JP5401842B2 - Transport system - Google Patents

Description

  The present invention relates to a technical field of a transport system that transports a load such as a FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing semiconductor elements, for example, by transport means such as a vehicle.

  As this type of transport system, for example, a conveyor and a FOUP advance plate assembly having a load port are provided, and the FOUP can be transferred to and from the conveyor by moving the load port up and down by the FOUP advance plate assembly. There is a transport system (see Patent Document 1).

International Publication WO2006 / 091593

  However, according to Patent Document 1 described above, when the FOUP is transported only by the conveyor and the lift distance of the load port is relatively long, one FOUP is transferred to and from the conveyor. Even if it is carried out quickly, the transfer of a large number of FOUPs has a technical problem that the ascending / descending time increases in proportion to the number of loads and the conveyance efficiency decreases.

  The present invention has been made in view of, for example, the above-described problems, and an object of the present invention is to provide a transport system that can efficiently transport a load such as FOUP with a simple configuration.

  In order to solve the above problems, the first transport system of the present invention transports one load along the first route and the first transfer capable of transferring the one load transported along the first route. A transport vehicle having a loading means, a second route passing below the first route on the side of the first route in at least one place, and the same or different from the one load on the second route A transport means for transporting the load of the load, a port disposed below the second path at the one location, and the other load transported at least at the one location between the ports in a lateral transfer system. The first transfer means is capable of transferring the one load to and from the port by a vertical transfer or a horizontal transfer method.

  According to the first transport system of the present invention, the first or second transfer means can transfer the load between the transport vehicle or the transport means and the port. Here, the “port” is a buffer such as a temporary placement shelf on which the load is placed at least temporarily when the load such as FOUP is transferred. Such a port may be, for example, a loading / unloading port provided near a loading / unloading port of a stocker or the like so that it can be placed when loading / unloading a stocker or the like. The transport vehicle is, for example, an overhead traveling vehicle, and travels along a first route such as a rail laid on the ceiling, for example. A conveyance vehicle has a main-body part and a 1st transfer means, for example. Here, the “first transfer means” includes, for example, a grip mechanism that holds a load such as FOUP and a hoist mechanism that raises and lowers the grip mechanism. The main body unit accommodates one load together with the grip mechanism and the hoist mechanism and has a traveling function for traveling along the first route. For example, the first transfer means can transfer one load to and from the port by a vertical transfer method at a transfer position corresponding to the port. Here, the “vertical transfer method” is a method for transferring one load to, for example, a port located vertically below the transport vehicle stopped at the transfer position, and can be transferred only by a hoist mechanism. . Alternatively, the first transfer means further includes, for example, a slider mechanism for projecting the hoist mechanism and the grip mechanism from the main body portion in the lateral direction. For example, at the transfer position, one load is ported by the horizontal transfer method. Can be transferred to and from. Here, the “lateral transfer system” is a system for transferring a single load to a port below the transport vehicle, for example, on the side of the transport vehicle stopped at the transfer position. It can be transferred by a mechanism and a slider mechanism.

  Regarding transfer between the transport vehicle and the port, when one load is transferred from the transport vehicle to the port, for example, the first load is first transported to the transfer position by the transport vehicle. Next, the one load held by the grip mechanism is moved to a position where it can be transferred to the port (that is, directly above the port) by the hoist mechanism or / and the slider mechanism in the transport vehicle. Thereafter, one load is released from the grip mechanism and placed (i.e., transferred) on the port.

  When one load is transferred from the port to the transport vehicle, for example, the transport vehicle is first moved to the transfer position, and the grip mechanism is moved onto the port by the hoist mechanism or / and the slider mechanism. It is moved to a position where one load can be held. Next, the one load is held by the grip mechanism and transferred to the transport vehicle.

  The conveyance means which concerns on a 1st conveyance system is conveyor mechanisms, such as a roller conveyor and a belt conveyor, for example, and conveys other loads, such as FOUP, on a 2nd path | route. Here, the “other load” is the same as or different from the one load. The second transfer means has, for example, a grip mechanism, a hoist mechanism, and a slider mechanism, similar to the first transfer means. The load can be transferred to and from the port by the horizontal transfer method. Here, the “lateral transfer method” is a method for transferring another load to, for example, a port below the second path at the transfer position, and can be transferred by a hoist mechanism and a slider mechanism. is there. The second transfer means is provided at the transfer position, for example.

  Regarding the transfer between the transfer means and the port, when another load is transferred from the transfer means to the port, for example, the transfer means first transfers the other load to the transfer position. Next, the grip mechanism is moved to a position capable of holding another load on the second path by the hoist mechanism or / and the slider mechanism in the second transfer means. Next, the other load is held by the grip mechanism. Next, another load held by the grip mechanism is moved to a position where it can be transferred to the port (ie, directly above the port). Thereafter, another load is released from the grip mechanism and placed (i.e., transferred) on the port.

  When another load is transferred from the port to the transport means, for example, the grip mechanism can hold the other load on the port first by the hoist mechanism or / and the slider mechanism in the second transfer means. Moved to the correct position. Next, the other load is held by the grip mechanism. Next, the hoist mechanism and / or the slider mechanism moves the other load held by the grip mechanism to a position where it can be transferred to the transport means (that is, directly above the second path corresponding to the transfer position). Thereafter, another load is released from the grip mechanism and placed (that is, transferred) on the second path.

  The first transfer system not only transfers the load between the above-described transfer vehicle and the port or between the transfer means and the port, but also transfers the load between the transfer vehicle and the transfer means via the port. It is also possible to do this.

  Regarding the configuration of the first and second paths and the ports, the second path passes below the first path on the side of the first path at least at one place. The port is located below the second route at the one place, and specifically, for example, is arranged vertically below the first route at the one place. Here, “one place” is, for example, the “transfer position” described above. By configuring the first and second routes and the ports in this way, a large number of loads are transported through two routes (that is, the first and second routes), and a transport vehicle and A load can be transferred between the transporting means.

  In addition, when a port is arrange | positioned vertically downward of the conveyance vehicle which stopped at the transfer position, for example, since it can transfer by a vertical transfer system, a conveyance vehicle is not provided with a slider mechanism. For this reason, compared with the case where slider mechanisms, such as an overhead hoist, are equipped, a conveyance speed can be increased.

  As described above, a large number of loads are transported along the first and second routes, and the loads are transferred between the transport vehicle and the transport means via the ports by the first and second transfer means. Since it is performed quickly, the load can be efficiently conveyed with a relatively simple configuration.

  In one aspect of the first transport system of the present invention, the second transfer means is laid above the second path at the one location.

  According to this aspect, for example, when another load is placed on the second path in the transfer position, the other load placed is quickly held by the grip mechanism in the second transfer means. Transfer time can be shortened.

  In another aspect of the first transport system of the present invention, the second transfer means includes a holding means capable of holding the other load to be transported, and the holding means above the second path and the second Horizontal movement means that can move horizontally between the lower portions of one path, and elevating means that can move the load held by the holding means moved below the first path.

  According to this aspect, the second transfer means includes, for example, the holding means that is the grip mechanism described above, the horizontal movement means that is the slider mechanism described above, and the lifting means that is the lift mechanism described above, for example. For example, as an initial setting, these mechanisms are arranged above the second path at the transfer position except during transfer.

