KR20120106618A - Article transport facility - Google Patents

Abstract

An object of the present invention is to provide an article carrying facility capable of carrying out articles in and out of an article exchange section quickly, and capable of maximally preventing the occurrence of congestion of a ceiling conveying vehicle in a first route. As a straight line, the first straight path and the second straight path which are parallel to the first path via the stop position Q1a for the exchange part set just above the article exchange part 4 and are set at different positions in the horizontal width direction of the first path. Roof transport vehicle 2 which can run according to the above, the first path side intermediate shelf 5n immediately below the first path, the second path side intermediate shelf 5f immediately below the second path, and the wave for the transportation equipment It is possible to move up and down the branch 7 in the vertical direction and to be slidable in the horizontal width direction, between the first path side intermediate shelf 5n, between the second path side intermediate shelf 5f, and Goods between the goods exchange part 4 A first transfer-side intermediate transfer mounting apparatus 6n or a second route-side intermediate transfer mounting apparatus 6f installed as an intermediate transfer mounting apparatus capable of carrying the W thereon, so as to be reciprocated along the travel direction of the ceiling transport vehicle 2. It is related with the article conveyance facility in which at least one of them is provided.

Description

{ARTICLE TRANSPORT FACILITY}

The present invention is provided with a gripping portion that can run along a travel path while being guided and supported by a traveling rail provided on the ceiling side, and can be lifted up and down to support the article, A ceiling transport vehicle capable of transport-mounting the goods therebetween, and an intermediate shelf disposed above the goods exchanger and below the ceiling transporter to temporarily mount the goods transported to the goods exchanger. It is related with the installed goods conveying facility.

In the article carrying facility, the ceiling conveying vehicle travels along the travel path while holding the article in the holding portion, whereby the article carried into the article exchange portion or the article taken out from the article exchange portion is carried out. It conveys between several goods exchange parts. Generally, a plurality of ceiling transport vehicles are provided, and each of the ceiling transport vehicles stops directly on the article exchange unit designated as the carrier or the article exchange unit designated as the carrier from the controller managing the conveyance work. The article is transported and mounted between the article exchange section by lifting the grip section.

When the goods are returned to the goods exchange unit as a carrier by the ceiling transport vehicle and the goods exchange unit cannot accept the goods, the subsequent ceiling transport vehicle is in a state where the goods exchange unit can take over the goods. Because it must wait until, it causes the congestion of the ceiling carrier. Thus, conventionally, an intermediate shelf for temporarily mounting an article to be transported with respect to the article exchange unit is disposed above the article exchange unit and below the ceiling transfer vehicle, and the article is temporarily loaded on the intermediate shelf. Preventing traffic jams In addition, by providing an intermediate shelf around the article exchange unit, the article exchange unit can be brought in and out quickly when necessary.

As a conventional example of an article carrying apparatus provided with an intermediate shelf, a straight first path via a stop position for an exchange part set directly above the goods exchange part, and a straight type set at a position parallel to the first path and different in the horizontal width direction thereof. There is a case where a second path of is provided, and the intermediate shelf is disposed only under the second path (for example, see FIG. 2 of Patent Document 1).

In the article conveying apparatus of the said prior art example, the ceiling conveyance vehicle which travels a 1st path | route is provided with the holding part slidably in the transverse width direction of a 1st path | route and a 2nd path | route, The ceiling which travels the 2nd path | route by performing both the conveyance mounting to the goods exchange part located just under 1 path | route, and the conveyance loading of the article with respect to the intermediate | middle shelf arrange | positioned in a different position in the horizontal width direction of the 1st path | route. The conveying vehicle is configured to carry only the conveying equipment for the intermediate shelf located immediately below the second path.

Japanese Laid-Open Patent Publication No. 2006-224944

In the article conveying facility of the said conventional example, when carrying the article temporarily installed in the intermediate shelf to the article exchange part, the stop position for the exchange part set just above the said article exchange part along the 1st path by the ceiling conveyance vehicle which does not hold | maintain the article. The product is moved up and down, and the grip part slides and moves up and down to transport the goods from the intermediate shelf to the item exchange part. In addition, when carrying out goods from an goods exchange part, similarly, the ceiling conveyance vehicle which does not hold | maintain goods is run along the 1st route to the stop position for the exchange part set just above the said goods exchange part, and the grip part moves up and down. The goods are taken out from the goods exchange part. In addition, in the case where the goods carried out from the goods exchange part are temporarily mounted on the intermediate shelf, while holding at the stop position for the said exchange part in a 1st path | route, the holding | gripping part slides and raises and lowers, and the goods are temporarily mounted on an intermediate shelf. do.

In this way, the goods are carried in the first route by carrying in the goods to and from the goods exchange part, and carrying the goods out of the goods exchange part, and temporarily loading the goods onto the intermediate shelf and carrying the goods temporarily placed on the intermediate shelf to the goods exchange part. Since all the above-mentioned ceiling conveyance vehicles carry out, the workload of the ceiling conveyance vehicle which runs along a 1st route will become high. Therefore, there is a fear that congestion may occur due to the concentration of work on the ceiling transport vehicle traveling on the first route.

In addition, since there are no intermediate shelves just under the second path, the number of items that can be temporarily loaded is small, and even if the intermediate shelves are increased to increase the number of items that can be temporarily loaded, in the driving direction Since the intermediate | middle shelf is provided in the position spaced apart from the article | interchange exchange part, the conveyance distance when the ceiling conveyance vehicle which travels on a 1st path carries the article | intermediate of the intermediate shelf into an article exchange part becomes long. Therefore, there is a fear that the article cannot be brought in quickly to the article exchange unit.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is an article carrying facility capable of carrying out articles in and out of an article exchange section promptly, and being able to prevent occurrence of congestion of a ceiling transfer vehicle in a first route as much as possible. Is to provide.

