JP2010111476A - Storage warehouse and carry-in/out method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storage warehouse and a carry-in/out method for carrying a load including various substrates for manufacturing semiconductor elements in and out of the warehouse between a carrier such as, for example, a vehicle or the like and the warehouse to secure safety in height while coping with an increase of the size of the load. <P>SOLUTION: The storage warehouse 10 includes a case body whose inside is divided into a plurality of steps and whose entrance is provided at one step, a carry-in/out port adjacent to the entrance outside the case body, a drive means for moving the load 3 in the horizontal and vertical directions in the case body, a plurality of shelves 15 each arranged at each of a plurality of steps in the case body and each constituted to store the load moved by the drive means, and an inside/outside moving means 9 for moving the load horizontally through the entrance between one shelf adjacent to the entrance among the plurality of shelves and the carry-in/out port. The carry-in/out port has such a distance that is shorter than the height of one load between the carrier 2 stopped at a position for carrying in and out the warehouse opposing the carry-in/out port on a track 1 and the carry-in/out port. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention provides, for example, a storage such as a stocker in which goods such as a FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing semiconductor elements are loaded and unloaded with a carrier such as a vehicle. The present invention relates to a technical field of a method for loading and unloading the storage.

  As a load suitable for this type of storage, for example, a FOUP capable of accommodating a plurality of semiconductor wafers having a diameter of 300 mm is disclosed (see Patent Document 1). Such a FOUP mainly transports or temporarily stores semiconductor wafers between or within a plurality of processes along the route of a transport vehicle in a facility such as a factory where a storage is installed. Used for.

JP 2007-123673 A

  The diameter of the semiconductor wafer accommodated in the FOUP as shown in Patent Document 1 described above is 300 mm, but in recent years, a larger diameter than 300 mm has been achieved. For example, semiconductor wafers having a diameter of 450 mm are being promoted, and correspondingly, FOUPs are becoming larger and heavier. This increase in size and weight is expected to increase not only the width and depth of the FOUP, but also its height.

  However, even if the load of FOUP and the like increases with the increase in the diameter of the semiconductor wafer, the facility such as a factory in which the storage is installed is remodeled or expanded accordingly. This is often difficult. That is, the ceiling height of the facility may be subject to a restriction that it must be the same as that before the semiconductor wafer is increased in diameter. For example, a transport vehicle that transports a load is an overhead traveling vehicle that travels along a ceiling or a track laid in the vicinity thereof, and a storage that is installed on the floor by vertical transfer that lifts the load vertically. When loading and unloading cargo between the two, problems arise under the restrictions on the ceiling height. That is, the storage unit has a transfer unit (for example, referred to as “port”) on which the load is temporarily placed when transferring the load to and from the transport vehicle. It is common to install so that it may protrude to the side. Thus, the height at which the port is installed (that is, the vertical distance from the floor to the port) must be at least a predetermined height. The predetermined height is used to prevent a part of the body, such as the head, from colliding with the port when an administrator or operator who manages or operates the transportation of the load in the facility is standing around the facility. The height at which the overhead safety of the manager or the operator can be sufficiently secured (that is, the safety height). For this reason, mechanical elements such as a traveling mechanism for traveling on a track and a hoist mechanism for performing vertical transfer in a transport vehicle have to be increased by the increase in the size and weight of the load. In detail, although the vertical distance from the ceiling has to be increased by the height of the load, the installation height of the port cannot be lowered in order to ensure safety height There are technical problems. In this way, the structure of the storage itself or the loading / unloading method is improved when it is necessary to cope with an increase in the size of the load under dimensional constraints such as ensuring the safety height related to the ceiling height. There is a need to.

  The present invention has been made in view of the above-described problems, for example, a storage that can secure a safety height while responding to an increase in the size of a load, and a storage / extraction of such a storage It is an object to provide a method.

  In order to solve the above-mentioned problem, the storage of the present invention is a storage that travels along a ceiling or a track laid in the vicinity of the ceiling and that loads and unloads the load with a transport vehicle that transports the load. A casing or frame in which the inside is divided into a plurality of stages in the vertical direction, and at least one of the plurality of stages is provided with an entrance through which the load can be taken in and out, An entrance / exit port that is adjacent to the entrance / exit outside the housing or frame and is capable of placing the load, and is capable of reciprocating the load in at least one horizontal direction within the housing or frame; Drive means capable of reciprocating in the vertical direction and the casing or frame are arranged so as to spread in at least one horizontal direction in each of the plurality of stages, and a load moved by the drive means. A plurality of shelf parts each configured to be capable of being mounted or placed, and one of the plurality of shelf parts adjacent to the entrance / exit and the loading / unloading port through the entrance / exit. And the moving-in / out port is one of the loads between the transfer vehicle stopped at the loading / unloading position opposite the loading / unloading port in the track. Has a distance shorter than the height of the minute.

