JP5369560B2 - Transport device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To transfer conveyed objects between a plurality of stories with comparatively simple constitution, in a conveying device for conveying the conveyed objects such as FOUPs (front opening unified pods) for storing various substrates for manufacturing semiconductor elements. <P>SOLUTION: A conveying system 100 includes: a partition member 1 partitioning an upper story and a lower story from each other and having a communicating port opened for mutual communication between the upper story and the lower story; an upper track 2 laid in the upper story; an upper conveying vehicle 12 conveying the conveyed objects 10 along the upper track; a lower track 3 laid in the lower story; a lower conveying vehicle 13 conveying the conveyed objects along the lower track; and a temporary storage shelf 4 disposed below the communicating port and constituted to transfer the conveyed objects between the upper conveying vehicle and the lower conveying vehicle to temporarily store the conveyed objects. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a technical field of a transport apparatus that transports an object to be transported such as a FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing semiconductor elements, among a plurality of layers.

  As this type of transport device, there is a device that includes a lift having an elevator function, and allows a transported object transported along a track laid on each of a plurality of levels to be exchanged between the plurality of levels. (Patent Document 1).

JP 2006-261145 A

  However, in the above-mentioned Patent Document 1, since the lift having the elevator function is arranged across a plurality of layers, there is a technical problem that the entire conveying device becomes large.

  The present invention has been made in view of the above-described problems, for example, and an object of the present invention is to provide a transport apparatus that can exchange a transported object between a plurality of layers with a relatively simple configuration.

In order to solve the above-described problem, the conveying device of the present invention separates the upper and lower hierarchies from each other and has a sorting member having a communication port that communicates the upper and lower hierarchies with each other, and the upper hierarchies. An upper track laid on the upper track, and an upper transport vehicle that transports an object to be transported along the upper track,
A lower track laid on the lower layer, a lower transport vehicle that transports the object to be transported along the lower track, and an upper transport vehicle and the lower transport disposed below the communication port. Each of the objects to be transferred is configured to be able to be transferred to and from a car, and includes a temporary storage shelf for temporarily storing the objects to be transferred, and the upper transfer car and the lower transfer car are It has a vertically moving means that can hold an object to be conveyed and can move up and down, the lower transport vehicle has a horizontal moving means that can horizontally move the up and down moving means, and the upper transport vehicle At the first predetermined transfer position set immediately above the communication port, the object to be transferred is transferred to and from the temporary storage shelf by the vertical movement means, and the lower transfer vehicle At a second predetermined transfer position where the vehicle is set to the side position closest to the communication port. , For transferring the transported object between the temporary storage shelves by the horizontal movement means and said vertical movement means.

  According to the transport apparatus of the present invention, a transport vehicle such as a vehicle transports an object to be transported such as a FOUP containing a wafer (substrate) used for manufacturing a semiconductor element to various manufacturing processes in a factory or the like. . In particular, the transfer device of the present invention is provided between a plurality of layers (specifically, along a track laid on each of the plurality of layers) in order to carry to various manufacturing processes arranged on the plurality of layers. The transported object can be moved back and forth between a plurality of traveling vehicles.

  Specifically, the conveying device of the present invention opens a communication port that communicates the upper and lower layers with each other, and opens a temporary connection below the communication port. Arrange storage shelves. Temporary storage shelves are transported between an upper transport vehicle that transports along an upper track laid on an upper layer and a lower transport vehicle that transports along a lower track laid on a lower layer, respectively. Can be transferred.

  Here, the temporary storage shelf is “possible to transfer” means that an object to be transported that is moved up and down by the upper transport vehicle via the communication port is placed on the temporary storage shelf. Or on the contrary, it can be removed from the temporary storage shelf, and is moved horizontally or vertically with respect to the temporary storage shelf by the lower transport vehicle between the lower transport vehicle and the lower transport vehicle. This means that the object to be transported can be placed on the temporary storage shelf or can be removed from the temporary storage shelf.

  Specifically, when transferring to and from the upper transport vehicle, for example, when the upper transport vehicle stops above the communication port, the vertical direction of the holding means such as a gripper that can hold the object to be transported The temporary storage shelf is arranged so that a held portion such as a buttocks of the object to be transported placed on the temporary storage shelf exists within the movement range. With this arrangement, for example, the holding means in the main body of the upper transport vehicle is moved downward and stopped at a position where the bottom surface of the transported object being held and the placement surface of the temporary storage shelf are in contact with each other. Later, by transferring the object to be transported, transfer from the upper transport vehicle to the temporary storage shelf is performed.

