JPWO2013183384A1 - Transport system and exclusive control method in transport vehicle system - Google Patents

Abstract

When the overhead traveling vehicle (2) and the local cart (4) are transferred between the buffer (10, 11) or the like, the overhead traveling vehicle (2) and the local cart (4) communicate with each other according to the procedure. In order to reliably avoid interference between the overhead traveling vehicle (2) and the local vehicle (4), the local vehicle track (8) is provided directly below the overhead traveling vehicle track (6). The traveling vehicle (2) and the local carriage (4) transfer articles between the same transfer destinations. After exchanging the transfer request signal and the transfer confirmation signal, the overhead traveling vehicle (2) and the local carriage (4) are configured to execute transfer with the transfer destination. A transfer confirmation signal is sent to only one of the transfer request signal for the overhead traveling vehicle (2) and the transfer request signal for the local cart (4), and the local cart (4) is stopped. The exclusive control is performed so that the transfer confirmation signal is not sent to the transfer request signal for the overhead traveling vehicle (2) with respect to the position and the traveling range.

Description

  The present invention relates to an exclusive control method in a transport system and a transport vehicle system, and more particularly to exclusive control in a transport system including an overhead traveling vehicle, a local carriage, a buffer, and a load port.

  The inventor arranges a transportation system in which a track of a local carriage is arranged directly below a traveling rail of an overhead traveling vehicle and directly above a load port, and a buffer is arranged directly below the track of the local carriage except for an upper portion of the load port. Proposed (Patent Document 1: EP2450297A). In this system, since the local cart carries in / out the article to / from the load port, the article can be carried in / out from the load port without waiting for the overhead traveling vehicle to arrive. For example, the overhead traveling vehicle carries in / out articles from / to the buffer, and the local cart carries in / out articles from / to the buffer and the load port. Patent Document 2 (JP2011-207621A) also proposes a similar system.

  Other prior art regarding buffers is described. Patent Document 3 (US2011 / 31091A) discloses a buffer in which shelves are arranged vertically so that a dolly cart mounted on an elevator can enter and exit from the shelves. This buffer is arranged near the load port so that the overhead traveling vehicle can carry in and out the article, and several articles are stored. If it does in this way, the goods which a processing apparatus requires can be carried in to a buffer beforehand. Patent Document 4 (JP2009-62153A) discloses that a rail that can be raised and lowered is provided in a buffer, and a cart having a fork is run along the rail. In this buffer, shelves are arranged up and down, and articles can be carried in and out of the shelves by raising and lowering the rails and running the carriage. Patent Document 4 also discloses that this buffer is connected to the overhead traveling vehicle system and arranged near the load port.

EP2450297A JP2011-207621A US2011 / 31091A JP2009-62153A

  In the systems disclosed in Patent Documents 1 and 2, both the overhead traveling vehicle and the local carriage access the same buffer or the same load port. In this case, check whether it is acceptable to unload the article in the buffer, etc., or to load the article from the buffer, etc., and whether the elevator and the article descending from the overhead traveling vehicle interfere with the local carriage. Confirmation is required. In order to confirm the latter, it is necessary to ensure that the overhead traveling vehicle and the local vehicle are not transferred at the same position, and that the local vehicle does not enter immediately below the position where the overhead traveling vehicle is being transferred. In addition, communication at the time of transfer needs to comply with standards such as Semi Standard E84. Semi Standard E84 is a standard that defines a communication procedure when an article is transferred between a processing device and an overhead traveling vehicle or the like.

  An object of the present invention is that when an overhead traveling vehicle and a local carriage are transferred between a buffer and the like, the overhead traveling vehicle and the local carriage can communicate at the time of transfer according to a procedure, and the overhead traveling vehicle and the local carriage are between This is to ensure that the interference can be avoided.

