KR102141197B1 - Carrier buffer apparatus - Google Patents

Abstract

A carrier buffer device, which is provided on the ceiling so as to be adjacent to the traveling rail on which the vehicle travels, and temporarily loads the carrier transported by the vehicle, is fixed to the ceiling and has a multi-layered frame for stacking the carriers in multiple layers. , Each layer provided on the bottom surface of each layer in the frame, and the rest of the layers except the plates supporting the carrier and the plates located at the lowest layer to open the bottom surface to form a passage for loading or discharging the carriers It may include a driving unit for moving the plates.

Description

Carrier buffer apparatus

The present invention relates to a carrier buffer device, and more particularly, to a buffer device for temporarily storing a carrier transported by a vehicle of the OHT.

In general, semiconductor process devices for manufacturing a semiconductor device are continuously arranged to perform various processes on a semiconductor substrate. The object for performing the semiconductor device manufacturing process may be provided to each semiconductor processing apparatus while being accommodated in a carrier, or recovered from each semiconductor processing apparatus using the carrier.

The carrier is transported by a vehicle of OHT (Overhead Hoist Transport). The vehicle transfers the carrier containing the object to a load port of the semiconductor processing apparatuses, and picks up the carrier containing the processed object from the load port and transports it to the outside.

When a carrier is present in the load pod of the semiconductor processing apparatus, a carrier buffer device for temporarily receiving a carrier transported by the vehicle is provided.

Since the carrier buffer device has a single layer structure, the number of carriers that can be loaded on the carrier buffer device is relatively small. In particular, when a mechanism for supplying nitrogen gas to the carrier is provided in the carrier buffer device, the number of carriers that can be loaded in the carrier buffer device can be further reduced.

The present invention provides a carrier buffer device capable of loading multiple carriers.

A carrier buffer device that is provided on the ceiling so as to be adjacent to a traveling rail on which the vehicle according to the present invention travels, and temporarily loads a carrier transported by the vehicle, is fixed to the ceiling, and has a multi-layer structure to stack the carrier in multiple layers. A frame having a, and provided on the bottom surface of each layer in the frame, the plate supporting the carrier and the bottom plate to open the bottom surface to form a passage for loading or discharging the carriers It may include a driving unit for moving the plates of the rest of the layer.

According to one embodiment of the present invention, the driving unit may rotate the plates in a direction other than the front of the frame through which the carrier is supplied and discharged.

According to one embodiment of the present invention, the driving unit may horizontally move the plates toward the front of the frame through which the carrier is supplied and discharged, or toward the rear opposite to the front.

A carrier buffer device that is provided on the ceiling so as to be adjacent to a traveling rail on which the vehicle according to the present invention travels, and temporarily loads a carrier transported by the vehicle, is fixed to the ceiling, and has a multi-layer structure to stack the carrier in multiple layers. A frame having a, and is provided on the bottom surface of each layer in the frame, the plate for supporting the carrier and the carrier to load on the plates, or to discharge the carrier loaded on the plates It may include a drive for horizontally moving the plates so that they protrude toward the front of the frame.

According to one embodiment of the present invention, plates of the top layer among the plates may be fixed so as not to protrude toward the front of the frame.

The carrier buffer device according to the present invention can open the bottom surface by forming the frame in multiple layers and moving the plates of the remaining layers except for the plates located in the bottom layer. Since a passage for loading or discharging the carriers is formed through the open bottom surface, the carriers can be stacked in multiple layers, or the carriers stacked in multiple layers can be easily discharged. Therefore, the number of carriers that can be loaded in the carrier buffer device can be increased.

In addition, the carrier buffer device may form the frame in multiple layers, and protrude the plates of each layer toward the front of the frame to load or discharge the carriers. Therefore, the carrier buffer device may load the carrier on a specific plate or discharge the carrier loaded on the specific plate.

In addition, since a plurality of carriers can be loaded in the carrier buffer device, the carrier buffer device can be sufficiently loaded even if a mechanism for supplying nitrogen gas to the carrier is provided.

