JP5617868B2 - Transport device - Google Patents

Description

  The present invention relates to a transfer device for transferring a transfer object such as a semiconductor wafer or a glass substrate.

  2. Description of the Related Art Conventionally, a transfer device for transferring a transferred object such as a semiconductor wafer or a glass substrate is known. As a technique related to such a transport apparatus, for example, Patent Document 1 discloses a technique in which a part of a track can be moved in order to move various devices and the like from a region on one side across the track of the transport carriage to a region on the other side. Is disclosed. Patent Documents 2 and 3 disclose techniques in which a part of the track is movable in order to move the transport carriage between the two tracks in a transfer device including two tracks.

Japanese Patent Laid-Open No. 2005-15201 JP 2004-50871 A JP 2007-326706 A

  By the way, in the transfer device that moves the transfer carriage between the two tracks, as the two tracks are separated from each other, the time for moving the transfer carriage becomes longer, and the transfer efficiency may decrease.

  The present invention has been made to solve such a problem, and provides a transport device capable of suppressing a decrease in transport efficiency when a transport carriage is moved between two tracks. With the goal.

  A transport apparatus according to the present invention includes a transport carriage, a first track section that travels the transport carriage, a second track section that is spaced apart from the first track section and travels the transport cart, Moving between a first position connected to the track section and spaced from the second track section and a second position connected to the second track section and spaced from the first track section; A third track section that travels the transport carriage, and the transport carriage enters the third track section from the first track section when the third track section is at the first position, When the third track portion is moving, the vehicle travels on the third track portion, and when the third track portion is at the second position, the third track portion moves to the second track portion. And exit.

  In this transfer device, a first position connected to the first track portion and spaced from the second track portion, and a second position connected to the second track portion and spaced from the first track portion. The 3rd track part which moves between positions makes a conveyance cart run. Therefore, the third track section moves between the first position and the second position while running the transport carriage, so that the transport carriage moves between the first track section and the second track section. The movement time required for movement can be reduced. Therefore, according to this conveyance apparatus, when moving a conveyance trolley between two track | orbits, the fall of conveyance efficiency can be suppressed.

  Further, when the time required for the third track portion to move from the first position to the second position is T and the steady speed of the transport carriage in the third track portion is V, the third track The traveling length L of the part may be set to V · T or more. According to this configuration, since the transport carriage can continue to travel on the third track portion while the third track portion is moving, the first track portion, the second track portion, You can move without stopping between. Therefore, it is possible to further reduce the travel time required for the transport carriage to move between the first track portion and the second track portion.

  The transport device further includes a first detection unit that detects that the third track unit is connected to the first track unit, and a first braking command unit that commands the transport cart to brake. When the braking distance of the transport carriage that travels at a steady speed on the first track portion is defined as SI, the first braking command portion is set to the braking distance from the end on the third track portion side in the first track portion. When the transport carriage reaches a braking point set at a position separated by SI or more, and the first detection section does not detect that the third track section is connected to the first track section, the transport carriage Braking may be commanded. According to this configuration, it is possible to prevent the transport carriage from deviating from the first track portion before the third track portion is connected to the first track portion.

  The transport device further includes a second detection unit that detects that the third track unit is connected to the second track unit, and a second braking command unit that commands the transport cart to perform braking. When the braking distance of the transport carriage that travels at the steady speed on the third track portion is SE, the second braking command portion is the braking distance from the end on the second track portion side in the third track portion. When the transport carriage reaches a braking point set at a position separated by SE or more, and the second detection section does not detect that the third track section is connected to the second track section, the transport carriage Braking may be commanded. According to this configuration, it is possible to prevent the conveyance carriage from deviating from the third track portion before the third track portion is connected to the second track portion.

  The first position may be different in height from the second position, and the third track portion may be configured to move up and down between the first position and the second position.

  ADVANTAGE OF THE INVENTION According to this invention, when moving a conveyance trolley between two track | orbits, it becomes possible to provide the conveying apparatus which can suppress the fall of conveyance efficiency.

It is a top view of one embodiment of a conveyance device concerning the present invention. It is a one-way side view of the conveying apparatus of FIG. It is a side view of the other direction of the conveying apparatus of FIG.