The transport system of the present invention is a transport system in which a track of a local carriage is provided directly below a track of an overhead traveling vehicle, and the overhead traveling vehicle and the local cart both transfer articles between the same transfer destinations,
The track of the overhead traveling vehicle passing directly above the load port,
A trajectory of a local carriage passing directly above the load port and directly below the trajectory of the overhead traveling vehicle;
An overhead traveling vehicle that travels on the track of the overhead traveling vehicle and includes an article transfer device;
A local cart that runs on the track of the local cart and that includes an article transfer device;
The overhead traveling vehicle and the local cart can both transfer articles, a buffer for placing the articles,
An exclusive control mechanism that exclusively controls the transfer of the article of the overhead traveling vehicle and the local carriage with respect to the load port and the buffer,
The overhead traveling vehicle and the local cart send a transfer request signal to the exclusive control mechanism and receive a transfer confirmation signal from the exclusive control mechanism when transferring the article using the buffer and the load port as the transfer destination. After that, it is configured to perform transfer with the transfer destination,
The exclusive control mechanism sends a transfer confirmation signal to only one of a transfer request signal for an overhead traveling vehicle and a transfer request signal for a local carriage for the same transfer destination, and local An exclusive control is performed so that a transfer confirmation signal is not sent in response to the transfer request signal for the overhead traveling vehicle with respect to the position where the carriage is stopped and the range in which the carriage travels.

The exclusive control method in the transport vehicle system of this invention is:
The track of the overhead traveling vehicle passing directly above the load port,
A trajectory of a local carriage passing directly above the load port and directly below the trajectory of the overhead traveling vehicle;
An overhead traveling vehicle that travels on the track of the overhead traveling vehicle and includes an article transfer device;
A local cart that runs on the track of the local cart and that includes an article transfer device;
A transport system in which an overhead traveling vehicle and a local carriage can both transfer articles, has a buffer for placing the articles, and the overhead traveling vehicle and the local carriage both transfer articles between the same transfer destinations. for,
An exclusive control mechanism that exclusively controls the transfer of articles by the overhead traveling vehicle and the local carriage with respect to the load port and the buffer is provided,
The overhead traveling vehicle and the local cart send a transfer request signal to the exclusive control mechanism and receive a transfer confirmation signal from the exclusive control mechanism when transferring the article using the buffer and the load port as the transfer destination. After that, transfer with the transfer destination,
The exclusive control mechanism sends a transfer confirmation signal to only one of a transfer request signal for an overhead traveling vehicle and a transfer request signal for a local carriage for the same transfer destination, and local Exclusive control is performed so that the transfer confirmation signal is not sent to the transfer request signal for the overhead traveling vehicle with respect to the position where the carriage is stopped and the range in which the carriage is traveling.

  Since the exclusive control is performed so that the transfer confirmation signal is transmitted only for one of the transfer request signal for the overhead traveling vehicle and the transfer request signal for the local cart, the overhead traveling vehicle and the local cart are There is no simultaneous transfer to the same destination. Accordingly, it is possible to eliminate interference related to transfer. In addition, the local carriage is stopped because the exclusive control is performed so that the transfer confirmation signal is not sent to the transfer request signal for the overhead traveling vehicle with respect to the position where the local carriage is stopped and the travel range. The overhead traveling vehicle does not lower the lifting platform or the like for transfer to the position and the traveling range. Therefore, the transfer of the overhead traveling vehicle does not interfere with the stop and traveling of the local carriage. In this specification, the description related to the transport vehicle system also applies to the exclusive control method in the transport vehicle system as it is.

  Further, since the transfer request signal is transmitted and the transfer confirmation signal is received before the transfer, it is possible to check whether the buffer or the load port is ready for the transfer and to execute the transfer.

  Preferably, the exclusive control mechanism performs the exclusive control by granting priority to only one of the transfer request signal communication for the overhead traveling vehicle and the transfer request signal communication for the local carriage. It is characterized by. The priority is realized, for example, by allowing communication only in one of the transfer request signal communication for the overhead traveling vehicle and the transfer request signal communication for the local carriage. In this way, exclusive control can be realized easily and reliably based on communication priority, for example, whether communication is possible.