  The port is disposed, for example, below the first path at the transfer position, and the second transfer means is laid, for example, above the second path at the transfer position. In this case, in order to transfer another load from the transport means to the port, the holding means is lowered to a position where the other load on the second path can be held by the elevating means, for example. Other loads on the two paths are held. Next, the holding means is moved from above the second path to below the first path by the horizontal movement means. Next, the lifting / lowering means moves the holding means to a position where it can be transferred to the port (that is, directly above the port). Thereafter, another load is released from the holding means and placed (ie, transferred) on the port.

  In order to transfer another load from the port to the transport means, for example, the holding means is moved below the first path by the lifting means and the horizontal movement means, and other loads on the port can be held. To a new position (ie, just above the port). Next, another load on the port is held by the holding means. Next, the holding means is moved above the second path at the transfer position by the elevating and lowering means and the position at which the transfer can be transferred to the second path at the transfer position (that is, the second path). (Just above). Thereafter, another load is released from the holding means and placed (that is, transferred) on the second path.

As described above, by configuring the second transfer means, transfer by the horizontal transfer method can be performed between the transport means (in other words, the second transfer means) and the port.

  In another aspect of the first transport system of the present invention, the port is configured by a mounting surface on a lifter that can be raised and lowered.

  According to this aspect, the port is a placement unit including a placement surface for placing a load, for example. The lifter includes, for example, the placement portion, a rail, and an actuator, and moves the placement portion (that is, the port) up and down along the rail extending in parallel with the vertical direction by driving the actuator. Such a lifter, for example, moves up and down along a rail provided along the side surface of the stocker, and is positioned at a position facing one of a plurality of loading / unloading ports arranged vertically on the side surface or the side surface. It is possible to stop at a position opposite to the loading / unloading port provided in one.

  Regarding the operation of the lifter, specifically, for example, when another load is transferred from the second transfer means to the port, for example, the actuator is first driven to move the port to the uppermost arrangement position along the rail. Moved. Next, the holding means holding another load is moved to a position where it can be transferred to the port at the uppermost arrangement position (that is, directly above the port) by the elevating means and the horizontal moving means. The transferable position is set so that the distance moved by the elevating means is the shortest. Thereafter, another load is released from the holding means and placed (ie, transferred) on the port. Moved to the height corresponding to the port.

  When another load is transferred from the port to the second transfer means, for example, the actuator is first driven so that the port on which the other load is placed reaches the highest arrangement position along the rail. Moved. Thereafter, the holding means is moved to a position where the other load on the port at the uppermost arrangement position can be held (that is, directly above the port) by the lifting means and the horizontal moving means. Next, another load on the port is held by the holding means and transferred to the second transfer means.

  As described above, by causing the port to function along with the transfer, the moving distance of the load transferred between the second transfer means or the transport vehicle and the port is minimized, and the transfer time is shortened. can do.

  In this aspect, a third path that passes below the second path is further provided at least in one place, and the third path includes a mouth that allows the lifter to pass downward when the lifter is lowered. A notch may be provided, and may include a support portion that receives the one load or the other load placed on the lifter as the lifter passes.

  If comprised in this way, a lifter will pass a load (namely, one load or another load) between support parts by passing a support part from the upper part to the lower part through a mouth or a notch, for example. Transfer. Specifically, for example, a lifter (in practice, a placement part (ie, a port)) on which a load is placed moves below the support part through a mouth or a cut. Is done. Along with this, the load placed on the lifter is supported by the support portion instead of the lifter. In this way, with a relatively simple configuration in which the lifter is moved downward, a load can be efficiently transferred from the port to the third route by a DLT (Direct Load Transport) method. Moreover, it is also possible to efficiently transfer the load from the third route to the lifter (and further to the port or the like) by the DLT method by the reverse operation of the operation of transferring the load to the third route described above.

  In an aspect in which the support portion is included in the third path, the lifter and the support section are configured so that the lifter is in the third path in a state where the one load or the other load is placed on the support section. The one load or the other load placed on the support portion as it passes through the mouth or the notch from below to above may be configured to be received by the lifter.

  If comprised in this way, a lifter will pass the support part in the state which loaded the load (namely, one load or another load) from the lower part upwards, for example via a mouth or a notch, The load is transferred from the support part. Specifically, for example, a lifter located below the support portion is moved above the support portion through the mouth or the slit. Accordingly, the load placed on the support portion is supported by the lifter instead of the support portion. As described above, the load can be transferred more efficiently by the DLT method by transferring to and from the third path with a relatively simple configuration such as moving the lifter up and down.

  In an aspect in which the port is configured by a mounting surface in a lifter, the lifter is disposed adjacent to a track in which the lifter moves up and down, and the stocker for storing the one or other load and the one or other load And at least one of the processing devices for performing a predetermined type of processing, wherein the at least one device and the lifter are configured to operate at least when the lifter stops at a position for entering and exiting the at least one device. The one or the other load may be configured to be transferable between one device and the lifter.

  If comprised in this way, the transfer surface for transferring a load between the lifter is set in at least one of the stocker and the processing device, for example, adjacent to the entry / exit position. At least one of the devices or lifters includes, for example, an outside / inside moving means. The outer / inner moving means can transfer a load (that is, one load or another load), for example, between at least one device and the lifter. The outer / inner moving means is, for example, a rotation mechanism that rotates the placement surface of the lifter, a slide mechanism that slides, or a robot arm that can be transferred between the placement surface and the transfer surface of at least one of the devices. Is provided.

  When at least one of the devices is a stocker and a load is transferred from the lifter to the stocker, for example, the lifter on which the load is first placed (actually the placement surface) reaches the entry / exit position. Moved up and down. Next, the placement surface is rotated by, for example, an outer / inner movement means that is a rotation mechanism, and the load on the placement surface is moved (that is, transferred) to the transfer surface in the stocker.

  Further, when a load is transferred from the stocker to the lifter, for example, the lifter (in practice, the placement surface) that is in an empty state is first moved up and down to the entry / exit position. Next, the load placed on the transfer surface in the stocker is transferred to the lifter by an outer / inner moving means, for example, a robot arm.

  As described above, the load can be transferred efficiently and quickly between at least one device and the lifter, for example, by the outer / inner moving means.

  In order to solve the above-mentioned problem, the second transport system of the present invention has a first support part capable of supporting a load from the bottom side thereof, and is movable up and down, and (i) passes above the movable port. A first transport system capable of transporting a single load along a first route and transferring the transported load to and from the movable port in a vertical transfer or horizontal transfer system; and (ii) ) At least one place transports another load that is the same as or different from the one load on a second path that passes below the first path on the side of the first path, and transports the load at least at one position. At least one of the second transfer systems capable of transferring other loads to and from the movable port in a lateral transfer manner, and a third path passing below the first or second path at least at one location And when the movable port descends in the third path The first load is placed on the first support part as the first support part passes therethrough. Or the 2nd support part which receives another load is included.

