WO2023062960A1 - Transfer system - Google Patents

Transfer system Download PDF

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Publication number
WO2023062960A1
WO2023062960A1 PCT/JP2022/032984 JP2022032984W WO2023062960A1 WO 2023062960 A1 WO2023062960 A1 WO 2023062960A1 JP 2022032984 W JP2022032984 W JP 2022032984W WO 2023062960 A1 WO2023062960 A1 WO 2023062960A1
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WO
WIPO (PCT)
Prior art keywords
transport vehicle
transport
article
placement
control device
Prior art date
Application number
PCT/JP2022/032984
Other languages
French (fr)
Japanese (ja)
Inventor
千晶 福嶋
Original Assignee
村田機械株式会社
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Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2023062960A1 publication Critical patent/WO2023062960A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present invention mainly relates to a transport system that transports articles by means of transport vehicles.
  • the transport system of Patent Document 1 includes a transport carriage and a loading port.
  • the transport vehicle transports the object to be transported and places it on the loading port.
  • the loading port is provided with a load sensor that detects the transported object. If the load sensor does not detect the transported object after the transporting vehicle places the transported object on the loading port, the transporting vehicle performs a retry operation, which is an operation to place the transported object on the loading port again. .
  • the load sensor may not detect the transported object even if the retry operation is performed. In this case, the transport system cannot cope with the abnormality on its own.
  • the present invention has been made in view of the above circumstances, and its main purpose is to provide a transport system capable of coping with various abnormalities related to the delivery of articles to the placing section by itself.
  • the transport system includes a transport vehicle and a control device.
  • the transport vehicle performs a transport operation of transporting an article by traveling along a track, and a placement operation of placing the article on the placement section while communicating with the placement section.
  • the control device transmits a command regarding the transport destination of the article to the transport vehicle.
  • the control device controls the transport vehicle to perform the above-mentioned
  • a change command which is a command to change the transport destination of the article, is transmitted to the transport vehicle.
  • the transport system described above preferably has the following configuration. That is, if the transport vehicle does not receive the detection signal after performing the placement operation, the transport vehicle performs the placement operation at least once again. If the transport vehicle does not receive the detection signal even after the transport vehicle performs the placement operation again, the control device transmits the change command to the transport vehicle.
  • the function of the transport vehicle performing the placement operation again can be switched between valid and invalid.
  • control device can switch between enabling and disabling the function of transmitting the change command.
  • the transport vehicle in a situation where the transport vehicle does not receive the detection signal after the transport vehicle performs the placement operation, the transport vehicle travels along the track while performing the change. It is preferable to wait for receipt of the command, and transport the article to the destination indicated by the change command after receiving the change command.
  • the transport vehicle in a situation where the transport vehicle does not receive the detection signal after the transport vehicle performs the placement operation, the transport vehicle requests the change command to the control device. preferably.
  • control device to send a change command at the appropriate timing in response to a request from the transport vehicle.
  • the transport system described above preferably has the following configuration. That is, the detection signal includes a first signal value and a second signal value. After the transport vehicle has arrived at the position where the article is delivered to the placement section and at a timing when the placement section can be assigned as a delivery destination of the article, the detection signal is the first signal. value to the second signal value. The detection signal is switched from the second signal value to the first signal value by the placing section detecting the article. When the state in which the detection signal is the second signal value continues even after the transport vehicle performs the placement operation, the control device transmits the change command to the transport vehicle.
  • FIG. 1 is a schematic plan view of a transport system according to one embodiment of the present invention
  • FIG. FIG. 2 is a schematic side view showing the configuration of a transport vehicle and a placing section
  • a block diagram of a transport system. 4 is a time chart showing interlock communication when the transport vehicle delivers an article to the placing section; 4 is a flow chart when the transport vehicle delivers an article to the placing section; A table showing setting patterns of the transfer destination change function and the retry operation function.
  • the transport system 1 shown in FIG. 1 is installed in a facility such as a semiconductor manufacturing factory or warehouse, and transports articles.
  • An article transported by the transport system 1 is a container for storing wafers (semiconductor wafers).
  • the container is a FOUP (Front-Opening Unified Pod) or a wafer cassette.
  • the article may be a reticle pod that houses a reticle.
  • the transport system 1 is provided in a warehouse, the articles are products, parts, or the like stored in the warehouse.
  • the transport system 1 includes a management control device (control device) 10, a transport vehicle 20, and a track 30.
  • the management control device 10 is a computer having an arithmetic device such as a CPU, a storage device such as an HDD, SSD, or flash memory, and a communication device.
  • the management control device 10 can perform various controls related to the transportation and processing of articles by reading and executing programs stored in the storage device.
  • the management control device 10 can use the communication device to send a command regarding the destination of the article to the transport vehicle 20 .
  • the command regarding the destination of the article includes, for example, a command describing the destination of the article and a change command, which will be described later.
  • the transport vehicle 20 is an OHT (Overhead Hoist Transfer).
  • the transport vehicle 20 is a vehicle that unmannedly travels along a track 30 suspended from the ceiling 100 to transport articles.
  • the transport system 1 includes a plurality of transport vehicles 20 . Each transport vehicle 20 transports the article to the transport destination described in the command received from the management control device 10 .
  • a plurality of processing equipments 91 are installed in a semiconductor manufacturing factory.
  • the processing equipment 91 is located near the track 30 and is accessible by the transport vehicle 20 traveling along the track 30 .
  • the processing device 91 has a placement section 92 that receives the article 40 from the carrier 20 .
  • the processing apparatus 91 takes in the article 40 placed on the placing section 92 and performs processing (for example, one process for manufacturing a semiconductor device) on the wafer accommodated in the article 40 .
  • the transport vehicle 20 includes a vehicle control device 21 , a travel section 22 , a transport section 23 and a housing 28 .
  • the vehicle control device 21 is a computer having an arithmetic device such as a CPU, a storage device such as an HDD, SSD, or flash memory, and a communication device.
  • the vehicle control device 21 controls each part of the transport vehicle 20 by reading and executing a program stored in the storage device.
  • the communication device can communicate with the management control device 10 and the placement section 92 by wire or wirelessly.
  • the travel unit 22 includes a travel motor and wheels.
  • the traveling motor generates rotational driving force under the control of the vehicle control device 21 .
  • the transport vehicle 20 travels along the track 30 by rotating the wheels by the rotational driving force generated by the traveling motor.
  • the transport section 23 includes a winding mechanism 24, a suspension belt 25, and a grip section 26.
  • the winding mechanism 24 has an elevating motor.
  • the winding mechanism 24 can wind and unwind the suspension belt 25 using the driving force generated by the lifting motor.
  • a grip portion 26 is connected to the lower end of the suspension belt 25 .
  • the gripping section 26 can switch between a state of gripping the article 40 and a state of releasing the grip of the article 40 .
  • the article 40 of this embodiment has a flange portion on the upper portion, and the gripping portion 26 grips the flange portion of the article 40 . Note that the gripping portion 26 may grip the side surface or the bottom surface of the article 40 .
  • the transport unit 23 is not limited to a configuration that grips and transports the article 40 , and may have a configuration that includes a transport table on which the article 40 is placed and transported.
  • the carrier 20 When the carrier 20 receives the article 40, the carrier 20 travels to the receiving position of the article 40. Next, the winding mechanism 24 lets out the hanging belt 25 so that the gripping part 26 is lowered to the vicinity of the article 40 . Thereafter, after the gripping portion 26 has gripped the article 40 , the winding mechanism 24 winds the suspension belt 25 so that the article 40 can be positioned inside the housing 28 .
  • the conveying vehicle 20 travels with the article 40 positioned inside the housing 28 to convey the article 40 .
  • the transport vehicle 20 delivers the article 40
  • the transport vehicle 20 travels to the placing section 92 specified by the management control device 10 .
  • the winding mechanism 24 lets out the suspension belt 25 so that the article 40 is lowered to the placement section 92 .
  • the gripping section 26 releases the grip of the article 40 .
  • the article 40 is delivered to the placement section 92 .
  • the transport vehicle 20 having the loading portion 92 support at least part of the load of the article 40 is referred to as “placing”, and the transportation vehicle 20 placing the article 40 on the loading portion 92 is referred to as “placing”.
  • the action is called a "placement action”.
  • the transport vehicle 20 supports part of the load of the article 40 it corresponds to placement.
  • the gripping part 26 has not released the gripping of the article 40, it corresponds to placement.
  • a process in which the transport vehicle 20 releases the grip of the article 40 and the subject handling the article 40 is changed from the transport vehicle 20 to the placement section 92 (the processing device 91) is referred to as delivery of the article 40.
  • the gripping portion 26 is provided with a gripping sensor 27 for detecting that the article 40 has been placed on the placement portion 92 .
  • the gripping sensor 27 is an optical sensor including a light projecting portion and a light receiving portion, and the light receiving portion receives the inspection light emitted by the light projecting portion. Also, if there is an object between the light projecting part and the light receiving part, the inspection light is blocked, so the light receiving part cannot receive the inspection light. Further, when the article 40 gripped by the gripping portion 26 is lowered and the bottom surface of the article 40 comes into contact with the placement portion 92 , the flange portion of the article 40 floats upward with respect to the gripping portion 26 .
  • the optical axis of the gripping sensor 27 is positioned so as to overlap the flange portion that is lifted upward when the article 40 is placed. Thereby, the gripping sensor 27 can detect that the article 40 has been placed on the placing portion 92 on the transport vehicle 20 side.
  • a sensor for example, a load sensor
  • a sensor different from the gripping sensor 27 of the present embodiment may be used to detect that the article 40 is placed on the placing portion 92 on the transport vehicle 20 side.
  • the placement section 92 includes a placement control device 93 and a placement sensor 94 .
  • the placement control device 93 is a computer having an arithmetic device such as a CPU, a storage device such as an HDD, an SSD, or a flash memory, and a communication device.
  • the placement control device 93 controls delivery of the article 40 by reading and executing a program stored in the storage device.
  • the communication device can communicate with the management control device 10 and the carrier 20 by wire or wirelessly.
  • the placement control device 93 may be a control device that only controls the reception of the article 40 , or may additionally be a control device that controls the processing device 91 .
  • the placement sensor 94 detects that the article 40 has been placed on the placement section 92 .
  • the placement sensor 94 is an optical sensor including a light projecting portion and a light receiving portion, and the light receiving portion receives the inspection light emitted by the light projecting portion. Also, if there is an object between the light projecting part and the light receiving part, the inspection light is blocked, so the light receiving part cannot receive the inspection light.
  • the light receiving portion of the placement sensor 94 can receive the inspection light before the article 40 is placed on the placement portion 92 . Also, the optical axis of the placement sensor 94 overlaps with the article 40 properly placed on the placement portion 92 . Thereby, the placement sensor 94 can detect that the article 40 has been properly placed on the placement portion 92 .
  • the placement sensor 94 may be a set of a light projecting part and a light receiving part, or may be a plurality of sets of the light projecting part and the light receiving part.
  • a sensor for example, a load sensor
  • a sensor different from the placement sensor 94 of the present embodiment may be used to detect that the article 40 is placed on the placement section 92 on the placement section 92 side.
  • interlock communication performed between the transport vehicle 20 and the placement unit 92 when the article 40 is transferred from the transport vehicle 20 to the placement unit 92 will be described.
  • interlock communication is performed between the transport vehicle 20 (specifically, the vehicle control device 21) and the placement section 92 (specifically, the placement control device 93) in accordance with the SEMI E84 standard.
  • the transport vehicle 20 and the placement section 92 share various signals that switch between ON and OFF depending on the conditions. That is, the transport vehicle 20 and the placement section 92 transmit the signal values of the respective signals at regular time intervals or at the timing when the signal values are switched.
