TW202329312A - Transfer system - Google Patents

Abstract

This transfer system includes a transfer vehicle and a control device. The transfer vehicle performs a transfer operation that transfers an item by running along a trajectory, and a mounting operation that mounts the item on a mounting unit while communicating with the mounting unit. The control device transmits an instruction about the transfer destination of the item to the transfer vehicle. After the transfer vehicle performs the mounting operation, if the transfer vehicle does not receive a detection signal that indicates detection of the item by the mounting unit, the control device transmits to the transfer vehicle a change instruction that is an instruction that changes the transfer destination of the item by the transfer vehicle.

Description

Conveyor system

The present invention mainly relates to a conveying system that uses a conveying vehicle to convey articles.

The conveyance system of patent document 1 is equipped with a conveyance trolley and a loading port. The transport cart transports the object to be transported and loads it on the loading port. Loading sensors are installed at the loading port to detect the conveyed objects. After the transport trolley loads the transported object to the loading port, when the loading sensor does not detect the situation of the transported object, the transporting trolley performs the action of loading the transported object to the loading port again, that is, the retry operation . [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent No. 5056368

(Problem to be solved by the invention)

However, due to an abnormality, even if a retry operation is performed, the loading sensor may not detect the conveyed object. In this case, the transfer system itself cannot respond to the abnormality.

The present invention was made in view of the above circumstances, and its main purpose is to provide a transport system that can itself deal with various abnormalities related to the delivery of articles toward the loading unit. (Technical means and effects to solve the problem)

The problems to be solved by the present invention are as described above, and then the technical means and effects for solving the problems will be described.

According to the aspect of this invention, the conveyance system of the following structures can be provided. That is, the transport system includes a transport vehicle and a control device. The transport vehicle performs a transport operation of transporting the article by moving along a rail, and a loading operation of placing the article on the placement unit while communicating with the placement unit. The control device transmits a command regarding the destination of the article to the transport vehicle. After the above-mentioned transportation vehicle performs the above-mentioned loading operation, when the above-mentioned transportation vehicle does not receive the detection signal indicating that the content of the above-mentioned article is detected by the above-mentioned loading part, the above-mentioned control device transmits to the above-mentioned transportation vehicle. The instruction of the transfer destination of the article is the change instruction.

Thereby, since the transport vehicle transports the article to another loading section, it is possible to cope with an abnormality in which a detection signal is not received from the loading section. In particular, by changing the transfer destination, it is possible to cope with an abnormality that cannot be resolved even by retrying the operation.

In the conveyance system mentioned above, it is preferable to set it as the following structure. That is, after the above-mentioned transport vehicle performs the above-mentioned loading operation, when the detection signal is not received, the above-mentioned loading operation is performed at least once again. When the transport vehicle does not receive the detection signal even after the transport vehicle performs the loading operation again, the control device transmits the change command to the transport vehicle.

Thereby, the abnormality which can be resolved by the retry operation is dealt with by the retry operation, and the abnormality which cannot be dealt with by the retry operation is dealt with by changing the transfer destination.

In the above-mentioned conveyance system, it is preferable to switch between valid and invalid functions of the above-mentioned conveyance vehicle performing the above-mentioned loading operation again.

Thereby, it can flexibly respond to the type of article, the installation location of the conveyance system, the intention of the administrator, and the like. For example, when it is desired to shorten the time for re-loading operation, by disabling this function, abnormalities can be dealt with early.

In the above-mentioned conveying system, it is preferable to switch between valid and invalid functions of the control device sending the above-mentioned change command.

Thereby, it can flexibly respond to the type of article, the installation location of the conveyance system, the intention of the administrator, and the like. For example, when it is not appropriate to change the destination of the article, by disabling this function, the destination of the article will not be changed.

In the above-mentioned transportation system, it is preferable that after the above-mentioned transportation vehicle performs the above-mentioned loading operation, if the above-mentioned transportation vehicle does not receive the above-mentioned detection signal, the above-mentioned transportation vehicle moves along the above-mentioned track while waiting to receive. The above-mentioned change order, and after receiving the above-mentioned change order, transport the article toward the destination indicated in the change order.

Thereby, since the conveyance vehicle can be suppressed from continuing to be at the same position, it is less likely to hinder the movement of other conveyance vehicles.