  According to the storage of the present invention, for example, when a load is received, a transport vehicle such as an OHT (Overhead Hoist Transport) that holds a load such as a FOUP to be first received is stopped at the loading / unloading position. The Here, the “transport vehicle” is, for example, an overhead traveling vehicle. At this time, the distance between the loading / unloading port and the transport vehicle (specifically, the distance from the top surface of the loading / unloading port to the bottom surface of the transport vehicle) is shorter than the height of one load. Subsequently, the held load is lowered by, for example, a hoist mechanism in the transport vehicle and placed on the loading / unloading port. Then, the load on the loading / unloading port is horizontally moved onto one shelf portion inside the storage by an outside / inside moving means such as a roller mechanism or a slide mechanism. At this time, at least the upper part of the load placed on the loading / unloading port is located inside the transport vehicle without being exposed below the transport vehicle. As the upper part moves horizontally from the inside of the transport vehicle to the side as it moves horizontally, it passes through the doorway and reaches one shelf part. Here, “adjacent to the entrance / exit” in one shelf portion indicates, for example, the shelf portion closest to the entrance / exit among the plurality of shelf portions provided in one stage. Thereafter, the load on one shelf part is moved from one shelf part to the other shelf part among a plurality of shelf parts by a driving means such as an actuator, slider, robot arm, etc., and stored in the storage. Is done. Thereby, the receipt is completed. Here, the “plurality of shelf portions” refers to, for example, a shelf row having a plurality of placement surfaces arranged in one or more rows in the vertical direction. For example, m (where m is a natural number of 2 or more) in the vertical direction, n (where n is a natural number of 1 or more) columns in one horizontal direction, and the remaining horizontal direction (hereinafter simply “ The skeleton of the entire shelf may be configured so as to be a thin and vertically elongated flat plate shape, such as o (where o is a natural number equal to or greater than 1) in “thickness direction”). The “driving means” is configured to be able to move between the plurality of shelves in two directions or two axial directions, for example, a vertical direction and a horizontal direction.

  For example, when a cargo is unloaded, an empty loaded vehicle is first stopped at the loading / unloading position. At this time, the distance between the loading / unloading port and the transport vehicle is shorter than the height of one load as in the case of loading. Subsequently, the load to be unloaded, which has been moved from the other shelf portion onto the one shelf portion by the driving means, is horizontally moved onto the loading / unloading port by the outer / inner moving means. At this time, as in the case of warehousing, at least the upper part of the load is located inside the transport vehicle without being exposed below the transport vehicle. The upper part reaches the inside from the side of the transport vehicle after passing through the entrance and exit with the horizontal movement. Subsequently, for example, the hoist mechanism holds and lifts the load on the loading / unloading port, and the bottom surface of the load leaves the loading / unloading port. Thereby, the delivery is completed.

  As described above, the distance between the loading / unloading port and the transport vehicle is shorter than the height of one load, and at least the upper part of the load is not exposed at the time of transfer. Thus, the vertical arrangement of the entry / exit ports can be reduced little or not. Accordingly, it is possible to ensure a safety height while accommodating an increase in the size of the load.

  In addition, although the loading / unloading port and the one shelf part are configured separately, the one shelf part itself is configured to be horizontally movable, and is controlled so as to be drawn out below the track during loading / unloading. The shelf portion may function as an entry / exit port.

  In one aspect of the storage of the present invention, the entrance is provided in one of the plurality of stages and one stage below the one stage in the plurality of stages. The said entrance / exit port adjacent to the entrance provided in the lower stage is arrange | positioned in the position higher than the height threshold value prescribed | regulated previously safely on relationship with the floor where the said storage is put.

  According to this aspect, for example, the port adjacent to the entrance / exit provided in the uppermost stage functions as a warehousing port dedicated to warehousing, and the port adjacent to the entrance / exit provided in the stage one level lower than the uppermost tier It may function as a shipping port. In this case, the shipping port is arranged at a position higher than a predetermined height threshold. Here, the “height threshold” is defined in advance in terms of safety in relation to the floor on which the storage is placed. For example, the height at which the exit port is disposed, which is defined in advance in consideration of safety. Means. Specifically, the height for determining that there is a possibility that the manager or the operator may collide with the shipping port, such as a value obtained by adding a certain margin to the average height of a person, may be indicated. In this way, in addition to the first port at the uppermost stage, the second port is provided at a level one lower than the uppermost stage under a predetermined height condition so that it can be moved in and out of the storage. It is also possible to multiply the amount of load to be loaded. Therefore, it is possible to further reduce the time required for loading and unloading and to load and unload more efficiently. Note that the two stages provided with the entrance / exit are not limited to the uppermost stage and the stage below it, and may be any two stages as long as two stages are continuous among the plurality of stages.

  In another aspect of the storage of the present invention, the plurality of shelf portions are arranged with respect to the track so that the direction of at least one horizontal direction is orthogonal to the direction of the track, and the housing The body or frame is disposed below the track.

  According to this aspect, the horizontal azimuth direction in the plurality of shelf parts is orthogonal to the azimuth direction of the track, thereby efficiently arranging a large number of storages in the facility where the track is laid. Is possible. In addition, since the casing or frame is not arranged below the track, the casing or frame is configured to be as high as possible, and the space between the ceiling and the ceiling is effectively used, and the load storage or placement amount is increased. It becomes possible to make it.

  In another aspect of the storage of the present invention, when the load is to be received, the load placed on the input / output port by the transfer vehicle while the transfer vehicle is stopped at the input / output position. In the state where the outer and inner moving means is controlled so as to move horizontally from the loading / unloading port to the one shelf portion, and when the load is to be unloaded, the transport vehicle is stopped at the loading / unloading position. The control device further includes control means for controlling the outer / inner movement means to horizontally move the load placed on the one shelf portion by the drive means from the one shelf portion to the loading / unloading port.

