TW201242823A - Article transport facility - Google Patents

Article transport facility Download PDF

Info

Publication number
TW201242823A
TW201242823A TW101106717A TW101106717A TW201242823A TW 201242823 A TW201242823 A TW 201242823A TW 101106717 A TW101106717 A TW 101106717A TW 101106717 A TW101106717 A TW 101106717A TW 201242823 A TW201242823 A TW 201242823A
Authority
TW
Taiwan
Prior art keywords
path
article
transfer device
receiving
intermediate transfer
Prior art date
Application number
TW101106717A
Other languages
Chinese (zh)
Other versions
TWI556344B (en
Inventor
Suguru Shibata
Daisuke Ogawa
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of TW201242823A publication Critical patent/TW201242823A/en
Application granted granted Critical
Publication of TWI556344B publication Critical patent/TWI556344B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B10/00—Power and free systems
    • B61B10/02—Power and free systems with suspended vehicles
    • B61B10/022—Vehicles; trolleys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Transportation (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

The present invention provides an article transport facility, which can efficiently move articles into and out of an article receiving/supplying section and also excellently prevent top transport cart from jamming in a first path. The article transport facility of the present invention comprises top transport carts, which are movable along a linear first path that extends through a receiving/supplying section stop position for located exactly above the article receiving/supplying section and a linear second path that is parallel to the first path and is located a different location in a widthwise direction of the first path; and a first path side central shelving located exactly under the first path and a second path side central shelving located exactly under the second path. The article transport facility comprises at least one of a first path side central transfer device and a second path side central transfer device that are reciprocally movable in the travel direction of the top transport carts to serve as a central transfer device. The central transfer device comprises transfer device handles for ascending and descending in an upper-lower direction and movable in a widthwise direction to transfer articles among the first path central shelving, the second path central shelving, and the article receiving and supplying section.

