JP2000150622A - Overhead traveling transporter with hoist - Google Patents
Overhead traveling transporter with hoistInfo
- Publication number
- JP2000150622A JP2000150622A JP10322696A JP32269698A JP2000150622A JP 2000150622 A JP2000150622 A JP 2000150622A JP 10322696 A JP10322696 A JP 10322696A JP 32269698 A JP32269698 A JP 32269698A JP 2000150622 A JP2000150622 A JP 2000150622A
- Authority
- JP
- Japan
- Prior art keywords
- light
- ceiling
- floor
- overhead traveling
- basis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A30/00—Adapting or protecting infrastructure or their operation
- Y02A30/30—Adapting or protecting infrastructure or their operation in transportation, e.g. on roads, waterways or railways
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体ウエーハや
半導体デバイス等の製造に用いられるホイスト付天井走
行搬送装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an overhead traveling transfer device with a hoist used for manufacturing semiconductor wafers and semiconductor devices.
【０００２】[0002]
【従来の技術】クリーンルーム内での半導体デバイスの
製造において、ウエーハを入れたキャリアは、自動化さ
れた搬送装置によって搬送されることが多い。図１４
は、ＯＨＴ(Overhead Hoist Transport)と呼ばれる天井
走行式の搬送装置の一従来例を示すものである。図１４
における１はＯＨＴの搬送車、２は搬送車１を吊り下
げ、移動させるためのレールである。３は搬送車１によ
って搬送される、ウエーハを入れたキャリア、４はこの
キャリアに収納されたウエーハである。５はウエーハの
プロセス装置、６はこのプロセス装置５のロードポート
である。2. Description of the Related Art In the manufacture of semiconductor devices in a clean room, a carrier containing a wafer is often transferred by an automated transfer device. FIG.
1 shows a conventional example of an overhead traveling type transport apparatus called OHT (Overhead Hoist Transport). FIG.
Reference numeral 1 denotes an OHT carrier, and 2 denotes a rail for suspending and moving the carrier 1. Numeral 3 denotes a carrier loaded with a wafer, which is transported by the transport vehicle 1, and numeral 4 denotes a wafer stored in the carrier. Reference numeral 5 denotes a wafer processing device, and reference numeral 6 denotes a load port of the processing device 5.
【０００３】このＯＨＴのレール２は、図１５に示すよ
うな形で天井から吊り下げられている。図１５における
７は、レール２を天井から吊り下げるための支持部材で
ある。これに対し、ウエーハ４を処理するプロセス装置
５は、図１６に示すような形で、床８の上に設置されて
いる。９は床８とプロセス装置５の位置関係を調節する
ためのアジャスタボルトである。なお、以後の説明にお
いて、同一の構成には同一の符号を付し、その説明を省
略する。The OHT rail 2 is suspended from the ceiling in the form shown in FIG. Reference numeral 7 in FIG. 15 denotes a support member for suspending the rail 2 from the ceiling. On the other hand, a process apparatus 5 for processing a wafer 4 is installed on a floor 8 in a form as shown in FIG. Reference numeral 9 denotes an adjuster bolt for adjusting the positional relationship between the floor 8 and the process device 5. In the following description, the same components are denoted by the same reference numerals, and description thereof will be omitted.
【０００４】上記のようなＯＨＴ施設において、ＯＨＴ
からプロセス装置５へキャリア３を自動的に移載するに
は、これらのシステムの設置時に、ＯＨＴと、プロセス
装置５及びロードポート６との位置関係を調整し、キャ
リア３の移載に支障がないようにする必要があった。In the above-mentioned OHT facilities, OHT
In order to automatically transfer the carrier 3 from the apparatus to the process device 5, the positional relationship between the OHT, the process device 5 and the load port 6 is adjusted when installing these systems, so that the transfer of the carrier 3 is not hindered. It was necessary not to.
【０００５】[0005]
【発明が解決しようとする課題】しかし、この従来技術
には、次のような問題があった。すなわち、上記自動移
載においては、ＯＨＴと、プロセス装置５及びロードポ
ート６とが所定の位置関係を維持していることを前提と
して動作するものであるから、天井と床の位置関係が装
置を設置した後に変化すると、移載がうまくいかなくな
る。例えば、地震や積雪の重み等で天井が変形したよう
な場合、移載がうまくいかなくなる。However, this prior art has the following problems. That is, in the above automatic transfer, the operation is performed on the premise that the OHT and the process device 5 and the load port 6 maintain a predetermined positional relationship. If it changes after installation, the transfer will not work. For example, if the ceiling is deformed due to the weight of an earthquake or snow, the transfer will not be successful.
