JP5316907B2 - Goods transport equipment - Google Patents

Abstract

The invention provides an article transport device capable of quickly transporting articles inwards and outwards relative to an article transition part and preventing jam of overbridge transport vehicles on a first path as much as possible. The article transport device is provided with: an overbridge transport vehicle (2) capable of freely moving along the first linear path and the second linear path in parallel to the first path, wherein at least one of a first path side middle shelf (5n) right below the first path, a second path side middle shelf (5f) right below the second path and a first path side middle transport device (6n) or a second path side middle transport device (6f) is used as the middle transport device, thus a handling part (7) for the transport device freely elevates along the vertical direction and slides along the transverse width direction and the article (W) is freely transported among the first path side middle shelf (5n), the second path side middle shelf (5f) and the article transition part (4).

Description

  The present invention provides an article transfer provided on the floor side, provided with a gripping part capable of moving along a traveling route and supporting an article in a state where it is guided and supported by a traveling rail disposed on the ceiling side, and capable of moving up and down. A temporary transfer vehicle that can transfer articles to and from the unit, and an article that is placed above the transfer unit and below the transfer unit and transferred to the transfer unit. The present invention relates to an article conveyance facility provided with an intermediate shelf to be placed.

  In the article transport facility, the overhead transport vehicle travels along the travel route while gripping the article with the gripping part, and is transported from the article transfer part or the article transfer part. The article is transported between a plurality of article transfer units. In general, a plurality of ceiling transport vehicles are provided, and each ceiling transport vehicle is stopped immediately above an article transfer unit designated as a transfer source or an article transfer unit specified as a transfer destination from a controller that manages transfer work, and a gripping unit By moving up and down, the article is transferred to and from the article delivery unit.

  When an article is transported to an article delivery unit as a transport destination by a ceiling transport vehicle and the article delivery unit cannot accept the article, the succeeding ceiling transport vehicle is in a state where the article delivery unit can accept the article. It will have to wait until it becomes, causing the congestion of the overhead transport vehicle. Therefore, conventionally, an intermediate shelf for temporarily placing an article to be transferred to the article delivery unit is disposed above the article delivery unit and below the ceiling transport vehicle, and the article is temporarily placed on the intermediate shelf. By placing it, it prevents traffic jams in the ceiling transport vehicle. In addition, by arranging an intermediate shelf around the article transfer unit, the article transfer unit can be quickly carried in and out when necessary.

  As a conventional example of an article transport facility provided with an intermediate shelf, a linear first path that passes through a stop position for a delivery section that is set immediately above the article delivery section, and a width direction that is parallel to the first path And a linear second path set at different positions, and an intermediate shelf is arranged only directly below the second path. (For example, refer to FIG. 2 of Patent Document 1.)

  In the above-described conventional article transport facility, the overhead transport vehicle traveling on the first route is provided with a gripper slidably in the width direction of the first route and the second route, so that the overhead transport vehicle traveling on the first route. Performs both the transfer to the article delivery unit located immediately below the first path and the transfer of the article to the intermediate shelf arranged at a different position in the lateral width direction of the first path, and travels on the second path. The overhead transportation vehicle only performs transfer to an intermediate shelf located directly below the second path.

JP 2006-224944 A

  In the above-described conventional article transport facility, when an article temporarily placed on an intermediate shelf is carried into an article delivery section, a ceiling transport vehicle that does not hold the article is placed directly above the article delivery section along the first path. The vehicle is moved to the set transfer unit stop position, and the gripping unit is slid and moved up and down to transfer the article on the intermediate shelf to the article transfer unit. Also, when carrying out an article from the article delivery section, similarly, the overhead transport vehicle that does not hold the article is caused to travel along the first route to the delivery section stop position set immediately above the article delivery section. Then, the gripping part is moved up and down to carry the article out of the article delivery unit. Furthermore, when temporarily placing the article carried out from the article delivery section on the intermediate shelf, the gripping section is slid and moved up and down while being stopped at the delivery section stop position in the first path to temporarily place the article on the intermediate shelf. Will be placed.

  In this way, carrying in articles to the article delivery section, taking out articles from the article delivery section, temporarily placing articles on the intermediate shelf, and carrying articles temporarily placed on the intermediate shelf to the article delivery section, Since all the overhead transport vehicles traveling on one route perform the work, the work load of the overhead transport vehicles traveling on the first route is increased. For this reason, there is a possibility that the work concentrates on the overhead conveyance vehicle traveling on the first route and traffic jam occurs.

  In addition, since there are only intermediate shelves directly under the second route, the number of articles that can be temporarily placed is small, and even if the number of intermediate shelves is increased in order to increase the number of articles that can be temporarily placed, it is separated from the article delivery unit in the traveling direction. The intermediate shelf will be provided at the position where the overhead transport vehicle traveling on the first route carries the article on the intermediate shelf into the article transfer unit. Therefore, there is a possibility that the article cannot be quickly brought into the article transfer unit.

  The present invention has been made in view of the above circumstances, and its purpose is to prevent the occurrence of traffic jams in the ceiling transport vehicle in the first route while being able to quickly carry in / out the article to / from the article delivery unit. The object is to provide an article conveying facility that can be prevented as much as possible.

In order to achieve this object, the first characteristic configuration of the article transporting facility according to the present invention is such that it can travel along a traveling route and supports an article while being guided and supported by a traveling rail disposed on the ceiling side. A ceiling transport vehicle that includes a gripping portion that can be moved up and down, and that is capable of transferring articles to and from an article transfer section provided on the floor side, and that is above the article transfer section and below the ceiling transport vehicle In an article transport facility provided with an intermediate shelf for temporarily placing an article placed on and transferred to the article delivery unit,
As the travel route, a linear first route that passes through a stop position for a delivery unit that is set immediately above the product delivery unit, and a position that is parallel to the first route and different in the lateral width direction of the first route. A first linear path that is provided at a position different from the article delivery unit in the traveling direction of the overhead transport vehicle, as the intermediate shelf, provided directly below the first path. An intermediate shelf and a second path-side intermediate shelf located immediately below the second path are provided, and the transfer device gripping part for supporting the article can be moved up and down in the vertical direction, and the first path and the second path An intermediate that is slidable in the width direction of the path, and that is capable of transferring an article between the first path-side intermediate shelf, the second path-side intermediate shelf, and the article transfer unit. A transfer device is provided, and the ceiling transfer device is used as the intermediate transfer device. The direction of travel of the ceiling transport vehicle at a height between the first path and the first path side intermediate shelf in a state where it overlaps the first path and the first path side intermediate shelf in the direction of travel of the car. The first path-side intermediate transfer device provided so as to be reciprocally movable along the second path and the second path-side intermediate shelf as viewed in the traveling direction of the ceiling transport vehicle. At least one of the second path side intermediate transfer devices provided so as to be reciprocally movable along the traveling direction of the overhead conveyance vehicle at a height between two paths and the second path side intermediate shelf is provided. In the point.

  According to this feature configuration, if the overhead transport vehicle traveling on the first route is in a state where the article is gripped by the grip portion, the overhead transport vehicle is stopped at the transfer portion stop position and lowered to the floor side. Articles can be carried into the provided article transfer section. Similarly, if the gripping part is not gripping the article, the article can be carried out from the article transfer part provided on the floor side by stopping at the transfer part stop position and lowering the gripping part. it can. As described above, the overhead traveling vehicle traveling on the first route is configured to carry in / out of articles with the article delivery / reception unit at the delivery / reception unit stop position and travel along the travel route to the delivery / reception unit stop position. Articles can be transported.