  Further, when transferring to and from the lower transport vehicle, for example, when the lower transport vehicle stops to the side of the space between the communication port and the temporary storage shelf, Temporary storage shelves are arranged so that there is a held portion of the object to be transported placed on the temporary storage shelf within the horizontal movement range. With this arrangement, for example, the holding means present in the main body of the lower transport vehicle is moved horizontally up to the upper side of the temporary storage shelf and is moved downward to temporarily hold the bottom surface of the object to be transported and the temporary holding shelf. After stopping at a position where the storage shelf is in contact with the placement surface, the object to be transported is released, so that the transfer from the lower transport vehicle to the temporary storage shelf is performed.

  In this way, the temporary storage shelf is arranged at a position in the vertical direction according to the movement range of the holding means in the upper conveyance vehicle and the movement range of the holding means in the lower conveyance vehicle, for example, Transferred objects can be transferred between the upper transport vehicle and the lower transport vehicle.

  As described above, by arranging the temporary storage shelves configured to be able to transfer the objects to be transferred between the upper conveyance vehicle and the lower conveyance vehicle, respectively, below the division member having the communication port opened, It is possible to deliver the object to be conveyed between the upper conveyance vehicle and the lower conveyance vehicle via the temporary storage shelf.

  Note that the upper layer and the lower layer typically overlap adjacent to each other via the partition member. That is, for example, the two layers may be overlapped with one partition member as the ceiling of the upper floor and the lower floor. However, both hierarchies may overlap with each other via other hierarchies (for example, middle hierarchies). In this case, the communication port passes through one or more middle hierarchies, in other words, Both hierarchies are communicated with each other in a form that penetrates a plurality of partition members that function as ceilings and floors at a stroke.

  In one aspect of the transport apparatus of the present invention, the upper transport vehicle has a vertically moving means that can hold the transported object and can move up and down, and the lower transport vehicle horizontally holds the transported object. It has movable horizontal movement means.

  According to this aspect, the upper transport vehicle has vertical movement means such as a hoist mechanism having holding means. The vertical movement means moves the article to be conveyed up and down by, for example, lowering or winding up a belt or the like fixed to the holding means. The upper transport vehicle can transfer the object to be transported to the temporary storage shelf by the vertical movement operation. The lower transport vehicle has, for example, a horizontal movement unit that can move the vertical movement unit horizontally. The horizontal moving means moves the object to be conveyed held by the vertical moving means to above the temporary storage shelf by horizontally moving the vertical moving means by a slide mechanism, for example. The lower transport vehicle can transfer the transported object to the temporary storage shelf by the horizontal movement operation.

  The upper transport vehicle may have horizontal movement means in addition to the vertical movement means, and the lower transport vehicle may have vertical movement means in addition to the horizontal movement means.

  In the aspect in which the lower transport vehicle includes the horizontal moving unit, the lower transport vehicle may further include a vertical moving unit capable of moving the transported object up and down.

  If comprised in this way, a lower conveyance vehicle will have the above-mentioned vertical movement means similarly to an upper conveyance vehicle. In addition to the horizontal movement by the horizontal moving means, the lower transport vehicle is transported to and from a port of a semiconductor device manufacturing apparatus other than a temporary storage shelf or a storage by a vertical movement operation by the vertical moving means. Objects can be transferred (that is, vertically transferred). Further, the lower transport vehicle adopts a mechanism for horizontally moving the lower storage track and the lower track as will be described later. It can also be posted.

  The upper transport vehicle may further include a horizontal moving unit that can horizontally move the transported object. Thereby, also in an upper side conveyance vehicle, a to-be-conveyed object can be horizontally transferred between ports, such as semiconductor element manufacturing apparatuses other than a temporary storage shelf, and a storage.

  In another aspect of the transfer apparatus of the present invention, the lifting means capable of moving up and down the temporary storage shelf and the transfer of the object to be transferred between the upper transfer vehicle or the lower transfer vehicle Control means for controlling the elevating means so as to elevate the temporary storage shelf according to whether or not the temporary storage shelf is elevated.