In order to achieve the above object, the article carrying apparatus according to the present invention is provided with a gripping portion capable of moving along a running route and supporting an article in a state of being guided to a traveling rail provided on the ceiling side, and having a bottom for lifting. A temporarily transportable vehicle which can carry goods between the goods exchanger provided on the side, and an article which is disposed above the goods transporter and below the ceiling transporter and is transported to the goods exchanger. In the goods conveying equipment which is installed the intermediate shelf,

As the traveling path, a straight first path via a stop position for the exchange part set directly above the article exchange part, and a straight first path parallel to the first path and set at a different position in the horizontal width direction of the first path; Two paths are provided, the intermediate | middle shelf of the 1st path | route side located in a position different from the said goods exchange part in the running direction of the said ceiling conveyance vehicle as just below the said 1st path | route, and the said 2nd path | route A second path-side intermediate shelf located immediately below is provided, and the gripper for the transfer-mounting device supporting the article can be lifted in the vertical direction, and can slide in the horizontal width direction of the first path and the second path. And the article between the first path side intermediate shelf, the second path side intermediate shelf, and the article exchange part. An intermediate transfer mounting apparatus capable of being installed on a ship is provided, and the intermediate transfer mounting apparatus is configured to overlap the first path and the first path side intermediate shelf when viewed from the traveling direction of the ceiling transport vehicle, in the state of being overlapped with the first shelf. When viewed from the traveling direction of the first path-side intermediate transport mounting apparatus or the ceiling-carrier, which is installed so as to reciprocate along the travel direction of the ceiling carrier vehicle at a height between the path and the first path-side intermediate shelf. It is possible to reciprocate along the traveling direction of the ceiling carrier vehicle at a height between the second path and the second path side intermediate shelf in a state overlapping with the second path and the second path side intermediate shelf. At least one of the 2nd path side intermediate | middle transfer mounting apparatuses installed so that it is installed is installed.

According to such a structure, when the ceiling conveyance vehicle which travels on a 1st path | route carries a goods in the holding | gripping part, it stops at the stop position for exchange parts, and lowers a holding | grip part, and carries goods into the goods exchange part installed in the bottom side. can do. Similarly, when the article is not held in the holding portion, the article can be taken out from the article exchange portion provided on the bottom side by stopping at the stop position for the exchange portion and lowering the holding portion. Thus, the ceiling conveyance vehicle which travels on a 1st path can convey an article by the carrying out operation | movement along the traveling route to the goods exchange part of the article exchange part in the stop position for an exchange part, and the stop position for an exchange part. .

Moreover, since the 1st path side intermediate shelf and the 2nd path side intermediate shelf are formed as an intermediate | middle shelf which temporarily mounts the goods carried with respect to the goods exchange part, the ceiling conveyance vehicle which runs on a 1st path | route is a holding part. If the article is held in the state, the article can be temporarily mounted on the first path side intermediate shelf located immediately below by stopping at the position different from the stop position for the exchange section and the traveling direction and lowering the grip portion. If the article is not held, the article temporarily placed on the first path side intermediate shelf located immediately below can be received by stopping at the position different from the stop position for the exchange section and the driving direction and lowering the grip section. Similarly, the ceiling conveyance vehicle traveling on the second route can temporarily mount the article on the second route side intermediate shelf located directly below or receive the article temporarily mounted on the second route side intermediate shelf.

In addition, the holding unit for the transfer mounting apparatus can be lifted in the vertical direction and slidably in the transverse width direction of the first path and the second path, and between the first path side intermediate shelf and the second path side intermediate shelf. And an intermediate transfer mounting apparatus capable of carrying the article therebetween and at least one of the first route side intermediate transfer mounting apparatus and the second route side intermediate transfer mounting apparatus. An article temporarily mounted on a first route side intermediate shelf by a ceiling carrier traveling on a route may be carried in to the article exchange unit by the first route side intermediate transfer mounting apparatus or the second route side intermediate transfer mounting apparatus, It is also possible to move to the second path side intermediate shelf. Similarly, an article temporarily mounted on a second route side intermediate shelf by a ceiling carrier traveling on a second route is carried in to the article exchange unit by the first route side intermediate transfer mounting apparatus or the second route side intermediate transfer mounting apparatus. It is also possible, and it is also possible to move to the 2nd path side intermediate shelf. Thus, for example, the ceiling conveyance vehicle does not carry in from the intermediate shelf to the goods exchange part and carry out from the goods exchange part to the intermediate shelf, but returns the goods from the carrier (for example, from another goods exchange part). The conveyance) and the conveyance of the article to the conveyance ship (for example, conveyance to another article exchange part) can be performed. Of course, the ceiling transport vehicle traveling on the first route may directly carry in and out of the article to the article exchange unit.

In this way, all or part of the carrying in and out of the article to and from the article exchange unit can be performed by the first route side intermediate transfer mounting apparatus or the second route side intermediate transfer mounting apparatus. , Part of the import of goods to and from the goods exchange part, the temporary loading of the goods onto the intermediate shelf and the part of the goods temporarily placed on the intermediate shelf into the goods exchange part. There is no need to do it. Therefore, the workload of the ceiling carrier vehicle traveling on the first path can be reduced.

Therefore, as in the related art, an intermediate shelf is provided only under the second path, and the ceiling carrier driving the first path is slidably provided in the horizontal width direction of the first path and the second path. Since it is different, it can avoid that a workload increases to the ceiling carrier vehicle which runs on a 1st path | route. Thereby, generation | occurrence | production of the congestion by running a concentrated concentration of a ceiling carrier car in a 1st path can be prevented as much as possible.

Moreover, when installing many intermediate | middle shelves by providing the 1st path side intermediate | middle shelf located just under a 1st path | route, and the 2nd path side intermediate | middle shelf located just under a 2nd path | route as an intermediate shelf. Since the intermediate shelf can be provided at a position close to the travel path direction from the article exchange unit, the article temporarily mounted on the intermediate shelf, the overhead conveying vehicle traveling on the first route, or the first route side intermediate transfer mounting apparatus or article 2 It is possible to carry in the goods exchange part quickly by the path | route side intermediate | middle conveyance loading apparatus, and the goods in the goods exchange part can be carried in the ceiling conveyance vehicle which travels on a 1st path | route, the 1st path side intermediate | middle conveyance apparatus or the 2nd path | route side. It can be carried out quickly by carrying out by an intermediate | middle transfer mounting apparatus and temporarily mounting on an intermediate | middle shelf.