  According to the second transport system of the present invention, for example, a load can be transferred between the first transport system or the second transport system or the third route and the movable port. Here, the “movable port” is a buffer such as a temporary placement shelf on which the load is placed at least temporarily when a load such as FOUP is transferred. The movable port is, for example, a lifter having a first support portion, a rail, and an actuator, and moves the first support portion up and down along the rail extending in parallel with the vertical direction by driving the actuator. Such a movable port may be, for example, a loading / unloading port provided in the vicinity of a loading / unloading port of the stocker or the like so that it can be placed when loading / unloading the stocker or the like. In this case, the lifter, which is a movable port, moves up and down along a rail provided along the side surface of the stocker, for example, and is opposed to one of a plurality of loading / unloading ports arranged vertically on the side surface. It is possible to stop at a position opposite to the entrance / exit provided on the side surface.

  The first transport system is, for example, an OHT (Overhead Hoist Transport) (that is, an overhead traveling transport vehicle), and travels along a first route such as a rail laid on the ceiling, for example. In this case, the first transport system includes, for example, a main body portion and first transfer means. Here, the “first transfer means” includes, for example, a grip mechanism that holds a load such as FOUP and a hoist mechanism that raises and lowers the grip mechanism. The main body unit accommodates one load together with the grip mechanism and the hoist mechanism and has a traveling function for traveling along the first route. The first transfer means can transfer one load to and from the port by a vertical transfer method at a transfer position corresponding to the movable port, for example. Here, the “vertical transfer system” can transfer one load between the first transport system and the movable port, for example, only by a hoist mechanism. Further, the first transfer means further includes, for example, a slider mechanism for projecting the hoist mechanism and the grip mechanism from the main body portion in the horizontal direction. For example, at the transfer position, one load is ported by the horizontal transfer method. Can be transferred to and from. Here, in the “lateral transfer system”, one load can be transferred between the first transport system and the movable port by, for example, a hoist mechanism and a slider mechanism.

  The second transport system includes, for example, a transport unit and a second transfer unit. The conveying means is a conveyor mechanism such as a roller conveyor or a belt conveyor, and conveys another load such as FOUP on the second path. Here, the “other load” is the same as or different from the one load. The second transfer means has, for example, a grip mechanism, a hoist mechanism, and a slider mechanism, similar to the first transfer means, and is transported to the transfer position at the transfer position corresponding to the port, for example. Can be transferred to and from the port by the horizontal transfer method. Here, in the “lateral transfer system”, another load can be transferred between the second transport system and the movable port, for example, by a hoist mechanism and a slider mechanism.

  The third path is one element constituting, for example, DLT (Direct Load Transport), and includes, for example, a transport unit. The conveying means in the third path is a conveyor mechanism such as a roller conveyor or a belt conveyor, for example, and includes a second support portion, and loads (that is, one load or another load) on the third path. Transport.

  The first and second support parts are configured to support different parts (typically, the central part and the peripheral part) on the bottom surface of the load, for example, and support the load on either side. Is possible.

  The 1st support part in a movable port transfers a load between the 2nd support parts by passing the 2nd support part from the upper part to the lower part via a mouth or a notch. Specifically, for example, the first support part on which the load is placed passes through the mouth or the cut and is moved below the second support part. Accordingly, the load placed on the first support portion is supported by the second support portion instead of the first support portion. As described above, for example, with the relatively simple configuration of moving the lifter downward, it is possible to efficiently transfer from the movable port to the third path by the DLT method. Moreover, it is also possible to transfer a load efficiently from a 3rd path | route to a movable port by a DLT system by the reverse operation | movement of the operation | movement which transfers a load to the 3rd path | route mentioned above.

  Regarding the configurations of the first to third paths and the movable port, the first path is above the movable port, and specifically passes, for example, vertically above the movable port. The second route passes below the first route on the side of the first route at least at one place. The third path is disposed at least at one location below the first and second paths, specifically, for example, vertically below the movable port through which the first path passes. Here, “one place” is, for example, the “transfer position” described above. By configuring the first to third paths and the movable port in this way, a large number of loads are transported through three paths (that is, the first to third paths) and the first through the movable port. A load can be transferred between the transport system, the second transport system, and the third path.

  In addition, when the 1st path | route is arrange | positioned vertically above a movable port, for example, since it can transfer by a vertical transfer system, a conveyance vehicle is not provided with a slider mechanism. For this reason, compared with the case where slider mechanisms, such as an overhead hoist, are equipped, a conveyance speed can be increased.

  The first to third paths and the movable port are configured as described above, for example. In this case, in order to transfer the load from the first path to the third path via the movable port, for example, first, the first support part in the movable port is moved to the uppermost arrangement position along the rail, for example. The Next, the load transferred along the first path is held by the first transfer means in the first transfer system, and transferred to the first support portion at the uppermost arrangement position by the vertical transfer method. . Next, when the first support part in a state where the load from the first path is placed is moved below the second support part through the mouth or the cut in the third path, The load is supported (that is, transferred) by the second support portion instead of the first support portion.

  In order to transfer the load from the third path to the second path via the movable port, for example, first, the first support part in the movable port is moved below the second support part in the third path. . Next, the load is transported to the second support portion by the transport means in the third path. Next, when the first support part is moved above the second support part through the mouth or the notch, the load placed on the second support part is replaced with the first support part instead of the second support part. It is supported (that is, transferred) by the support part. Next, a 1st support part is moved to the highest arrangement position along a rail. Next, the load on the first support is held by the second transfer means in the second transfer system, and is transferred to the transfer means in the second transfer system by the horizontal transfer method.

  As described above, a large number of loads are transported through the first to third paths, and the first transfer means, the second transfer means, and the transfer through the mouth and the cut, the first through the movable port. Since the load is quickly transferred between the transport system, the second transport system, and the third path, the load can be transported efficiently with a relatively simple configuration.

  In one aspect of the second transport system of the present invention, the first support portion and the second support portion may be configured such that the first load or the other load is placed on the second support portion. The first load or the other load placed on the second support portion as the support portion passes through the opening or the notch from the lower side to the upper side of the third path. It is configured to receive.

  According to this aspect, the 1st support part passes the 2nd support part in the state which loaded the load (namely, one load or another load) from the lower part to the upper part through a mouth or a notch. Thus, the load is transferred from the second support portion. Specifically, for example, the first support portion below the second support portion is moved above the second support portion through the mouth or the cut, for example. Along with this, the load placed on the second support part is supported by the first support part instead of the second support part. As described above, the load can be transferred more efficiently by the DLT method by transferring to and from the third path with a relatively simple configuration in which the first support portion is moved up and down.

  In another aspect of the second transport system of the present invention, the movable port is disposed adjacent to a trajectory in which the movable port moves up and down, and a stocker for storing the one or other load and a predetermined for the one or other load. The apparatus further includes at least one of processing apparatuses that perform processing of the kind, and the at least one apparatus and the movable port are configured to be configured so that the at least one of the at least one apparatus and the movable port is stopped when the movable port stops at a position for entering and exiting the at least one apparatus. The one or other load can be transferred between one device and the movable port.

