TW201410567A - Conveyance system and exclusive control method in conveyance vehicle system - Google Patents

Abstract

When an overhead traveling vehicle and a local platform truck perform transfers to or from a buffer, in order to enable the overhead traveling vehicle and local platform truck to perform transfer-time communication according to a procedure during and to reliably avoid interference between the overhead traveling vehicle and the local platform truck, a track of the local platform truck is provided directly below a track of the overhead traveling vehicle, and the overhead traveling vehicle and the local platform truck can transfer articles to and from the same transfer destination. the overhead traveling vehicle and the local platform truck are configured so as to perform transfers to or from the transfer destination after exchanging a transfer request signal and a transfer confirmation signal. Exclusive control is performed such that the transfer confirmation signal is sent in response to only one of a transfer request signal for the overhead traveling vehicle and a transfer request signal for the local platform truck, and such that a transfer confirmation signal is not sent in response to a transfer request signal for the overhead traveling vehicle for the position where the local platform truck is stopping or the range in which the local platform truck is travelling.

Description

Exclusive control method in transport system and transport vehicle system

The present invention relates to an exclusive control method in a transport system and a transport vehicle system, and more particularly to an exclusive control in a transport system having an overhead transfer vehicle, an area trolley, a buffer zone, and a load port.

The inventor proposes a transport system in which the track of the regional trolley is disposed directly below the travel rail of the overhead traveling vehicle and directly above the load ,, and directly below the track of the trolley in the area other than the upper portion of the load 埠Configuration buffer (Patent Document 1: EP2450297A). In this system, the regional trolley carries in and out of the load, so that it can be carried out from the load without waiting for the overhead traveling vehicle to arrive. Further, for example, an overhead traveling vehicle is carried out between the buffer zone and the loading area, and the regional trolley is carried out between the buffer zone and the load port. A similar system is also proposed in Patent Document 2 (JP 2011-207621 A).

The buffer is described for other known techniques. Patent Document 3 (US2011/31091A) discloses a buffer zone in which the horizontal width of the rack is arranged up and down so that the scooter mounted on the elevator enters and exits from the horizontal width. The buffer zone is placed near the load raft to store a plurality of items in such a manner that the overhead traveling vehicle can be carried out and moved in. In this way, the items required by the processing device can be moved into the buffer zone in advance. Patent Document 4 (JP2009-62153A) discloses a content in which a rail that is lifted and lowered is provided in a buffer zone, and a trolley equipped with a fork lever is moved along a rail. The buffer is arranged vertically above and below the rack Wide, it is possible to carry out the loading and unloading of the rack by the lifting of the rail and the movement of the trolley. Patent Document 4 also discloses that the buffer zone is connected to the overhead traveling vehicle system and disposed in the vicinity of the load port.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] EP2450297A

[Patent Document 2] JP2011-207621A

[Patent Document 3] US2011/31091A

[Patent Document 4] JP2009-62153A

In the systems of Patent Documents 1 and 2, both the overhead moving vehicle and the regional trolley are accessing the same buffer or both are accessing the same load. In this case, it is necessary to confirm whether the item can be unloaded to a buffer or the like, or whether the item can be loaded from a buffer or the like; whether the lifting platform and the article descended from the overhead moving vehicle interfere with the regional trolley. In order to confirm the latter, it is necessary to ensure that the overhead moving vehicle and the regional trolley are not in the same position for transfer, and the regional trolley does not enter directly below the position where the overhead moving vehicle is being transferred. Moreover, the communication at the time of transfer must conform to the specifications of Semi (Semiconductor equipment and materials international) Standard E84. Furthermore, the Semi Standard E84 specifies the specifications of the communication procedure when transferring articles between the processing device and the overhead traveling vehicle.

The object of the present invention is to enable an overhead moving vehicle and an area trolley to be transferred in accordance with the steps when the overhead moving vehicle and the regional trolley are transferred between the buffer zone and the like. Time communication, and can certainly avoid the interference of the overhead moving vehicle and the regional station workshop.