  According to this aspect, the raising / lowering means can raise and lower the temporary storage shelf. The control means includes, for example, a transport vehicle control device, a shelf control device, a track control device, and the like, and comprehensively controls the transport device. The control means is, for example, a shelf control device, and controls the elevating means. Specifically, the control means raises the temporary storage shelf so that, for example, the moving distance in the vertical direction of the transported object is shortened when the transported object is transferred to and from the upper transport vehicle. . In addition, when transfer of the transported object is performed with the lower transport vehicle, the transported object held by the lower transport vehicle is, for example, between the communication port and the temporary storage shelf from the horizontal direction. The temporary storage shelf is lowered so as to form an accessible space. As described above, the temporary storage shelf is displaced depending on whether the transferred object is transferred to or from the upper transport vehicle. Transfer time can be shortened.

  In another aspect of the transport apparatus of the present invention, the shelf moving means that can move the temporary storage shelf in a direction crossing the vertical direction and the transfer of the object to be transported are performed between the upper transport vehicle or Control means for controlling the shelf moving means so as to move the temporary storage shelf in the intersecting direction according to whether it is performed with the lower transport vehicle.

  According to this aspect, the shelf moving means can move the temporary storage shelf in a direction crossing the vertical direction. The control means is a shelf control device, for example, and controls the shelf moving means. Specifically, the control means arranges, for example, a temporary storage shelf at a position facing the communication port when the transferred object is transferred to or from the upper transport vehicle, and is transported from the upper transport vehicle. It is possible to transfer objects. In addition, when transfer of the object to be transferred is performed with the lower transfer vehicle, for example, a temporary storage shelf can be arranged immediately below the lower transfer vehicle, and the transfer object from the lower transfer vehicle can be transferred. And At the time of transfer to and from the lower transport vehicle, the horizontal movement operation by the horizontal movement means in the lower transport vehicle becomes unnecessary, so that the transfer time to and from the lower transport vehicle can be shortened.

  In another aspect of the transport device of the present invention, the lower track can be slid to a first position that does not face the communication port, and can be slid to a second position that faces the communication port; When transferring the object to be conveyed between the upper transport vehicle and the temporary storage shelf via the communication port, the slide means is controlled to slide the lower track to the first position, Control means for controlling the slide means to slide the lower track to the second position when the object to be transferred is transferred between the lower transport vehicle and the temporary storage shelf.

  According to this aspect, the slide means can slide the lower track to the first position that does not face the communication port and to the second position that faces the communication port. The control means is, for example, a trajectory control apparatus, and controls the slide means. Specifically, the control means is configured so that, for example, when the transferred object is transferred between the upper transfer vehicle and the temporary storage shelf via the communication port, for example, the lower track Slide to the first position. Further, when the object to be transported is transferred between the lower transport vehicle and the temporary storage shelf, for example, the lower track is slid to the second position so that the lower transport vehicle can stop immediately above the temporary storage shelf. In this case, since the lower transport vehicle transfers the object to be transported only by, for example, the vertical movement operation by the vertical movement means, it is not necessary to have a horizontal movement means. Thereby, while being able to reduce a weight of a lower conveyance vehicle, the transfer time between a lower conveyance vehicle and a temporary storage shelf can be shortened.

  The upper track may be slid to a first position that does not face the communication port, and may further include a slide means that can slide to a second position that faces the communication port. In any case, the sliding means can be realized relatively easily by slidably configuring the slidable track portion so as to be partially separated from the track portion forming the main line.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>

  First, the configuration of the transport apparatus according to the first embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 shows the appearance of the transfer apparatus according to the first embodiment, and FIG. 2 shows the transfer operation between the lower transfer vehicle and the temporary storage shelf shown in FIG.

  In FIG. 1, a transport apparatus 100 includes a sorting member 1, an upper track 2, a lower track 3, a temporary storage shelf 4, an upper transport vehicle 12, and a lower transport vehicle 13, and a semiconductor element. The FOUP 10 can be transported to a manufacturing apparatus or stocker for manufacturing.

  The division member 1 separates the upper hierarchy F1 and the lower hierarchy F2 from each other. A communication port H1 is opened in the sorting member 1, and the communication port H1 communicates the upper layer F1 and the lower layer F2. The division member 1 may exist over a relatively wide area so as to form the ceiling of the lower floor F2 or the floor of the upper floor F1, or only in the vicinity of or near the communication port. May exist. The sorting member 1 does not need to be composed of a single plate. For example, even if a plurality of rods, poles, columnar members such as H-shaped steel are assembled in a stripe shape, a lattice shape, a mesh shape, etc. It may be a grating or the like. Further, a combination of a plurality of plates may be used, a member other than a plurality of plates may be combined, or there may be a step. In addition, holes, holes, mouths, etc. other than the communication port H1 may be formed, or a configuration in which only a set exists as long as the upper floor and the lower floor are divided may be used.