Description

201242823 六、發明說明： 【發明所屬之技術領域】 發明領域 本發明係有關於一種物品搬送設備，該物品搬送設備 係設有頂部搬送車及中間棚架者，前述頂部搬送車係以引 導支持於配設在頂部側之行進軌的狀態沿著行進路徑自由 行進，且具有把持部並使之可自由升降之用以支持物品， 可在與设於底側之物品供受部間自由移載物品者，而前述 中間棚架係配置於較前述物品供受部上方且較前述頂部搬 送車下方，可暫時放置移載於前述物品供受部之物品者。 【先前技術3 發明背景 在上述物品搬送設備中’頂部搬送車藉由以物品把持 於把持部的狀態沿著行進路徑行進移動，將搬入至物品供 受部的物品、或從物品供受部搬出的物品，搬送於複數之 物品供受部之間。頂部搬送車一般設有複數個，各頂部搬 送車由官理搬送作業之控㈣停止於指定為搬送來源處之 物品供X部或指定為搬送目的處之物品供受部的正上方， 使把持部升降而在物品供受部間移載物品。 當以頂部搬送車對於作為搬送目的處之物品供受部搬 送物品，而物品供受部無法接受物品時，後續之頂部搬送 車必須待機直到物品供受部成為可接受物品之狀態為止， 此會成為頂部搬送車塞車的原因。因此，至今，在較物品 供受部上方且較頂部搬送車下方，配置有可暫時放置移載 3 201242823 於物品供受部之物品的中間棚架’藉由將物品暫時放置於 中間棚架’來防止頂部搬送車塞車。λ，藉由在物品供受 部周邊配&巾間棚架，在必要時可迅速地對於物品供受部 搬入及搬出。 設有中間棚架之物品搬送設備習知例，如：設有經由 設定於物品供受部正上方之供受部用停止位置的直線狀第 1路徑、以及與該第冰徑平行且肢於該魅方向上不同 位置的直線狀第2路徑，並將中間棚架僅配置於第2路徑之 正下方者。（例如，參照專利文獻丨之第2圖。） 在上述S知例之物品搬送設備中，行進於第1路徑之了貝 部搬送車’具村在第1路徑及第2雜之㈣方向上自由 滑動的把持部，因此行祕帛丨純之前崎車可進行對 於位在第1路彳iJL下方之物品供受部的移載、及對於配置在 第1路徑橫幅方向上不同位置之中間棚架的物品移載兩 者’而行進於第2路徑之頂部搬送車則僅對於位於第2路免 正下方之中間棚架進行移載。 、 從 先行技術文獻 專利文獻 專利文獻1 ·日本特開2006-224944號公報 C 明内】 發明揭示 發明欲解決之課題 中 在上述習知例之物品搬送設備中，當把暫時放 Μ架之物^搬入物品供受部時，使未 ； 峒物〇〇之頂部 201242823 搬送車/σ著第1路徑，行進至設定於該物品供受部正上方 仏^用停止位置，並使把持部滑動及升降移動 ::::品移載至物品供受部…當從物品供受部:: ⑽搬出時，同樣地，使未保持有物品之頂部 路徑，行進至执金认兮仏 平〜者第1 丁進至6又疋於s亥物品供受部正上方之供受部用停止 春使把持部升降移動而將物品從物品供受部搬出。此 1，：把從物品供受部搬出之物品暫時放置於中間棚架 轉停止於第1路徑中之該供受部用停止位置的狀熊， 使把持部滑動及升降移動而將物品暫時放置於中間棚架“。’ 如此一來’由於搬人物品至物品供受部、及從物^ 受部搬出物品，以及，暫時放置物品至中間棚架、及將暫 寺放置於中間棚架之物品搬人至物品供受部係全由行 於第1路徑的頂部搬送車所進行，故行進於第！路經之;部 搬送車的作業負擔會變重。因此，行進於第i路徑之底部搬 送車會有作業集中而塞車之虞。 並且’由於僅在第2路#正下方存在有巾_架，故可 暫時放置之物品數較少，即使增加中間棚架而增加可暫時 放置之物品數’也是在行進方向上遠離物品供受部的位置 »又置中間棚架，行進於第i路徑之頂部搬送車將中間棚架之 物品搬人物品供受部時的搬送距離會變長^ @此，恐有無 法將物品迅速搬入物品供受部之虞。 本發明係有鑑於上述實情而作成者，目的在於提供一 種可將物品迅速地搬出、搬入於物品供受部，且可極力防 止第1路徑之頂部搬送車產生塞車的物品搬送設備。 201242823 用以欲解決課題之手段 為了達成上述目的，本發明之物品搬送設備，係設有： 頂部搬送車，係以引導支持於配設在頂部側之行進執 的狀態沿著行進路徑自由行進，且具有用以支持物品的把 持部並使之可自由升降，而可在與設於底側之物品供受部 間自由移載物品者；及 中間棚架’係配置於較前述物品供受部上方且較前述 頂部搬送車下方，可暫時放置移載於前述物品供受部之物 品者， 又，在如上述之物品搬送設備中，前述行進路徑設有. 直線狀之第1路徑，係經由設定於前述物品供受部正上方之 供文部用停止位置者；及直線狀之第2路徑，係與前述第1 路徑平行，且設定於在前述第1路徑之橫幅方向上的不同位 置者， 前述中間棚架設有：第1路徑側中間棚架，係位於寸述 第1路徑正下方，且在前述頂部搬送車之行進方 ^中與前述 物品供受部不同的位置者；及第2路徑側中間棚架，係位於 前述第2路徑正下方者， ’、' 並且，設有中間移載裝置，該中間移載裝置係具有用 以支持物品的移載裝置用把持部並使之可自由升降= 方向、且可在前述第1路徑及前述第2路徑之橫巾5 由滑動，可在與前述第1路徑側中間棚架間、 、 涔則述第2路 徑側中間棚架間、以及與前述物品供受部間 。B目由移載物品 者， 201242823 前述中間移載裝置係設有第1路徑側中間移載裝置或 第2路徑側中間移載裝置中之至少一者，前述第1路徑側中 間移載裝置係設置成從前述頂部搬送車之行進方向看來， 在則述第1路徑及前述第1路徑側中間棚架上下重疊的狀離 下，於前述第1路徑與前述第1路徑側中間棚架之間的高 度，可沿著前述頂部搬送車之行進方向自由來回移動者， 而則述第2路徑側中間移載裝置係設置成從前述頂部搬送 車之行進方向看來，在前述第2路徑及前述第2路徑側中間 棚架上下重疊的狀態下’於前述第2路徑與前述幻路漏 中間棚架之間的高度，可沿著前述頂部搬送車之行進方向 自由來回移動者。 很骒上述構成，行進於第冰徑之頂部搬送 持部把持有物品的狀態，則藉由停止於供受部用 而使把持部下降，可將物品搬人至設在底側之物品供受 部。同樣地，若為未於把持部把持有物品之狀態，則㈣ ^於供受部用停止位置而使把持部下降，可從設在_ Γ = 來’行触第1路徑之頂 、車It由在供受部用停止位置時之物品供 的物品搬出搬入、以及沿著朝向供受 路徑的行軸作，㈣送物心 位置之仃進 間棚二放置移載於物品供受部之物品的中 棚架，故行進於第冰^側中間棚架、及第2路徑側中間 物品的狀態，㈣由^㈣搬送車若為於把持部把持有 W於與供受部用停止位置在行進方 201242823 向上不同的位署 在正下方之笛而使把持部下降’可將物品暫時放置於位 物品之Μ购；㈣縣於把持部把持有 向上不同_ q #止於與供受部用停止位置在行進方 正下方之第/使㈣部下降’可收取暫時放置於位在 路徑之Tii路k側中間棚架的物品。同樣地’行進於第2 2路徑側巾H亦可㈣品料放置於位在正下方之第 的物品。 >'，或收取暫時放置於第2路徑側中間棚架 可自由^間移裁裝置係具有移載裝置用把持部並使之 方向上自下方向、且可在第1路徑及第2路徑之橫幅 π 且可在與第1路徑側中間棚架間、盥第2 架間、以及與物品供受部間自_^^^ 、錢中間移置設有第i路徑側中間移載装置或 ^:則中間移載裝置中之至少一者，故行進於第1路徑 送車暫時放置於第i路徑側中間棚架之物品，可 由第1路裎側巾M ^ 間移載裝置或第2路徑側中間移載裝置搬入 ^部’亦可移動至第2路徑财間棚架。同樣地， 订進於第2路徑之頂部搬送車暫時放置於第2路徑側中間棚 架之物品，可藉由第1路徑側中間移載裝置或第2路徑側中 間移栽裝置搬入至物品供受部，亦可移動至第2路徑側中間 棚架。藉此，例如，頂部搬送車可不進行從中間棚架至物 品供受部之搬入、及從物品供受部至中間棚架之搬出而 可進行從搬送來源處之物品搬送(例如’從其他物品供受部 之搬送）或往搬送目的處之物品搬送(例如，往其他物品供受 8 201242823 部之搬送）。當然，行進於第1路徑之頂部搬送車亦町I接 進行對於物品供受部之物品搬入搬出。 如此一來，由於可藉由第丨路徑側中間移載裝I戒第2 路徑側中間移載裝置，來進行對於物品供受部之物，出 搬入的全部或-部分’故行進於第丨路徑之頂雜送事，權 貝進行將物搬人至物品供受部及將物品從物品供受部摊 出、以及將物品暫時放置於中間棚架及將暫時放I於中間 棚架之物品搬人至物品供受部的—部分即可，而無須進行 全部。因此’可減輕行進於第1路徑之頂《送車的作業負 擔。 承上，本發明不同於習知之僅在第2路徑正下方级裏中 間棚架’且行進於第1路經之頂部搬送車具有把持㈣好 可在第1路徑及第2路經之橫幅方向滑動的構K避免提 高行進於第1路徑之頂賴送車㈣業諸。藉此，抑力 防止頂部搬送車集中行進於第1路徑而塞車。 棚架、及位於第—方之中間 中間棚架’當設置多數中間棚架時，可棚I來作為 靠近物品供受部的位置配設中間_，故^方向上 中間棚架的物品’藉由行進於第！路徑之頂、時效置於 路徑側中間移載裝置或第说_中_載^車、第！ 入物品供受部，且可將物品供受部中之物。，麵也概 第1路徑之頂部搬送車、第1路徑側中間移载V署藉由行進於 側中間移載裝置，迅速地搬出而暫時放置於==冰徑 201242823 另外，由於中間棚架係設有位於第丨路徑正下方之第工 路徑側中間棚架、及位於第2路徑正下方之第2路徑側中間 棚.，故行進於第1路徑之頂部搬送車或行進於第2路和 頂部搬送車可分別利用位於正下方之中間棚架。因此，= 進於第1路徑之頂部搬送車或行進於第2路徑之頂部搬: 車’無須设置為了使物品移載於中間棚架，使把持邻朝、 徑宽度方向橫跨相當於第1路徑與第2路徑設置間隔之距離 而滑動的機構，故可使頂部搬送車之構造簡單。 由以上，可得到一種物品搬送設備，既可對於物。 受部迅速地搬出搬入物品， 搬送車塞車。 又可極力防止第丨路徑上之頂部 在本發明之物品搬送設備之實施形態中， 且a又有前述 第1路徑側中間移載裝置及前述第2路徑側中間移載裝置兩 者，且前述第1路徑側中間移載裝置，係具有前述移栽裝2 用把持部並使之可自由出退於前述第丨路徑正下方之第1路 徑侧位置與前述第2路徑正下方之第2路徑側位置間，並2 構成為在使前述移載裝置用把持部位於前述第丨路徑側位 置之狀態下，可沿著前述頂部搬送車之行進方向自由移動 者，前述第2路徑側中間移載裝置，係具有前述移載裝置用 把持部並使之可自由出退於前述第2路徑側位置與前述第工 路徑側位置間，並構成為在使前述移載裝置用把持部位於 前述第2路徑側位置之狀態下，可沿著前述頂部搬送車之行 進方向自由移動者。 根據上述構成，當將物品搬出搬入於物品供受邻時 201242823 第1路徑财使移餘㈣婦純 徑側位置之狀態沿著頂部搬送車之行進方向移動，第2 側中間移«置以使移載裝置用把持部位於第 : 置之狀態沿著頂部搬送車之行進方向移動。因此位 路徑側中間移載裝置及第2路徑側 由於第1 量不互相干擾地沿著行進方向、可彼此盡 物品供受敎物品搬出搬h 地進行對於 並且，由於藉由頂部搬送車暫時放置於中 品，可由&路徑射間移載裝置及第2路徑側中間移載Z 置兩者之中間移載裝置中之-者搬人至物品供受部，/ 可由該等兩者之中間移載裝置中之—者將物品從物品供受 部搬出而暫時放置於中間棚架，故可由第i路徑側中間移二 裝置及第2路徑側中間移載裝置兩者之中間移餘置適時 地將物品搬出搬入於物品供受部。 在本發明之物品搬送設備之實施形態中，其中前述物 品供受部宜設有隔開於前述第1路徑及前述第2路徑之橫幅 方向的-物品供受部與另-物品供受部；對應於前述—物 品供受部而設置之前述第1路徑及前述第2路裎、及對應於 前述另一物品供受部而設置之前述第丨路徑及前述第2路 徑，係以在前述第1路徑及前述第2路徑之橫幅方向上隔著 間隔的狀態平行配置；對應於前述一物品供受部而吸置之 前述第i路徑及前述第2路徑中至少一者、與斜應於:述另 一物品供受部而設置之前述第1路徑及前述第2路徑中至少 -者的兩端部’各連接於轉移用路徑；前述㈣搬送轉 201242823 構成為：在對應於前述一物品供受部而設置之前述第1路徑 及前述第2路徑中連接於前述轉移用路徑者、與對應於前述 另一物品供受部而設置之前述第1路徑及前述第2路徑中連 接於前述轉移用路徑者之間，可經由前述轉移用路徑而自 由移動；在對應於前述一物品供受部而設置之前述中間移 載裝置與對應於前述另一物品供受部而設置之前述中間移 載裝置間，設有可朝前述第1路徑及前述第2路徑之橫幅方 向自由搬送物品之搬送手段。 藉由上述構成，頂部搬送車藉由沿著對應於一物品供 受部而設置之第1路徑及第2路徑中連接於轉移用路徑者、 對應於另一物品供受部而設置之第1路徑及第2路徑中連接 於轉移用路徑者、與轉移用路徑而行進，可在對應於一物 品供受部而設置之第1路徑及第2路徑中連接於轉移用路徑 者、與對應於另一物品供受部而設置之第1路徑及第2路徑 中連接於轉移用路徑者之間移動。因此，頂部搬送車可將 從一物品供受部搬出之物品、或以中間移載裝置從該一物 品供受部搬出而暫時放置於中間棚架之物品，搬入至另一 物品供受部、或暫時放置於關於該另一物品供受部之中間 棚架。 並且，根據上述構成，由於在對應於一物品供受部而 設置之中間移載裝置與對應於另一物品供受部而設置之中 間移載裝置間，設有可朝第1路徑及第2路徑之橫幅方向自 由搬送物品之搬送手段，故藉由以搬送手段將物品從對應 於一物品供受部而設置之中間移載裝置搬送至對應於另一 12 201242823 物品供受部而設置之中間移載裝置，可 中間移載裝置從-物品供受部搬出之頂部搬送車或 1々°σ、或從兮—糾〇 供受部搬出而暫時放置於中間棚架之 ' 物时 對 物品供受部而設置之中間移載裝置，搬 、 八至另—物Κ丘香 因 1路 部、或暫時放置於關於該另一物品供 八 。丨 < 中間棚架 此’即使頂部搬送車不崎進至連接有轉移用路徑之第 徑或第2路徑的端部而行進於轉移用 吩彳工之迂迴形能爽搬 达物品’也可從-物品搬送部及料於此㈣置之; 架，直接將物品搬送至另-物品搬送部及對應於二 之中間棚架。 ------—―丨’狐疋早的負擔，並且可將 從-物品供受部搬出之物品迅速地搬人另—物品供受部。 在本發明之物品搬送設備之實施形態中，其中前述搬 送手段宜由搬送運輸機所構成，而該搬送運輸機係、可在也 對應於前述-物品供受部而設置之前述第i路徑側中間移 載裝置或前述第2路徑側中間移載裝置之間供受物品的一 側移載位置自由地載置支持物品，且可自由地將物品載置 搬送至在與對應於前述另—物品供受部㈣置之前述第1 路徑側中間移載裝置或前述第2路徑側中間移載裝置之間 供受物品的另一側移載位置者。 根據上述構成，對應於—物品供受部而設置之第1路徑 财間移餘置或第2路徑财間移《置，係在停止於-側移載位置JE上方雜態下，藉由使移餘置用把持部升 降於上下方向，對於搬送運輸機從上方交付物品。呈在— 13 201242823 側移載位置載置支持物品之狀態的搬送運輸機，將物品載 置搬送至另一側移載位置。然後，對應於另—物品供受部 而設置之第1路徑側中間移載裝置或第2路徑側中間移載裝 置，係在停止於另一側移載位置正上方之狀態下，藉由使 移載裝置用把持部升降於上下方向，而收取在另一側移載 位置搬送運輸機所載置支持之物品。 如上所述，對應於一物品供受部而設置之第丨路徑側中 間移載裝置或第2路徑側中間移載裝置，藉由無須對往一側 移載位置正上方之移動、或使移載裝置用把持部升降於上 下方向等既存的構成附加大幅變更即可實現的機能，可在 與搬送手段間供受物品《亦即，當重新設定一側移載位置 之正上方為停止位置時，只要設置硬體(例如，位置檢測感 測器）或軟體(例如’基於行進_之位置資訊的位置判別程 式)之位置檢測手段即可。關於對應於另___物品供受部而設 置之第1路徑側中間移載裝置或第2路徑側中間移載裝置亦 相同。 、如此一來，在關於一物品供受部之中間移載裝置、與 ，於另-物品供受部之中間移載裝置間設置可自由搬送物 之搬运手段時，可利財間移載裝置之既存構成成 搬送手段。 又，在本發明之物品搬送設備之實施形態中，其中前 、'·路彳二與前述第2路徑宜彼此設置於相同高度，且前述 心·側中間棚架、及前述第2路徑側中間棚架係彼此設 置於相同向度。藉此，設備全體之構造或移載作業等可較 14 201242823 為簡單。 圖式簡單說明 第1圖係實施形態之物品搬送設備的全體平面圖。 第2圖係第1圖的一部份放大平面圖。 第3圖係第1圖的一部份放大側面圖。 第4圖係頂部搬送車之行進方向看來的正面圖。 第5圖係第4圖的一部份放大正面圖。 第6圖係顯示搬送運輸機之配置狀態的平面圖。 第7圖係顯示搬送運輸機之配置狀態的正面圖。 第8圖係說明中間移載裝置之停止位置的平面圖。 第9圖係控制方塊圖。 第10圖係顯示其他實施形態之搬送手段的平面圖。 【實施方式3 用以實施發明之最佳形態 根據圖示說明本發明之物品搬送設備的實施形態。 〔全體構成〕 第1圖係本實施形態之物品搬送設備的全體平面圖，第 2圖係第1圖中紙面左上部份之放大平面圖。在此，紙面左 上部分係指附加於圖中所示各元件之編號看來為正確之方 向而配置圖時的左上部份。同樣地，在以下說明中，使用 紙面之左、右、上、下等表現時，皆指圖示如上述般配置 時之紙面内的方向。紙面上下方向係指為紙面内之方向， 且與紙面左右方向垂直的方向。本物品搬送設備係設置於 半導體製造廠，以收納複數片半導體晶圓之FOUP等基板收 15 201242823 納容器作為物品w而搬送的頂部搬送車2，係嗖置成以引導 支持於配設在頂部側之行進軌丨的狀^可沿著行進_ 於一方向行進。 行進執1係在離底面為設定高度上方的高度，以平面看 來’配設成如第1圖所示。承上，在頂部側，設有排列於紙 面左右方向之3個環狀路徑LP1〜LP3。該等環狀路徑⑺〜 LP3分別係整體而言延伸於長方向，且具有a 伸的2個直線部分' 及在端部連結料麵部分^個曲線 部分。在第1環狀路徑LP1與第2環狀路徑LP2之間以排列 於紙面上下方向之狀態設定有複數個成對的路徑，前述成 對的路徑係由與環狀路徑之長方㈣直延伸的直線狀之第 1路徑L1及第2路徑L2所構成。同樣地，在第2環狀路徑LP2 與第3環狀路彳助之間，也設有複數之(由第丨路徑u及第a 路徑L2所構成)成對的路彳^如糊所示，行柳係構成 為具有-對軌構件la、lb，前述—對轨構件1&以係在相 對於頂=送車2之行進方向，在水平方向直行的橫幅方向 上’ =4而配置者。一對軌構件ia、ib係由設置於頂 部之複數成對之軌請構件9_吊支持。 =置：狀路徑LP1與LP2間的第1路徑L1及第 2路徑 L2的二Γ係、藉由連接部分K連接於環狀路徑⑶，而 Γ:=藉由連接部分峰接於環狀路_。同樣 二 虹P3Wl路㈣膨路徑L2 二：係藉由連接部分K連接於環狀路·而另 俱私緖由連接部分民連接於環狀路徑LP3。藉此， 16 201242823 頂部搬送車2可從第i路徑L1或第2路徑L2往環狀路徑Lpi 〜LP3行進移動，又，從環狀路徑⑵〜⑺往第i路徑li 或第2路徑L2行進移動。如第丨圖所示，第2環狀路徑㈣係 構成為在複數處相互連接之二重環路徑（亦即，—個環狀路 徑之全體係配置於另-個環狀路徑中）。複數之頂部搬送車 2由於僅朝-方向行進，故在&圖及第2圖之紙面中，上下 排列之第1路徑L1及第2路徑L2中之頂部搬送車2的行進方 向係設定為彼此方向相反。 在第1圖及第2圖之紙面左右方向（即與環狀路徑之長 方向垂直的方向）並列設置的複數處理裝置8所具備之作為 物品供受部之站台4正上方，沿著該等站台4之排列方向（第 1圖及第2圖之紙面左右方向）配設有第丨路徑L1。在第1路徑 L1之橫幅方向（第1圖及第2圖之紙面上下方向，即環狀路徑 之長方向）上不同的位置，與第丨路徑[丨平行地設定有第2路 徑L2。 〔處理裝置〕 在第1環狀路徑LP1與第2環狀路徑LP2之間、及第2環 狀路性LP2與第3環狀路徑LP3之間，以整齊排列於第1圖及 第2圖之紙面上下左右方向的狀態於底面配置有複數的處 理裝置8，該等處理裝置8可取出收納於基板收納容器之半 導體aa圓’對半導體晶圓進行加工或檢查等處理。在處理 裝置8的端部設有站台4 ’處理裝置8透過該站台4在與頂部 搬送車2或後述之中間移載裝置6之間供受物品w。 處理裝置8在第1圖及第2圖之紙面上下方向，係以站台 17 201242823 4相對向之达^ 1 . ^ί£ 心成對排列。例如，相對於第2圖紙面左上之 置8而設置之站台4 ’係與相對於紙面左下之處理裝 置〇而兮5*英 抓;#、。 站台4在紙面上下方向相對向。如此，站台4係 ^與於^1路徑U及第2路徑U之排列方向互相隔開的一站 路俨L2站〇4。對應於一站台4而設置之第1路徑L1及第2 〆〆與對應於另—站台4而設置之第（路徑u及第2路徑 二:二在第1路徑U及第2路徑L2之橫幅方向隔著間隔的 立仃配置，所有的上述第1路徑L1及第2路徑L2其兩端 ^白連接於環狀路徑LP1〜LP3。因此，對於行進於配置在 環狀路^LP1與環狀路彳iLP2間之第1路徑L1與第2路徑L2 的P搬送車2而言，環狀路徑LP1與環狀路徑LP2可作為 用以移動至其他第1路徑L1或第2路徑L2的轉移用路徑。同 樣地’對於行進於配置在環狀路徑LP2與環狀路徑LP3間之 第1路彳空L1或第2路徑L2的頂部搬送車2而言，環狀路徑LP2 與環狀路徑LP3可作為用以移動至其他第1路徑L1或第2路 徨L2的轉移用路徑。 如第2〜4圖所示，站台4在處理裝置8的端部，係設置 為以低於處理裝置8的高度而可自由地載置支持物品W。以 頂部搬送車2或中間移載裝置6交付至站台4的物品W，被置 入處理裝置8的内部，而結束處理後之物品W則再度由站台 4送出，並由頂部搬送車2或中間移載裝置6所收取。 在本實施形態中，站台4之行進方向長度係設定成可載 置支持呈鄰接排列於頂部搬送車2行進方向之狀態下的3個 物品W。亦即，在站台4設定有3個物品供受位置，而在行 18 201242823 進路徑1，從第1路徑L1中頂部搬送車2之行進方向上游，依 序於站台4中之3個物品供受位置個別之正上方，設定有第1 供受部用停止位置Qla、第2供受部用停止位置Qlb、及第3 供受部用停止位置Qlc等3個停止位置，來作為頂部搬送車2 對於該等物品供受位置供受（即移載）物品W時停止的供受 部用停止位置Q1。 〔中間棚架〕 如第1〜4圖所示，在第1路徑L1及第2路徑L2的正下 方，在上下方向上，較站台4為上方且較頂部搬送車2為下 方地配置有中間棚架5，該中間棚架5可暫時放置欲交付至 站台4的物品W或從站台4收取的物品W(即暫時地放置物品 W)。在本實施形態中，處理裝置8係以沿著第1路徑L1或第 2路徑L2中頂部搬送車2的行進方向排列的狀態，彼此鄰接 地配置有第1處理裝置8a及第2處理裝置8b，複數之中間棚 架5係從該等處理裝置8中之一方之處理裝置8的上方側區 域橫亙至另一方之處理裝置8的上方側區域而配設。中間棚 架5係設有：第1路徑側中間棚架5n，係位於第1路徑L1的正 下方，且位於頂部搬送車2之行進方向中與站台4不同的位 置者；及第2路徑側中間棚架5f，係位於第2路徑L2的正下 方者。 如第3及4圖所示，中間棚架5係設置成從緩衝用框體55 之下部朝下方側突出的狀態，而前述緩衝用框體55係被懸 吊支持於頂部。如第6圖所示，緩衝用框體55具有：在行進 於第1路徑L1之頂部搬送車2的行進方向上位於上游側的上 19 201242823 游側部分55a、及位於下游側的下_部分说，如第4、5 1 ^ °卩份各係呈排胁行鱗徑橫幅方向之狀 、有第1路徑側框體55n、與第2路徑側框體55fe由於 上游側部分55a與下游側部分说為同樣構成故以下以上 游側部分55a為代表進行說明。 上游側部分祝中之第1路徑側框體55η及第2路徑側框 體饥’於上下方向隔著_地配置錄的水平框構件25， 在頂部搬送車2之橫料向及行進方向的複數處以縱連結 冓牛連接纟平框構件25係以互相連接複數之縱水平構 件25Y、與橫水平構件25T的框體所構成，而前述縱水平構 件25丫係沿著第丨路徑L1及第2路徑L2之長方向前述橫水 平構件25Tm&路徑L1及第2路徑L2之寬度方向。另 外’縱水平構件25Y及縱連結構件26·上游側部分…連 續至下游側部分55b。 第1路徑側框體55η及第2路徑側框體55f係由複數根棚 架懸吊具24從頂部懸吊支持。棚架懸吊具24相較於懸吊支 持住行進軌1之軌支持構件9 ’長了相當於頂部搬送車2上下 尚度的長度。因此，頂部搬送車2之第1路徑li或第2路徑L2 係位於從行進方向來看為複數之棚架懸吊具24之間，而上 游側部分55a中之第1路徑側框體55η位於頂部搬送車2之第 1路徑L1正下方，上游側部分55a中之第2路徑側框體55f則 位於頂部搬送車2之第2路徑L2正下方。 如第6圖所示’在上游側部分55a中之第1路徑側框體 55η，分別在行進於第1路徑L1之頂部搬送車2行進方向上的 20 201242823 上游側與下游側料，設有形成第丨路徑側巾間棚架％的中 間棚架構件27。又，在上游側部分55a中之第2路徑側框體 55f’在行進於第2路徑L2之頂部搬送車2行進方向上除了下 游側端部的4處，設有形成第2路徑側中間棚架5f的中間棚 架構件27。 如第5及6圖所示，中間棚架構件27具有：水平的載置 面。卩伤27a係具有卡合於形成在物品…底面之定位用的3 個卡合溝而將物品W定位的3根定位銷28者；以及從該載置 面。卩伤27a之一側端部朝向上方的連接板部分27匕、與從另 -側端部朝向上方的連接板部分27e。—側之連接板部分 27b的上端係連結於縱水平構件25γ，另—側之連接板^ 27c的上端則係藉由連結托架糾連結於在橫幅方向鄰^ 於側縱水平構件25γ之另一縱水平構件Μ，藉此，載置 面部份27a位在緩衝用框妨下端的下方為物品％高度的 位置：中間棚架構件27係以上述狀態固定於緩衝用：體 藉由上述構成，以物品w的正面（基板收納容器 在的面）朝向—側之連接板部分Μ的姿態（第$圖中 w月〜氏面右方之姿態）’以載置面部份27a載置支持物品 士第2及6圖所7F ’藉由緩衝用框體55上游側部分55a中 /一；第路側之2個第！路徑側中間棚架&及位於第 仕L2:之4個第2路徑側中間棚架分、以及㈣理裝置^中 構成了對應於第！處理裝置心而設置之 移載對象物1糊象軸。《地，編衝用㈣且 21 201242823 二請部分55b中位於p路徑u側之2個第砸側中間 棚= 及位於第2路經L2側之4個第2路_中間麻^ 及=裝置扑中之站台4,構成了對應於第2處理裝置8b 置之作為！且移載對象群的第2移載對象群㈤。如此一 來’分別對於第1處理裝置喊第2處理裂置祕有-組移 載對象群》 、、’對於第1移載對象群G1中站台4以外的移載對 象，設定了行祕第⑽㈣部搬送車2停止的停止位 置、及行進於第2路徑L2之頂部搬送車2停止的停止位置。 亦即’對於第丨移載對象群G1之停止位置，除了對應於站台 4之3個物品供受位置的3處供受部用停止位置叫〜叫， 在沿著第1路徑L1之方向上、在上游側鄰接於最上游之… 供受部用停止位置Qla的位置，以及在沿著第i路徑u之方 向上、在下游側鄰接於最下游之供受部用停止位置Qic的位 置，設定了第1路徑側中間棚架用停止位置Q2n，用以使行 進於第1路徑L1之頂部搬送車2在與第J路徑側中間棚架5n 之間移載物品w。又’在第2路徑L2，於與4個第2路徑側中 間棚架5f對應的4處，設定了第2路徑側中間棚架用停止位 置Q2f，用以使行進於第2路徑L2之頂部搬送車2在與第2路 徑側中間棚架5f之間移載物品W。 〔頂部搬送車〕 如第3、4、7圖所示，頂部搬送車2係構成為具備：行 進部10，係具有可行進於行進軌1上之行進驅動輪者；及本 體部11，係懸吊支持於行進部10且可自由升降移動及迴旋 22 201242823 移動地支持物品W者。祐η 1 b之間的狀態β另外， 驅動輪之行進用馬達5ΐ(參 且，連結行進部10與本體部丨丨之 連m體係§又置成位於一對執構件la、 在行進部10，設有旋轉驅動行進I 照第9圖）。 如第4圖所示，本體部11係構成為具備：把持部3，係 保持物品W者；升降操作手段12，係使支持把持部3之升降 2持體22升降移動者；圖外之迴旋操作手段，係將整個 升降用支持體22迴旋，以使把持部3繞著上下一迴旋者； 及覆羞體13，係覆蓋由把持體3所保持之物品w的上方、前 後方向兩者及左右方向中之—者。又，在本體部u，設有 受電線圈Μ並使之位於—對軌構料、ib之間，藉由使交 流電流通電於沿著行賴丨崎之供電線15而產生磁場，藉 由該磁場使受電線圈14在頂部搬送車2側產生所需之電 力，以非接觸狀態對頂部搬送車2進行供電。 升降操作手段12係構成為具備升降用馬達52(參照第9 圖）及旋轉滾筒，藉由升降用馬達52之旋轉動作，將旋轉滚 筒朝方向及其反方向旋轉驅動’使捲繞皮帶16捲繞及拉 出，藉此，使升降用支持體22可上下自由升降操作。 迴旋操作手段具有迴旋用馬達53(參照第9圖），藉由該 ^旋用馬達53之旋轉驅動，將升降用支持體22繞著上下軸 心迴旋操作4升降用支持體22，設有切換機構，係藉由 把持用馬達54(參照第9圖）之動作，將把持部3之姿態切換成 把持物品W的把持姿態與解除把持的把持解除姿態。 藉由如以上之構成，頂部搬送車2以引導支持於行進執 23 201242823 1之狀態行進移動於__ ^ 路徑L2、以及产/ 此，可沿著第1路如及第2 _ %狀路徑LP1〜LP3自由行進。 受部評止^ 之頂雜送車2 ’在停止於複數之供 又口P用fr止位置Ql 作一升降用支持=降二之狀態下’藉由升降操 ±4* 、 升降彳呆作，以迴旋操作手段將 作成把持姿Γ::;:乍’藉由切換機構將把持部3切換操 I、與把持解除姿態，藉此，在與位於正下方之201242823 VI. Description of the Invention: [Technical Field] The present invention relates to an article transporting apparatus which is provided with a top transporting vehicle and an intermediate scaffolding, and the top transporting vehicle is guided to support The state of the traveling rail disposed on the top side is free to travel along the traveling path, and has a gripping portion and is freely movable up and down to support the article, and the article can be freely transferred between the article receiving and receiving portion provided on the bottom side The intermediate scaffolding system is disposed above the article receiving and receiving portion and below the top transporting vehicle, and can temporarily place the article transferred to the article receiving and receiving portion. [Prior Art 3] In the above-described article transporting apparatus, the top transporting vehicle moves along the traveling path while being held by the gripping portion, and the article carried into the article feeding and receiving portion is carried out or carried out from the article receiving and receiving portion. Items are transported to a plurality of items between the recipients. There are usually a plurality of top transport vehicles, and the top transport trucks are controlled by the official transport operations. (4) Stop at the goods designated as the source of the transport for the X department or the goods designated as the destination of the transport destination. The parts are lifted and moved and the articles are transferred between the articles. When the top transport vehicle transports the article to the article supply and receiving unit as the destination of the transfer, and the article supply/receiving unit cannot accept the article, the subsequent top transport vehicle must stand by until the article supply and receiving portion becomes an acceptable item. Became the reason for the top of the truck. Therefore, up to now, under the article receiving and receiving portion and below the top transporting vehicle, there is disposed a middle scaffolding that can temporarily place the articles in the article feeding and receiving portion of the item 4201242823 by temporarily placing the articles in the middle scaffolding. To prevent the top from transporting the traffic jam. λ, by fitting the & towel rack around the article receiving and receiving section, it is possible to quickly carry in and out of the article receiving and receiving section when necessary. A conventional example of the article transporting apparatus provided with the intermediate scaffold is provided with a linear first path passing through the stop position for the receiving and receiving portion disposed directly above the article receiving and receiving portion, and a limb parallel to the first ice path The linear second path at different positions in the charm direction, and the intermediate scaffold is disposed only below the second path. (For example, refer to the second section of the patent document 。.) In the article transport apparatus of the above-described S example, the shell-side transport vehicle that travels on the first path is in the first path and the second (four) direction. The sliding part that slides freely, so the front secrets can be carried out for the transfer of the articles under the first path 彳iJL and the intermediate sheds arranged at different positions in the direction of the first path banner. The top of the second item is transported by the item of the rack, and the top transporter is only transferred to the middle scaffold located below the second pass. In the article conveying apparatus of the above-described conventional example, the object of the temporary truss is placed in the object of the invention to be solved by the invention. ^When moving into the article supply and receiving department, the top is not; the top of the sputum sputum 201242823 transporting the car / σ the first path, proceeding to the stop position set directly above the article receiving and receiving section, and sliding the gripping portion Lifting and moving::::Products are transferred to the article supply and receiving department...When moving out from the article supply and receiving department:: (10), in the same way, the top path of the item is not kept, and the payment is made to the gold plate. In the case of the sho, the sho, the sho, the sho, the sho, the sho. In the first place, the article carried out from the article supply/receiving portion is temporarily placed in the middle scaffold to stop the bear in the stop position of the supply and receiving portion in the first path, and the grip portion is slid and moved up to temporarily place the article. In the middle of the scaffolding "." As a result, the items were moved to the article supply and receiving department, and the items were removed from the object, and the items were temporarily placed in the middle scaffolding, and the temporary temple was placed in the middle scaffolding. The article is moved to the top of the first transport vehicle by the department, so it travels on the first road; the work load of the transport truck becomes heavier. Therefore, it travels on the i-th path. The bottom conveyor will have a concentrated operation and traffic jam. And 'Because there is a towel-only frame just below the second road #, the number of items that can be temporarily placed is small, and even if the intermediate scaffold is added, it can be temporarily placed. The number of items is also the position away from the article supply and receiving unit in the direction of travel. » The middle scaffold is placed. When the car is transported to the top of the i-th path, the transport distance of the article in the middle scaffold is increased. ^ @此, I am afraid there is no The present invention has been made in view of the above-described facts, and an object of the present invention is to provide an article that can be quickly carried out and carried into an article receiving and receiving portion, and can prevent the top of the first path from being transported as much as possible. In order to achieve the above object, the article transporting device of the present invention is provided with: a top transporting vehicle for guiding and supporting the traveling carriage disposed on the top side. The state is free to travel along the travel path, and has a gripping portion for supporting the article and is freely movable up and down, and can be freely transferred between the article receiving and receiving portions provided on the bottom side; and the intermediate scaffolding system The article is disposed above the feeding and receiving portion of the article and is disposed below the top transporting vehicle to temporarily place the article transferred to the article receiving and receiving portion. Further, in the article transporting device as described above, the traveling path is provided. The first path of the shape is the stop position of the document portion that is set directly above the article supply and receiving unit; and the second path of the straight line is the front The first path is parallel and is set at a different position in the banner direction of the first path, and the intermediate scaffold is provided with a first path side intermediate scaffold, which is located directly below the first path, and is And the second path side intermediate scaffold is located directly below the second path, ', ' and is provided with an intermediate transfer device, The intermediate transfer device has a gripping portion for supporting the article, and is capable of freely lifting and lowering the direction, and the horizontal towel 5 that can be slid in the first path and the second path can be slid The first path side intermediate scaffolding room, the second path side intermediate scaffolding room, and the article receiving and receiving unit. The B item is transferred by the item, 201242823, the intermediate transfer device is provided with the first At least one of the path side intermediate transfer device or the second path side intermediate transfer device, wherein the first path side intermediate transfer device is provided in a first path from the traveling direction of the top transfer vehicle And the first path side When the scaffolding is vertically overlapped, the height between the first path and the first path side intermediate scaffold can be freely moved back and forth along the traveling direction of the top transport vehicle, and the second path is described. The side intermediate transfer device is provided in the middle of the second path and the second path-side intermediate scaffold in a state in which the second path and the second path-side intermediate scaffold are vertically overlapped. The height between the scaffoldings can be freely moved back and forth along the direction of travel of the aforementioned top transport vehicle. In the above-described configuration, the state in which the article is carried by the transporting portion at the top of the ice-ice path is lowered by the receiving portion to lower the grip portion, and the article can be transported to the article provided on the bottom side. Received by the Ministry. Similarly, if the item is not held by the gripping unit, (4) ^ the gripping unit is lowered by the stop position of the supply and receiving unit, and the vehicle can be driven from the top of the first path by the _ Γ = It is carried out by the article supplied from the article at the stop position of the receiving and receiving section, and along the row axis facing the supply and receiving path. (4) The object of the object center is placed in the shed 2 and placed in the article feeding and receiving section. In the middle of the scaffolding, the middle of the second scaffolding and the second intermediate side of the second scaffolding, (4) by the (4) transporting vehicle, if the holding part holds the W and the receiving and receiving part stop position The marching party 201242823 upwards the different flutes directly below the flute and lowers the gripping section to temporarily place the item in the purchase of the item; (4) the county in the holding department holds the holding up differently _ q # stop with the supply and receiving department If the stop position is lower than the (4) portion below the traveling direction, the article temporarily placed in the middle scaffold of the Ti side of the Tii road at the path can be charged. Similarly, the article 2 travels on the second side of the side towel H, and the article can be placed in the first place directly below. >', or the intermediate scaffolding that is temporarily placed on the second path side can be freely moved. The gripping device has a gripping portion for the transfer device and is oriented in the downward direction, and can be in the first path and the second path. The banner π is provided with an i-th path side intermediate transfer device or between the second scaffolding, the second inter-frame, and the article supply/receiving unit, and is interposed between the _^^^ and the money. ^: At least one of the intermediate transfer devices, so that the article that is temporarily placed on the i-path side intermediate scaffolding in the first path is transported by the first path, the side towel M ^ transfer device or the second The path-side intermediate transfer device can be moved to the second path. In the same manner, the article that is placed on the second path side intermediate scaffolding in the top path of the second path can be carried into the article by the first path side intermediate transfer device or the second path side intermediate transfer device. The receiving portion can also be moved to the second scaffolding side intermediate scaffolding. In this way, for example, the top transport vehicle can carry the articles from the transport source without carrying in from the intermediate scaffolding to the article receiving and receiving portion, and from the article receiving and receiving portion to the intermediate scaffolding (for example, 'from other articles The goods are transported by the recipients or transferred to the destination of the transfer (for example, for other items to be transported by 8 201242823). Of course, the car that is transported to the top of the first route is transported to and from the article supply and receiving unit. In this way, the intermediate transfer device I or the second path side intermediate transfer device can be used to carry out all or part of the article feeding and receiving portion, and then travels to the third page. At the top of the path, Quanbei carries out the move of the object to the article supply and receiving department and the article from the article supply and receiving part, and temporarily places the item in the middle scaffolding and temporarily puts the item in the middle scaffolding. It is enough to move to the part of the article supply and reception department without having to do it all. Therefore, it is possible to reduce the workload of traveling at the top of the first route. According to the above description, the present invention is different from the conventional intermediate scaffold in the lower stage of the second path only, and the top transport vehicle traveling on the first path has a grip (four), which can be in the direction of the first path and the second path. The sliding structure K avoids the increase in the travel of the first path (four). Thereby, the force is prevented from causing the top transport vehicle to concentrate on the first path and jam the vehicle. The scaffolding and the intermediate scaffolding in the middle of the first side. When the majority of the intermediate scaffolding is set, the shed can be placed as the middle of the position near the article receiving and receiving part. By marching in the first! The top of the path, the aging is placed in the middle of the path side transfer device or the first _ in the _ car ^, the first! The article is supplied to the receiving part, and the article can be supplied to the receiving part. In the top of the first path, the top transfer vehicle and the first path side intermediate transfer V are quickly moved out by the side intermediate transfer device and are temporarily placed at == ice path 201242823. There is a second scaffolding intermediate scaffold located directly below the second path and a second path side intermediate shed directly below the second path. Therefore, the vehicle travels on the top of the first path or travels on the second path and The top transport truck can utilize the intermediate scaffold located directly below. Therefore, the vehicle is transported to the top of the first path or to the top of the second path. The vehicle does not need to be placed in order to move the article to the intermediate scaffold, so that the holding direction and the width of the path are equal to the first. Since the path is slid by the distance between the path and the second path, the structure of the top transport vehicle can be made simple. From the above, an article transporting apparatus can be obtained, which is applicable to the object. The receiving department quickly moved out the moving items and transported the traffic jam. Further, it is possible to prevent the top of the second path from being in the embodiment of the article transporting apparatus of the present invention, and a both the first path side intermediate transfer device and the second path side intermediate transfer device, and the foregoing The first path-side intermediate transfer device includes the first path-side position directly below the second path and the second path directly below the second path. In the state in which the transfer device holding portion is located at the position on the second path side, the side position can be freely moved along the traveling direction of the top transport vehicle, and the second path side is intermediately transferred. The device has the gripping portion for the transfer device and is freely retractable between the second path side position and the second working path side position, and is configured such that the transfer device holding portion is located in the second In the state of the path side position, the person can move freely along the traveling direction of the top transport vehicle. According to the above configuration, when the article is carried out and carried into