In the above conveying system, it is preferable that the conveying vehicle requests the change command to the control device when the conveying vehicle does not receive the detection signal after the conveying vehicle performs the loading operation.

In this way, the control device can send a change command at an appropriate time point according to the request from the transport vehicle.

In the conveyance system mentioned above, it is preferable to set it as the following structure. That is, the detection signal includes a first signal value and a second signal value. After the transport vehicle arrives at the position where the article is delivered to the loading unit, and at a time point when the loading unit can be allocated as a delivery destination of the article, the detection signal is switched from the first signal value to the first signal value. 2 signal value. When the article is detected by the loading unit, the detection signal is switched from the second signal value to the first signal value. When the detection signal remains in the state of the second signal value even if the transport vehicle performs the loading operation, the control device transmits the change command to the transport vehicle.

Thereby, it can use the signal stipulated by the specification to judge whether to send the change command.

Next, embodiments of the present invention will be described with reference to the drawings.

The conveyance system 1 shown in FIG. 1 is installed in facilities such as semiconductor manufacturing plants and warehouses, and conveys articles. The article conveyed by the conveyance system 1 is a container for storing wafers (semiconductor wafers). Specifically, the container is a FOUP (Front-Opening Unified Pod; front-opening wafer transfer box) or a wafer cassette. Furthermore, the article can also be a photomask box for accommodating photomasks. Moreover, when the conveyance system 1 is installed in a warehouse, the article is a commodity, parts, etc. stored in the warehouse.

As shown in FIGS. 1 to 3 , the transportation system 1 includes a supervisory control device (control device) 10 , a transportation vehicle 20 , and a rail 30 .

The management control device 10 is equipped with computing devices such as CPU (Central Processing Unit; Central Processing Unit), HDD (hard disk drive; Hard Disk Drive), SSD (solid state drive; Solid State Drive) or flash memory, etc. A storage device, and a computer of a communication device. The management control device 10 can execute various controls related to the conveyance and processing of articles by reading and executing the programs stored in the storage device. The management control device 10 can transmit a command about the destination of the article to the transportation vehicle 20 using the communication device. The command concerning the transfer destination of the article includes, for example, a command describing the transfer destination of the article and a change command described later.

The transfer vehicle is 20 series OHT (Overhead Hoist Transfer; Elevated Hoist Transfer Vehicle). The transport vehicle 20 is a vehicle that travels unmanned along a rail 30 suspended from the ceiling 100 and performs a transport operation of transported items. The transport system 1 includes a plurality of transport vehicles 20 . Each transport vehicle 20 transports the article to the transport destination described in the command received from the management control device 10 .

A plurality of processing devices 91 are installed in a semiconductor manufacturing factory. The processing device 91 is disposed near the track 30 and can be accessed by the transport vehicle 20 moving along the track 30 .

The processing device 91 has a loading unit 92 that receives the article 40 from the transport vehicle 20 . The processing device 91 takes in the article 40 placed on the loading unit 92, and processes the wafer accommodated in the article 40 (for example, in a step of manufacturing a semiconductor element).

Hereinafter, the detailed structure of the transport vehicle 20 will be further described. As shown in FIGS. 2 and 3 , the transport vehicle 20 includes a vehicle control device 21 , a transfer unit 22 , a transport unit 23 , and a casing 28 .

The vehicle control device 21 is a computer including a computing device such as a CPU, a storage device such as an HDD, SSD, or flash memory, and a communication device. The vehicle control device 21 controls each part of the transport vehicle 20 by reading and executing the program stored in the storage device. The communication device can communicate with the management control device 10 and the loading unit 92 by wire or wirelessly.

The traveling unit 22 includes a traveling motor and wheels. The traveling motor generates rotational driving force under the control of the vehicle control device 21 . The transport vehicle 20 is moved along the track 30 by the wheels being rotated by the rotational driving force generated by the traveling motor.

The transport unit 23 includes a winding mechanism 24 , a suspension belt 25 , and a holding unit 26 . The take-up mechanism 24 is provided with a lift motor. The winding mechanism 24 can use the driving force generated by the lifting motor to wind up or unwind the suspension belt 25 . A holding portion 26 is connected to the lower end of the suspension belt 25 . The holding unit 26 can switch the state of holding the article 40 and the state of releasing the holding of the article 40 . The article 40 of this embodiment has a flange portion on the upper portion, and the holding portion 26 holds the flange portion of the article 40 . Furthermore, the holding portion 26 can also hold the side surface or the bottom surface of the article 40 . In addition, the conveyance part 23 is not limited to the structure which holds and conveys the article 40, The structure which has the conveyance table which places the article 40 and conveys may be sufficient.