  The upper track 2 is laid on the upper hierarchy F1. The upper transport vehicle 12 transports the FOUP 10 along the upper track 2.

  The lower track 3 is laid on the lower level F2. A lower transport vehicle 13 transports the FOUP 10 along the lower track 3.

  The temporary storage shelf 4 is disposed at a position that takes a predetermined distance Lx downward from the communication port H <b> 1, and the FOUP 10 can be transferred between the upper transport vehicle 12 and the lower transport vehicle 13. However, the predetermined distance Lx indicates a distance such that the temporary storage shelf 4 is positioned below the bottom surface of the FOUP 10 that is horizontally moved by the hoist slide mechanism 25 described later. The temporary storage shelf 4 temporarily stores the FOUP 10 and allows the FOUP 10 to be exchanged between the upper transport vehicle 12 and the lower transport vehicle 13.

  Each of the upper transport vehicle 12 and the lower transport vehicle 13 is controlled by a transport vehicle control device 102 which is a control computer configured with a processor, a memory, and the like in the transport device 100, and the transport source and transport destination of the FOUP 10. As instructed. Each of the upper transport vehicle 12 and the lower transport vehicle 13 includes a traveling unit 20 and a hoist mechanism 21, travels to the instructed transport source and transport destination, and transfers the FOUP 3 independently. . The traveling unit 20 travels along the upper track 2 or the lower track 3 or stops at a predetermined transfer position according to an instruction from the transport vehicle control device 102. However, each of the upper transport vehicle 12 and the lower transport vehicle 13 that transports the FOUP 10 (that is, not empty) travels when the transported FOUP 1 is accommodated (arranged) in the main body 12a or 13a. The part 20 can run. In the present embodiment, the predetermined transfer position of the upper transport vehicle 12 is set immediately above the communication port H1, and the lower transfer vehicle 13 is closest to the communication port H1 as the predetermined transfer position of the lower transport vehicle 13. It is set to the side.

  The hoist mechanism 21 is disposed in the main body 12 a as an example of the “vertical movement means” according to the present invention, and includes a hoist main body 22, a gripper 23, and a belt 24. The hoist body 22 is connected to the gripper 23 via a belt 24. The hoist mechanism 21 moves the gripper 23 in the vertical direction by lowering or winding up the belt 24. The gripper 23 has a holding portion 23 a that is displaced between a holding state that holds the FOUP 10 and a released state that releases the FOUP 10.

The lower transport vehicle 13 further includes a hoist slide mechanism 25. In FIG. 2, the hoist slide mechanism 25 is arrange | positioned above the hoist mechanism 21 in the main-body part 13a as an example of the "horizontal movement means" which concerns on this invention, and has the to-be-slid part 25a. The sliding portion 25 a is configured to be extendable and contracted, and the tip end thereof is fixed to the upper surface of the hoist mechanism 21. When the lower transport vehicle 13 is transferred to and from the temporary storage shelf 4, the sliding portion 25 a is in the horizontal direction on the temporary storage shelf 4 side (that is, the horizontal left direction of the lower transport vehicle 13 in FIG. 2). The hoist mechanism 21 is moved in the horizontal left direction. By this movement, the hoist slide mechanism 25 moves the FOUP 10 held by the holding unit 23 a in the horizontal left direction and arranges it above the temporary storage shelf 4.
(Transfer control processing by the transport device of the first embodiment)

  Next, the transfer control process of the transport apparatus according to the first embodiment will be described with reference to FIGS. 1 and 2 again.

  In FIG. 1, first, the transfer of the FOUP 10 is transferred from the upper transfer vehicle 12 to the lower transfer vehicle 13 via the temporary storage shelf 4 by the transfer vehicle control device 102, or vice versa. It is determined whether the transfer is performed from the side transfer vehicle 13 to the upper transfer vehicle 12. Here, when the transfer from the upper transport vehicle 12 to the lower transport vehicle 13 is performed, the traveling unit 20 in the upper transport vehicle 12 is stopped at a predetermined transfer position in the upper layer F1. Then, the FOUP 10 held by the holding unit 23 a is moved downward by the hoist mechanism 21 and released on the temporary storage shelf 4. By this release, the FOUP 10 is transferred from the upper transport vehicle 12 to the temporary storage shelf 4.