【０００６】本発明は、上記の問題を解決するためにな
されたもので、天井が変形したような場合に異常を検知
して移載ミスを無くし、高価な搬送物を壊すことがない
移載装置を提供するものである。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem. In the case where the ceiling is deformed, an abnormality is detected to eliminate a transfer error and to prevent an expensive conveyed object from being damaged. An apparatus is provided.
【０００７】[0007]
【課題を解決するための手段】請求項１に記載の発明
は、天井に設置した軌道に沿って走行する台車と、床上
に設置された半導体製造装置との間で、搬送物を格納し
たキャリアを受け渡しするホイスト付天井走行搬送装置
において、前記ホイスト付天井走行搬送装置は、前記軌
道と半導体製造装置との位置関係を監視する監視装置を
有し、この監視装置は、床基準に設置された投光器また
は受光器のいずれか一方と、天井基準に設置された投光
器または受光器のいずれか他方とから成ることを特徴と
するホイスト付天井走行搬送装置である。According to a first aspect of the present invention, there is provided a carrier for storing a conveyed object between a truck traveling along a track installed on a ceiling and a semiconductor manufacturing apparatus installed on a floor. In the overhead traveling transfer device with a hoist for transferring, the overhead traveling transfer device with a hoist has a monitoring device for monitoring a positional relationship between the track and the semiconductor manufacturing device, and the monitoring device is installed on a floor basis. An overhead traveling and conveying apparatus with a hoist, comprising one of a light emitter and a light receiver and one of the other of the light emitter and the light receiver installed on a ceiling basis.
【０００８】請求項２に記載の発明は、前記監視装置
は、床基準に設置された投光器または受光器のいずれか
一方と、天井基準に設置された投光器または受光器のい
ずれか他方とに代えて、床基準に設置された投受光器ま
たは反射体のいずれか一方と、天井基準に設置された投
受光器または反射体のいずれか他方とから成ることを特
徴とする請求項１に記載のホイスト付天井走行搬送装置
である。According to a second aspect of the present invention, the monitoring device is characterized in that one of the light emitter and the light receiver installed on the floor is replaced by one of the light emitter and the light receiver installed on the ceiling. 2. The method according to claim 1, further comprising one of a light emitter / receiver or a reflector installed on a floor reference and one of the other light emitter / receiver or a reflector installed on a ceiling reference. It is a ceiling traveling transfer device with a hoist.
【０００９】請求項３に記載の発明は、前記監視装置
は、床基準に設置された投光器または受光器のいずれか
一方と、天井基準に設置された投光器または受光器のい
ずれか他方とに代えて、天井または床のいずれか一方を
基準に設置された投光器および受光器と、天井または床
のいずれか他方を基準に設置され、前記投光器と受光器
との間の光路に配置された光通過孔を有する遮光手段と
から成ることを特徴とする請求項１に記載のホイスト付
天井走行搬送装置である。According to a third aspect of the present invention, in the monitoring device, one of the light emitter and the light receiver installed on a floor basis and the other of the light emitter and light receiver installed on a ceiling basis are replaced. A light transmitter and a light receiver installed on the basis of one of the ceiling and the floor, and a light passage installed on the other of the ceiling and the floor and arranged in an optical path between the light emitter and the light receiver 2. The overhead traveling and conveying device with a hoist according to claim 1, comprising a light shielding means having a hole.
【００１０】請求項４に記載の発明は、前記監視装置
は、床基準に設置された投光器または受光器のいずれか
一方と、天井基準に設置された投光器または受光器のい
ずれか他方とに代えて、床基準に設置された部位と天井
基準に設置された部位との距離を測る測距手段から成る
ことを特徴とする請求項１に記載のホイスト付天井走行
搬送装置である。[0010] According to a fourth aspect of the present invention, the monitoring device is characterized in that one of the light emitter and the light receiver installed on the floor is replaced by one of the light emitter and the light receiver installed on the ceiling. 2. The overhead traveling and conveying apparatus with a hoist according to claim 1, further comprising a distance measuring means for measuring a distance between a part installed on a floor basis and a part installed on a ceiling basis.