And as an intermediate | middle shelf, since the 1st path side intermediate | middle shelf located just under a 1st path | route, and the 2nd path side intermediate | middle shelf located just under a 2nd path | route are formed, the ceiling which runs a 1st path | route The intermediate | middle shelves located just below can use the conveyance vehicle and the ceiling conveyance vehicle which drive | work a 2nd route, respectively. Therefore, the ceiling carrier vehicle traveling on the first path or the ceiling carrier vehicle traveling on the second path corresponds to the installation interval between the first path and the second path in the path width direction for mounting the goods on the intermediate shelf. Since it is not necessary to provide the mechanism which slides over the distance to make it, it is also possible to simply comprise a ceiling conveyance vehicle.

As described above, it has been possible to obtain an article carrying facility capable of carrying out articles in and out of the article exchange section promptly, and being able to prevent the occurrence of congestion of the ceiling transfer vehicle in the first route as much as possible.

In the article conveyance installation embodiment which concerns on this invention, both of the said 1st path side intermediate | middle conveyance loading apparatus and the said 2nd path side intermediate | middle conveyance loading apparatus are provided, and the said 1st path side intermediate | middle conveyance mounting apparatus is a said transfer. The holding device for mounting apparatus is provided so that a withdrawal is possible between the 1st path side position immediately under the said 1st path | route, and the 2nd path side position immediately under the said 2nd path | route, and the said transfer mounting The holding device for the device is configured to be movable along the traveling direction of the ceiling transport vehicle in a state of being positioned at the first path side position, and the second path-side intermediate transport mounting device comprises: the holding device for the transport mounting device. The ceiling conveyance is provided in a state where the second path-side position and the first path-side position are allowed to withdraw from each other and the gripping portion for the transfer-mounting device is located at the second path-side position. It is preferable that it is comprised so that a movement is possible along the running direction of a car.

According to such a structure, when carrying in / out of an article to an article exchange part, the 1st path side intermediate | middle conveyance loading apparatus runs of the ceiling carrier vehicle in the state which located the holding part for conveyance loading apparatuses in the 1st path side position. It moves along the direction, and the 2nd path side intermediate | middle conveyance mounting apparatus moves along the traveling direction of the ceiling carrier vehicle in the state which located the holding part for conveyance installation apparatuses in the 2nd path side position. Therefore, since the 1st path side intermediate | middle conveyance mounting apparatus and the 2nd path side intermediate | middle conveyance mounting apparatus can move along a traveling direction without mutually interfering with each other, the goods can be carried in and out to an article exchange part smoothly.

In addition, the article temporarily mounted on the intermediate shelf by the ceiling transport vehicle is carried into the article exchange | exchange part by any one of the intermediate transfer mounting apparatuses of both a 1st path side intermediate transfer mounting apparatus, and a 2nd path side intermediate transfer mounting apparatus. In addition, the article can be taken out from the article exchange section by any one of these intermediate transfer mounting apparatuses and temporarily mounted on the intermediate shelf. And the intermediate transfer mounting apparatuses on both sides of the second path-side intermediate transfer mounting apparatus.

In the article carrying facility embodiment which concerns on this invention, as an article exchange part, the article exchange part of one side and the other article exchange part spaced apart in the horizontal width direction of the said 1st path | path and the said 2nd path | path are provided, The first path and the second path provided in correspondence with the one article exchange unit, and the first path and the second path provided in correspondence with the other article exchange unit are the first path and the second path. Arranged in parallel at intervals in the transverse width direction of the path, at least one of the first path and the second path provided in correspondence with the one item exchange part and provided in correspondence with the other item exchange part. Each of both ends with at least one of the first path and the second path is connected to a transfer path, and the ceiling transport vehicle is provided corresponding to the one article exchange part. Between the first route and the second route connected with the transfer route and the first route and the second route connected corresponding to the other article exchange unit and the transfer route among the second route. Between the intermediate transfer mounting apparatus which is configured to be movable via the transfer route, and installed in correspondence with the one article exchange unit, and the intermediate transfer mounting apparatus that is installed in correspondence with the other article exchange unit, It is preferable that the conveying means which can convey an article in the horizontal width direction of a said 1st path and a said 2nd path is provided.

According to such a structure, the ceiling conveyance vehicle is the 1st path | route and the 2nd path | route provided corresponding to the other goods exchange part of the 1st path | route and the 2nd path | route provided corresponding to one goods exchange part, and the path connected for the transfer. By traveling along the transit path connected to the transit path in the path, the first and second paths installed in correspondence with one of the commodity exchange parts are connected with the transit path on the other side. It can move between the 1st path and the 2nd path which were installed, and the one connected with the transfer path. Therefore, the ceiling conveying vehicle carries the article carried out from the one article exchange part or the article carried out from the said article exchange part by the intermediate transfer mounting apparatus, and temporarily installed in the intermediate shelf to the other article exchange part, or It can be temporarily mounted on an intermediate shelf for the other item exchange.

According to the above-described configuration, the transverse path of the first path and the second path is between the intermediate transfer mounting apparatus provided in correspondence with one article exchange unit and the intermediate transfer mounting apparatus installed in correspondence with the other article exchange unit. Since the conveying means which can convey an article in the width direction is provided, it conveys an article by the conveying means from the intermediate conveying apparatus installed corresponding to one article exchange part to the intermediate conveying apparatus installed corresponding to the other article exchange part. By this, the intermediate conveyance goods which were carried out from one of the goods exchange part by the overhead conveyance vehicle or the intermediate conveyance mounting apparatus, or the goods carried out from the said one goods exchange part and temporarily installed in the intermediate shelf were installed corresponding to the other goods exchange part. It is carried in the other article exchange part by a mounting apparatus, or is intermediate in the said other article exchange part Can be temporarily mounted on a shelf. Therefore, even if the ceiling transport vehicle does not convey the goods in the form of a right circle that travels to the end of the first path or the second path to which the transfer path is connected and travels on the transfer path, one article exchange part and the corresponding The article can be conveyed in bulk from the intermediate shelf provided to the other article exchange part and the intermediate shelf provided correspondingly.

In this way, the load on the ceiling transport vehicle can be further reduced, and the goods can be carried out from one of the article exchange units and quickly brought into the other article exchange unit.

In the article conveyance facility embodiment which concerns on this invention, the said conveying means is between the said 1st path side intermediate | middle conveyance apparatus or the said 2nd path | side intermediate | middle conveyance apparatus installed corresponding to the said one article | item exchange part. Between the first path side intermediate transfer mounting apparatus or the second path side intermediate transfer mounting apparatus capable of mounting and supporting the article at one transfer placement position where the article is exchanged, and installed corresponding to the other article exchange unit. It is preferable that the conveyer is configured by a conveying conveyor capable of mounting and conveying the goods to the other transporting position where the goods are exchanged.