  Subsequently, in FIG. 2, the traveling unit 20 in the lower transport vehicle 13 is stopped at the predetermined transfer position at the lower level F <b> 2. Then, after the hoist mechanism 21 is moved in the horizontal left direction by the hoist slide mechanism 25, the gripper 23 is moved downward by the hoist mechanism 21. Then, the FOUP 10 stored in the temporary storage shelf 4 is held by the gripper 23. By this holding, the FOUP 10 is transferred from the temporary storage shelf 4 to the lower transport vehicle 13. Thereby, a series of transfer control processing is complete | finished.

  Thereafter, when transfer from the lower transport vehicle 13 to the load port 41 of the manufacturing apparatus 40 is performed, the gripper 23 holding the FOUP 10 on the temporary storage shelf 4 is connected to the hoist mechanism 21 and the hoist slide mechanism. 25, the FOUP 10 is accommodated in the main body 13a. Then, the traveling unit 20 in the lower transport vehicle 13 travels and stops immediately above the load port 41. Then, the held FOUP 10 is moved downward by the hoist mechanism 21 and released on the load port 41. With this release, the FOUP 10 is transferred from the lower transport vehicle 13 to the load port 41 of the manufacturing apparatus 40.

As described above, the temporary storage shelf 4 configured to be able to transfer the FOUP 10 between the upper transport vehicle 12 and the lower transport vehicle 13 is disposed below the sorting member 1 in which the communication port H1 is opened. Thus, the FOUP 10 can be delivered between the upper transport vehicle 12 and the lower transport vehicle 13 via the temporary storage shelf 4.
Second Embodiment

  Next, the configuration of the transport apparatus according to the second embodiment will be described with reference to FIG. FIG. 3 shows the appearance of the transport apparatus according to the second embodiment. The transfer device according to the second embodiment differs from that of the first embodiment in that the temporary storage shelf moves in the vertical direction. In addition, about the conveying apparatus which concerns on 2nd Embodiment, the code | symbol same as the element of 1st Embodiment is attached | subjected to the element comprised similarly to 1st Embodiment, and detailed description is abbreviate | omitted about this element.

  In FIG. 3, the transport device 200 includes an elevating unit 50 and a shelf control device 202 b in order to move the temporary storage shelf 54 in the vertical direction. The shelf control device 202b cooperates with the transport vehicle control device 202a that controls the upper transport vehicle 12 and the lower transport vehicle 13.

  The elevating unit 50 can elevate and lower the temporary storage shelf 54 as an example of the “elevating unit” according to the present invention, and includes a bearing unit 52 and a motor unit 53. A screw is cut on the outer periphery of the bearing portion 52, and a temporary storage shelf 54 is fixed via a bolt (not shown) screwed to the screw. The output part of the motor part 53 is connected to one end part of the bearing part 52 (that is, the lower end part of the bearing part 52 in FIG. 3). When the motor unit 53 is driven and its output unit is rotated under the control of the shelf control device 202b, the bearing unit 52 is rotated accordingly.

The shelf control device 202b functions as a part of the “control unit” according to the present invention, and whether the transfer of the FOUP 10 is performed with the upper transport vehicle 12 or the lower transport vehicle 13 is performed. Accordingly, the drive of the motor unit 53 is controlled. When the FOUP 10 is transferred to or from the upper transport vehicle 12, the shelf control device 202 b rotates the output unit of the motor unit 53 counterclockwise and transfers the FOUP 10 to or from the lower transport vehicle 12. In this case, the output unit is rotated to the right. In the present embodiment, the temporary storage shelf 54 is raised by the left rotation of the output unit, and the temporary storage shelf 54 is lowered by the right rotation of the output unit.
(Transfer control processing by the transport device of the second embodiment)

  Next, transfer control processing of the transport apparatus according to the second embodiment will be described with reference to FIG.

  In FIG. 3, it is first determined whether the transfer of the FOUP 10 to the temporary storage shelf 54 is performed between the upper transport vehicle 12 and the lower transport vehicle 13. Here, when performed with the upper transport vehicle 12, the motor control unit 53b drives the motor unit 53 so that the output unit is rotated counterclockwise. Then, the bearing part 52 is rotated counterclockwise, and the temporary storage shelf 54 is raised. Due to this rise, the temporary storage shelf 54 is brought closer to the upper transport vehicle 12.