  • Signals transmitted from the placement unit 92 to the transport vehicle 20 include an L_REQ signal (detection signal) and a READY signal.
  • Signals transmitted from the carrier 20 to the placement section 92 include a TR_REQ signal, a BUSY signal, and a COMPT signal. Not receiving the detection signal means not receiving that the signal value has changed from ON to OFF, or not receiving that the signal value has changed from OFF to ON.
  • the L_REQ signal is switched from OFF (first signal value) to ON (second signal value) (time T1).
  • the L_REQ signal is a signal indicating that the placing section 92 can be assigned as the delivery destination of the article 40 .
  • a condition that communication between the carrier 20 and the placement section 92 is valid may be included.
  • the L_REQ signal is turned OFF at the timing when the placing section 92 detects that the article 40 has been placed.
  • the transport vehicle 20 notifies the placement unit 92 of the delivery of the article 40, and switches the TR_REQ signal from OFF to ON (time T2).
  • the TR_REQ signal is a signal indicating that delivery of the article 40 has been requested.
  • the TR_REQ signal is turned OFF when the placement operation by the transport vehicle 20 is completed (due to the BUSY signal, which will be described later, being turned OFF).
  • the placement unit 92 receives the request from the transport vehicle 20, and switches the READY signal from OFF to ON when preparations for delivery of the article 40 from the transport vehicle 20 are completed (time T3).
  • the READY signal is a signal indicating that a request to deliver the article 40 from the transport vehicle 20 has been received.
  • the READY signal is turned OFF after delivery of the article 40 is completed (after a COMPT signal, which will be described later, is turned ON).
  • the BUSY signal is a signal indicating that the transport vehicle 20 is performing the placement operation. While the BUSY signal is ON, the mechanical operation of the placement section 92 is prohibited. The BUSY signal turns OFF after the placement of the item 40 is successfully completed (ie, after the L_REQ signal turns OFF).
  • the placement unit 92 switches the L_REQ signal to OFF after the placement sensor 94 detects the article 40 (time T5).
  • the BUSY signal is switched to OFF and the TR_REQ signal is switched to OFF (time T6).
  • the transport vehicle 20 switches the COMPT signal from OFF to ON (time T6).
  • the COMPT signal is a signal indicating that delivery of the article 40 on the transport vehicle 20 side has been completed.
  • the READY signal is turned OFF (time T7).
  • the transport vehicle 20 or the placing section 92 notifies the management control device 10 of the completion of delivery of the article 40 . After that, a series of processing is completed by switching the COMPT signal to OFF.
  • the carrier 20 may not receive that the L_REQ signal has turned OFF.
  • the cause of this is that the placement sensor 94 cannot detect the article 40 due to misalignment of the placement position of the article 40, an abnormality in the placement sensor 94, an abnormality in the processing of the detection value of the placement sensor 94, and an abnormality in communication. etc. If the L_REQ signal remains ON for a predetermined period of time, a time-out error occurs and the mounting section 92 stops abnormally. At the same time, the transport vehicle 20 also stops because the placement operation is not completed. In this case, since the operator needs to take action, the transport efficiency of the transport system 1 is lowered.
  • the transport system 1 of the present embodiment has a function of coping with this type of abnormality on its own in order to reduce the frequency of abnormal stoppages of the transport vehicle 20 .
  • To deal with an abnormality by oneself means to deal with an abnormality by the processing of the transport system 1 without requiring the operator's work.
  • the transport system 1 has a transport destination change function and a retry operation function.
  • the transfer destination change function is a function for changing the transfer destination of the article 40 by the transfer vehicle 20 .
  • the retry operation function is a function for causing the transport vehicle 20 to perform the placement operation again.
  • description will be made along the flow chart of FIG. 5 shows the processing performed by the vehicle control device 21 of the transport vehicle 20 .
  • the carrier 20 performs the placement operation as described above (S101). It should be noted that the transport vehicle 20 does not release the grip of the gripping portion 26 and maintains the gripping of the gripping portion 26 even after performing the placing operation.
  • the transport vehicle 20 determines whether the L_REQ signal has turned OFF (S102). Since there is a slight time lag between the completion of the placement operation and the reception of the L_REQ signal by the transport vehicle 20, the determination in step S102 may be made after a period of time considering the time lag has elapsed. When the L_REQ signal is turned OFF, the transport vehicle 20 continues the processing related to delivery of the article 40 as described above (S103).
  • the transport vehicle 20 determines whether or not the threshold time has passed (S104). If the threshold time has not elapsed, the transport vehicle 20 performs a retry operation (S105). The retry operation is to perform the placing operation again after the suspension belt 25 is wound up by the winding mechanism 24 to raise the article 40 .
  • the transport vehicle 20 may raise the article 40 to a height where it can be accommodated in the housing 28 or to a height where the gripping sensor 27 does not detect the flange portion. If the reason why the L_REQ signal does not turn OFF is the misalignment of the article 40, there is a possibility that the abnormality can be dealt with by performing a retry operation. As described above, even after the first placement operation is completed, the carrier 20 continues to grip the article 40 with the gripper 26 . Therefore, the process of gripping the article 40 again is unnecessary.
  • the carrier 20 After completing the retry operation, the carrier 20 performs the process of step S102 again.
  • the transport vehicle 20 continues the processing related to delivery of the article 40 (S103). If the L_REQ signal remains ON, the retry operation is repeated until the threshold time elapses. If a timeout error occurs in the placement section 92, the retry operation cannot be performed. Therefore, it is preferable that the threshold time elapses at the same time as or before the timeout error occurs in the placement section 92 . In this embodiment, the retry operation is repeatedly performed until the threshold time elapses, but the retry operation may be repeatedly performed until the threshold number of times is reached.
  • a change command is a command to change the transport destination of the article by the transport vehicle 20 .
  • the transport destination of the transport vehicle 20 is determined by the management control device 10, so the transport vehicle 20 requests the management control device 10 to issue a change command.
  • the transport vehicle 20 waits until it receives the change command (S107).
  • Standby travel means that the transport vehicle 20 travels along the track 30 while waiting for a change command.
  • the transport vehicle 20 it is possible to prevent the transport vehicle 20 from continuing to be positioned at the same point, so it is difficult for other transport vehicles 20 to travel. For example, if a looped route exists near the transport vehicle 20, the looped route may continue to be circulated. Alternatively, the transport vehicle 20 may travel toward a point where the delivery of the articles 40 occurs frequently.
  • the standby run is not an essential process.
  • the transport vehicle 20 may wait for a change command without traveling.
  • the transport vehicle 20 may travel to, for example, a standby position where the traffic is relatively small and then stop to wait for a change command.
  • the guided vehicle 20 determines whether or not a change command has been received (S108), and continues standby travel until the change command is received.
  • the transport vehicle 20 transports the article 40 to the new destination indicated by the change command (S109).
  • the transfer destination change function and the retry operation function of this embodiment can be individually switched between enabled and disabled.
  • the transfer vehicle 20 may disable the request for the change command, or the management control device 10 may disable the transmission of the change command.
  • the transfer destination change can deal with not only the positional deviation of the article 40, but also the abnormalities of the placement sensor 94 and the processing errors of the placement control device 93.
  • the change of the transport destination has the advantage of being able to deal with various abnormalities.
  • the retry operation cannot cope with an abnormality of the placement sensor 94 and an abnormality of the processing of the placement control device 93, but has the advantage of being able to deal with the abnormality in a short time when the article 40 is misaligned. . Therefore, by making it possible to switch between valid and invalid of the two functions, it is possible to respond flexibly to the request of the administrator of the transport system 1 .
  • the transfer destination change function is valid, and the retry operation function is also valid.
  • the retry operation is first performed (STEP 1). If the L_REQ signal does not turn OFF even after the retry operation, the transfer destination is changed (STEP 2). That is, when setting 1 is selected, an abnormality that can be dealt with by retrying is dealt with by retrying, and an abnormality that cannot be dealt with by retrying is dealt with by changing the transfer destination.
  • the transfer destination change function is valid and the retry operation function is invalid.
  • the transfer destination is changed without performing the retry operation (STEP 1).
  • an abnormality in which the L_REQ signal does not turn OFF is always dealt with by changing the transport destination.
  • the transfer destination change function is disabled and the retry operation function is enabled.
  • the retry operation is first performed (STEP 1). If the L_REQ signal does not turn OFF even after the retry operation, the carrier 20 is stopped abnormally. That is, when setting 3 is selected, the retry operation is always performed and the transfer destination is not changed.
  • the transfer destination change function is disabled and the retry operation function is also disabled. In this case, if the L_REQ signal does not turn OFF after the placing operation, the carrier 20 is stopped abnormally.
  • setting 4 the system does not handle an abnormality in which the L_REQ signal does not turn OFF by itself.
  • the transport system 1 of this embodiment includes the transport vehicle 20 and the management control device 10 .
  • the transport vehicle 20 performs a transport operation of transporting the article 40 by traveling along the track 30 and a placement operation of placing the article 40 on the placement section 92 while executing communication with the placement section 92.
  • the management control device 10 transmits a command regarding the transport destination of the article 40 to the transport vehicle 20 .
  • a situation in which the transport vehicle 20 does not receive the L_REQ signal indicating that the placement unit 92 has detected the article 40 after the transport vehicle 20 has performed the placement operation (specifically, the L_REQ signal has changed from ON to OFF).
  • the management control device 10 transmits to the transport vehicle 20 a change command, which is a command to change the transport destination of the article 40 by the transport vehicle 20 .
  • the transport vehicle 20 when the transport vehicle 20 does not receive the L_REQ signal after performing the placement operation, it performs at least one placement operation (retry operation) again. If the transport vehicle 20 does not receive the L_REQ signal even after the transport vehicle 20 performs the placement operation again, the management control device 10 transmits a change command to the transport vehicle 20 .
  • the function of the transport vehicle 20 to perform the placement operation again can be switched between valid and invalid.
  • the transport vehicle 20 in a situation where the transport vehicle 20 does not receive the L_REQ signal after the transport vehicle 20 has performed the placement operation, the transport vehicle 20 waits along the track 30 while traveling. It waits for the receipt of the command, and after receiving the change command, transports the article 40 to the destination indicated by the change command.
  • the transport vehicle 20 in a situation where the transport vehicle 20 does not receive the L_REQ signal after the transport vehicle 20 has performed the placement operation, the transport vehicle 20 requests the management control device 10 to issue a change command. do.
  • the management control device 10 can transmit a change command at an appropriate timing in response to a request from the transport vehicle 20.
  • the L_REQ signal includes ON and OFF. After the carrier 20 reaches the position where the article 40 is delivered to the placement section 92 and at the timing when the placement section 92 can be assigned as the delivery destination of the article 40, the L_REQ signal is switched from OFF to ON. . When the placement unit 92 detects the article 40, the L_REQ signal is switched from ON to OFF. If the state in which the L_REQ signal is ON continues even after the transport vehicle 20 performs the placement operation, the management control device 10 transmits a change command to the transport vehicle 20 .
  • This embodiment includes features 1 to 7 below.
  • a transport vehicle that performs a transport operation of transporting an article by traveling along a track and a placement operation of placing the article on the placement section while communicating with the placement section; a control device that transmits a command regarding the transport destination of the article to the transport vehicle; with In a situation in which the transport vehicle does not receive a detection signal indicating that the placement unit has detected the article after the transport vehicle has performed the placement operation, the control device controls the transport vehicle to perform the above-mentioned A transport system, characterized in that a change command, which is a command for changing a transport destination of an article, is transmitted to the transport vehicle.
  • a transport system according to any one of features 1 to 4, In a situation where the transport vehicle has not received the detection signal after the transport vehicle has performed the placement operation, the transport vehicle waits for reception of the change instruction while traveling along the track; A conveying system characterized by conveying an article to a destination indicated by the change command after receiving the change command.