  Preferably, a communication terminal is provided for each stop position along the track of the overhead traveling vehicle, a communication terminal is provided for each stop position along the track of the local carriage, and only the communication terminal on the side where priority is recognized The exclusive control mechanism is configured to enable communication with an overhead traveling vehicle or a local cart. Communication may be performed by a controller that replaces the overhead traveling vehicle or a controller that replaces the local cart, but it is more reliable that the overhead traveling vehicle and the local cart directly send the transfer request signal before the transfer. Can be executed. When the local cart is controlled by the local cart controller, the priority may be acquired by communication from the local cart or by communication from the local cart controller.

  Preferably, the priority is given to communication for overhead traveling vehicles by default, and on the condition that there is no communication for transfer for overhead traveling vehicles, the local carriage is requested on demand. Therefore, the exclusive control mechanism is configured to transfer priority. In this way, priority is given to overhead traveling vehicles that arrive irregularly, so it is less likely to wait for the overhead traveling vehicle transfer work, and unless the overhead traveling vehicle is transferred, the traveling and transfer of the local carriage And so on.

  Preferably, the priority for the local cart is required for the position where the local cart stops and the travel range. In this way, the local cart can only stop and travel to a position with priority, and interference between the overhead traveling vehicle and the local cart can be reliably avoided.

Side view of main part of transfer system of embodiment Side view of essential parts of a transport system of a modified example in which the height level of the buffer is changed from FIG. The principal part top view of the conveyance system of an Example The principal part top view of the conveyance system of a modification Side view of local trolley The block diagram which shows the structure regarding communication with a local trolley | bogie, an overhead traveling vehicle, and the ground side FIG. 2 is a diagram showing transition of a state related to communication between a local carriage and an overhead traveling vehicle, where 1) shows a state where the local carriage is stopped at a position b, and 2) shows a state where the local carriage travels from a position b to a position e. 3) shows the state for the local carriage to perform communication before transfer at position e. 4) shows that the local carriage is transferring at position e and the overhead traveling vehicle communicates before transfer at position b. 5) The state where the local carriage is stopped at the position e and the overhead traveling vehicle is being transferred at the position b. 6) The overhead carriage is moved and the local carriage is stopped at the position e. Shows the state.

  In the following, an optimum embodiment for carrying out the present invention will be shown. The scope of the present invention should be determined according to the understanding of those skilled in the art based on the description of the scope of the claims, taking into account the description of the specification and well-known techniques in this field.

Structure Figure 1 to 7 of the transport system shows the conveyor system of the embodiment, Figures 1-5 show the physical structure of the transport system, Figure 6, Figure 7 is an overhead traveling vehicle 2 and the local vehicle 4 is an article The communication when transferring is shown. In each figure, the overhead traveling vehicle 2 transports an article 24 such as FOUP in a semiconductor factory, for example, and the local carriage 4 supplies and carries the article 24 to or from one or a plurality of processing apparatuses 12. . Reference numeral 6 denotes a track of the overhead traveling vehicle, which includes a traveling rail and a power supply rail. Reference numeral 8 denotes a track of the local carriage 4, which includes a pair of rails 9 and 9 shown in FIG. The processing device 12 includes one to a plurality of load ports 14. Reference numeral 16 denotes a ceiling of a clean room or the like, and the tracks 6 and 8 and the buffer 10 are supported by the columns 17 to 19.

  The buffer 10 supports the temporarily placed article 24 and is disposed in parallel with the track 8 immediately below the track 8. In the arrangement of FIG. 1, the local carriage 4 can pass through the upper part of the buffer 10 in which the article 24 is temporarily placed when the article 24 is not conveyed, and cannot pass when the article 24 is conveyed. On the other hand, in the arrangement of FIG. 2, the height level of the buffer 10 is lowered to form the buffer 11, and the local carriage 4 carrying the article 24 can pass through the upper part of the buffer 11 where the article 24 is temporarily placed. It is like that. Buffer 11 is identical to buffer 10 except that the height level is low.