【００１１】請求項５に記載の発明は、前記測距手段
は、床基準に設置された部位と天井基準に設置された部
位とを結ぶワイヤと、このワイヤの伸縮を検出する伸縮
検出手段とから成ることを特徴とする請求項４に記載の
ホイスト付天井走行搬送装置である。According to a fifth aspect of the present invention, the distance measuring means includes a wire connecting a part installed on a floor basis and a part installed on a ceiling basis, and an expansion / contraction detection means for detecting expansion / contraction of the wire. The overhead traveling conveyance device with a hoist according to claim 4, comprising:
【００１２】[0012]
【発明の実施の形態】本発明の第１実施形態の構成を図
１に示す。天井走行式の搬送車１は、天井１０から支持
部材７を介して吊り下げられたレール２に沿って走行す
る。搬送車１は、ウエーハ４が収納されたキャリア３を
吊り下げて搬送し、床８上に設置されたプロセス装置５
のロードポート６に前記キャリア３をおろす。なお、図
１では、従来の技術の説明における図１６に示したアジ
ャスタボルト９は省略した。FIG. 1 shows the configuration of a first embodiment of the present invention. The overhead traveling vehicle 1 travels along a rail 2 suspended from a ceiling 10 via a support member 7. The transport vehicle 1 hangs and transports the carrier 3 containing the wafer 4, and the process device 5 installed on the floor 8
The carrier 3 is lowered to the load port 6. In FIG. 1, the adjuster bolt 9 shown in FIG. 16 in the description of the conventional technique is omitted.
【００１３】床８上には、パーティション１１が設置さ
れている。このパーティション１１は天井１０とは接し
ていない。パーティション１１の表面上には、位置関係
検出用の光源となるレーザ投光器１２が設けられてい
る。搬送車１のレーザ投光器１２と向かい合う面には、
レーザ投光器１２からの光線を検出するレーザ受光器１
３が設けられている。レーザ投受光器の詳細な構成を図
２に示す。レーザ受光器１３の前には、レーザ受光器１
３に入射する光線を所定のもののみに制限する穴１４ａ
が設けられた遮光板１４が置かれている。レーザ受光器
１３および遮光板１４は前記搬送車１の側面に固定され
ている。レーザ投光器１２が発したレーザ光は、穴１４
ａを通り、レーザ受光器１３で受光される。A partition 11 is provided on the floor 8. This partition 11 is not in contact with the ceiling 10. On the surface of the partition 11, a laser projector 12 as a light source for detecting a positional relationship is provided. On the surface of the carrier 1 facing the laser projector 12,
Laser receiver 1 for detecting a light beam from laser projector 12
3 are provided. FIG. 2 shows a detailed configuration of the laser projector. Before the laser receiver 13, the laser receiver 1
Hole 14a for restricting light rays incident on the light source 3 to only predetermined ones
The light-shielding plate 14 provided with is provided. The laser light receiver 13 and the light shielding plate 14 are fixed to the side surface of the carrier 1. The laser light emitted by the laser projector 12 is
The light passes through a and is received by the laser receiver 13.
【００１４】レーザ投光器１２、レーザ受光器１３の位
置関係は、搬送車１が移動し、レーザ投光器１２が発す
るレーザ光が穴１４ａを通ってレーザ受光器１３によっ
て受光されるとき、キャリア３がロードポート６の真上
に来るようになっている。The positional relationship between the laser projector 12 and the laser receiver 13 is such that when the carrier 1 moves and the laser beam emitted by the laser projector 12 is received by the laser receiver 13 through the hole 14a, the carrier 3 is loaded. It comes just above port 6.
【００１５】本実施形態の動作を説明する。搬送車１
は、その下部に、ウエーハ４が収納されたキャリア３を
吊り下げて搬送する。搬送車１は、天井に設けられたレ
ール２に沿って走行し、指定されたプロセス装置５の上
で停止する。搬送車１が停止すると、キャリア３が吊り
降ろされ、ロードポート６上に置かれる。The operation of this embodiment will be described. Carrier 1
Hangs and transports the carrier 3 containing the wafer 4 below it. The transport vehicle 1 travels along a rail 2 provided on a ceiling and stops on a designated process device 5. When the carrier 1 stops, the carrier 3 is suspended and placed on the load port 6.