  According to this aspect, for example, when a load is to be received, the transport vehicle holding the load to be stored is stopped at the input / output position, and the load to be stored is placed on the input / output port from the transport vehicle. The Then, in a state where the transport vehicle is stopped at the loading / unloading position, the load on the loading / unloading port is placed on one shelf part by the outer / inner moving means under the control of the control means for controlling each part of the storage, for example. Moved to. Thus, when the load is moved out of the loading / unloading port, the transport vehicle is ready to travel.

  On the other hand, when the load should be unloaded, the load on the one shelf part is loaded and unloaded by the outside / inside moving means under the control of the control means while the empty transport vehicle is stopped at the loading / unloading position. Moved over the port. Then, the load on the loading / unloading port is held and raised by the transport vehicle. Thus, when the bottom surface of the load is separated from the loading / unloading port, the transport vehicle can run.

  As described above, when the load is moved horizontally by the outer / inner moving means, the transport vehicle is stopped at the loading / unloading position. Thereby, the horizontal movement of a load is attained via the side surface by the side of the entrance / exit of a storage in a conveyance vehicle. This slightly limits the travel of the transport vehicle. However, for example, if it is considered as a part of the transport time that takes several minutes per load, it does not become a particularly problematic limit.

  In another aspect of the storage of the present invention, the loading / unloading port includes positioning means for positioning the loaded load, and the transport vehicle is moved to the outside when the vehicle is stopped at the loading / unloading position. A main body that defines an opening through which a load horizontally moved by the inner moving means is open, a holding means capable of holding the load inside the main body, and a load held by the holding means. Elevating means that can be moved up and down so as to be displaced to a positioning position positioned by the positioning means or a release position released from the positioning position.

  According to this aspect, the “positioning means” is, for example, convex portions such as a plurality of positioning pins provided on the upper surface of the loading / unloading port, and transfers the load between the loading / unloading port and the transport vehicle. This means a predetermined transfer position. Specifically, for example, the convex portion may be engageable with a concave portion provided on the bottom surface of the load. For example, when a load is to be received, in the transport vehicle stopped at the loading / unloading position, the load to be stored is held by a holding means such as a gripper mechanism, for example, and each holding means is held by an elevating means such as a hoist mechanism. The load is lowered and placed on the loading / unloading port. At this time, the load is positioned at the positioning position. Here, the “positioning position” indicates a state in which the concave portion on the cargo side is engaged with the convex portion on the loading / unloading port side, for example. Subsequently, the load at the positioning position is horizontally moved onto one shelf portion by the outer / inner moving means via the doorway. At this time, the load passes through the opening defined in the main body and is moved to the side from the inside of the transport vehicle.

  On the other hand, when a load is to be unloaded, the load to be unloaded on one shelf portion is horizontally moved onto the loading / unloading port by the outer / inner moving means via the doorway. At this time, the load passes through the opening in the main body and is moved from the side of the transport vehicle to the inside thereof. Then, in the transport vehicle stopped at the loading / unloading position, the load on the loading / unloading port is held by the holding means, the load is lifted together with the holding means by the lifting / lowering means, and the lower surface of the load is separated from the loading / unloading port. At this time, the load is located at the release position. Here, the “release position” indicates a state in which, for example, the engagement between the convex portion on the loading / unloading port side and the concave portion on the cargo side is released.

  As described above, as for the lifting and lowering of the load in the operation of loading and unloading, the lifting and lowering means may lift and lower the load by a distance corresponding to the distance between the positioning position and the release position, that is, the vertical length of the positioning means It becomes possible to shorten the time required for loading and unloading and to load and unload more efficiently.

  In another aspect of the storage of the present invention, the at least one stage is the uppermost stage of the plurality of stages.

  In this aspect, the entrance / exit port is provided adjacent to the entrance / exit provided at the uppermost stage, so that the vertical arrangement of the entrance / exit port is maximized. Therefore, it is possible to reliably ensure the safety height while dealing with an increase in the size of the load. In addition, for example, when the lifting distance of the load by the hoist mechanism becomes the shortest and the transfer time is shortened, the time for loading / unloading can be shortened and the loading / unloading can be efficiently performed.

  In order to solve the above-described problems, the loading / unloading method of the present invention includes (i) the interior is divided into a plurality of stages in the vertical direction, and an inlet / outlet capable of loading and unloading is provided in at least one of the plurality of stages. At least one casing or frame; (ii) an entrance / exit port that is adjacent to the entrance / exit outside the casing or frame and on which the load can be placed; and (iii) the casing Or a drive means capable of reciprocating the load in at least one horizontal direction and reciprocating in the vertical direction within the frame, and (iv) at least the at least one of the plurality of stages in the casing or frame. A plurality of shelves arranged so as to spread in one horizontal direction and capable of receiving or placing a load moved by the driving means, and (v) the doorway of the plurality of shelves One shelf part adjacent to the Outer / inner movement means capable of horizontally moving the load via the doorway between the exit port and the exit port, the entry / exit port traveling along a ceiling or a track laid near the ceiling and A transport vehicle that transports a load, and has a distance shorter than the height of one load between the transport vehicle that is stopped at the loading / unloading position facing the loading / unloading port in the track. In the storage / removal method of the storage where the load is loaded / unloaded with the transport vehicle, the transport vehicle is stopped at the load / unload position when the load is to be stored. A first control step for controlling the outer / inner moving means to horizontally move the load placed on the loading / unloading port by the transport vehicle from the loading / unloading port to the one shelf portion; If the other load should be delivered following one control step, In a state where the transport vehicle is stopped at the loading / unloading position, the outer / inner space is configured to horizontally move the load placed on the one shelf portion by the driving means from the one shelf portion to the loading / unloading port. A second control step for controlling the moving means.