When the transport vehicle 20 receives the article 40 , the transport vehicle 20 moves to the receiving position of the article 40 . Next, the suspension belt 25 is rolled out by the winding mechanism 24 , and the holding part 26 descends to the vicinity of the article 40 . Afterwards, after the holding part 26 holds the article 40 , the take-up mechanism 24 takes up the suspension belt 25 , so that the article 40 can be located inside the casing 28 . The transport vehicle 20 travels with the article 40 located inside the casing 28 , and conveys the article 40 .

When the transport vehicle 20 delivers the article 40 , the transport vehicle 20 travels to the loading unit 92 designated by the supervisory control device 10 . After the transport vehicle 20 reaches the loading portion 92 , it rolls out the suspension belt 25 through the winding mechanism 24 , and the article 40 descends to the loading portion 92 . The holding unit 26 releases the holding of the article 40 after the article 40 is properly placed on the loading unit 92 . Accordingly, the article 40 is delivered to the loading unit 92 .

In this specification, the state in which the transport vehicle 20 makes the loading portion 92 support at least a part of the load of the article 40 is called “loading”, and the operation of the transport vehicle 20 that places the article 40 on the loading portion 92 is called “loading”. for the "load action". That is, even if the transport vehicle 20 supports a part of the load of the article 40, it is regarded as being placed. Also, even if the holding part 26 does not release the holding of the article 40, it is regarded as being placed. In addition, the case where the transport vehicle 20 releases the hold of the article 40 and the main body of the handling article 40 is changed from the transport vehicle 20 to the loading unit 92 (processing device 91 ) is referred to as delivery of the article 40 .

In addition, a holding sensor 27 for detecting that the article 40 is placed on the mounting portion 92 is provided on the holding portion 26 . The holding sensor 27 is a photosensor provided with a light projecting part and a light receiving part, and the light receiving part receives the inspection light irradiated by the light projecting part. Also, when an object exists between the light projecting unit and the light receiving unit, the light receiving unit cannot receive the inspection light because the inspection light is blocked. Also, when the article 40 held by the holding portion 26 is lowered and the bottom surface of the article 40 contacts the mounting portion 92 , the flange portion of the article 40 floats upward relative to the holding portion 26 . The optical axis of the holding sensor 27 is located at a position overlapping the flange portion that floats upward when the article 40 is placed. Thereby, the holding sensor 27 can detect that the article 40 is placed on the loading portion 92 at the side of the transport vehicle 20 . Furthermore, it is also possible to use a sensor different from the holding sensor 27 of the present embodiment (for example, a load sensor) to detect that the article 40 is placed on the placement portion 92 on the transport vehicle 20 side.

As shown in FIGS. 2 and 3 , the placement unit 92 includes a placement control device 93 and a placement sensor 94 .

The loading control device 93 is a computer including a computing device such as a CPU, a storage device such as HDD, SSD, or flash memory, and a communication device. The loading control device 93 controls delivery of the article 40 by reading and executing the program stored in the storage device. The communication device can communicate with the management control device 10 and the transportation vehicle 20 by wire or wirelessly. In addition, the loading control device 93 may be a control device that only controls delivery of the articles 40 , or may be a control device that further controls the processing device 91 .

The placement sensor 94 detects that the article 40 is placed on the placement unit 92 . The placement sensor 94 is a photosensor including a light projecting part and a light receiving part, and the light receiving part receives the inspection light irradiated by the light projecting part. In addition, when an object exists between the light projecting unit and the light receiving unit, the inspection light is blocked, so the light receiving unit cannot receive the inspection light. The light receiving unit of the placement sensor 94 can receive inspection light before the article 40 is placed on the placement unit 92 . In addition, the optical axis of the placement sensor 94 overlaps with the article 40 properly placed on the placement portion 92 . Thereby, the placement sensor 94 can detect that the article 40 has been properly placed on the placement portion 92 . Furthermore, the placement sensor 94 can be a set of light projecting part and light receiving part, or multiple sets of light projecting part and light receiving part. Moreover, it is also possible to use a sensor (such as a load sensor) different from the loading sensor 94 of the present embodiment, and the article 40 has been loaded on the loading section 92 on the loading section 92 side. The situation is checked.