【００１６】もし、天井１０が積雪等の影響で歪んでい
て、搬送車１がプロセス装置５の上に来ても、キャリア
３がロードポート６の真上に来なかったとする。このと
き、床８と天井１０との位置関係が、装置の設置時とは
変化しているので、前記床８に固定されているパーティ
ション１１上のレーザ投光器１２と、天井１０から吊り
下げられた搬送車１上に設けられたレーザ受光器１３と
の位置関係も変化している。従って、レーザ投光器１２
が発する光は、レーザ受光器１３に入射しないので、こ
の状態は異常と判断され、キャリア３が吊り降ろされて
しまうことはない。If the ceiling 10 is distorted due to the influence of snow or the like, and the carrier 1 comes over the process device 5, the carrier 3 does not come directly above the load port 6. At this time, since the positional relationship between the floor 8 and the ceiling 10 is different from that at the time of installation of the apparatus, the laser projector 12 on the partition 11 fixed to the floor 8 and the ceiling 10 are suspended. The positional relationship with the laser light receiver 13 provided on the carrier 1 is also changing. Therefore, the laser projector 12
Does not enter the laser receiver 13, this state is determined to be abnormal, and the carrier 3 is not suspended.
【００１７】なお、投受光の関係を逆にする、すなわち
搬送車１上のレーザ投光器からレーザ光を発射し、パー
ティション１１上の受光器で受光する構成とすることも
もちろん可能であり、この構成の方が費用がかからな
い。また、必ずしもレーザ光に限定されるものでもな
く、レンズで光束を絞った通常光等を用いて構成するこ
とも可能である。It is of course possible to reverse the relationship between light emission and light reception, that is, to emit laser light from the laser light emitter on the transport vehicle 1 and receive light with the light receiver on the partition 11. Is less expensive. Further, the configuration is not necessarily limited to laser light, and it is also possible to use normal light or the like whose light flux is narrowed by a lens.
【００１８】次に、本発明の第２実施形態を図３を参照
して説明する。本実施形態は、プロセス装置５の一部分
の背が高く、搬送車１とほぼ同じ高さがある場合であ
る。プロセス装置５の側面の、搬送車１の側面に設けら
れたレーザ投光器１３と向かい合う位置にレーザ受光器
１２が設けられている。本実施形態の動作は第１実施形
態と同様である。Next, a second embodiment of the present invention will be described with reference to FIG. In the present embodiment, a part of the process apparatus 5 is tall and has a height substantially equal to that of the carrier 1. A laser light receiver 12 is provided on a side surface of the process device 5 at a position facing a laser projector 13 provided on a side surface of the transport vehicle 1. The operation of this embodiment is the same as that of the first embodiment.
【００１９】次に、本発明の第３実施形態を図４を参照
して説明する。本実施形態においては、レーザ投光器１
２がパーティション１１上に、レーザ受光器１３がレー
ル２の支持部材７上に設けられている。この構成におい
ては、レーザ受光器１３の位置が固定されているので、
搬送車１の位置に関わらず常に天井１０と床８との位置
関係を監視できる。次に、本発明の第４実施形態を図５
を参照して説明する。本実施形態においては、レーザ投
光器１２がプロセス装置５上に、レーザ受光器１３がレ
ール２の支持部材７上に設けられている。この構成によ
っても位置関係の常時監視が可能である。Next, a third embodiment of the present invention will be described with reference to FIG. In the present embodiment, the laser projector 1
2 is provided on the partition 11, and the laser receiver 13 is provided on the support member 7 of the rail 2. In this configuration, since the position of the laser receiver 13 is fixed,
The positional relationship between the ceiling 10 and the floor 8 can always be monitored regardless of the position of the carrier 1. Next, a fourth embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG. In this embodiment, the laser projector 12 is provided on the process device 5 and the laser receiver 13 is provided on the support member 7 of the rail 2. With this configuration, it is also possible to constantly monitor the positional relationship.