  • a transport system according to any one of features 1 to 5, After the transport vehicle performs the placement operation, the transport vehicle requests the change command to the control device in a situation where the transport vehicle does not receive the detection signal. system.
  • the detection signal includes a first signal value and a second signal value; After the transport vehicle has arrived at the position where the article is delivered to the placement section and at a timing when the placement section can be assigned as a delivery destination of the article, the detection signal is the first signal. value to the second signal value; the detection signal is switched from the second signal value to the first signal value by the placement unit detecting the article; When the state in which the detection signal is the second signal value continues even after the transport vehicle performs the placement operation, the control device transmits the change command to the transport vehicle. transport system.
  • the transport vehicle 20 requests the management control device 10 to issue a change command.
  • the management control device 10 may voluntarily create a change command and transmit it to the carrier 20 .
  • the transport vehicle 20 and the placement unit 92 have transmitted the status regarding the delivery of the article 40 to the management control device 10, and the management control device 10, based on the contents received from the transport vehicle 20 and the placement unit 92, determines whether or not to create a change command.
  • an OHT was used as an example of the transport vehicle 20, but the present invention can also be applied to other vehicles such as an AGV (Automated Guided Vehicle) or a suspended crane.
  • AGV Automated Guided Vehicle
  • management control device (control device) 20 transport vehicle 21 vehicle control device 30 track 91 processing device 92 placement section 93 placement control device

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  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
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  • Intermediate Stations On Conveyors (AREA)

Abstract

This transfer system includes a transfer vehicle and a control device. The transfer vehicle performs a transfer operation that transfers an item by running along a trajectory, and a mounting operation that mounts the item on a mounting unit while communicating with the mounting unit. The control device transmits an instruction about the transfer destination of the item to the transfer vehicle. After the transfer vehicle performs the mounting operation, if the transfer vehicle does not receive a detection signal that indicates detection of the item by the mounting unit, the control device transmits to the transfer vehicle a change instruction that is an instruction that changes the transfer destination of the item by the transfer vehicle.

Description

搬送システムConveyor system
　本発明は、主として、搬送車により物品を搬送する搬送システムに関する。 The present invention mainly relates to a transport system that transports articles by means of transport vehicles.
　特許文献１の搬送システムは、搬送台車と、載置ポートと、を備える。搬送台車は、被搬送物を搬送して載置ポートに載置する。載置ポートには、被搬送物を検出する在荷センサが設けられている。搬送台車が被搬送物を載置ポートに載置した後に在荷センサが被搬送物を検出しない場合、搬送台車は、被搬送物を載置ポートに再び載置する動作であるリトライ動作を行う。 The transport system of Patent Document 1 includes a transport carriage and a loading port. The transport vehicle transports the object to be transported and places it on the loading port. The loading port is provided with a load sensor that detects the transported object. If the load sensor does not detect the transported object after the transporting vehicle places the transported object on the loading port, the transporting vehicle performs a retry operation, which is an operation to place the transported object on the loading port again. .
特許第５０５６３６８号公報Japanese Patent No. 5056368
　しかし、異常の原因によっては、リトライ動作を行っても在荷センサが被搬送物を検出しない可能性がある。この場合、搬送システムは自力で異常に対応できない。 However, depending on the cause of the abnormality, the load sensor may not detect the transported object even if the retry operation is performed. In this case, the transport system cannot cope with the abnormality on its own.
　本発明は以上の事情に鑑みてされたものであり、その主要な目的は、載置部への物品の受渡しに関する様々な異常に自力で対応可能な搬送システムを提供することにある。 The present invention has been made in view of the above circumstances, and its main purpose is to provide a transport system capable of coping with various abnormalities related to the delivery of articles to the placing section by itself.
課題を解決するための手段及び効果Means and Effects for Solving Problems
　本発明の解決しようとする課題は以上の如くであり、次にこの課題を解決するための手段とその効果を説明する。 The problem to be solved by the present invention is as described above. Next, the means for solving this problem and its effect will be explained.
　本発明の観点によれば、以下の構成の搬送システムが提供される。即ち、搬送システムは、搬送車と、制御装置と、を備える。前記搬送車は、軌道に沿って走行することで物品を搬送する搬送動作と、載置部との間で通信を実行しながら当該載置部に前記物品を載置する載置動作とを行う。前記制御装置は、前記物品の搬送先に関する指令を前記搬送車に送信する。前記搬送車が前記載置動作を行った後に、前記載置部が前記物品を検出したことを示す検出信号を前記搬送車が受信しなかった状況において、前記制御装置は、前記搬送車による前記物品の搬送先を変更する指令である変更指令を前記搬送車に送信する。 According to the aspect of the present invention, a transport system with the following configuration is provided. That is, the transport system includes a transport vehicle and a control device. The transport vehicle performs a transport operation of transporting an article by traveling along a track, and a placement operation of placing the article on the placement section while communicating with the placement section. . The control device transmits a command regarding the transport destination of the article to the transport vehicle. In a situation in which the transport vehicle does not receive a detection signal indicating that the placement unit has detected the article after the transport vehicle has performed the placement operation, the control device controls the transport vehicle to perform the above-mentioned A change command, which is a command to change the transport destination of the article, is transmitted to the transport vehicle.
　これにより、搬送車が別の載置部に物品を搬送するため、載置部から検出信号を受信しない異常に対応できる。特に、搬送先を変更することにより、リトライ動作では解決できない異常にも対応できる可能性がある。 As a result, since the transport vehicle transports the article to another placement section, it is possible to cope with an abnormality in which the detection signal is not received from the placement section. In particular, by changing the transport destination, there is a possibility that an abnormality that cannot be resolved by the retry operation can be dealt with.
　前記の搬送システムにおいては、以下の構成とすることが好ましい。即ち、前記搬送車は、前記載置動作を行った後に、前記検出信号を受信しなかった場合、少なくとも１回の前記載置動作を再度行う。前記搬送車が再度の前記載置動作を行っても前記検出信号を前記搬送車が受信しなかった場合、前記制御装置は、前記変更指令を前記搬送車に送信する。 The transport system described above preferably has the following configuration. That is, if the transport vehicle does not receive the detection signal after performing the placement operation, the transport vehicle performs the placement operation at least once again. If the transport vehicle does not receive the detection signal even after the transport vehicle performs the placement operation again, the control device transmits the change command to the transport vehicle.
　これにより、リトライ動作で解決できる異常はリトライ動作で対応し、リトライ動作で対応できない異常は搬送先の変更により対応できる。 As a result, errors that can be resolved by retrying can be handled by retrying, and errors that cannot be handled by retrying can be handled by changing the transport destination.
　前記の搬送システムにおいては、前記搬送車が再度の前記載置動作を行う機能の有効及び無効を切替可能であることが好ましい。 In the transport system described above, it is preferable that the function of the transport vehicle performing the placement operation again can be switched between valid and invalid.
　これにより、物品の種類、搬送システムの設置先、又は管理者の意向等に柔軟に対応できる。例えば、再度の載置動作を行う時間を短縮することが望まれる場合、この機能を無効にすることにより、早期に異常に対応できる。 As a result, it is possible to flexibly respond to the type of goods, the installation location of the transportation system, or the intention of the administrator. For example, if it is desired to shorten the time for performing the placement operation again, disabling this function enables an early response to an abnormality.
　前記の搬送システムにおいては、前記制御装置が前記変更指令を送信する機能の有効及び無効を切替可能であることが好ましい。 In the transport system, it is preferable that the control device can switch between enabling and disabling the function of transmitting the change command.
　これにより、物品の種類、搬送システムの設置先、又は管理者の意向等に柔軟に対応できる。例えば、物品の搬送先を変更することが好ましくない状況では、この機能を無効にすることにより、物品の搬送先が変更されなくなる。 As a result, it is possible to flexibly respond to the type of goods, the installation location of the transportation system, or the intention of the administrator. For example, in situations where it is undesirable to change the destination of an item, disabling this function will prevent the destination of the item from being changed.
　前記の搬送システムにおいては、前記搬送車が前記載置動作を行った後に、前記搬送車が前記検出信号を受信しなかった状況において、前記搬送車は、前記軌道に沿って走行しながら前記変更指令の受信を待機し、前記変更指令の受信後に当該変更指令が示す搬送先へ物品を搬送することが好ましい。 In the transport system described above, in a situation where the transport vehicle does not receive the detection signal after the transport vehicle performs the placement operation, the transport vehicle travels along the track while performing the change. It is preferable to wait for receipt of the command, and transport the article to the destination indicated by the change command after receiving the change command.
　これにより、搬送車が同じ地点に位置し続けることを抑制できるので、他の搬送車の走行を阻害しにくくなる。 As a result, it is possible to prevent the transport vehicle from continuing to be positioned at the same point, so it is less likely to hinder the travel of other transport vehicles.
　前記の搬送システムにおいては、前記搬送車が前記載置動作を行った後において、前記搬送車が前記検出信号を受信しなかった状況において、前記搬送車は、前記制御装置に前記変更指令を要求することが好ましい。 In the transport system, in a situation where the transport vehicle does not receive the detection signal after the transport vehicle performs the placement operation, the transport vehicle requests the change command to the control device. preferably.
　これにより、制御装置が搬送車からの要求に応じて適切なタイミングで変更指令を送信できる。 This allows the control device to send a change command at the appropriate timing in response to a request from the transport vehicle.
　前記の搬送システムにおいては、以下の構成とすることが好ましい。即ち、前記検出信号は、第１信号値と第２信号値を含む。前記載置部に前記物品を受け渡す位置に前記搬送車が到着した後であって、前記載置部が前記物品の受渡し先として割当可能になったタイミングで、前記検出信号が前記第１信号値から前記第２信号値に切り替わる。前記載置部が前記物品を検出することで前記検出信号が前記第２信号値から前記第１信号値に切り替わる。前記搬送車が前記載置動作を行っても前記検出信号が前記第２信号値である状態が継続している場合、前記制御装置が前記変更指令を前記搬送車に送信する。 The transport system described above preferably has the following configuration. That is, the detection signal includes a first signal value and a second signal value. After the transport vehicle has arrived at the position where the article is delivered to the placement section and at a timing when the placement section can be assigned as a delivery destination of the article, the detection signal is the first signal. value to the second signal value. The detection signal is switched from the second signal value to the first signal value by the placing section detecting the article. When the state in which the detection signal is the second signal value continues even after the transport vehicle performs the placement operation, the control device transmits the change command to the transport vehicle.
　これにより、規格で定められた信号を利用して変更指令を送信するか否かの判断を行うことができる。 As a result, it is possible to determine whether or not to transmit a change command using the signal specified by the standard.
本発明の一実施形態に係る搬送システムの概略平面図。1 is a schematic plan view of a transport system according to one embodiment of the present invention; FIG. 搬送車及び載置部の構成を示す概略側面図。FIG. 2 is a schematic side view showing the configuration of a transport vehicle and a placing section; 搬送システムのブロック図。A block diagram of a transport system. 搬送車が載置部に物品を受け渡すときのインターロック通信を示すタイムチャート。4 is a time chart showing interlock communication when the transport vehicle delivers an article to the placing section; 搬送車が載置部に物品を受け渡すときのフローチャート。4 is a flow chart when the transport vehicle delivers an article to the placing section; 搬送先変更機能とリトライ動作機能の設定パターンを示す表。A table showing setting patterns of the transfer destination change function and the retry operation function.
　次に、図面を参照して本発明の実施形態を説明する。 Next, embodiments of the present invention will be described with reference to the drawings.