Next, referring to FIG. 4 , the interlock communication performed between the transport vehicle 20 and the placement unit 92 when the article 40 is delivered from the transport vehicle 20 to the placement unit 92 will be described. In the present embodiment, interlock communication is performed between the transport vehicle 20 (specifically, the vehicle control device 21 ) and the loading unit 92 (specifically, the loading control device 93 ) in accordance with the SEMI E84 standard.

The transport vehicle 20 and the loading unit 92 share various signals that are switched ON and OFF according to conditions. That is, the transport vehicle 20 and the loading unit 92 transmit the signal values of the respective signals at fixed time intervals or when the signal values are switched. As the signal transmitted from the loading unit 92 to the transportation vehicle 20, there are an L_REQ signal (detection signal) and a READY signal. As signals transmitted from the transport vehicle 20 to the loading unit 92, there are a TR_REQ signal, a BUSY signal, and a COMPT signal. Furthermore, the non-received detection signal refers to a situation where the value of the non-received signal changes from ON to OFF, or a situation in which the value of the non-received signal changes from OFF to ON.

The loading unit 92 turns off the L_REQ signal from OFF (second 1 signal value) is switched ON (2nd signal value) (time T1). The L_REQ signal is a signal indicating that the loading unit 92 can be allocated as a delivery destination of the article 40 . Furthermore, the prerequisite for switching the L_REQ signal to ON may include a condition that the communication between the transport vehicle 20 and the loading unit 92 is valid. The L_REQ signal is switched to OFF when the loading unit 92 detects that the article 40 has been loaded.

Next, the transport vehicle 20 notifies the loading unit 92 of the delivery-requested article 40, and switches the TR_REQ signal from OFF to ON (time T2). The TR_REQ signal is a signal indicating that delivery of the article 40 has been requested. The TR_REQ signal is switched OFF when the loading operation of the transport vehicle 20 is completed (switched OFF by the BUSY signal described later).

The loading unit 92 switches the READY signal from OFF to ON when the request from the transport vehicle 20 is received and preparations for delivery of the article 40 from the transport vehicle 20 are completed (time T3). The READY signal is a signal indicating that a request to deliver the contents of the article 40 from the transport vehicle 20 has been received. The READY signal is switched OFF after the handover of the article 40 is completed (after the COMPT signal described later is switched ON).

Next, the transport vehicle 20 starts the loading operation after the READY signal is switched ON, and switches the BUSY signal from OFF to ON (time T4). The BUSY signal is a signal indicating that the transport vehicle 20 is performing a loading operation. While the BUSY signal is ON, the mechanical operation of the placement unit 92 is prohibited. The BUSY signal is switched OFF after the loading of the articles 40 is normally completed (that is, after the L_REQ signal is switched OFF).

Next, the loading unit 92 switches the L_REQ signal to OFF after the loading sensor 94 detects the article 40 (time T5). Thereby, as described above, the BUSY signal is switched OFF, and the TR_REQ signal is switched OFF (timing T6). At this time, since delivery of the article 40 from the transport vehicle 20 to the loading unit 92 is completed, the transport vehicle 20 switches the COMPT signal from OFF to ON (time T6). The COMPT signal is a signal indicating completion of delivery of the article 40 on the transport vehicle 20 side.

As described above, when the COMPT signal is switched ON, the READY signal is switched OFF (time T7). For example, at this point in time, the transport vehicle 20 or the loading unit 92 notifies the management control device 10 that delivery of the article 40 is completed. Thereafter, by switching the COMPT signal to OFF, a series of processing is completed.

Here, after the transport vehicle 20 performs the loading operation and places the article 40 on the loading unit 92 , there is a possibility that the transport vehicle 20 does not receive the L_REQ signal and turn OFF. The reasons may be: the position deviation of the loaded item 40 makes the loading sensor 94 unable to detect the item 40, the loading sensor 94 is abnormal, the detection value processing of the loading sensor 94 is abnormal, and related Communication abnormality, etc. Also, when the L_REQ signal continues to be ON for a predetermined time, a timeout error occurs, and the loading unit 92 stops abnormally. At the same time, the transport vehicle 20 also stops abnormally because the loading operation has not been completed. In this case, since an operator's response is required, the conveyance efficiency of the conveyance system 1 falls.