  In addition, since the first path side intermediate shelf and the second path side intermediate shelf are provided as intermediate shelves for temporarily placing the articles to be transferred to the article transfer unit, the ceiling travels along the first path. If the conveyance vehicle is in a state of gripping an article by the grip portion, the transport vehicle stops at a position different from the stop position for the transfer portion in the traveling direction and lowers the grip portion, so that the transport vehicle moves to the first path side intermediate shelf located immediately below. If the article can be temporarily placed and the article is not gripped by the gripping part, it is positioned directly below by stopping at a position different from the stop position for the delivery part in the traveling direction and lowering the gripping part. Articles temporarily placed on the first path side intermediate shelf can be received. Similarly, the overhead traveling vehicle traveling on the second route temporarily places an article on the second route side intermediate shelf located immediately below, or receives an article temporarily placed on the second route side intermediate shelf. Can do.

  The transfer device gripping part is provided so as to be vertically movable and slidable in the width direction of the first path and the second path, and between the first path side intermediate shelf and the second path side intermediate shelf. Since at least one of the first path-side intermediate transfer apparatus and the second path-side intermediate transfer apparatus is provided as an intermediate transfer apparatus that can transfer articles to and from the article transfer unit The article temporarily placed on the first path side intermediate shelf by the overhead traveling vehicle traveling on the first path is carried into the article transfer unit by the first path side intermediate transfer device or the second path side intermediate transfer device. It is also possible to move to the second path side intermediate shelf. Similarly, the article temporarily placed on the second path side intermediate shelf by the overhead conveyance vehicle traveling on the second path is transferred to the article transfer unit by the first path side intermediate transfer device or the second path side intermediate transfer device. It is also possible to carry in, or to move to the second path side intermediate shelf. Thereby, for example, the overhead transportation vehicle can transport articles from the transport source (for example, from other article delivery units) without carrying in from the intermediate shelf to the article delivery unit and unloading from the article delivery unit to the intermediate shelf. ) And the conveyance of the article to the conveyance destination (for example, conveyance to another article delivery / reception unit). Of course, the overhead traveling vehicle traveling on the first route may directly carry the article in and out of the article delivery unit.

  As described above, since all or part of the carry-in / out of the article with respect to the article transfer unit can be performed by the first path-side intermediate transfer device or the second path-side intermediate transfer device, the vehicle travels on the first path. The overhead transport vehicle is used to carry articles into and out of the article delivery section, carry out articles from the article delivery section, temporarily place articles on the intermediate shelf, and carry articles temporarily placed on the intermediate shelf into the article delivery section. You only need to do part, not all. Therefore, it is possible to reduce the work load of the overhead traveling vehicle traveling on the first route.

  Therefore, as in the prior art, an intermediate shelf is provided only directly below the second path, and the overhead conveyance vehicle traveling on the first path includes a grip portion slidable in the width direction of the first path and the second path. On the other hand, it is possible to avoid an increase in work load on the overhead traveling vehicle traveling on the first route. Thereby, it is possible to prevent as much as possible the occurrence of traffic jams due to the overhead transportation vehicles concentrating on the first route.

  Moreover, when providing a large number of intermediate shelves by providing the first path side intermediate shelves located directly below the first path and the second path side intermediate shelves located directly below the second path as the intermediate shelves, Since the intermediate shelf can be arranged at a position close to the traveling path direction from the article transfer section, the article temporarily placed on the intermediate shelf can be transferred to the ceiling transport vehicle traveling on the first path or the first path side intermediate transfer. The apparatus or the second path-side intermediate transfer device can quickly carry it into the article transfer unit, and the articles in the article transfer unit can be transferred to the ceiling transport vehicle traveling on the first path, the first path-side intermediate transfer apparatus or the second It can be quickly carried out by the two-path side intermediate transfer device and temporarily placed on the intermediate shelf.

  In addition, since the 1st path | route side intermediate shelf located directly under the 1st path | route and the 2nd path | route side intermediate shelf located directly below the 2nd path | route are provided as an intermediate shelf, it drive | works a 1st path | route. Each of the ceiling transport vehicle and the ceiling transport vehicle traveling on the second route can use an intermediate shelf located immediately below. Therefore, the ceiling conveyance vehicle traveling on the first route and the ceiling conveyance vehicle traveling on the second route have the gripping portion disposed in the route width direction in order to transfer the article to the intermediate shelf, and the interval between the first route and the second route. Since there is no need to provide a mechanism for sliding over a distance corresponding to the above, it is possible to simply configure the overhead transport vehicle.

  As described above, the present invention has led to an article transport facility that can prevent the occurrence of traffic jams in the overhead transport vehicle on the first route as much as possible while allowing the articles to be carried in and out quickly.

  A second characteristic configuration of the article transporting facility according to the present invention is provided with both the first path side intermediate transfer device and the second path side intermediate transfer device, and the first path side intermediate transfer device includes: The transfer device gripping part is provided so as to be freely retractable between a first path side position immediately below the first path and a second path side position immediately below the second path, and the transfer device gripping part Is configured to be movable along the traveling direction of the overhead transport vehicle in a state where is positioned at the first path side position, and the second path side intermediate transfer device includes the transfer device gripping portion in the first transfer side. It is provided in such a manner that it can be moved between a second path side position and the first path side position, and the transfer device gripping part is positioned at the second path side position along the traveling direction of the ceiling transport vehicle. And is configured to be freely movable.

  According to this characteristic configuration, when the article is carried into and out of the article transfer unit, the first path-side intermediate transfer device has the ceiling with the transfer device gripping part positioned at the first path-side position. The second path side intermediate transfer device moves along the traveling direction of the overhead transport vehicle with the transfer device gripping portion positioned at the second path side position. . Therefore, since the first path side intermediate transfer device and the second path side intermediate transfer device can move along the traveling direction without interfering with each other as much as possible, it is possible to smoothly carry the articles in and out of the article transfer section. it can.

  In addition, the articles temporarily placed on the intermediate shelf by the ceiling transport vehicle are carried into the article transfer unit by either the intermediate transfer device of the first path side intermediate transfer device or the second path side intermediate transfer device. In addition, since the article can be carried out from the article delivery unit and temporarily placed on the intermediate shelf by either of these intermediate transfer devices, the first path side intermediate transfer can be carried out of the article with respect to the article delivery unit. This can be performed in a timely manner in the intermediate transfer device of both the apparatus and the second path side intermediate transfer device.

  According to a third characteristic configuration of the article transport facility according to the present invention, as the article delivery section, one article delivery section and the other article delivery section that are spaced apart in the lateral width direction of the first path and the second path are provided. , The first route and the second route for the one article delivery unit, and the first route and the second route for the other product delivery unit are the first route and the second route. The first path and the second path are arranged parallel to each other in the widthwise direction, at least one of the first path and the second path for the one article transfer section and the other article transfer section. Each of both ends of at least one of the two routes is connected to a transfer route, and the ceiling transport vehicle is connected to the transfer route of the first route and the second route for the one article transfer unit. Was Between the first route and the second route connected to the transfer route between the first and second article transfer units, and configured to be movable via the transfer route, Conveying means capable of transporting articles in the width direction of the first path and the second path between the intermediate transfer apparatus for the article transfer section and the intermediate transfer apparatus for the other article transfer section Is in the point provided.