  Hereinafter, a preferred embodiment of a transfer device of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or an equivalent element, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 1, the transfer device 1 is provided in a clean room 100 of a manufacturing factory such as a semiconductor device or a liquid crystal display device, and transfers an object R to be transferred such as a semiconductor wafer or a glass substrate. In the clean room 100, a plurality of stockers 2 for storing semiconductor wafers, glass substrates and the like are provided on the floor surface. The transport apparatus 1 provided in such a clean room 100 includes a plurality of transport carts 3, track sections (first track section, second track section) 4, 5 and moving track sections (third track section). 6A, 6B. The stocker 2 may not be provided.

  The transport cart 3 is, for example, an OHS (Overhead Shuttle) tracked unmanned transport vehicle that travels on a track, and creates a travel route from the transport source to the transport destination by the own vehicle. The to-be-conveyed object R is conveyed from a conveyance origin to a conveyance destination, grasping | ascertaining the position of the own vehicle in the travel route network containing the parts 6A and 6B. As the transfer source and transfer destination, in addition to the stocker 2, there are stations for performing various processes on the transfer object. The transport carriage 3 can communicate with the control unit 7. The transport carriage 3 may be driven by, for example, electric power supplied from the outside by a non-contact power source or a cable, or may be driven by electric power of the battery mounted with a battery. Further, the transport carriage 3 may be another type of unmanned transport vehicle such as an OHT (Overhead hoist Transport) that travels suspended on a track.

  Each of the track portions 4 and 5 has a rail that allows the transport carriage 3 to travel, and the floor surface 101 of the clean room 100 (see FIG. 2) so that the transport carriage 3 can travel around the plurality of stockers 2. ). The track part 4 and the track part 5 are spaced apart from each other in the horizontal direction, and each form a circular track. The track portion 4 is provided with a connection portion 41A to which the moving track portion 6A is connected and a connection portion 41B to which the moving track portion 6B is connected. Further, the track portion 5 is provided with a connection portion 51A to which the moving track portion 6A is connected and a connection portion 51B to which the moving track portion 6B is connected.

  FIG. 2 is a side view of the transport device 1 as viewed from the direction A in FIG. As shown in FIG. 2, the height h1 from the floor surface 101 of the clean room 100 to the track portion 4 is, for example, about 4 m. The height h2 from the floor surface 101 to the track portion 5 is, for example, about 6 m. Thus, the track portion 4 and the track portion 5 have different heights from the floor surface 101, and are spaced apart from each other in the vertical direction as well as in the horizontal direction.

  The track part 4 is provided with a braking point P4. When the steady speed at the track part 4 of the transport carriage 3 is V4 and the braking distance of the transport carriage 3 traveling at the steady speed V4 is S4 (braking distance SI), the end of the connecting part 41A from the braking point P4. The distance D4 on the trajectory to the part is set to be equal to or greater than the braking distance S4. A mechanical stopper is provided at the end of the connecting portion 41A to prevent the transport carriage 3 from dropping from the connecting portion 41A. The stopper closes the track until the connection between the track portion 4 and the moving track portion 6A is detected, and opens the track when the connection is detected. The stopper is preferably a mechanical type, but may be of another type.

  FIG. 3 is a side view of the transport device 1 as viewed from the direction B in FIG. As shown in FIG. 3, the track portion 5 is provided with a braking point P5. When the steady speed at the track part 5 of the transport carriage 3 is V5 and the braking distance of the transport carriage 3 traveling at the steady speed V5 is S5 (braking distance SI), the end of the connecting part 51B from the braking point P5. The distance D5 on the track to the part is set to be greater than or equal to the braking distance S5. A stopper similar to the stopper provided at the end of the track portion 4 is provided at the end of the connecting portion 51B.

  Returning to FIG. 1, the moving track portion 6 </ b> A moves the transport carriage 3 from the track portion 4 to the track portion 5, and is provided between the track portion 4 and the track portion 5. Further, the moving track portion 6 </ b> B moves the transport carriage 3 from the track portion 5 to the track portion 4, and is provided between the track portion 4 and the track portion 5. The pair of moving track portions 6A and 6B have a substantially straight shape along the floor surface 101, and are provided substantially parallel to each other. Each moving track part 6A, 6B has a rail which makes the conveyance trolley 3 drive. Note that the moving track portions 6A and 6B are not necessarily provided substantially parallel to each other.