  The track 6 of the overhead traveling vehicle is at the highest position, the track 8 of the local carriage is directly below, the buffers 10 and 11 are directly below the tracks 6 and 8, and the load port 14 is directly below the tracks 6 and 8. . Since the buffers 10 and 11 and the load port 14 are arranged so as to overlap with each other in the height direction, the distance between the rails 9 and 9 is wider than the depth of the article 24, and the article passes through in the vertical direction. A gap 30 is provided in the buffers 10 and 11. The buffers 10 and 11 may be provided so as to avoid a position overlapping the load port 14 along the height direction.

  For example, a local controller 20 is installed on the track 8 of the local cart to control the local cart 4, manage inventory items on the buffers 10 and 11, and communicate with the processing device 12. Reference numeral 22 denotes a gateway, which allows only one of the overhead traveling vehicle 2 and the local cart 4 to perform communication for transferring an article in a position overlapping vertically. In addition, there is a charging device (not shown) for each stop position of the local cart 4 along the track 8, and the capacitor of the local cart 4 is charged. A capacitor | condenser is a secondary battery, such as a lithium ion battery, or an electrical double layer capacitor, for example. A wiring (not shown) is connected to the charging device, the local controller 20, and the gateway 22 along the support column 18 and the like. The local controller 20 communicates with the upper logistics controller and the processing device 12.

  The overhead traveling vehicle 2 includes, for example, front and rear drop prevention covers 25, 25, and the elevator 26 is moved up and down by a hoist body (not shown) to transfer the article 24 along the vertical direction. In addition to this, the overhead traveling vehicle 2 may be provided with a lateral feed mechanism or the like for laterally feeding the article 24.

  Here, the processing device 12 includes an inspection device in addition to the processing device, and a load port 14 is provided on the front surface of the processing device 12, and the overhead traveling vehicle 2, the local cart 4, and the ground are connected to the load port 14. The person who moves is delivered the article 24. In addition to the load port 14, a display 28, an operation panel 29, and the like are provided on the front surface of the processing device 12 so that the operating status of the processing device 12 can be monitored and the processing device 12 can be controlled manually.

  The track 8 of the local carriage is composed of a pair of rails 9, the width D (FIG. 3) between the rails 9, 9 is larger than the depth of the article 24, and the article 24 is a gap between the rails 9, 9 together with the elevator 26 Can pass vertically. Further, in the buffers 10 and 11, a gap is provided above the load ports 14 and 14 so that the article 24 can similarly pass through the buffers 10 and 11 in the vertical direction. Alternatively, the buffers 10 and 11 are arranged so as to remove the upper part of the load port 14. Therefore, the overhead traveling vehicle 2 can deliver articles to the load port 14 and the buffers 10 and 11 even if the tracks 6 and 8 and the load port 14 are arranged so as to overlap in the vertical direction. Similarly, the local cart 4 can deliver articles to the buffers 10 and 11 and the load port 14. Therefore, the floor area occupied by the transport system in a plan view can be minimized.

  If the buffer capacity is insufficient with only the buffer 10 directly under the track 8 of the local carriage, an additional buffer 32 may be provided as shown in FIG. In this case, the additional buffer 32 is arranged, for example, at the same height as the buffer 10 and the like, and a mechanism for laterally feeding the hoist body to the overhead traveling vehicle 2 and the local carriage 4 is provided. The additional buffer 32 is also subject to exclusive control in the embodiment.

  FIG. 5 shows the structure of the local carriage 4. Reference numeral 40 denotes a traveling motor that travels on the rails 9 and 9 by traveling wheels 41 and the like. Reference numeral 42 denotes a hoist body, which lifts or lowers the article 24 supported by the lifting platform 27 by winding or unwinding the suspension member 43. 45 is a battery, 46 is a connector, and the battery 45 is charged by a charging device.