the article to be accepted, the state of the first route is shifted (4), the state of the woman's pure-diameter side moves along the traveling direction of the top transport vehicle, and the second side is shifted to the left. The transfer device moves in the direction in which the grip portion is located along the traveling direction of the top transport vehicle. Therefore, the intermediate path transfer device and the second path side are placed in the traveling direction, and the articles can be carried out by the top of the article, and are temporarily placed by the top transport vehicle. In the middle product, the middle transfer device of the & path inter-frame transfer device and the second path-side intermediate transfer Z can be moved to the article supply/receiver, / can be in the middle of the two In the transfer device, the article is carried out from the article supply/receiving portion and temporarily placed in the intermediate scaffold. Therefore, the intermediate transfer between the i-th path side intermediate transfer device and the second path side intermediate transfer device is timely. The item is carried out and carried into the article supply and receiving unit. In the embodiment of the article conveying device of the present invention, the article feeding and receiving portion is preferably provided with an article receiving and receiving portion and a different article feeding and receiving portion that are spaced apart from each other in the banner direction of the first path and the second path; The first path and the second path that are provided in association with the article receiving and receiving unit, and the second path and the second path that are provided corresponding to the other article receiving and receiving unit are The first path and the second path are arranged in parallel with each other in a direction of a gap; at least one of the i-th path and the second path that is sucked by the one-piece supply/receiving unit is inclined to: The at least one of the first path and the second path provided in the other article supply and receiving unit is connected to the transfer path, and the (four) transfer transfer 201242823 is configured to correspond to the aforementioned article. The first path and the second path provided in the receiving portion are connected to the transfer path, and the first path and the second path provided in the other item supply/receiving unit are connected to the transfer Path Between the intermediate transfer device and the intermediate transfer device provided corresponding to the other article supply and receiving portion, the transfer device is freely movable via the transfer path; A transport means capable of freely transporting articles in the direction of the banner of the first path and the second path is provided. According to the above configuration, the top transport vehicle is connected to the transfer route along the first route and the second route provided corresponding to one article supply/receiving portion, and is provided corresponding to the other article supply/receiving portion. The route and the second route are connected to the transfer route and travel with the transfer route, and are connected to the transfer route in the first route and the second route provided corresponding to one article supply/receiver, and correspond to The other item is moved between the first path and the second path provided by the receiving unit and connected to the transfer path. Therefore, the top transport vehicle can be carried out from an article supply/receiving unit or an article temporarily removed from the one-piece supply/receiver by the intermediate transfer device and temporarily placed in the intermediate scaffold, and carried into another article supply/reception unit, Or temporarily placed in the middle scaffolding about the other item feeding and receiving part. Further, according to the above configuration, the intermediate transfer device provided corresponding to one article supply/receiving portion and the intermediate transfer device provided corresponding to the other article supply/receiving portion are provided to be able to face the first path and the second In the direction of the banner of the route, the transport means of the article is freely transported, so that the article is transported from the intermediate transfer device provided corresponding to one article supply/receiving portion by the transport means to the middle corresponding to the other 12 201242823 article supply and receiving portion. For the transfer device, the intermediate transfer device can be used for the article when it is transported from the top of the article-receiving unit to the top transport truck or 1々°σ, or when it is temporarily removed from the 〇-〇 〇 〇 The intermediate transfer device provided by the portion is moved, eight to the other is a one-way portion, or temporarily placed on the other article for eight.丨 < The intermediate scaffolding can't move from the top of the transfer path to the end of the transfer path or the end of the second path, and the transfer can be carried out by the transfer commander. - The item transporting unit and the material (4) are placed; the rack is directly transported to the other item transporting section and the intermediate scaffolding corresponding to the second. ------ 丨 丨 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋In the embodiment of the article transporting device of the present invention, the transporting means is preferably constituted by a transport conveyor, and the transport transporter is intermediately movable on the i-th path side provided corresponding to the article-receiving section. The supporting device is placed freely between the carrier device or the second path-side intermediate transfer device at the side of the article to be transported, and the article can be freely placed and transported to and from the other item. The fourth (fourth) position is disposed between the first path side intermediate transfer device or the second path side intermediate transfer device. According to the above configuration, the first path inter-bank shift or the second path inter-bank shift provided corresponding to the article-accepting portion is in a state of being stopped above the -side transfer position JE, by making The remaining grip portion is raised and lowered in the vertical direction, and the article is delivered from above to the transport conveyor. Presented at 13 201242823 The transport conveyor in which the support items are placed at the side transfer position, and the articles are transported to the other transfer position. Then, the first path side intermediate transfer device or the second path side intermediate transfer device provided corresponding to the other item supply/receiving unit is caused to be stopped in the state directly above the other transfer position. The transfer device lifts and lowers the grip portion in the up and down direction, and collects the articles supported by the transport conveyor at the other transfer position. As described above, the second path side intermediate transfer device or the second path side intermediate transfer device provided corresponding to one article supply/receiving portion does not need to move to the upper side of the transfer position or move In the case where the gripping unit is lifted and lowered in the vertical direction and the like, the existing configuration can be greatly changed, and the article can be supplied and received between the transporting means and the transporting means, that is, when the resetting position is directly above the resetting position. It suffices to set a position detecting means of a hardware (for example, a position detecting sensor) or a software (for example, a position determining program based on the position information of the traveling_). The first path side intermediate transfer device or the second path side intermediate transfer device provided corresponding to the other ___ article supply/receiving portion is also the same. In this way, when a transfer means for freely transporting articles is provided between the intermediate transfer device of the article supply/receiver portion and the intermediate transfer device of the other article supply/receiving portion, the profit transfer device can be used It is formed as a means of transportation. Further, in the embodiment of the article transporting apparatus of the present invention, the front, the second path and the second path are preferably provided at the same height, and the center side intermediate scaffold and the second path side are intermediate The scaffoldings are placed at the same dimension to each other. Thereby, the construction of the entire apparatus or the transfer operation can be made simpler than 14 201242823. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing the entire article transport apparatus of the embodiment. Fig. 2 is a partially enlarged plan view of Fig. 1. Fig. 3 is a partial enlarged side view of Fig. 1. Figure 4 is a front elevational view of the direction of travel of the top transport vehicle. Figure 5 is an enlarged front elevational view of a portion of Figure 4. Fig. 6 is a plan view showing the arrangement state of the transport conveyor. Fig. 7 is a front view showing the configuration state of the transport conveyor. Figure 8 is a plan view showing the stop position of the intermediate transfer device. Figure 9 is a control block diagram. Fig. 10 is a plan view showing a conveying means of another embodiment. [Embodiment 3] Best Mode for Carrying Out the Invention An embodiment of the article transporting apparatus of the present invention will be described with reference to the drawings. [Embodiment] Fig. 1 is a plan view showing the whole of the article transporting apparatus of the present embodiment, and Fig. 2 is an enlarged plan view showing the upper left portion of the paper in Fig. 1. Here, the upper left portion of the paper refers to the upper left portion when the figure is attached in the direction in which the numbers of the respective elements shown in the drawing appear to be correct. Similarly, in the following description, when the left, right, top, bottom, etc. of the paper surface are used, the directions in the paper surface as illustrated above are illustrated. The direction of the upper and lower sides of the paper refers to the direction in the plane of the paper and is perpendicular to the left and right direction of the paper. This article transporting equipment is installed in a semiconductor manufacturing plant, and the top transporting vehicle 2, which is transported as a product w, by a substrate such as a FOUP that accommodates a plurality of semiconductor wafers, is placed in a top to be supported by the top. The shape of the side travel trajectory can travel along the travel _ in one direction. The traveler 1 is disposed at a height above the set height from the bottom surface, and is arranged as shown in Fig. 1 in plan view. On the top side, three annular paths LP1 to LP3 arranged in the left-right direction of the paper are provided. The annular paths (7) to LP3 extend in the longitudinal direction as a whole, and have two straight portions 'a extending from a' and a curved portion at the end connecting the surface portions. A plurality of pairs of paths are set between the first annular path LP1 and the second annular path LP2 in a state of being arranged on the lower surface of the paper, and the pair of paths are linearly extended from the rectangular (four) of the annular path. The linear first path L1 and the second path L2 are formed. Similarly, between the second annular path LP2 and the third annular path, a plurality of paths (consisting of the second path u and the a-th path L2) are also provided in pairs. The row will be configured to have the pair of rail members 1a, 1b, and the rail member 1& is arranged in the direction of the banner in the horizontal direction with respect to the direction of travel of the top=feeding vehicle 2; . The pair of rail members ia, ib are supported by a plurality of pairs of rail members 9_ hangs provided at the top. = set: the first path L1 of the path path LP1 and the LP2 and the binary line of the second path L2 are connected to the annular path (3) by the connecting portion K, and Γ: = connected to the ring road by the connecting portion peak _. Similarly, the second rainbow P3W1 road (four) expansion path L2 two: is connected to the annular path by the connecting portion K, and is additionally connected to the annular path LP3 by the connecting portion. Thereby, 16 201242823, the top transport vehicle 2 can travel from the i-th path L1 or the second path L2 to the ring-shaped paths Lpi to LP3, and travel from the ring-shaped path (2) to (7) to the i-th path li or the second path L2. mobile. As shown in the figure, the second loop path (4) is configured as a double loop path that is connected to each other at a plurality of points (that is, the entire system of one loop path is disposed in another loop path). Since the plurality of top transport vehicles 2 travel only in the − direction, the traveling directions of the top transport vehicles 2 in the first path L1 and the second path L2 arranged one above the other in the paper planes of the & and FIG. 2 are set to The opposite direction to each other. In the horizontal direction of the paper surface of the first and second figures (that is, the direction perpendicular to the longitudinal direction of the annular path), the plurality of processing devices 8 provided in the plural processing device 8 are directly above the station 4 as the article receiving and receiving portion, along which The arrangement direction of the stations 4 (the left and right directions of the paper in the first and second figures) is provided with a second path L1. The second path L2 is set in parallel with the second path [丨 in a different position in the banner direction of the first path L1 (the longitudinal direction of the circular path in the upper and lower directions of the paper in Figs. 1 and 2). [Processing device] Between the first annular path LP1 and the second annular path LP2 and between the second annular path LP2 and the third annular path LP3, the first and second figures are arranged neatly. In the state of the upper and lower sides of the paper, a plurality of processing apparatuses 8 are disposed on the bottom surface, and the processing apparatuses 8 can take out processing such as processing or inspection of the semiconductor wafer by the semiconductor aa circle stored in the substrate storage container. The station 4 is disposed at the end of the processing unit 8. The processing unit 8 transmits and receives the article w between the top transport vehicle 2 and the intermediate transfer device 6 described later through the station 4. The processing device 8 is arranged in the downward direction of the paper on the first and second figures, and is arranged in pairs in the opposite direction of the station 17 201242823 4 . For example, the platform 4' which is set with respect to the upper left side of the second sheet surface 8 is 兮5*英抓;#, with respect to the processing device on the lower left side of the paper surface. The platform 4 faces in the downward direction on the paper. In this manner, the station 4 is a one-station L2 station 4 that is spaced apart from the arrangement direction of the path U and the second path U. The first path L1 and the second line which are provided corresponding to one station 4 and the first one set corresponding to the other station 4 (path u and second path two: two banners of the first path U and the second path L2) The first and second paths L1 and L2 are connected to the annular paths LP1 to LP3 at the ends of the first path L1 and the second path L2. Therefore, the traveling path is disposed on the ring road LP1 and the ring shape. In the first path L1 between the path iLP2 and the P line 2 in the second path L2, the ring path LP1 and the ring path LP2 can be used for the transfer to the other first path L1 or the second path L2. Similarly, the annular path LP2 and the annular path LP3 can be used for the top transport vehicle 2 that travels between the first path hollow L1 or the second path L2 disposed between the ring path LP2 and the ring path LP3. The transfer path for moving to the other first path L1 or the second path L2. As shown in FIGS. 2 to 4, the end of the processing unit 8 at the end of the processing device 8 is set lower than the processing device 8. The support article W is placed at a high height, and the article W delivered to the platform 4 by the top transport vehicle 2 or the intermediate transfer device 6 is placed. The inside of the device 8 and the finished article W are again sent out by the station 4 and collected by the top transfer vehicle 2 or the intermediate transfer device 6. In the present embodiment, the length of the traveling direction of the platform 4 is set to be The mounting support is three articles W that are arranged adjacent to each other in the traveling direction of the top transport vehicle 2. That is, three stations are provided with the position of the object in the station 4, and the path 1 is entered from the line 18 201242823, and the path is from the first path. In the upstream direction of the top transport truck 2 in the L1, the first supply/reception part stop position Qla and the second supply/receiver stop position Qlb are set in the order of the three items in the station 4. And the third supply/reception unit use three stop positions, such as the stop position Qlc, as the supply/reception part stop position Q1 when the top transport vehicle 2 stops the supply of the article W for the article. [Intermediate scaffolding] As shown in the first to fourth paths, in the vertical direction, the upper side of the first path L1 and the second path L2 are arranged above the platform 4 and below the top transport vehicle 2. Scaffolding 5, the intermediate scaffolding 5 can be temporarily placed to be delivered to The article W of the table 4 or the article W received from the station 4 (that is, the article W is temporarily placed). In the present embodiment, the processing device 8 is configured to transport the car 2 along the top of the first path L1 or the second path L2. In the state in which the traveling directions are arranged, the first processing device 8a and the second processing device 8b are disposed adjacent to each other, and the plurality of intermediate scaffolds 5 are laterally moved from the upper side region of the processing device 8 of the processing devices 8 to another The intermediate scaffold 5 is provided with a first scaffolding-side intermediate scaffold 5n located immediately below the first path L1 and located in the traveling direction of the top transport vehicle 2 The position other than the platform 4; and the second path side intermediate scaffold 5f are located immediately below the second path L2. As shown in Figs. 3 and 4, the intermediate scaffold 5 is provided so as to protrude downward from the lower portion of the cushioning frame 55, and the cushioning frame 55 is suspended and supported by the top. As shown in Fig. 6, the buffering frame 55 has an upper 19th floor portion 55a located on the upstream side in the traveling direction of the top transporting vehicle 2 traveling on the first path L1, and a lower side portion located on the downstream side. It is to say that each of the fourth and fifth portions is in the shape of the spheroidal spheroidal banner direction, and the first path side frame body 55n and the second path side frame body 55fe are provided by the upstream side portion 55a and the downstream side. The part is said to have the same configuration, and the upstream side portion 55a will be described below as a representative. In the upstream side portion, the first path side frame 55n and the second path side frame body are hung in the vertical direction, and the horizontal frame member 25 is placed in the vertical direction and in the traveling direction of the top transport vehicle 2 The plurality of vertical yak connection 纟 flat frame members 25 are formed by interconnecting a plurality of vertical horizontal members 25Y and a horizontal horizontal member 25T, and the vertical horizontal members 25 are along the second path L1 and The direction of the width of the horizontal horizontal member 25Tm & the path L1 and the second path L2 in the longitudinal direction of the path L2. Further, the vertical horizontal member 25Y and the vertical joint member 26·upstream side portion are continuously connected to the downstream side portion 55b. The first path side frame 55n and the second path side frame 55f are suspended from the top by a plurality of scaffolding hangers 24. The scaffolding suspension 24 is longer than the rail supporting member 9' which suspends the traveling rail 1 by a length corresponding to the upper and lower sides of the top transporting vehicle 2. Therefore, the first path li or the second path L2 of the top transport vehicle 2 is located between the scaffold suspensions 24 in the plural from the traveling direction, and the first path side casing 55η in the upstream side portion 55a is located. The first path L1 of the top transport vehicle 2 is directly below, and the second path side frame 55f of the upstream side portion 55a is located immediately below the second path L2 of the top transport vehicle 2. As shown in Fig. 6, the first path side frame body 55n in the upstream side portion 55a is provided on the upstream side and the downstream side of the 20 201242823 in the traveling direction of the top transport vehicle 2 traveling in the first path L1. An intermediate shed member 27 is formed which forms a second side of the second side of the side shed. In addition, the second path side frame body 55f' in the upstream side portion 55a is provided with a second path side intermediate shed in addition to the downstream side end portion in the traveling direction of the top transport vehicle 2 that travels through the second path L2. The intermediate shed member 27 of the frame 5f. As shown in Figures 5 and 6, the intermediate shed member 27 has a horizontal mounting surface. The bruise 27a has three positioning pins 28 that are engaged with the three engaging grooves formed in the bottom surface of the article to position the article W, and the mounting surface. One of the side portions of the bruise 27a faces the upper connecting plate portion 27A and the connecting plate portion 27e that faces upward from the other side end portion. The upper end of the side connecting plate portion 27b is coupled to the vertical horizontal member 25γ, and the upper end of the connecting plate 27b on the other side is coupled to the side vertical horizontal member 25γ in the banner direction by the connecting bracket. a vertical horizontal member Μ, whereby the placement surface portion 27a is positioned below the lower end of the buffer frame at a position of the item % height: the intermediate frame member 27 is fixed to the buffer in the above state: the body is configured by the above In the posture of the front side of the article w (the surface on which the substrate storage container is facing) toward the side of the connecting plate portion 第 (the posture in the right side of the w month to the left side in the figure), the mounting surface portion 27a is placed on the support side. Articles 2 and 6 of the article 7F 'by the buffer body 55 upstream side portion 55a / one; the second side of the road side! The middle side scaffolding of the path side & and the middle scaffolding section of the 4th second path side of the second official L2: and the (4) rationale device ^ correspond to the first! The transfer object 1 is provided with a paste axis. "Earth, weaving (4) and 21 201242823 2 part of the 55b in the part 55b on the p-side u side of the second side of the middle shed = and the second way through the L2 side of the 4th 2nd _ intermediate hemp and = device The station 4 that hits the center constitutes the action corresponding to the second processing device 8b! And the second transfer target group of the target group is transferred (5). In this way, 'the second processing splitting secret group-group transfer target group is respectively called for the first processing device, and the other is the same for the transfer target other than the station 4 in the first transfer target group G1. (10) (4) The stop position at which the transport truck 2 is stopped and the stop position at which the top transport vehicle 2 traveling on the second route L2 stops. In other words, the stop position of the third transfer target group G1 is in the direction of the first path L1 except for the three positions of the three supply and destination positions corresponding to the station 4. The upstream side is adjacent to the most upstream position of the receiving portion stop position Qla, and the position of the supply/receiving portion stop position Qic adjacent to the most downstream side in the direction along the i-th path u and on the downstream side. The first path side intermediate scaffolding stop position Q2n is set so that the top transport vehicle 2 traveling on the first path L1 transfers the article w between the J-path side intermediate scaffolding 5n. Further, in the second path L2, the second path side intermediate scaffolding stop position Q2f is set at four places corresponding to the four second path side intermediate scaffolds 5f so as to travel on the top of the second path L2. The transport vehicle 2 transfers the article W between the second path side intermediate scaffold 5f. [Top Transport Vehicle] As shown in the third, fourth, and seventh diagrams, the top transport vehicle 2 is configured to include a travel unit 10 having a travel drive wheel that can travel on the travel rail 1 and a main body portion 11 The suspension is supported by the traveling portion 10 and is freely movable up and down and swinging 22 201242823 to support the article W by movement. In addition, the state β between the η 1 b and the traveling motor 5ΐ of the drive wheel (the connection system 10 and the body portion 丨丨 are connected to each other to be located at the pair of members la, at the traveling portion 10 , with a rotary drive to travel I according to Figure 9). As shown in Fig. 4, the main body portion 11 is configured to include a grip portion 3 for holding the article W, and a lifting and lowering operation device 12 for raising and lowering the lifting and lowering holding body 22 supporting the grip portion 3; The operation means is to rotate the entire lifting support 22 so that the grip portion 3 surrounds the upper and lower swingers; and the shame body 13 covers both the upper and the front and rear directions of the article w held by the grip body 3 and In the left and right direction - the one. Further, in the main body portion u, a power receiving coil is disposed and placed between the pair of rail members and ib, and a magnetic field is generated by energizing an alternating current along the power supply line 15 of the line The magnetic field causes the power receiving coil 14 to generate the required electric power on the side of the top transport vehicle 2, and supplies power to the top transport vehicle 2 in a non-contact state. The lifting operation means 12 is configured to include a lifting motor 52 (see FIG. 9) and a rotating drum, and the rotating drum 52 is rotated in the direction and the reverse direction by the rotation operation of the lifting motor 52. By winding and pulling out, the lifting support 22 can be lifted up and down freely. The turning operation means includes a turning motor 53 (see FIG. 9), and the lifting support 22 rotates the upper and lower shafts around the vertical axis by the rotation of the motor 53 to provide a switching support 22 In the mechanism, the posture of the grip unit 3 is switched to the gripping posture of the gripping article W and the grip releasing posture for releasing the grip by the operation of the grip motor 54 (see FIG. 9). With the above configuration, the top transport vehicle 2 moves in the state of the travel support 23 201242823 1 to move on the __^ path L2, and the product can be along the first road and the second _% path. LP1~LP3 travel freely. By the Ministry of Appraisal ^ The top miscellaneous delivery car 2 'in the stop of the plural number of the mouth and the mouth P with the fr stop position Ql for a lifting support = down two state 'by lifting the movement ± 4 *, lifting 彳 彳In the swinging operation, the gripping posture will be made::;: 乍', the switching mechanism 3 switches the gripping unit 3 and the grip releasing posture, thereby being located directly below