  As shown in FIG. 2, the moving track part 6 </ b> A is supported by a plurality of elevating parts 8 protruding upward from the floor surface 101. The heights h <b> 3 from the floor surface 101 can be adjusted by, for example, a configuration in which each elevating unit 8 is configured to attach a member that is slidable in the vertical direction to a member fixed to the floor surface 101. Thereby, the moving track part 6A supported by the lifting / lowering part 8 can be moved up and down between a position A1 having the same height as the track part 4 and a position A2 having the same height as the track part 5. . In addition, the number of the raising / lowering part 8 may be one. Further, the moving track portion 6A may be configured to be movable up and down by suspending the moving track portion 6A from above with a wire and winding the wire with a winch. The raising / lowering of this moving track part 6A is controlled by the control part 7 with which the conveying apparatus 1 is provided.

  At the position A1, one end 61A of the moving track portion 6A is connected to the connection portion 41A of the track portion 4. At this time, the other end portion 62 </ b> A of the moving track portion 6 </ b> A is separated from the connection portion 51 </ b> A of the track portion 5. On the other hand, at the position A2, the other end 62A of the moving track portion 6A is connected to the connection portion 51A of the track portion 5. At this time, one end 61 </ b> A of the moving track portion 6 </ b> A is separated from the connection portion 41 </ b> A of the track portion 4.

  The traveling length L1 of the moving track portion 6A (distance between the end portion 61A and the end portion 62A) is T1, which is the time required for the moving track portion 6A to rise from the position A1 to the position A2. When the steady speed in the moving track portion 6A is V1, it is set to V1 · T1 or more. That is, the travel length L1 is equal to or longer than the length at which the transport carriage 3 can travel at the steady speed V1 without stopping the travel track portion 6A while the travel track portion 6A rises from the position A1 to the position A2. It has become.

  Further, a braking point P1 is provided on the moving track portion 6A. When the braking distance of the transport carriage 3 traveling on the moving track portion 6A at the steady speed V1 is S1 (braking distance SE), the distance D1 from the braking point P1 to the end portion 62A is set to be equal to or greater than the braking distance S1. . A stopper similar to the stopper provided at the end of the track 4 is provided at the end 61A of the moving track 6A.

  As shown in FIG. 3, the moving track portion 6B has a configuration similar to that of the moving track portion 6A, and includes a position B1 having the same height as the track portion 4 and a position B2 having the same height as the track portion 5. It is possible to move up and down. The raising / lowering of this moving track part 6B is controlled by the control part 7.

  At the position B1, one end portion 61B of the moving track portion 6B is connected to the connection portion 41B of the track portion 4. At this time, the other end 62B of the moving track portion 6B is separated from the connection portion 51B of the track portion 5. On the other hand, at the position B2, the other end 62B of the moving track portion 6B is connected to the connection portion 51B of the track portion 5. At this time, one end 61B of the moving track portion 6B is separated from the connection portion 41B of the track portion 4.

  The traveling length L2 of the moving track portion 6B (distance between the end portion 61B and the end portion 62B) is defined as T2 which is the time required for the moving track portion 6B to descend from the position B2 to the position B1. When the steady speed in the moving track portion 6B is V2, it is set to V2 · T2 or more. That is, the travel length L2 is equal to or longer than the length at which the transport carriage 3 can travel at the steady speed V2 without stopping the travel track portion 6B while the travel track portion 6B descends from the position B2 to the position B1. It has become.

  Further, a braking point P2 is provided on the moving track portion 6B. When the braking distance of the transport carriage 3 traveling on the moving track portion 6B at the steady speed V2 is S2 (braking distance SE), the distance D2 from the braking point P2 to the end portion 61B is set to be equal to or greater than the braking distance S2. . A stopper similar to the stopper provided at the end 62A of the moving track portion 6A is provided at the end portion 61B of the moving track portion 6B.

  The control unit 7 controls the entire conveying device 1 and is an electronic control unit including a CPU, a ROM, a RAM, and the like, for example. The control unit 7 includes at least a detection unit (first detection unit, second detection unit) 71 and a braking command unit (first braking command unit, second braking command unit) 72 as processing units. Yes. The control unit 7 loads the program stored in the ROM onto the RAM and executes it by the CPU, thereby configuring the detection unit 71 and the braking command unit 72 with software. Each processing unit of the control unit 7 may be configured by hardware.