　図１に示す搬送システム１は、半導体製造工場又は倉庫等の施設に設けられ、物品を搬送する。搬送システム１が搬送する物品は、ウエハ（半導体ウエハ）を収容する容器である。具体的には、容器は、ＦＯＵＰ（Ｆｒｏｎｔ－Ｏｐｅｎｉｎｇ　Ｕｎｉｆｉｅｄ　Ｐｏｄ）又はウエハカセットである。なお、物品は、レチクルを収容するレチクルポッドであってもよい。また、搬送システム１が倉庫に設けられる場合、物品は、倉庫に保管される商品又は部品等である。 The transport system 1 shown in FIG. 1 is installed in a facility such as a semiconductor manufacturing factory or warehouse, and transports articles. An article transported by the transport system 1 is a container for storing wafers (semiconductor wafers). Specifically, the container is a FOUP (Front-Opening Unified Pod) or a wafer cassette. Note that the article may be a reticle pod that houses a reticle. Moreover, when the transport system 1 is provided in a warehouse, the articles are products, parts, or the like stored in the warehouse.
　図１から図３に示すように、搬送システム１は、管理制御装置（制御装置）１０と、搬送車２０と、軌道３０と、を備える。 As shown in FIGS. 1 to 3, the transport system 1 includes a management control device (control device) 10, a transport vehicle 20, and a track 30.
　管理制御装置１０は、ＣＰＵ等の演算装置と、ＨＤＤ、ＳＳＤ、又はフラッシュメモリ等の記憶装置と、通信装置と、を有するコンピュータである。管理制御装置１０は、記憶装置に記憶されたプログラムを読み出して実行することにより、物品の搬送及び処理に関する様々な制御を実行可能である。管理制御装置１０は、通信装置を用いて物品の搬送先に関する指令を搬送車２０に送信可能である。物品の搬送先に関する指令には、例えば、物品の搬送先を記述した指令と、後述の変更指令と、が含まれる。 The management control device 10 is a computer having an arithmetic device such as a CPU, a storage device such as an HDD, SSD, or flash memory, and a communication device. The management control device 10 can perform various controls related to the transportation and processing of articles by reading and executing programs stored in the storage device. The management control device 10 can use the communication device to send a command regarding the destination of the article to the transport vehicle 20 . The command regarding the destination of the article includes, for example, a command describing the destination of the article and a change command, which will be described later.
　搬送車２０は、ＯＨＴ（Ｏｖｅｒｈｅａｄ　Ｈｏｉｓｔ　Ｔｒａｎｓｆｅｒ）である。搬送車２０は、天井１００に吊るされた軌道３０に沿って無人で走行して物品を搬送する搬送動作を行う車両である。搬送システム１は、複数の搬送車２０を備えている。それぞれの搬送車２０は、管理制御装置１０から受信した指令に記述された搬送先に物品を搬送する。 The transport vehicle 20 is an OHT (Overhead Hoist Transfer). The transport vehicle 20 is a vehicle that unmannedly travels along a track 30 suspended from the ceiling 100 to transport articles. The transport system 1 includes a plurality of transport vehicles 20 . Each transport vehicle 20 transports the article to the transport destination described in the command received from the management control device 10 .
　半導体製造工場には、複数の処理装置９１が設けられている。処理装置９１は、軌道３０の近傍に配置されており、軌道３０に沿って走行する搬送車２０によりアクセス可能である。 A plurality of processing equipments 91 are installed in a semiconductor manufacturing factory. The processing equipment 91 is located near the track 30 and is accessible by the transport vehicle 20 traveling along the track 30 .
　処理装置９１は、搬送車２０から物品４０を受け取る載置部９２を有する。処理装置９１は、載置部９２に載置された物品４０を取り込み、物品４０に収容されたウエハに対して処理（例えば半導体デバイスを製造するための一工程）を行う。 The processing device 91 has a placement section 92 that receives the article 40 from the carrier 20 . The processing apparatus 91 takes in the article 40 placed on the placing section 92 and performs processing (for example, one process for manufacturing a semiconductor device) on the wafer accommodated in the article 40 .
　以下、搬送車２０の詳細な構成について更に説明する。図２及び図３に示すように、搬送車２０は、車制御装置２１と、走行部２２と、搬送部２３と、ハウジング２８を備える。 The detailed configuration of the transport vehicle 20 will be further described below. As shown in FIGS. 2 and 3 , the transport vehicle 20 includes a vehicle control device 21 , a travel section 22 , a transport section 23 and a housing 28 .
　車制御装置２１は、ＣＰＵ等の演算装置と、ＨＤＤ、ＳＳＤ、又はフラッシュメモリ等の記憶装置と、通信装置と、を有するコンピュータである。車制御装置２１は、記憶装置に記憶されたプログラムを読み出して実行することにより、搬送車２０の各部を制御する。通信装置は、管理制御装置１０及び載置部９２に対して有線又は無線により通信可能である。 The vehicle control device 21 is a computer having an arithmetic device such as a CPU, a storage device such as an HDD, SSD, or flash memory, and a communication device. The vehicle control device 21 controls each part of the transport vehicle 20 by reading and executing a program stored in the storage device. The communication device can communicate with the management control device 10 and the placement section 92 by wire or wirelessly.
　走行部２２は、走行モータ及び車輪を備える。走行モータは、車制御装置２１の制御に基づいて回転駆動力を発生させる。走行モータが発生させた回転駆動力により車輪が回転することにより、軌道３０に沿って搬送車２０が走行する。 The travel unit 22 includes a travel motor and wheels. The traveling motor generates rotational driving force under the control of the vehicle control device 21 . The transport vehicle 20 travels along the track 30 by rotating the wheels by the rotational driving force generated by the traveling motor.
　搬送部２３は、巻取機構２４と、吊下げベルト２５と、把持部２６と、を備える。巻取機構２４は、昇降モータを備える。巻取機構２４は、昇降モータが発生させた駆動力を用いて吊下げベルト２５を巻き取ったり、繰り出したりすることができる。吊下げベルト２５の下端には把持部２６が連結されている。把持部２６は、物品４０を把持する状態と、物品４０の把持を解除する状態と、を切替可能である。本実施形態の物品４０は上部にフランジ部があり、把持部２６は物品４０のフランジ部を把持する。なお、把持部２６は、物品４０の側面又は底面を把持してもよい。また、搬送部２３は、物品４０を把持して搬送する構成に限られず、物品４０を載せて搬送する搬送台を有する構成であってもよい。 The transport section 23 includes a winding mechanism 24, a suspension belt 25, and a grip section 26. The winding mechanism 24 has an elevating motor. The winding mechanism 24 can wind and unwind the suspension belt 25 using the driving force generated by the lifting motor. A grip portion 26 is connected to the lower end of the suspension belt 25 . The gripping section 26 can switch between a state of gripping the article 40 and a state of releasing the grip of the article 40 . The article 40 of this embodiment has a flange portion on the upper portion, and the gripping portion 26 grips the flange portion of the article 40 . Note that the gripping portion 26 may grip the side surface or the bottom surface of the article 40 . Further, the transport unit 23 is not limited to a configuration that grips and transports the article 40 , and may have a configuration that includes a transport table on which the article 40 is placed and transported.
　搬送車２０が物品４０を受け取る場合、搬送車２０は、物品４０の受取位置まで走行する。次に、巻取機構２４が吊下げベルト２５を繰り出すことにより、把持部２６が物品４０の近傍まで降下する。その後、把持部２６が物品４０を把持した後に、巻取機構２４が吊下げベルト２５を巻き取ることにより、物品４０をハウジング２８の内部に位置させることができる。搬送車２０は、物品４０をハウジング２８の内部に位置させた状態で走行して、物品４０を搬送する。 When the carrier 20 receives the article 40, the carrier 20 travels to the receiving position of the article 40. Next, the winding mechanism 24 lets out the hanging belt 25 so that the gripping part 26 is lowered to the vicinity of the article 40 . Thereafter, after the gripping portion 26 has gripped the article 40 , the winding mechanism 24 winds the suspension belt 25 so that the article 40 can be positioned inside the housing 28 . The conveying vehicle 20 travels with the article 40 positioned inside the housing 28 to convey the article 40 .
　搬送車２０が物品４０を受け渡す場合、搬送車２０は、管理制御装置１０によって指定された載置部９２まで走行する。搬送車２０が載置部９２に到着した後に、巻取機構２４が吊下げベルト２５を繰り出すことにより、物品４０が載置部９２まで降下する。把持部２６は、物品４０が載置部９２に適切に載置された後に、物品４０の把持を解除する。以上により、物品４０が載置部９２に受け渡される。 When the transport vehicle 20 delivers the article 40 , the transport vehicle 20 travels to the placing section 92 specified by the management control device 10 . After the conveying vehicle 20 arrives at the placement section 92 , the winding mechanism 24 lets out the suspension belt 25 so that the article 40 is lowered to the placement section 92 . After the article 40 is appropriately placed on the placement section 92 , the gripping section 26 releases the grip of the article 40 . As described above, the article 40 is delivered to the placement section 92 .
　本明細書では、搬送車２０が物品４０の荷重の少なくとも一部を載置部９２に支持させることを「載置する」と称し、物品４０を載置部９２に載置させる搬送車２０の動作を「載置動作」と称する。つまり、搬送車２０が物品４０の荷重の一部を支持していても載置に該当する。また、把持部２６が物品４０の把持を解除していなくても載置に該当する。また、搬送車２０が物品４０の把持を解除し、物品４０を取扱う主体が搬送車２０から載置部９２（処理装置９１）に変更されることを物品４０の受渡しと称する。 In this specification, the transport vehicle 20 having the loading portion 92 support at least part of the load of the article 40 is referred to as “placing”, and the transportation vehicle 20 placing the article 40 on the loading portion 92 is referred to as “placing”. The action is called a "placement action". In other words, even if the transport vehicle 20 supports part of the load of the article 40, it corresponds to placement. Also, even if the gripping part 26 has not released the gripping of the article 40, it corresponds to placement. Also, a process in which the transport vehicle 20 releases the grip of the article 40 and the subject handling the article 40 is changed from the transport vehicle 20 to the placement section 92 (the processing device 91) is referred to as delivery of the article 40. FIG.
　また、把持部２６には、物品４０が載置部９２に載置されたことを検出するための把持センサ２７が設けられている。把持センサ２７は、投光部と受光部を備える光センサであり、投光部が照射した検査光を受光部が受光する。また、投光部と受光部の間に物がある場合は検査光が遮られるため、受光部は検査光を受光できない。また、把持部２６に把持された物品４０を降下させて物品４０の底面が載置部９２に接触した場合、物品４０のフランジ部が把持部２６に対して上方に浮き上がる。把持センサ２７の光軸は、物品４０が載置された際に上方に浮き上がったフランジ部と重なる位置にある。これにより、把持センサ２７は、物品４０が載置部９２に載置されたことを搬送車２０側で検出可能である。なお、本実施形態の把持センサ２７とは異なるセンサ（例えば荷重センサ）を用いて、物品４０が載置部９２に載置されたことを搬送車２０側で検出してもよい。 Further, the gripping portion 26 is provided with a gripping sensor 27 for detecting that the article 40 has been placed on the placement portion 92 . The gripping sensor 27 is an optical sensor including a light projecting portion and a light receiving portion, and the light receiving portion receives the inspection light emitted by the light projecting portion. Also, if there is an object between the light projecting part and the light receiving part, the inspection light is blocked, so the light receiving part cannot receive the inspection light. Further, when the article 40 gripped by the gripping portion 26 is lowered and the bottom surface of the article 40 comes into contact with the placement portion 92 , the flange portion of the article 40 floats upward with respect to the gripping portion 26 . The optical axis of the gripping sensor 27 is positioned so as to overlap the flange portion that is lifted upward when the article 40 is placed. Thereby, the gripping sensor 27 can detect that the article 40 has been placed on the placing portion 92 on the transport vehicle 20 side. A sensor (for example, a load sensor) different from the gripping sensor 27 of the present embodiment may be used to detect that the article 40 is placed on the placing portion 92 on the transport vehicle 20 side.