According to such a structure, the 1st path side intermediate transfer mounting apparatus or the 2nd path side intermediate transfer mounting apparatus provided corresponding to one article exchange part is stopped for the transfer mounting apparatus in the state stopped just above one transfer mounting position. By raising and holding the holding portion in the vertical direction, the article is handed from the upper side to the conveyer conveyor. The conveyance conveyor which is in the state which mounts and supports the article in one conveyance mounting position carries and conveys an article to the other conveyance placement position. And the holding part for conveying equipments in the state in which the 1st path side intermediate | middle conveyance apparatus or the 2nd path side intermediate | middle conveyance apparatus which were installed corresponding to the other goods exchange part was stopped just above the other conveyance loading position. By raising and lowering in the up and down direction, the article carried by the conveying conveyor is received at the other conveyance mounting position.

Thus, the 1st path side intermediate | middle conveyance apparatus or the 2nd path side intermediate | middle conveyance apparatus provided corresponding to one article exchange part is a movement part immediately above one conveyance loading position, and a grip part for a conveyance apparatus in a vertical direction. The article can be exchanged with the conveying means by the function which can be realized without making a big change to the existing structure to elevate and lift. In addition, when a new setting is made immediately above one of the transport-mounted positions as a stop position, hardware (for example, a position detection sensor) or software (for example, a position discrimination program according to position information in the travel route) is used. What is necessary is just to provide the position detection means by this. The same applies to the first path side intermediate transfer mounting apparatus or the second path side intermediate transfer mounting apparatus provided in correspondence with the other article exchange unit.

Thus, when the conveying means which can convey an article between the intermediate transfer mounting apparatus for one article exchange part and the intermediate transfer mounting apparatus for the other article exchange part is installed, the existing structure of the intermediate transfer mounting apparatus is changed. The conveying means can be configured.

Moreover, in the article conveyance facility embodiment which concerns on this invention, the said 1st path | route side shelf and the said 2nd path | route side intermediate shelf are mutually formed, and the said 1st path | route and the said 2nd path | route are formed mutually the same height. It is preferable that it is provided in the same height. This simplifies the structure of the entire facility, the conveyance mounting work, and the like.

1 is an overall plan view of an article carrying facility according to an embodiment.
FIG. 2 is a partially enlarged plan view of FIG. 1.
3 is a partially enlarged side view of FIG. 1.
4 is a front view as viewed from the traveling direction of the ceiling carrier vehicle.
5 is a partially enlarged front view of FIG. 4.
6 is a plan view illustrating an arrangement state of a conveyer.
7 is a front view illustrating an arrangement state of the transport conveyor.
It is a top view explaining the stop position of the intermediate transfer mounting apparatus.
9 is a control block diagram.
10 is a plan view showing a conveying means according to another embodiment.

EMBODIMENT OF THE INVENTION Embodiment of the article conveyance facility which concerns on this invention is described with reference to drawings.

[Overall structure]

BRIEF DESCRIPTION OF THE DRAWINGS It is an overall top view of the goods conveying installation which concerns on this embodiment, and FIG. 2 is an enlarged plan view of the upper left side of the paper surface in FIG. Here, the upper left part of the page is the upper left part in the case of arranging the drawings so that the reference numerals given to the elements shown in the drawings can be seen in the right direction . Similarly, in the following description, when expressions such as left, right, up, down, etc. of the ground are used, it means the direction in the ground when the drawings are similarly arranged. The vertical direction of the sheet means a direction perpendicular to the sheet horizontal direction in the direction in the sheet. This article carrying facility is provided in the semiconductor manufacturing plant, and the travel rail provided with the some ceiling conveyance vehicle 2 which conveys board | substrate storage containers, such as FOUP which accommodates several semiconductor wafers as article W, on the ceiling side ( It is installed to be capable of traveling in one direction along the traveling route while being guided and supported in 1).

The traveling rail 1 is provided as shown in FIG. 1 in planar view at the height above the set surface by the set height. As a result, three annular paths LP1 to LP3 are arranged on the ceiling side, which are arranged in the horizontal direction of the paper. Each of these annular paths LP1 to LP3 extends in the longitudinal direction as a whole, and has two straight portions extending along the longitudinal direction and two curved portions connecting these straight portions at the ends. . Between the first annular path LP1 and the second annular path LP2, a pair of paths constituted by the first linear path L1 and the second path L2 that extend perpendicular to the longitudinal direction of the annular path are in the vertical direction of the ground. Plural numbers are set in the arranged state. Similarly, a plurality of pairs (consisting of the first path L1 and the second path L2) are provided between the second annular path LP2 and the third annular path LP3. As shown in FIG. 4, the traveling rail 1 includes a pair of rail members 1a to 1b arranged at intervals in the horizontal width direction orthogonal to the traveling direction of the ceiling transport vehicle 2 in the horizontal direction. It is composed. The pair of rail members 1a-1b are supported by the pair of rail support members 9 provided in the ceiling.

One end of the first path L1 and the second path L2 disposed between the annular path LP1 and the LP2 is connected by the annular path LP1 and the connection part K, and the other end is connected to the annular path LP2 and the connection part K. Is connected by. Similarly, one end of the first path L1 and the second path L2 disposed between the annular path LP2 and LP3 is connected by the annular path LP2 and the connection part K, and the other end is connected to the annular path LP3 and the connection part. It is connected by K. Thereby, the ceiling carrier vehicle 2 can travel to the annular paths LP1 to LP3 from the first path L1 or the second path L2 and to the first path L1 or the second path L2 from the annular paths LP1 to LP3. As shown in FIG. 1, the 2nd annular path LP2 is comprised by the double loop path (namely, the whole of one annular path is arrange | positioned in another annular path) connected to each other in several places. Since the plurality of ceiling transport vehicles 2 travel in only one direction, the traveling direction of the ceiling transport vehicles 2 in the first path L1 and the second path L2 arranged up and down on the ground of FIGS. 1 and 2 is It is set to alternately reverse.