【００２０】次に、本発明の第５実施形態を図６を参照
して説明する。本実施形態においては、レーザ投光器１
２がパーティション１１上に設けられ、レーザ受光器１
３が対向する位置に設けられた別のパーティション１１
上に設けられている。さらに、図７に示すような穴１５
ａが開けられた遮光板１５が、レール２の支持部材７に
固定されている。そして、レーザ投光器１２が発した光
は、遮光板１５の穴１５ａを通って、レーザ受光器１３
に入射する。天井１０の位置が変わった場合、穴１５ａ
の位置がずれるので、レーザ光がレーザ受光器１３に入
射せず、これにより、天井１０の位置ずれを検出でき
る。なお、この構成によっても位置関係の常時監視が可
能である。Next, a fifth embodiment of the present invention will be described with reference to FIG. In the present embodiment, the laser projector 1
2 is provided on the partition 11 and the laser receiver 1
Another partition 11 provided at the position where 3 faces
It is provided above. Further, as shown in FIG.
The light shielding plate 15 with “a” opened is fixed to the support member 7 of the rail 2. Then, the light emitted from the laser projector 12 passes through the hole 15a of the light shielding plate 15 and passes through the laser receiver 13
Incident on. When the position of the ceiling 10 changes, the hole 15a
, The laser light does not enter the laser receiver 13, whereby the positional shift of the ceiling 10 can be detected. It is to be noted that the positional relationship can be constantly monitored also with this configuration.
【００２１】次に、本発明の第６実施形態を図８を参照
して説明する。本実施形態においては、反射式の投受光
器が用いられている。図中の１６は投受光器で、これは
パーティション１１上に設けられている。１７は投受光
器１６からの光を反射する反射鏡である。反射鏡１７
は、レール２の支持部材７に固定されている。Next, a sixth embodiment of the present invention will be described with reference to FIG. In the present embodiment, a reflection type light emitter / receiver is used. In the figure, reference numeral 16 denotes a light emitting and receiving device, which is provided on the partition 11. Reference numeral 17 denotes a reflecting mirror that reflects light from the light emitting and receiving device 16. Reflector 17
Are fixed to the support member 7 of the rail 2.
【００２２】図９にこれらの詳しい構成を示す。投受光
器１６は、投光器１６ａおよび受光器１６ｂを内蔵して
いる。投受光器１６の前面には穴１８ａが開けられた遮
光板１８が設けられている。投受光器１６および遮光板
１８は、一体となってパーティション１１上に固定され
ている。投受光器１６に内蔵された投光器１６ａが発し
た光は、穴１８ａを通って反射鏡１７に達し、この反射
鏡１７で反射され、再度穴１８ａを通って受光器１６ｂ
に入射する。FIG. 9 shows a detailed configuration of these. The light emitting and receiving device 16 includes a light emitting device 16a and a light receiving device 16b. A light shielding plate 18 having a hole 18a is provided on the front surface of the light emitting and receiving device 16. The light emitter / receiver 16 and the light shielding plate 18 are integrally fixed on the partition 11. The light emitted by the light emitter 16a built in the light emitter / receiver 16 reaches the reflecting mirror 17 through the hole 18a, is reflected by the reflecting mirror 17, passes through the hole 18a again, and then passes through the light receiving device 16b.
Incident on.
【００２３】天井１０が正常位置にあれば、投光した光
は反射鏡１７で投光されてきた方向と同じ方向に反射さ
れ、受光器１６ｂで受光される。天井１０が歪むと、反
射鏡１７の角度が変わるので、光が同じ方向に反射され
ず、受光器１６ｂで受光されない。これにより、天井１
０の位置ずれを検出できる。If the ceiling 10 is at the normal position, the light projected is reflected in the same direction as the light projected by the reflecting mirror 17 and received by the light receiver 16b. When the ceiling 10 is distorted, the angle of the reflecting mirror 17 changes, so that light is not reflected in the same direction and is not received by the light receiver 16b. Thereby, the ceiling 1
A position shift of 0 can be detected.
【００２４】図１０に示す第７実施形態は、反射式の投
受光器１６をプロセス装置５上に直接設けた例である。
反射鏡１７は、第６実施形態と同様に、レール２の支持
部材７に固定されている。図１１に示す第８実施形態
は、反射式の投受光器１６を搬送車１の下面に下向きに
設置し、反射鏡１７をプロセス装置５のロードポート１
６上の、投受光器１６と向かい合う位置に設けたもので
ある。The seventh embodiment shown in FIG. 10 is an example in which a reflection type light emitter / receiver 16 is provided directly on the process apparatus 5.