1 is a side view for explaining a carrier buffer device according to an embodiment of the present invention.
FIG. 2 is a side view for explaining another example of the driving unit illustrated in FIG. 1.
3 is a side view for explaining another example of the driving unit shown in FIG. 1.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. The present invention can be applied to various changes and may have various forms, and specific embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific disclosure form, and it should be understood that all modifications, equivalents, and substitutes included in the spirit and scope of the present invention are included. In describing each drawing, similar reference numerals are used for similar components. In the accompanying drawings, the dimensions of the structures are shown to be enlarged than actual in order to clarify the present invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from other components. For example, the first component may be referred to as a second component without departing from the scope of the present invention, and similarly, the second component may be referred to as a first component.

Terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprises" or "have" are intended to indicate the presence of features, numbers, steps, actions, elements, parts or combinations thereof described in the specification, one or more other features. It should be understood that the existence or addition possibilities of fields or numbers, steps, actions, components, parts or combinations thereof are not excluded in advance.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person skilled in the art to which the present invention pertains. Terms, such as those defined in a commonly used dictionary, should be interpreted as having meanings consistent with meanings in the context of related technologies, and should not be interpreted as ideal or excessively formal meanings unless explicitly defined in the present application. Does not.

1 is a side view for explaining a carrier buffer device according to an embodiment of the present invention.

Referring to FIG. 1, the carrier buffer device 100 is provided on a ceiling so as to be adjacent to a traveling rail on which the vehicle travels, and temporarily loads the carrier 10 transferred by the vehicle. The carrier 10 may be FOUP, FOSB, magazine, or the like.

The carrier buffer device 100 includes a frame 110, a plate 120 and a driver 130.

The frame 110 is fixed to the ceiling. For example, a mold bar is provided on the ceiling, and fixing members fix the frame 110 to the mold bar. The mold bars may have a parallel shape or a lattice shape. Examples of the fixing members include computerized bolts and turn buckles. The fixing members may be fixed directly to the ceiling.

The frame 110 has a substantially hexahedral shape, and has a multi-layer structure. Accordingly, the frame 110 may stack the carriers 10 in multiple layers.

The plates 120 are respectively provided on the bottom surface of each layer in the frame 110 and support the carriers 10. The plate 120 has a substantially rectangular plate shape. The size of the plate 120 may be larger than the size of the carrier 10. Therefore, the plates 120 can stably support the carriers 10.

On the other hand, although not shown, each plate 120 may be provided with a plurality of guides and reflectors.

The guides are provided along the edges of each plate 120. The guides guide the carrier 10 loaded on each plate 120. Therefore, the carrier 10 may be accurately seated at a predetermined reference position on each plate 120.

The reflector is provided at the rear end of each plate 120 and is disposed to face the vehicle. The reflector reflects light emitted from the vehicle's light sensor. The reflector may be used to check whether the carrier 10 is positioned on each plate 120.

The driving unit 130 is provided to be connected to the plates 120 of the other layers except for the plates 120 positioned in the lowermost layer among the plates 120. The driving unit 130 may open or block the bottom surface of the remaining layers by rotating the plates 120 of the remaining layers.

Specifically, the driving unit 130 rotates the plates 120 of the remaining layers in a horizontal state by 90 degrees, or 90 degrees of the plates 120 of the remaining layers in the vertical state in the horizontal state. Can also rotate. Plates 120 of the remaining layer are rotatably hinged to the frame 110, and the driving unit 130 rotates the plates 120 around the hinge axis of the plates 120. For example, the driving unit 130 may be a rotating motor.

When the plates 120 of the remaining layer rotate toward the front of the frame 110 where the carrier 10 is supplied and discharged, since the plates 120 of the remaining layer become the vertical state, the carrier ( 10) can interfere with the supply and discharge. Accordingly, the driving unit 130 may rotate the plates 120 of the remaining layers in a direction other than the front.

When the plates 120 are rotated to be in the vertical state, since the plates 120 open the bottom surface, a passage for loading or discharging the carriers 110 may be formed. In addition, when the plates 120 are rotated to be in the horizontal state, the plates 120 may block the bottom surface so that the carriers 110 can be loaded on the plates 120.

Meanwhile, a space for the plates 120 to rotate is required in the remaining layers of the frame 110 except for the lowermost layer. Therefore, the height of the remaining layers in the frame 110 may be relatively high.

Since the plates 120 do not need to rotate in the lowermost layer in the frame 110, the height of the lowermost layer in the frame 110 may be relatively low.