  With this configuration, at least one of the stocker and the processing device transfers a load (that is, one load or another load) to and from the movable port, for example, adjacent to the entry / exit position. A transfer surface is set for this purpose. At least one of the devices or the movable port includes, for example, an outside / inside moving means. The outer / inner moving means can transfer the load between, for example, at least one device and the movable port. The outer / inner moving means is, for example, a rotation mechanism that rotates the mounting surface in the movable port, a slide mechanism that slides, or a robot arm that can be transferred between the mounting surface and the transfer surface in at least one of the devices. Etc.

  When at least one of the devices is a stocker and a load is transferred from the movable port to the stocker, for example, the movable port on which the load is first loaded (actually the loading surface) Moved up and down to position. Next, the placement surface is rotated by, for example, an outer / inner movement means that is a rotation mechanism, and the load on the placement surface is moved (that is, transferred) to the transfer surface in the stocker.

  Further, when a load is transferred from the stocker to the movable port, for example, the movable port that is in an empty state (actually, the placement surface) is moved up and down to the position for loading and unloading. Next, the load placed on the transfer surface of the stocker is transferred to the movable port by an outer / inner moving means, for example, a robot arm.

  As described above, the load can be transferred efficiently and quickly between at least one device and the movable port, for example, by the outer / inner moving means.

  In addition, also in the 2nd conveyance system of this invention, it is possible to take the various aspects similar to the various aspects in the 1st conveyance system of this invention mentioned above.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  The configuration of the transport system according to the embodiment will be described with reference to FIGS.

  First, an outline of a transport system according to the embodiment will be described with reference to FIG. FIG. 1 shows the appearance of the transport system according to the embodiment.

  In FIG. 1, the transport system 100 includes a rail 1, a vehicle 2, a first conveyor 30, a transfer mechanism 40, a second conveyor 50, ports P1 and P2, a stocker 10, and a controller 201. The controller 201 includes a processor, a memory, and the like as an example of a control unit, and is connected to each part of the transport system 100. The controller 201 manages or controls the transportation and transfer of the FOUP 3 based on the semiconductor element manufacturing process as will be described in detail later.

  The FOUP 3 is an object of conveyance as an example of “one load” and “other load” according to the present invention, and a plurality of various substrates (not shown) can be accommodated therein. The FOUP 3 has a flange 3a held by the vehicle 2 or the transfer mechanism 40 on the upper surface, and has a recess (not shown) engaged with the positioning pin 11a on the port P1 or P2 on the bottom surface. The FOUP 3 is conveyed by the vehicle 2, the first conveyor 30, and the second conveyor 50 to the stocker 10, a manufacturing apparatus (not shown), an OHT buffer, a large-sized stocker, and the like.

  The rail 1 serves as a track for the vehicle 2 to travel as an example of the “first route” according to the present invention. The vehicle 2 is an OHT driven by, for example, a linear motor as an example of the “transport vehicle” according to the present invention, and transports the FOUP 3 in the transport direction D1, for example. The vehicle 2 has a hoist mechanism 5.

  FIG. 2 schematically shows a side view of the transport system of FIG. 1 viewed from the side (ie, the right side in FIG. 1). 2, the hoist mechanism 5 includes a main body 5a, a belt 6, a grip 7, and a motor (not shown) as an example of the “first transfer means” according to the present invention. One end of the belt 6 is fixed to a winding shaft (not shown) of the main body 5 a and the other end is fixed to the grip 7. Both ends of the grip 7 are bent inward so that the flange 3a can be gripped. The grip 7 can be displaced between a gripping state in which the flange 3a is gripped and a released state in which the flange 3a is released. The main body 5a moves the FOUP 3 up and down by moving the grip 7 up and down by the feeding or winding operation of the belt 6. The vehicle 2 is a vertical transfer system in which the FOUP 3 is moved up and down by the hoist mechanism 5 and transfers the FOUP 3 between the ports P1 and P2. The vehicle 2 may further include an adjustment mechanism that finely adjusts the position of the grip 7 relative to the port P1 or P2 (for example, the position in the two horizontal directions and the rotation direction).

  In FIG. 1, the 1st conveyor 30 is provided with the some conveyor part 31, a pair of support wall not shown, and an actuator as an example of the "conveyance means" which concerns on this invention. The plurality of conveyor portions 31 are attached to the inside of the pair of support walls so as to form a pair along the second path R2 (indicated by a one-dot chain line in FIG. 1) and on both sides of the second path R2. . Each of the plurality of conveyor portions 31 is, for example, a Caterpillar (registered trademark) type conveyor, and supports an end portion of the bottom surface of the FOUP 3 (that is, a left or right end portion with respect to the extending direction of the second path R2). Each of the pair of conveyor portions 31 positioned on both sides of the second path R2 is configured to be able to place one FOUP 3 thereon. The first conveyor 30 conveys the FOUP 3 in the conveying direction D2, for example, by simultaneously rotating the pair of conveyor portions 31 on which the FOUP 3 is placed by driving the actuator.

  The second route R2 is a route of the FOUP 3 conveyed by the first conveyor 30. In FIG. 2, the second route R <b> 2 (that is, indicated by a one-dot chain line circle in FIG. 2) is on the side of the rail 1 (that is, on the left side of the rail 1 in FIG. 2) and along the rail 1. It extends below the vehicle 2 that travels.

  In FIG. 2, the transfer mechanism 40 includes a main body portion 40a, a horizontal movement portion 41, and a vertical movement portion 42 as an example of the “second transfer means” according to the present invention, and moves the FOUP 3 in the horizontal and vertical directions. The FOUP 3 is transferred to or from the port P1 or P2 by the horizontal transfer method.

  FIG. 4 schematically shows the top surface of the transport system of FIG. In FIG. 4, the main body portion 40a is provided above the second route R2 in the transfer position CV21 or CV22 (that is, the area indicated by the one-dot chain line in FIG. 4) corresponding to the port P1 or P2. A horizontal movement portion 41 is attached to the main body portion 40a so as to be horizontally movable. A vertical moving unit 42 is attached to the horizontal moving unit 41 so as to be horizontally movable.

FIG. 3 schematically shows a side surface of the transport system of FIG. 1 together with an operation state of lateral transfer by the transfer mechanism 40 . In FIG. 3, the horizontal movement part 41 is provided with the main-body part 41a, the rail 41b, and the actuator which is not shown in figure as an example of the "horizontal movement means" which concerns on this invention. A recess (not shown) is formed on the bottom surface of the main body 41a, and a rail 41b is fitted in the recess. The rail 41b moves between the second path R2 and the side of the main body 41a (that is, the right side in FIG. 3). The upper part of the vertical movement part 42 is fitted to the lower part of the rail 41b. The horizontal moving unit 41 drives the actuator to move the vertical moving unit 42 further to the side along the rail 41b than the position where the rail 41b can move. As described above, the horizontal moving unit 41 horizontally moves the vertical moving unit 42 stepwise between the upper side of the second path R2 and the lower side of the rail 1 via the rail 41b.