Immediately above the station 4 as an article exchange part of the plurality of processing apparatuses 8 arranged and arranged in the left and right direction of the paper (ie, the direction perpendicular to the longitudinal direction of the annular path) of FIGS. A first path L1 is provided along the arrangement direction of the station 4 (paper left and right directions in FIGS. 1 and 2). The second path L2 is set in parallel with the first path L1 at positions different from the horizontal width direction of the first path L1 (up and down directions of the paper surface in FIGS. 1 and 2, that is, the longitudinal direction of the annular path).

[Processing apparatus]

Between the first annular path LP1 and the second annular path LP2, and between the second annular path LP2 and the third annular path LP3, the semiconductor wafer accommodated in the substrate storage container is taken out, and the processing or processing of the semiconductor wafer is performed. A plurality of processing apparatuses 8 which perform the operation are arranged on the bottom surface in a state aligned in the up, down, left, and right directions of the pages of FIGS. 1 and 2. A station 4 is provided at an end of the processing apparatus 8, and the processing apparatus 8 is connected to the overhead transport vehicle 2 or the intermediate transfer mounting apparatus 6 described later via the station 4. Send and receive item W.

The processing apparatuses 8 are arranged in pairs in a posture in which the stations 4 face each other in the vertical direction of the page of FIGS. 1 and 2. For example, the station 4 provided with respect to the processing apparatus 8 on the upper left side of the page in FIG. 2 faces the station 4 provided with respect to the processing apparatus 8 on the lower left side of the page in the up-down direction. . Thus, as the station 4, one station 4 and the other station 4 spaced apart in the arrangement direction of the first path L1 and the second path L2 are provided. The first path L1 and the second path L2 provided in correspondence with one station 4 and the first path L1 and the second path L2 provided in correspondence with the other station 4 are the first path L1 and the second path. It is arrange | positioned in parallel at intervals in the horizontal width direction of L2, and both the 1st path L1 and the 2nd path L2 are connected to the annular path LP1-LP3 at the both ends. Therefore, in the ceiling carrier vehicle 2 which travels the 1st path L1 and the 2nd path L2 arrange | positioned between the annular path LP1 and the annular path LP2, The annular path LP1 and the annular path LP2 function as a transfer path for moving to another first path L1 or second path L2. Similarly, in the ceiling carrier vehicle 2 which travels the first path L1 or the second path L2 disposed between the annular path LP2 and the annular path LP3, the annular path LP2 and the annular path LP3 are different from the other first path L1. It functions as a transfer route for moving to the second route L2.

As shown in FIGS. 2-4, the station 4 is provided in the edge part of the processing apparatus 8 so that the article W can be mounted and supported at the height lower than the height of the processing apparatus 8. As shown to FIG. The article W handed to the station 4 by the ceiling transport vehicle 2 or the intermediate transfer mounting apparatus 6 is received inside the processing apparatus 8, and the processed article W is returned to the station 4 again and is ceilinged. It is received by the conveyance vehicle 2 and the intermediate transfer mounting apparatus 6.

In the present embodiment, the length of the traveling direction is set so that the station 4 can mount and support three articles W in a state arranged adjacent to the traveling direction of the ceiling transport vehicle 2. That is, three goods exchange positions are set in the station 4, and in the traveling route 1, the ceiling transport vehicle 2 exchanges goods W with respect to these goods exchange positions (that is, to be transported). As the stop position Q1 for the exchange part which stops at the time, from the upstream of the travel direction of the ceiling conveyance vehicle 2 in the 1st path L1, the stop position Q1a for the 1st exchange part, the stop position Q1b for the 2nd exchange part, and 3rd exchange | exchange Three of the bouillon stop positions Q1c are set directly above each of the three article exchange positions in the station 4.

[Middle shelf]

As shown in FIGS. 1 to 4, immediately below the first path L1 and the second path L2, the article W handed to the station 4 or the article W received from the station 4 is temporarily mounted (that is, The intermediate shelf 5, which temporarily holds the article W, is disposed above the station 4 in the up and down direction and below the ceiling transport vehicle 2. In this embodiment, as the processing apparatus 8, the 1st processing apparatus 8a and the 2nd processing apparatus in the state arrange | positioned along the running direction of the ceiling conveyance vehicle 2 in 1st path L1 or 2nd path L2. 8b is arrange | positioned adjacent to each other, and the several intermediate | middle shelf 5 is the upper side of the other processing apparatus 8 from the upper side area | region of one processing apparatus 8 of these processing apparatuses 8. It is installed over the area. As the intermediate | middle shelf 5, the 1st path side intermediate | middle shelf 5n located in the position different from the station 4 in the travel direction of the ceiling conveyance vehicle 2 just under 1st path L1, and a 2nd path | route The 2nd path side intermediate | middle shelf 5f located just under L2 is provided.

As shown in FIG.3 and FIG.4, the intermediate | middle shelf 5 is provided in the state which protrudes downward from the lower part of the buffer frame 55 suspended from the ceiling. As shown in FIG. 6, the buffer frame 55 is located on the upstream side portion 55a located on the upstream side in the travel direction of the ceiling transport vehicle 2 traveling on the first path L1 and located on the downstream side. And a downstream side portion 55b, each of which travels the first path side frame body 55n and the second path side frame body 55f, as shown in FIGS. 4, 5, and 6. It is provided in the state arrange | positioned in the horizontal width direction of a path | route. Since the upstream side part 55a and the downstream side part 55b are the same structure, the upstream part 55a is demonstrated typically hereafter.

The first path-side frame 55n and the second path-side frame 55f in the upstream portion 55a are arranged so that the frame-shaped horizontal frame member 25 is spaced in the vertical direction with a gap therebetween. It is connected and comprised by the vertical connection member 26 in the several places of the width direction of a vehicle 2, and a running direction. The horizontal frame member 25 includes a plurality of vertical horizontal members 25Y along the longitudinal direction of the first path L1 and the second path L2, and a horizontal horizontal member along the width direction of the first path L1 and the second path L2 ( It is comprised by the frame body which connected 25T) with each other. The vertical horizontal member 25Y and the vertical connecting member 26 are continuous from the upstream side portion 55a to the downstream side portion 55b.