The transport system of the present invention is provided with an area trolley track directly below the track of the overhead moving vehicle, and the overhead moving vehicle and the regional trolley are all transferred between the same transfer destination, and the utility model has the following: The track of the car passes directly above the load; the track of the regional trolley passes directly above the load and is located directly below the track of the overhead moving vehicle; the overhead moving vehicle moves on the track of the elevated moving vehicle. And the item transfer device; the regional trolley, which moves on the track of the regional trolley, and has the transfer device of the article; the buffer zone enables the overhead transfer vehicle and the regional trolley to freely transfer the articles, and And the exclusive control mechanism, which exclusively controls the transfer of the load and buffer items of the overhead moving vehicle and the regional trolley; the overhead moving vehicle and the regional trolley system are configured to: When the destination is transferred and the item is transferred, the transfer request signal is sent to the exclusive control mechanism, and after receiving the transfer confirmation signal from the exclusive control unit, The transfer is performed between the transfer destinations; the above-mentioned exclusive control mechanism is configured to: only the transfer request signal for the overhead transfer vehicle for the same transfer destination, and the transfer request signal for the regional trolley The one transmits the transfer confirmation signal, and does not perform the exclusive control for the manner in which the transfer confirmation signal is transmitted for the transfer request signal of the overhead transfer vehicle for the range of the position stop and the travel of the regional trolley.

The exclusive control method in the transport vehicle system of the present invention is provided with: an overhead traveling vehicle track that passes through the load 埠 directly above; a regional trolley track that passes directly above the load , and is located in the overhead moving vehicle Immediately below the track; an overhead moving vehicle that moves on the track of the overhead moving vehicle and has a transfer device for the item; an area trolley that moves on the track of the regional trolley and has a transfer device for the item; and a buffer zone , which can make the overhead moving vehicle and the regional trolley freely transfer the articles and place the articles; and in order to make the overhead moving vehicles and the regional trolleys transfer articles between the same transfer destinations, set the use for the elevated An exclusive control mechanism for the exclusive control of the transfer of loads and buffers of moving vehicles and regional trolleys. Overhead vehicles and regional trolleys are used to transfer the above buffers and the above-mentioned load ports as transfer destinations. When the transfer request signal is sent to the exclusive control mechanism, and after receiving the transfer confirmation signal from the exclusive control mechanism, between the transfer destination and the transfer destination For line transfer, the above-mentioned exclusive control mechanism performs exclusive control in such a manner that only one of the transfer request signals for the overhead transfer vehicle and the transfer request signal for the regional trolley is transmitted for the same transfer destination. The transfer confirmation signal is transmitted, and the transfer confirmation signal is not sent for the transfer request signal of the overhead transfer vehicle for the range of the position stop and the travel of the regional trolley.

Exclusive control by means of transmitting a transfer confirmation signal only for one of the transfer request signals for the overhead transfer vehicle and one of the transfer request signals for the regional trolley Therefore, the overhead moving vehicle and the regional trolley will not transfer the same moving destination at the same time. Therefore, interference with the transfer can be excluded. Moreover, since the exclusive control of the transfer request signal for the overhead transfer vehicle is not performed in the range of the position and the travel stop for the regional trolley, there is no such situation as to the position of the regional stop and In the scope of the migration, the overhead moving vehicle reduces the lifting platform and the like in order to transfer. Therefore, there is no situation in which the transfer of the overhead moving vehicle interferes with the stopping and moving of the regional trolley. Furthermore, in the present specification, the description of the transport vehicle system can be directly applied to the exclusive control method in the transport vehicle system.

Further, since the transmission of the transfer request signal and the reception of the transfer confirmation signal are performed before the transfer, it is possible to confirm whether or not the transfer of the buffer or the load 完成 has been completed, and then the transfer is performed.

Preferably, the above-described exclusive control mechanism is performed by allowing only one of the communication for the transfer request signal for the overhead transfer vehicle and the communication for the transfer request signal for the regional trolley to be given priority. The above exclusive control. The priority is achieved by, for example, allowing communication only for one of the communication for the transfer request signal for the overhead transfer vehicle and the communication for the transfer request signal for the regional trolley. In this way, exclusive control can be implemented simply and reliably by the priority of communication, for example by communication.