　図２及び図３に示すように、載置部９２は、載置制御装置９３と、載置センサ９４と、を備える。 As shown in FIGS. 2 and 3 , the placement section 92 includes a placement control device 93 and a placement sensor 94 .
　載置制御装置９３は、ＣＰＵ等の演算装置と、ＨＤＤ、ＳＳＤ、又はフラッシュメモリ等の記憶装置と、通信装置と、を有するコンピュータである。載置制御装置９３は、記憶装置に記憶されたプログラムを読み出して実行することにより、物品４０の受渡しに関する制御を行う。通信装置は、管理制御装置１０及び搬送車２０に対して有線又は無線により通信可能である。なお、載置制御装置９３は、物品４０の受取りに関する制御のみを行う制御装置であってもよいし、それに加えて処理装置９１に関する制御を行う制御装置であってもよい。 The placement control device 93 is a computer having an arithmetic device such as a CPU, a storage device such as an HDD, an SSD, or a flash memory, and a communication device. The placement control device 93 controls delivery of the article 40 by reading and executing a program stored in the storage device. The communication device can communicate with the management control device 10 and the carrier 20 by wire or wirelessly. Note that the placement control device 93 may be a control device that only controls the reception of the article 40 , or may additionally be a control device that controls the processing device 91 .
　載置センサ９４は、物品４０が載置部９２に載置されたことを検出する。載置センサ９４は、投光部と受光部を備える光センサであり、投光部が照射した検査光を受光部が受光する。また、投光部と受光部の間に物がある場合は検査光が遮られるため、受光部は検査光を受光できない。載置センサ９４の受光部は、載置部９２に物品４０が載置される前は検査光を受光可能である。また、載置センサ９４の光軸は、載置部９２に適切に載置された物品４０と重なる。これにより、載置センサ９４は、載置部９２に適切に物品４０が載置されたことを検出可能である。なお、載置センサ９４は、１組の投光部と受光部であってもよいし、複数組の投光部と受光部であってもよい。なお、本実施形態の載置センサ９４とは異なるセンサ（例えば荷重センサ）を用いて、物品４０が載置部９２に載置されたことを載置部９２側で検出してもよい。 The placement sensor 94 detects that the article 40 has been placed on the placement section 92 . The placement sensor 94 is an optical sensor including a light projecting portion and a light receiving portion, and the light receiving portion receives the inspection light emitted by the light projecting portion. Also, if there is an object between the light projecting part and the light receiving part, the inspection light is blocked, so the light receiving part cannot receive the inspection light. The light receiving portion of the placement sensor 94 can receive the inspection light before the article 40 is placed on the placement portion 92 . Also, the optical axis of the placement sensor 94 overlaps with the article 40 properly placed on the placement portion 92 . Thereby, the placement sensor 94 can detect that the article 40 has been properly placed on the placement portion 92 . In addition, the placement sensor 94 may be a set of a light projecting part and a light receiving part, or may be a plurality of sets of the light projecting part and the light receiving part. A sensor (for example, a load sensor) different from the placement sensor 94 of the present embodiment may be used to detect that the article 40 is placed on the placement section 92 on the placement section 92 side.
　次に、図４を参照して、搬送車２０から載置部９２に物品４０が受け渡される際に、搬送車２０と載置部９２の間で行われるインターロック通信について説明する。本実施形態では、ＳＥＭＩ　Ｅ８４という規格に沿って、搬送車２０（詳細には車制御装置２１）と載置部９２（詳細には載置制御装置９３）の間でインターロック通信が行われる。 Next, with reference to FIG. 4, interlock communication performed between the transport vehicle 20 and the placement unit 92 when the article 40 is transferred from the transport vehicle 20 to the placement unit 92 will be described. In this embodiment, interlock communication is performed between the transport vehicle 20 (specifically, the vehicle control device 21) and the placement section 92 (specifically, the placement control device 93) in accordance with the SEMI E84 standard.
　搬送車２０と載置部９２は、条件に応じてＯＮとＯＦＦが切り替わる様々な信号を共有している。即ち、搬送車２０と載置部９２は、一定の時間間隔で、又は、信号値が切り替わったタイミングで、それぞれの信号の信号値を送信する。載置部９２から搬送車２０へ送信する信号としては、Ｌ＿ＲＥＱ信号（検出信号）とＲＥＡＤＹ信号がある。搬送車２０から載置部９２へ送信する信号としては、ＴＲ＿ＲＥＱ信号、ＢＵＳＹ信号、ＣＯＭＰＴ信号がある。なお、検出信号を受信しないとは、信号値がＯＮからＯＦＦになったことを受信しないこと、又は、信号値がＯＦＦからＯＮになったことを受信しないことを指すものとする。 The transport vehicle 20 and the placement section 92 share various signals that switch between ON and OFF depending on the conditions. That is, the transport vehicle 20 and the placement section 92 transmit the signal values of the respective signals at regular time intervals or at the timing when the signal values are switched. Signals transmitted from the placement unit 92 to the transport vehicle 20 include an L_REQ signal (detection signal) and a READY signal. Signals transmitted from the carrier 20 to the placement section 92 include a TR_REQ signal, a BUSY signal, and a COMPT signal. Not receiving the detection signal means not receiving that the signal value has changed from ON to OFF, or not receiving that the signal value has changed from OFF to ON.
　載置部９２は、搬送車２０が載置部９２に物品４０を受渡し可能な位置に到着した後であって、かつ、物品４０の受渡し先として載置部９２が割当可能となったタイミングで、Ｌ＿ＲＥＱ信号をＯＦＦ（第１信号値）からＯＮ（第２信号値）に切り替える（時刻Ｔ１）。Ｌ＿ＲＥＱ信号は、載置部９２が物品４０の受渡先として割当可能であることを示す信号である。なお、Ｌ＿ＲＥＱ信号をＯＮに切り替える前提として、搬送車２０と載置部９２の間の通信が有効であるという条件が含まれてもよい。Ｌ＿ＲＥＱ信号は、物品４０が載置されたことを載置部９２が検出したタイミングでＯＦＦに切り替わる。 After the transport vehicle 20 reaches a position where the article 40 can be delivered to the placement section 92, and at the timing when the placement section 92 can be assigned as the delivery destination of the article 40. , the L_REQ signal is switched from OFF (first signal value) to ON (second signal value) (time T1). The L_REQ signal is a signal indicating that the placing section 92 can be assigned as the delivery destination of the article 40 . As a premise for switching the L_REQ signal to ON, a condition that communication between the carrier 20 and the placement section 92 is valid may be included. The L_REQ signal is turned OFF at the timing when the placing section 92 detects that the article 40 has been placed.
　次に、搬送車２０は、載置部９２に物品４０を受け渡すことを通知して、ＴＲ＿ＲＥＱ信号をＯＦＦからＯＮに切り替える（時刻Ｔ２）。ＴＲ＿ＲＥＱ信号は、物品４０の受渡しを要求したことを示す信号である。ＴＲ＿ＲＥＱ信号は、搬送車２０による載置動作が完了することにより（後述のＢＵＳＹ信号がＯＦＦに切り替わることにより）ＯＦＦに切り替わる。 Next, the transport vehicle 20 notifies the placement unit 92 of the delivery of the article 40, and switches the TR_REQ signal from OFF to ON (time T2). The TR_REQ signal is a signal indicating that delivery of the article 40 has been requested. The TR_REQ signal is turned OFF when the placement operation by the transport vehicle 20 is completed (due to the BUSY signal, which will be described later, being turned OFF).
　載置部９２は、搬送車２０からの要求を受信し、搬送車２０からの物品４０の受渡しの準備が完了している場合、ＲＥＡＤＹ信号をＯＦＦからＯＮに切り替える（時刻Ｔ３）。ＲＥＡＤＹ信号は、搬送車２０から物品４０を受け渡す旨の要求を受信したことを示す信号である。ＲＥＡＤＹ信号は、物品４０の受渡しが完了した後に（後述のＣＯＭＰＴ信号がＯＮに切り替わった後に）ＯＦＦに切り替わる。 The placement unit 92 receives the request from the transport vehicle 20, and switches the READY signal from OFF to ON when preparations for delivery of the article 40 from the transport vehicle 20 are completed (time T3). The READY signal is a signal indicating that a request to deliver the article 40 from the transport vehicle 20 has been received. The READY signal is turned OFF after delivery of the article 40 is completed (after a COMPT signal, which will be described later, is turned ON).
　次に、搬送車２０は、ＲＥＡＤＹ信号がＯＮに切り替わった後に、載置動作を開始して、ＢＵＳＹ信号をＯＦＦからＯＮに切り替える（時刻Ｔ４）。ＢＵＳＹ信号は、搬送車２０が載置動作を行っていることを示す信号である。ＢＵＳＹ信号がＯＮである間は、載置部９２の機械的な動作が禁止される。ＢＵＳＹ信号は、物品４０の載置が正常に完了した後に（即ち、Ｌ＿ＲＥＱ信号がＯＦＦに切り替わった後に）ＯＦＦに切り替わる。 Next, after the READY signal is switched to ON, the transport vehicle 20 starts the placement operation and switches the BUSY signal from OFF to ON (time T4). The BUSY signal is a signal indicating that the transport vehicle 20 is performing the placement operation. While the BUSY signal is ON, the mechanical operation of the placement section 92 is prohibited. The BUSY signal turns OFF after the placement of the item 40 is successfully completed (ie, after the L_REQ signal turns OFF).
　次に、載置部９２は、載置センサ９４が物品４０を検出した後に、Ｌ＿ＲＥＱ信号をＯＦＦに切り替える（時刻Ｔ５）。これにより、上述したように、ＢＵＳＹ信号がＯＦＦに切り替わるとともに、ＴＲ＿ＲＥＱ信号がＯＦＦに切り替わる（時刻Ｔ６）。この時点で、搬送車２０から載置部９２への物品４０の受渡しは完了したことになるため、搬送車２０は、ＣＯＭＰＴ信号をＯＦＦからＯＮに切り替える（時刻Ｔ６）。ＣＯＭＰＴ信号は、搬送車２０側における物品４０の受渡しが完了したことを示す信号である。 Next, the placement unit 92 switches the L_REQ signal to OFF after the placement sensor 94 detects the article 40 (time T5). As a result, as described above, the BUSY signal is switched to OFF and the TR_REQ signal is switched to OFF (time T6). At this point, delivery of the article 40 from the transport vehicle 20 to the placement unit 92 is completed, so the transport vehicle 20 switches the COMPT signal from OFF to ON (time T6). The COMPT signal is a signal indicating that delivery of the article 40 on the transport vehicle 20 side has been completed.
　上述したように、ＣＯＭＰＴ信号がＯＮに切り替わることにより、ＲＥＡＤＹ信号がＯＦＦに切り替わる（時刻Ｔ７）。例えばこのタイミングで、搬送車２０又は載置部９２は、管理制御装置１０に物品４０の受渡しの完了を通知する。その後、ＣＯＭＰＴ信号がＯＦＦに切り替わることにより、一連の処理が完了する。 As described above, when the COMPT signal is turned ON, the READY signal is turned OFF (time T7). For example, at this timing, the transport vehicle 20 or the placing section 92 notifies the management control device 10 of the completion of delivery of the article 40 . After that, a series of processing is completed by switching the COMPT signal to OFF.
