KR102453197B1 - Apparatus for loading substrate storage container - Google Patents

Abstract

A plurality of shelves for accommodating the substrate transport container, the plurality of shelves includes a first shelf and a second shelf disposed below the first shelf, and provides a space in which the substrate storage container is loaded, and a frame supporting the second shelves, and a first lever provided in the loading space to cross one side of the first and second shelves, wherein the first lever is A rod-shaped body portion coupled to the inside of the frame and configured to rotate along a first rotational axis perpendicular to the longitudinal direction thereof, provided at one end of the body portion, and connected to the one side of the second shelf a link and a first grip portion connected to the other end of the body portion, wherein the first lever rotates along the first rotation axis by an external force applied to the first grip portion to linearly move the second shelf in a horizontal direction can do it

Description

Substrate transfer container storage device {APPARATUS FOR LOADING SUBSTRATE STORAGE CONTAINER}

The present invention relates to a substrate transfer container storage apparatus, and more particularly, to a substrate transfer container storage apparatus of an automatic transfer system.

In manufacturing facilities for semiconductors and liquid crystals, articles used in the process (for example, a carrier in which wafers or substrates are stored, etc.) are transported between a manufacturing apparatus and a storage facility according to a manufacturing process. Transporting articles in such a manufacturing process Automated Material Handling System (AMHS) is mainly used in manufacturing facilities for BACKGROUND ART A transport system using a transport cart running on track, including a transport system employing an Over Head Shuttle) system and a transport cart that automatically travels on the floor, is becoming mainstream.

The carrier storage facility is a facility for bringing in a carrier loaded with wafers or substrates on which a prior process has been completed, storing it for a certain period of time, and then taking it out when a subsequent process is performed. It is called a stocker or a buffer.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport container storage device having multiple rows of transportable object loading spaces in a vertical direction.

The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

A substrate transfer container storage device according to embodiments of the present invention for solving the above technical problems is a plurality of shelves for accommodating the substrate transfer container, the plurality of shelves are disposed under the first shelf, the first shelf a second shelf configured to be formed, providing a space in which the substrate storage container is loaded, a frame supporting the first and second shelves, and one side of the first and second shelves provided in the loading space It may include a first lever that traverses.

According to an embodiment, the first lever is provided at one end of a rod-shaped body portion coupled to the inside of the frame and configured to rotate along a first rotational axis orthogonal to a longitudinal direction thereof, and the first lever is provided at one end of the body portion. The second shelf may include a first connection link connected to one side of the shelf, and a first grip portion connected to the other end of the body part.

According to an embodiment, the first lever may be rotated along the first rotation axis by an external force applied to the first grip portion to linearly move the second shelf in a horizontal direction.

According to an embodiment, the first connection link may be configured to convert a rotational motion of the first lever into a linear motion of the second shelf.

According to an embodiment, the second shelf may be configured to horizontally move in a direction opposite to one direction in which an external force is applied to the first grip part.

According to one embodiment, the frame is a first horizontal support portion, a second horizontal support portion disposed under the first horizontal support portion to support the first shelf from below, the second horizontal support portion is disposed under the second shelf It may include a third horizontal support portion supporting the from below, and a vertical support portion disposed along the edge of the first to third horizontal support portion to support the first to third horizontal support portion.

According to an embodiment, the second shelf further includes a first guide rail providing a horizontal movement path, wherein the first guide rail is coupled to the third horizontal support part to support the second shelf. have.

According to an embodiment, one side of the frame in a direction in which the second shelf moves horizontally may be opened.

According to an embodiment, a third shelf disposed under the second shelf, and a second lever provided in the loading space to cross one side of the first to third shelves may be further included.

According to an embodiment, the second lever is provided at one end of a rod-shaped body portion coupled to the inside of the frame and configured to rotate along a second rotational axis orthogonal to a longitudinal direction thereof, and the second lever is provided at one end of the body portion. 3 It may include a second connection link connected to the one side of the shelf, and a second grip portion connected to the other end of the body portion.

According to an embodiment, the second lever may be rotated along the second rotation axis by an external force applied to the second grip part to linearly move the third shelf in a horizontal direction.

According to an embodiment, the second connection link may be configured to convert a rotational motion of the second lever into a linear motion of the third shelf.