The transportation system 1 of the present embodiment has a function of automatically coping with such abnormalities in order to reduce the frequency of abnormal stoppages of the transportation vehicles 20 . The so-called self-response to the abnormality means that the abnormality can be handled by the handling of the conveyance system 1 without the operation of the operator.

Specifically, the transport system 1 has a transport destination change function and a retry operation function. The transfer destination change function is a function to change the transfer destination of the article 40 using the transfer vehicle 20 . The retry operation function is a function of causing the transport vehicle 20 to perform the loading operation again. Hereinafter, description will be made according to the flow chart of FIG. 5 . The flowchart in FIG. 5 is the processing performed by the vehicle control device 21 of the transport vehicle 20 .

The transport vehicle 20 performs the loading operation as described above (S101). Furthermore, even after the transport vehicle 20 performs the loading operation, the holding of the holding portion 26 will not be released, but the holding of the holding portion 26 will still be maintained.

After the loading operation is completed, the transport vehicle 20 determines whether or not the L_REQ signal is OFF (S102). Furthermore, since there is a slight time delay between the completion of the loading operation and the reception of the L_REQ signal by the transport vehicle 20, the determination in step S102 may be performed after the time delay has been considered. When the L_REQ signal is OFF, the transport vehicle 20 continues the process of delivery of the article 40 as described above (S103).

When the L_REQ signal remains ON, the transportation vehicle 20 determines whether or not a threshold time has elapsed (S104). When the threshold time has not passed, the transport vehicle 20 performs a retry operation (S105). The so-called retry operation refers to the situation where the loading operation is performed again after the article 40 is lifted by winding the suspension belt 25 by the winding mechanism 24 . The transfer vehicle 20 can raise the object 40 to a height that can be accommodated in the housing 28 , and can also raise the object 40 to a height where the flange portion cannot be detected by the holding sensor 27 . When the reason why the L_REQ signal cannot be turned off is that the position of the article 40 is shifted, there is a possibility that the abnormality can be dealt with by retrying the operation. Furthermore, as described above, even if the initial loading operation is completed, the transport vehicle 20 continues to hold the article 40 by the holding portion 26 . Therefore, it does not require a process of re-holding the item 40 .

The transport vehicle 20 performs the process of step S102 again after the completion of the retry operation. When the L_REQ signal is turned off by the retry operation, the transport vehicle 20 continues the process of delivery of the article 40 (S103). When the L_REQ signal remains ON, the retry operation is repeated until the threshold time elapses. When a timeout error occurs in the loading unit 92, the retry operation cannot be performed. Therefore, it is preferable that a threshold time elapses at the same time as the timeout error occurs in the loading unit 92 or before the timeout error occurs. In this embodiment, the retry operation is repeated until the threshold time elapses, but the retry operation may be repeated until the threshold number of times is reached.

When the threshold time has elapsed, the transportation vehicle 20 requests a change command to the supervisory control device 10 (S106). The change command is a command to change the destination of the article transported by the transport vehicle 20 . Since the transport destination of the transport vehicle 20 is determined by the management control device 10 as described above, the transport vehicle 20 requests the management control device 10 for a change command.

The transport vehicle 20 performs standby travel (S107) until the change command is received. The so-called standby movement means that the transport vehicle 20 moves along the rail 30 while waiting for a change command. Thereby, since the transport vehicle 20 can be suppressed from continuing to be located at the same place, it becomes difficult to hinder the movement of other transport vehicles 20 . For example, when there is a circular path in the vicinity of the transport vehicle 20, the circular path can be continued. Alternatively, the transport vehicle 20 may travel toward a place where delivery of the articles 40 occurs frequently.

Furthermore, standby transition is not necessary processing. For example, the transport vehicle 20 may wait for a change command without traveling. Alternatively, the transport vehicle 20 can also move and stop at a standby position where traffic volume is relatively small, and then wait for a change instruction.