  According to this characteristic configuration, the overhead traveling vehicle has a first route and a second route connected to the transfer route among the first route and the second route for the one product delivery unit and the second route for the other product delivery unit. By traveling along the transfer route and the route connected to the transfer route among the routes, the first route and the second route for one article transfer unit and the other route connected to the transfer route and the other It is possible to move between the first route and the second route connected to the transfer route among the article transfer unit. Therefore, the ceiling transport vehicle carries the article carried out from one article delivery section or the article carried out from the one article delivery section by the intermediate transfer device and temporarily placed on the intermediate shelf to the other article delivery section. Or temporarily placed on the intermediate shelf of the other article transfer unit.

  Moreover, according to this feature configuration, an article is placed in the lateral direction of the first path and the second path between the intermediate transfer apparatus for one article transfer section and the intermediate transfer apparatus for the other article transfer section. Since the transport means that can be transported is provided, by transporting the article by the transport means from the intermediate transfer device for one article transfer section to the intermediate transfer apparatus for the other article transfer section, An article transferred from one article transfer unit by the intermediate transfer device or an article unloaded from the one article transfer unit and temporarily placed on the intermediate shelf is transferred by the intermediate transfer device for the other article transfer unit. It can be carried into the other article transfer section or temporarily placed on an intermediate shelf for the other article transfer section. Therefore, even if the overhead transport vehicle travels to the end of the first route or the second route to which the transfer route is connected and travels on the transfer route, it does not carry the article in a detouring form, and one of the article transfer units In addition, the article can be conveyed from the intermediate shelf about the other to the other article transfer unit and the intermediate shelf about the other.

  In this way, the load on the ceiling transport vehicle can be further reduced, and the articles that are unloaded from one article transfer section can be quickly loaded into the other article transfer section.

  According to a fourth characteristic configuration of the article conveying facility according to the present invention, the conveying means is between the first path-side intermediate transfer device or the second path-side intermediate transfer apparatus for the one article transfer unit. Between the first path-side intermediate transfer device or the second path-side intermediate transfer device that can freely place and support the article at the one-side transfer position for receiving and transferring the article, and the other article transfer section. It is in the point comprised by the conveyance conveyor which can carry | place an article freely to the other side transfer position which delivers and receives an article.

  According to this characteristic configuration, the first path-side intermediate transfer device or the second path-side intermediate transfer device for one article transfer unit is stopped immediately above the one-side transfer position, and is used for the transfer device. By raising and lowering the gripping portion in the vertical direction, the article is delivered from above to the conveyor. The conveyor that has placed and supported the article at the one-side transfer position places and conveys the article to the other-side transfer position. Then, in the state where the first path side intermediate transfer device or the second path side intermediate transfer device for the other article transfer unit is stopped immediately above the other side transfer position, the transfer device gripping portion is moved up and down. By moving up and down, the article which the conveyor conveys and supports at the other side transfer position is received.

  Thus, the first path side intermediate transfer device or the second path side intermediate transfer device for one article transfer unit moves the one side transfer position directly above or moves the transfer device gripping portion in the vertical direction. The article can be exchanged with the conveying means by a function that can be realized without greatly changing the existing configuration such as moving up and down. By the way, in the case where a position immediately above the one-side transfer position is newly set as a stop position, position detection means using hardware (for example, a position detection sensor) or software (for example, a position determination program based on position information in the travel route) is used. What is necessary is just to provide. The same applies to the first path side intermediate transfer device or the second path side intermediate transfer device for the other article transfer unit.

  As described above, in providing the transport means that can transport the article between the intermediate transfer apparatus for one article transfer section and the intermediate transfer apparatus for the other article transfer section, the existing intermediate transfer apparatus is provided. The conveyance means can be configured by using the configuration.

Overall plan view of an article conveying facility according to an embodiment Partially enlarged plan view of FIG. Partially enlarged side view of FIG. Front view of the traveling direction of the overhead transport vehicle Partially enlarged front view of FIG. Plan view showing the arrangement of the conveyor Front view showing the conveyor conveyor arrangement The top view explaining the stop position of an intermediate transfer device Control block diagram The top view which shows the conveyance means which concerns on another embodiment

An embodiment of an article conveying facility according to the present invention will be described with reference to the drawings.
〔overall structure〕
FIG. 1 is an overall plan view of the article transport facility according to the present embodiment, and FIG. 2 is an enlarged plan view of the upper left portion of the page in FIG. The article transport facility is provided in a semiconductor manufacturing factory, and a plurality of ceiling transport vehicles 2 that transport a substrate storage container such as a FOUP that stores a plurality of semiconductor wafers as articles W are arranged on the ceiling side. It is provided so as to be able to travel in one direction along the travel route while being supported by the travel rail 1.

  The traveling rail 1 is disposed at a height above the floor surface by a set height as shown in FIG. 1 in a plan view. Thereby, on the ceiling side, three annular paths LP1 to LP3 arranged in the left-right direction on the paper surface are set, and between the first annular path LP1 and the second annular path LP2 and between the second annular path LP2 and the third annular path. A plurality of linear first paths L1 and second paths L2 are set between the LP3 and the LP3 so as to be aligned in the vertical direction on the paper surface. As shown in FIGS. 3 and 4, the traveling rail 1 includes a pair of rail members 1 a and 1 b that are arranged at intervals in a lateral direction that is orthogonal to the traveling direction of the overhead conveyance vehicle 2 in the horizontal direction. ing. The pair of rail members 1a and 1b are suspended and supported by a pair of rail support members 9 provided on the ceiling.

  Both ends of the first route L1 and the second route L2 are connected to the annular routes LP1 to LP3 by connection portions K, and the ceiling transport vehicle 2 moves from the first route L1 and the second route L2 to the annular routes LP1 to LP3. In addition, the vehicle can travel from the circular routes LP1 to LP3 to the first route L1 and the second route L2. The second annular path LP2 is configured as a double loop path connected to each other at a plurality of locations. Since the plurality of ceiling transportation vehicles 2 travel only in one direction, the traveling directions of the ceiling transportation vehicles 2 in the first route L1 and the second route L2 arranged vertically on the paper surface of FIGS. 1 and 2 are alternately reversed. It is set to become.

  Immediately above the station 4 as the article transfer unit provided in the plurality of processing apparatuses 8 arranged side by side in the horizontal direction of the paper in FIGS. 1 and 2, the alignment direction of these stations 4 (the horizontal direction of the paper in FIGS. 1 and 2). ) Along the first path L1. A second path L2 is set in parallel with the first path L1 at different positions in the width direction of the first path L1 (the vertical direction in FIG. 1 and FIG. 2).

[Processing equipment]
Between the first annular path LP1 and the second annular path LP2 and between the second annular path LP2 and the third annular path LP3, the semiconductor wafer accommodated in the substrate storage container is taken out, and the semiconductor wafer is processed. A plurality of processing devices 8 that perform processing such as inspection are arranged on the floor surface in a state of being aligned in the vertical and horizontal directions of the paper surface of FIGS. A station 4 is provided at an end of the processing device 8, and the processing device 8 sends and receives the article W to and from the ceiling transport vehicle 2 and an intermediate transfer device 6 to be described later via the station 4.

  The processing devices 8 are arranged in pairs in a posture in which the stations 4 face each other in the vertical direction of the drawing in FIGS. 1 and 2. Thus, as the station 4, one station 4 and the other station 4 which are separated in the arrangement direction of the first route L1 and the second route L2 are provided. The first route L1 and the second route L2 for one station 4 and the first route L1 and the second route L2 for the other station 4 are spaced apart in the lateral direction of the first route L1 and the second route L2. The first route L1 and the second route L2 are all connected in parallel with each other, and both ends of the first route L1 and the second route L2 are connected to the annular routes LP1 to LP3 as transfer routes.