According to one embodiment, the frame is a first horizontal support portion, a second horizontal support portion disposed under the first horizontal support portion to support the first shelf from below, the second horizontal support portion is disposed under the second shelf a third horizontal support portion supporting the It may include a vertical support for supporting the first to fourth horizontal support.

According to one embodiment, the third shelf further includes a second guide rail providing a horizontal movement path, wherein the second guide rail is coupled to the fourth horizontal support part to support the third shelf. have.

The substrate transfer container storage device according to the embodiments of the present invention provides a storage space of multiple rows in a vertical direction. Accordingly, the amount of transported objects that can be loaded in the substrate transfer container storage device is increased, and space efficiency in the semiconductor manufacturing facility can be improved with a simple structure in which the storage space in the substrate transfer container storage device is vertically arranged.

In addition, in the lower row of the substrate transfer container storage device, a shelf in the lower row protrudes in front of the substrate transfer container storage device in order to carry in/out of the transported object by the transfer unit. In this case, the shelf in the lower row may move by transferring the driving force of the carrying unit to the shelf in the lower row through a power transmission mechanism such as a lever. Therefore, there is no need to install separate driving devices for moving the shelves on each shelf in the lower row, and only by installing a lever having a simple structure in the storage device for the substrate transfer container, all objects to be transported can be loaded in the storage space of the second row. .

1 is a side view for explaining an example of a substrate transfer container storage device according to embodiments of the present invention.
FIG. 2 is a perspective view illustrating the substrate transfer container storage device shown in FIG. 1 .
3 is a side view for explaining the movement of the substrate transfer container storage device.
4 is a perspective view illustrating the substrate transfer container storage device shown in FIG. 3 .
5 is a side view for explaining another example of a substrate transfer container storage device according to embodiments of the present invention.
6 is a perspective view illustrating the substrate transfer container storage device shown in FIG. 5 .
7 is a side view for explaining the movement of the substrate transfer container storage device.
8 is a perspective view for explaining the substrate transfer container storage device shown in FIG.

In order to fully understand the configuration and effect of the present invention, preferred embodiments of the present invention will be described with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and may be embodied in various forms and various modifications may be made. However, it is provided so that the disclosure of the present invention is complete through the description of the present embodiments, and to fully inform those of ordinary skill in the art to which the present invention belongs, the scope of the invention. Those of ordinary skill in the art will understand that the inventive concept may be practiced in any suitable environment. Like reference numerals refer to like elements throughout the specification.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural, unless specifically stated otherwise in the phrase. As used herein, 'comprises' and/or 'comprising' refers to the presence of one or more other components, steps, operations and/or elements mentioned. or addition is not excluded.

When a face (or layer) is referred to herein as being on another face (or layer) or substrate, it may be formed directly on the other face (or layer) or substrate, or a third face (or between them) or layer) may be interposed.

In various embodiments of the present specification, the terms first, second, third, etc. are used to describe various regions, planes (or layers), etc., but these regions, planes are not limited by these terms. Can not be done. These terms are only used to distinguish one region or facet (or layer) from another region or facet (or layer). Thus, a face referred to as the first face in one embodiment may be referred to as the second face in another embodiment. Each embodiment described and illustrated herein also includes complementary embodiments thereof. Parts indicated with like reference numerals throughout the specification indicate like elements.

Further, the embodiments described herein will be described with reference to cross-sectional and/or plan views, which are ideal illustrative views of the present invention. In the drawings, thicknesses of films and regions are exaggerated for effective description of technical content. Accordingly, the shape of the illustrative drawing may be modified due to manufacturing technology and/or tolerance. Accordingly, the embodiments of the present invention are not limited to the specific form shown, but also include changes in the form generated according to the manufacturing process. For example, the etched region shown at a right angle may be rounded or have a predetermined curvature. Accordingly, the regions illustrated in the drawings have a schematic nature, and the shapes of the illustrated regions in the drawings are intended to illustrate specific shapes of regions of the device and not to limit the scope of the invention.

Unless otherwise defined, terms used in the embodiments of the present invention may be interpreted as meanings commonly known to those of ordinary skill in the art.