  According to the loading / unloading method of the present invention, the distance between the loading / unloading port and the transport vehicle is made shorter than the height of one load as in the case of the storage of the present invention described above, By not exposing at least the upper part, the vertical arrangement of the loading / unloading port is not lowered as compared with before the enlargement of the load. Accordingly, it is possible to ensure a safety height while accommodating an increase in the size of the load.

  In addition, also in the loading / unloading method of this invention, it is possible to take the various aspects similar to the various aspects in the storage of this invention mentioned above.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  The configuration of the storage according to the embodiment will be described with reference to FIGS. 1 to 4. FIG. 1 is a perspective view showing an appearance of a manufacturing system including a storage according to the embodiment, and FIG. 2 is a cross-sectional view schematically showing the internal structure of the storage shown in FIG. 3 is a cross-sectional view of the driving means, the plurality of shelf portions, and the outer / inner movement means of FIG. 2 as viewed from the upper surface side, and FIG. It is explanatory drawing which shows operation | movement typically.

  In FIG. 1, the manufacturing system 100 includes a rail 1, a vehicle 2, a stocker 10, a manufacturing instruction unit 30, a transport instruction unit 31, a transport controller 32, and a stocker controller 33. The manufacturing system 100 transports the FOUP 3 to a manufacturing apparatus (not shown) and the stocker 10 according to the semiconductor device manufacturing schedule, and loads the FOUP 3 to and from the stocker 10.

  As an example of the “load” according to the present invention, the FOUP 3 is transported along the rail 1 by the vehicle 2, and is transported in the stocker 10 for entering / exiting or adjusting the storage position (that is, in the storage warehouse). Transported). In FIG. 4, the FOUP 3 has recesses 3a and 3b on the bottom surface. The recessed part 3a is formed in the size corresponding to the convex parts 9a and 15a provided in the port P1 and the shelf part 15 which are mentioned later. On the other hand, the recessed part 3b is formed in the size corresponding to the convex part 11a provided in the mounting part 11 mentioned later.

  In FIG. 1, a rail 1 is laid on a ceiling 101 as an example of a “track” according to the present invention, and serves as a track for a vehicle 2 to travel. In the present embodiment, the position corresponding to the vertically upper side of the port P1 in the rail 1 is set as the loading / unloading position.

  The vehicle 2 is an OHT (overhead traveling vehicle) driven by a linear motor as an example of the “transport vehicle” according to the present invention, travels along the rail 1, transports the FOUP 3, and enters / exits the vehicle. The FOUP 3 is transferred to and from the port P1. The vehicle 2 includes a main body 2a and a vertical movement unit 5.

  The main body 2a has a space in which the FOUP 3 can be accommodated. In the main body 2a, the lower side and one side of the space (that is, the right side surface of the main body 2a in FIG. 2) are open. In the present embodiment, the FOUP 3 can be horizontally moved between the port P1 and a later-described shelf portion 15t by the opening H0 opened on one side. A vertical movement unit 5 is attached to the top wall inside the main body 2a.

  In FIG. 2, the up-and-down moving unit 5 includes a hoist 5a, a belt 5b, and a gripper 5c. One end of the belt 5b is fixed to a winding shaft (not shown) of the hoist 5a, and the other end is fixed to the upper surface of the gripper 5c. The gripper 5c is an example of the “holding means” in the present invention, and both end portions thereof are bent inward. The gripper 5c is displaced between a gripping position for gripping the flange 4 attached to the top of the FOUP 3 at its bent ends and a release position for releasing the gripped flange 4.

  The hoist 5a is provided with a motor (not shown) as an example of the “lifting means” in the present invention, and controls the motor to perform the operation of feeding the belt 5b downward or winding it upward. The hoist 5a moves the gripper 5c in the vertical direction by a feeding operation or a winding operation. In this embodiment, the hoist 5a moves vertically by a distance obtained by adding a slight margin to the length of the positioning pin 9a provided at the port P1. As an example of the “positioning means” according to the present invention, the positioning pin 9a is composed of three pins, and is formed in a size corresponding to the concave portion 3a of the FOUP 3. The vehicle 2 or the up-and-down moving unit 5 further includes an adjustment mechanism for finely adjusting the posture (for example, the position in the two horizontal directions and the rotation direction) when gripping the FOUP 3 to be stored or the FOUP 3 to be output. Also good.

When the vehicle 2 is received, the gripper 5c at the gripping position is lowered by the hoist 5a with a slight margin added to the length of the positioning pin 9a, and the bottom surface of the gripping FOUP 3 is placed on the upper surface of the port P1. In the state of contact, the gripper 5c is displaced to the release position. As a result, the FOUP 3 is released from the gripper 5c and transferred onto the port P1. At this time, the FOUP 3 is in the positioning position, and the concave portion 3a and the positioning pin 9a are engaged. On the other hand, the vehicle 2 lowers the gripper 5c in the release position by the hoist 5a when leaving the vehicle, and moves the gripper 5c to the holding position at a position corresponding to the flange 4 of the FOUP 3 placed on the port P1. Displace. Subsequently, the gripper 5c at the gripping position is raised by the hoist 5a by a distance obtained by adding a slight margin to the length of the positioning pin 9a. As a result, the bottom surface of the FOUP 3 is separated from the top surface of the port P1, and the FOUP 3 is transferred to the vehicle 2. At this time, the FOUP 3 is in the release position, and the recess 3a and the positioning pin 9a are disengaged.
(Storage only)

  Next, the structure and operation of the stocker 10 will be described with reference to FIGS. The stocker 10 is provided adjacent to the rail 1 as an example of the “storage” according to the present invention, and can accommodate a plurality of FOUPs 3. In the present embodiment, the stocker 10 performs a FOUP3 entry process and a FOUP3 exit process to be delivered through one port P1 with the vehicle 2.