  The detection unit 71 detects that the moving track units 6A and 6B are connected to the track unit 4 or the track unit 5. When the detection unit 71 detects that the moving track units 6A and 6B are connected to the track unit 4 or the track unit 5, the detection unit 71 transmits a detection signal to the braking command unit 72. The braking command unit 72 commands the transport carriage 3 to perform braking under a predetermined condition. The detection unit 71 and the braking command unit 72 will be described in more detail below.

  Next, the operation of the transport device 1 will be described. First, the case where the transport carriage 3 moves from the track portion 4 to the track portion 5 will be described. As shown in FIG. 2, the transport carriage 3 traveling on the track unit 4 transmits a request for movement from the track unit 4 to the track unit 5 to the control unit 7 when passing the braking point P4. To do. When the control unit 7 receives the request, the detection unit 71 detects the connection between the moving track unit 6A and the track unit 4 by using, for example, a proximity sensor. The connection between the moving track portion 6A and the track portion 5 and the connection between the moving track portion 6B and the track portions 4 and 5 are also detected by the same means. When the connection between the moving track part 6A and the track part 4 is detected, the braking command part 72 does not instruct the transporting car 3 to brake, and the transporting car 3 continues to travel at the steady speed V4 and is connected without stopping. The part 41A enters the moving track part 6A.

  On the other hand, when the connection between the moving track portion 6A and the track portion 4 is not detected, the control unit 7 instructs the moving track portion 6A to move to the position A1, and the braking command portion 72 Command braking. Thereby, it is prevented that the conveyance cart 3 deviates from the track portion 4. Then, the braking command unit 72 commands the transport cart 3 to travel when the detection unit 71 detects the connection between the moving track unit 6 </ b> A and the track unit 4. As a result, the transport carriage 3 enters the moving track portion 6A from the connecting portion 41A.

  Subsequently, the control unit 7 detects the passage of the end portion 61A of the transport carriage 3 using, for example, a photoelectric sensor. The passage of the end portions 62A, 61B, 62B and the braking points P1, P2 of the transport carriage 3 is also detected by similar means. When the passage of the end portion 61A of the transport carriage 3 is detected, the control unit 7 instructs the moving track unit 6A to rise to the position A2. The transport carriage 3 travels along the moving track portion 6A toward the end portion 62A at the steady speed V1 while the moving track portion 6A is moving up.

  Subsequently, the detection unit 71 detects the connection between the moving track unit 6 </ b> A and the track unit 5. The braking command unit 72 detects the passage of the braking point P1 of the transport carriage 3.

  When the passage of the braking point P1 of the transport carriage 3 is detected by the braking command section 72 and the connection between the moving track section 6A and the track section 5 is detected by the detection section 71, the braking command section 72 Without instructing braking, the transport carriage 3 continues to travel at the steady speed V1 as it is, stops without stopping from the moving track portion 6A to the connecting portion 51A, and moves from the connecting portion 51A to the track portion 5. Thereby, the movement of the transport carriage 3 from the track portion 4 to the track portion 5 is completed.

  On the other hand, when the passage of the braking point P1 of the transport carriage 3 is detected by the braking command unit 72 and the connection between the moving track unit 6A and the track unit 5 is not detected by the detection unit 71, the braking command unit 72 moves It is determined that the track portion 6A is not moving up as planned, and the transport cart 3 is commanded to be braked. Thereby, it is prevented that the conveyance trolley 3 deviates from the moving track part 6A. When the detection unit 71 detects the connection between the moving track unit 6 </ b> A and the track unit 5, the braking command unit 72 commands the transport carriage 3 to travel. As a result, the transport carriage 3 exits from the moving track section 6A to the connection section 51A and moves from the connection section 51A to the track section 5, and the movement of the transport carriage 3 from the track section 4 to the track section 5 is completed.

  Next, a case where the transport carriage 3 moves from the track portion 5 to the track portion 4 will be described. As shown in FIG. 3, the transport carriage 3 traveling on the track unit 5 transmits a request for movement from the track unit 5 to the track unit 4 to the control unit 7 when passing the braking point P5. To do. When the control unit 7 receives the request, the detection unit 71 detects the connection between the moving track unit 6B and the track unit 5. When the connection between the moving track part 6B and the track part 5 is detected, the braking command part 72 does not instruct the transporting car 3 to brake, and the transporting car 3 continues to travel at the steady speed V5 and is connected without stopping. The part 51B enters the moving track part 6B.