Hereinafter, the present invention will be described in detail by describing preferred embodiments of the present invention with reference to the accompanying drawings.

1 is a side view for explaining a substrate transfer container storage device including a substrate transfer container storage device according to embodiments of the present invention. FIG. 2 is a perspective view illustrating the substrate transfer container storage device shown in FIG. 1 . 3 is a side view for explaining the movement of the substrate transfer container storage device. 4 is a perspective view illustrating the substrate transfer container storage device shown in FIG. 3 . In the illustrated embodiments, the substrate transfer container storage device is installed in a building such as a clean room, and includes a Front Opening Unified Pod (FOUP) that accommodates articles such as semiconductor wafers or reticles between various workstations in a product manufacturing environment; It is configured to automatically store the same transported object.

For convenience of description, the positional relationship of the substrate transfer container storage device 100 is three orthogonal axes, that is, the first direction (D1) and the second direction (D2) parallel to the ceiling (c), and the height direction. The description will be based on the third direction D3.

1 and 2, the substrate transfer container storage device 100 is suspended from the ceiling (c) and disposed adjacent to the transport unit 200 for transporting the transport target object (f), and Returned goods (f) can be entered/exited.

The substrate transfer container storage apparatus 100 may include a frame 110 , at least one first shelf 122 , at least one second shelf 124 , and a first lever 130 . On the other hand, the substrate transfer container storage device 100 may be suspended from the ceiling (c) by a post or the like. The substrate transfer container storage device 100 is not limited to hanging from the ceiling (c), and may be fixed to a wall surface or a floor.

The frame 110 may have a plurality of storage spaces independent of each other. For example, the frame 110 may have first and second spaces 110a and 110b that are vertically separated therein. The second space 110b is located below the first space 110a, and the object f to be transported may be loaded in the first space 110a and the second space 110b. In detail, the frame 110 may include a first horizontal support part 112a , a second horizontal support part 112b , a third horizontal support part 112c , and a vertical support part 114 . The second horizontal support 112b may be disposed under the first horizontal support 112a, and the third horizontal support 112c may be disposed under the second horizontal support 112b. Vertical supports 114 may be disposed along edges of the first to third horizontal supports 112a, 112b, and 112c. In this case, the first to third horizontal supports 112a, 112b, and 112c may be fixed and supported by the vertical supports 114 . The first to third horizontal supports (112a, 112b, 112c) may have an open central portion thereof, and in detail, the first to third horizontal supports (112a, 112b, 112c) may have a square ring shape. have. The first space 110a is defined by the first horizontal support 112a, the second horizontal support 112b, and the vertical support 114, and the second space 110b includes the second horizontal support 112b, the third It may be defined by the horizontal support 112c and the vertical support 114 . The frame 110 may further include a fixing part 116 . The fixing part 116 may be disposed on one side of the first space 110a to connect the vertical support parts 114 adjacent to each other in the second direction D2 . The frame 110 has an open front side in the second direction D2 facing the conveying unit 200, and the object f to be transported through the open front face enters/receives the first and second spaces 110a and 110b. can be shipped out. Here, the front surface of the frame 110 is defined as a surface facing the carrying unit 200 .

At least one first shelf 122 may be disposed in the first space 110a. The first shelf 122 may be disposed on the bottom surface of the first space 110a, that is, on the second horizontal support part 112b and fixed to the second horizontal support part 112b. The transport target f may be loaded on the first shelf 122 .

At least one second shelf 124 may be disposed in the second space 110b. The second shelf 124 may be disposed on the bottom surface of the second space 110b, that is, the third horizontal support part 112c. The object f may be loaded on the second shelf 124 . The second shelf 124 may move horizontally in the second direction D2. That is, the second shelf 124 may move forward and backward from the second space 110b. In this case, the horizontally moved second shelf 124 may be positioned below the carrying unit 200 in the third direction D3 . The second shelf 124 may have a coupling protrusion 124a protruding in the first direction D1 on one side thereof. Horizontal movement of the second shelf 124 may be performed by the first guide rail 142 .