The transport vehicle 20 judges whether or not a change command has been received (S108), and continues to travel on standby until a change command is received. When receiving the change command, the transport vehicle 20 transports the article 40 to the new transport destination indicated by the change command (S109). By performing the above processing, it is possible to reduce the frequency of abnormal stop of the transport vehicle 20 in the event that the L_REQ signal is not OFF.

As shown in FIG. 6, enabling and disabling of the transfer destination change function and the retry operation function of this embodiment can be individually switched. Furthermore, when the transfer destination change function is disabled, the transfer vehicle 20 may disable the request for the change command, or the management control device 10 may disable the transmission of the change command.

The transfer destination change can not only cope with the positional deviation of the article 40, but also deal with the abnormality of the loading sensor 94 and the processing abnormality of the loading control device 93, etc. That is, changing the transfer destination has the advantage of being able to cope with various abnormalities. On the other hand, although the retry operation cannot deal with the abnormality of the loading sensor 94 and the processing abnormality of the loading control device 93, etc., it may be able to deal with it in a short time when the position of the article 40 deviates. Extraordinary advantage. Therefore, it is possible to flexibly respond to the needs of the manager of the transport system 1 by switching between valid and invalid functions of the two functions.

Set 1 to enable the transfer destination change function, and to enable the retry operation function. In this case, as shown in the flowchart of FIG. 5 , when the L_REQ signal is not OFF after the loading operation, a retry operation is performed first (STEP1). When the L_REQ signal is not OFF even after the retry operation is performed, the transfer destination is changed (STEP2). That is, when the setting 1 is selected, the abnormality that can be handled by the retry operation can be handled by the retry operation, and the abnormality that cannot be handled by the retry operation can be handled by changing the transfer destination.

Set the transfer destination change function of the 2 series to be valid, and the retry operation function to be invalid. In this case, when the L_REQ signal is not OFF after the loading operation, the transfer destination is changed without performing the retry operation (STEP1). That is, when the setting 2 is selected, the abnormality that the L_REQ signal is not OFF is continuously handled by changing the transfer destination.

Set the transfer destination change function of the 3 series to be invalid, and the retry operation function to be valid. In this case, if the L_REQ signal is not OFF after the loading operation, a retry operation is performed first (STEP1). When the L_REQ signal is not OFF even after the retry operation, the transport vehicle 20 is abnormally stopped. That is, when the setting 3 is selected, the retry operation is continued and the transfer destination is not changed.

Set the transfer destination change function of the 4 series to be invalid, and the retry operation function is also invalid. In this case, if the L_REQ signal is not OFF after the loading operation, the transport vehicle 20 is abnormally stopped. When the situation of setting 4 is selected, the abnormality that the L_REQ signal is not OFF will not be handled by itself.

As described above, the transportation system 1 of the present embodiment includes the transportation vehicle 20 and the supervisory control device 10 . The transport vehicle 20 performs a transport operation of transporting the article 40 by moving along the rail 30 and a loading operation of placing the article 40 on the placement unit 92 while communicating with the placement unit 92 . The management control device 10 transmits a command regarding the destination of the article 40 to the transportation vehicle 20 . After the transport vehicle 20 performs the loading operation, when the transport vehicle 20 does not receive the L_REQ signal indicating that the loading unit 92 has detected the article 40 (in detail, the transport vehicle 20 does not receive the L_REQ signal from ON to OFF). situation), the management control device 10 sends to the transport vehicle 20 a command to change the transport destination of the article 40 of the transport vehicle 20 , that is, a change command.

Thereby, since the transport vehicle 20 transports the article 40 to another loading unit 92 , it is possible to cope with an abnormality in which the L_REQ signal is not received from the loading unit 92 . In particular, by changing the transfer destination, there is a possibility that even anomalies that cannot be resolved by retrying operations can be dealt with.

In the transportation system 1 of the present embodiment, when the transportation vehicle 20 does not receive the L_REQ signal after performing the loading operation, it performs the loading operation at least once again (retry operation). When the transport vehicle 20 does not receive the L_REQ signal even though the transport vehicle 20 performs the loading operation again, the management control device 10 sends a change command to the transport vehicle 20 .

In this way, exceptions that can be resolved by retrying actions can be handled by retrying actions; and exceptions that cannot be handled by retrying actions can be handled by changing the transfer destination; thus.

In the transport system 1 of the present embodiment, it is possible to switch between valid and invalid functions of the transport vehicle 20 performing the loading operation again.