  On the other hand, when the connection between the moving track unit 6B and the track unit 5 is not detected, the control unit 7 instructs the moving track unit 6B to move to the position B2, and the braking command unit 72 includes the transport carriage 3 Command braking. Thereby, it is prevented that the conveyance cart 3 deviates from the track portion 5. Then, the braking command unit 72 commands the transport cart 3 to travel when the detection unit 71 detects the connection between the moving track unit 6 </ b> B and the track unit 5. Thereby, the conveyance trolley 3 enters the moving track part 6B from the connection part 51B.

  Subsequently, the control unit 7 detects passage of the end 62 </ b> B of the transport carriage 3. When the passage of the end portion 62B of the transport carriage 3 is detected, the control unit 7 instructs the moving track unit 6B to descend to the position B1. The transport carriage 3 travels along the moving track portion 6B toward the end portion 61B at the steady speed V2 while the moving track portion 6B is lowered.

  Subsequently, the detection unit 71 detects the connection between the moving track unit 6 </ b> B and the track unit 4. The braking command unit 72 detects the passage of the braking point P <b> 2 of the transport carriage 3.

  When the passage of the braking point P2 of the transport carriage 3 is detected by the braking command section 72 and the connection between the moving track section 6B and the track section 4 is detected by the detection section 71, the braking command section 72 Without instructing braking, the transport carriage 3 continues to travel at the steady speed V2 as it is, without stopping, withdraws from the moving track portion 6B to the connection portion 41B, and moves from the connection portion 41B to the track portion 4. Thereby, the movement of the transport carriage 3 from the track portion 5 to the track portion 4 is completed.

  On the other hand, when the passage of the braking point P2 of the transport carriage 3 is detected by the braking command unit 72 and the connection between the moving track unit 6B and the track unit 4 is not detected by the detection unit 71, the braking command unit 72 moves It judges that the track part 6B is not going down as planned, and commands the carriage 3 to perform braking. Thereby, it is prevented that the conveyance trolley 3 deviates from the moving track part 6B. The braking command unit 72 commands the transport cart 3 to travel when the detection unit 71 detects the connection between the moving track unit 6B and the track unit 4. As a result, the transport carriage 3 exits from the moving track section 6B to the connection section 41B and moves from the connection section 41B to the track section 4, and the movement of the transport carriage 3 from the track section 5 to the track section 4 is completed.

  In the transport device 1 configured as described above, a position A1 connected to the track portion 4 and separated from the track portion 5 is located between a position A2 connected to the track portion 5 and separated from the track portion 4. The moving track portion 6 </ b> A that moves up and down causes the transport carriage 3 to travel. Therefore, the moving track 6A moves from the position A1 to the position A2 while traveling the transfer carriage 3, so that the transfer carriage 3 is moved within the moving time required for the transfer carriage 3 to move from the track 4 to the track 5. 3 can be raised from the position A1 to the position A2, and the time can be greatly reduced as compared with the conventional case where the moving time and the rising time are required. Further, in the transport device 1, the moving track part that moves up and down between the position B <b> 1 connected to the track part 4 and separated from the track part 5 and the position B <b> 2 connected to the track part 5 and separated from the track part 4. 6B makes the conveyance cart 3 travel. Therefore, the moving track portion 6B moves from the position B2 to the position B1 while traveling the transfer carriage 3, so that the transfer carriage 3 is moved to the position B2 within the movement time required to move from the track portion 5 to the track portion 4. Compared to the conventional case where the moving time and the descent time are necessary, the time can be greatly shortened. Therefore, when the conveyance carriage 3 is moved between the track portion 4 and the track portion 5, it is possible to suppress a decrease in transfer efficiency.

  Further, when the time required for the moving track portion 6A to rise from the position A1 to the position A2 is T1, and the steady speed in the moving track portion 6A of the transport carriage 3 is V1, the travel length L1 of the moving track portion 6A. Is set to V1 · T1 or more. For this reason, since the transport carriage 3 can continue to travel on the moving track portion 6A while the moving track portion 6A is moving, it moves without stopping from the track portion 4 toward the track portion 5. be able to. In addition, when the time required for the moving track portion 6B to descend from the position B2 to the position B1 is T2, and the steady speed in the moving track portion 6B of the transport carriage 3 is V2, the travel length L2 of the moving track portion 6B. Is set to V2 · T2 or more. For this reason, since the transport carriage 3 can continue to travel on the moving track portion 6B while the moving track portion 6B is moving, it moves without stopping from the track portion 5 toward the track portion 4. be able to. Accordingly, it is possible to further reduce the travel time required for the transport carriage 3 to move between the track portion 4 and the track portion 5.