The first guide rail 142 may be disposed under the second space 110b. That is, the first guide rail 142 is disposed on the third horizontal support part 112c, and the position at which the guide rail 142 is disposed may be between the third horizontal support part 112c and the second shelf 124 . . In this case, the first guide rail 142 may be fixed to the third horizontal support 112c. The first guide rail 142 may provide a path through which the second shelf 124 moves horizontally. For example, the first guide rail 142 may extend in the second direction D2 , and the second shelf 124 is coupled to the first guide rail 142 and horizontally moves in the second direction D2 . can be Embodiments of the present invention disclose that the movement path of the second shelf 124 is provided by the first guide rail 142 , but the present invention is not limited thereto. The movement path of the second shelf 124 may be provided by a path providing mechanism such as a slide rail.

The first lever 130 may be disposed on one side of the first and second shelves 122 and 124 . Alternatively, the first lever 130 may be provided in plurality and disposed on one side of the first and second shelves 122 and 124 and the other side opposite to the one side. The first lever 130 may be disposed to be spaced apart from the first and second shelves 122 and 124 . This is to prevent the movement of the first lever 130 from interfering with the loading/unloading of the object f on the first shelf 122 . The first lever 130 may be connected to the inside of the frame 110 . The first lever 130 may include a rod-shaped body portion 132 and a first rotation shaft 134 coupled to the fixing portion 116 . In this case, the body 132 may rotate along the first rotational axis 134 orthogonal to the longitudinal direction thereof. The first lever 130 is not fixed to the frame 110 , and may rotate about an axis parallel to the first direction D1 while connected to the frame 110 . That is, the first rotation shaft 134 of the first lever 130 is rotatably fixed to the frame 110 and acts as a fulcrum point. 1 The lever 130 rotates in a circle. The first lever 130 may further include a first grip portion 136 disposed on one side thereof. The first grip portion 136 may be inclined upward from the body portion 132 , and may protrude onto the first shelf 122 . The other side of the first lever 130 may be connected to the second shelf 124 . For example, the first lever 130 may include a first connection link 138 disposed on the other side, and may be connected to one side of the second shelf 124 through the first connection link 138 . . In detail, the first connection link 138 has a groove shape extending in the longitudinal direction of the body portion 132 , and the coupling protrusion 124a of the second shelf 124 is inserted into the first connection link 138 . and can be moved The first connection link 138 may convert the rotational motion of the first lever 130 into a linear motion of the second shelf 124 . That is, when the first lever 130 rotates, the first lever 130 may push or pull the second shelf 124 in the second direction D2 through the first connection link 138 . .

The transport unit 200 may travel along the transport rail R and transport and load/export the transport target f. For example, the transport unit 200 may include an overhead hoist transport (OHT) system. The transport unit 200 may include a traveling mechanism 210 , an arm 220 , a lifting mechanism 230 , and a gripping mechanism 240 .

The traveling mechanism 210 may be coupled to the transfer rail R. The traveling mechanism 210 may move the transport unit 200 along the transport rail R. The traveling mechanism 210 may move forward of the frame 110 . Alternatively, the traveling mechanism 210 may move between various workstations according to a manufacturing process, that is, according to a command of a control system such as a Material Control System (MCS).

An arm 220 may be disposed under the travel mechanism 210 . The arm 220 may elongate and contract in the second direction D2 . When the transport unit 200 is traveling, the arm 220 may be contracted into the transport unit 200 so as not to interfere with the travel of the transport unit 200 . When the transport unit 200 stops in front of the frame 110 , the arm 220 is extended to move horizontally on the first shelf 122 . For example, the arm 220 may horizontally move toward the first lever 130 . Specifically, the arm 220 may be extended or contracted after pivoting toward the first lever 130 . 3 and 4 , the arm 220 may rotate the first lever 130 . For example, the arm 220 may extend or contract toward the first grip portion 136 of the first lever 130 located on one side of the substrate transfer container storage device 100 , and the first lever 130 . ) of the first grip portion 136 can be pushed or pulled. At this time, the first lever 130 rotates about the rotation shaft 134 , which may cause parallel movement of the second shelf 124 through the first connection link 138 . In the illustrated examples, it has been described that the arm 220 is elongated or contracted, but includes various horizontal moving means that can horizontally move to the left and right sides of the transport rail R along the second direction D2. can do.