W 口的物品供受位置之間移載物品w，同樣地，在停止於 m第1路徑側中間棚架用停止位置中任—者之狀態 、位於正下方之第1路徑側中間棚架5n之間移載物品 行進於第2路技L2之頂部搬送車2,在停止於複數之第2 ^徑側中間棚架用停止位置中任—者之狀態下，藉由升降 知作手IxU將料用切體Μ升降操作，以城操作手段 將升降用支持體22迴旋操作，藉由切㈣構將把持部3切換 。、乍成把持姿態與把持解[^姿態，藉此，在與位於正下方 之第2路側中間棚架5f之間移載物品w。 第及4圖中，係顯示如下狀態：行進於第1路徑l 1 之頂。卩搬it車2 ’在上游側部分55&之3處供受部肖停止位置 ^ Qlc中’停止於第3圖中以箭號&所示之行進方向上為 最上游側之供受部用停止位置叫，而行進於第2路徑匕2之 頂部搬送車2，在下游側部分55b之4處第2路徑側中間棚架 用停止位置收中，停止於第3圖中 以箭號b所示之行進方向 上為最上游側之中間棚架用停止位 置 Q2f。 24 201242823 〔中間移載裝置〕 如第3〜7圖所示，In the same manner, the item w is transferred between the positions of the W-ports, and in the same manner, in the state in which the m-first path side intermediate scaffolding stop position is stopped, the first path side intermediate scaffold 5n is located immediately below. The transferred article travels to the top transport vehicle 2 of the second road technology L2, and is stopped by the lifting and lowering of the second intermediate side scaffolding stop position. With the cutting and lifting operation, the lifting support 22 is rotated by the city operation means, and the gripping portion 3 is switched by the cutting mechanism. And the gripping posture and the gripping action [^ posture, whereby the article w is transferred between the second scaffolding 5f and the second scaffolding 5f located directly below. In the fourth and fourth figures, the following state is displayed: traveling on the top of the first path l 1 .卩 it it ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' Q Q Q Q Q Q Q Q Q Q Q Q Q When the stop position is called, the top transport vehicle 2 that travels on the second path 匕2 is stopped at the fourth path side intermediate scaffold stop position at the fourth downstream side portion 55b, and stops at the arrow B in the third figure. The traveling direction shown is the intermediate scaffolding stop position Q2f on the most upstream side. 24 201242823 [Intermediate Transfer Device] As shown in Figures 3 to 7,