Hereinafter, a process of loading the carriers 10 in the carrier buffer device 100 and a process of discharging the carriers 10 from the carrier buffer device 100 will be described.

In order to load the carriers 10 in the carrier buffer device 100, first, the bottom surfaces are opened by rotating the plates 120 of the remaining layer 90 degrees to a vertical state. The carrier 10 is loaded on the plates 120 of the lowest layer through the bottom surface of the vehicle.

When the carrier 10 is loaded on the plates 120 of the lowermost layer, the plates 120 of the second lowermost layer are rotated 90 degrees to be horizontal, thereby blocking the bottom surface of the second lowermost layer, and the vehicle is opened. The carrier 10 is loaded on the plates 120 of the second lowest layer through the bottom surface. Subsequently, the plates 120 of each layer are sequentially rotated 90 degrees to a horizontal state from the third lowest layer to the top layer to block the bottom surface of each layer, and the carrier to the plates 120 blocking the bottom surface (10) The process of loading is repeated.

As described above, by loading the carriers 10 sequentially from the lowermost plate 120 to the uppermost plate 120, all of the carriers 10 on each layer of the carrier buffer device 100 Can be loaded.

In order to discharge the carriers 10 stacked in the carrier buffer device 100 in multiple layers, the vehicle first discharges the carriers 10 stacked on the top layer.

When the carriers 10 of the uppermost layer are discharged, the bottom surfaces are opened by rotating the plates 120 of the uppermost layer 90 degrees to be in a vertical state. The carrier 10 of the second top layer is discharged through the bottom surface of the vehicle.

Subsequently, the plates 120 of each layer are sequentially rotated 90 degrees from the second highest layer to the lowest layer to open the bottom surface of each layer and discharge the carriers 10 through the opened bottom surface. Repeat the process.

As described above, by sequentially discharging the carriers 10 from the carriers 10 loaded on the uppermost plates 120 to the carriers 10 loaded on the lowermost plates 120, All of the carriers 10 may be discharged from each layer of the carrier buffer device 100.

FIG. 2 is a side view for explaining another example of the driving unit illustrated in FIG. 1.

Referring to FIG. 2, the driving unit 130 is provided to be connected to the plates 120 of the other layers except for the plates 120 positioned in the lowermost layer among the plates 120. The driving unit 130 horizontally reciprocates the plates 120 of the remaining layer to the front or rear opposite to the front. As the plates 120 of the remaining layers move horizontally, the bottom surface of the remaining layers may be opened or blocked.

Specifically, the driving unit 130 moves the plates 120 of the remaining layers toward the front or moves toward the rear such that the plates 120 of the remaining layers protrude from the frame 110 or the It may be accommodated in the frame 110. Although not shown, the frame 110 may be provided with guide members to guide the forward or backward movement of the plates 120 of the remaining layer. Examples of the guide members include guide rails, LM guides, and the like.

The driving unit 130 may include a rotary motor and a ball screw for converting the rotary motion of the rotary motor into linear motion, or may include a linear motor or a cylinder.

When the plates 120 move toward the front or the rear and protrude from the frame 110, since the plates 120 open the bottom surface, passages for loading or discharging the carriers 110 Can form. In addition, when the plates 120 move toward the front or the rear and are accommodated in the frame 110, the plates 120 block the bottom surface, so that the carriers 110 on the plates 120 are blocked. ) Can be loaded.

Meanwhile, when the plates 120 are horizontally moved in the remaining layers except the lowest layer in the frame 110, the height of each layer in the frame 110 may be relatively low. Therefore, the overall height of the frame 110 can be lowered. Therefore, the volume of the carrier buffer device 100 can be reduced.

Loading the carriers 10 in the carrier buffer device 100 or discharging the carriers 10 from the carrier buffer device 100 except that the bottom surface is opened by horizontally moving the plates 120 A detailed description of the process of loading the carriers 10 in the carrier buffer device 100 with reference to FIG. 1 or discharging the carriers 10 from the carrier buffer device 100 Is substantially the same as

3 is a side view for explaining another example of the driving unit shown in FIG. 1.