  Further, the transport device 1 further includes a detection unit 71 that detects that the moving track units 6A and 6B are connected to the track units 4 and 5, and a braking command unit 72 that commands the transport cart 3 to perform braking. When the braking distance of the transport carriage 3 traveling on the track portion 4 at the steady speed V4 is S4, the braking command portion 72 is separated from the end of the track portion 4 on the moving track portion 6A side by the braking distance S4 or more. When the transport carriage 3 arrives at the braking point P4 set at the position, if the detection section 71 does not detect that the moving track section 6A is connected to the track section 4, the transport carriage 3 is commanded to be braked. Further, when the braking distance of the transport carriage 3 traveling on the track portion 5 at the steady speed V5 is set to S5, the braking command portion 72 is separated from the end of the track portion 5 on the moving track portion 6B side by a braking distance S5 or more. When the transport carriage 3 arrives at the braking point P5 set at the position, if the detecting section 71 does not detect that the moving track section 6B is connected to the track section 5, the transport carriage 3 is commanded to be braked. Therefore, it is possible to prevent the transport carriage 3 from deviating from the track portion 4 or the track portion 5 before the moving track portions 6A and 6B are connected to the track portion 4 or the track portion 5.

  Further, the transport device 1 further includes a detection unit 71 that detects that the moving track units 6A and 6B are connected to the track units 4 and 5, and a braking command unit 72 that commands the transport cart 3 to perform braking. When the braking distance of the transport carriage 3 traveling on the moving track portion 6A at the steady speed V1 is S1, the braking command unit 72 is set at a position separated from the end 62A of the moving track portion 6A by the braking distance S1 or more. When the transport carriage 3 reaches the braking point P <b> 1, if the detection section 71 does not detect that the moving track section 6 </ b> A is connected to the track section 5, the transport cart 3 is commanded to be braked. Further, when the braking distance of the transport carriage 3 traveling on the moving track portion 6B at the steady speed V2 is S2, the braking command unit 72 is set at a position separated from the end 61B of the moving track portion 6B by the braking distance S2 or more. When the transport carriage 3 arrives at the braking point P <b> 2, if the detection section 71 does not detect that the moving track section 6 </ b> B is connected to the track section 4, the transport cart 3 is commanded to be braked. Accordingly, it is possible to prevent the transport carriage 3 from deviating from the moving track portions 6A and 6B before the moving track portions 6A and 6B are connected to the track portion 4 or the track portion 5.

  As mentioned above, although one Embodiment of the conveying apparatus which concerns on this invention was described, this invention is not limited to the said embodiment. For example, in the above-described embodiment, the track portion 4 and the track portion 5 form a circular track, but may be a linear track, a mesh-like track, or the like.

  Moreover, in the said embodiment, although the conveyance trolley 3 drive | works with the own vehicle and the track part 4, the track part 5, and the movement track | orbit parts 6A and 6B have the rail which makes the conveyance trolley 3 drive, the conveyance trolley 3 is The track unit 4, the track unit 5 and the moving track unit 6A may have a conveyor or the like for transporting and transporting the transport carriage 3 without traveling by the own vehicle.

  In the above embodiment, the moving track portions 6A and 6B are provided separately from the track portion 4 and the track portion 5, but the moving track portions 6A and 6B are divided from the track portion 4 and the track portion 5. A device for moving a part of the rail (so-called traverser) or the like may be used.

  Moreover, in the said embodiment, the track part 4 and the track part 5 are spaced apart in the horizontal direction and the vertical direction, and the moving track parts 6A, 6B are located at positions A1, B1 having the same height as the track part 4. Although it is the structure which raises / lowers between position A2, B2 of the height equivalent to the track | orbit part 5, it is not limited to this. The track portion 4 and the track portion 5 are provided at positions separated from each other, and the moving track portions 6A and 6B are connected to the track portion 4 and separated from the track portion 5, and are connected to the track portion 5 and tracked. Any configuration may be used as long as it moves between positions separated from the section 4 and causes the transport carriage 3 to travel. For example, the following configuration may be used.