Thereby, it is possible to flexibly respond to the type of the article 40, the installation location of the conveyance system 1, the intention of the manager, and the like. For example, when it is desired to shorten the time to perform the loading operation again, by disabling this function, an abnormality can be dealt with early.

In the conveyance system 1 of the present embodiment, it is possible to switch between valid and invalid functions of the supervisory control device 10 to transmit a change command.

Thereby, it is possible to flexibly respond to the type of the article 40, the installation location of the conveyance system 1, the intention of the administrator, and the like. For example, when it is not appropriate to change the destination of the article 40, by disabling this function, the destination of the article 40 will not be changed.

In the transportation system 1 of the present embodiment, after the transportation vehicle 20 performs the loading operation, when the transportation vehicle 20 does not receive the L_REQ signal, the transportation vehicle 20 waits to receive a change command while waiting to move along the track 30. And after the change command is received, the article 40 is generally delivered to the transfer destination indicated by the change command.

Thereby, since it can suppress that the transport vehicle 20 continues to be in the same position, it will less hinder the movement of other transport vehicles 20 .

In the transportation system 1 of the present embodiment, when the transportation vehicle 20 does not receive the L_REQ signal after the transportation vehicle 20 performs the loading operation, the transportation vehicle 20 requests the supervisory control device 10 for a change command.

In this way, the management control device 10 can send the change command at an appropriate time point according to the request of the transport vehicle 20 .

In the transport system 1 of this embodiment, the L_REQ signal includes ON and OFF. The L_REQ signal is switched from OFF to ON when the transport vehicle 20 arrives at the position where the article 40 is delivered to the loading unit 92 and when the loading unit 92 can be assigned as the delivery destination of the article 40 . When the loading unit 92 detects the article 40, the L_REQ signal is switched from ON to OFF. When the L_REQ signal remains ON even when the transport vehicle 20 performs a loading operation, the supervisory control device 10 sends a change command to the transport vehicle 20 .

Thereby, it can use the signal stipulated by the specification to judge whether to execute the change command.

This embodiment includes the following features 1 to 7. [Feature 1] A conveying system is characterized in that it has: A transport vehicle that performs a transport operation of transporting an article by moving along a rail, and a loading operation of placing the article on the placement unit while communicating with the placement unit; and A control device that transmits instructions regarding the destination of the above-mentioned articles to the above-mentioned transportation vehicle; After the transport vehicle performs the loading operation, if the transport vehicle does not receive a detection signal indicating that the loading unit has detected the content of the article, the control device transmits an instruction to change the transport vehicle to the transport vehicle. The instruction of the transfer destination of the above-mentioned articles is the change instruction. [Feature 2] The conveying system described in feature 1 is characterized in that: After the above-mentioned loading operation is performed by the above-mentioned transportation vehicle, when the above-mentioned transportation vehicle does not receive the above-mentioned detection signal, the above-mentioned loading operation is performed at least once again, When the transport vehicle does not receive the detection signal even though the transport vehicle performs the loading operation again, the control device sends the change command to the transport vehicle. [Feature 3] The conveying system as described in feature 2 is characterized in that: The above-mentioned transfer vehicle can switch between valid and invalid functions for performing the above-mentioned loading operation again. [Feature 4] The conveying system described in any one of features 1 to 3 is characterized in that: The above-mentioned control device can switch between valid and invalid of the function of sending the above-mentioned change command. [Feature 5] The conveying system described in any one of features 1 to 4 is characterized in that: After the above-mentioned transportation vehicle performs the above-mentioned loading operation, when the above-mentioned transportation vehicle does not receive the above-mentioned detection signal, the above-mentioned transportation vehicle waits for the reception of the above-mentioned change command while moving along the above-mentioned track, and when the above-mentioned change command is received. Afterwards, the item is transported towards the transport destination indicated by the change command. [Feature 6] The conveying system described in any one of features 1 to 5 is characterized in that: After the transport vehicle performs the loading operation, if the transport vehicle does not receive the detection signal, the transport vehicle requests the change command to the control device. [Feature 7] The conveying system described in any one of features 1 to 6 is characterized in that: The detection signal includes a first signal value and a second signal value, After the transport vehicle arrives at a position where the article can be delivered to the placement unit, and at a time when the placement unit can be assigned as a delivery destination of the article, the detection signal is switched from the first signal value to the 2nd signal value, When the article is detected by the loading unit, the detection signal is switched from the second signal value to the first signal value, When the detection signal remains in the state of the second signal value even if the transport vehicle performs the loading operation, the control device transmits the change command to the transport vehicle.