  On the other hand, when the transfer of the FOUP 10 to the temporary storage shelf 54 is performed with the lower transport vehicle 13, the shelf control device 202b drives the motor unit 53 so that the output unit is rotated clockwise. The Then, the bearing part 52 is rotated to the right, and the temporary storage shelf 54 is lowered. By this descent, a space having a predetermined distance Lx (shown in FIG. 1) is formed between the communication port H1 and transfer with the lower transport vehicle 13 becomes possible. Thereby, a series of transfer control processing is complete | finished.

As described above, the temporary storage shelf 54 is displaced in the vertical direction depending on whether the transfer of the FOUP 10 is performed with the upper transport vehicle 12 or the lower transport vehicle 13, whereby the upper transport is performed. The transfer time between the vehicle 12 can be shortened.
<Third Embodiment>

  Next, the configuration of the transport apparatus according to the third embodiment will be described with reference to FIG. FIG. 4 shows the appearance of the transport apparatus according to the third embodiment. The transfer device according to the third embodiment is different from that of the second embodiment in that the temporary storage shelf moves in the direction intersecting the vertical direction and the horizontal moving means in the lower transfer vehicle is unnecessary. In addition, about the conveying apparatus which concerns on 3rd Embodiment, the code | symbol same as the element of 2nd Embodiment is attached | subjected to the element comprised similarly to 2nd Embodiment, and detailed description is abbreviate | omitted about this element.

  In FIG. 4, the transfer device 300 includes a shelf moving unit 60 and a shelf control device 302b in order to move the temporary storage shelf 64 in a direction crossing the vertical direction. The shelf control device 302 b cooperates with the transport vehicle control device 302 a that controls the upper transport vehicle 12 and the lower transport vehicle 13.

  As an example of the “shelf moving unit” according to the present invention, the shelf moving unit 60 can move the temporary storage shelf 64 in a direction intersecting the vertical direction, and includes a bearing unit 62 and a motor unit 63. A screw is cut on the outer periphery of the bearing portion 62, and a temporary storage shelf 64 is fixed to the upper surface of a mounting portion (not shown) that is screwed into the screw. An output portion of the motor portion 63 is connected to one end portion of the bearing portion 62 (that is, the left end portion of the bearing portion 62 in FIG. 4). When the motor unit 63 is driven and its output unit is rotated under the control of the shelf control device 302b, the bearing unit 62 is rotated accordingly.

  The shelf control device 302b functions as a part of the “control unit” according to the present invention, and determines whether the transfer of the FOUP 10 is performed with the upper transport vehicle 12 or the lower transport vehicle 13. Accordingly, the drive of the motor unit 63 is controlled. When the shelf control device 302b transfers the FOUP 10 to and from the upper transport vehicle 12, the shelf control device 302b rotates the output unit of the motor unit 63 counterclockwise and transfers the FOUP 10 to and from the lower transport vehicle 12. Then, the output unit is rotated to the right. In the present embodiment, the left rotation of the output unit moves the temporary storage shelf 64 to a position facing the communication port H1 (the temporary storage shelf 64 is indicated by a solid line in FIG. 4), and the right rotation of the output unit The temporary storage shelf 64 moves to a predetermined position (indicated by a two-dot chain line in FIG. 4) that does not face the communication port H1.

The lower transport vehicle 14 does not include the hoist slide mechanism 25 (shown in FIGS. 1 and 2) in the lower transport vehicle 13 of the first embodiment. This is because the temporary storage shelf 64 is moved to a predetermined position by the shelf moving unit 60, so that the operation of moving the FOUP 10 in the horizontal left direction becomes unnecessary. That is, the predetermined position is set vertically below the predetermined transfer position of the lower transport vehicle 13.
(Transfer control processing by the transport device of the third embodiment)

  Next, transfer control processing of the transport device according to the third embodiment will be described with reference to FIG. In the transfer control process, as an initial setting, the temporary storage shelf is arranged at a position not facing the communication port.

  In FIG. 4, first, the transfer vehicle control device 302 a determines whether the transfer of the FOUP 10 to the temporary storage shelf 64 is performed between the upper transfer vehicle 12 and the lower transfer vehicle 13. Here, when the operation is performed with the upper transport vehicle 12, the shelf control device 302b drives the motor unit 63 so that the output unit is rotated counterclockwise. Then, the bearing part 62 is rotated counterclockwise, and the temporary storage shelf 64 is moved to a position facing the communication port H1. By this movement, transfer to and from the upper transport vehicle 12 becomes possible.

