Expired - Lifetime JP4831521B2 (ja) | 2002-06-19 | 2003-03-20 | 縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム |
JP2011115010A Expired - Lifetime JP5796886B2 (ja) | 2002-06-19 | 2011-05-23 | オーバーヘッドホイスト搬送車 |
JP2011231707A Expired - Lifetime JP5796892B2 (ja) | 2002-06-19 | 2011-10-21 | オーバーヘッドホイスト搬送車 |
JP2012269548A Expired - Lifetime JP5435414B2 (ja) | 2002-06-19 | 2012-12-10 | マテリアル取扱システム |
JP2014003564A Expired - Lifetime JP5892479B2 (ja) | 2002-06-19 | 2014-01-10 | オーバーヘッドホイスト搬送車 |
Country Status (7)
Country | Link |
---|---|
US (8) | US7165927B2 (ja) |
EP (2) | EP2790210A3 (ja) |
JP (6) | JP4831521B2 (ja) |
KR (1) | KR100882376B1 (ja) |
CN (2) | CN101648642B (ja) |
TW (1) | TWI286989B (ja) |
WO (1) | WO2004001582A1 (ja) |
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