The first path side frame 55n and the second path side frame 55f are suspended from the ceiling by a plurality of shelf suspension holes 24. The shelf suspension opening 24 is longer than the rail support member 9 which supports the running rail 1 by the length corresponding to the up-and-down height of the ceiling conveyance vehicle 2. As a result, the first path L1 and the second path L2 of the ceiling transport vehicle 2 are located between the plurality of shelf suspension holes 24 when viewed in the traveling direction, and the first path side frame at the upstream side portion 55a. The sieve 55n is located just below the 1st path L1 of the ceiling carrier 2, and the 2nd path | route side frame body 55f in the upstream side part 55a is a thing of the ceiling carrier 2; 2 Located just below path L2.

As shown in FIG. 6, the edge part of an upstream and a downstream side is carried out to the 1st path | route side frame body 55n in the upstream part 55a in the running direction of the ceiling carrier vehicle 2 which travels 1st path L1. In each of the intermediate shelf members 27 forming the first path-side intermediate shelf 5n is provided. In addition, in the second path side frame body 55f in the upstream side part 55a, four places are excluded from the downstream end in the traveling direction of the ceiling transport vehicle 2 traveling through the second path L2. The intermediate | middle shelf member 27 which forms 2 path | route side intermediate | middle shelf 5f is provided.

As shown in Figs. 5 and 6, the intermediate shelf member 27 is engaged with three engaging grooves for positioning formed on the bottom surface of the article W, and is provided with three positioning pins for positioning the article W ( A horizontal mounting surface portion 27a provided with 28, a connecting plate portion 27b facing upward from one end of the mounting surface portion 27a, and a connecting plate portion 27c facing upward from the other end. Equipped with. The upper end of one connecting plate portion 27b is connected to the vertical horizontal member 25Y, and the other upper end of the other connecting plate portion 27c is adjacent to the one vertical horizontal member 25Y in the horizontal width direction. The intermediate shelf member 27 has the mounting surface portion 27a lowered by the height of the article W than the lower end of the buffer frame 55 by being connected to the horizontal member 25Y by the connecting bracket 29. It is fixed to the buffer frame 55 in a state positioned at. By such a configuration, the mounting surface portion is in a posture in which the front surface (surface on which the opening of the front surface of the substrate storage container is located) faces one of the connection plate portions 27b (the posture in the right direction in the drawing plane in FIG. 5). The article W is mounted and supported by the 27a.

2 and 6, two first path side intermediate shelves 5n and a second path L2 located on the first path L1 side in the upstream portion 55a of the buffer frame 55. 1 set of transfer target object groups provided corresponding to the 1st processing apparatus 8a by the 4th 2nd path side intermediate | middle shelf 5f located in the side, and the station 4 in the 1st processing apparatus 8a. The 1st transfer mounting target group G1 as this is comprised. Similarly, two first path-side intermediate shelves 5n located on the first path L1 side in the downstream part 55b of the buffer frame 55 and four second located on the second path L2 side. 2nd transfer mounting target group G2 as a set of transfer mounting target group provided corresponding to the 2nd processing apparatus 8b by the station 4 in the path | route side intermediate | middle shelf 5f and the 2nd processing apparatus 8b. Is composed. In this way, one set of transfer target object groups is provided for each of the first processing device 8a and the second processing device 8b.

In addition, the ceiling conveyance which travels the stop position where the ceiling conveyance vehicle 2 which travels the 1st path | route L1 stops, and the 2nd path | route L2 with respect to the conveyance installation targets other than the station 4 among the 1st transportation installation target groups G1. A stop position at which the car 2 stops is set. That is, in addition to the three stop positions Q1a to Q1c for the three exchange parts corresponding to the three goods exchange positions of the station 4 as the stop positions for the first transfer-mounted target group G1, the most upstream in the direction along the first path L1. Conveyance which travels the 1st path L1 to the position adjacent to the 1st exchange part stop position Q1a on the upstream side, and the position adjacent to the lowest stop position Q1c for the exchange part downstream in the direction according to the 1st path L1 The stop position Q2n for the 1st path side intermediate | middle shelf for the car 2 to carry the article W with the 1st path side intermediate | middle shelf 5n is set. Moreover, in the 2nd path | route L2, the ceiling conveyance vehicle 2 which travels the 2nd path | route L2 to four places corresponding to four 2nd path | route side intermediate | middle shelves 5f and 2nd path | route side intermediate | middle shelf 5f is carried out. The stop position Q2f for the 2nd path side intermediate | middle shelf for conveying and mounting the article W between is set. The same applies to the stop position with respect to the second transfer mounting target group G2.

(Ceiling carrier)

As shown in FIG. 3, FIG. 4, and FIG. 7, the ceiling conveyance vehicle 2 supports suspension by the traveling part 10 provided with the driving drive wheel which travels on the traveling rail 1, and the traveling part 10. As shown to FIG. And a main body portion 11 supporting the article W so as to be able to move up and down and pivot. A pair of rail members connecting the traveling portion 10 and the main body portion 11 is provided. It is provided in the state located between (1a-1b). And the traveling part 10 is provided with the driving motor 51 (refer FIG. 9) which rotationally drives a travel drive wheel.

As shown in FIG. 4, the main-body part 11 raises and lowers the operation | movement operation means 12 which moves up and down the holding | gripping part 3 which hold | maintains the article W, and the lifting support body 22 for supporting the holding | gripping tool 3. And turning operation means (not shown) for turning the holding portion 3 around the vertical axis for each lifting support 22, and both the upper and the rearward directions of the article W held by the holding portion 3, and the left and right directions. The cover body 13 which covers one side of the structure is provided. In addition, the main body portion 11 is provided with a power receiving coil 14 so as to be positioned between the pair of rail members 1a to 1b, and alternates with the feeder line 15 provided along the traveling rail 1. The magnetic field is generated by energizing the electric current, and the electric field generates electric power required on the ceiling transport vehicle 2 side by the magnetic field, and supplies power to the ceiling transport vehicle 2 in a non-contact state. have.

The lifting operation means 12 includes a lifting motor 52 (see FIG. 9) and a rotating drum, and rotates the rotating drum in one direction and the reverse direction by the rotational operation of the lifting motor 52. By rotating and winding up and winding up the winding belt 16, the lifting support 22 is constructed to be able to elevate up and down.

The swing operation means is provided with the swing motor 53 (refer FIG. 9), and the lifting support 22 swings around an up-down shaft center by the rotational drive of this swing motor 53. As shown in FIG. The lifting support 22 is operated to change the posture of the gripping portion 3 by the gripping posture of gripping the article W and the gripping release posture of releasing the gripping by operation of the gripping motor 54 (see FIG. 9). A switching mechanism is provided.

