US10381251B2 - Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists - Google Patents
Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists Download PDFInfo
- Publication number
- US10381251B2 US10381251B2 US13/492,341 US201213492341A US10381251B2 US 10381251 B2 US10381251 B2 US 10381251B2 US 201213492341 A US201213492341 A US 201213492341A US 10381251 B2 US10381251 B2 US 10381251B2
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- Prior art keywords
- overhead
- transport vehicle
- gripper
- foup
- overhead transport
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F7/00—Methods or arrangements for processing data by operating upon the order or content of the data handled
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Definitions
- the present invention relates generally to automated material handling systems, and more specifically to an automated material handling system that allows an overhead hoist to access work-in-process (WIP) parts directly from a WIP storage unit to increase the efficiency of the overall material handling system.
- WIP work-in-process
- Automated material handling systems are known that employ WIP storage units and overhead hoists to store and transport WIP parts between various workstations and/or processing machines in a product manufacturing environment.
- a typical process for fabricating an IC chip comprises various steps including deposition, cleaning, ion implantation, etching, and passivation steps. Further, each of these steps in the IC chip fabrication process is usually performed by a different processing machine such as a chemical vapor deposition chamber, an ion implantation chamber, or an etcher.
- the WIP parts e.g., semiconductor wafers, are typically transported between the different workstations and/or processing machines multiple times to perform the various process steps required for fabricating the IC chips.
- a conventional AMHS for manufacturing IC chips comprises a plurality of WIP storage units (also known as “stockers”) for storing the semiconductor wafers, and one or more overhead hoist transport vehicles for transporting the wafers between the various workstations and processing machines on the IC chip manufacturing floor.
- the semiconductor wafers stored in the WIP stockers are typically loaded into cassette pods such as Front Opening Unified Pods (FOUPs), which are subsequently transferred to an overhead transport vehicle configured to travel on a suspended track.
- FOUPs Front Opening Unified Pods
- each stocker is typically provided with a plurality of active input/output ports that work in conjunction with an internal robotic arm (which may provide up to three or more axes of movement) for loading and unloading the FOUPs to/from the stocker.
- the FOUPs are picked and placed from/to the input/output ports by the overhead hoist vehicle.
- One drawback of the conventional AMHS is that the efficiency of the overall system is limited by the time required for the robotic arm to access the FOUPs at the WIP stocker's active input/output ports. Because of the generally delicate nature of the semiconductor wafers, strict limits are normally imposed on the acceleration rate of the robotic arm. For this reason, a minimum amount of time is typically required for moving the FOUPs to and from the stocker's input/output ports. This minimum move time generally determines the stocker throughput, which dictates the number of stockers needed to support the desired IC chip production level and thus the total cost of the AMES. Although the material handling efficiency of the AMHS might be improved by increasing the number of active input/output ports on each stocker and by allowing the overhead transport vehicle to access multiple input/output ports simultaneously, providing additional input/output ports can significantly increase the cost of the stocker.
- a three or more axis internal robot in the stocker with several input/output ports, each having 1-3 axes of motion means that a typical stocker may have between 5 and 16 axes of motion. This is a very complex, low reliability, and costly solution for storing material.
- a highly efficient Automated Material Handling System (AMHS) is provided that allows an overhead hoist to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system.
- AMHS Automated Material Handling System
- the improved AMHS comprises an overhead hoist transport subsystem and at least one vertical carousel WIP storage unit (“stocker”) including a plurality of storage bins.
- the overhead hoist transport subsystem includes at least one overhead hoist transport vehicle configured to travel along a suspended track defining at least one predetermined route.
- the predetermined route passes over the vertical carousel stocker, which is configured to allow the overhead hoist to access one or more WIP parts directly from a selected one of the carousel storage bins.
- the selected carousel storage bin containing the desired WIP lot(s) is positioned at the top of the vertical carousel stocker substantially directly underneath the suspended track.
- the overhead hoist transport vehicle is moved along the suspended track to a position substantially directly above the selected carousel storage bin.