Preferably, the above-mentioned exclusive control mechanism is configured to: set a communication terminal at each stop position along the track of the overhead traveling vehicle, and set a communication terminal at each stop position along the track of the regional trolley, only to the side of the permitted priority The communication terminal can communicate with an overhead moving vehicle or an area trolley. Although it is also possible to communicate by replacing the controller of the overhead traveling vehicle or the controller of the regional trolley, the situation of the transfer request signal is directly transmitted by the overhead moving vehicle and the regional trolley, and the communication before the transfer can be performed more surely. . again When the regional trolley controller is used to control the regional trolley, the priority can be obtained by communication from the regional trolley or by communication from the regional trolley controller.

Further, preferably, the exclusive control mechanism is configured to assign the priority to a communication for an overhead traveling vehicle with a predetermined value, and to perform a communication for realizing the transfer of the overhead traveling vehicle, according to requirements Regional trolleys are transferred to priority. In this way, since the overhead traveling vehicle that can arrive irregularly is prioritized, there is less chance of waiting for the transfer work of the overhead moving vehicle, and there is no regional parking vehicle except for the case where the overhead moving vehicle is transferred. The case of standby and transfer, etc.

Preferably, the priority for the regional trolley is configured to be the location of the regional trolley stop and the range of travel. In this way, the regional trolley can only stop and move for the position with priority, so as to avoid the interference between the overhead moving vehicle and the regional trolley.

2‧‧‧Elevated moving vehicle

4‧‧‧Regional trolley

6‧‧‧Elevated moving car track

8‧‧‧Regional trolley track

9‧‧‧ rails

10, 11‧‧‧ buffer zone

12‧‧‧Processing device

14‧‧‧Load埠

16‧‧‧ ceiling

17~19‧‧‧ pillar

20‧‧‧Regional Controller

22‧‧‧ gateway

24‧‧‧ Items

25‧‧‧Anti-drop cover

26, 27‧‧‧ lifting platform

28‧‧‧Display

29‧‧‧Operator panel

30‧‧‧ gap

32‧‧‧buffer

34‧‧‧ pillar

40‧‧‧Travel motor

41‧‧‧Moving wheels

42‧‧‧suspension body

43‧‧‧ hanging materials

45‧‧‧Battery

46‧‧‧Connector

50~56, 50a~50f, 52a~52f‧‧‧ optical communication terminal

a~d, e~f‧‧‧ position

D‧‧‧Width

Figure 1 is a side elevational view of the main part of the transport system of the embodiment.

Fig. 2 is a side elevational view of the main part of the transport system of the modified example in which the height level of the buffer zone is changed from Fig. 1.

Fig. 3 is a plan view showing a main part of the conveying system of the embodiment.

Fig. 4 is a plan view showing a main part of a conveying system according to a modification.

Figure 5 is a side view of the regional trolley.

Fig. 6 is a block diagram showing the configuration of communication between the regional trolley and the overhead traveling vehicle and the ground side.

Fig. 7 is a view showing the transition of the state of the communication between the regional trolley and the overhead traveling vehicle, 1) showing the state in which the regional trolley stops at the position b, and 2) indicating that the regional trolley is for the self. The position b moves to the state of the position e, 3) indicates the state in which the regional trolley performs communication before the transfer, and 4) indicates that the regional trolley is being transferred at the position e, and the overhead traveling vehicle is at the position b. The state of the communication before the transfer, 5) indicates that the regional trolley stops at the position e, and the overhead traveling vehicle is in the state of the transfer at the position b, 6) indicates that the overhead traveling vehicle is moving, and the regional trolley is at the position e. The state of the stop.

The preferred embodiments for carrying out the invention are shown below. The scope of the present invention should be determined in accordance with the description of the scope of the claims and the description of the specification and the well-known technology in

[Examples] (construction of transport system)

1 to 7 show the transport system of the embodiment, and Figs. 1 to 5 show the physical structure of the transport system, and Figs. 6 and 7 show the communication when the overhead traveling vehicle 2 and the regional trolley 4 transfer articles. In each of the drawings, the overhead traveling vehicle 2 transports an article 24 such as a front opening open pod (FOUP), for example, in a semiconductor factory, and the regional trolley 4 carries out an article for one or a plurality of processing devices 12 24 supply and move out. The component symbol 6 is a track of an overhead traveling vehicle, and is composed of a traveling rail and a power supply rail. The component symbol 8 is a track of the regional trolley 4, and is constituted by one of the rails 9, 9 shown in FIG. Further, the processing device 12 includes one to a plurality of load ports 14. The component symbol 16 is a ceiling of a clean room or the like, and supports the rails 6, 8 and the buffer zone 10 by the pillars 17 to 19.