司棚术5η之間的狀態，更宜為位在第 第1路徑側中間棚架5η之正上方的狀 Μ '置成可在第1路徑L1與第1路徑側中間棚架5η間之高 度中沿著頂部搬送車2行進方向的方向自由來回移動。而第 2中間移載裝置6f|’丨係以從頂部搬送車2之行進方向看來與 第2路徑U及第2路徑側中間棚架5f上下重疊的狀態（亦 即’從頂部搬送車2之行進方向看來位於第2路徑[2與第2 路仅側中間棚架5f之間的狀態，更宜為位在第2路徑L2之正 下方、第2路徑側中間棚架5f之正上方的狀態），設置成可在 第2路徑L2與第2路徑側中間棚架分間之高度中沿著頂部搬 送車2行進方向的方向自由來回移動。 第1中間移載裝置6n與第2中間移載裝置6f皆係設置成 可在該等之移動方向上包含緩衝用框體55之全範圍自由來 回移動。藉此，第1中間移載裝置6n與第2中間移載裝置6f 各可藉由在上游側部分55a及下游側部分55f來回移動，而 對於與第1處理裝置8a對應而設置之第1移載對象群G1 '及 與第2處理裝置8b對應而設置之第2移載對象群G2中之任一 25 201242823 移載對象，皆可自由移載物品w。以下 、 η…一===:== 移載ΓΓ1移載裝置㈣構成為：藉由橫行操作手段31使 持部7可在作為第一下方之第 貝立置的退後位置、與作為第2路徑L2正下方向之第2路徑 ^立置的突出位置間自由出退，並以使移載裝置用把持部7 ^立於退後位置之狀態下可沿著頂部搬送車2之行進方向 由移動。藉此，防止與移載動作中之頂部搬送車2的干 擾、或與第2中間移載裝置6f的干擾。 第4圖係以頂部搬送車2之行進方向看來，顯示扪中間 移載裝置6n與第2中間移載裝置6f使移載裝置用把持部7退 後至退後位置之狀態者，而第5圖係以頂部搬送車2之行進 :向看來’顯示第丨中間移載裝置6n與第2中間移載裳置分 白為^了止狀態下’互相使移載裝置用把持部7突出至突出位 置之狀態者。 如第3〜5圖所示，在緩衝用框體55，設有支持第丨中間 移載裝置6η並引導沿著頂部搬送車2行進方向之移動的引 導支持體17，該彳丨導支持體17係構成為：當停止於供受部 用停止位置Q1及中間棚架用停止位置Q 2之狀態的頂部搬 送車2移載物品w時，形成把持部3及物品w於上下方向可 26 201242823 通過之空間。 具體而言，引導支持體17係以一對下部引導軌18、19 所構成，料—對下部料軌18、19係以形成保持了物品 W之頂部搬送車2的把持部3在上下方向可自由通過之間隙 的狀態’於第1中間移栽裝置6n之移載裝置橫幅方向隔著間 3 乂置 對下部引導轨18、19係安裝於2根轨安裝構件 的下面，该等轨安裝構件2〇、21係連結緩衝用框體 55之上。卩中在行進方向上位於兩端部之一對橫水平構件 25T。 在設置於第1中間移載裝置6n上部之移動基材32的移 載裝1'&幅方向兩端部，以固定狀態設有滑動塊34、35， 專月動塊34、35係可自由滑動地卡合於一對下部引導轨 19者。從行進方向看來，在移動基材32之—側端部， 女裝有破操作托架33。如第3及5圖所示，被操作托架^具 有將下端”曲形叙水平部分…，在捲繞於繞著水平轴 疋轉之有齒驅動滑輪36a及從動滑輪36b的縱向捲繞面之 移動知作用正時皮帶38之上側捲繞部分的上面，連接有被 亚且 ’杷使移動操作用正時皮帶38捲繞動作之移動操 動基材= : = 向旋轉驅動’藉此，可將移 :错由控制移動操作用馬達37之旋轉動作，可控 ㈣移Γ置Μ的移動。另外，中間移載裝置6移動之定位 :可使賴嫩咖料㈣由词服 27 201242823 控制來進行’亦可對應於各停止位置，設置複數之光電感 測器，作為配置於沿著第1中間移載裝置6 n行進方向之移動 路徑而用以檢測移載用之停止位置的位置檢測手段，而根 據該等感測器之檢測資訊來進行定位控制。 如第5圖所示，在第1中間移載裝置6n之移動基材32的 上面，設有可將導塊39朝移載裝置橫幅方向自由移動操作 之滾珠螺桿40〇導塊39係連結於可將升降支持體41朝移載 裝置橫幅方向出退操作的多段式滑動又(slide f〇rk)42之基 體又(base fork)中出退方向之退後側端部。滑動又42例如具 備有：基體叉、可相對於該基體又朝橫方向滑動移動的中 間又'及可相對於該中間叉朝橫方向滑動移動的主叉 (primary fork)。滑動叉42的各段係呈藉由直線移動引導機 構彼此卡合的狀態以連繫皮帶43連動連結，藉由對基體又 的出退操作，可使透過升降操作手段45及迴旋操作手段如 連結於主叉的升降支持體41突出退後。並且，將使滾^螺 桿40之螺桿40a旋轉驅動的橫行操作用馬達44朝一方向與 其反方向旋轉驅動，藉此，可使導塊39沿著移栽裝置橫巾s 方向（即與第1及第2路徑之長方向垂直的方向）來回~移 作。如此一來，藉由橫行操作用馬達44、滾珠螺桿仙及滑 動又42，構成中間移載裝置6中將移載裝置用把持部7朝移 載裝置橫幅方向橫行操作之橫行操作手段3 i ^ 升降操作手段45係構成為藉由使升降用馬達47朝一方 向與其反方向旋轉驅動，可使旋轉滾筒48旋轉，而藉由將 捲繞皮帶49拉出及捲繞，可將升降支持體41上下升降操 28 201242823 作。迴旋操作手段46可使迴旋用馬達50旋轉驅動而將移載 裝置用把持部7繞著上下軸心、迴旋操作。藉此，可將物品w 相對於站台4、巾間棚架5的平面視角姿_節成適當的姿 態。 糟由上述構成，如第8圖所示，第間移載裝置如係 構成為：在緩衝用框體55之上游側部分55a及下游側部分 说之各部份，在停止於設定在2個第i路徑側中間棚架域 別之正上方的2處移載用停止位置ML以及停止於第 1中間移载裝置6η移動方向上設定在料移仙停止位置 之間的3處移载用停止位置pn2〜pn4中任一者的狀態下，使 移載裝置用把持部7橫方向移動及升降，而可在與第i路徑 側中間棚架5n之間、與第2路徑側中間棚架5f之間、以及與 站°4中各物品供受位置之間’自由地移載物品W。 第2中間移㈣置6f除了橫行操作手段3ι將移載裝置 用把持部7出退操作之方向為反向此點之外，其他與第1中 間移載裝置如為同樣構成。並且，第2中間移載裳置6f係構 成為a在_用框體55之上游側部分55a及下游側部分说 之各部份，在停止於設定在4個第2路徑側中間棚架5f個別 之正上方的4處移載用停止位置pf2〜、以及停止於2個 第1路徑側中間棚架5n中頂部搬送車2之行進方向上與緩衝 用框架5 5内方側之第1路徑側中間棚架5 η對應的移載用停 止位置Pfl中任—者的狀態下，使移載裝置用把持部7橫= 向移動及升降，而可在與第1雜财間《5η之間、與第 2路控側中間棚架5f之間、以及與站台4中各物品供受位置 29 201242823 之間，自由地移載物品w。 〔搬送運輸機〕 在頂部搬送車2行進方向上緩衝用框體55的中間部設The state between the shackles 5n is preferably set to be directly above the first path side intermediate scaffold 5n, and is set to be between the first path L1 and the first path side intermediate scaffold 5n. The middle moves freely back and forth along the direction in which the top transport vehicle 2 travels. The second intermediate transfer device 6f|' is in a state of being vertically overlapped with the second path U and the second path-side intermediate scaffold 5f from the traveling direction of the top transport vehicle 2 (that is, 'transporting the car 2 from the top" The traveling direction appears to be in a state between the second path [2 and the second side only side intermediate scaffold 5f, and is preferably located directly below the second path L2 and directly above the second path side intermediate scaffold 5f. In a state in which the second path L2 and the second path side intermediate scaffolding compartment are spaced apart, they are freely movable back and forth in the direction in which the top transport vehicle 2 travels. Both the first intermediate transfer device 6n and the second intermediate transfer device 6f are provided so as to be movable in the entire range including the buffer frame 55 in the moving direction. Thereby, each of the first intermediate transfer device 6n and the second intermediate transfer device 6f can be moved back and forth by the upstream side portion 55a and the downstream side portion 55f, and the first shift corresponding to the first processing device 8a can be provided. The object w can be freely transferred by any of the 25 201242823 transfer objects of the load target group G1 ' and the second transfer target group G2 provided corresponding to the second processing device 8b. In the following, η...一===:== The transfer ΓΓ1 transfer device (4) is configured such that the traverse portion 31 can be used as the first lower berth position by the traverse operation means 31 The second path in the lower direction of the second path L2 is freely retracted between the protruding positions of the vertical path, and the traveling device can be moved along the top transporting vehicle 2 while the transfer device holding portion 7 is standing at the retracted position. The direction is moved. Thereby, interference with the top transport vehicle 2 during the transfer operation or interference with the second intermediate transfer device 6f is prevented. 4 is a view showing the state in which the intermediate transfer device 6n and the second intermediate transfer device 6f return the transfer device holding portion 7 to the retracted position, as seen from the traveling direction of the top transport vehicle 2, and 5 is the travel of the top transport vehicle 2: the display shifting device 7 is protruded from the "displaying the middle transfer device 6n and the second intermediate transfer device 6n" To the state of the prominent position. As shown in FIGS. 3 to 5, the buffer frame 55 is provided with a guide support 17 that supports the second intermediate transfer device 6n and guides the movement in the traveling direction of the top transport vehicle 2, and the guide support is provided. The 17th system is configured such that when the top transport vehicle 2 is transferred to the loading/unloading unit stop position Q1 and the intermediate scaffolding stop position Q2, the gripping unit 3 and the article w are formed in the vertical direction. 26 201242823 The space that passes. Specifically, the guide support body 17 is constituted by a pair of lower guide rails 18, 19, and the lower portion of the lower rails 18, 19 is formed to form the grip portion 3 of the top transport cart 2 holding the article W in the up and down direction. The state of the free passage gap is attached to the lower surface of the two rail mounting members via the gaps 3 in the direction of the transfer device in the first intermediate transfer device 6n. The rail mounting members are attached to the lower rails. The 2〇 and 21 series are connected to the buffer frame 55. The middle of the crucible is located at one of the opposite ends of the cross horizontal member 25T in the traveling direction. The sliding blocks 34 and 35 are provided in a fixed state at both ends of the transfer device 1'& in the transfer direction of the moving substrate 32 provided on the upper portion of the first intermediate transfer device 6n, and the special-purpose moving blocks 34 and 35 can be used. Those that are freely slidably engaged with a pair of lower guide rails 19. From the direction of travel, at the side end of the moving substrate 32, the female is equipped with a broken operation bracket 33. As shown in the third and fifth figures, the operated bracket has a longitudinal winding surface which is formed by bending the lower end to the horizontally-shaped portion of the toothed drive pulley 36a and the driven pulley 36b which are wound around the horizontal axis. The movement is applied to the upper surface of the winding portion on the upper side of the timing belt 38, and the movement of the substrate to be driven by the winding operation of the timing belt 38 for moving operation is connected = : = to the rotation drive" The shifting can be controlled by the rotation of the motor 37 for controlling the movement, and the movement of the shifting device can be controlled (4). In addition, the positioning of the intermediate transfer device 6 can be controlled by the ryogan (4) by the word service 27 201242823 In order to perform a position detection for detecting a stop position for transfer, a plurality of photodetectors may be provided corresponding to the respective stop positions as a movement path along the traveling direction of the first intermediate transfer device 6 n. And performing positioning control based on the detection information of the sensors. As shown in FIG. 5, the upper surface of the moving substrate 32 of the first intermediate transfer device 6n is provided with the guide block 39 being moved upward. Ball screw 4 for free movement of the device banner The 0〇 guide block 39 is connected to the back side of the base fork in the direction of the base fork in which the slide support 41 can be retracted toward the transfer device in the direction of the banner of the transfer device. The sliding portion 42 is provided, for example, with a base fork, an intermediate fork that is slidable relative to the base body in the lateral direction, and a primary fork that is slidably movable in the lateral direction with respect to the intermediate fork. Each of the segments 42 is connected to each other by a linear movement guiding mechanism in a state of being engaged with the connecting belt 43. By retracting the substrate, the lifting operation means 45 and the turning operation means are connected to the main body. The fork lifting support 41 is protruded and retracted. Further, the traverse operation motor 44 that rotationally drives the screw 40a of the screw 40 is rotationally driven in one direction and the opposite direction, whereby the guide block 39 can be moved along the transplanting device. The direction of the sash s (i.e., the direction perpendicular to the longitudinal direction of the first and second paths) is shifted back and forth. Thus, the intermediate operation motor 44, the ball screw, and the slide 42 are used to constitute the intermediate transfer device. 6 Chinese transfer device The traverse operation means 3 i ^ The hoisting operation means 45 is configured to rotate the hoisting motor 47 in one direction and in the opposite direction, thereby rotating the rotary drum 48 by The winding belt 49 is pulled out and wound, and the lifting and lowering support 41 can be lifted up and down by 28 201242823. The turning operation means 46 can rotate the turning motor 50 to rotate the transfer device holding portion 7 around the vertical axis, By the gyro operation, the object w can be placed in an appropriate posture with respect to the plane viewing angle of the platform 4 and the scaffolding 5. The configuration is as described above, as shown in Fig. 8, the intermediate transfer device is In the upstream side portion 55a and the downstream side portion of the buffer frame 55, the transfer stops at two places that are directly above the intermediate scaffolding area set on the two i-th path sides. In the state in which the position ML and the three transfer stop positions pn2 to pn4 are set between the transfer stop positions in the moving direction of the first intermediate transfer device 6n, the transfer device holding unit is used. 7 moving and lifting in the horizontal direction, and 5n between the i-th path side intermediate scaffolding, the path between the second side intermediate 5F scaffolding, and a station 4 ° between a position for each object 'freely transfer the article by W. The second intermediate shift (four) set 6f is configured in the same manner as the first intermediate transfer device except that the horizontal operation means 3 1 shifts the direction in which the transfer unit 7 moves forward and backward. Further, the second intermediate transfer skirt 6f is configured such that a part of the upstream side portion 55a and the downstream side portion of the frame 55 is stopped at the intermediate scaffolding 5f set at the four second path sides. The four transfer stop positions pf2 to which are located directly above, and the first path that stops in the traveling direction of the top transfer vehicle 2 in the two first path side intermediate scaffolds 5n and the inner side of the buffer frame 55 In the state of any of the transfer stop positions Pfl corresponding to the side intermediate scaffold 5 η, the transfer device 7 can be moved and raised in the horizontal direction, and can be moved between the first and the second. The article w is freely transferred between the second roadside side scaffold 5f and the article receiving position 29 201242823 in the station 4. [Transporting transporter] The intermediate portion of the buffering frame 55 is provided in the traveling direction of the top transporting vehicle 2.