- the overhead hoist is then lowered toward the selected storage bin.
- the overhead hoist is operated to pick the desired WIP lot directly from the carousel storage bin, or to place one or more WIP lots in the carousel storage bin.
- the predetermined route defined by the suspended track passes parallel to the vertical carousel WIP stocker, which is configured to allow the overhead hoist to access one or more WIP parts directly from one of the carousel storage bins.
- the AMHS further includes an extraction mechanism, which works in conjunction with the vertical carousel stocker to suitably position the selected carousel storage bin containing the desired WIP lot(s) relative to the track.
- the extraction mechanism may be configured to move the selected carousel storage bin (e.g., a movable shelf) along a single servo-controlled axis from a first position adjacent the track to a second position substantially directly underneath the track.
- the overhead transport vehicle is moved along the track to a position substantially directly above the second position.
- the overhead hoist is lowered toward the second position.
- the selected carousel storage bin comprises a shelf positioned alongside the track, and the overhead hoist is mounted to a translating stage for picking and placing one or more WIP lots to the shelf at the side of the overhead transport vehicle.
- the overhead hoist is operated to pick the desired WIP lot directly from the selected storage bin, or to place one or more WIP lots in the selected storage bin.
- AMHS By configuring the AMHS to allow the overhead hoist to directly load and unload WIP parts to/from the carousel storage bins from a position above the respective storage bin, more efficient AMHS operation can be achieved.
- FIG. 1 is a perspective view of a conventional automated material handling system
- FIG. 2 is block diagram of a first embodiment of an automated material handling system according to the present invention
- FIG. 3 is a block diagram of a second embodiment of the automated material handling system of FIG. 2 ;
- FIG. 4 is a block diagram of a third embodiment of the automated material handling system of FIG. 2 ;
- FIGS. 5 a -5 b are block diagrams of a translating hoist vehicle accessing fixed storage positions according to the present invention.
- FIG. 6 is a block diagram of the translating hoist vehicle of FIGS. 5 a -5 b accessing material on a conveyer;
- FIG. 7 is a flow diagram of a method of operating the automated material handling system of FIG. 2 .
- An Automated Material Handling System (AMHS) is disclosed that can load and unload Work-In-Process (WIP) parts to/from a WIP storage unit with increased efficiency.
- the presently disclosed AMHS achieves such increased material handling efficiency by allowing top-loading/unloading of storage bins in a vertical carousel WIP storage unit by an overhead hoist positioned above the respective storage bin.
- FIG. 1 depicts a conventional AMHS 100 , which may be employed to automatically store and transport WIP parts between various workstations and/or processing machines in a product manufacturing environment, e.g., a clean environment for manufacturing Integrated Circuit (IC) chips.
- the conventional AMHS 100 comprises a WIP storage unit (“stocker”) 102 and an overhead hoist transport subsystem 104 .
- the WIP stocker 102 includes input and output ports 111 - 112
- the overhead hoist transport subsystem 104 includes a suspended track 108 and a plurality of overhead hoist transport vehicles 105 - 106 configured to travel on the track 108 .
- the WIP parts are transported in a cassette pod 110 such as a Front Opening Unified Pod (FOUP).
- the first overhead transport vehicle 105 travels along the track 108 and stops at a position suitable for unloading the FOUP 110 into the input port 111 or for loading another FOUP from the output port 112 of the stocker 102 . Further, the second overhead transport vehicle 106 waits on the track 108 until the first overhead transport vehicle 105 finishes unloading/loading the FOUP and moves out of the way.
- a cassette pod 110 such as a Front Opening Unified Pod (FOUP).
- the first overhead transport vehicle 105 travels along the track 108 and stops at a position suitable for unloading the FOUP 110 into the input port 111 or for loading another FOUP from the output port 112 of the stocker 102 . Further, the second overhead transport vehicle 106 waits on the track 108 until the first overhead transport vehicle 105 finishes unloading/loading the FOUP and moves out of the way.