  For example, the track portion 4 and the track portion 5 are spaced apart in the horizontal direction but are disposed at the same position in the vertical direction, and the moving track portions 6A and 6B are horizontally between the track portion 4 and the track portion 5. The structure which moves along a direction may be sufficient. In the case of this configuration, if the moving track portions 6A and 6B are tracks extending in the moving direction of the moving track portions 6A and 6B in the horizontal direction, the transport carriage 3 is moved to the moving track portions 6A and 6B. The vehicle can travel along the moving direction.

  Further, for example, the track portion 4 and the track portion 5 are arranged at the same position in the horizontal direction but separated from each other in the vertical direction, and the moving track portions 6A and 6B are connected to the track portion 4 and the track portion 5, respectively. The structure which moves between between along a perpendicular direction may be sufficient. In the case of this configuration, the moving track portions 6A and 6B can be tracks extending along the vertical direction, and the transport carriage 3 can travel along the vertical direction.

  In the above embodiment, the traveling length L1 of the moving track portion 6A is set to V1 · T1 or more, but may be V1 · T1 or less. In this case, for example, the connection between the moving track portion 6A and the track portion 5 is not detected by the detection unit 71 at the time when the transport carriage 3 passes the braking point P1. Accordingly, braking is commanded from the braking command section 72 to the transport carriage 3, and the transport carriage 3 is temporarily stopped or decelerated on the moving track section 6A. When the connection between the moving track unit 6A and the track unit 5 is detected by the detection unit 71, the braking command unit 72 commands the transport cart 3 to travel, and the transport cart 3 transfers the track unit 5 from the connection unit 51A. Moving. The same applies to the travel length L2 of the moving track portion 6B.

  Moreover, in the said embodiment, although the 1st detection part and the 2nd detection part are provided as one detection part 71, you may be provided separately. The same applies to the first braking command unit and the second braking command unit.

  Moreover, in the said embodiment, although the conveying apparatus 1 is applied when conveying the to-be-conveyed objects R, such as a semiconductor wafer and a glass substrate, in the clean room 100, it is applicable also in a general distribution field.

  DESCRIPTION OF SYMBOLS 1 ... Conveyance apparatus, 3 ... Conveyance trolley, 4, 5 ... Track part (1st track part, 2nd track part), 6A, 6B ... Movement track part (3rd track part), 71 ... Detection part, 72 ... braking command section, P1, P2 ... braking point, A1, A2, B1, B2 ... position (first position, second position).

Claims (5)

A transport carriage;
A first track section for running the transport carriage;
A second track portion that is spaced apart from the first track portion and travels the transport carriage;
A first position connected to the first track portion and spaced from the second track portion, and a second position connected to the second track portion and spaced from the first track portion And a third track portion that travels the transport carriage, and
The transport carriage is
When the third track portion is in the first position, the first track portion enters the third track portion,
While the third track portion is moving, it continues to travel the third track portion,
Retreating from the third track portion to the second track portion without stopping when the third track portion is in the second position;
Conveying device. When the time required for the third track portion to move from the first position to the second position is T, and the steady speed of the transport carriage in the third track portion is V,
The transport device according to claim 1, wherein a travel length L of the third track portion is set to V · T or more. A first detection unit for detecting that the third track unit is connected to the first track unit;
A first braking command section for commanding braking to the transport carriage,
When the braking distance of the transport carriage that travels at a steady speed on the first track portion is set as SI,
In the case where the transport carriage reaches the braking point set at a position separated from the end on the third track portion side in the first track portion by the braking distance SI or more. 3. The transport device according to claim 1, wherein when the first detection unit does not detect that the third track unit is connected to the first track unit, the transfer cart is instructed to brake. . A second detection unit for detecting that the third track unit is connected to the second track unit;
A second braking command section for commanding braking to the transport carriage,
When SE is the braking distance of the transport carriage that travels at a steady speed on the third track portion,
In the case where the transport carriage reaches the braking point set at a position separated from the end on the second track portion side in the third track portion by the braking distance SE or more. 4. When the second detection unit does not detect that the third track unit is connected to the second track unit, the transfer carriage is commanded to be braked. The conveying apparatus as described in. The first position is different in height from the second position,
5. The transport device according to claim 1, wherein the third track portion moves up and down between the first position and the second position.

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