’ I 4…V WET)間，可在對應於一站台4而設置 載對象群與對應於另_站台4而設置之移載對象群間 自2地搬送物品We同樣地，設有可在對應於第2圖右上之 而π置之移載對象群與對應於右下之站台4而設置之 移載對象群間自由軸送物品w的搬送運職％。如第7圖 =不’該等1搬送運輸機56係以分㈣吊支持於緩衝用 框體55之场側部分55a與下游㈣分$⑽狀態而連接。 由於兩者為同-構成’故以下叫接於緩細框體Μ之上 游側部分搬送運輸機％為代表進行說明。 如第6及7圖所示’搬送運輸機％係構成為具備右：搬In the case of the "I 4...V WET", it is possible to provide the same in the case where the object group is placed in correspondence with the one station 4 and the group of objects to be transferred corresponding to the other station 4 In the upper right side of Fig. 2, the transfer target group of the transfer target group of π and the transfer target group provided corresponding to the lower right station 4 is the transfer transport % of the article w. As shown in Fig. 7, the transport conveyors 56 are connected to the field side portion 55a of the cushioning frame 55 and the downstream (four) minute $(10) state. Since the two are the same-composition, the following description will be made on the side of the slow-moving frame body. As shown in Figures 6 and 7, the % transport conveyor is configured to have a right:

释於畀另一方之站台4對應而設置$ 輸機56係、藉由兩緩衝雜體55懸吊 亦可藉由與棚架懸吊具24同樣的構 勺57之另一側端部係連 置之緩衝用框體55,搬送運 吊支持。另外，為了補強， 30 201242823 之中間部與頂部。 如第9圖所示，搬送用移動體59具有：行進用馬達6 係將驅動輪旋轉驅動者；升降用馬達62，係。’ 58升降驅動者；及迴㈣馬達63，係將物品载置台μ迴二 驅動者。在物品載置台58上，與形成中間棚架5的中間相月= 構件27-樣’將與形成於物品職面之定位用的3個卡 卡合而將物品W定位的3根定位銷設置成朝上方突出。 搬送路徑部分57係由盒體所構成，於其上面部形成有 沿著長方向的縫隙60。為了防止塵埃飛散至外部， 移動體59係配置於搬送路徑部分57的盒體内部，搬 動體59中之物品載置台58係以插通縫隙60之圖外的支 ==T上方處’可1由升降地連接支持於搬送用 移動本體。並且，搬送用移動體59係以藉由使驅動輪朝— 方向及其反方向旋轉驅動而以圖外之引導機構所引導的狀 態’而可在搬送路徑部分57内部沿著其長方向來回自由移 動0 如第8圖所示’在與_方之站台4對應而設置之第】中間 移載褒置6η及第2中間移載裝置奸的各移動路徑上於頂部 、:車行進方向上搬送運輸機％所位在之處，設定有運輸 機移載位置PC ’該運輸機移裁位置Pc係用以讓第1中間移載 I置611及第2 +間移載裳置在與搬送運輸機56-方之站 台4側的端部之間移載物品W者。同樣地，在與另一方之站 D對應而《X置之第^中間移载裝置6η及第2中間移載裝置 6f的各移動路傻±，於頂部搬送車祈進方向上搬送運輸機 31 201242823 56所位在之處，設定有運輸機移触置&，料輸機移载 位置Pc係用以讓第1中間移餘置6n及第2中間移載裝置紅 在與搬送運輸機56另一方之站台4側的端部之間移載物品 W者。 對應於一方之站台4而設置之第i中間移載裝置6n或第 2中間移載裝置6·構成為：在停止在設定於各移動路徑之 運輸機移載位置Pc的狀態下，在與設置於一側移載位置 (即，搬送運輸機56—側之端部）的受貨台64之間移載物品 w。同樣地，對應於另一方之站台4而設置之第丨中間移載 裝置6η或第2中間移載裝置6£係構成為：在停止在設定於各 移動路桎之運輸機移載位置pc的狀態下，在與設置於另一 側移載位置（即，搬送運輸機56另一側之端部）的受貨台64 之間移載物品W。 在本實施形態中，運輸機移載位置Pc係設定為：與上 游側部分55a之移載用停止位置pn5、pf5或下游側部分饥 之移載用V止位置pnl、pn，在第4間移載裝置6n或第2 中間移載裝置6f之移動方向上相同位置。X，運輸機移載 位置PC由於位於第2路徑L2的正下方，故第間移載裝置 使移載跋置用把持部7突出至突出位置，而在與搬送用移 動體59之間移鶴品w。第2巾間移載裝倾則使移載裝置 用把持。卩7保持在退後位置，而在與搬送肖移動體分之間移 載物品W。 第6及7圖所示，在搬送運輸機56之一側移載位置 及另-側移載位置兩方’設有可自由載置支持物品〜的受 32 201242823 貨台64。在受貨台64上，向上方突出地設有將物品w定位 的3根定位銷。該等定位銷係配置成在與搬送用移動體59中 之物品載置台58者不同的位置上可卡合於物品w底面，使 物品載置台58從定位於受貨台64之物品W下方上升，可以 定位於物品載置台58之狀態進行支持，而可不使物品w的 位置及姿態偏移地進行將物品W從受貨台64移至搬送用移 動體59的鏟取移載。同樣地，也可不使物品w的位置及姿 態偏移地進行相反的將物品W從搬送用移動體5 9交付至受 貨台64的卸貨移載。 如此一來，在本實施形態中，在對應於一方之站台4而 設置之第1中間移載裝置6n及第2中間移載裝置6f、以及對 應於另一方之站台4而設置之第1中間移載裝置6n及第2中 間移載裝置6f之間，設有於第1路徑li及第2路徑L2之橫幅 方向搬送物品W的搬送手段，該搬送手段係由搬送運輸機 56所構成，而s亥搬送運輸機56係可在對應於一方之站台4而 設置之第1中間移載裝置6n及第2中間移載裝置6£之間供受 物品的一側移載位置自由地載置支持物品w，且可自由地 將物品載置搬送至在對應於另一方之站台4而設置之第 間移載裝置6n及第2中間移載裝置6f之間供受物品的另一 側移載位置者。 此外，在本實施形態中，搬送運輸機56構成為具備有 搬送用移動體59，該搬送用移動體59可在—側移載位置及 另一側移載位置自由移载物品w且可在—側移載位置與另 一側移載位置之間自由載置搬送物品％。並且，前述一側 33 201242823 移載位置係設有受貨台64，可自由載置支持藉由對應於一 方之站台4而設置之第i中間移載裝置6n及第之中間移載裝 置6f所供受的物品W者；而前述另—側移餘㈣設有受貨 台64,可自由載置支持藉由對應於_方之站台•設置之第 1中間移載裝置6η及第2中間移載裝置6f所供受的物品w者。 第9圖係物品搬送設備之控制方塊圖。頂部搬送車之具 有之頂部搬送控制器VCq、中間移載裝置6具有之中間移載 裝置控制IIVCP、搬送運輸機56具有之運輸機控制器％， 係可自由無線通訊地與主控制器HC連接。主控制器HC管理 物品W之處理行程，因應來自於各處理裝置之搬送要求而 適當地搬送物品W，而設定關於各物品搬送來源處及 搬送目的處而指示搬送指令。並且，根據主控㈣HC所指 不之搬送指令，藉由上述各控制器來控制頂部搬送車2、中 間移載裝置6、搬送運輸機56的動作。 主控制器HC在例如某處理裝置8結束物品w之處理 時，指示用以將該處理結束之物品W從站台4搬出而搬送至 下個製程之處理裝置8的搬送指令。將該搬送作業，使朝著 該站台4或（屬於前述站台4之移载對象群所屬之相同緩衝 用框體55的移載對象群之）鄰接站台4搬送其他物品w的頂 部搬送車2,將前述其他物品W暫時放置於該緩衝用框體乃 中之中間棚架5 ’藉此，即使不存在有待機狀態的頂部搬送 車2,也可迅速地處理前述搬出作業。又，進行對於中間棚 架5的暫時放置，對於設備全體，可盡量排除頂部搬送車2 以無保持物品W的空車狀態行進的浪費。 34 201242823 在本實施形態巾，由於在第1路㈣及細徑L2兩方 的正下方設置中間棚架5 ’行進於第1路徑u或第2路徑L2 之頂部搬送車2皆可對本身之正下方進行移載，故可避免移 載作業之負擔集巾於行進第丨路徑之頂部搬送車2這樣的不 利情況。又’由於對處理裂置8中之站台4的物品W移載作 業，可活雜置於料了在行進方向均接前述站台之站 台4而設置之緩衝用框體55的多數中間棚架 5，故可盡量避 免因為中間棚架5的數量較少， 而使頂部搬送車2搬入站台4 之物品W或搬出之物品W無法暫時放置於中間棚架5的事 態發生。並且，藉由在第i路徑u及第2路徑L2兩方的正下 方設置中間移載裝置6，可更減輕頂部搬送車2移載作章的 負擔。此外，當將物品W從關於站台4之移載對象群搬送至 關於相對向之站台4的移載對象群時，在關於相對向之兩站 台4之中間移載裝置間，可利用搬送運輸機％迅速地搬送物 品w，以取代習知之以頂部搬送車2經由環狀路徑⑺〜⑵ 進行搬送的路線。 〔其他實施形態〕 以上，根據發明之實施形態，具體說明了發明者之發 明’但本發明並非限定於上述實施形態者，可在不逸脫其 要旨之範_進行各種變更。町，制本發明之其他實 施形態。 ⑴在上述實㈣態中’係舉例顯示為第2路徑U之兩 端部連接於作為轉移用路徑之環_m〜LP3者，亦 可為第2路徑L2之兩端部不連接於任_路徑者。此時，行進 35 201242823 於第2路徑L2之頂部搬送車2係來回行進於第2路徑。 (2) 在上述實施形態中，係舉例顯示為中間一載裴置6 在相鄰之複數站台4共用緩衝用框體55，而可在該緩衝用框 體55中之上游側部分55a及下游側部分55b兩方自由移動 者，但亦可對於單一站台4設置專門的緩衝用框體55，使中 間移載裝置6在其移動方向上可在關於單一站台4之緩衝用 框體55範圍内自由移動，來代替前述實施形態。 (3) 在上述實施形態中，亦可將頂部搬送車構造成具有 把持部並使之可在行進路徑之橫幅方向自由移動。 (4) 在上述實施形態中，係舉例顯示為：第1中間移載梦 置6η或第2中間移載裝置6£係構成為在使移載裝置用把持 部7位於退後位置之狀態下，可沿著頂部搬送車2之行進方 向自由移動者；但亦可構成為：第}中間移載裝置6η或第2 中間移載裝置6f只要不干擾對方側之中間移載裝置及進行 移載動作之頂部搬送車2，也可允許在使移載裝置用把持部 7位於突出位置之狀態下的移動、或一面進行移載裝置用把 持部7之出退動作的移動。 (5) 在上述實施形態中，係舉例顯示為：對於—個緩衝 用框體55，分別設置1台第i中間移載裝置6η或第2中間移載 裝置6f;但亦可對於一個緩衝用框體55，分別設置複數Α 第1中間移載裝置6η或第2中間移載裝置6f。 (6) 在上述實施形態中，係舉例顯示為：使可自由移動 於搬送路徑部分之搬送用移動體搬送物品，作為搬送運輸 機；但亦可如帶式運輸機等藉由搬送作用體進行捲繞動作 36 201242823 2回動作來搬送物品，而作為搬送運輸機，以代替上述 上述實施形態中，係舉例顯示以搬送運輸機構成 财手奴者，但亦可構成如第_所舉觸示者，將搬送 手&構成為具有：渡軌，係排列於與行進路徑之長方向垂 直的方向，且配設於一對物品供受部之緩衝用J體二間 者；及中間移載裝置，係構成為可自由轉移於該渡執者。 在第10圖之例中’搬送手段係舉例顯示為以渡轨、及第2路 徑側中間移載裝置所構成者，但亦可由渡軌及第叫查側中 間移載裂置構成搬送手段。以上之情形皆宜設置移動方向 切換手段，該移動方向切換手段係將中間移載裝置之移動 方向’從沿著頂部搬送車之行進方向的方向，切換至沿著 行進路徑之橫幅方向的方向者。以τ，說明具體例。 如第10圖所不，在將中間移載裝置6構成為可在藉由沿 著頂部搬送車2之行進方㈣上部祕”支持的狀態下 自由行進者中’在相對於頂部搬送車2之第i路徑u及第2 路徑L2長方向沿著垂直方向排列的__對站台4之緩衝用框 體55之間，續上純65同樣高度配設錢執67。在渡執 67之兩端部’配置有可自由繞著上下軸心旋轉的移動方向 切換軌66(移動方向切換手段），作為該⑽衝賴體55之各 別之第2中間移載裝置6f的上部軌65之一部份。 根據上述構成’使保持有物品W之第2中間移載裝置 6f ’ /σ著頂部搬送車2之彳了進方向行進至移動方向切換軌的 設置處，在懸予支持於移動方向切換軌66之狀態下停止， 37 201242823 然後’將移動方向切換執的，從沿著頂部搬送車2之第1路 徑L1及第2路經[2的方向’切換成沿著第1路徑L1及第2路 徑L2之橫幅方向的方向，藉此，第2中間移载裝置6f可沿著 渡軌67，從一方之緩衝用框體55移動至另一方之緩衝用框 體55。 第2中間移載裝置6f到達另一方之緩衝用框體Η後，將 另一方之緩衝用框體55中的移動方向切換執66，從沿著頂 部搬送車2之第丨路徑L1及第2路徑L2之橫幅方向的方向切 換成沿著第1路徑L1及第2路徑L2的方向，藉此，第2中間移 載裝置6f可沿著另一方之緩衝用框體55中的上部軌65移 動’而對於另—方之站台4中之物品供受位置或關於該站台 4之緩衝用框體中的中間棚架5移載物品如此，關於一 方之站台4之緩衝用框體55與另一方之站台4之緩衝用框體 55，可利用同一第2中間移载裝置6f。 【圖式簡單説明】 第1圖係贯施形態之物品搬送設備的全體平面圖。 第2圖係第1圖的一部份放大平面圖。 第3圖係第1圖的一部份放大側面圖。 第4圖係頂部搬送車之行進方向看來的正面圖。 第5圖係第4圖的·一部份放大正面圖。 第6圖係顯示搬送運輸機之配置狀態的平面圖。 第7圖係顯示搬送運輸機之配置狀態的正面圖。 第8圖係說明中間移載裝置之停止位置的平面圖。 第9圖係控制方塊圖。 38 201242823 第ίο圖係顯示其他實施形態之搬送手段的平面圖。 【主要元件符號說明】 1.. .行進執、行進路徑 la、lb...軌構件 2.. .頂部搬送車 3.. .把持部 4.. .站台 5.. .中間棚架 5n...第1路徑側中間棚架 5f...第2路徑側中間棚架 6.. .中間移載裝置 6n...第1中間移載裝置 6f...第2中間移載裝置 7.. .移載裝置用把持部 8.. .處理裝置 8a...第1處理裝置 8b...第2處理裝置 9.. .軌支持構件 10.. .行進部 11.. .本體部 12.. .升降操作手段 13.. .覆蓋體 14.. .受電線圈 15 ·. _供電線 16、49...捲繞皮帶 17.. .引導支持體 18、19...一對下部引導軌 20、21...軌安裝構件 22.. .升降用支持體 24.. .棚架懸吊具 25.. .水平框構件 25T...橫水平構件 25Y...縱水平構件 26.. .縱連結構件 27.. .中間棚架構件 27a...載置面部份 27b...—側之連接板部分 27c...另一側之連接板部分 28.. .定位銷 29.. .連結托架 31.. .橫行操作手段 32.. .移動基材 33.. .被操作托架 33a...水平部分 34、35...滑動塊 36a...有齒驅動滑輪 39 201242823 36b...從動滑輪 37.. .移動操作用馬達 38.. .移動操作用正時皮帶 39. ·.導塊 40.. .滾珠螺桿 40a...螺桿 41.. .升降支持體 42.. .滑動叉 43.. .連繫皮帶 44.. .橫行操作用馬達 45.. .升降操作手段 46.. .迴旋操作手段 47.. .升降用馬達 48.. .旋轉滾筒 50.. .迴旋用馬達 51.. .行進用馬達 52.. .升降用馬達 53.. .迴旋用馬達 54.. .把持用馬達 55.. .緩衝用框體 55a...上游側部分 55b...下游側部分 55η...第1路徑側框體 55f...第2路徑側框體 56.. .搬送運輸機 57.. .搬送路徑部分 58.. .物品載置台 59.. .搬送用移動體 60.. .縫隙 61.. .行進用馬達 62.. .升降用馬達 63.. .迴旋用馬達 64.. .受貨台 65____L部軌 66.. .移動方向切換軌 67.. .渡執 A、b...行進方向 G1...第1移載對象群 G2...第2移載對象群 HC...主控制器 LP1...第1環狀路徑 LP2...第2環狀路徑 LP3...第3環狀路徑 L1...第1路徑 L2...第2路徑 Pc...運輸機移載位置 Pfl 〜Pf5、Pnl 〜Pn5. 停止位置 .移載用 40 201242823 Q1...供受部用停止位置 止位置 Qla...第1供受部用停止位置 VCp...中間移載裝置控制器 Qlb…第2供受部用停止位置 VCq...頂部搬送控制器 Qlc...第3供受部用停止位置 VCr...運輸機控制器 Q2n...第1路徑側中間棚架用 停止位置 Q2f··.第2路徑側中間棚架用停 W...物品 41The transfer machine 56 is provided corresponding to the platform 4 of the other side, and is suspended by the two buffers 55. The other end of the same structure 57 of the scaffolding hanger 24 can also be attached. The buffer frame 55 is placed and transported and supported. In addition, in order to reinforce, the middle and top of 30 201242823. As shown in Fig. 9, the transporting movable body 59 has a traveling motor 6 that drives the driving wheels to rotate, and a lifting motor 62. The '58 lift driver; and the back (four) motor 63 are the items to be placed on the table back to the second driver. On the article placing table 58, the intermediate phase forming the intermediate scaffold 5 = the member 27-like 'sets the three positioning pins that are engaged with the three cards for positioning of the article face to position the article W It protrudes upwards. The transport path portion 57 is composed of a casing, and a slit 60 along the longitudinal direction is formed on the upper surface portion. In order to prevent the dust from scattering to the outside, the moving body 59 is disposed inside the casing of the conveying path portion 57, and the article placing table 58 in the moving body 59 is inserted above the branch of the slit 60 ===T. 1 is supported by a moving body for transport by a lifting ground connection. Further, the transporting movable body 59 is freely movable back and forth along the long direction inside the transporting path portion 57 by the state in which the driving wheel is rotationally driven in the opposite direction and in the opposite direction and guided by the guiding mechanism outside the drawing. The movement 0 is carried out on the top of the moving path of the intermediate transfer device 6n and the second intermediate transfer device as shown in Fig. 8 on the other side of the intermediate transfer device 6n and the second intermediate transfer device. Where the transporter % is located, the transporter transfer position PC ' is set to allow the first intermediate transfer I to 611 and the second to the second transfer to be placed on the transport conveyor 56-way The article W is transferred between the ends of the platform 4 side. Similarly, in accordance with the station D of the other party, the moving paths of the "X-position" intermediate transfer device 6n and the second intermediate transfer device 6f are transported in the direction of the top transport vehicle, and the transporter 31 201242823 Wherever the 56 is located, the transporter shifting & transporter shifting position Pc is set to allow the first intermediate shifting rest 6n and the second intermediate transfer device red to be in the other side of the transport conveyor 56. The item W is transferred between the ends of the platform 4 side. The i-th intermediate transfer device 6n or the second intermediate transfer device 6· provided corresponding to one of the stations 4 is configured to be installed in a state in which the transport position Pc is set at each of the transport paths. The article w is transferred between the receiving stations 64 at the one-side transfer position (that is, the end portion of the transport conveyor 56 - the side). Similarly, the second intermediate transfer device 6n or the second intermediate transfer device 6 provided corresponding to the other station 4 is configured to be stopped at the transport position of the transporter set at each of the transport paths. Next, the article W is transferred between the receiving table 64 disposed at the other side transfer position (i.e., the end of the other side of the transport conveyor 56). In the present embodiment, the transporter transfer position Pc is set to shift between the transfer stop positions pn5 and pf5 of the upstream side portion 55a or the V-stop positions pnl and pn for the downstream side portion. The carrier device 6n or the second intermediate transfer device 6f is in the same position in the moving direction. X, the transporter transfer position PC is located immediately below the second path L2, so the intermediate transfer device causes the transfer holding grip portion 7 to protrude to the protruding position, and moves the crane to the transporting movable body 59. w. The transfer of the second towel between the two tissues allows the transfer device to be held. The crucible 7 is held in the retracted position, and the article W is transferred between the moving parts and the moving parts. As shown in Fig. 6 and Fig. 7, in the transfer side of the transport conveyor 56 and the other side transfer position, there is a 32 201242823 cargo bed 64 on which the support article can be freely placed. On the receiving platform 64, three positioning pins for positioning the article w are provided to protrude upward. The positioning pins are disposed so as to be engageable with the bottom surface of the article w at a position different from the article mounting table 58 of the transporting movable body 59, and the article placing table 58 is raised from the article W positioned under the receiving platform 64. The support can be positioned in the state of the article mounting table 58, and the shoveling transfer of the article W from the receiving platform 64 to the transporting movable body 59 can be performed without shifting the position and posture of the article w. Similarly, the unloading of the article W from the transporting movable body 59 to the receiving platform 64 may be reversed without shifting the position and posture of the article w. In this way, in the present embodiment, the first intermediate transfer device 6n and the second intermediate transfer device 6f provided corresponding to one of the stations 4 and the first intermediate portion corresponding to the other station 4 are provided. Between the transfer device 6n and the second intermediate transfer device 6f, a transport means for transporting the articles W in the banner direction of the first path li and the second path L2 is provided, and the transport means is constituted by the transport conveyor 56, and The sea transport conveyor 56 can freely mount the support article w between the first intermediate transfer device 6n and the second intermediate transfer device 6 provided corresponding to one of the stations 4 And the article can be freely placed and transported to the other transfer position of the article to be received between the first transfer device 6n and the second intermediate transfer device 6f provided corresponding to the other station 4. Further, in the present embodiment, the transport conveyor 56 is configured to include the transporting movable body 59, and the transporting movable body 59 can freely transfer the article w at the -side transfer position and the other transfer position and can be- The transport item % is freely placed between the side transfer position and the other transfer position. Further, the transfer side 64 is provided at the transfer position of the one side 33 201242823, and the i-th intermediate transfer device 6n and the intermediate transfer device 6f provided by the one station corresponding to one of the stations 4 can be freely placed. And the second intermediate shifting device 6n and the second intermediate shift The article w to which the carrier device 6f is supplied. Figure 9 is a control block diagram of the article transporting device. The top transport vehicle has a top transfer controller VCq, an intermediate transfer device 6 having an intermediate transfer device control IIVCP, and a transfer conveyor 56 having a transport controller controller that is freely and wirelessly connectable to the main controller HC. The main controller HC manages the processing stroke of the article W, and appropriately transports the article W in response to the transfer request from each processing device, and sets a transfer command for each article transfer destination and the transfer destination. Further, the operations of the top transport vehicle 2, the intermediate transfer device 6, and the transport transporter 56 are controlled by the respective controllers in accordance with the transport command not indicated by the master (four) HC. When the processing device 8 ends the processing of the article w, for example, the main controller HC instructs the transport command to carry the processed article W from the station 4 and transport it to the processing device 8 of the next process. In the transport operation, the top transport vehicle 2 of the other article w is transported to the station 4, or to the station 4, which is the transfer target group of the same buffer frame 55 to which the transfer target group of the station 4 belongs. By temporarily placing the other article W in the middle scaffolding 5' of the cushioning frame body, the above-described carrying-out operation can be quickly processed even if the top transporting vehicle 2 in the standby state does not exist. Further, temporary placement of the intermediate gantry 5 is performed, and it is possible to eliminate the waste of the top transport vehicle 2 from traveling in an empty state without holding the article W as much as possible for the entire apparatus. 34 201242823 In the towel of the present embodiment, the intermediate scaffold 5' is disposed directly below the first path (four) and the small diameter L2, and the top transport vehicle 2 that travels on the first path u or the second path L2 can be used for itself. Since the transfer is performed directly below, it is possible to avoid the disadvantage that the burden of the transfer operation is to transport the vehicle 2 at the top of the traveling second path. Further, since the article W of the station 4 in the processing splicing 8 is transferred, the most intermediate scaffolding 5 of the buffering frame 55 provided with the platform 4 that is connected to the platform in the traveling direction can be placed. Therefore, it is possible to avoid the occurrence of the fact that the article W that the top transport vehicle 2 carries into the platform 4 or the article W that is carried out cannot be temporarily placed in the intermediate scaffold 5 because the number of the intermediate scaffolds 5 is small. Further, by providing the intermediate transfer device 6 directly below both the i-th path u and the second path L2, the burden on the transfer of the top transport vehicle 2 can be further reduced. Further, when the article W is transported from the transfer target group with respect to the station 4 to the transfer target group with respect to the station 4, the transfer conveyor can be used between the intermediate transfer devices of the two stations 4 The article w is quickly transported to replace the route that the top transport vehicle 2 transports via the loop paths (7) to (2). [Other Embodiments] The invention has been described in detail with reference to the embodiments of the invention. However, the invention is not limited to the embodiments described above, and various modifications may be made without departing from the scope of the invention. The town has other embodiments of the invention. (1) In the above-described real (fourth) state, it is shown that the both ends of the second path U are connected to the loops _m to LP3 which are the transition paths, and the both ends of the second path L2 may not be connected to the _ Pathper. At this time, the travel 35 is used in the top of the second path L2 to travel back and forth to the second path. (2) In the above embodiment, the intermediate one-loading device 6 is shown as an example. The buffer frame 55 is shared by the adjacent plurality of stations 4, and the upstream side portion 55a and the downstream of the buffering frame 55 can be provided. The side portions 55b are freely movable, but a special buffer frame 55 may be provided for the single station 4 so that the intermediate transfer device 6 can be in the moving direction with respect to the buffer frame 55 for the single station 4. It is free to move in place of the above embodiment. (3) In the above embodiment, the top transport vehicle may be configured to have a grip portion and be freely movable in the banner direction of the traveling path. (4) In the above-described embodiment, the first intermediate transfer dream 6n or the second intermediate transfer device 6 is configured such that the transfer device holding portion 7 is in the retracted position. It can be freely moved along the traveling direction of the top transport vehicle 2; however, the intermediate transfer device 6n or the second intermediate transfer device 6f can be configured to not interfere with the intermediate transfer device on the opposite side and perform transfer In the top of the transport vehicle 2, the movement of the transfer device holding portion 7 in the protruding position or the movement of the transfer device holding portion 7 can be allowed to move. (5) In the above embodiment, for example, one i-th intermediate transfer device 6n or the second intermediate transfer device 6f is provided for each of the buffer frames 55; however, it is also possible to use one buffer for one buffer. The casing 55 is provided with a plurality of first intermediate transfer devices 6n or a second intermediate transfer device 6f. (6) In the above-described embodiment, the transporting object is transported by the transporting movable body that is freely movable in the transport path portion as a transport conveyor; however, it may be wound by a transporting body such as a belt conveyor. Act 36 201242823 In order to transfer the articles in the second operation, instead of the above-described embodiment, the transporter is shown as a transporter, but it may be configured as the first mover. The hand & is configured to have a rail, which is arranged in a direction perpendicular to the longitudinal direction of the traveling path, and is disposed between the pair of article receiving and receiving portions for the buffering J body; and the intermediate transfer device It is free to transfer to the ferry. In the example of Fig. 10, the "transport means" is exemplified by a ferry rail and a second path side intermediate transfer device. However, the transport means may be formed by the transfer of the ferry rail and the middle side. In the above case, it is preferable to provide a moving direction switching means for switching the moving direction ' of the intermediate transfer device from the direction along the traveling direction of the top transfer vehicle to the direction along the banner direction of the traveling path. . A specific example will be described with τ. As shown in FIG. 10, the intermediate transfer device 6 is configured to be able to transport the vehicle 2 with respect to the top in a state where it is supported by the upper side of the traveling vehicle 2 (fourth). The i-th path u and the second path L2 are arranged in the vertical direction, and the __ is placed between the buffering frames 55 of the station 4, and the pure 65 is placed at the same height as the 67. The moving portion switching rail 66 (moving direction switching means) that is freely rotatable about the vertical axis is disposed as one of the upper rails 65 of the respective second intermediate transfer device 6f of the (10) punching body 55. According to the above configuration, the second intermediate transfer device 6f' / σ holding the article W is moved to the installation direction of the movement direction switching rail in the forward direction, and the suspension is supported in the movement direction switching. Stop in the state of the rail 66, 37 201242823 Then 'switch the direction of movement, switch from the first path L1 along the top of the transport car 2 and the second pass through the direction 2 [to the first path L1 and the first 2 the direction of the banner direction of the path L2, whereby the second intermediate transfer device 6f can be along The rail 67 is moved from one of the buffer frames 55 to the other buffer frame 55. The second intermediate transfer device 6f reaches the other buffer frame, and the other buffer frame is used. The movement direction switching unit 66 in 55 switches from the direction along the banner direction of the second path L1 and the second path L2 of the top transport vehicle 2 to the direction along the first path L1 and the second path L2. The second intermediate transfer device 6f can be moved along the upper rail 65 of the other buffer frame 55, and the position of the article in the other station 4 or the buffer frame for the platform 4 In the middle scaffolding 5, the same or both of the buffering frame 55 of the platform 4 and the buffering frame 55 of the other station 4 can be used. The same second intermediate transfer device 6f can be used. Fig. 1 is a plan view of a whole of the article transporting apparatus. Fig. 2 is a partially enlarged plan view of Fig. 1. Fig. 3 is a partial enlarged side view of Fig. 1. Fig. 4 is a top view The front view of the direction of travel of the transport vehicle. Figure 5 is a partial enlargement of Figure 4. Fig. 6 is a plan view showing the arrangement state of the transport conveyor. Fig. 7 is a front view showing the arrangement state of the transport conveyor. Fig. 8 is a plan view showing the stop position of the intermediate transfer device. 38 201242823 The drawings show a plan view of the transport means of the other embodiments. [Description of main component symbols] 1. Travel, travel path la, lb... Rail member 2.. Top transport car 3 .. . gripping section 4.. station platform 5.. intermediate scaffolding 5n... first path side intermediate scaffolding 5f... second path side intermediate scaffolding 6.. intermediate transfer device 6n.. The first intermediate transfer device 6f...the second intermediate transfer device 7. The transfer device for the transfer device 8. The processing device 8a...the first processing device 8b...the second processing device 9 .. . rail support member 10... travel portion 11.. body portion 12.. lifting operation means 13.. cover 14.. . power receiving coil 15 ·. _ power supply line 16, 49... volume Winding belt 17: guide support 18, 19... pair of lower guide rails 20, 21... rail mounting member 22. Horizontal frame member 25T. .. horizontal horizontal member 25Y... vertical horizontal member 26.. longitudinal connecting member 27.. intermediate slat member 27a... mounting surface portion 27b...-side connecting plate portion 27c... Connecting plate portion 28 on the other side.. positioning pin 29.. connecting bracket 31.. transverse operation means 32.. moving substrate 33.. operated bracket 33a... horizontal portion 34, 35...sliding block 36a...toothed drive pulley 39 201242823 36b...driven pulley 37.. moving operation motor 38.. moving operation timing belt 39. ·. guide block 40.. Ball screw 40a... Screw 41.. Lifting support 42.. Sliding fork 43.. Connecting belt 44.. Horizontal operation motor 45.. Lifting operation means 46.. Cyclotron operation means 47 .. . Lifting motor 48.. Rotating drum 50.. Rotating motor 51.. Travel motor 52.. Lifting motor 53.. Rotary motor 54.. Holding motor 55.. The buffer frame 55a, the upstream side portion 55b, the downstream side portion 55n, the first path side frame body 55f, the second path side frame body 56, the transport conveyor 57.., the transport Path section 58.. Item mounting table 59.. Transporting body 60.. .Gap 61.. Feed motor 62.. Lifting motor 63.. Rotary motor 64.. Receiving station 65_L section rail 66.. Moving direction switching rail 67... Ferry A, b... Traveling direction G1 ...the first transfer target group G2...the second transfer target group HC...the main controller LP1...the first loop path LP2...the second loop path LP3...the third Ring path L1...first path L2...second path Pc...transporter transfer position Pfl to Pf5, Pnl to Pn5. Stop position. Transfer 40 201242823 Q1...For the receiver Position stop position Qla...first supply/receiver stop position VCp...intermediate transfer device controller Qlb...second supply/receiver stop position VCq...top transfer controller Qlc...third supply The receiving portion stop position VCr...the conveyor controller Q2n...the first path side intermediate scaffolding stop position Q2f··.the second path side intermediate scaffolding stop W...object 41