Referring again to FIGS. 1 and 2 , the lifting mechanism 230 may be disposed under the traveling mechanism 210 . The lifting mechanism 230 may raise and lower the holding mechanism 240 disposed below it. For example, the lifting mechanism 230 may raise and lower the gripping mechanism 240 using a hoist member such as a belt, a wire, or a rope connected to the gripping mechanism 240 . For example, after the lifting mechanism 230 is moved into the first space 110a , the gripping mechanism 240 may be lowered or raised onto the first shelf 122 . For example, after the second shelf 124 protrudes from the second space 110b to the front of the substrate transfer container storage device 100 by the arm 220 , the lifting mechanism 230 removes the gripping mechanism 240 . 2 It can be lowered or raised onto the shelf 124 .

The gripping mechanism 240 can grip the transport target f. As an example, the gripping mechanism 240 may include a chuck. The gripping mechanism 240 may use a chuck to chuck or release a gripping portion such as a flange on the upper portion of the conveyed object f. By means of the arm 220 , the lifting mechanism 230 , and the gripping mechanism 240 , the transfer unit 200 transports the object f to the substrate transfer container at a position immediately below it and at the left and right sides of the transfer rail R . It can be exchanged with the storage device 100 .

According to another embodiment, the carrying unit 200 may further include a cover. The cover is disposed on both sides of the transport unit 200 along the first direction D1 and may be provided to prevent the transport target object f from falling.

The principle of carrying in (ie, mounting) and carrying out (ie, leaving) the object f on the second shelf of the substrate transfer container storage device will be described with reference to FIGS. 3 and 4 .

The operation of unloading the transport target f from the second shelf 124 is as follows. The transfer unit 200 traveling along the transfer rail R in the process stops at a position opposite to the substrate transfer container storage device 100 on which the transfer target f is loaded. The transport unit 200 extends the arm 220 to push the first lever 130 , and the first lever 130 rotates the second shelf 124 to a position immediately below the transport unit 200 . move horizontally. Thereafter, the lifting mechanism 230 lowers the gripping mechanism 240 to a predetermined height position, and the gripping mechanism 240 grips the conveyed object f. After the holding mechanism 240 grips the transport target f, the lifting mechanism 230 raises the transport target f together with the holding mechanism 240 to position it in the transport unit 200 . Subsequently, the arm 220 is contracted or retracted to pull the first lever 130 , and the first lever 130 may rotate the second shelf 124 to return the second shelf 124 into the second space 110b. Thereafter, the transfer unit 200 travels along the in-process transfer rail R toward the next transfer destination of the transfer target object f.

When the transport unit 200 loads the transport target object f onto the second shelf 124 , the transport target object f loading operation may be performed in a reverse order to the unloading operation described above. For example, the transport unit 200 traveling along the transport rail R in the process stops at a position opposite to the substrate transport container storage device 100 to which the transport target f is to be transported. The transport unit 200 extends the arm 220 to push the first lever 130 , and the first lever 130 rotates the second shelf 124 to a position immediately below the transport unit 200 . move it Thereafter, the lifting mechanism 230 lowers the gripping mechanism 240 holding the transfer object f to a predetermined height position, and the gripping mechanism 240 moves the transfer object f on the second shelf 124 . load the The lifting mechanism 230 raises the gripping mechanism 240 and positions it in the carrying unit 200 . Subsequently, the arm 220 is contracted or retracted to pull the first lever 130, and the first lever 130 rotates the second shelf 124 on which the object f is loaded into the second space ( 110b). After that, the transport unit 200 travels along the transport rail R in the process toward the next destination.

According to the present invention, a substrate transfer container storage device provides a storage space of multiple rows in a vertical direction having a first space and a second space below the first space. Accordingly, the amount of transported objects that can be loaded in the substrate transfer container storage device is increased, and space efficiency in the semiconductor manufacturing facility can be improved with a simple structure in which the storage space in the substrate transfer container storage device is vertically arranged.

In addition, as for the second shelf in the frame, the second shelf protrudes in front of the frame in order to carry in/out of the transport target. At this time, the first lever of the substrate transfer container storage device transmits an external driving force to the second shelf to induce the second shelf to protrude toward the front of the frame. In this configuration, according to the present invention, there is no need to install separate driving devices for protruding the second shelves on each of the second shelves of the second loading unit, only installing a lever having a simple structure in the substrate transfer container storage device Therefore, the transported object can be loaded in all the storage spaces of the double row.