- FOUP Front Opening Unified Pod
- FOUPs are unloaded from the overhead hoist into the input port 111 , loaded from the output port 112 into the overhead hoist, or otherwise accessed from within the stocker 102 by a robotic arm 107 , which may provide up to three or more axes of movement.
- the minimum amount of time required to access the FOUPs from the stocker 102 generally determines the stocker throughput, which dictates the number of stockers needed to support the desired production level. Accordingly, complex movements of the multi-axis robotic arm 107 for accessing the FOUPs may cause the minimum move time to increase, thereby increasing both the number of stockers needed in the AMHS 100 and the overall cost of the material handling system.
- FIG. 2 depicts an illustrative embodiment of an Automated Material Handling System (AMHS) 200 , in accordance with the present invention.
- the AMHS 200 comprises an overhead hoist transport subsystem 204 , and at least one vertical carousel WIP storage unit (“stocker”) 202 including a plurality of storage bins such as a carousel storage bin 203 .
- the vertical carousel WIP stocker 202 is configured to allow an overhead hoist in the overhead hoist transport subsystem 204 to access WIP parts directly from a selected one of the carousel storage bins.
- the AMHS 200 of FIG. 2 may be employed in a clean environment for manufacturing IC chips such as a 200 mm or 300 mm FAB plant, or any other suitable product manufacturing environment.
- the IC chip manufacturing environment includes first and second floors 220 and 226 , and a ceiling 214 .
- the first floor 220 typically comprises a waffle slab made of reinforced concrete
- the second floor 226 comprises a raised floor located above the waffle slab 220 .
- the vertical carousel stocker 202 is positioned on the waffle slab 220 .
- the raised floor 226 which is typically covered with an electrically nonconductive material and designed to meet specific loading and seismic requirements.
- the raised floor 226 may be located a distance 228 (about 0.6 m) above the waffle slab 220 and a distance 224 (greater than or equal to about 4.15 m) below the ceiling 214 .
- the overhead hoist is then operated to pick the FOUP 210 directly from the storage bin 203 for subsequent transport to a workstation or processing machine on the IC chip manufacturing floor. It is understood that the overhead hoist may alternatively be operated to place a FOUP in the carousel storage bin 203 .
- the carousel storage bins (e.g., the slide-mounted storage bin 332 ) are coupleable to the belt 354 at various spaced locations along the belt, and the belt 354 is looped between the first and second pulleys 350 - 351 to allow the storage bins to be rotatably positioned along the belt path by driving one of the pulleys 350 - 351 .
- the vertical carousel stocker 302 may have a height 318 (about 6 m).
- the selected slide-mounted storage bin e.g., the storage bin 332 containing the FOUP 310
- the extraction mechanism 330 may be incorporated into the stocker 302 and configured to move the storage bin 332 along a single servo-controlled axis 398 .
- the overhead transport vehicle 305 is then moved along the track 308 to a position directly above the extracted storage bin 332 .
- FIGS. 5 a -5 b depict a translating hoist vehicle subsystem 704 accessing fixed storage positions.
- the translating hoist vehicle subsystem 704 includes a suspended track 708 , and an overhead hoist transport vehicle 705 configured to travel on the track.
- the overhead transport vehicle 705 is configured to pick/place a FOUP 710 to a fixed storage position 732 .
- the overhead transport vehicle 705 may extend a distance 736 (about 0.9 m) below the ceiling 714 , and the storage position 732 may be disposed a distance 738 (about 2.6 m) above the raised IC chip manufacturing floor.
- the ceiling 714 may be a distance 790 (about 3.66 m) above the raised floor.
- the hoist gripper 835 carrying the FOUP 810 is raised and retracted via the translating stage 833 , thereby moving the FOUP 810 within the overhead transport vehicle 805 .
- the transport vehicle 805 then transports the FOUP 810 to a workstation or processing machine on the IC chip manufacturing floor.
- a method of operating the presently disclosed automated material handling system is illustrated by reference to FIG. 7 .