Referring to FIG. 3, the driving unit 130 is provided to be connected to the plates 120 of the other layers except for the plates 120 located on the uppermost layer among the plates 120. The driving unit 130 horizontally reciprocates the plates 120 of the remaining layer so that the plates 120 of the remaining layer protrude toward the front of the frame 110 or are accommodated in the frame 110. In the state in which the plates 120 of the remaining layer protrude, the vehicle may load the carrier 10 on the plates 120 or discharge the carrier 10 loaded on the plates 120. have.

The driving unit 130 may include a rotary motor and a ball screw for converting the rotary motion of the rotary motor into linear motion, or may include a linear motor or a cylinder.

Although not shown, the frame 110 may be provided with guide members to guide the forward movement of the plates 120 of the remaining layer. Examples of the guide members include guide rails, LM guides, and the like.

When the plates 120 move toward the front and protrude from the frame 110, the vehicle loads the carriers 10 on the plates 120 or the plates 120 loaded on the The carriers 10 can be discharged. When loading or discharging of the carriers 10 is completed, the plates 120 may move toward the rear and be accommodated inside the frame 110.

In the above, it has been described that the plates 120 of the uppermost layer do not move horizontally, but the driving unit 130 may also be provided in the plates 120 of the uppermost layer. Accordingly, the carriers 10 may be loaded or discharged while the top-level plate 120 protrudes from the frame 110.

Meanwhile, when the plates 120 are horizontally moved in the remaining layers except the lowest layer in the frame 110, the height of each layer in the frame 110 may be relatively low. Therefore, the overall height of the frame 110 can be lowered. Therefore, the volume of the carrier buffer device 100 can be reduced.

In order to load the carriers 10 in the carrier buffer device 100, first, the carriers 10 are loaded onto the plates 120 of the uppermost layer, and then the plates of the lowest layer starting from the plates 120 of the second uppermost layer. The carriers 10 may be stacked by sequentially protruding up to 120.

Alternatively, after loading the carriers 10 by sequentially protruding from the plates 120 of the lowest layer to the plates 120 of the second top layer, the carriers 10 are placed on the plates 120 of the top layer. You can load them.

In order to discharge the carriers 10 to the carrier buffer device 100, first, the carriers 10 are discharged from the plates 120 of the top layer, and then the plates of the bottom layer from the plates 120 of the second top layer. The carriers 10 may be discharged by sequentially protruding up to 120.

Unlike this, the carriers 10 are ejected by sequentially protruding from the plates 120 of the lowest layer to the plates 120 of the second top layer, and then the carriers 10 from the plates 120 of the top layer. Can release them.

Meanwhile, when the plates 120 of the uppermost layer are provided to be horizontally movable, the carriers 10 may be loaded or discharged by protruding the plates 120 of the uppermost layer.

In addition, since the plates 120 of the layers other than the uppermost layer protrude from the frame 110 in the carrier buffer device 100, the plates 120 of the remaining layers are sequentially protruded, and the carriers 10 are There is no need to load or discharge. That is, the carriers 10 may be loaded or discharged by randomly projecting the plates 120 of the remaining layer. Therefore, the carrier buffer device 100 may load the carrier 10 on a specific plate 120 or discharge only the carrier 10 loaded on the specific plate 120.

As described above, since the carrier buffer device according to the present invention can stack the carriers in multiple layers, the number of carriers that can be loaded on the carrier buffer device can be increased.

Although described above with reference to the preferred embodiments of the present invention, those skilled in the art may variously modify and change the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. You will understand that you can.

100: carrier buffer device 110: frame
120: plate 130: drive unit
10: carrier

Claims (5)

In the carrier buffer device is provided on the ceiling so as to be adjacent to the traveling rail on which the vehicle travels, the carrier buffer device for temporarily loading the carrier transported by the vehicle,
The carrier buffer device,
A frame fixed to the ceiling and having a multi-layer structure to stack the carrier in a multi-layer structure;
Plates respectively provided on the bottom surface of each layer in the frame, supporting the carrier; And
And a driving unit for moving the plates of the remaining layers except for the plates located at the bottom layer to open the bottom surface to form a passage for loading or discharging the carriers. The carrier buffer device according to claim 1, wherein the driving unit rotates the plates in a direction other than the front of the frame through which the carrier is supplied and discharged. The carrier buffer device of claim 1, wherein the driving unit horizontally moves the plates toward the front of the frame through which the carrier is supplied and discharged, or toward a rear opposite to the front. delete delete

Images