  As shown in FIGS. 2 to 4, the station 4 is provided at the end of the processing apparatus 8 so that the article W can be placed and supported at a height lower than the height of the processing apparatus 8. The article W delivered to the station 4 by the ceiling transport vehicle 2 or the intermediate transfer device 6 is taken into the processing device 8, and the processed article W is delivered to the station 4 again, and the ceiling transport vehicle 2 Or the intermediate transfer device 6.

  In the present embodiment, the station 4 has a length in the traveling direction so that the three articles W can be placed and supported in a state where the three articles W are arranged adjacent to each other in the traveling direction of the ceiling transport vehicle 2. That is, three article transfer positions are set in the station 4, and a stop for the transfer section that stops when the overhead carriage 2 transfers the articles W to and from these article transfer positions on the travel route 1. As the position Q1, the first delivery / reception unit stop position Q1a, the second delivery / reception unit stop position Q1b, and the third delivery / reception unit stop position Q1c, in order from the upstream in the traveling direction of the overhead conveyance vehicle 2 on the first route L1. Three are set immediately above each of the three article delivery positions in the station 4.

[Intermediate shelf]
As shown in FIGS. 1 to 4, the intermediate shelf 5 for temporarily placing the article W delivered to the station 4 and the article W received from the station 4 directly below the first path L1 and the second path L2 It is arranged above the station 4 and below the ceiling transport vehicle 2 in the direction. In the present embodiment, as the processing device 8, the first processing device 8a and the second processing device 8b are arranged adjacent to each other in a state of being aligned along the traveling direction of the overhead conveyance vehicle 2 on the first route L1 and the second route L2. A plurality of intermediate shelves 5 are arranged over the upper part of each of the processing apparatuses 8. As the intermediate shelf 5, the first route side intermediate shelf 5n that is located immediately below the first route L1 and at a position different from the station 4 in the traveling direction of the ceiling transport vehicle 2 and the second shelf L2 that is located directly below the second route L2. A two-path side intermediate shelf 5a is provided.

  As shown in FIGS. 3 and 4, the intermediate shelf 5 is provided in a state of projecting downward from the lower portion of the buffer frame 55 supported by being suspended from the ceiling. The buffer frame 55 includes an upstream portion 55a positioned on the upstream side in the traveling direction of the overhead conveyance vehicle 2 traveling on the first path L1, and a downstream portion 55b positioned on the downstream side, respectively. 4, 5, and 6, the first path side frame body 55 n and the second path side frame body 55 f are provided in a state of being aligned in the lateral width direction of the travel path. Since the upstream portion 55a and the downstream portion 55b have the same configuration, the upstream portion 55a will be described below as a representative.

  The first path-side frame body 55n and the second path-side frame body 55f in the upstream portion 55a are arranged with the frame-shaped horizontal frame members 25 spaced apart from each other in the horizontal direction and the traveling direction of the ceiling transport vehicle 2. A plurality of portions are connected by vertical connecting members 26. The horizontal frame member 25 connects a plurality of vertical horizontal members 25T along the longitudinal direction of the first path L1 and the second path L2 and a horizontal horizontal member 25Y along the width direction of the first path L1 and the second path L2. It is comprised by the frame which did. Note that the vertical and horizontal members 25T and the vertical connecting member 26 are also used in the upstream portion 55a and the downstream portion 55b.

  The first path side frame body 55n and the second path side frame body 55f are suspended and supported from the ceiling by a plurality of shelf suspending tools 24. The shelf suspending tool 24 is longer than the rail support member 9 that suspends and supports the traveling rail 1 by a length corresponding to the vertical height of the ceiling transport vehicle 2. Thereby, the 1st path | route L1 and 2nd path | route L2 of the ceiling conveyance vehicle 2 are located between several shelf suspending tools 24 by driving | running | working direction view, and the 1st path | route side frame 55n in the upstream part 55a is The second path-side frame 55f in the upstream portion 55a is positioned directly below the second path L2 of the ceiling transport vehicle 2 and is positioned directly below the first path L1 of the ceiling transport vehicle 2.

  As shown in FIG. 6, the first path side frame 55n in the upstream portion 55a has first and second ends on the upstream side and the downstream side in the traveling direction of the ceiling transport vehicle 2 traveling on the first path L1. An intermediate shelf member 27 that forms one path side intermediate shelf 5n is provided. In addition, the second path side frame 55f in the upstream portion 55a is provided with four second path side intermediate shelves 5f at four locations excluding the downstream end in the traveling direction of the ceiling transport vehicle 2 traveling on the second path L2. An intermediate shelf member 27 is provided.

  As shown in FIGS. 5 and 6, the intermediate shelf member 27 includes three positioning pins 28 that engage the three positioning grooves formed on the bottom surface of the article W to position the article W. A horizontal mounting surface portion 27a, a connecting plate portion 27b extending upward from one end of the mounting surface portion 27a, and a connecting plate portion 27c extending upward from the other end. Yes. The upper end of the connection plate portion 27b on one side is connected to the horizontal horizontal member 25Y, and the upper end of the connection plate portion 27c on the other side is connected to the other horizontal horizontal member 25Y adjacent to the horizontal horizontal member 25Y on the one side in the horizontal width direction. By being connected by the connection bracket 29, the intermediate shelf member 27 is configured such that the placement surface portion 27 a is positioned below the lower end of the buffer frame 55 by the height of the article W and the buffer frame 55. It is fixed to. With such a configuration, the placement surface portion 27a in a posture (a posture facing the right direction in FIG. 5) in which the front surface of the article W (the surface on which the front opening of the substrate container is located) faces the connection plate portion 27b on one side. The article W is placed and supported.

  As shown in FIGS. 2 and 6, the two first path side intermediate shelves 5 n positioned on the first path L <b> 1 side and the four positioned on the second path L <b> 2 side in the upstream portion 55 a of the buffer frame 55. The second path side intermediate shelf 5f and the station 4 in the first processing apparatus 8a constitute a first transfer target group G1 as a set of transfer target groups for the first processing apparatus 8a. Similarly, two first path side intermediate shelves 5n located on the first path L1 side and four second path side intermediate shelves located on the second path L2 side in the downstream portion 55b of the buffer frame 55. 5f and the station 4 in the second processing apparatus 8b constitute a second transfer target group G2 as a set of transfer target groups for the second processing apparatus 8b. Thus, a set of transfer target groups is provided for each of the first processing device 8a and the second processing device 8b.

  And about the transfer object except the station 4 among the 1st transfer object groups G1, the stop position where the ceiling conveyance vehicle 2 traveling on the first route L1 stops and the ceiling conveyance vehicle 2 traveling on the second route L2 are stopped. The stop position to be set is set. That is, as a stop position for the first transfer target group G1, in addition to three stop positions Q1a to Q1c corresponding to the three article transfer positions of the station 4, the most upstream in the direction along the first path L1. The first path L1 travels to a position adjacent to the first transfer section stop position Q1a on the upstream side and a position adjacent to the most downstream transfer section stop position Q1c on the downstream side in the direction along the first path L1. The first path side intermediate shelf stop position Q2n is set for the ceiling transport vehicle 1 to transfer the article W to and from the first path side intermediate shelf 5n. In addition, in the second path L2, the overhead transport vehicle 2 traveling on the second path L2 is in the four locations corresponding to the four second path side intermediate shelves 5f, and the article is between the second path side intermediate shelves 5f. A second path side intermediate shelf stop position Q2f for transferring W is set. The same applies to the stop position for the second transfer target group G2.