By the same structure as described above, the ceiling transport vehicle 2 travels along the first path L1 and the second path L2 and the annular paths LP1 to LP3 by traveling in one direction while being guided and supported by the travel rail 1. It is possible.

The lift carrier 2 that runs on the first path L1 lifts and lowers the lifting support 22 by the lifting operation means 12 in a state where it is stopped at any one of the stop positions Q1a to Q1c for the plurality of exchange parts. The article of the station 4 located immediately below by turning the lifting support 22 for swing by the swing operation means and switching the grip portion 3 to the grip position and the grip release position by the switching mechanism. 1st path side intermediate | middle shelf 5n located just underneath in the state which carried the article W between the exchange positions, and was stopped in any one of the several stop positions for the 1st path side intermediate | middle shelves, Transfer the goods W between them.

The ceiling carrier vehicle 2 traveling on the second path L2 is moved up and down by the elevating operation means 12 by the elevating operation means 12 in a state where it is stopped at any one of a plurality of second path side intermediate shelf stop positions. The second path side located immediately below by elevating operation, turning the elevating support body 22 by the swing operation means, and switching the gripping portion 3 to the gripping position and the gripping release position by the switching mechanism. The article W is conveyed and mounted between the intermediate shelves 5f.

In FIG. 3 and FIG. 4, the ceiling conveyance vehicle 2 which travels on the 1st path L1 is the most in the travel direction shown by the arrow a in FIG. 3 among three stop positions Q1a-Q1c for the exchange part of the upstream part 55a. In the 3rd of the stop positions Q2f for the 2nd path | route side intermediate | middle shelves of four places of the downstream part 55b, the ceiling conveyance vehicle 2 which stops at the upstream exchange part stop position Q1a, and runs the 2nd path L2. The state which stopped at the stop position Q2f for an intermediate shelf at the most upstream in the travel direction shown by the arrow b is shown.

[Intermediate conveying equipment]

As shown in FIGS. 3-7, the intermediate | middle transfer mounting apparatus 6 which makes the installation object the buffer frame 55 in which the intermediate | middle shelf 5 was provided is provided. As the intermediate transfer mounting apparatus 6, one first intermediate transfer mounting apparatus 6n and one second intermediate transfer mounting apparatus 6f are provided for one buffer frame 55. The 1st intermediate | middle conveyance mounting apparatus 6n is the state which overlaps with the 1st path L1 and the 1st path side intermediate | middle shelf 5n up and down when it sees from the travel direction of the ceiling conveyance vehicle 2 (that is, the ceiling conveyance vehicle Viewed from the traveling direction of (2), it is a state located between the 1st path L1 and the 1st path side intermediate | middle shelf 5n, Preferably it is just below the 1st path L1, and the 1st path side intermediate | middle shelf 5n In a state located directly above), so as to reciprocate in a direction along the traveling direction of the ceiling transport vehicle 2 at a height between the first path L1 and the first path side intermediate shelf 5n. have. The 2nd intermediate | middle conveyance mounting apparatus 6f is a state which overlaps with the 2nd path L2 and the 2nd path side intermediate | middle shelf 5f up and down when it sees from the travel direction of the ceiling conveyance vehicle 2 (that is, the ceiling conveyance vehicle Viewed from the traveling direction of (2), it is a state located between 2nd path L2 and 2nd path side intermediate shelves 5f, Preferably it is just under 2nd path L2, and 2nd path side intermediate shelves 5f. In a state located directly above), and is provided so as to reciprocate in a direction along the traveling direction of the ceiling transport vehicle 2 at a height between the second path L2 and the second path side intermediate shelf 5f. have.

Both the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f are provided so that reciprocation is possible over the whole range of the buffer frame 55 in these movement directions. Thereby, each of the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f reciprocates over the upstream side part 55a and the downstream side part 55b, and is 1st processing apparatus 8a. ), The article W can be transported to any of the transport targets in the first transport target object group G1 and the second transport target object group G2 provided in correspondence with the second processing apparatus 8b provided in correspondence with the " The details will be described below.

As shown in FIG. 5, the 1st intermediate transfer mounting apparatus 6n is equipped with the holding | maintenance part 7 for transport mounting apparatuses which support the article W so that an up-down direction is possible, and this holding | maintenance part for transporting apparatuses ( 7 is provided with the horizontal row operation means 31 which horizontally operates the conveyance mounting apparatus horizontal width direction (in the horizontal width direction of a 1st path L1 and a 2nd path L2, and a left-right direction of a paper in FIG. 5).

The 1st intermediate | middle transfer mounting apparatus 6n has the retracted position as the 1st path side position immediately below the 1st path L1 by the horizontal row operation means 31, and the holding | maintenance part 7 for conveying installation apparatuses. It is provided so that a withdrawal is possible between the protruding position as a 2nd path side position immediately under the 2nd path L2, and the holding | maintenance part 7 for conveying installation apparatuses is located in the retracted position of the ceiling conveyance vehicle 2 It is comprised so that a movement is possible along a travel direction. This prevents the interference with the ceiling carrier vehicle 2 and the interference with the second intermediate transfer equipment 6f during the transportation installation operation.

4 shows the traveling direction of the ceiling transport vehicle 2 in a state where the first intermediate transfer mounting apparatus 6n and the second intermediate transfer mounting apparatus 6f are evacuating the grip portion 7 for the transfer mounting apparatus to the retracted position. 5, the first intermediate transfer mounting apparatus 6n and the second intermediate transfer mounting apparatus 6f are projected to each other in the protruding position while the second intermediate transfer mounting apparatus 6f is stopped together. This state is shown when viewed from the traveling direction of the ceiling carrier vehicle 2.

As shown in FIGS. 3 to 5, the guide frame 17 which supports the movement along the traveling direction of the ceiling transport vehicle 2 by supporting the first intermediate transfer mounting device 6n in the buffer frame 55. ) Is provided, and the guide support 17 is held by the gripper 3 when the ceiling carrier 2 in the state of being stopped at the stop position Q1 for the exchange section and the stop position Q2 for the intermediate lathe is transported on the article W. The article W is configured to form a space through which the article W can pass in the vertical direction.