Although an embodiment discloses a substrate transport container storage device that provides two rows of vertically stacked spaces, the present invention is not limited thereto. According to another embodiment, the substrate transfer container storage device according to embodiments of the present invention may provide two or more rows of loading space for the object to be transported. 5 is a side view for explaining another example of a substrate transfer container storage device according to embodiments of the present invention. 6 is a perspective view illustrating the substrate transfer container storage device shown in FIG. 5 . 7 is a side view for explaining the movement of the substrate transfer container storage device. 8 is a perspective view illustrating the substrate transfer container storage device shown in FIG. 7 . Hereinafter, overlapping description will be omitted for the sake of simplification of the description.

5 and 6 , the substrate transfer container storage apparatus 100 may further include a third shelf 126 and a second lever 150 .

The frame 110 may further have a third space 110c disposed below the second space 110b. An object f to be transported may be loaded in the third space 110c. In detail, the frame 110 may further include a fourth horizontal support 112d. The fourth horizontal support 112d may be disposed below the third horizontal support 112c, and the vertical supports 114 are disposed along the edges of the first to fourth horizontal supports 112a, 112b, 112c, and 112d. can be In this case, the first to fourth horizontal supports 112a, 112b, 112c, and 112d may be fixed and supported by the vertical supports 114 . The fourth horizontal support 112d may have an open center thereof, and in detail, the fourth horizontal support 112d may have a square ring shape. The third space 110c may be defined by the third horizontal support part 112c , the fourth horizontal support part 112d and the vertical support part 114 . The frame 110 has an open front surface in the second direction D2 facing the carrying unit 200, and the object f is transported through the open front surface in the first to third spaces 110a, 110b, and 110c. It can be in/out.

At least one third shelf 126 may be disposed in the third space 110c. The third shelf 126 may be disposed on the bottom surface of the third space 110c, that is, on the fourth horizontal support part 112d. The object f may be loaded on the third shelf 126 . The third shelf 126 may move horizontally in the second direction D2 . That is, the third shelf 126 may move forward and backward from the third space 110c. In this case, the horizontally moved position of the third shelf 126 may be below the transport unit 200 in the third direction D3 . The third shelf 126 may have a coupling protrusion 126a protruding in the first direction D1 on one side thereof. Horizontal movement of the third shelf 126 may be performed by the second guide rail 144 .

The second lever 150 may be disposed on one side of the first to third shelves 122 , 124 , and 126 . The second lever 150 may be disposed to be spaced apart from the first to third shelves 122 , 124 , and 126 . This is to prevent the movement of the second lever 150 from interfering with the loading/unloading of the transported object f onto the first and second shelves 122 and 124 and the horizontal movement of the second shelf 124 . it is for The second lever 150 may be connected to the inside of the frame 110 . The second lever 150 may include a rod-shaped body portion 152 and a second rotation shaft 154 coupled to the fixing portion 116 . At this time, the body 152 may rotate along the second rotational axis 154 orthogonal to its longitudinal direction. The second lever 150 is not fixed to the frame 110 , and may rotate about an axis parallel to the first direction D1 while connected to the frame 110 . That is, the second rotation shaft 154 of the second lever 150 is rotatably fixed to the frame 110 and acts as a fulcrum point. 2 The lever 150 is rotated in a circle. The second lever 150 may further include a second grip portion 156 disposed on one side thereof. The second grip portion 156 may be inclined upward from the body portion 152 and may protrude onto the first shelf 122 . The other side of the second lever 150 may be connected to the second shelf 124 . For example, the second lever 150 may include a second connection link 158 disposed on the other side, and may be connected to one side of the third shelf 126 through the second connection link 158 . . In detail, the second connection link 158 has a groove shape extending in the longitudinal direction of the body portion 152 , and the coupling protrusion 126a of the third shelf 126 is inserted into the second connection link 158 . and can be moved The second connection link 158 may convert the rotational motion of the second lever 150 into a linear motion of the third shelf 126 . That is, when the second lever 150 rotates, the second lever 150 may push or pull the third shelf 126 in the second direction D2 through the second connection link 158 . .