[Ceiling transport vehicle]
As shown in FIGS. 3, 4, and 7, the overhead transport vehicle 2 includes a traveling unit 10 that includes traveling drive wheels that travel on the traveling rail 1, and is supported by being suspended from the traveling unit 10 and lifts and lowers the article W. And a main body part 11 that is supported so as to be movable and turnable. A connecting body that connects the traveling part 10 and the main body part 11 is provided between the pair of rail members 1a and 1b. ing. The traveling unit 10 is provided with a traveling motor 51 (see FIG. 9) that rotationally drives the traveling drive wheels.

  The main body 11 includes a grip 3 that holds the article W, a lifting operation means 12 that moves the lifting support 22 that supports the grip 3 up and down, and the lifting support 22 together with the lifting support 22 around the grip 3. And a cover body 13 that covers the upper, front, rear, and left and right sides of the article W held by the grip portion 3. The main body 11 is provided with a power receiving coil 14 so as to be positioned between the pair of rail members 1a and 1b, and an alternating current is passed through a power supply line 15 disposed along the traveling rail 1. Thus, a magnetic field is generated, and electric power necessary for the ceiling conveyance vehicle 2 is generated in the power receiving coil 14 by the magnetic field, and power is supplied to the ceiling conveyance vehicle 2 in a non-contact state.

  The elevating operation means 12 includes an elevating motor 52 (see FIG. 9) and a rotating drum. The elevating motor 52 is driven to rotate in the forward and reverse directions by the rotation operation of the elevating motor 52, and the winding belt 16 is moved. By winding and unwinding, the lifting support 22 is configured to be movable up and down.

  The turning operation means includes a turning motor 53 (see FIG. 9), and the lifting support 22 is turned around the vertical axis by the rotational drive of the turning motor 53. The lifting support 22 is provided with a switching mechanism for switching the posture of the gripper 3 between a gripping posture for gripping the article W and a gripping release posture for releasing the gripping by the operation of the gripping motor 54 (see FIG. 9). It has been.

  With the configuration as described above, the overhead traveling vehicle 2 travels in one direction while being guided and supported by the travel rail 1, and thus travels along the first route L 1, the second route L 2, and the annular routes LP 1 to LP 3. It can run freely.

  The overhead traveling vehicle 2 traveling on the first path L1 is moved up and down by the elevating operation means 12 with the elevating operation means 12 in a state where it is stopped at any of the plurality of stop positions Q1a to Q1c. The lifting / lowering support 22 is swiveled and the gripping portion 3 is switched between the gripping posture and the gripping release posture by the switching mechanism, so that the article W can be moved between the article transfer position of the station 4 located immediately below. Similarly, the article W is transferred to and from the first path side intermediate shelf 5n located immediately below in a state where it is stopped at any of the plurality of first path side intermediate shelf stop positions.

  The overhead transport vehicle 2 traveling on the second path L2 is operated at a turning operation by lifting and lowering the lifting support 22 by the lifting operation means 12 in a state where it is stopped at any of the plurality of second path side intermediate shelf stop positions. The lifting support 22 is swiveled by the means, and the gripping portion 3 is switched between the gripping posture and the gripping release posture by the switching mechanism, so that the article is exchanged with the second path side intermediate shelf 5f located immediately below. Transfer W.

  3 and 4, the overhead conveyance vehicle 2 traveling on the first route L1 is the most upstream in the traveling direction indicated by the arrow a in FIG. 3 among the three stop positions Q1a to Q1c for the transfer portion of the upstream portion 55a. 3 in the five second path side intermediate shelf stop positions Q2f of the five downstream side portions 55b of the overhead conveyance vehicle 2 that stops at the transfer part stop position Q1a on the side and travels on the second path L2. The state which stopped in the stop position Q2f for the most upstream side in the traveling direction shown by is shown.

[Intermediate transfer equipment]
As shown in FIGS. 3 to 7, the intermediate transfer device 6 is provided with the buffer frame 55 provided with the intermediate shelf 5 as an installation target case. As the intermediate transfer device 6, one buffer transfer body 55 is provided with both the first intermediate transfer device 6n and the second intermediate transfer device 6f. The first intermediate transfer device 6n is vertically overlapped with the first path L1 and the first path side intermediate shelf 5n in the traveling direction view of the ceiling transport vehicle 2, and the first path L1 and the first path side intermediate shelf 5n Is provided so as to be reciprocally movable in a direction along the traveling direction of the ceiling conveyance vehicle 2 at a height between the two. The second intermediate transfer device 6f is vertically overlapped with the second path L2 and the second path side intermediate shelf 5f when viewed from the traveling direction of the ceiling transport vehicle 2, and the second path L2 and the second path side intermediate shelf 5f Is provided so as to be reciprocally movable in a direction along the traveling direction of the ceiling conveyance vehicle 2 at a height between the two.

  Both the first intermediate transfer device 6n and the second intermediate transfer device 6f are provided so as to be reciprocally movable over the entire range of the buffer frame 55 in these moving directions. As a result, the first intermediate transfer device 6n and the second intermediate transfer device 6f reciprocate over the upstream portion 55a and the downstream portion 55b, so that the first transfer of the first processing device 8a is performed. The article W can be transferred to any of the transfer targets in the second transfer target group G2 for the mounting target group G1 and the second processing device 8b. Details will be described below.

  As shown in FIG. 5, the first intermediate transfer device 6 n includes a transfer device gripping portion 7 that supports the article W so as to be movable up and down, and the transfer device gripping portion 7 is provided with a horizontal width of the transfer device. A traversing operation means 31 that traverses in a direction (horizontal width direction of the first path L1 and the second path L2; right and left direction in FIG. 5) is provided.

  The first intermediate transfer device 6n uses the traversing operation means 31 to move the transfer device gripping portion 7 as the first route side position immediately below the first route L1 and the second route side immediately below the second route L2. It is configured to be movable between the projecting position as a position, and is movable along the traveling direction of the ceiling transport vehicle 2 with the transfer device gripping portion 7 positioned at the retracted position. Thereby, the interference with the overhead conveyance vehicle 2 during the transfer operation and the interference with the second intermediate transfer device 6f are prevented.

  FIG. 4 shows the state in which the first intermediate transfer device 6n and the second intermediate transfer device 6f are retracting the transfer device gripping portion 7 to the retracted position, as viewed from the traveling direction of the ceiling transport vehicle 2. FIG. 5 shows a state where the first intermediate transfer device 6n and the second intermediate transfer device 6f are both stopped and the transfer device gripping portion 7 is protruded to the protruding position. This is shown in the traveling direction of the vehicle 2.

  As shown in FIGS. 3 to 5, the buffer frame 55 is provided with a guide support 17 that supports the first intermediate transfer device 6 n and guides the movement along the traveling direction of the ceiling transport vehicle 2, The guide support 17 allows the gripping section 3 and the article W to pass vertically when the overhead conveyance vehicle 2 stopped at the transfer section stop position Q1 and the intermediate shelf stop position Q2 transfers the article W. It is configured to form a simple space.

  Specifically, the transfer device of the first intermediate transfer device 6n in a state in which the guide support 17 forms a gap in which the grip portion 3 of the ceiling transport vehicle 2 holding the article W can pass in the vertical direction. It is comprised by a pair of lower guide rail 18 * 19 arrange | positioned at intervals in the width direction. The pair of lower guide rails 18 and 19 are attached to the lower surfaces of the two rail attachment members 20 and 21 that connect the pair of vertical and horizontal members 25T positioned at both ends in the traveling direction in the upper part of the buffer frame 55. Yes.