  The up-and-down moving part 42 includes a hoist 42a, a belt 42b, and a grip 42c as an example of the “lifting means” according to the present invention. The hoist 42a includes a motor (not shown) as an example of the “holding unit” according to the present invention, and performs an operation of feeding or winding the belt 42b by driving the motor. One end of the belt 42b is fixed to a winding shaft (not shown) in the hoist 42a, and the other end is fixed to the grip 42c. The grip 42c is bent inward at both ends so that the flange 3a on the upper surface of the FOUP 3 can be gripped. The grip 42c can be displaced between a gripping state in which the flange 3a is gripped and a released state in which the flange 3a is released. The hoist 42a moves the grip 42c up and down by feeding or winding up the belt 42b. The vertical movement unit 42 may further include an adjustment mechanism that finely adjusts the position of the grip 42c relative to the port P1 or P2 (for example, the position in the two horizontal directions and the rotation direction).

  In the present embodiment, the transport system 100 includes two ports P1 and P2. In FIG. 1, the port P1 is disposed on the upstream side in the transport direction D1 of the vehicle 2, the transport direction D2 of the first conveyor 30, and the transport direction D3 of the second conveyor 50, and the port P2 is disposed on the downstream side thereof. ing. Each of the ports P1 and P2 is an example of the “lifter” and “movable port” according to the present invention, the vehicle 2, the first conveyor 30 (actually, the transfer mechanism 40), the second conveyor 50, and the stocker 10. This is a port for transferring FOUP3 between them. Each port P1 and P2 includes a placement surface 11 on which the FOUP 3 is placed. The mounting surface 11 supports the center portion of the FOUP 3 from the bottom side as an example of the “first support portion” according to the present invention. A positioning pin 11 a is attached to the upper surface of the mounting surface 11. The positioning pin 11a is engaged with the recess of the FOUP 3 to be transferred.

  In FIG. 1, each port P <b> 1 or P <b> 2 includes an elevating mechanism 12 and a slide mechanism 16 in the present embodiment. Two lifting mechanisms 12 are provided corresponding to the two openings H <b> 1 and H <b> 2 in the stocker 10. The lifting mechanism 12 includes a pair of rails 13, a support portion 14, and an actuator (not shown) for each of the ports P1 and P2. The pair of rails 13 are vertically attached to both sides of the openings H1 and H2 on the outer wall of the stocker 10 (that is, the front surface in FIG. 1). The support part 14 supports the mounting surface 11 in each port P1 and P2. One end of the support portion 14 is fitted to the pair of rails 13. The elevating mechanism 12 drives the actuator to move the support portion 14 up and down along the pair of rails 13 so that each port P1 and P2 is positioned at a position facing a first placement portion 21a or 21d described later. Move independently. When transferring the FOUP 3 to / from the stocker 10, the elevating mechanism 12 stops the port P1 or P2 at the transfer position corresponding to the opening H1 or H2. The transfer position is an example of a “position for entry / exit” according to the present invention, and is a position where the FOUP 3 can be transferred between the port P1 or P2 and the stocker 10.

  In FIG. 4, two slide mechanisms 16 are provided corresponding to the two ports P1 and P2 as an example of the outer / inner movement means. The slide mechanism 16 includes a pair of rollers (not shown), a ring-shaped rotation band, and an actuator for each of the ports P1 and P2. The ring-shaped rotation band is attached to the pair of rollers so as to surround the pair of rollers. A part of the ring-shaped rotation band functions as the mounting surface 11 in each of the ports P1 and P2. When the port P1 or P2 is stopped at the transfer position (that is, the vertical position indicated by the dotted line in FIG. 5) in the stocker 10 by the elevating mechanism 12, the slide mechanism 16 drives the actuator, By rotating the roller, the ring-shaped rotation band is rotated. By this rotation, the FOUP 3 on the port P1 or P2 is horizontally moved to the first placement portion 21a or 21d in the stocker 10 through an opening H1 or H2 described later. Alternatively, the FOUP 3 on the first placement portion 21a or 21d is horizontally moved so as to be engaged with the positioning pin 11a on the placement portion 11 in the port P1 or P2. Thus, the slide mechanism 16 transfers the FOUP 3 between the port P1 or P2 and the stocker 10.

  The second conveyor 50 includes a plurality of conveyor portions 51, a pair of support walls (not shown), and an actuator. The plurality of conveyor portions 51 are attached inside the pair of support walls so as to form a pair along the third path R3 (that is, indicated by a one-dot chain line in FIG. 1) and on both sides of the third path R3. ing. Each of the plurality of conveyor portions 31 is, for example, a Caterpillar (registered trademark) type conveyor, and as an example of the “support portion” and the “second support portion” according to the present invention, an end portion (that is, a third portion) on the bottom surface of the FOUP 3. The left or right end portion with respect to the extending direction of the path R3 is supported. Each of the pair of conveyor portions 51 located on both sides of the third path R3 is configured so that one FOUP 3 can be placed thereon. The second conveyor 50 conveys the FOUP 3 in, for example, the conveyance direction D3 by simultaneously rotating the pair of conveyor portions 51 on which the FOUP 3 is placed by driving the actuator.

  The third path R3 is a path of the FOUP 3 that is transported by the second conveyor 50. In FIG. 2, the third path R <b> 3 (that is, indicated by a one-dot chain line circle in FIG. 2) extends below the rail 1 and the second path R <b> 2, specifically, vertically below the rail 1.

  In FIG. 4, the plurality of conveyor portions 51 are configured of a first conveyor portion 51 a and a second conveyor portion 51 b having different lengths along the third path R <b> 3 in the present embodiment. In the second conveyor 50, one first conveyor portion 51a and two second conveyor portions 51b are associated with the transfer position CV31 corresponding to the port P1 (that is, the area indicated by the one-dot chain line in FIG. 4). ing. The two second conveyor portions 51b are attached to a support wall (not shown) with a through hole C1 therebetween (that is, an area indicated by a one-dot chain line in the area CV31 in FIG. 4) therebetween. The through-hole C1 is an opening through which the port P1 (actually, the support portion 14) penetrates the second conveyor portion 51b as an example of the “mouth or notch” according to the present invention. The lifting mechanism 12 moves the port P1 between above and below the conveyor part 51 (that is, the first conveyor part 51a and the two second conveyor parts 51b) at the transfer position CV31 through the through-hole C1. . In addition, about the 2nd conveyor 50, similarly to the transfer position CV31 corresponding to the port P1, the transfer position CV32 corresponding to the port P2 is set, and the transfer position CV32 includes one first conveyor portion 51a. And the two second conveyor portions 51b.

  The transfer of the FOUP 3 between the second conveyor 50 and the port (that is, the port P1 or P2) will be described with reference to FIGS. In FIG. 2, when transferring the FOUP 3 from the second conveyor 50 to the port P <b> 1 or P <b> 2, the elevating mechanism 12 moves the placement surface 11 upward from below the conveyor portion 51. At this time, the placement surface 11 enters between the first conveyor portion 51a and the second conveyor portion 51b, and the support portion 14 in the lifting mechanism 12 enters between the two second conveyor portions 51b. Subsequently, the placement surface 11 is further moved upward, and the central portion of the FOUP 3 that is not supported by the first conveyor portion 51a and the two second conveyor portions 51b is supported by the placement surface 11, so that the FOUP 3 Is transferred from the conveyor portion 51 (that is, the second conveyor 50) to the placement surface 11 (that is, the port P1 or P2).