The buffer zone 10 supports the temporarily placed article 24 and is disposed directly below the track 8 in parallel with the track 8. In the configuration of FIG. 1, the regional trolley 4 can be placed over the upper portion of the buffer zone 10 of the article 24 when the article 24 is not being transported. When the article 24 is transported, it is not possible to pass the upper portion of the buffer 10 in which the article 24 is temporarily placed. On the other hand, in the arrangement of FIG. 2, the height level of the buffer zone 10 is lowered to serve as the buffer zone 11, so that the area trolley 4 that transports the article 24 can pass the upper portion of the buffer zone 11 in which the article 24 is temporarily placed. The buffer 11 is the same as the buffer 10 except for the lower level of height.

The track 6 of the overhead moving vehicle is located at the highest position, and directly below it, there is a track 8 of the regional trolley. There are buffers 10, 11 directly below the tracks 6, 8 and the load 埠 14 is located at the tracks 6, 8. Directly below. Since the buffer zones 10, 11 and the load port 14 are arranged to overlap in the height direction, the spacing of the rails 9, 9 is wider than the depth of the article 24, and the gap 30 will be passed in the vertical direction for the article 24 to pass. Set in the buffers 10, 11. Further, the buffers 10 and 11 may be provided in such a manner as to avoid the position overlapping the load 埠 14 in the height direction.

For example, in the track 8 of the regional trolley, the area controller 20 is provided to control the area trolley 4, and manage the inventory items on the buffers 10, 11 and communicate with the processing device 12. The component symbol 22 is a gateway, and only one of the overhead traveling vehicle 2 and the regional trolley 4 can perform communication for the transfer of articles at a position where the upper and lower sides overlap. Further, a charging device (not shown) is present at each stop position of the trolley 4 in the area along the track 8, and the battery of the regional trolley 4 is charged. The electric storage device refers to, for example, a secondary battery such as a lithium ion battery or an electric double layer capacitor. Wirings (not shown) along the pillars 18 and the like are connected to the charging device, the area controller 20, and the gateway 22. Further, the area controller 20 communicates with the upper logistics controller and processing device 12.

The overhead traveling vehicle 2 is provided with, for example, anti-drop covers 25 and 25 on the front and rear sides, and the elevating table 26 is lifted and lowered by a hanging body (not shown) to transfer the articles 24 in the vertical direction. In the overhead traveling vehicle 2, in addition to the above components, a horizontal transverse conveying of the articles 24 may be provided. To the transport agency, etc.

Here, the processing device 12 is configured to include an inspection device in addition to the processing device, and a load port 14 is provided in front of the processing device 12, and the overhead traveling vehicle 2, the regional trolley 4, and the person moving on the ground are attached. The item 24 is handed over to the load cassette 14. In front of the processing device 12, in addition to the load port 14, a display 28, an operation panel 29, and the like are provided, so that the operation state of the processing device 12 can be monitored, and the processing device 12 can be manually controlled.

The track 8 of the regional trolley is composed of a pair of rails 9, 9 with a width D (Fig. 3) greater than the depth of the article 24, and the article 24 can be placed in the vertical direction together with the lifting platform 26. Pass the gap between the rails 9, 9. Further, the buffers 10, 11 are provided with a gap above the load ports 14, 14, and the articles 24 can be passed through the buffers 10, 11 in the vertical direction. Alternatively, the buffers 10, 11 can be configured in such a manner that the upper portion of the load port 14 is avoided. In this way, even if the rails 6, 8 and the load port 14 are disposed so as to overlap in the vertical direction, the overhead traveling vehicle 2 can transfer the load to the load port 14 and the buffer zones 10, 11. Similarly, the regional trolley 4 can perform the transfer of the items to the buffers 10, 11 and the load cassette 14. Therefore, the floor area occupied by the transport system in a plan view can be minimized.