  Slide blocks 34 and 35 which are slidably engaged with the pair of lower guide rails 18 and 19 are provided at both ends of the moving base member 32 provided in the upper portion of the first intermediate transfer device 6n in the width direction of the transfer device. It is provided in a fixed state. An operated bracket 33 is attached to one end portion of the moving base member 32 as viewed in the traveling direction. The operated bracket 33 is provided with a horizontal portion 33a having a bent lower end portion. As shown in FIGS. 3 and 5, the longitudinally wound around the toothed drive pulley 36a and the driven pulley 36b of the horizontal axis. The operated bracket 33 is connected to the upper surface of the upper winding portion of the rotating surface timing belt 38 for operation.

  The moving base material 32 can be reciprocated linearly along the pair of lower guide rails 18 and 19 by rotating the moving operation motor 37 for winding the moving operation timing belt 38 in the forward and reverse directions. It is like that. That is, by controlling the rotation operation of the movement operation motor 37, the movement operation of the first intermediate transfer device 6n can be controlled. The positioning control for the movement operation of the intermediate transfer device 6 may be performed by servo control using a servo motor as the movement operation motor 37, or the movement path along the traveling direction of the first intermediate transfer device 6n. A plurality of photoelectric sensors corresponding to each stop position may be provided as position detection means for detecting the stop position for transfer set in step 4, and positioning control may be performed based on detection information of these sensors.

  As shown in FIG. 5, a ball screw 40 is provided on the upper surface of the moving base member 32 of the first intermediate transfer device 6n so that the guide block 39 can be moved in the horizontal direction of the transfer device. The guide block 39 is connected to a retracting side end portion of the base fork in the multi-stage slide fork 42 that moves the lifting support 41 in the horizontal direction of the transfer device. Each stage of the slide fork 42 is interlocked and connected by a linkage belt 43 while being engaged with each other by a direct guide mechanism, and the lifting / lowering operation means 45 and the turning operation means 46 are connected to the primary fork by an exit / retreat operation with respect to the base fork. It is comprised so that the raising / lowering support body 41 connected via can be made to withdraw. The guide block 39 can be reciprocally moved along the width direction of the transfer device by rotating the traverse operation motor 44 that rotationally drives the screw 40a of the ball screw 40 in the forward and reverse directions. In this way, the traversing operation means 31 that traverses the transfer device gripping portion 7 in the intermediate transfer device 6 in the lateral direction of the transfer device is configured by the traverse operation motor 44, the ball screw 40, and the slide fork 42. Has been.

  The elevating operation means 45 rotates the elevating motor 47 in the forward and reverse directions to rotate the rotary drum 48 and feeds and winds the take-up belt 49, thereby elevating and lowering the elevating support body 41 up and down. It is configured to be able to. The turning operation means 46 rotates the turning motor 50 to turn the transfer device gripper 7 about the vertical axis. Thereby, the planar view posture of the article W with respect to the station 4 and the intermediate shelf 5 can be adjusted to an appropriate posture.

  With this configuration, as shown in FIG. 6, the first intermediate transfer device 6n has two first path side intermediate shelves 5n for each of the upstream portion 55a and the downstream portion 55b of the buffer frame 55. The two transfer stop positions Pn1 and Pn5 set immediately above each of the three intermediate transfer devices 6n and the three transfer positions set between these transfer stop positions in the moving direction of the first intermediate transfer device 6n. In a state where it is stopped at any of the stop positions Pn2 to Pn4, the transfer device gripping portion 7 is moved in a row and moved up and down to the first path side intermediate shelf 5n, between the second path side intermediate shelf 5f, In addition, the article W is configured to be freely transferred between each article delivery position in the station 4.

  The second intermediate transfer device 6f has the same configuration as that of the first intermediate transfer device 6n except that the direction in which the traversing operation means 31 moves out and retracts the transfer device gripping portion 7 is opposite. . Then, the second intermediate transfer device 6f has four locations set immediately above each of the four second path side intermediate shelves 5f for each of the upstream portion 55a and the downstream portion 55b of the buffer frame 55. Corresponds to the transfer stop positions Pf1 to Pf4 and the first path side intermediate shelf 5n on the inner side of the buffer frame 55 in the traveling direction of the ceiling transport vehicle 2 among the two first path side intermediate shelves 5n. In the state stopped at one of the transfer stop positions Pf5 to be moved, the transfer device gripping portion 7 is traversed and moved up and down between the first path side intermediate shelf 5n and the second path side intermediate shelf 5f. The article W is configured to be freely transferred between the article delivery positions at the station 4.

[Conveyor]
The intermediate portion of the buffer frame 55 in the traveling direction of the overhead conveying vehicle 2 is located between one station 4 and the other station 4 arranged in a state of being opposed to each other in the vertical direction in FIG. 1 and FIG. A pair of transfer conveyors 56 that can transfer the articles W between the transfer target group for the station 4 and the transfer target group for the other station 4 are provided. The pair of transport conveyors 56 are connected in a state of being supported suspended from the upstream portion 55 a and the downstream portion 55 b of the buffer frame 55. Since both have the same configuration, the conveyance conveyor 56 connected to the upstream portion 55a of the buffer frame 55 will be described below as a representative.

  As shown in FIGS. 6 and 7, the transport conveyor 56 includes a transport path portion 57 that interconnects the buffer frames 55 for one and the other stations 4, and an article mounting table on which the article W can be placed and supported. 58 is configured to be movable up and down and turnable, and includes a transfer moving body 59 that can reciprocate the transfer path portion 57. One end of the transport path portion 57 is connected to the buffer frame 55 for one station 4, and the other end of the transport path portion 57 is connected to the buffer frame 55 for the other station 4. The transport conveyor 56 is suspended and supported by both buffer frames 55. In addition, you may connect the intermediate part and the ceiling of the conveyance conveyor 56 for reinforcement.

  As shown in FIG. 9, the transfer moving body 59 includes a traveling motor 61 that rotationally drives the drive wheels, a lifting motor 62 that drives the article mounting table 58 up and down, and a turning motor 63 that drives the article mounting table 58 to rotate. It has. Similarly to the intermediate shelf member 27 that forms the intermediate shelf 5, the article mounting table 58 has three pieces for positioning the article W by engaging with three positioning grooves formed on the bottom surface of the article W. Positioning pins are sprouting.

  The conveyance path portion 57 is constituted by a case body, and a slit 60 is formed along the longitudinal direction on the upper surface portion thereof. The transport moving body 59 is provided in the transport path portion 57 to prevent dust from being scattered to the outside, and the article mounting table 58 in the transport moving body 59 is not shown in the drawing. The support shaft is connected and supported so as to be movable up and down with respect to the transfer movable body main body above the upper surface. The transport moving body 59 is reciprocally movable along the longitudinal direction inside the transport path portion 57 while being guided by a guide mechanism (not shown) by rotating the drive wheels forward and backward. ing.

  As shown in FIG. 8, the transport conveyor 56 is positioned in the traveling direction of the ceiling transport vehicle 2 on the moving paths of the first intermediate transfer device 6 n and the second intermediate transfer device 6 f for one station 4. A conveyor transfer position Pc for transferring the article W between the first intermediate transfer device 6n and the second intermediate transfer device 6f and the end of the conveyor 56 on one station 4 side is set at the location. ing. Similarly, in each movement path of the first intermediate transfer device 6n and the second intermediate transfer device 6f for the other station 4, the transfer conveyor 56 is positioned in the traveling direction of the ceiling transfer vehicle 2 at the first position. A conveyor transfer position Pc for transferring the article W between the first intermediate transfer device 6n and the second intermediate transfer device 6f and the end of the transport conveyor 56 on the other station 4 side is set.