  When the FOUP 3 is transferred from the port P1 or P2 to the second conveyor 50, the elevating mechanism 12 moves the placement surface 11 supporting the FOUP 3 from above the conveyor portion 51 to below. At this time, the mounting surface 11 supporting the central part of the FOUP 3 enters between the first conveyor part 51a and the second conveyor part 51b, and the support part 14 in the lifting mechanism 12 is between the two second conveyor parts 51b. Get in. Subsequently, the placement surface 11 is further moved downward, and both end portions of the FOUP 3 that are not supported by the placement surface 11 are supported by the first conveyor portion 51a and the two second conveyor portions 51b. Is transferred from the placement surface 11 (ie, the port P1 or P2) to the conveyor portion 51 (ie, the second conveyor 50).

  FIG. 5 schematically shows the front of the stocker of FIG. In FIG. 5, the stocker 10 includes a main body portion 10a and a transport unit 20 in the storage, and is disposed adjacent to tracks G3 and G4 in which the ports P1 and P2 move up and down.

  The main body 10a is equally divided into four stages F1 to F4 in the vertical direction. Two openings H1 and H2 are provided on one side surface (ie, the front surface in FIG. 1) of the four steps F1 to F4 with a predetermined horizontal distance therebetween. Each opening H1 and H2 is formed in a size that allows the FOUP 3 to be taken in and out of the main body 10a. In FIG. 4, the two openings H1 and H2 are arranged along the rail 1, the second path R2, and the third path R3. The transfer position in the stocker 10 is a vertical position where the port P1 or P2 is arranged so that the opening H1 or H2 and the FOUP 3 placed on the placement surface 11 face each other.

  In FIG. 1, the in-storage transport unit 20 includes a plurality of placement units 21 and a stocker lifting mechanism 25 in the main body 10 a. The storage unit transport unit 20 controls the plurality of placement units 21 in a general manner, and transports the plurality of FOUPs 3 independently at each of the stages F1 to F4 (that is, transports in the storage unit). By moving the elevating mechanism 25 up and down, the plurality of FOUPs 3 are moved between the plurality of stages F1 to F4.

  FIG. 6 shows an arrangement of a plurality of placement units, and FIG. 7 shows a state after rotation of the plurality of placement units of FIG. 6 and 7 specifically correspond to the A1-A1 cross section in FIG. 5 and show a plurality of placement portions 21 arranged in the uppermost stage F1 of the stocker 10. FIG. In FIG. 6, the area IN1 or IN2 inside the main body 10a is adjacent to the opening H1 or H2. Further, the space S1 or S2 (that is, indicated by a one-dot chain line in FIG. 5) is a vertically extending space including the area IN1 or IN2. A port P1 or P2 is disposed outside the main body 10a in an area adjacent to the opening H1 or H2.

  The configuration of the in-storage transport unit 20 will be described in detail with reference to FIGS. 6 and 7. In FIG. 6, the in-storage transport unit 20 performs the in-storage transport independently on each floor F <b> 1 to F <b> 4 by horizontally moving the FOUP 3 between the plurality of mounting units 21 by the plurality of mounting units 21. . In each floor F1 to F4, the plurality of placement units 21 are arranged in two horizontal directions (that is, left and right directions in FIG. Six are arranged so as to spread in the vertical direction. Each placement unit 21 is a rotation placement unit 21a to 21f, and of these six rotation placement units 21a to 21f, two rotation placement units adjacent to the space S1 or S2 are the first placement. The parts 21a and 21d are set respectively.

  In the present embodiment, the plurality of placement units 21 are arranged one by one in each of the spaces S1 and S2 in addition to the six placement units 21 in each stage F1 to F4. The two placement portions 21 arranged in the spaces S1 and S2 are rotary placement portions 21o and 21p that are common to the plurality of stages F1 to F4, and are moved up and down in the space S1 or S2 by the lifting mechanism 25 in the stocker. Is done.

  The stocker elevating mechanism 25 is provided in each of the spaces S1 and S2. The stocker elevating mechanism 25 includes, for example, a pair of rails (not shown), a support portion 26, and an actuator (not shown) with respect to the space S1 or S2. The pair of rails are attached in the vertical direction in the longitudinal direction in the space S1 or S2. The support part 26 supports the rotation mounting part 21o or 21p in the space S1 or S2. End portions of the support portion 26 are fitted into a pair of rails. The stocker elevating mechanism 25 drives the actuator to move the support portion 26 up and down along the pair of rails, thereby turning the rotary placement portion 21o or 21p into the first placement portion 21a in each stage F1 to F4. Alternatively, it is independently moved to a position facing 21d (hereinafter simply referred to as “position corresponding to each stage F1 to F4”). The rotary mounting part 21o or 21p moved to the position corresponding to each stage F1 to F4 by the lift mechanism 25 in the stocker is used to move the FOUP 3 between the first mounting part 21a or 21d in each stage F1 to F4. Move horizontally independently. Further, the rotary mounting part 21o or 21p moved to the position corresponding to the uppermost stage F1 (that is, the area IN1 or IN2) is independent of the FOUP 3 with the port P1 or P2 through the opening H1 or H2. To move horizontally.

  As shown in FIG. 6, when the two rotary mounting parts 21o and 21p are in the area IN1 or IN2, the eight mounting parts 21 (that is, the mounting parts 21a to 21f, 21o and 21p) are mutually connected. The FOUP 3 is moved horizontally between them. Each of the eight placement portions 21 includes a roller 23 and an actuator (not shown). The roller 23 is rotated by an actuator. The upper surface of each roller 23 functions as a placement surface on which the FOUP 3 is accommodated or placed. Regarding the horizontal movement of the FOUP 3, specifically, when the FOUP 3 is accommodated or placed on the placement portion 21b, when the roller 23 in the placement portion 21b is rotated to the right, the FOUP 3 is moved to the right of the placement portion 21b. It is moved horizontally to the adjacent placement portion 21c. In this case, when the roller 23 in the mounting portion 21b is rotated counterclockwise, the FOUP 3 is moved horizontally to the mounting portion 21e adjacent to the left of the mounting portion 21b. In addition, although each mounting part 21 performs the roller conveyor type movement by rotation of the roller 23, you may perform the belt conveyor type movement by rotation of a belt etc. in addition to this.

Each of the eight placement units 21, that is, the eight rotary placement units 21a to 21f, 21o, and 21p, further includes a turntable 24 and an actuator (not shown), and the movement direction and posture of the FOUP 3 are set to 90. Rotate degrees. The turntable 24 is disposed below the roller 23 and fixes the roller 23 via a bearing (not shown). The turntable 24 is rotated 90 degrees in the horizontal plane by the actuator, and the roller 23 is rotated 90 degrees in the horizontal plane. Specifically, when the turntable 24 is rotated 90 degrees to the right in the eight rotary placement portions 21a to 21f, 21o, and 21p in the state of FIG. 6, the roller 23 is integrated as shown in FIG. Turns 90 degrees to the right. By this rotation, the moving direction and the posture of the FOUP 3 housed or placed in the rotary placement portions 21a to 21f, 21o, and 21p are rotated 90 degrees to the right. When the turntable 24 is rotated 90 degrees counterclockwise, the roller 23 is integrally rotated 90 degrees counterclockwise. By this rotation, the moving direction and posture of the FOUP 3 housed or placed in the rotary placement portions 21a to 21f, 21o, and 21p are rotated 90 degrees to the left.
(Transfer operation between transport vehicle and transport means)

  Next, the transfer operation between the transport vehicle and the transport means in the transport system according to the present embodiment will be described with reference to FIGS.