When the capacity of the buffer is insufficient by using only the buffer 10 immediately below the track 8 of the regional trolley, as shown in FIG. 4, an additional buffer 32 may be provided, and the support 34 is supported by the ceiling or the like. . In this case, the additional buffer 32 is disposed at a height position in alignment with the buffer zone 10, for example, and the overhead traveling vehicle 2 and the regional trolley 4 are provided with a mechanism for laterally transporting the suspension body. The additional buffer 32 is also set as the exclusive control of the embodiment.

Fig. 5 shows the structure of the regional trolley 4, and the component symbol 40 is a traveling motor, which is moved on the rails 9, 9 by the traveling wheels 41 and the like. Component symbol 42 is a hanging The body 24 is lifted or lowered by winding or unwinding the hanging material 43 to support the article 24 supported by the lifting platform 27. The component symbol 45 is a battery, and 46 is a connector for charging the battery 45 using the charging device.

(communication and exclusive control)

The overhead moving vehicle 2 and the regional trolley 4 are in communication with the Semi Standard E84 when they are transferred to the buffers 10, 11 and the load cassette 14. This communication is called E84 communication. This step is to send the transfer request signal from the overhead moving car 2 or the regional trolley 4 to the ground side before the transfer, and start the transfer after receiving the transfer confirmation signal from the ground side. The communication is maintained, and the transfer completion signal and its acknowledgment signal are exchanged after the transfer is completed, so that the communication ends. Furthermore, the type of communication specifications at the time of transfer is arbitrary. Since the interference occurs when the overhead traveling vehicle 2 and the regional traveling vehicle 4 are to be simultaneously transferred to the same buffer or the same load, the exclusive control is performed by the gateway 22. Further, if the regional trolley 4 moves below the position during the transfer of the overhead traveling vehicle 2, there is a possibility that the lifting platform and the article that has descended from the overhead traveling vehicle 2 interfere with the regional vehicle 4. Therefore, exclusive control is also performed between the transfer of the overhead moving vehicle 2 and the movement of the regional trolley 4. The configuration for surely performing such exclusive control is shown in Fig. 6, and the communication step is shown in Fig. 7.

For example, optical communication terminals 50a to 50f are provided along the track 6 at the stop position of each overhead traveling vehicle 2, thereby communicating with the optical communication terminal 54 of the overhead traveling vehicle 2. Similarly, optical communication terminals 52a to 52f are provided along the track 8 at the stop position of each regional trolley 4, thereby communicating with the optical communication terminal 56 of the regional trolley 4. The optical communication terminals 50a to 50f are connected to the gateway 22, for example, in series, and the optical communication terminals 52a to 52f are connected to the gateway 22 in series, for example. Furthermore, the component symbols a~f indicate the location of the buffer or load buffer, and the same symbol indicates the overlap of the upper and lower sides. The positions, for example, positions a, b, e, and f are positions for shifting with the buffer, and positions c and d are positions for shifting with the load 。. The optical communication terminals 50a to 50f and 52a to 52f may also be wireless communication terminals.

The gateway 22 manages the priority of communication between the optical communication terminals at the same position, for example, between the terminals 50a, 52a. As a result, the overhead traveling vehicle 2, the regional trolley 4 cannot communicate with the terminal without priority, and the overhead traveling vehicle 2 and the regional trolley 4 can only communicate with the terminal having priority. The gateway 22 is an optical communication terminal having the same position up and down, and the upper terminal is made communicable, and the other terminal is an exclusive control mechanism that cannot communicate, and is operated by exclusive OR logic. Furthermore, although priority is indicated here by communication, it is only necessary to make only one of the upper and lower terminals think that exclusive control of E84 communication can be started. Also, the gateway 22 can be physically part of the zone controller 20.

The E84 communication with the transfer of the buffer 10 is transmitted to the area controller 20, and the E84 communication with respect to the transfer of the load port 14 is transmitted to the processing device 12 via the area controller 20. Moreover, when there is no communication request from either the overhead traveling vehicle 2 or the area controller 20, the optical communication terminals 50a to 50f on the elevated moving vehicle 2 side can communicate, and the optical communication terminal on the regional trolley 4 side can communicate. 52a~52f cannot communicate. For the location where the regional trolley 4 is stopped and the extent of the required travel, the regional controller 20 replaces the priority of the regional trolley 4 for communication, and the gateway 22 allows the slave regional controller 20 when the elevated mobile 2 does not require E84 communication. The request is given to the regional trolley 4 to give priority to communication.