As mentioned above, although the preferred embodiment of this invention was described, the said structure can be changed, for example as follows.

The flowcharts shown in the above embodiments are examples, and some processes may be omitted, the contents of some processes may be changed, or new processes may be added.

In the above-described embodiment, the transportation vehicle 20 requests the supervisory control device 10 for a change command. Instead, the supervisory control device 10 can actively generate a change command and send it to the transport vehicle 20 . In this case, the transport vehicle 20 and the loading unit 92 send the delivery status of the article 40 to the management control device 10, and the management control device 10 determines whether to Generate a change order.

In the above embodiment, the OHT has been described as an example of the transport vehicle 20 , but the present invention can also be applied to other vehicles such as an AGV (Automated Guided Vehicle) or a suspension crane.

1: Conveying system 10: Management control device (control device) 20: Transporter 21: Vehicle control device 22: Ministry of Migration 23: Transport Department 24: Coiling mechanism 25: Suspension belt 26: Holding part 27: Holding sensor 28: shell 30: track 40: Items 91: Processing device 92: loading part 93:Loading control device 94:Load sensor 100: Ceiling

Fig. 1 is a schematic plan view of a conveying system according to an embodiment of the present invention. Fig. 2 is a schematic side view showing the configuration of the transport vehicle and the loading unit. Fig. 3 is a block diagram of the conveying system. Fig. 4 is a sequence diagram showing interlock communication when the transport vehicle delivers articles to the loading unit. Fig. 5 is a flow chart when the transport vehicle delivers articles to the loading unit. Fig. 6 is a table showing the setting mode of the transfer destination change function and the retry operation function.

Claims (7)

A conveying system is characterized in that it has: A transport vehicle that performs a transport operation of transporting an article by moving along a rail, and a loading operation of placing the article on the placement unit while communicating with the placement unit; and A control device that transmits instructions regarding the destination of the above-mentioned articles to the above-mentioned transportation vehicle; After the transport vehicle performs the loading operation, if the transport vehicle does not receive a detection signal indicating that the loading unit has detected the content of the article, the control device transmits an instruction to change the transport vehicle to the transport vehicle. The instruction of the transfer destination of the above-mentioned articles is the change instruction. Such as the conveying system of claim 1, wherein, After the above-mentioned loading operation is performed by the above-mentioned transportation vehicle, when the above-mentioned transportation vehicle does not receive the above-mentioned detection signal, the above-mentioned loading operation is performed at least once again, When the transport vehicle does not receive the detection signal even though the transport vehicle performs the loading operation again, the control device sends the change command to the transport vehicle. Such as the conveying system of claim 2, wherein, The above-mentioned transfer vehicle can switch between valid and invalid functions for performing the above-mentioned loading operation again. Such as the conveying system of claim 1, wherein, The above-mentioned control device can switch between valid and invalid of the function of sending the above-mentioned change command. Such as the conveying system of claim 1, wherein, After the above-mentioned transportation vehicle performs the above-mentioned loading operation, when the above-mentioned transportation vehicle does not receive the above-mentioned detection signal, the above-mentioned transportation vehicle waits for the reception of the above-mentioned change command while moving along the above-mentioned track, and when the above-mentioned change command is received. Afterwards, the item is transported towards the transport destination indicated by the change command. Such as the conveying system of claim 1, wherein, After the transport vehicle performs the loading operation, if the transport vehicle does not receive the detection signal, the transport vehicle requests the change command to the control device. Such as the conveying system of claim 1, wherein, The detection signal includes a first signal value and a second signal value, After the transport vehicle arrives at a position where the article can be delivered to the placement unit, and at a time when the placement unit can be assigned as a delivery destination of the article, the detection signal is switched from the first signal value to the 2nd signal value, When the article is detected by the loading unit, the detection signal is switched from the second signal value to the first signal value, When the detection signal remains in the state of the second signal value even if the transport vehicle performs the loading operation, the control device transmits the change command to the transport vehicle.