  On the other hand, when the transfer of the FOUP 10 to the temporary storage shelf 64 is performed with the lower transport vehicle 13, the shelf control device 302b drives the motor unit 63 so that the output unit is rotated clockwise. The Then, the bearing part 62 is rotated counterclockwise, and the temporary storage shelf 64 is moved to a predetermined position that does not face the communication port H1. By this movement, transfer to and from the lower transport vehicle 13 becomes possible. Thereby, a series of transfer control processing is complete | finished.

  Thereby, depending on whether the transfer of the FOUP 10 is performed with the upper transport vehicle 12 or the lower transport vehicle 13, the temporary storage shelf 64 is displaced in a direction crossing the vertical direction. Further, the horizontal movement operation in the lower transport vehicle 13 becomes unnecessary, and the transfer time with the lower transport vehicle 13 can be shortened.

The shelf moving unit 60 moves the temporary storage shelf 64 in the direction intersecting the vertical direction by driving the motor unit 63. However, instead of the motor, the shelf moving unit 60 moves the temporary storage shelf 64 by a link mechanism, an actuator, or the like. Also good.
<Fourth embodiment>

  Next, the structure of the conveyance apparatus which concerns on 4th Embodiment is demonstrated with reference to FIG. FIG. 5 shows an appearance of the lower layer in the transport apparatus according to the fourth embodiment. The conveying device according to the fourth embodiment differs from that of the third embodiment in that the lower track slides to a position facing the communication port. In addition, about the conveying apparatus which concerns on 4th Embodiment, the code | symbol same as the element of 3rd Embodiment is attached | subjected to the element comprised similarly to 3rd Embodiment, and detailed description is abbreviate | omitted about this element.

  In FIG. 5, the transport device 400 includes a track slide mechanism 80 and a track control device 402b in order to slide the lower track 73 to a position facing the communication port H1. The track control device 402b cooperates with the transport vehicle control device 402a that controls the upper transport vehicle 12 and the lower transport vehicle 13.

  The track slide mechanism 80 can slide the lower track 73 to the first position or the second position as an example of the “slide means” according to the present invention. In the present embodiment, as shown in FIG. 5A, the first position is a position where the lower track 73 does not face the communication port H1, and the second position is shown in FIG. 5B. The lower track 73 is a position facing the communication port H1. The track slide mechanism 80 includes a bearing portion 82 and a motor portion 83. A screw is cut on the outer periphery of the bearing portion 82, and a lower track 73 is fixed to the lower surface of a mounting portion (not shown) that is screwed into the screw. The output portion of the motor portion 83 is connected to one end portion of the bearing portion 82 (that is, the right end portion of the bearing portion 82 in FIG. 5). When the motor unit 83 is driven and its output unit is rotated under the control of the track control device 402b, the bearing unit 82 is rotated accordingly.

  The track control device 402b functions as a part of the “control unit” according to the present invention, and whether the transfer of the FOUP 10 is performed between the upper transport vehicle 12 or the lower transport vehicle 13 or not. Accordingly, the drive of the motor unit 83 is controlled. When the FOUP 10 is transferred to or from the upper transport vehicle 12, the track control device 402 b rotates the output unit of the motor unit 83 counterclockwise and transfers the FOUP 10 to or from the lower transport vehicle 12. Then, the output unit is rotated to the right. In this embodiment, the lower track 73 moves to a first position that does not face the communication port H1 due to the left rotation of the output unit, and the lower track 73 faces the communication port H1 due to the right rotation of the output unit. Move to the second position.

The lower transport vehicle 14 does not include the hoist slide mechanism 25 (shown in FIGS. 1 and 2) in the lower transport vehicle 13 of the first embodiment. This is because the movement of the FOUP 10 in the horizontal left direction becomes unnecessary because the lower track 73 is moved to the second position by the track slide mechanism 80. That is, the second position is such that when the lower transport vehicle 14 is stopped at the predetermined transfer position and the lower track 73 is moved to the second position, the lower transport carriage 14 is directly above the temporary storage shelf 84. It is set so that the car 14 is arranged.
(Transfer control processing by the transport device of the fourth embodiment)

  Next, transfer control processing of the transport device according to the fourth embodiment will be described with reference to FIG. In the transfer control process, as an initial setting, the temporary storage shelf is disposed at the second position facing the communication port.