Communication and exclusive control The overhead traveling vehicle 2 and the local carriage 4 perform communication conforming to Semi Standard E84 when the buffers 10 and 11 and the load port 14 are transferred. This communication is called E84 communication. In this procedure, the transfer request signal is transmitted from the overhead traveling vehicle 2 or the local cart 4 to the ground side before transfer, and the transfer is performed after receiving the transfer confirmation signal from the ground side. The communication is maintained during the transfer, and after the transfer is completed, the transfer completion signal and its confirmation signal are exchanged to complete the communication. In addition, the type of standard regarding communication at the time of transfer is arbitrary. Since the overhead traveling vehicle 2 and the local cart 4 are simultaneously transferred to the same buffer or the same load port, the gateway 22 performs exclusive control. Further, when the local cart 4 travels below the position where the overhead traveling vehicle 2 is being transferred, there is a possibility that the local cart 4 interferes with the lifting platform and articles descending from the overhead traveling vehicle 2. Therefore, exclusive control is also performed between the transfer of the overhead traveling vehicle 2 and the traveling of the local carriage 4. FIG. 6 shows a configuration for reliably performing these exclusive controls, and FIG. 7 shows a communication procedure.

  For example, optical communication terminals 50 a to 50 f are provided along the track 6 for each stop position of the overhead traveling vehicle 2, and communicate with the optical communication terminal 54 of the overhead traveling vehicle 2. Similarly, optical communication terminals 52 a to 52 f are provided for each stop position of the local cart 4 along the track 8, and communicate with the optical communication terminal 56 of the local cart 4. The optical communication terminals 50 a to 50 f are connected to the gateway 22 by cascade connection, for example. Similarly, the optical communication terminals 52 a to 52 f are also connected to the gateway 22 by cascade connection, for example. Note that a to f represent the positions of the buffers or load ports, and the same symbols indicate positions that overlap one another. For example, positions a, b, e, and f are positions for transfer with the buffer, and positions c and d are positions. This is the position for transfer with the load port. The optical communication terminals 50a to 50f and 52a to 52f may be wireless communication terminals.

  The gateway 22 manages the priority of communication between optical communication terminals, for example, the terminals 50a and 52a, at the same upper and lower positions. As a result, the overhead traveling vehicle 2 and the local cart 4 cannot communicate with a terminal without priority, and the overhead traveling vehicle 2 and the local cart 4 can communicate only with a terminal with priority. The gateway 22 is an exclusive control mechanism that allows one of the upper and lower terminals to communicate with an optical communication terminal at the same position in the upper and lower positions and disables the other, and operates with exclusive OR logic. Here, the priority is expressed by whether communication is possible or not, but it may be exclusive control that allows only one of the upper and lower terminals to start E84 communication. The gateway 22 may physically be a part of the local controller 20.

  E84 communication related to transfer with the buffer 10 is transferred to the local controller 20, and E84 communication related to transfer with the load port 14 is transferred to the processing device 12 via the local controller 20. If there is no communication request from either the overhead traveling vehicle 2 or the local controller 20, the optical communication terminals 50a to 50f on the overhead traveling vehicle 2 side can communicate, and the optical communication terminals 52a to 52f on the local cart 4 side cannot communicate. It is. For the position where the local cart 4 stops and the range where travel is requested, the local controller 20 requests the communication priority on behalf of the local cart 4, and the overhead vehicle 2 does not request E84 communication. 22 recognizes the request from the local controller 20 and gives the local cart 4 priority for communication.

  FIG. 7 shows an example of communication, where the position above the signal indicates a state in which the overhead traveling vehicle has communication priority, the position below indicates a state in which the local carriage has communication priority, and a to f are positions. Indicates. In the first 1), the local carriage is stopped at the position b. At the position b, the local carriage has priority for communication, and at other positions, the overhead carriage has priority. It is assumed that the local controller moves the local carriage to the position e and performs transfer. Then, the local controller requests priority for the positions b to e so as not to interfere with the transfer of the overhead traveling vehicle. When the overhead traveling vehicle is not communicating at these positions, the gateway gives priority to the positions b to e to the local cart as shown in 2).