  In FIG. 2, the stocker 10 includes a slide mechanism 9 including a main body portion 10 a, an in-storage transport device 19, a plurality of shelf portions 15, and a port P <b> 1.

  As an example of the “casing or frame” according to the present invention, the main body portion 10a is provided with an entrance H1 through which a FOUP 3 to be loaded and unloaded can pass on the side surface on the rail 1 side in the uppermost stage described later.

  The in-storage transport device 19 is, for example, a stacker or a stacker robot, and includes a placement unit 11, a horizontal drive unit 13, and a vertical drive unit 14, and is controlled between the plurality of shelf portions 15 by the control of the stocker controller 33. The FOUP 3 is transferred (that is, transported in the storage).

  The placement unit 11 is moved in one horizontal direction by the horizontal drive unit 13 and in the vertical direction by the vertical drive unit 14 in order to transfer the FOUP 3 between the plurality of shelf portions 15. The placement unit 11 has a first placement surface 11s on the upper surface.

  In FIG. 4, the first placement surface 11 s contacts the bottom surface of the FOUP 3 when transferring the FOUP 3 placed on any of the shelf portions 15 (that is, indicated by a dotted line in FIG. 4A). The FOUP 3 is supported from the bottom side. A convex portion 11a is formed as a support member on the first placement surface 11a. As shown in FIG. 4B, the convex portion 11a is formed in a size corresponding to the concave portion 3b of the FOUP 3, and is engaged with the concave portion 3b at the time of transfer.

  In FIG. 2, the horizontal driving unit 13 functions as a part of “driving means” according to the present invention, and is driven on a horizontal guide 17 extending in one horizontal direction by a motor (not shown). The horizontal driving unit 13 is connected to the mounting unit 11 and reciprocates the mounting unit 11 along the horizontal guide 17 in one horizontal direction (that is, the left-right direction in FIG. 2). The vertical drive unit 14 functions as a part of the “drive means” according to the present invention, and is driven on a vertical guide 18 extending in the vertical direction by a motor (not shown). A center portion of the horizontal guide 17 is fixed to the vertical drive unit 14. The vertical drive unit 14 reciprocates the horizontal guide 17 along the vertical guide 18 in the vertical direction (that is, the vertical direction in FIG. 2). During this reciprocating movement, the placement portion 11 is located at the center of the horizontal guide 17. In this way, the placement unit 11 is moved by the horizontal drive unit 13 and the vertical drive unit 14 in the biaxial directions of the vertical direction and the horizontal one direction.

  The plurality of shelf portions 15 are composed of a total of 14 shelf portions, with seven rows in the vertical direction, two rows in one horizontal direction in each step, and one row in the thickness direction in each step. Each shelf portion 15 has a second placement surface 15s on the upper surface, and the FOUP 3 is placed on the second placement surface 15s. In FIG. 4, a convex portion 15a is formed as a support member on the second placement surface 15s. As shown in FIG. 4A, the convex portion 15a is formed in a size corresponding to the concave portion 3a of the FOUP 3, and is engaged with the concave portion 3a during mounting (storage).

  Next, the form of the first placement surface 11s and the second placement surface 15s will be described. Specifically, FIG. 3 corresponds to the A1-A1 cross section in FIG. 2 and shows two shelf portions 15 (in other words, the second placement surface 15s) installed at the uppermost stage of the stocker 10. Yes. Of the two shelf portions 15, the shelf portion 15 t adjacent to the entrance / exit H <b> 1 (that is, indicated by a two-dot chain line area S <b> 1 in FIG. 2) is an example of “one shelf portion” according to the present invention. It functions as a part of the “inner movement means” and horizontally moves the FOUP 3 with the port P1. In FIG. 3, the shelf portion 15t includes three rollers, and the upper surface of the three rollers functions as the second placement surface 15s. Each of the three rollers is rotatably fixed to the drive shaft of the motor 15m.

  Regarding the horizontal movement by the shelf portion 15t, specifically, when the three rollers are rotated counterclockwise by driving the motor 15m, the FOUP 3 on the shelf portion 15t is horizontally moved toward the port P1. On the other hand, when the three rollers are rotated clockwise, the FOUP 3 horizontally moved from the port P1 is placed on the shelf portion 15t.

The second placement surfaces 15s of the plurality of shelf portions 15 including the shelf portions 15t are formed in a U shape like a horseshoe when viewed from the upper surface side of the stocker 10, and the first placement surfaces 11s of the placement portion 11 are It is formed like an island that fills the center of the U-shape. In other words, the first placement surface 11s and the second placement surface 15s have complementary planar shapes. The FOUP 3 is transferred between the first placement surface 11s and the second placement surface 15s.
(Transport operation in storage)

  Next, the transfer operation of the FOUP 3 inside the stocker 10 (that is, the transfer operation in the storage) by the transfer device 19 in the storage will be described with reference to FIGS.