The transport unit 200 may include a traveling mechanism 210 , an arm 220 , a lifting mechanism 230 , and a gripping mechanism 240 .

The arm 220 may be disposed under the traveling mechanism 210 to elongate or contract in the second direction D2 . For example, the arm 220 may horizontally move toward the first lever 130 or the second lever 150 . Specifically, the arm 220 may be extended or contracted after pivoting toward the second lever 150 . 7 and 8 , the arm 220 may rotate the second lever 150 . For example, the arm 220 may extend or contract toward the second grip portion 156 of the second lever 150 located on one side of the substrate transfer container storage device 100 , and the second lever 150 . ) of the second grip portion 156 can be pushed or pulled. At this time, the second lever 150 rotates about the second rotation shaft 154 , which may cause parallel movement of the third shelf 126 through the second connection link 158 .

Above, embodiments of the present invention have been described with reference to the accompanying drawings, but those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing the technical spirit or essential features. You will understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

100: transport container storage device 110: frame
122: first shelf 124: second shelf
130: first lever 142: first guide rail
200: transport unit 210: travel mechanism
220: arm 230: elevating mechanism
240: gripping mechanism
f: object to be conveyed
c: ceiling
R: transport rail

Claims (10)

a plurality of shelves for accommodating the substrate transfer container, the plurality of shelves including a first shelf and a second shelf disposed below the first shelf;
a frame providing a space in which the substrate transfer container is loaded and supporting the first and second shelves; and
a first lever provided in the loading space to cross one side of the first and second shelves;
The first lever includes:
A rod-shaped body portion coupled to the inside of the frame, the body portion is configured to rotate along a first rotational axis orthogonal to the longitudinal direction of the body portion;
a first connection link provided at one end of the body portion and connected to the one side surface of the second shelf; and
a first grip part connected to the other end of the body part and extending on the first shelf;
The first lever rotates along the first rotational axis by an arm of a transfer unit for transferring the substrate transfer container to linearly move the second shelf in a horizontal direction,
The arm extends or contracts on the first shelf to rotate the first lever. The method of claim 1,
and the first connecting link is configured to convert a rotational motion of the first lever into a linear motion of the second shelf. The method of claim 1,
The second shelf is configured to horizontally move in a direction opposite to one direction in which an external force is applied to the first grip part. The method of claim 1,
The frame is:
a first horizontal support;
a second horizontal support portion disposed under the first horizontal support portion to support the first shelf from below;
a third horizontal support part disposed under the second horizontal support part to support the second shelf from below; and
and a vertical support part disposed along an edge of the first to third horizontal support parts to support the first to third horizontal support parts. 5. The method of claim 4,
Further comprising a first guide rail providing a path for the second shelf to move horizontally,
The first guide rail is coupled to the third horizontal support unit to support the second shelf. The method of claim 1,
The frame is a substrate transfer container storage device having one side open in a direction in which the second shelf moves horizontally. The method of claim 1,
a third shelf disposed below the second shelf; and
Further comprising a second lever provided in the loading space to cross one side of the first to third shelves,
The second lever includes:
A rod-shaped body portion coupled to the inside of the frame, the body portion is configured to rotate along a second rotational axis orthogonal to the longitudinal direction of the body portion;
a second connection link provided at one end of the body and connected to the one side of the third shelf; and
a second grip part connected to the other end of the body part;
The second lever rotates along the second rotation axis by an external force applied to the second grip portion to linearly move the third shelf in a horizontal direction. 8. The method of claim 7,
and the second connection link is configured to convert a rotational motion of the second lever into a linear motion of the third shelf. 8. The method of claim 7,
The frame is:
a first horizontal support;
a second horizontal support portion disposed under the first horizontal support portion to support the first shelf from below;
a third horizontal support part disposed under the second horizontal support part to support the second shelf from below;
a fourth horizontal support part disposed under the third horizontal support part to support the third shelf from below; and
and a vertical support part disposed along an edge of the first to fourth horizontal support parts to support the first to fourth horizontal support parts. 10. The method of claim 9,
Further comprising a second guide rail providing a path for the third shelf to move horizontally,
The second guide rail is coupled to the fourth horizontal support to support the third shelf.

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