　ここで、搬送車２０が載置動作を行って物品４０を載置部９２に載置した後において、Ｌ＿ＲＥＱ信号がＯＦＦになったことを搬送車２０が受信しない可能性がある。その原因としては、物品４０を載置する位置がズレていて載置センサ９４が物品４０を検出できないこと、載置センサ９４の異常、載置センサ９４の検出値の処理の異常、通信に関する異常等がある。また、Ｌ＿ＲＥＱ信号がＯＮの状態が所定時間続いた場合、タイムアウトエラーが発生して、載置部９２が異常停止する。同時に、搬送車２０についても載置動作が完了しないため、異常停止する。この場合、オペレータによる対応が必要になるため、搬送システム１の搬送効率が低下する。 Here, after the carrier 20 performs the placement operation and places the article 40 on the placement unit 92, the carrier 20 may not receive that the L_REQ signal has turned OFF. The cause of this is that the placement sensor 94 cannot detect the article 40 due to misalignment of the placement position of the article 40, an abnormality in the placement sensor 94, an abnormality in the processing of the detection value of the placement sensor 94, and an abnormality in communication. etc. If the L_REQ signal remains ON for a predetermined period of time, a time-out error occurs and the mounting section 92 stops abnormally. At the same time, the transport vehicle 20 also stops because the placement operation is not completed. In this case, since the operator needs to take action, the transport efficiency of the transport system 1 is lowered.
　本実施形態の搬送システム１は、搬送車２０の異常停止の発生頻度を低下させるために、この種の異常に自力で対応する機能を有する。異常に自力で対応とは、オペレータの作業を必要とせずに搬送システム１の処理により異常に対応することである。 The transport system 1 of the present embodiment has a function of coping with this type of abnormality on its own in order to reduce the frequency of abnormal stoppages of the transport vehicle 20 . To deal with an abnormality by oneself means to deal with an abnormality by the processing of the transport system 1 without requiring the operator's work.
　具体的には、搬送システム１は、搬送先変更機能と、リトライ動作機能と、を有する。搬送先変更機能は、搬送車２０による物品４０の搬送先を変更する機能である。リトライ動作機能は、搬送車２０に載置動作を再び行わせる機能である。以下、図５のフローチャートに沿って説明する。図５のフローチャートは、搬送車２０の車制御装置２１が行う処理である。 Specifically, the transport system 1 has a transport destination change function and a retry operation function. The transfer destination change function is a function for changing the transfer destination of the article 40 by the transfer vehicle 20 . The retry operation function is a function for causing the transport vehicle 20 to perform the placement operation again. Hereinafter, description will be made along the flow chart of FIG. The flowchart of FIG. 5 shows the processing performed by the vehicle control device 21 of the transport vehicle 20 .
　搬送車２０は、上述したように載置動作を行う（Ｓ１０１）。なお、搬送車２０は、載置動作を行った後においても、把持部２６の把持を解除せずに、把持部２６の把持を維持している。 The carrier 20 performs the placement operation as described above (S101). It should be noted that the transport vehicle 20 does not release the grip of the gripping portion 26 and maintains the gripping of the gripping portion 26 even after performing the placing operation.
　搬送車２０は、載置動作の完了後、Ｌ＿ＲＥＱ信号がＯＦＦになったか否かを判定する（Ｓ１０２）。なお、載置動作が完了してから搬送車２０がＬ＿ＲＥＱ信号を受信するまでには僅かにタイムラグがあるので、タイムラグを考慮した時間が経過した後に、ステップＳ１０２の判定を行ってもよい。Ｌ＿ＲＥＱ信号がＯＦＦになった場合、搬送車２０は、上述したように、物品４０の受渡しに関する処理を続行する（Ｓ１０３）。 After the placement operation is completed, the transport vehicle 20 determines whether the L_REQ signal has turned OFF (S102). Since there is a slight time lag between the completion of the placement operation and the reception of the L_REQ signal by the transport vehicle 20, the determination in step S102 may be made after a period of time considering the time lag has elapsed. When the L_REQ signal is turned OFF, the transport vehicle 20 continues the processing related to delivery of the article 40 as described above (S103).
　Ｌ＿ＲＥＱ信号がＯＮを維持していた場合、搬送車２０は、閾値時間が経過したか否かを判定する（Ｓ１０４）。閾値時間を経過していない場合、搬送車２０は、リトライ動作を行う（Ｓ１０５）。リトライ動作とは、巻取機構２４により吊下げベルト２５を巻き取って物品４０を上昇させた後に、再び載置動作を行うことである。搬送車２０は、ハウジング２８に収容される高さまで物品４０を上昇させてもよいし、把持センサ２７によってフランジ部が検出されない高さまで物品４０を上昇させてもよい。Ｌ＿ＲＥＱ信号がＯＦＦにならない原因が物品４０の位置ズレであった場合、リトライ動作により異常に対応できる可能性がある。なお、上述したように、最初の載置動作が完了しても搬送車２０は把持部２６による物品４０の把持を継続している。従って、物品４０を再度把持する処理は不要である。 When the L_REQ signal remains ON, the transport vehicle 20 determines whether or not the threshold time has passed (S104). If the threshold time has not elapsed, the transport vehicle 20 performs a retry operation (S105). The retry operation is to perform the placing operation again after the suspension belt 25 is wound up by the winding mechanism 24 to raise the article 40 . The transport vehicle 20 may raise the article 40 to a height where it can be accommodated in the housing 28 or to a height where the gripping sensor 27 does not detect the flange portion. If the reason why the L_REQ signal does not turn OFF is the misalignment of the article 40, there is a possibility that the abnormality can be dealt with by performing a retry operation. As described above, even after the first placement operation is completed, the carrier 20 continues to grip the article 40 with the gripper 26 . Therefore, the process of gripping the article 40 again is unnecessary.
　搬送車２０は、リトライ動作の完了後、再びステップＳ１０２の処理を行う。リトライ動作によりＬ＿ＲＥＱ信号がＯＦＦになった場合、搬送車２０は、物品４０の受渡しに関する処理を続行する（Ｓ１０３）。Ｌ＿ＲＥＱ信号がＯＮを維持していた場合、閾値時間が経過するまでリトライ動作が繰り返される。タイムアウトエラーが載置部９２で発生した場合、リトライ動作を行うことができなくなる。従って、載置部９２でタイムアウトエラーが発生すると同時又はタイムアウトエラーが発生する前に閾値時間が経過することが好ましい。本実施形態では閾値時間が経過するまでリトライ動作を繰返し行うが、閾値回数に到達するまでリトライ動作を繰返し行ってもよい。 After completing the retry operation, the carrier 20 performs the process of step S102 again. When the L_REQ signal is turned OFF by the retry operation, the transport vehicle 20 continues the processing related to delivery of the article 40 (S103). If the L_REQ signal remains ON, the retry operation is repeated until the threshold time elapses. If a timeout error occurs in the placement section 92, the retry operation cannot be performed. Therefore, it is preferable that the threshold time elapses at the same time as or before the timeout error occurs in the placement section 92 . In this embodiment, the retry operation is repeatedly performed until the threshold time elapses, but the retry operation may be repeatedly performed until the threshold number of times is reached.
　閾値時間が経過した場合、搬送車２０は、管理制御装置１０に対して変更指令を要求する（Ｓ１０６）。変更指令とは、搬送車２０による物品の搬送先を変更する指令である。上述したように搬送車２０の搬送先は管理制御装置１０が決定しているため、搬送車２０は管理制御装置１０に変更指令を要求する。 When the threshold time has passed, the transport vehicle 20 requests a change command to the management control device 10 (S106). A change command is a command to change the transport destination of the article by the transport vehicle 20 . As described above, the transport destination of the transport vehicle 20 is determined by the management control device 10, so the transport vehicle 20 requests the management control device 10 to issue a change command.
　搬送車２０は、変更指令を受信するまでの間、待機走行を行う（Ｓ１０７）。待機走行とは、変更指令を待機しつつ軌道３０に沿って搬送車２０が走行することである。これにより、搬送車２０が同じ地点に位置し続けることを抑制できるので、他の搬送車２０の走行を阻害しにくい。例えば、搬送車２０の近くにループ状の経路が存在する場合、ループ状の経路を周回し続けてもよい。あるいは、搬送車２０は、物品４０の受渡しが頻繁に発生する地点に向けて走行してもよい。 The transport vehicle 20 waits until it receives the change command (S107). Standby travel means that the transport vehicle 20 travels along the track 30 while waiting for a change command. As a result, it is possible to prevent the transport vehicle 20 from continuing to be positioned at the same point, so it is difficult for other transport vehicles 20 to travel. For example, if a looped route exists near the transport vehicle 20, the looped route may continue to be circulated. Alternatively, the transport vehicle 20 may travel toward a point where the delivery of the articles 40 occurs frequently.
　なお、待機走行は必須の処理ではない。例えば、搬送車２０は、走行することなく変更指令を待機してもよい。あるいは、搬送車２０は、例えば通行量が比較的少ない待機位置まで走行して停止して、変更指令を待機してもよい。 It should be noted that the standby run is not an essential process. For example, the transport vehicle 20 may wait for a change command without traveling. Alternatively, the transport vehicle 20 may travel to, for example, a standby position where the traffic is relatively small and then stop to wait for a change command.
　搬送車２０は、変更指令を受信したか否かを判定しており（Ｓ１０８）、変更指令を受信するまで待機走行を継続する。搬送車２０は、変更指令を受信した場合、変更指令が示す新たな搬送先へ物品４０を搬送する（Ｓ１０９）。以上の処理を行うことにより、Ｌ＿ＲＥＱ信号がＯＦＦしない事態が発生した状況において、搬送車２０が異常停止する頻度を低下させることができる。 The guided vehicle 20 determines whether or not a change command has been received (S108), and continues standby travel until the change command is received. When receiving the change command, the transport vehicle 20 transports the article 40 to the new destination indicated by the change command (S109). By performing the above processing, it is possible to reduce the frequency of the transport vehicle 20 abnormally stopping in a situation where the L_REQ signal is not turned off.
　図６に示すように本実施形態の搬送先変更機能とリトライ動作機能は個別に有効及び無効を切り替えることができる。なお、搬送先変更機能を無効にする場合、搬送車２０により変更指令の要求を無効にしてもよいし、管理制御装置１０による変更指令の送信を無効にしてもよい。 As shown in FIG. 6, the transfer destination change function and the retry operation function of this embodiment can be individually switched between enabled and disabled. When disabling the transfer destination change function, the transfer vehicle 20 may disable the request for the change command, or the management control device 10 may disable the transmission of the change command.
　搬送先変更は、物品４０の位置ズレだけでなく、載置センサ９４の異常及び載置制御装置９３の処理異常等にも対応可能である。つまり、搬送先変更は、様々な異常に対応できるというメリットがある。一方、リトライ動作は、載置センサ９４の異常及び載置制御装置９３の処理異常等には対応できないが、物品４０の位置ズレが生じていた場合は短時間で異常に対応できるというメリットがある。従って、２つの機能の有効及び無効を切替可能とすることにより、搬送システム１の管理者の要望に柔軟に対応できる。 The transfer destination change can deal with not only the positional deviation of the article 40, but also the abnormalities of the placement sensor 94 and the processing errors of the placement control device 93. In other words, the change of the transport destination has the advantage of being able to deal with various abnormalities. On the other hand, the retry operation cannot cope with an abnormality of the placement sensor 94 and an abnormality of the processing of the placement control device 93, but has the advantage of being able to deal with the abnormality in a short time when the article 40 is misaligned. . Therefore, by making it possible to switch between valid and invalid of the two functions, it is possible to respond flexibly to the request of the administrator of the transport system 1 .