  The priority of the position where the local cart has already traveled is abandoned by communication from the local controller to the gateway, the local cart stops at the position e, and starts E84 communication as in 3). It is assumed that the overhead traveling vehicle passes through the upper part of the position e during this time, and the overhead traveling vehicle stops at the position b, for example, and starts E84 communication. At this time, it is assumed that the local cart completes the communication before starting the transfer and is executing the transfer, and continues the E84 communication as shown in 4). In 5), the local cart has completed the transfer and E84 communication, but since the local controller has not notified the abandonment of the priority, the priority at position e is maintained. Therefore, another overhead traveling vehicle cannot start E84 communication at the position e. At this time, it is assumed that the overhead traveling vehicle is executing transfer and E84 communication is continuing. In 6), the overhead traveling vehicle completes the transfer and moves from the position b, and the priority of communication is on the overhead traveling vehicle side except for the position e where the local carriage is stopped.

  According to the above procedure, the overhead traveling vehicle can request the start of E84 communication at an arbitrary position except for the position where the local cart has acquired the priority. The overhead traveling vehicle arrives irregularly, but E84 communication can be started unless the local cart has acquired the priority for the position where it arrived. At the same position, the overhead traveling vehicle and the local vehicle cannot request E84 communication at the same time, and the local vehicle cannot enter directly below the position where the overhead traveling vehicle requests E84 communication. For these reasons, the overhead traveling vehicle and the local carriage do not attempt to start transfer at the same position at the same time. In addition, the local carriage does not enter directly below the position where the overhead traveling vehicle transfers. Furthermore, as long as the overhead traveling vehicle does not request E84 communication, the local vehicle can travel, stop, and transfer by acquiring communication priority.

  The arrangement of buffers and local trolleys in FIGS. 1-5 is only an example. For example, the buffers described in Patent Documents 3 and 4 are arranged in the vicinity of the processing device, and the local cart and the overhead traveling vehicle of the embodiment travel on a track that overlaps vertically, and both can be transferred between the buffer and the load port. You may do it. Also in this case, for the access to the buffer and the access (transfer) to the load port, competition between the overhead traveling vehicle and the local carriage occurs, and thus the same exclusive control as in FIGS. 6 and 7 is necessary. Note that the overhead traveling vehicle can be transferred only to the buffer, and when the load port and the buffer are transported only by the local carriage, the load port may or may not be subjected to the exclusive control in FIGS. good.

  The overhead traveling vehicle 2 and the local controller 20 may communicate with each other via a controller of a transport system (not shown) other than the optical communication terminals 50a to 50f described so far. In this way, the following can be performed. When the overhead traveling vehicle 2 tries to transfer an article between the buffers 10 and 11 and the load port 14, when the overhead traveling vehicle 2 approaches the buffer 10 or the like, its position is communicated to the controller of the transport system. The controller of the transport system notifies the local controller 20 of the position where the overhead traveling vehicle 2 transfers the article, and the local controller 20 retracts the local cart 4 from the position in advance. Also, if the local cart 4 stops at that position when the overhead traveling vehicle 2 arrives, the overhead traveling vehicle 2 retracts the local cart 4 to the local controller 20 via the controller of the transport system. Request. And after evacuation, the overhead traveling vehicle 2 sends a transfer request signal to the gateway 22 via the optical communication terminals 50a to 50f.