  In FIG. 5A, first, the transfer vehicle control device 402a determines whether the transfer of the FOUP 10 to the temporary storage shelf 84 is performed between the upper transfer vehicle 12 and the lower transfer vehicle 13. The Here, when performed with the upper transport vehicle 12, the motor unit 83 is driven by the track control device 402b so that the output unit is rotated counterclockwise. Then, the bearing portion 82 is rotated counterclockwise, and the lower track 73 is moved to the first position that does not face the communication port H1. By this movement, transfer to and from the upper transport vehicle 12 becomes possible.

  On the other hand, in FIG. 5B, when the transfer of the FOUP 10 to the temporary storage shelf 84 is performed with the lower transport vehicle 13, the output unit is rotated clockwise by the track control device 402b. The motor unit 83 is driven. Then, the bearing portion 82 is rotated counterclockwise, and the lower track 73 is moved to the second position facing the communication port H1. By this movement, transfer to and from the lower transport vehicle 13 becomes possible. Thereby, a series of transfer control processing is complete | finished.

  Thereby, the lower track 73 is displaced to the first position or the second position depending on whether the transfer of the FOUP 10 is performed with the upper transport vehicle 12 or the lower transport vehicle 13. Thus, the horizontal movement operation in the lower transport vehicle 13 becomes unnecessary, and the transfer time with the lower transport vehicle 13 can be shortened.

  The track slide mechanism 80 slides the lower track 73 by driving the motor unit 83, but the lower track 73 may be slid by a link mechanism, an actuator or the like instead of the motor.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. It is included in the technical scope of the present invention.

It is a front view which shows typically the appearance of the conveyance device concerning a 1st embodiment. It is a front view which shows typically the transfer operation between the lower side conveyance vehicle of FIG. 1, and temporary storage. It is a front view with the same meaning as FIG. 1 which shows the external appearance of the conveying apparatus which concerns on 2nd Embodiment. It is a front view with the same meaning as FIG. 1 which shows the external appearance of the conveying apparatus which concerns on 3rd Embodiment. It is a front view which shows typically the appearance of the lower hierarchy in the conveyance device concerning a 4th embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Section member, 2 ... Upper track, 3 ... Lower track, 4 ... Temporary storage shelf, 12 ... Upper conveyance vehicle, 13 ... Lower conveyance vehicle, 10 ... FOUP, 100 ... Conveyance system, 102 ... Conveyance vehicle control device

Claims (4)

A dividing member that separates the upper layer and the lower layer from each other and has a communication port that communicates the upper layer and the lower layer with each other;
An upper track laid in the upper hierarchy;
An upper transport vehicle that transports the object to be transported along the upper track;
A lower track laid in the lower hierarchy,
A lower transport vehicle that transports the object to be transported along the lower track,
Temporary storage that is disposed below the communication port and is configured to be able to transfer the object to be transferred between the upper transport vehicle and the lower transport vehicle, and temporarily stores the transported object. and a shelf,
The upper transport vehicle and the lower transport vehicle have a vertically moving means that can hold the transported object and can move vertically.
The lower transport vehicle has horizontal movement means capable of horizontally moving the vertical movement means,
The upper transport vehicle transfers the transported object to and from the temporary storage shelf by the vertical movement means at a first predetermined transfer position set at a position directly above the communication port,
The lower transport vehicle is moved from the temporary storage shelf by the horizontal moving means and the vertical moving means at a second predetermined transfer position set at a side position where the lower transport vehicle is closest to the communication port. A transfer apparatus for transferring the object to be transferred between the two . Elevating means capable of elevating the temporary storage shelf;
The lifting / lowering means is controlled to raise / lower the temporary storage shelf according to whether the transfer of the object to be transferred is performed with the upper transport vehicle or the lower transport vehicle. The conveyance device according to claim 1, further comprising: a control unit. Shelf moving means capable of moving the temporary storage shelf in a direction intersecting the vertical direction;
The shelf is configured to move the temporary storage shelf in the intersecting direction depending on whether transfer of the object to be transported is performed with the upper transport vehicle or with the lower transport vehicle. conveying apparatus according to claim 1 or 2, further comprising a control means for controlling the moving means. Slide means capable of sliding the lower track to a first position not facing the communication port and slidable to a second position facing the communication port;
When transferring the object to be conveyed between the upper transport vehicle and the temporary storage shelf via the communication port, the slide means is controlled to slide the lower track to the first position, Control means for controlling the sliding means to slide the lower track to the second position when the object to be transferred is transferred between the lower transport vehicle and the temporary storage shelf. conveying apparatus according to any one of claims 1 to 3, characterized in.

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