  In FIGS. 2 to 4, the in-storage transport device 19 moves the FOUP 3 placed on the shelf portion 15 t on the rail 1 side (that is, adjacent to the entrance / exit H <b> 1) in the uppermost stage to the second stage from the top. It is transferred (that is, stored) to the shelf portion 15 on the opposite side of the rail 1 (that is, shown in the area S2 indicated by a two-dot chain line in FIG. 2 and hereinafter referred to as “storage shelf portion 15k”). At this time, the placement unit 11 is moved directly below the second placement surface 15s of the shelf portion 15t. At this time, the placement unit 11 is moved to the approximate center of the horizontal guide 17 by the horizontal drive unit 13, and then moved to a predetermined vertical position along the vertical guide 18 by the vertical drive unit 14. The predetermined vertical position is below the second placement surface 15s of the shelf portion 15t. Thereafter, the placement unit 11 at a predetermined vertical position is moved to a predetermined horizontal position along the horizontal guide 17 by the horizontal driving unit 13. As shown in FIG. 4A, the predetermined horizontal position is a position where the convex portion 11a of the mounting portion 11 exists in the vertically downward direction of the concave portion 3b of the FOUP 3.

  The placement unit 11 moved to the predetermined vertical position and the horizontal position is raised by the vertical drive unit 14. Due to this rise, the placement portion 11 passes through the center of the shelf portion 15t and becomes higher than the second placement surface 15s of the shelf portion 15t as shown in FIG. 4B. At this time, the concave portion 3a of the FOUP 3 and the convex portion 15a of the shelf portion 15t are disengaged, and the FOUP 3 is supported by the first placement surface 11s instead of the second placement surface 15s. The convex portion 11a and the concave portion 3b of the FOUP 3 are engaged with each other, whereby the FOUP 3 is transferred from the second placement surface 15s to the first placement surface 11s.

  The placement unit 11 to which the FOUP 3 has been transferred is moved directly above the second placement surface 15s of the storage shelf portion 15k. At this time, the placement unit 11 is moved to a predetermined horizontal position in one horizontal direction by the horizontal drive unit 13. The predetermined horizontal position is a position where the concave portion 3a of the FOUP 3 exists in the vertical upward direction of the convex portion 16 of the storage shelf portion 15k. The placement unit 11 moved to a predetermined horizontal position is lowered by the vertical drive unit 14. Due to this lowering, the placement portion 11 passes through the center of the storage shelf portion 15k and becomes lower than the second placement surface 15s of the storage shelf portion 15k as shown in FIG. At this time, the engagement of the convex portion 11a of the placement destination 11 and the concave portion 3b of the FOUP 3 is released, and the FOUP 3 is supported by the second placement surface 15s instead of the first placement surface 11s. The concave portion 3a of the FOUP 3 and the convex portion 11a of the placement portion 11 are engaged with each other, whereby the FOUP 3 is transferred from the first placement surface 11s to the second placement surface 15s. Thereby, the transfer operation of the FOUP 3 from the shelf portion 15t to the storage shelf portion 15k is completed. In addition, if this transfer process is performed in the reverse order, it will be the transfer operation from the shelf part 15k for storage to the shelf part 15t.

  In FIG. 3, the slide mechanism 9 functions as a part of the “outer / inner movement means” according to the present invention and is attached to the outside of the main body 10 a adjacent to the entrance / exit H <b> 1 so as to be positioned below the rail 1. It has been. In this embodiment, the slider mechanism 9 is arranged such that the distance L1 between the slider mechanism 9 and the vehicle 2 stopped at the loading / unloading position is shorter than the height of one FOUP 3.

  The slide mechanism 9 includes a pair of rollers (not shown), a ring-shaped rotation band, and an actuator, and is configured such that the pair of rollers surround the ring-shaped rotation band. When a part of the ring-shaped rotation band faces the rail 1, it functions as a port P1 which is an example of the “entry / exit port” according to the present invention, and the FOUP 3 can be placed thereon. The slide mechanism 9 drives the actuator to rotate the pair of rollers to rotate the ring-shaped rotation band. By this rotation, the slide mechanism 16 horizontally moves the FOUP 3 with the shelf portion 15t adjacent to the entrance H1.

  Regarding the horizontal movement by the slide mechanism 16, specifically, when the pair of rollers are rotated to the right by driving the actuator, the rotation band is rotated to the right. Then, the rotation belt | band | zone part which functions as the port P1 is drawn in order in the entrance / exit H1 side, and is arrange | positioned under a pair of roller. As a result, the FOUP 3 on the port P1 is horizontally moved to the shelf portion 15s via the opening H0 on the vehicle 2 side and the entrance H1 on the stocker 10 side, and is placed on the second placement surface 15s. At this time, the concave portion 3a of the FOUP 3 is engaged with the positioning pin 15a of the shelf portion 15t (in other words, the second placement surface 15s). On the other hand, when the pair of rollers is rotated to the left, the rotation band is rotated to the left. Then, the rotation belt | band | zone part which functions as a port P1 is pulled out in order from the entrance / exit H1 side, and is arrange | positioned above a pair of roller (namely, rail 1 side). As a result, the FOUP 3 from the shelf portion 15t is horizontally moved through the entrance H1 on the stocker 10 side and the opening H0 on the vehicle 2 side, and placed on the port P1. At this time, the recess 3a of the FOUP 3 is engaged with the positioning pin 9a of the port P1.