　設定１は、搬送先変更機能が有効であり、リトライ動作機能も有効である。この場合、図５のフローチャートにも示されているように、載置動作後にＬ＿ＲＥＱ信号がＯＦＦにならない場合は、初めにリトライ動作を行う（ＳＴＥＰ１）。リトライ動作を行ってもＬ＿ＲＥＱ信号がＯＦＦにならない場合は、搬送先変更を行う（ＳＴＥＰ２）。つまり、設定１を選択した場合、リトライ動作で対応可能な異常はリトライ動作で対応し、リトライ動作で対応できない異常に対して搬送先変更で対応する。 With setting 1, the transfer destination change function is valid, and the retry operation function is also valid. In this case, as shown in the flowchart of FIG. 5, if the L_REQ signal does not turn OFF after the placement operation, the retry operation is first performed (STEP 1). If the L_REQ signal does not turn OFF even after the retry operation, the transfer destination is changed (STEP 2). That is, when setting 1 is selected, an abnormality that can be dealt with by retrying is dealt with by retrying, and an abnormality that cannot be dealt with by retrying is dealt with by changing the transfer destination.
　設定２は、搬送先変更機能が有効であり、リトライ動作機能が無効である。この場合、載置動作後にＬ＿ＲＥＱ信号がＯＦＦにならない場合は、リトライ動作を行うことなく、搬送先変更を行う（ＳＴＥＰ１）。つまり、設定２を選択した場合、Ｌ＿ＲＥＱ信号がＯＦＦにならない異常に対しては、常に搬送先変更で対応する。 With setting 2, the transfer destination change function is valid and the retry operation function is invalid. In this case, if the L_REQ signal does not turn OFF after the placing operation, the transfer destination is changed without performing the retry operation (STEP 1). In other words, when setting 2 is selected, an abnormality in which the L_REQ signal does not turn OFF is always dealt with by changing the transport destination.
　設定３は、搬送先変更機能が無効であり、リトライ動作機能が有効である。この場合、載置動作後にＬ＿ＲＥＱ信号がＯＦＦにならない場合は、初めにリトライ動作を行う（ＳＴＥＰ１）。リトライ動作を行ってもＬ＿ＲＥＱ信号がＯＦＦにならない場合は、搬送車２０を異常停止させる。つまり、設定３を選択した場合、常にリトライ動作で対応し、搬送先変更を行わない。 With setting 3, the transfer destination change function is disabled and the retry operation function is enabled. In this case, if the L_REQ signal does not turn OFF after the placement operation, the retry operation is first performed (STEP 1). If the L_REQ signal does not turn OFF even after the retry operation, the carrier 20 is stopped abnormally. That is, when setting 3 is selected, the retry operation is always performed and the transfer destination is not changed.
　設定４は、搬送先変更機能が無効であり、リトライ動作機能も無効である。この場合、載置動作後にＬ＿ＲＥＱ信号がＯＦＦにならない場合は、搬送車２０を異常停止させる。設定４を選択した場合は、Ｌ＿ＲＥＱ信号がＯＦＦにならない異常には自力で対応しない。 With setting 4, the transfer destination change function is disabled and the retry operation function is also disabled. In this case, if the L_REQ signal does not turn OFF after the placing operation, the carrier 20 is stopped abnormally. When setting 4 is selected, the system does not handle an abnormality in which the L_REQ signal does not turn OFF by itself.
　以上に説明したように、本実施形態の搬送システム１は、搬送車２０と、管理制御装置１０と、を備える。搬送車２０は、軌道３０に沿って走行することで物品４０を搬送する搬送動作と、載置部９２との間で通信を実行しながら載置部９２に物品４０を載置する載置動作とを行う。管理制御装置１０は、物品４０の搬送先に関する指令を搬送車２０に送信する。搬送車２０が載置動作を行った後に、載置部９２が物品４０を検出したことを示すＬ＿ＲＥＱ信号を搬送車２０が受信しなかった状況（詳細にはＬ＿ＲＥＱ信号がＯＮからＯＦＦになったことを搬送車２０が受信しなかった状況）において、管理制御装置１０は、搬送車２０による物品４０の搬送先を変更する指令である変更指令を搬送車２０に送信する。 As described above, the transport system 1 of this embodiment includes the transport vehicle 20 and the management control device 10 . The transport vehicle 20 performs a transport operation of transporting the article 40 by traveling along the track 30 and a placement operation of placing the article 40 on the placement section 92 while executing communication with the placement section 92. and The management control device 10 transmits a command regarding the transport destination of the article 40 to the transport vehicle 20 . A situation in which the transport vehicle 20 does not receive the L_REQ signal indicating that the placement unit 92 has detected the article 40 after the transport vehicle 20 has performed the placement operation (specifically, the L_REQ signal has changed from ON to OFF). In a situation where the transport vehicle 20 has not received this information, the management control device 10 transmits to the transport vehicle 20 a change command, which is a command to change the transport destination of the article 40 by the transport vehicle 20 .
　これにより、搬送車２０が別の載置部９２に物品４０を搬送するため、載置部９２からＬ＿ＲＥＱ信号を受信しない異常に対応できる。特に、搬送先を変更することにより、リトライ動作では解決できない異常にも対応できる可能性がある。 As a result, since the transport vehicle 20 transports the article 40 to another placement section 92, it is possible to cope with an abnormality in which the L_REQ signal is not received from the placement section 92. In particular, by changing the transport destination, there is a possibility that an abnormality that cannot be resolved by the retry operation can be dealt with.
　本実施形態の搬送システム１では、搬送車２０は、載置動作を行った後に、Ｌ＿ＲＥＱ信号を受信しなかった場合、少なくとも１回の載置動作（リトライ動作）を再度行う。搬送車２０が再度の載置動作を行ってもＬ＿ＲＥＱ信号を搬送車２０が受信しなかった場合、管理制御装置１０は、変更指令を搬送車２０に送信する。 In the transport system 1 of the present embodiment, when the transport vehicle 20 does not receive the L_REQ signal after performing the placement operation, it performs at least one placement operation (retry operation) again. If the transport vehicle 20 does not receive the L_REQ signal even after the transport vehicle 20 performs the placement operation again, the management control device 10 transmits a change command to the transport vehicle 20 .
　これにより、リトライ動作で解決できる異常はリトライ動作で対応し、リトライ動作で対応できない異常は搬送先の変更により対応できる。 As a result, errors that can be resolved by retrying can be handled by retrying, and errors that cannot be handled by retrying can be handled by changing the transport destination.
　本実施形態の搬送システム１では、搬送車２０が再度の載置動作を行う機能の有効及び無効を切替可能である。 In the transport system 1 of this embodiment, the function of the transport vehicle 20 to perform the placement operation again can be switched between valid and invalid.
　これにより、物品４０の種類、搬送システム１の設置先、又は管理者の意向等に柔軟に対応できる。例えば、再度の載置動作を行う時間を短縮することが望まれる場合、この機能を無効にすることにより、早期に異常に対応できる。 As a result, it is possible to flexibly respond to the type of article 40, the installation location of the transport system 1, or the intention of the administrator. For example, if it is desired to shorten the time for performing the placement operation again, disabling this function enables an early response to an abnormality.
　本実施形態の搬送システム１では、管理制御装置１０が変更指令を送信する機能の有効及び無効を切替可能である。 In the transport system 1 of this embodiment, it is possible to switch between enabling and disabling the function of the management control device 10 transmitting a change command.
　これにより、物品４０の種類、搬送システム１の設置先、又は管理者の意向等に柔軟に対応できる。例えば、物品４０の搬送先を変更することが好ましくない状況では、この機能を無効にすることにより、物品４０の搬送先が変更されなくなる。 As a result, it is possible to flexibly respond to the type of article 40, the installation location of the transport system 1, or the intention of the administrator. For example, in situations where it is undesirable to change the destination of the article 40, disabling this function prevents the destination of the article 40 from being changed.
　本実施形態の搬送システム１では、搬送車２０が載置動作を行った後に、搬送車２０がＬ＿ＲＥＱ信号を受信しなかった状況において、搬送車２０は、軌道３０に沿って待機走行しながら変更指令の受信を待機し、変更指令の受信後に変更指令が示す搬送先へ物品４０を搬送する。 In the transport system 1 of the present embodiment, in a situation where the transport vehicle 20 does not receive the L_REQ signal after the transport vehicle 20 has performed the placement operation, the transport vehicle 20 waits along the track 30 while traveling. It waits for the receipt of the command, and after receiving the change command, transports the article 40 to the destination indicated by the change command.
　これにより、搬送車２０が同じ地点に位置し続けることを抑制できるので、他の搬送車２０の走行を阻害しにくくなる。 As a result, it is possible to prevent the transport vehicle 20 from continuing to be positioned at the same point, so it is less likely that other transport vehicles 20 will be obstructed.
　本実施形態の搬送システム１では、搬送車２０が載置動作を行った後において、搬送車２０がＬ＿ＲＥＱ信号を受信しなかった状況において、搬送車２０は、管理制御装置１０に変更指令を要求する。 In the transport system 1 of the present embodiment, in a situation where the transport vehicle 20 does not receive the L_REQ signal after the transport vehicle 20 has performed the placement operation, the transport vehicle 20 requests the management control device 10 to issue a change command. do.
　これにより、管理制御装置１０が搬送車２０からの要求に応じて適切なタイミングで変更指令を送信できる。 As a result, the management control device 10 can transmit a change command at an appropriate timing in response to a request from the transport vehicle 20.
　本実施形態の搬送システム１において、Ｌ＿ＲＥＱ信号は、ＯＮとＯＦＦを含む。載置部９２に物品４０を受け渡す位置に搬送車２０が到着した後であって、載置部９２が物品４０の受渡し先として割当可能になったタイミングで、Ｌ＿ＲＥＱ信号がＯＦＦからＯＮに切り替わる。載置部９２が物品４０を検出することでＬ＿ＲＥＱ信号がＯＮからＯＦＦに切り替わる。搬送車２０が載置動作を行ってもＬ＿ＲＥＱ信号がＯＮである状態が継続している場合、管理制御装置１０が変更指令を搬送車２０に送信する。 In the transport system 1 of this embodiment, the L_REQ signal includes ON and OFF. After the carrier 20 reaches the position where the article 40 is delivered to the placement section 92 and at the timing when the placement section 92 can be assigned as the delivery destination of the article 40, the L_REQ signal is switched from OFF to ON. . When the placement unit 92 detects the article 40, the L_REQ signal is switched from ON to OFF. If the state in which the L_REQ signal is ON continues even after the transport vehicle 20 performs the placement operation, the management control device 10 transmits a change command to the transport vehicle 20 .
　これにより、規格で定められた信号を利用して変更指令を実行するか否かの判断を行うことができる。 As a result, it is possible to determine whether or not to execute the change command using the signal defined by the standard.