The reflecting mirror 17 is fixed to the support member 7 of the rail 2 as in the sixth embodiment. In the eighth embodiment shown in FIG. 11, a reflection type light emitter / receiver 16 is installed downward on the lower surface of the transport vehicle 1 and a reflection mirror 17 is connected to the load port 1 of the process device 5.
6 is provided at a position facing the light emitting and receiving device 16.
【００２５】図１２に示す第９実施形態においては、ワ
イヤ式測距器１９が用いられている。ワイヤ式測距器１
９は、巻き取り状態のワイヤが引っ張られて巻き出され
る、あるいは巻き戻される際の巻き出しあるいは巻き戻
し量を検出し、ワイヤ式測距器１９本体が固定された物
体と、ワイヤ２０の先端が結ばれた物体との距離を測る
ものである。ワイヤ式測距器１９は、パーティション１
１上に固定されている。ワイヤ２０の先端は、レール２
の支持部材７に結びつけられている。従って、ワイヤ式
測距器１９と、支持部材７との位置関係が変化すれば、
この変化を検出することができる。In the ninth embodiment shown in FIG. 12, a wire type distance measuring device 19 is used. Wire type distance measuring device 1
Reference numeral 9 denotes an amount of unwinding or unwinding when the wound wire is pulled and unwound or unwound, and detects the object to which the wire type distance measuring device 19 main body is fixed and the tip of the wire 20. Is used to measure the distance to the connected object. The wire type distance measuring device 19 has the partition 1
1 fixed on. The tip of the wire 20 is the rail 2
Of the supporting member 7. Therefore, if the positional relationship between the wire type distance measuring device 19 and the support member 7 changes,
This change can be detected.
【００２６】図１３に示す第１０実施形態は、ワイヤ式
測距器１９をプロセス装置５上に直接設けたものであ
る。ワイヤ２０の先端は、第９実施形態と同様に、レー
ル２の支持部材７に結びつけられている。In the tenth embodiment shown in FIG. 13, the wire type distance measuring device 19 is provided directly on the process device 5. The distal end of the wire 20 is connected to the support member 7 of the rail 2 as in the ninth embodiment.
【００２７】[0027]
【発明の効果】本発明によれば、移載する前に正常に移
載できないことが分かるので、移載不良を防止できる。According to the present invention, it is known that the transfer cannot be performed normally before the transfer, so that the transfer failure can be prevented.
【図１】 本発明の第１実施形態の構成図。FIG. 1 is a configuration diagram of a first embodiment of the present invention.
【図２】 レーザ投受光器の詳細な構成図。FIG. 2 is a detailed configuration diagram of a laser projector.
【図３】 本発明の第２実施形態の構成図。FIG. 3 is a configuration diagram of a second embodiment of the present invention.
【図４】 本発明の第３実施形態の構成図。FIG. 4 is a configuration diagram of a third embodiment of the present invention.
【図５】 本発明の第４実施形態の構成図。FIG. 5 is a configuration diagram of a fourth embodiment of the present invention.
【図６】 本発明の第５実施形態の構成図。FIG. 6 is a configuration diagram of a fifth embodiment of the present invention.
【図７】 遮光板と光線の関係を示す図。FIG. 7 is a diagram showing a relationship between a light shielding plate and light rays.
【図８】 本発明の第６実施形態の構成図。FIG. 8 is a configuration diagram of a sixth embodiment of the present invention.
【図９】 投受光器と反射鏡の詳細な構成図。FIG. 9 is a detailed configuration diagram of a light emitting and receiving device and a reflecting mirror.
【図１０】 本発明の第７実施形態の構成図。FIG. 10 is a configuration diagram of a seventh embodiment of the present invention.
【図１１】 本発明の第８実施形態の構成図。FIG. 11 is a configuration diagram of an eighth embodiment of the present invention.
【図１２】 本発明の第９実施形態の構成図。FIG. 12 is a configuration diagram of a ninth embodiment of the present invention.
【図１３】 本発明の第１０実施形態の構成図。FIG. 13 is a configuration diagram of a tenth embodiment of the present invention.
【図１４】 天井走行式搬送装置の一従来例の構成図。FIG. 14 is a configuration diagram of a conventional example of an overhead traveling type transport device.