  The manufacturing instruction unit 30 is a main controller in the semiconductor element manufacturing factory, creates a semiconductor device manufacturing schedule, and instructs the transfer instruction unit 31 to transfer the FOUP 3 based on the manufacturing schedule.

  The transport instruction unit 31 is an MCS (Material Control System), and creates a transport schedule based on the manufacturing schedule in accordance with an instruction from the manufacturing instruction unit 30. The transport instruction unit 31 instructs the transport controller 32 to transport the FOUP 3 and also instructs the stocker controller 33 to transport the FOUP 3 in the storage based on the transport schedule.

  The transport controller 32 controls each part of the vehicle 2 in accordance with an instruction from the transport instruction unit 31 to transport the FOUP 3 along the rail 1 and transfer the FOUP 3 to and from a manufacturing apparatus (not shown) and the stocker 10. To do. In the present embodiment, the transport controller 32 moves to the loading / unloading position when the FOUP 3 is moved horizontally between the port P1 and the shelf portion 15t in addition to transferring the FOUP 3 to / from the port P1. The vehicle 2 is stopped.

As an example of the “control means” according to the present invention, the stocker controller 33 controls each part of the stocker 10 according to an instruction from the transport instruction unit 31 and transfers the FOUP 3 to and from the vehicle 2 via the port P1. At the same time, the FOUP 3 is transported inside the stocker 10, and the FOUP 3 is accommodated or placed in the port P1 or a predetermined shelf portion 15. In this embodiment, the stocker controller 33 moves the FOUP 3 between the port P1 and the shelf portion 15t in addition to transferring the FOUP 3 to and from the vehicle 2 while the vehicle 2 is stopped at the loading / unloading position. Move horizontally.
(Receiving operation process)

  Next, the warehousing operation process by the transport controller 32 and the stocker controller 33 of this embodiment will be described with reference to FIG. FIG. 5 is a flowchart showing the warehousing operation process of this embodiment.

In FIG. 5, first, the vehicle 2 is stopped at the loading / unloading position by the transport controller 32 (step S41). Subsequently, the hoist 5a and the gripper 5c are controlled, and the FOUP 3 held by the vehicle 2 is lowered by the height of the positioning pin 9a and released from the gripper 5c, so that it is transferred to the port P1 ( Step S42). At this time, the upper part of the FOUP 3 is not exposed below the vehicle 2. Then, the stocker controller 33 controls the slide mechanism 9 and the shelf portion 15t, and the FOUP 3 on the port P1 is horizontally moved onto the shelf portion 15t adjacent to the entrance / exit H1 through the opening H0 and the entrance / exit H1 (step S43). ). Thereafter, the vehicle 2 travels toward the next conveyance source by the conveyance controller 32 (step S44). Thereby, a series of warehousing operation processing is completed.
(Shipping operation process)

  Next, a delivery operation process performed by the transport controller 32 and the stocker controller 33 according to the present embodiment will be described with reference to FIG. FIG. 6 is a flowchart showing the leaving operation process.

  In FIG. 6, the vehicle 2 is first stopped at the loading / unloading position by the transfer controller 32 in the same manner as in the loading operation (step S <b> 51). Then, the stocker controller 33 controls the shelf portion 15t and the slide mechanism 9, and the FOUP 3 on the shelf portion 15t is horizontally moved onto the port P1 through the entrance H1 and the opening H0 (step S52). At this time, the upper part of the FOUP 3 is not exposed below the vehicle 2. Then, the hoist 5a and the gripper 5c are controlled by the transport controller 32, and the FOUP 3 on the port P1 is transferred to the vehicle 2 by being held by the gripper 5c and raised by the height of the positioning pin 9a. (Step S53). Thereafter, the vehicle 2 travels toward the transport destination by the transport controller 32 (step S54). Thereby, a series of the leaving operation processing is completed.

  Thus, according to the warehousing operation process and the warehousing operation process of this embodiment, the distance L1 between the port P1 and the vehicle 2 is made shorter than the height of one of the FOUP3, and at least the upper part of the FOUP3 at the time of transfer. By not exposing the port P1, the vertical arrangement of the port P1 is not lowered as compared to before the FOUP 3 is enlarged. Therefore, it is possible to ensure the safety height while accommodating the increase in size of the FOUP 3.

  According to the present embodiment, in the stocker 10, one port P1 is arranged at the uppermost stage, but the number of ports is not limited to one.

  FIG. 7 shows an example of a storage according to the present invention, and the number of storage ports is different from that of the storage of FIG. In FIG. 7, the stocker 110 is provided with a second entrance H201 at a level one lower than the top level in addition to the first entrance H101 provided at the top level. The first port P11 (in other words, the first slide mechanism 109) is provided adjacent to the uppermost first inlet / outlet H101 so as to be positioned below the first rail 101, and the second port P12 (in other words, in other words). For example, the second slide mechanism 209) is provided adjacent to the second doorway H 201 that is one level lower than the uppermost level so as to be positioned below the second rail 201. Such first port P11 and second port P12 are in the same vertical direction. In the present embodiment, the second port P12 is disposed at a height L2 in the vertical direction from the installation surface of the stocker 101. The height L2 indicates a value higher than a preset height threshold L0. The height threshold L0 is a height set to avoid a risk that an administrator or an operator who manages or operates the stocker 101 collides with the second port P12.