  The first intermediate transfer device 6n and the second intermediate transfer device 6f for one station 4 are stopped at the conveyor transfer position Pc set in the respective movement paths, and are at one end of the transport conveyor 56. The article W is transferred to and from the receiving platform 64 provided at the one side transfer position which is a part. Similarly, the first intermediate transfer device 6n and the second intermediate transfer device 6f for the other station 4 are stopped at the conveyor transfer position Pc set in the respective movement paths, and the other of the transfer conveyors 56 is stopped. The article W is transferred to and from the receiving platform 64 provided at the other-side transfer position, which is the side end.

  In this embodiment, the conveyor transfer position Pc includes the transfer stop positions Pn5 and Pf5 of the upstream portion 55a, the transfer stop positions Pn1 and Pf1 of the downstream portion 55b, the first intermediate transfer device 6n, 2 is set at the same position in the moving direction of the intermediate transfer device 6f. Further, since the conveyor transfer position Pc is located immediately below the second path L2, the first intermediate transfer device 6n causes the transfer device gripping portion 7 to protrude to the protruding position, thereby moving the transfer moving body 59. The article W is transferred between. The second intermediate transfer device 6f transfers the article W between the transfer device 59 and the transfer device 59 while keeping the transfer device gripping portion 7 in the retracted position.

  As shown in FIGS. 4, 6, and 7, at both the one side transfer position and the other side transfer position of the transfer conveyor 56, a load receiving platform 64 on which the article W can be placed and supported is provided. The positioning table 64 is provided with three positioning pins for positioning the article W. These positioning pins are arranged so as to engage with the bottom surface of the article W at a position different from that on the article mounting table 58 in the transporting moving body 59, and the article from below the article W positioned on the load receiving platform 64. The mounting table 58 can be raised and supported while being positioned on the article mounting table 58, and the position and posture of the article W are shifted when the scooping transfer for receiving the article W from the load receiving table 64 to the transfer moving body 59 is performed. Can be done without. Similarly, the wholesale transfer of transferring the opposite article W from the transfer moving body 59 to the load receiving stand 64 can be performed without the position and posture of the article W being shifted.

  Thus, in the present embodiment, the first intermediate transfer device 6n and the second intermediate transfer device 6f for one station 4 and the first intermediate transfer device 6n and the second intermediate transfer device for the other station 4 are used. A conveying means for conveying the article W in the lateral width direction of the first path L1 and the second path L2 is provided between the apparatus 6f, and the conveying means is a first intermediate transfer apparatus for one station 4. 6n and the second intermediate transfer device 6f, the first intermediate transfer device 6n and the second intermediate transfer device 6n and the second station 4 can be placed and supported at the transfer position on one side where the product W is transferred. It is comprised by the conveyance conveyor 56 which can mount and convey the goods W to the other side transfer position which delivers and receives the goods W between the intermediate transfer apparatuses 6f.

  Furthermore, in this embodiment, the transfer conveyor 56 has a load receiving platform 64 that can freely load and support the articles W transferred by the first intermediate transfer device 6n and the second intermediate transfer device 6f for one station 4. There is provided a load receiving platform 64 capable of mounting and supporting an article W transferred by the first intermediate transfer device 6n and the second intermediate transfer device 6f for the one side transfer position provided and the other station 4. And a transfer moving body 59 that can transfer the article W at the other-side transfer position and can transfer the article W between the one-side transfer position and the other-side transfer position. Has been.

  FIG. 9 is a control block diagram of the article transport facility. The ceiling transfer controller VCq provided in the ceiling transfer vehicle 2, the intermediate transfer device controller VCp provided in the intermediate transfer device 6, and the conveyor controller VCr provided in the transfer conveyor 56 are connected to the host controller HC so as to be capable of wireless communication. The host controller HC manages the processing process of the article W, sets the conveyance source and the conveyance destination for each article W in accordance with the conveyance request from each processing device, and appropriately conveys the article W. Is commanded. And based on the conveyance command which the host controller HC commands, the operation of the ceiling conveyance vehicle 2, the intermediate transfer device 6, and the conveyance conveyor 5 is controlled by the above-mentioned controllers.

  For example, when the processing of the article W is completed in a certain processing apparatus 8, the host controller HC issues a conveyance command for unloading the processed article W from the station 4 and conveying it to the processing apparatus 8 in the next process. However, the transporting operation is performed by transporting another article W toward the adjacent station 4 as the transfer target group belonging to the same buffer frame 55 to which the station 4 or the transfer target group of the station 4 belongs. By temporarily placing the other article W on the intermediate shelf 5 in the buffer frame 55 in the ceiling carriage 2 that is present, the carry-out operation can be performed quickly even when there is no standby carriage 2 in the standby state. Can be processed. Further, by temporarily placing the intermediate shelf 5, it is possible to eliminate as much as possible the waste of traveling in an empty state in which the overhead conveyance vehicle 2 does not hold the article W as the entire facility.

  In the present embodiment, the intermediate shelf 5 is provided immediately below both the first route L1 and the second route L2, and any of the ceiling transport vehicles 2 traveling on the first route L1 and the second route L2 is directly below itself. Therefore, it is possible to avoid the inconvenience that the loading load concentrates on the ceiling transport vehicle 2 traveling on the first route. In addition, the handling of the article W to the station 4 in the processing apparatus 8 uses a large number of intermediate shelves 5 provided in the buffer frame 55 provided over the station 4 adjacent to the station in the traveling direction. Therefore, since the number of the intermediate shelves 5 is small, the situation that the overhead conveyance vehicle 2 cannot temporarily place the articles W carried into the station 4 or the articles W carried out on the intermediate shelves 5 can be performed as much as possible. . In addition, by providing the intermediate transfer device 5 directly below both the first route L1 and the second route L2, it is possible to further reduce the handling load of the ceiling transport vehicle 2. Further, when the article W is transported from the transfer target group for the station 4 to the transfer target group for the opposite station 4, the overhead transport vehicle 2 passes through the circular paths LP1 to LP3 as in the conventional case. The article W can be quickly conveyed using the conveyor 56 between the intermediate transfer apparatuses for the opposing stations 4 in place of the route to be transported.

[Another embodiment]
The invention made by the inventor has been specifically described based on the embodiment of the invention. However, the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the scope of the invention. Hereinafter, another embodiment of the present invention will be described.

(1) In the above embodiment, an example in which both ends of the second route L2 are connected to the annular routes LP1 to LP3 as transfer routes is illustrated, but both ends of the second route L2 are connected to any route. It may not be. In this case, the overhead conveyance vehicle 2 traveling on the second route L2 travels back and forth on the second movement route L2.

(2) In the above embodiment, the intermediate transfer device 6 shares the buffer frame 55 with a plurality of adjacent stations 4, and both the upstream portion 55a and the downstream portion 55b of the buffer frame 55 are used. However, instead of this, a buffer frame 55 is provided exclusively for the single station 4 so that the intermediate transfer device 6 can move to the single station 4 in the moving direction. It may be movable within the range of the buffer frame 55.

(3) In the said embodiment, you may comprise so that a ceiling conveyance vehicle may be equipped with a holding | grip part slidably in the width direction of a driving path.

(4) In the above embodiment, the first intermediate transfer device 6n and the second intermediate transfer device 6f are along the traveling direction of the ceiling transport vehicle 2 with the transfer device gripping portion 7 positioned at the retracted position. However, the first intermediate transfer device 6n and the second intermediate transfer device 6f do not interfere with the counterpart intermediate transfer device and the ceiling transport vehicle 2 that performs the transfer operation. As long as the transfer device gripping portion 7 is protruded to the protruding position, the transfer device gripping portion 7 may be allowed to move while the transfer device gripping portion 7 is moved out and in.