In FIG. 2, at the time of transfer from the vehicle 2 to the first conveyor 30, the vehicle 2 holding the FOUP 3 is stopped at the transfer position CV31 or CV32 (that is, shown in FIG. 4) on the rail 1. . Then, the lift mechanism 12 moves the port P1 or P2 to the highest vertical position. Thereafter, the grip 7 in a state of holding the FOUP 3 is moved by the hoist mechanism 5 directly above the placement surface 11 at the port P1 or P2. Then, the FOUP 3 is released by the moved grip 7 and transferred to the placement surface 11. At this time, the positioning pin 11 a on the upper surface of the mounting surface 11 is engaged with the recess of the FOUP 3.

  Thereafter, in FIG. 3, the grip 42 c in the released state is moved immediately above the FOUP 3 on the placement surface 11 by the horizontal moving unit 41 and the vertical moving unit 42. Then, the FOUP 3 is held by the moved grip 42c. Subsequently, the grip 42c holding the FOUP 3 is moved immediately above the conveyor portion 31 related to the transfer position CV21 or CV22 (that is, shown in FIG. 4) by the horizontal moving part 41 and the vertical moving part 42. . Then, the FOUP 3 is released by the moved grip 42c, and is transferred onto the conveyor portion 31 related to the transfer position CV21 or CV22. Thereby, a series of transfer operations are completed. At the time of transfer from the first conveyor 30 to the vehicle 2, the FOUP 3 is transferred from the first conveyor 30 to the vehicle 2 via the port P1 or P2 in the reverse order of the above-described procedure.

In this way, since the FOUP 3 is transferred between the vehicle 2 and the first conveyor 30 (actually, the transfer mechanism 40) via the port P1 or P2, two paths (ie, rail 1) are transferred. In addition, a large number of FOUPs 3 can be efficiently transported through the second route R2) and can be quickly transferred between the two routes. Further, since the port P1 or P2 is provided vertically below the rail 1, it is not necessary to provide a mechanism for performing lateral transfer on the vehicle 2, and the vehicle 2 is reduced in weight by the weight of the mechanism. The conveyance speed can be increased. Therefore, the FOUP 3 can be transported efficiently with a relatively simple configuration.
(Transfer operation between the transport means and the third path)

  Next, the transfer operation between the transfer means and the third path in the transfer system according to the present embodiment will be described with reference to FIGS.

  In FIG. 2, when transferring from the first conveyor 30 to the second conveyor 50, the FOUP 3 is first moved from the first conveyor 30 to the transfer position CV21 or CV22 (that is, shown in FIG. 4) on the first conveyor 30. Be transported. Then, the grip 42c in the released state is moved by the horizontal moving unit 41 and the vertical moving unit 42 to the position immediately above the FOUP 3 on the conveyor portion 31 related to the transfer position CV21 or CV22, and holds the FOUP 3. Subsequently, the grip 42c holding the FOUP 3 is moved directly above the placement surface 11 at the transfer position CV31 or CV32. At the same time, the lifting mechanism 12 moves the port P1 or P2 having the placement surface 11 to the highest vertical position. Subsequently, the FOUP 3 is released by the moved grip 42 c and transferred to the placement surface 11.

  Thereafter, in FIG. 3, the controller 201 detects that there is no FOUP 3 at the transfer position CV31 or CV32 (that is, shown in FIG. 4) on the second conveyor 50. Then, the placing surface 11 in a state where the FOUP 3 is placed is moved to the lower part of the conveyor portion 51 through the through-hole C1 by the lifting mechanism 12, and the FOUP 3 is transferred from the placing surface 11 to the conveyor portion 51. The Thereafter, the FOUP 3 is transported in the transport direction D3 by the second conveyor 50. Then, avoiding the FOUP 3 passing through the transfer position CV31 or CV32, the placing surface 11 is moved above the conveyor portion 51 via the through-hole C1 by the elevating mechanism 12. Thereby, a series of transfer operations are completed. At the time of transfer from the second conveyor 50 to the first conveyor 30, the FOUP 3 is transferred from the second conveyor 50 to the first conveyor 30 via the port P1 or P2 in the reverse order of the above-described procedure. .

  Thus, since the FOUP 3 is transferred between the first conveyor 30 (actually, the transfer mechanism 40) and the second conveyor 50 via the port P1 or P2, the two paths positioned above and below A large number of FOUPs 3 can be efficiently transported (that is, the second route R2 and the third route R3) and can be quickly transferred between the two routes. Further, the FOUP 3 can be transferred more quickly by the relatively simple configuration in which the second conveyor 50 is provided with the through-hole C1 that allows the placement surface 11 to pass therethrough.

  In the present embodiment, the transfer position corresponding to the port P1 or P2 is set via the port P1 or P2, the vehicle 2, the first conveyor 30 (actually the transfer mechanism 40), and The FOUP 3 can be transferred between the second conveyors 50.

In addition, in the present embodiment, only one FOUP 3 is transferred between the first conveyor 30 and the second conveyor 50, but the port P1 is transferred to the transferred FOUP 3 in the transfer process. Or you may perform the process in apparatuses, such as the stocker 10 and a processing apparatus, adjacent to the track | orbit G3 or G4 of P2.
(Incoming operation from the third route and outgoing operation to the transport vehicle)

  Next, the warehousing operation from the third path to the storage warehouse and the warehousing operation from the warehouse to the transportation vehicle in the transportation system according to the present embodiment will be described with reference to FIGS. 2 to 4 and 6. To do. In the following description, as an initial setting, the port P1 functions as a dedicated port for entry, and the port P2 functions as a dedicated port for delivery.

  When warehousing from the second conveyor 50 to the stocker 10, first, the controller 201 has a FOUP 3 to be admitted into the stocker 10 upstream of the transfer position CV31 (that is, shown in FIG. 4) in the second conveyor 50. Is detected. Then, the FOUP 3 passing through the transfer position CV31 is avoided, and the mounting surface 11 at the port P1 is moved below the conveyor portion 51 via the through-hole C1 by the elevating mechanism 12. Thereafter, the FOUP 3 to be stored is transported to the transfer position CV31 by the second conveyor 50. Then, the placement mechanism 11 is moved above the conveyor portion 51 via the through-hole C <b> 1 by the elevating mechanism 12, and the FOUP 3 to be stored is transferred from the conveyor portion 51 to the placement surface 11. Subsequently, the placement surface 11 on which the FOUP 3 to be received is placed is moved to the transfer position in the stocker 10. Thereafter, when the rotary mounting portion 21o is not in the area IN1 in the uppermost stage F1 (that is, shown in FIG. 6), the rotary mounting portion 21o is moved to the area IN1 by the lift mechanism 25 in the stocker. . Then, the FOUP 3 to be stored on the placement surface 11 is horizontally moved into the main body 10a through the opening H1 by the slide mechanism 16, and is transferred to the rotary placement unit 21o.