DESCRIPTION OF SYMBOLS 2 Overhead traveling vehicle 4 Local bogie 6 Overhead vehicle track 8 Local bogie track 9 Rail 10, 11 Buffer 12 Processing device 14 Load port 16 Ceiling 17-19 Post 20 Local controller 22 Gateway 24 Article 25 Fall prevention cover 26, 27 Elevator 28 Display 29 Operation panel 30 Gap 32 Buffer 34 Prop 40 Traveling motor 41 Traveling wheel 42 Hoist body 43 Suspension material 45 Battery 46 Connector 50-56 Optical communication terminals ef Position

Claims (7)

A transportation system in which a track of a local carriage is provided directly below a track of an overhead traveling vehicle, and the overhead traveling vehicle and the local carriage both transfer articles between the same transfer destinations,
The track of the overhead traveling vehicle passing directly above the load port,
A trajectory of a local carriage passing directly above the load port and directly below the trajectory of the overhead traveling vehicle;
An overhead traveling vehicle that travels on the track of the overhead traveling vehicle and includes an article transfer device;
A local cart that runs on the track of the local cart and that includes an article transfer device;
The overhead traveling vehicle and the local cart can both transfer articles, a buffer for placing the articles,
An exclusive control mechanism that exclusively controls the transfer of the article of the overhead traveling vehicle and the local carriage with respect to the load port and the buffer,
The overhead traveling vehicle and the local cart send a transfer request signal to the exclusive control mechanism and receive a transfer confirmation signal from the exclusive control mechanism when transferring the article using the buffer and the load port as the transfer destination. After that, it is configured to perform transfer with the transfer destination,
The exclusive control mechanism sends a transfer confirmation signal to only one of a transfer request signal for an overhead traveling vehicle and a transfer request signal for a local carriage for the same transfer destination, and local It is configured to perform exclusive control so that a transfer confirmation signal is not sent in response to a transfer request signal for an overhead traveling vehicle with respect to a position where the carriage is stopped and a traveling range. Characteristic transport system.   The exclusive control mechanism performs the exclusive control by granting priority to only one of the transfer request signal communication for the overhead traveling vehicle and the transfer request signal communication for the local carriage. The transfer system according to claim 1.   The exclusive control mechanism performs the exclusive control by allowing communication only in one of a transfer request signal communication for an overhead traveling vehicle and a transfer request signal communication for a local carriage. The transfer system according to claim 2.   A communication terminal is provided for each stop position along the trajectory of the overhead traveling vehicle, and a communication terminal is provided for each stop position along the trajectory of the local carriage. The conveyance system according to claim 3, wherein the exclusive control mechanism is configured to enable communication with a car or a local carriage.   The priority is given to the communication for the overhead vehicle by default, and the priority for the local cart on demand, provided that no transfer communication is done for the overhead vehicle. The conveyance system according to claim 2, wherein the exclusive control mechanism is configured so as to shift the movement.   3. A transport system according to claim 2, characterized in that priority for the local carriage is required for the position and travel range where the local carriage stops. The track of the overhead traveling vehicle passing directly above the load port,
A trajectory of a local carriage passing directly above the load port and directly below the trajectory of the overhead traveling vehicle;
An overhead traveling vehicle that travels on the track of the overhead traveling vehicle and includes an article transfer device;
A local cart that runs on the track of the local cart and that includes an article transfer device;
A transport system in which an overhead traveling vehicle and a local carriage can both transfer articles, has a buffer for placing the articles, and the overhead traveling vehicle and the local carriage both transfer articles between the same transfer destinations. for,
An exclusive control mechanism that exclusively controls the transfer of articles by the overhead traveling vehicle and the local carriage with respect to the load port and the buffer is provided,
The overhead traveling vehicle and the local cart send a transfer request signal to the exclusive control mechanism and receive a transfer confirmation signal from the exclusive control mechanism when transferring the article using the buffer and the load port as the transfer destination. After that, transfer with the transfer destination,
The exclusive control mechanism sends a transfer confirmation signal to only one of a transfer request signal for an overhead traveling vehicle and a transfer request signal for a local carriage for the same transfer destination, and local An exclusive control method in a transport vehicle system that performs exclusive control so that a transfer confirmation signal is not sent in response to a transfer request signal for an overhead traveling vehicle with respect to a position at which the carriage is stopped and a traveling range. .

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