(5) In the above embodiment, the one intermediate transfer device 6n and the second intermediate transfer device 6f are provided for one buffer frame 55. However, one buffer frame is used. A plurality of first intermediate transfer devices 6n and second intermediate transfer devices 6f may be provided on the body 55.

(6) In the above-described embodiment, the transport conveyor is configured such that the transport moving body that is movable along the transport path portion transports the article. However, instead of this configuration, the transport conveyor is a belt. It may be configured such that the article is conveyed by a winding operation or a reciprocating operation such as a conveyor.

(7) In the above embodiment, the conveying means is exemplified by a conveying conveyor. However, as illustrated in FIG. 10, the conveying means is a pair of article transfer units arranged in the direction in which the traveling paths are arranged. You may comprise by the transition rail arrange | positioned between the frame bodies for buffers, and the intermediate transfer apparatus comprised so that transfer to this transition rail was possible. In the example of FIG. 10, the transfer means is exemplified by a transition rail and a second path side intermediate transfer device, but the transfer means is a transfer rail and a first path side intermediate transfer apparatus. It can also consist of. In any case, it is preferable to provide a moving direction switching means for switching the moving direction of the intermediate transfer device from the direction along the traveling direction of the overhead conveyance vehicle to the direction along the lateral width direction of the traveling path. A specific example will be described below.

  As shown in FIG. 10, the intermediate transfer device 6 is configured so as to be able to travel while being suspended and supported by the upper rail 65 along the traveling direction of the ceiling transport vehicle 2. A crossing rail 67 is disposed at the same height as the upper rail 65 between the buffer frames 55 for the pair of stations 4 arranged along the arrangement direction of the L1 and the second path L2. As a part of the upper rail 65 of the second intermediate transfer device 6 f in each of the buffer frames 55, a moving direction switching rail 66 (moving direction switching means) that is rotatable about the longitudinal axis is provided on the transition rail 67. It is arranged at both ends.

According to such a configuration, the second intermediate transfer device 6f holding the article W is caused to travel along the traveling direction of the overhead conveyance vehicle 2 to the place where the moving direction switching rail 66 is installed, and the moving direction switching rail 66, the moving direction switching rail 66 is then suspended from the direction along the first path L1 and the second path L2 of the overhead transport vehicle 2 and the lateral width of the first path L1 and the second path L2 By switching in the direction along the direction, the second intermediate transfer device 6 f can move along the rail 67 from one buffer frame 55 to the other buffer frame 55.
After the second intermediate transfer device 6f reaches the other buffer frame 55, the movement direction switching rail 66 in the other buffer frame 55 is moved between the first path L1 and the second path L2 of the ceiling transport vehicle 2. By switching from the direction along the lateral width direction to the direction along the first path L1 and the second path L2, the second intermediate transfer device 6f moves along the upper rail 65 in the other buffer frame 55. The article W can be transferred to the article delivery position in the other station 4 or the intermediate shelf 5 in the buffer frame for the station 4. As described above, the buffer frame 55 for one station 4 and the buffer frame 55 for the other station 4 can also serve as the second intermediate transfer device 6f.

DESCRIPTION OF SYMBOLS 1 Traveling rail 2 Ceiling conveyance vehicle 3 Grasp part 4 Article transfer part 5 Intermediate shelf 5n First path side intermediate shelf 5f Second path side intermediate shelf 6 Intermediate transfer device 6n First path side intermediate transfer device 6f Second path side Intermediate transfer device 7 Transfer device gripping portion 56 Conveyor (conveying means)
W Article L1 First route L2 Second route LP1, LP2, LP3 Transfer routes Q1a, Q2a, Q3a Stop position for transfer section

Claims (4)

Between the article transfer section provided on the floor side, with a gripping section that can be moved up and down along the traveling path while being guided and supported by a traveling rail disposed on the ceiling side, and that can freely move up and down With a ceiling transporter that can transfer articles freely,
An article conveying facility provided with an intermediate shelf for temporarily placing an article placed above the article delivering unit and below the ceiling conveyance vehicle and transferred to the article delivering unit,
As the travel route, a linear first route that passes through a stop position for a delivery unit that is set immediately above the product delivery unit, and a position that is parallel to the first route and different in the lateral width direction of the first route. A set linear second path is provided,
The intermediate shelves are located immediately below the first path and directly below the second path and the first path side intermediate shelf located at a position different from the article transfer unit in the traveling direction of the overhead transport vehicle. A second path side intermediate shelf is provided,
A transfer device gripping part for supporting the article is provided so as to be vertically movable and slidable in the widthwise direction of the first path and the second path, and between the first path side intermediate shelf and the first path. An intermediate transfer device is provided between the two path side intermediate shelves and between the article transfer section, the intermediate transfer device capable of transferring the articles freely,
As the intermediate transfer device, between the first path and the first path side intermediate shelf in a state of overlapping the first path and the first path side intermediate shelf in the traveling direction view of the ceiling transport vehicle. A first path side intermediate transfer device provided at a height so as to be reciprocally movable along the traveling direction of the ceiling transport vehicle, or the second path and the second path side in the traveling direction view of the ceiling transport vehicle A second path-side intermediate shift provided so as to be reciprocally movable along the traveling direction of the ceiling transport vehicle at a height between the second path and the second path-side intermediate shelf in a state of overlapping with the intermediate shelf. Article conveying equipment provided with at least one of the loading devices. Both the first path side intermediate transfer device and the second path side intermediate transfer device are provided,
The first path-side intermediate transfer device projects the transfer device gripping portion between a first path-side position immediately below the first path and a second path-side position immediately below the second path. Removably provided, and configured to be movable along the traveling direction of the overhead transport vehicle with the transfer device gripping portion positioned at the first path side position,
The second path side intermediate transfer device is provided with the transfer device gripping part so as to be freely retractable between the second path side position and the first path side position. The article conveyance facility according to claim 1, wherein the article conveyance facility is configured to be movable along a traveling direction of the ceiling conveyance vehicle in a state of being positioned at the second path side position. As the article delivery section, one article delivery section and the other article delivery section that are spaced apart in the width direction of the first path and the second path are provided,
The first path and the second path for the one article transfer section, and the first path and the second path for the other article transfer section are the widths of the first path and the second path. Arranged parallel to each other with a gap in the direction,
At least one of the first path and the second path for the one article transfer section and at least one of the first path and the second path for the other article transfer section are for transfer. Connected to the route,
The ceiling transport vehicle includes the first route and the second route connected to the transfer route among the first route and the second route for the one item transfer unit, and the first route and the second route for the other item transfer unit. It is configured to be movable via the transfer route between two routes connected to the transfer route,
Articles can be conveyed in the width direction of the first path and the second path between the intermediate transfer device for the one article transfer section and the intermediate transfer apparatus for the other article transfer section. The article conveying facility according to claim 1 or 2, wherein a conveying means is provided.   The conveyance means places the article at a one-side transfer position where the article is transferred to or from the first path-side intermediate transfer device or the second path-side intermediate transfer apparatus for the one article transfer unit. Place the article up to the other side transfer position that can be placed and supported, and exchanges the article with the first path side intermediate transfer apparatus or the second path side intermediate transfer apparatus for the other article transfer section. The article conveyance facility according to claim 3, wherein the article conveyance facility is configured by a conveyer that can be conveyed.

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