　本実施形態には以下の特徴１から特徴７が含まれる。
［特徴１]
　軌道に沿って走行することで物品を搬送する搬送動作と、載置部との間で通信を実行しながら当該載置部に前記物品を載置する載置動作とを行う搬送車と、
　前記物品の搬送先に関する指令を前記搬送車に送信する制御装置と、
を備え、
　前記搬送車が前記載置動作を行った後に、前記載置部が前記物品を検出したことを示す検出信号を前記搬送車が受信しなかった状況において、前記制御装置は、前記搬送車による前記物品の搬送先を変更する指令である変更指令を前記搬送車に送信することを特徴とする搬送システム。
［特徴２]
　特徴１に記載の搬送システムであって、
　前記搬送車は前記載置動作を行った後に、前記検出信号を受信しなかった場合、少なくとも１回の前記載置動作を再度行い、
　前記搬送車が再度の前記載置動作を行っても前記検出信号を前記搬送車が受信しなかった場合、前記制御装置は、前記変更指令を前記搬送車に送信することを特徴とする搬送システム。
［特徴３]
　特徴２に記載の搬送システムであって、
　前記搬送車が再度の前記載置動作を行う機能の有効及び無効を切替可能であることを特徴とする搬送システム。
［特徴４]
　特徴１から３までの何れか一項に記載の搬送システムであって、
　前記制御装置が前記変更指令を送信する機能の有効及び無効を切替可能であることを特徴とする搬送システム。
［特徴５]
　特徴１から４までの何れか一項に記載の搬送システムであって、
　前記搬送車が前記載置動作を行った後に、前記搬送車が前記検出信号を受信しなかった状況において、前記搬送車は、前記軌道に沿って走行しながら前記変更指令の受信を待機し、前記変更指令の受信後に当該変更指令が示す搬送先へ物品を搬送することを特徴とする搬送システム。
［特徴６]
　特徴１から５までの何れか一項に記載の搬送システムであって、
　前記搬送車が前記載置動作を行った後において、前記搬送車が前記検出信号を受信しなかった状況において、前記搬送車は、前記制御装置に前記変更指令を要求することを特徴とする搬送システム。
［特徴７]
　特徴１から６までの何れか一項に記載の搬送システムであって、
　前記検出信号は、第１信号値と第２信号値を含み、
　前記載置部に前記物品を受け渡す位置に前記搬送車が到着した後であって、前記載置部が前記物品の受渡し先として割当可能になったタイミングで、前記検出信号が前記第１信号値から前記第２信号値に切り替わり、
　前記載置部が前記物品を検出することで前記検出信号が前記第２信号値から前記第１信号値に切り替わり、
　前記搬送車が前記載置動作を行っても前記検出信号が前記第２信号値である状態が継続している場合、前記制御装置が前記変更指令を前記搬送車に送信することを特徴とする搬送システム。 This embodiment includes features 1 to 7 below.
[Feature 1]
a transport vehicle that performs a transport operation of transporting an article by traveling along a track and a placement operation of placing the article on the placement section while communicating with the placement section;
a control device that transmits a command regarding the transport destination of the article to the transport vehicle;
with
In a situation in which the transport vehicle does not receive a detection signal indicating that the placement unit has detected the article after the transport vehicle has performed the placement operation, the control device controls the transport vehicle to perform the above-mentioned A transport system, characterized in that a change command, which is a command for changing a transport destination of an article, is transmitted to the transport vehicle.
[Feature 2]
The transport system according to feature 1,
If the transport vehicle does not receive the detection signal after performing the placing operation, the transport vehicle performs the placing operation again at least once;
A transport system characterized in that, when the transport vehicle does not receive the detection signal even after the transport vehicle performs the placement operation again, the control device transmits the change command to the transport vehicle. .
[Feature 3]
The transport system according to feature 2,
A conveying system, wherein a function of the conveying vehicle to perform the placing operation again can be switched between valid and invalid.
[Feature 4]
A transport system according to any one of features 1 to 3,
A conveying system, wherein the control device is capable of switching between enabling and disabling a function of transmitting the change command.
[Feature 5]
A transport system according to any one of features 1 to 4,
In a situation where the transport vehicle has not received the detection signal after the transport vehicle has performed the placement operation, the transport vehicle waits for reception of the change instruction while traveling along the track; A conveying system characterized by conveying an article to a destination indicated by the change command after receiving the change command.
[Feature 6]
A transport system according to any one of features 1 to 5,
After the transport vehicle performs the placement operation, the transport vehicle requests the change command to the control device in a situation where the transport vehicle does not receive the detection signal. system.
[Feature 7]
A transport system according to any one of features 1 to 6,
the detection signal includes a first signal value and a second signal value;
After the transport vehicle has arrived at the position where the article is delivered to the placement section and at a timing when the placement section can be assigned as a delivery destination of the article, the detection signal is the first signal. value to the second signal value;
the detection signal is switched from the second signal value to the first signal value by the placement unit detecting the article;
When the state in which the detection signal is the second signal value continues even after the transport vehicle performs the placement operation, the control device transmits the change command to the transport vehicle. transport system.
　以上に本発明の好適な実施の形態を説明したが、上記の構成は例えば以下のように変更することができる。 Although the preferred embodiment of the present invention has been described above, the above configuration can be modified, for example, as follows.
　上記実施形態で示したフローチャートは一例であり、一部の処理を省略したり、一部の処理の内容を変更したり、新たな処理を追加したりしてもよい。 The flowchart shown in the above embodiment is an example, and some processes may be omitted, the contents of some processes may be changed, or new processes may be added.
　上記実施形態では、搬送車２０が管理制御装置１０に変更指令を要求する。これに代えて、管理制御装置１０が自発的に変更指令を作成して搬送車２０に送信してもよい。この場合、搬送車２０及び載置部９２は、物品４０の受渡しに関する状況を管理制御装置１０に送信しており、管理制御装置１０は、搬送車２０及び載置部９２から受信した内容に基づいて変更指令を作成するか否かを判定する。 In the above embodiment, the transport vehicle 20 requests the management control device 10 to issue a change command. Alternatively, the management control device 10 may voluntarily create a change command and transmit it to the carrier 20 . In this case, the transport vehicle 20 and the placement unit 92 have transmitted the status regarding the delivery of the article 40 to the management control device 10, and the management control device 10, based on the contents received from the transport vehicle 20 and the placement unit 92, determines whether or not to create a change command.
　上記実施形態では、搬送車２０の例としてＯＨＴを挙げて説明したが、別の車両、例えばＡＧＶ（Ａｕｔｏｍａｔｅｄ　Ｇｕｉｄｅｄ　Ｖｅｈｉｃｌｅ）又は懸垂式クレーンにも本発明を適用できる。 In the above embodiment, an OHT was used as an example of the transport vehicle 20, but the present invention can also be applied to other vehicles such as an AGV (Automated Guided Vehicle) or a suspended crane.
　１　搬送システム
　１０　管理制御装置（制御装置）
　２０　搬送車
　２１　車制御装置
　３０　軌道
　９１　処理装置
　９２　載置部
　９３　載置制御装置 1 transport system 10 management control device (control device)
20 transport vehicle 21 vehicle control device 30 track 91 processing device 92 placement section 93 placement control device

Claims (7)

  1. 　軌道に沿って走行することで物品を搬送する搬送動作と、載置部との間で通信を実行しながら当該載置部に前記物品を載置する載置動作とを行う搬送車と、
    　前記物品の搬送先に関する指令を前記搬送車に送信する制御装置と、
    を備え、
    　前記搬送車が前記載置動作を行った後に、前記載置部が前記物品を検出したことを示す検出信号を前記搬送車が受信しなかった状況において、前記制御装置は、前記搬送車による前記物品の搬送先を変更する指令である変更指令を前記搬送車に送信することを特徴とする搬送システム。     a transport vehicle that performs a transport operation of transporting an article by traveling along a track and a placement operation of placing the article on the placement section while communicating with the placement section;
    a control device that transmits a command regarding the transport destination of the article to the transport vehicle;
    with
    In a situation in which the transport vehicle does not receive a detection signal indicating that the placement unit has detected the article after the transport vehicle has performed the placement operation, the control device controls the transport vehicle to perform the above-mentioned A transport system, characterized in that a change command, which is a command for changing a transport destination of an article, is transmitted to the transport vehicle.
  2. 　請求項１に記載の搬送システムであって、
    　前記搬送車は前記載置動作を行った後に、前記検出信号を受信しなかった場合、少なくとも１回の前記載置動作を再度行い、
    　前記搬送車が再度の前記載置動作を行っても前記検出信号を前記搬送車が受信しなかった場合、前記制御装置は、前記変更指令を前記搬送車に送信することを特徴とする搬送システム。     A transport system according to claim 1, wherein
    If the transport vehicle does not receive the detection signal after performing the placing operation, the transport vehicle performs the placing operation again at least once;
    A transport system characterized in that, when the transport vehicle does not receive the detection signal even after the transport vehicle performs the placement operation again, the control device transmits the change command to the transport vehicle. .
  3. 　請求項２に記載の搬送システムであって、
    　前記搬送車が再度の前記載置動作を行う機能の有効及び無効を切替可能であることを特徴とする搬送システム。     A transport system according to claim 2, wherein
    A conveying system, wherein a function of the conveying vehicle to perform the placing operation again can be switched between valid and invalid.
  4. 　請求項１に記載の搬送システムであって、
    　前記制御装置が前記変更指令を送信する機能の有効及び無効を切替可能であることを特徴とする搬送システム。     A transport system according to claim 1, wherein
    A conveying system, wherein the control device is capable of switching between enabling and disabling a function of transmitting the change command.
  5. 　請求項１に記載の搬送システムであって、
    　前記搬送車が前記載置動作を行った後に、前記搬送車が前記検出信号を受信しなかった状況において、前記搬送車は、前記軌道に沿って走行しながら前記変更指令の受信を待機し、前記変更指令の受信後に当該変更指令が示す搬送先へ物品を搬送することを特徴とする搬送システム。     A transport system according to claim 1, wherein
    In a situation where the transport vehicle has not received the detection signal after the transport vehicle has performed the placement operation, the transport vehicle waits for reception of the change instruction while traveling along the track; A conveying system characterized by conveying an article to a destination indicated by the change command after receiving the change command.
  6. 　請求項１に記載の搬送システムであって、
    　前記搬送車が前記載置動作を行った後において、前記搬送車が前記検出信号を受信しなかった状況において、前記搬送車は、前記制御装置に前記変更指令を要求することを特徴とする搬送システム。     A transport system according to claim 1, wherein
    After the transport vehicle performs the placement operation, the transport vehicle requests the change command to the control device in a situation where the transport vehicle does not receive the detection signal. system.
  7. 　請求項１に記載の搬送システムであって、
    　前記検出信号は、第１信号値と第２信号値を含み、
    　前記載置部に前記物品を受け渡す位置に前記搬送車が到着した後であって、前記載置部が前記物品の受渡し先として割当可能になったタイミングで、前記検出信号が前記第１信号値から前記第２信号値に切り替わり、
    　前記載置部が前記物品を検出することで前記検出信号が前記第２信号値から前記第１信号値に切り替わり、
    　前記搬送車が前記載置動作を行っても前記検出信号が前記第２信号値である状態が継続している場合、前記制御装置が前記変更指令を前記搬送車に送信することを特徴とする搬送システム。     A transport system according to claim 1, wherein
    the detection signal includes a first signal value and a second signal value;
    After the transport vehicle has arrived at the position where the article is delivered to the placement section and at a timing when the placement section can be assigned as a delivery destination of the article, the detection signal is the first signal. value to the second signal value;
    the detection signal is switched from the second signal value to the first signal value by the placement unit detecting the article;
    When the state in which the detection signal is the second signal value continues even after the transport vehicle performs the placement operation, the control device transmits the change command to the transport vehicle. transport system.
PCT/JP2022/032984 2021-10-12 2022-09-01 Transfer system WO2023062960A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000153904A (en) * 1998-11-17 2000-06-06 Murata Mach Ltd Rail-truck system
JP2005162449A (en) * 2003-12-05 2005-06-23 Murata Mach Ltd Conveying system
JP2007168909A (en) * 2005-12-19 2007-07-05 Toyota Industries Corp Automated storage and retrieval system, and operation control method in the same
JP5056368B2 (en) * 2007-11-21 2012-10-24 村田機械株式会社 Transport system
WO2020031562A1 (en) * 2018-08-06 2020-02-13 村田機械株式会社 Automated warehouse and conveyance device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000153904A (en) * 1998-11-17 2000-06-06 Murata Mach Ltd Rail-truck system
JP2005162449A (en) * 2003-12-05 2005-06-23 Murata Mach Ltd Conveying system
JP2007168909A (en) * 2005-12-19 2007-07-05 Toyota Industries Corp Automated storage and retrieval system, and operation control method in the same
JP5056368B2 (en) * 2007-11-21 2012-10-24 村田機械株式会社 Transport system
WO2020031562A1 (en) * 2018-08-06 2020-02-13 村田機械株式会社 Automated warehouse and conveyance device

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