【図１５】 レールおよびその支持部材の詳細図。FIG. 15 is a detailed view of a rail and a supporting member thereof.
【図１６】 床とプロセス装置との関係を示す図。FIG. 16 is a diagram showing a relationship between a floor and a process device.
１ 搬送車 ２ レール ３ キ
ャリア ４ ウエーハ ５ プロセス装置 ６ ロ
ードポート ７ 支持部材 ８ 床 １０
天井 １１ パーティション １２
レーザ投光器 １３ レーザ受光器 １４ 遮光板 １４ａ
穴 １５ 遮光板 １５ａ 穴 １６
投受光器 １６ａ 投光器 １６ｂ 受光器 １７
反射鏡 １９ ワイヤ式測距器 ２０
ワイヤDESCRIPTION OF SYMBOLS 1 Conveyor vehicle 2 Rail 3 Carrier 4 Wafer 5 Process device 6 Load port 7 Support member 8 Floor 10
Ceiling 11 Partition 12
Laser projector 13 Laser receiver 14 Shield 14a
Hole 15 Light shield 15a Hole 16
Emitter / Receiver 16a Emitter 16b Receiver 17
Reflector 19 Wire type distance measuring device 20
Wire
Claims (5)
車と、床上に設置された半導体製造装置との間で、搬送
物を格納したキャリアを受け渡しするホイスト付天井走
行搬送装置において、 前記ホイスト付天井走行搬送装置は、前記軌道と半導体
製造装置との位置関係を監視する監視装置を有し、 この監視装置は、床基準に設置された投光器または受光
器のいずれか一方と、天井基準に設置された投光器また
は受光器のいずれか他方とから成ることを特徴とするホ
イスト付天井走行搬送装置。1. An overhead traveling conveyance device with a hoist for transferring a carrier storing a conveyed product between a truck traveling along a track installed on a ceiling and a semiconductor manufacturing apparatus installed on the floor, The overhead traveling conveyance device has a monitoring device that monitors a positional relationship between the track and the semiconductor manufacturing device, and the monitoring device is configured to use one of a projector or a light receiver installed on a floor reference and a ceiling reference. An overhead traveling conveyance device with a hoist, comprising a light transmitter or a light receiver installed.
光器または受光器のいずれか一方と、天井基準に設置さ
れた投光器または受光器のいずれか他方とに代えて、床
基準に設置された投受光器または反射体のいずれか一方
と、天井基準に設置された投受光器または反射体のいず
れか他方とから成ることを特徴とする請求項１に記載の
ホイスト付天井走行搬送装置。2. The monitoring device according to claim 1, wherein the projector is installed on a floor instead of one of the projector or the receiver installed on the floor and the other of the projector or the receiver installed on the ceiling. 2. The overhead traveling and conveying apparatus with a hoist according to claim 1, comprising one of the light emitting and receiving device and the reflector, and the other of the light emitting and receiving device and the reflector installed on the ceiling basis.
光器または受光器のいずれか一方と、天井基準に設置さ
れた投光器または受光器のいずれか他方とに代えて、天
井または床のいずれか一方を基準に設置された投光器お
よび受光器と、天井または床のいずれか他方を基準に設
置され、前記投光器と受光器との間の光路に配置された
光通過孔を有する遮光手段とから成ることを特徴とする
請求項１に記載のホイスト付天井走行搬送装置。3. The monitoring device according to claim 1, wherein one of the light emitter and the light receiver installed on the floor reference and the other of the light emitter and the light receiver installed on the ceiling reference are replaced with either the ceiling or the floor. A light-emitting unit and a light-receiving unit installed on the basis of one of them, and a light-shielding unit having a light-passing hole arranged on an optical path between the light-emitting unit and the light-receiving unit, installed on the ceiling or the floor, and The overhead traveling conveyance device with a hoist according to claim 1, wherein the overhead traveling conveyance device is equipped with a hoist.
光器または受光器のいずれか一方と、天井基準に設置さ
れた投光器または受光器のいずれか他方とに代えて、床
基準に設置された部位と天井基準に設置された部位との
距離を測る測距手段から成ることを特徴とする請求項１
に記載のホイスト付天井走行搬送装置。4. The monitoring device is installed on a floor basis instead of one of the projector or the receiver installed on the floor basis and the other of the projector or the receiver installed on the ceiling basis. 2. A distance measuring means for measuring a distance between a part set on a ceiling and a part set with reference to a ceiling.