In the example of communication shown in Fig. 7, the position above the signal indicates the state in which the overhead traveling vehicle has the priority of communication, and the position below indicates the state in which the regional vehicle has the priority of communication, and the symbol a to f indicates the position. The first 1) is the regional trolley The position b is in a stop, the position b is the area where the trolley has the priority of communication, and the other positions are the overheads. The zone controller moves the zone trolley to position e for transfer. Thus, the zone controller requires priority for position b~e in order not to interfere with the transfer of the overhead moving vehicle. In the case where the overhead traveling vehicle is not communicating at the same position, as shown in 2), the gateway assigns priority to the position b~e to the regional trolley.

The regional trolley system abandons the priority of the moved position by communicating from the area controller to the gateway, and the regional trolley stops at position e, thereby starting E84 communication as shown in 3). During this period, the situation in which the overhead moving vehicle passes above the position e is not affected, and the overhead traveling vehicle stops at the position b, for example, and starts the E84 communication. Further, at this time, the regional car system completes the communication before the start of the transfer and is in the process of the transfer execution, and as shown in 4), the E84 communication is continued. At 5), although the regional trolley has completed the transfer and E84 communication, since the priority is not notified from the regional controller, the priority at position e is maintained. Therefore, other overhead vehicles cannot start E84 communication at position e. Furthermore, at this time, the overhead moving vehicle is in the process of transfer, and the E84 communication is still continued. At 6), the overhead traveling vehicle system is moved from the position b after the completion of the transfer, and the communication priority is on the elevated moving vehicle side except for the position e where the regional trolley is stopped.

According to the above steps, in addition to the location where the regional trolley has obtained priority, the overhead mobile vehicle can request the start of E84 communication at any position. Although the overhead moving train arrives irregularly, the E84 communication can be started except that the regional trolley has obtained priority for the location it has arrived at. Elevated and regional trolleys cannot simultaneously require E84 communication in the same location, and regional trolleys cannot enter the elevated position of the E84 communication. As a result, there is no situation where the overhead moving vehicle and the regional trolley want to start moving at the same position at the same time. Moreover, there is no situation where the regional trolley enters directly below the position where the overhead moving vehicle is transferred. Moreover, as long as the overhead moving car If E84 communication is not required, the regional trolley can move, stop, and transfer by taking priority of the communication.

The configuration of the buffer zone and the regional trolley of Figures 1 to 5 is only an example. For example, the buffers described in Patent Documents 3 and 4 may be disposed in the vicinity of the processing device, and the regional trolley and the overhead traveling vehicle of the embodiment may be moved on a track that overlaps vertically, together in the buffer zone. Transfer between the load and the load. In this case, for the access to the buffer and the access to the load (transfer), since the competition between the overhead traveling vehicle and the regional trolley is generated, the exclusive control as in Figs. 6 and 7 is also required. Furthermore, when the overhead moving vehicle can only be transferred with the buffer zone, and only the regional trolley carries the load between the load buffer and the buffer zone, the load can be controlled by the exclusive control of FIG. 6 and FIG. 7, or may not be performed. .

The overhead traveling vehicle 2 and the area controller 20 can communicate with each other via a controller and a local area network (LAN) of a transport system (not shown) in addition to the optical communication terminals 50a to 50f described above. In this way, the following situations can be achieved. In the case where the overhead traveling vehicle 2 wants to transfer articles between the buffers 10, 11 and the load cassette 14, if the overhead traveling vehicle 2 approaches the buffer zone 10 or the like, the position of the overhead traveling vehicle 2 is communicated to the controller of the transport system. The controller of the transport system notifies the area controller 20 of the position at which the overhead traveling vehicle 2 transfers the articles, and the area controller 20 causes the area trolley 4 to be evacuated from the position in advance. Further, if the regional trolley 4 stops at this position when the overhead traveling vehicle 2 arrives, the overhead traveling vehicle 2 requests the area controller 20 to evacuate the regional trolley 4 via the controller of the transport system. Then, after the retreat, the overhead traveling vehicle 2 transmits a transfer request signal to the gateway 22 via the optical communication terminals 50a to 50f.