  As described above, in the stocker 110, for example, the first port P11 is dedicated to warehousing and the second port P12 is dedicated to warehousing, so that the amount of FOUP3 that is admitted to and from the stocker 110 can be increased. It is. Therefore, it is possible to further reduce the time required for loading and unloading and to load and unload more efficiently.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. Moreover, it is included in the technical scope of the present invention.

It is a perspective view which shows the external appearance of a manufacturing system provided with the storage of embodiment. It is sectional drawing which shows typically the internal structure of the storage of FIG. It is sectional drawing which shows typically the drive means of FIG. 2, a some shelf part, and an outer / inner movement means. It is explanatory drawing which shows typically the operation | movement at the time of transferring a load between the some shelf parts of FIG. It is a flowchart which shows the warehousing operation process of embodiment. It is a flowchart which shows the leaving operation process of embodiment. It is sectional drawing which shows typically the internal structure of the storage of this invention other than the storage of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Rail, 2 ... Vehicle (ceiling traveling vehicle), 3 ... FOUP (load), 9 ... Slide mechanism, 10 ... Stocker (storage), 11 ... Mounting part, 13 ... Horizontal drive part, 14 ... Vertical drive part 15 ... Shelves 33 ... Stocker controller 100 ... Manufacturing system

Claims (6)

A storage for carrying in and out of the load with a transport vehicle that travels along a ceiling or a track laid near the ceiling and transports the load,
A housing or a frame in which the inside is divided into a plurality of stages in the vertical direction, and at least one of the plurality of stages is provided with an entrance through which the load can be taken in and out,
An entrance / exit port that is adjacent to the entrance / exit outside the housing or the frame and on which the load can be placed;
Driving means capable of reciprocating the load in at least one horizontal direction and reciprocating in the vertical direction in the casing or frame;
In the case or frame, each of the plurality of stages is arranged so as to spread in at least one horizontal direction, and each of the plurality of stages is configured to receive or place a load moved by the driving means. A shelf part,
Outer / inner movement means capable of horizontally moving the load through the doorway between one shelf part adjacent to the doorway and the warehouse port among the plurality of shelf parts,
The loading / unloading port has a distance shorter than the height of one of the loads between the transfer vehicle and the transport vehicle stopped at the loading / unloading position facing the loading / unloading port in the track. Storehouse. The doorway is provided in one stage of the plurality of stages and one stage below the one stage among the plurality of stages,
The entry / exit port adjacent to the entrance / exit provided in the next lower stage is located at a position higher than a height threshold defined in advance in terms of safety in relation to the floor on which the storage is placed. The storage according to claim 1. The plurality of shelf portions are arranged with respect to the track so that the direction of the at least one horizontal direction is orthogonal to the direction of the track.
The storage according to claim 1 or 2, wherein the casing or the frame is disposed below the track. When the load is to be received, the load placed on the input / output port by the transfer vehicle is transferred from the input / output port to the one shelf portion while the transfer vehicle is stopped at the input / output position. And controlling the outer / inner moving means so as to move horizontally,
When the load is to be unloaded, the load placed on the one shelf portion by the drive means from the one shelf portion in the state where the transport vehicle is stopped at the loading / unloading position. The storage according to any one of claims 1 to 3, further comprising control means for controlling the outer / inner moving means so as to move horizontally to the port. The entry / exit port has positioning means for positioning the loaded load,
The transport vehicle is
A body portion that defines an opening that is open so that a load horizontally moved by the outer / inner moving means when stopped at the loading / unloading position;
Holding means capable of holding the load inside the main body,
5. Lifting means that can be moved up and down to displace the load held by the holding means to a positioning position positioned by the positioning means or a release position released from the positioning position. The storage as described in any one of. (i) a case or frame in which the interior is divided into a plurality of stages in the vertical direction and at least one doorway for loading and unloading is provided in at least one of the plurality of stages; and (ii) ) An entrance / exit port that is adjacent to the entrance / exit outside the casing or the frame and on which the load can be placed; and (iii) the load is reciprocated in at least one horizontal direction within the casing or the frame. Driving means capable of reciprocating in the vertical direction, and (iv) arranged in the casing or frame so as to spread in at least one horizontal direction in each of the plurality of stages, and the driving means A plurality of shelf parts each configured to receive or place a load to be moved by (v) between the one shelf part adjacent to the entrance / exit of the plurality of shelf parts and the entry / exit port And the load through the doorway A moving vehicle that can move horizontally, and the loading / unloading port travels along a ceiling or a track laid in the vicinity of the ceiling and transports the load. There is a distance shorter than the height of one of the loads between the transporting vehicle stopped at the loading / unloading position facing the entry / exit port, and the loading / unloading of the load with the transporting vehicle is performed. Is a storage / retrieval method of the storage where
When the load is to be received, the load placed on the input / output port by the transfer vehicle is transferred from the input / output port to the one shelf portion while the transfer vehicle is stopped at the input / output position. A first control step of controlling the outer / inner moving means to horizontally move the
When the other load is to be unloaded following the first control step, the load placed on the one shelf portion by the driving means while the transport vehicle is stopped at the loading / unloading position. And a second control step of controlling the outer / inner moving means so as to move horizontally from the one shelf portion to the loading / unloading port.

Images