5. The overhead traveling transfer device with a hoist according to item 1.
位と天井基準に設置された部位とを結ぶワイヤと、この
ワイヤの伸縮を検出する伸縮検出手段とから成ることを
特徴とする請求項４に記載のホイスト付天井走行搬送装
置。5. The distance measuring means comprises a wire connecting a part installed on a floor basis and a part installed on a ceiling basis, and an expansion / contraction detecting means for detecting expansion / contraction of the wire. An overhead traveling transfer device with a hoist according to claim 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32269698A JP4221789B2 (en) | 1998-11-12 | 1998-11-12 | Ceiling traveling transfer device with hoist |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32269698A JP4221789B2 (en) | 1998-11-12 | 1998-11-12 | Ceiling traveling transfer device with hoist |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000150622A true JP2000150622A (en) | 2000-05-30 |
| JP4221789B2 JP4221789B2 (en) | 2009-02-12 |
Family
ID=18146602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32269698A Expired - Fee Related JP4221789B2 (en) | 1998-11-12 | 1998-11-12 | Ceiling traveling transfer device with hoist |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4221789B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100350719B1 (en) * | 2000-11-30 | 2002-08-29 | 삼성전자 주식회사 | apparatus for transferring in a semiconductor fabricating |
| EP2031651A2 (en) | 2007-08-30 | 2009-03-04 | Tokyo Electron Limited | Container changing system and container changing method |
| WO2010143269A1 (en) * | 2009-06-09 | 2010-12-16 | 村田機械株式会社 | Conveyance system and method of correcting height in conveyance system |
| JP2012056664A (en) * | 2010-09-07 | 2012-03-22 | Muratec Automation Co Ltd | Conveying system |
| JP2015079997A (en) * | 2002-06-19 | 2015-04-23 | 村田機械株式会社 | Overhead hoist conveyance vehicle |
| US10957569B2 (en) | 2002-10-11 | 2021-03-23 | Murata Machinery Ltd. | Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
| WO2022270197A1 (en) * | 2021-06-24 | 2022-12-29 | 村田機械株式会社 | Transport vehicle system |
-
1998
- 1998-11-12 JP JP32269698A patent/JP4221789B2/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100350719B1 (en) * | 2000-11-30 | 2002-08-29 | 삼성전자 주식회사 | apparatus for transferring in a semiconductor fabricating |
| US10141212B2 (en) | 2002-06-19 | 2018-11-27 | Murata Machinery Ltd. | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| JP2015079997A (en) * | 2002-06-19 | 2015-04-23 | 村田機械株式会社 | Overhead hoist conveyance vehicle |
| US9620397B2 (en) | 2002-06-19 | 2017-04-11 | Murata Machinery Ltd. | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| US9881823B2 (en) | 2002-06-19 | 2018-01-30 | Murata Machinery Ltd. | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| US10147627B2 (en) | 2002-06-19 | 2018-12-04 | Murata Machinery Ltd. | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| US10381251B2 (en) | 2002-06-19 | 2019-08-13 | Murata Machinery Ltd. | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| US10957569B2 (en) | 2002-10-11 | 2021-03-23 | Murata Machinery Ltd. | Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
| US8123456B2 (en) | 2007-08-30 | 2012-02-28 | Tokyo Electron Limited | Container changing system and container changing method |
| EP2031651A2 (en) | 2007-08-30 | 2009-03-04 | Tokyo Electron Limited | Container changing system and container changing method |
| WO2010143269A1 (en) * | 2009-06-09 | 2010-12-16 | 村田機械株式会社 | Conveyance system and method of correcting height in conveyance system |
| JP5339165B2 (en) * | 2009-06-09 | 2013-11-13 | 村田機械株式会社 | Transport system and transport system height correction method |
| JP2012056664A (en) * | 2010-09-07 | 2012-03-22 | Muratec Automation Co Ltd | Conveying system |
| WO2022270197A1 (en) * | 2021-06-24 | 2022-12-29 | 村田機械株式会社 | Transport vehicle system |
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| Publication number | Publication date |
|---|---|
| JP4221789B2 (en) | 2009-02-12 |
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