a~f‧‧‧ position

Claims (7)

A transport system is provided with an area trolley track directly below the track of the overhead moving vehicle, and the overhead moving vehicle and the regional trolley are all transferred between the same transfer destination, and characterized in that it has There are: the track of the overhead moving vehicle, which passes through the load 埠 directly; the track of the regional trolley passes directly above the load , and is located directly below the track of the above-mentioned elevated moving vehicle; the overhead moving vehicle is the overhead moving vehicle Moving on the track, and having the transfer device of the item; the regional trolley moving on the track of the regional trolley and having the transfer device of the article; the buffer zone, which can freely transfer the overhead transfer vehicle and the regional trolley Items and loading items; and exclusive control mechanisms that exclusively control the transfer of items from the load and buffer zones of the overhead and regional trolleys; the overhead and regional trains are configured to: When the load 移 is used as a transfer destination to transfer an item, the transfer request signal is sent to the exclusive control mechanism, and the transfer control is received from the exclusive control unit. After the signal, the transfer is performed between the transfer destination and the transfer destination; the exclusive control mechanism is configured to shift the load request signal for the overhead transfer vehicle only for the same transfer destination, and the shift for the regional trolley One of the load request signals transmits a transfer confirmation signal, and for the range of the position stop and the travel stop of the regional trolley, the exclusive control is not performed for the transfer confirmation signal for the transfer request signal of the overhead transfer vehicle. For example, the transfer system of claim 1 of the patent scope, wherein the above-mentioned exclusive control mechanism is borrowed The above exclusive control is performed by allowing only one of the communication for the transfer request signal for the overhead transfer vehicle and the communication for the regional trolley to transfer the request signal. For example, the transport system of claim 2, wherein the exclusive control mechanism allows by only one of communication for the transfer request signal for the overhead transfer vehicle and the communication request signal for the regional trolley. It communicates and performs the above exclusive control. The transport system of claim 3, wherein the exclusive control mechanism is configured to: set a communication terminal at each stop position along the track of the overhead traveling vehicle, and set a communication terminal at each stop position along the track of the regional trolley, Only the communication terminal on the side to which the priority is permitted can communicate with the overhead traveling vehicle or the regional trolley. The transport system of claim 2, wherein the exclusive control mechanism is configured to: assign the priority to a communication for an overhead traveling vehicle by a preset value, so as not to perform an overloading for the transfer of the vehicle. Communication is conditional, and priority is transferred for regional trolleys as required. For example, in the transport system of claim 2, the priority for the regional trolley is required to be the location of the regional trolley stop and the range of travel. An exclusive control method in a transport vehicle system, the transport vehicle system is provided with: an elevated travel vehicle track that passes through the load 埠 directly above; a regional trolley track that passes through the load 埠 directly above and is located in the overhead travel vehicle Directly below the track; an overhead moving vehicle that moves on the track of the overhead moving vehicle and has a transfer device for the item; the regional trolley moves on the track of the regional trolley and has a transfer device for the item; a buffer zone that allows both the overhead and regional trolleys to freely transfer items and carry items; and, in order to allow both the overhead and regional trolleys to transfer items between the same transfer destination, The exclusive control mechanism for the exclusive control of the transfer of the load raft and the buffer zone by the overhead moving vehicle and the regional trolley, the overhead moving vehicle and the regional trolley are used as the transfer destination for the buffer zone and the load 而When the article is transferred, the transfer request signal is sent to the exclusive control mechanism, and after the transfer confirmation signal is received from the exclusive control mechanism, the transfer is performed between the transfer destination and the transfer destination, and the exclusive control mechanism is performed as follows Exclusive control: only the transfer confirmation signal for the overhead transfer vehicle for the same transfer destination, and the transfer confirmation signal for one of the transfer request signals for the regional trolley, and the position stop for the regional trolley stop The scope of the migration does not send a transfer confirmation signal for the transfer request signal of the overhead moving vehicle.