JP5796892B2 - オーバーヘッドホイスト搬送車 - Google Patents
オーバーヘッドホイスト搬送車 Download PDFInfo
- Publication number
- JP5796892B2 JP5796892B2 JP2011231707A JP2011231707A JP5796892B2 JP 5796892 B2 JP5796892 B2 JP 5796892B2 JP 2011231707 A JP2011231707 A JP 2011231707A JP 2011231707 A JP2011231707 A JP 2011231707A JP 5796892 B2 JP5796892 B2 JP 5796892B2
- Authority
- JP
- Japan
- Prior art keywords
- overhead
- hoist
- overhead hoist
- stocker
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F7/00—Methods or arrangements for processing data by operating upon the order or content of the data handled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Description
202 ストッカー
203 貯蔵容器
204 オーバーヘッド搬送システム
205 搬送車
208 トラック
210 FOUP
214 天井
220 第1のフロアー
226 第2のフロアー
250 第1のプーリー
251 第2のプーリー
252 ストッカーハウジング
254 ベルト
Claims (1)
- オーバーヘッドホイストを搭載したオーバーヘッドホイスト搬送車であって、
前記オーバーヘッドホイストは、移動ステージ及びこの移動ステージの下方に取り付けられカセットポッドを把持するホイスト把持部を有し、
前記オーバーヘッドホイスト搬送車は、所定経路を画定する懸架軌道に沿って吊り下げられて移動し、且つ、前記オーバーヘッドホイストを前記懸架軌道よりも下方位置に搭載し、
前記移動ステージは、前記ホイスト把持部に把持されたカセットポッドがオーバーヘッドホイスト搬送車内に位置する第1の位置と、前記ホイスト把持部に把持されたカセットポッドの全部がオーバーヘッドホイスト搬送車の外に位置する第2の位置との間で、前記ホイスト把持部を水平方向に移動させ、
前記ホイスト把持部は、前記第1の位置から前記オーバーヘッドホイスト搬送車の直下に下降してカセットポッドを取り上げ又は配置し、且つ、前記第2の位置へ移動した後に第2の位置からその直下の前記第1の位置からの下降位置とは異なる高さの位置に下降してカセットポッドを取り上げ又は配置するオーバーヘッドホイスト搬送車
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US38999302P | 2002-06-19 | 2002-06-19 | |
US60/389,993 | 2002-06-19 | ||
US41799302P | 2002-10-11 | 2002-10-11 | |
US60/417,993 | 2002-10-11 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011115010A Division JP5796886B2 (ja) | 2002-06-19 | 2011-05-23 | オーバーヘッドホイスト搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012015565A JP2012015565A (ja) | 2012-01-19 |
JP5796892B2 true JP5796892B2 (ja) | 2015-10-21 |
Family
ID=30003132
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004515615A Expired - Lifetime JP4831521B2 (ja) | 2002-06-19 | 2003-03-20 | 縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム |
JP2011115010A Expired - Lifetime JP5796886B2 (ja) | 2002-06-19 | 2011-05-23 | オーバーヘッドホイスト搬送車 |
JP2011231707A Expired - Lifetime JP5796892B2 (ja) | 2002-06-19 | 2011-10-21 | オーバーヘッドホイスト搬送車 |
JP2012269548A Expired - Lifetime JP5435414B2 (ja) | 2002-06-19 | 2012-12-10 | マテリアル取扱システム |
JP2014003564A Expired - Lifetime JP5892479B2 (ja) | 2002-06-19 | 2014-01-10 | オーバーヘッドホイスト搬送車 |
JP2015012714A Expired - Lifetime JP6256706B2 (ja) | 2002-06-19 | 2015-01-26 | マテリアル取扱システム |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004515615A Expired - Lifetime JP4831521B2 (ja) | 2002-06-19 | 2003-03-20 | 縦型輪状コンベヤ及びオーバーヘッドホイストを基にした半導体製造のためのマテリアルの自動化処理システム |
JP2011115010A Expired - Lifetime JP5796886B2 (ja) | 2002-06-19 | 2011-05-23 | オーバーヘッドホイスト搬送車 |
Family Applications After (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012269548A Expired - Lifetime JP5435414B2 (ja) | 2002-06-19 | 2012-12-10 | マテリアル取扱システム |
JP2014003564A Expired - Lifetime JP5892479B2 (ja) | 2002-06-19 | 2014-01-10 | オーバーヘッドホイスト搬送車 |
JP2015012714A Expired - Lifetime JP6256706B2 (ja) | 2002-06-19 | 2015-01-26 | マテリアル取扱システム |
Country Status (7)
Country | Link |
---|---|
US (8) | US7165927B2 (ja) |
EP (2) | EP2790210A3 (ja) |
JP (6) | JP4831521B2 (ja) |
KR (1) | KR100882376B1 (ja) |
CN (2) | CN101648642B (ja) |
TW (1) | TWI286989B (ja) |
WO (1) | WO2004001582A1 (ja) |
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