  Subsequently, the stocker elevating mechanism 25 moves the rotary mounting portion 21o in the uppermost stage F1 up and down to a position corresponding to the stage F2 in which the stored FOUP 3 is to be accommodated. Thereafter, the roller 23 in the rotary mounting unit 21o is rotated by the in-storage transport unit 20, and the FOUP 3 on the rotary mounting unit 21o is horizontally moved from the rotary mounting unit 21o to the first mounting unit 21a. The Then, the FOUP 3 on the first placement unit 21a is moved to the desired placement unit 21 (that is, transported in the storage). Thereby, a series of warehousing operations are completed.

  At the time of delivery from the stocker 10 to the vehicle 2, first, the FOUP 3 to be delivered on the desired placement unit 21 is moved to the first placement unit 21 d (that is, transported in the storage case) by the transport unit 20 in the storage unit. The Subsequently, when there is no rotation mounting portion 21p at the position corresponding to the stage F2 where the FOUP 3 to be discharged is mounted, the stocker lifting mechanism 25 is parallel to or in parallel with the transport in the storage. The rotary mounting portion 21p is moved up and down to a position corresponding to the step F2. Then, the roller 23 in the first placement unit 21d is rotated by the transport unit 20 in the storage, and the FOUP 3 on the first placement unit 21d is horizontally moved to the rotation placement unit 21p at a position corresponding to the stage F2. Is done. Then, the stocker elevating mechanism 25 moves the rotary mounting portion 21p in the stage F2 to the area IN2 (that is, shown in FIG. 6) in the uppermost stage F1. Then, when there is no placement part 11 in the port P2 at the transfer position in the stocker 10, the placement part 11 is moved to the transfer position in the stocker 10 by the lifting mechanism 12. Thereafter, the roller 23 in the rotary mounting portion 21p is rotated by the transport unit 20 in the storage, and the FOUP 3 on the rotary mounting portion 21p is horizontally moved to the outside of the main body portion 10a through the opening H2, and the mounting surface. 11 is transferred. Then, the port P1 or P2 having the placement surface 11 is moved to the highest vertical position by the elevating mechanism 12.

  Subsequently, in parallel or before or after the movement to the highest vertical position, the first conveyor 30 causes the vehicle 2 that is in an unloaded state to move to the transfer position CV22 (that is, in FIG. 4) on the first conveyor 30. Stopped). Then, the grip 7 in the released state is moved by the hoist mechanism 5 directly above the FOUP 3 on the placement surface 11. Then, the FOUP 3 is held (that is, transferred) by the moved grip 7. Thereby, a series of leaving operations are completed.

  As described above, in the process of transferring the FOUP 3 between the second conveyor 50 and the vehicle 2, the stocker 10 enters and exits. However, the slide mechanism 16 causes the port P <b> 1 or P <b> 2 to be connected between the stocker 10. Since the FOUP 3 is transferred quickly, the FOUP 3 can be efficiently transported even when loading / unloading is involved.

  Further, since the FOUP 3 is horizontally moved between the port P1 or P2 provided with the slide mechanism 16 and the mounting portion 21o or 21p moved up and down between the plurality of stages F1 to F4 by the lift mechanism 25 in the stocker, the port P1 and P2 can be in an empty state immediately after entering and immediately before leaving. Moreover, since each in-stage F1 to F4 is independently transported in the storage, a plurality of FOUPs 3 can be transported in the storage in a short time. As a result, the warehousing time and the warehousing time required for one FOUP 3 at the port P1 or P2 are shortened, and the transport time in the storage warehousing is shortened. Can be transported.

  A processing device may be provided instead of the stocker 10. In this case, in the process of transfer between the first conveyor 30 and the second conveyor 50, the FOUP 3 is subjected to a predetermined type of processing by the processing device.

  In addition, in this embodiment, although the 1st conveyor 30 and the 2nd conveyor 50 are comprised from the some conveyor part 31 or 51, you may provide a some roller instead of the some conveyor part 31 or 51. Good.

  Further, in the present embodiment, the slide mechanism 16 is provided as a means for transferring between the port and the stocker 10, but instead of the slide mechanism 16, the port P1 or P2 and the rotary placement portion 21o or 21p are provided. You may provide the robot hand etc. which move between.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. It is included in the technical scope of the present invention.

It is a perspective view which shows the external appearance of the conveyance system which concerns on embodiment. It is the side view which looked at the conveyance system of Drawing 1 from the side. It is a side view which shows the horizontal transfer by the 2nd transfer means of FIG. It is the upper side figure which looked at the conveyance system of Drawing 1 from the upper surface side. It is a front view which shows the front of the stocker of FIG. 1 typically. It is sectional drawing which shows the arrangement | sequence of the some mounting part of FIG. It is sectional drawing which shows the state after the rotation of the some mounting part of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Rail, 2 ... Vehicle (ceiling traveling vehicle), 3 ... FOUP (load), 10 ... Stocker, 12 ... Elevating mechanism, 16 ... Slide mechanism, 30 ... First conveyor, 40 ... Transfer mechanism, 50 ... Second Conveyor, 100 ... conveying system

Claims (7)

The first route;
A transport vehicle having a first transfer means for transporting the load along the first path and capable of transferring the transported load;
A port disposed vertically below the first path;
A placement portion that is disposed below the first path and at a position off the vertical top of the port, and on which the load can be placed;
A second transfer means capable of transferring the load placed above,
The first transfer means can transfer the load to and from the port by a vertical transfer method,
The second transfer means is capable of transferring the load between the placing section and the port.
The main body part of the second transfer means is disposed above the placement part and at a lower height than the main body part of the transport vehicle,
Each part of the second transfer means is located at a position deviated from above the port when the first transfer means transfers the load to or from the port. A second path through the placement section,
The conveyance system according to claim 1, further comprising: a conveyance unit configured to convey the load on the second path. The second transfer means includes
Holding means capable of holding the conveyed load;
Horizontal holding means capable of horizontally moving the holding means between above the second path and below the first path;
The transport system according to claim 2, further comprising a lifting / lowering unit capable of lifting / lowering the load held by the holding unit moved to the lower side of the first path.   The said port is comprised from the mounting surface in the lifter which can be raised-lowered, The conveyance system as described in any one of Claim 1 to 3 characterized by the above-mentioned. A third path passing below the second path;
The third path is provided with a mouth or a notch that allows the lifter to pass downward when the lifter descends, and is placed on the lifter as the lifter passes. The transport system according to claim 4, further comprising a support portion that receives the load.   The lifter and the support portion are provided in the state where the load is placed on the support portion as the lifter passes through the mouth or the cut from the lower side to the upper side of the third path. The conveyance system according to claim 5, wherein the load placed on the lift is received by the lifter. The lifter is disposed adjacent to a trajectory in which the lifter moves up and down, and further includes at least one of a stocker that stores the load and a processing device that performs a predetermined type of processing on the load,
The at least one device and the lifter are configured to be able to transfer the load between the at least one device and the lifter when the lifter stops at an entry / exit position with respect to the at least one device. The conveyance system according to any one of claims 4 to 6, wherein the conveyance system is configured.

Images