Claims (1)

201242823 七、申請專利範圍： 1. 一種物品搬送設備，係設有： 頂部搬送車’係則丨導支躲崎在頂部側之行進 轨的狀態沿著行進路徑自由行進，且具有肋支持物品 的把持部並使之可自由升降，而可在錢於底側之物品 供受部間自由移載物品者；及 中間棚架’係配置於較前述物品供受部上方且較前 述頂部搬送車下方，可暫時放置移載於前述物品供受部 之物品者， 又’前述行進路徑設有：直線狀之第1路徑，_ 由設定於前述物品供受部正上方之供受部用停止位置 者，及直線狀之第2路徑，係與前述第你徑平行，且設 &lt;於在前述^路徑之橫幅方向上的不同位置者， ^間棚架設有H路徑側中咖，係㈣ =㈣徑正下方’且在前述頂部搬送車之行進方向 中與刚述物品供受部不同的位置 / 考，及第2路徑側中間 棚架，係位於前述第2路徑正下方者 並且，設有中間移載裝置， . 4dt ., 中間移載裝置係具有 用以支持物品的移載裝置用把 巴待部並使之可自由升降 於上下方向、且可在前述第丨路 T 士a L Α丄 及别述第2路徑之橫幅 方向上自由滑動，可在與前述第 與前述第2路徑側中間棚架間路㈣中間棚架間、 間自由移載物品者， 及與刖这物品供受部 前述中間移載裝置係設有第1路徑側中間移載裝置 42 201242823 或第2路徑側中間移載裝置中之至少—&amp; 側中間移載裝置係設置成第1路徑 來在則达心路錢前述第i路徑側中間_ 前述第1路經側中間棚 來：^度，可沿著前述頂部搬送車之行進方向自由 ^動者，而前述第2路徑側中間移魏置 從別述頂部搬送車之行進方向看來， / 前述第2路徑側中間棚架上下重疊的狀、2路枚及 路徑與前述第2路徑側中間棚架之間的:，於前述第2 2述頂部搬送車之行進方向自由來回移的動；度，可沿著前 :==物品搬送設備，設有前述第1 者Μ中間移載裝置及前述第2路經側中間移載裝置兩 裝置移載裝置，係具有前述移裁 把持並使之可自由出退於前述第i路徑正下方 位置與前述第2路徑正下方之第 =並且構成為在使前述移載裝置用把持部位於： ^路徑側位置之狀態下，可沿著前述頂部搬送車之行 進方向自由移動者， &lt;仃 前述第2路獲側中間移载裝置，係具 ⑼把持部並使之可自由出退於前述幻路= 則述第】路徑倒位置間，並構成為在使前述移裁裝置置用 把持4位於則述第2路徑鲥位置之狀 頂部搬送車之行進方向自由移動者。 者㈣ 43 201242823 3. 如申請專利範圍第1或2項之物品搬送設備，其中前述物 品供受部係設有隔開於前述第1路徑及前述第2路徑之 橫幅方向的一物品供受部與另一物品供受部， 對應於前述一物品供受部而設置之前述第1路徑及 前述第2路徑、及對應於前述另一物品供受部而設置之 前述第1路徑及前述第2路徑，係以在前述第1路徑及前 述第2路徑之橫幅方向上隔著間隔的狀態平行配置， 對應於前述一物品供受部而設置之前述第1路徑及 前述第2路徑中至少一者、與對應於前述另一物品供受 部而設置之前述第1路徑及前述第2路徑中至少一者的 兩端部，各連接於轉移用路徑， 前述頂部搬送車係構成為：在對應於前述一物品供 受部而設置之前述第1路徑及前述第2路徑中連接於前 述轉移用路徑者、與對應於前述另一物品供受部而設置 之前述第1路徑及前述第2路徑中連接於前述轉移用路 徑者之間，可經由前述轉移用路徑而自由移動， 在對應於前述一物品供受部而設置之前述中間移 載裝置與對應於前述另一物品供受部而設置之前述中 間移載裝置間，設有可朝前述第1路徑及前述第2路徑之 橫幅方向自由搬送物品之搬送手段。 4. 如申請專利範圍第3項之物品搬送設備，其中前述搬送 手段係由搬送運輸機所構成，而該搬送運輸機係可在與 對應於前述一物品供受部而設置之前述第1路徑側中間 移載裝置或前述第2路徑側中間移載裝置之間供受物品 44 201242823 的一側移載位置自由地載置支持物品，且可自由地將物 品載置搬送至在與對應於前述另一物品供受部而設置 之前述第1路徑側中間移載裝置或前述第2路徑側中間 移載裝置之間供受物品的另一側移載位置者。 5.如申請專利範圍第1或2項之物品搬送設備，其中前述第 1路徑與前述第2路徑係彼此設置於相同高度，且前述第 1路徑側中間棚架、及前述第2路徑側中間棚架係彼此設 置於相同高度。 45201242823 VII. Patent application scope: 1. An article transporting device, which is provided with: a top transporting vehicle's system, the guiding rail, the state of the traveling rail on the top side, freely traveling along the traveling path, and having rib supporting articles The gripping portion is freely movable up and down, and the article can be freely transferred between the articles on the bottom side of the article; and the intermediate scaffolding frame is disposed above the feeding and receiving portion of the article and below the top transporting vehicle The article that is placed in the article feeding and receiving portion can be temporarily placed, and the 'the traveling path is provided with a linear first path, _ the stop position for the receiving and receiving portion that is set directly above the article receiving and receiving portion. And the second path in a straight line is parallel to the aforementioned first path, and is set to <at a different position in the direction of the banner of the aforementioned path, ^ is provided with a H-path side in the scaffolding, and the system is (4) = (4) The position immediately below the path and in the direction in which the top transport vehicle travels is different from the position of the article receiving and receiving portion, and the second path side intermediate scaffold is located directly below the second path. The transfer device, the intermediate transfer device has a transfer device for supporting the article, and the bucket portion can be freely raised and lowered in the up and down direction, and can be in the aforementioned second road T a a L Α丄And the slidable direction in the direction of the banner of the second path, and the article can be freely transferred between the intermediate scaffolding between the intermediate path (4) and the second path side, and the article receiving and receiving unit The intermediate transfer device is provided with at least one of the first path side intermediate transfer device 42 201242823 or the second path side intermediate transfer device, and the intermediate transfer device is set to the first path. The i-th path side intermediate _ the first path side side intermediate shed: ^ degrees, can be freely moved along the traveling direction of the top transport vehicle, and the second path side intermediate shifting is transported from the top of the other side In the direction of travel of the vehicle, / the second path side intermediate scaffold is vertically overlapped, and the two paths and the path are interposed between the second path side intermediate scaffold: The direction of travel is free to move back and forth; The first: Μ intermediate transfer device and the second transfer side intermediate transfer device can be provided along the front:== article transport device, and the transfer device can be freely moved. And retracting from the position immediately below the i-th path and the second immediately below the second path, and configured to move the car along the top in a state where the gripping unit for the transfer device is located at the position of the path side: If the direction of travel is free to move, &lt; 仃 the second intermediate side transfer device, the handle (9) grips the freely retractable portion of the path, and is configured to The hand-held device is freely movable in the traveling direction of the top transport vehicle in which the grip 4 is located at the second path 则 position. (4) 43 201242823 3. The article transporting apparatus according to claim 1 or 2, wherein the article receiving and receiving section is provided with an article receiving and receiving section that is spaced apart from the first path and the second path The first route and the second route provided in correspondence with the one article supply and receiving unit, and the first route and the second route provided corresponding to the other article supply and receiving unit The path is arranged in parallel with each other in a state in which the first path and the second path are spaced apart from each other in the direction of the banner, and at least one of the first path and the second path provided corresponding to the one of the article receiving and receiving units And both ends of at least one of the first path and the second path provided corresponding to the other article receiving and receiving unit are connected to the transfer path, and the top transporting vehicle is configured to correspond to The first path and the second path provided in the article receiving and receiving unit are connected to the transfer path, and the first path and the second path provided in correspondence with the other article supply/receiving unit The intermediate transfer device is connected to the transfer path, and is freely movable via the transfer path, and is provided in the intermediate transfer device provided corresponding to the one article supply/receiving portion and corresponding to the other article supply/receiving portion. The intermediate transfer device is provided with a transport means for freely transporting articles in the direction of the first path and the second path. 4. The article transporting apparatus according to claim 3, wherein the transporting means is constituted by a transporting transporter, and the transporting transporter is intermediate to the first path side provided corresponding to the one of the article feeding and receiving sections The transfer device or the second path-side intermediate transfer device can be placed on the side of the transfer/receiving position of the article 44 201242823, and the support article can be freely placed and transported to the other corresponding to the other The other side transfer position of the article between the first path side intermediate transfer device or the second path side intermediate transfer device provided between the article receiving and receiving unit. 5. The article transporting apparatus according to claim 1 or 2, wherein the first path and the second path are disposed at the same height, and the first path side intermediate scaffold and the second path side intermediate The scaffoldings are placed at the same height from each other. 45
TW101106717A 2011-03-17 2012-03-01 Article transport facility TWI556344B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011059664A JP5316907B2 (en) 2011-03-17 2011-03-17 Goods transport equipment

Publications (2)

Publication Number Publication Date
TW201242823A true TW201242823A (en) 2012-11-01
TWI556344B TWI556344B (en) 2016-11-01

Family

ID=46806647

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101106717A TWI556344B (en) 2011-03-17 2012-03-01 Article transport facility

Country Status (4)

Country Link
JP (1) JP5316907B2 (en)
KR (1) KR101862731B1 (en)
CN (1) CN102673964B (en)
TW (1) TWI556344B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI644850B (en) * 2014-09-25 2018-12-21 日商村田機械股份有限公司 Temporary storage device, handling system, and temporary storage method

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5429570B2 (en) * 2010-03-08 2014-02-26 株式会社ダイフク Goods transport equipment
DE202013005786U1 (en) * 2013-06-27 2013-07-10 Beumer Gmbh & Co. Kg Device for separating piece goods
JP6149805B2 (en) * 2014-06-05 2017-06-21 株式会社ダイフク Transport device
US9617075B2 (en) * 2015-03-24 2017-04-11 Joseph Porat System and method for overhead warehousing
JP2017007763A (en) * 2015-06-18 2017-01-12 株式会社ダイフク Conveyance facility
JP2018177376A (en) * 2015-09-09 2018-11-15 村田機械株式会社 Conveying system and conveying method
EP3388368B1 (en) * 2015-12-08 2020-07-01 Murata Machinery, Ltd. Conveyance system
JP6747217B2 (en) * 2016-09-27 2020-08-26 株式会社ダイフク Goods transport facility
EP3539903B1 (en) * 2016-11-14 2022-04-27 Murata Machinery, Ltd. Ceiling conveyance system, and relay conveyance apparatus and conveyance method used therefor
WO2018175425A1 (en) 2017-03-20 2018-09-27 Berkshire Grey, Inc. Systems and methods for processing objects including mobile matrix carrier systems
KR102020234B1 (en) * 2017-09-08 2019-09-11 세메스 주식회사 Raceway unit and OHT having the raceway unit
US11084660B2 (en) 2017-10-27 2021-08-10 Berkshire Grey, Inc. Bin infeed and removal systems and methods for processing objects including mobile matrix carrier systems
DE102018205292A1 (en) 2018-04-09 2019-10-10 Bhs Corrugated Maschinen- Und Anlagenbau Gmbh corrugator
JP6969512B2 (en) * 2018-07-05 2021-11-24 株式会社ダイフク Goods transport device
KR102114413B1 (en) * 2018-07-25 2020-05-22 세메스 주식회사 Overhead traveling system
CN109051490A (en) * 2018-09-18 2018-12-21 深圳市鲸仓科技有限公司 Packaged type is intensively deposited and picks device
KR102181495B1 (en) * 2018-10-30 2020-11-23 세메스 주식회사 Overhead traveling system
US11615975B2 (en) * 2019-01-25 2023-03-28 Murata Machinery, Ltd. Storage system
KR102264858B1 (en) * 2019-08-28 2021-06-14 세메스 주식회사 System and method of Apparatus for transferring a carrier
WO2023188769A1 (en) * 2022-03-29 2023-10-05 村田機械株式会社 Conveyance system

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5584118A (en) * 1991-05-24 1996-12-17 Fujitsu Limited Production control with centralized physical distribution control between storage and production cells
JP3669057B2 (en) * 1996-06-03 2005-07-06 アシスト シンコー株式会社 Transport system to stocker
JP3067656B2 (en) * 1996-09-30 2000-07-17 村田機械株式会社 Work transfer system
JP3991852B2 (en) * 2002-12-09 2007-10-17 村田機械株式会社 Ceiling carrier system
JP4470576B2 (en) * 2003-05-20 2010-06-02 ムラテックオートメーション株式会社 Transport system
JP4127138B2 (en) * 2003-07-10 2008-07-30 アシスト テクノロジーズ ジャパン株式会社 Transport system
JP2005150129A (en) * 2003-11-11 2005-06-09 Asyst Shinko Inc Transfer apparatus and transfer system
JP2006051886A (en) * 2004-08-12 2006-02-23 Murata Mach Ltd Ceiling traveling vehicle system
JP4296601B2 (en) * 2005-01-20 2009-07-15 村田機械株式会社 Conveyor cart system
US7637708B2 (en) * 2006-01-09 2009-12-29 Sumco Corporation Production system for wafer
JP5145686B2 (en) 2006-10-20 2013-02-20 村田機械株式会社 Transport system
CN101236887A (en) * 2007-01-30 2008-08-06 力晶半导体股份有限公司 Processing system and method for common storage position in semiconductor manufacturing
JP4577589B2 (en) * 2008-04-22 2010-11-10 株式会社ダイフク Article conveying device
JP5401842B2 (en) * 2008-06-17 2014-01-29 村田機械株式会社 Transport system
JP2010000835A (en) * 2008-06-18 2010-01-07 Toyota Motor Corp Vehicle and control method
KR101088050B1 (en) * 2009-02-25 2011-11-30 세메스 주식회사 Substrate treating apparatus
JP4807424B2 (en) * 2009-03-17 2011-11-02 村田機械株式会社 Ceiling transfer system and article transfer method
JP2011029550A (en) * 2009-07-29 2011-02-10 Muratec Automation Co Ltd Conveyor system, and setting method therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI644850B (en) * 2014-09-25 2018-12-21 日商村田機械股份有限公司 Temporary storage device, handling system, and temporary storage method

Also Published As

Publication number Publication date
CN102673964A (en) 2012-09-19
KR101862731B1 (en) 2018-05-30
JP2012193033A (en) 2012-10-11
CN102673964B (en) 2015-11-18
KR20120106618A (en) 2012-09-26
JP5316907B2 (en) 2013-10-16
TWI556344B (en) 2016-11-01

Similar Documents

Publication Publication Date Title
TW201242823A (en) Article transport facility
CN103129934B (en) Article carrying apparatus
TWI462862B (en) Article transport facility
JP5880991B2 (en) Conveying system and method for temporarily storing articles in the conveying system
JP5382470B2 (en) Transport system and transport method
CN101844672B (en) Article transport device
TWI607950B (en) Article transport facility
TW542817B (en) Carrying system
TW200409721A (en) Overhead traveling carriage system
CN108367862A (en) Automated warehouse system and in the freight house system store mount cargo method
US9187260B2 (en) Conveying system and conveying method
WO2016178347A1 (en) Automated warehouse and suspension-type stacker crane
TW201302575A (en) Article transportation facility
CN102923427A (en) Article transport equipment
TW201040056A (en) Switching facility for crossed paths
TW201022105A (en) Article storage facility
TWI630163B (en) Transport device
JP2008214072A (en) Article processing installation
CN108045826A (en) A kind of Material Sorting system and Material Sorting method
CN103170512B (en) The flat feeder of cold rolled reinforcing steel bar with ribs
JP5941647B2 (en) Article conveying device
KR200452876Y1 (en) Marine crane
JPH05178571A (en) Container moving-aside method for vertical conveying device
JP5883604B2 (en) Article conveying device
JP2005001830A (en) Transport device