- a selected storage bin containing a FOUP is positioned within a vertical carousel stocker to allow access by an overhead hoist.
- the selected carousel storage bin may be positioned at the top or at the side of the vertical carousel stocker (see FIGS. 2-3 ).
- the overhead hoist transport vehicle is moved along a track, as depicted in step 904 , to a position adjacent the selected storage bin. In the event the selected storage bin is positioned at the top of the stocker, the overhead transport vehicle is positioned above the storage bin.
- the overhead transport vehicle In the event the selected storage bin is positioned at the side of the stocker, the overhead transport vehicle is positioned to the side of the storage bin.
- the overhead hoist is then extended from the transport vehicle and lowered, as depicted in step 906 , to allow the hoist gripper to contact the FOUP in the selected storage bin.
- the hoist gripper is operated, as depicted in step 908 , to pick the FOUP directly from the storage bin.
- the overhead hoist is then raised and retracted, as depicted in step 910 , to move the FOUP within the overhead transport vehicle. In this way, the FOUP is top-loaded from the selected storage bin to the overhead transport vehicle.
- the overhead transport vehicle transports, as depicted in step 912 , the FOUP to a workstation or processing machine on the product manufacturing floor.
Abstract
Description
Claims (16)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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US13/492,341 US10381251B2 (en) | 2002-06-19 | 2012-06-08 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/080,590 US10147627B2 (en) | 2002-06-19 | 2013-11-14 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/788,464 US9881823B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/755,928 US10141212B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/788,173 US9620397B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
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US38999302P | 2002-06-19 | 2002-06-19 | |
US41799302P | 2002-10-11 | 2002-10-11 | |
US10/393,526 US7165927B2 (en) | 2002-06-19 | 2003-03-20 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US11/652,707 US7771153B2 (en) | 2002-06-19 | 2007-01-12 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US12/724,194 US8197172B2 (en) | 2002-06-19 | 2010-03-15 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US13/492,341 US10381251B2 (en) | 2002-06-19 | 2012-06-08 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
Related Parent Applications (2)
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US10/393,526 Continuation US7165927B2 (en) | 2002-06-19 | 2003-03-20 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US12/724,194 Continuation US8197172B2 (en) | 2002-06-19 | 2010-03-15 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
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US14/080,590 Division US10147627B2 (en) | 2002-06-19 | 2013-11-14 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
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US20120288348A1 US20120288348A1 (en) | 2012-11-15 |
US10381251B2 true US10381251B2 (en) | 2019-08-13 |
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US11/652,707 Expired - Lifetime US7771153B2 (en) | 2002-06-19 | 2007-01-12 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US12/724,194 Expired - Lifetime US8197172B2 (en) | 2002-06-19 | 2010-03-15 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US13/492,341 Expired - Lifetime US10381251B2 (en) | 2002-06-19 | 2012-06-08 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/080,590 Expired - Lifetime US10147627B2 (en) | 2002-06-19 | 2013-11-14 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/788,464 Expired - Lifetime US9881823B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/788,173 Expired - Lifetime US9620397B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/755,928 Expired - Lifetime US10141212B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
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US10/393,526 Expired - Lifetime US7165927B2 (en) | 2002-06-19 | 2003-03-20 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US11/652,707 Expired - Lifetime US7771153B2 (en) | 2002-06-19 | 2007-01-12 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US12/724,194 Expired - Lifetime US8197172B2 (en) | 2002-06-19 | 2010-03-15 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
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US14/080,590 Expired - Lifetime US10147627B2 (en) | 2002-06-19 | 2013-11-14 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/788,464 Expired - Lifetime US9881823B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/788,173 Expired - Lifetime US9620397B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
US14/755,928 Expired - Lifetime US10141212B2 (en) | 2002-06-19 | 2015-06-30 | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
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EP (2) | EP2790210A3 (en) |
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KR (1) | KR100882376B1 (en) |
CN (2) | CN100520706C (en) |
TW (1) | TWI286989B (en) |
WO (1) | WO2004001582A1 (en) |
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