Specifically, in the state where the guide support 17 forms the clearance which the holding | maintenance part 3 of the ceiling conveyance vehicle 2 holding the article W can pass in an up-down direction, the 1st intermediate transfer mounting apparatus 6n It is comprised by the pair of lower guide rails 18-19 arrange | positioned at intervals in the conveyance mounting apparatus horizontal width direction. The pair of lower guide rails 18 to 19 are two rail mounting members 20 to connect a pair of horizontal horizontal members 25T positioned at both ends in the travel direction on the upper portion of the buffer frame 55. 21) is mounted on the lower surface.

Slide which is slidably engaged with a pair of lower guide rails 18-19 at both ends of the conveyance mounting apparatus horizontal width direction of the movement base material 32 provided in the upper part of the 1st intermediate transfer mounting apparatus 6n. Blocks 34 to 35 are provided in a fixed state. The operation bracket 33 is attached to one end of the moving base member 32 when viewed in the travel direction. The to-be-operated bracket 33 has the horizontal part 33a by which the lower end part was bent, and as shown to FIG. 3 and FIG. 5, the drive pulley 36a and the driven pulley which have the tooth which rotates around a horizontal axis center ( The operation bracket 33 is connected to the upper surface of the upper winding part of the timing belt 38 for movement operation of the longitudinal winding surface wound by 36b).

And the movement base material 32 is rotated in one direction and the reverse direction by rotating the movement operation motor 37 which makes the movement operation timing belt 38 wind up, and a pair of lower guide rails 18-19 are carried out. Accordingly, the reciprocating linear movement can be performed. That is, by controlling the rotation operation of the movement operation motor 37, the movement of the 1st intermediate transfer mounting apparatus 6n can be controlled. In addition, the positioning control of the movement of the intermediate transfer mounting apparatus 6 may be performed by servo control using the servo motor as the motor 37 for a movement operation, and the travel direction of the 1st intermediate transfer mounting apparatus 6n may be carried out. As a position detecting means for detecting the stop position for the transport mounting arranged in the movement path along the path, a plurality of photoelectric sensors are provided corresponding to each stop position, and positioning control is performed based on the detection information of these sensors. You may also

As shown in FIG. 5, a ball screw 40 capable of moving and guiding the guide block 39 in the conveyance device horizontal width direction is provided on the upper surface of the movable base material 32 of the first intermediate conveyance device 6n. It is. The guide block 39 is provided at the retracted side end portion in the retreat direction at the base fork of the multi-stage slide fork 42 which retracts the elevating support 41 in the transverse device width direction. It is connected. The slide fork 42 is provided with a base fork, an intermediate fork which is slidable transversely with respect to this base fork, and a primary fork which is slidable transversely with respect to this intermediate fork, for example. . Each end of the slide fork 42 is interlocked with the interlocking belt 43 in the state engaged with each other by the linear movement guide mechanism, and is lifted up and down by the primary fork by the withdrawal operation with respect to the base fork. It is comprised so that the elevating support body 41 connected via the operation means 45 and the swing operation means 46 may be pulled out. Then, by rotating the horizontal row operation motor 44 for rotating the screw 40a of the ball screw 40 in one direction and the reverse direction, the guide block 39 is moved in the horizontal direction of the transfer mounting apparatus (that is, The reciprocating operation can be performed along the direction perpendicular to the longitudinal direction of the first and second paths. In this manner, the horizontal mounting operation motor 44, the ball screw 40, and the slide fork 42 move the holding unit 7 for the transfer mounting apparatus in the intermediate transfer mounting apparatus 6 to the transfer mounting apparatus horizontally. The horizontal row operation means 31 which performs horizontal row operation in the width direction is comprised.

The elevating operation means 45 rotates the rotating drum 48 by rotating the elevating motor 47 in one direction and the opposite direction thereof, and sends and winds up the winding belt 49, thereby elevating and supporting the support 41. It is configured to operate up and down. The swing operation means 46 pivotally drives the swing motor 50 to swing the grip portion 7 for the transfer-mounting device about the vertical axis. Thereby, the attitude | position can be adjusted to an appropriate position in plan view of the article W with respect to the station 4 and the intermediate shelf 5.

With such a configuration, as shown in FIG. 8, the first intermediate transfer mounting device 6n is provided in each of the upstream side portion 55a and the downstream side portion 55b of the buffer frame 55. Between the stop positions for two transfer mountings Pnl? Pn5 and the first intermediate transfer mounting apparatus 6n set in the movement direction of the two transfer path intermediate shelves 5n immediately above each of these two transfer path stop positions. In the state which stopped at any one of three stop positions Pn2-Pn4 set to at, the transfer part holding | gripping apparatus 7 transversely moves up and down, and between 1st path side intermediate | middle shelf 5n. The article W can be conveyed and mounted between the second path side intermediate shelf 5f and between each article exchange position in the station 4.

The second intermediate transfer mounting apparatus 6f is the same as the first intermediate transfer mounting apparatus 6n except that the direction in which the horizontal row operation means 31 moves in and out of the gripper 7 for the transfer mounting apparatus is reverse. Configuration. And the 2nd intermediate transfer mounting apparatus 6f is four second path | route side intermediate shelves 5f in each of the upstream side part 55a and the downstream side part 55b of the buffer frame 55. As shown in FIG. Of the buffer frame body 55 in the traveling direction of the ceiling transport vehicle 2 among the four stop positions Pf2 to Pf5 and the two first path-side intermediate shelves 5n set just above each of the two. In the state which stopped at any one of the stop positions Pf1 for conveyance loads corresponding to the inside path | route 1st intermediate | middle shelf 5n, the gripper 7 for conveyance load devices is moved horizontally, and it raises and lowers, and the 1st path side intermediate | middle The article W can be transport-mounted between the shelf 5n, between the second path side intermediate shelf 5f, and between each article exchange position in the station 4.

[Conveyor conveyor]

One station 4 (four stations shown in FIG. 2) disposed in an intermediate portion of the buffer frame 55 in the traveling direction of the ceiling transport vehicle 2 in the up and down direction of the page in FIGS. 1 and 2. Between the upper left station in (4)] and the other station 4 (the lower left station in FIG. 2), and the transfer target target group provided corresponding to one station 4 A transport conveyor 56 capable of transporting the article W is provided between the transport target group provided in correspondence with the station 4. Similarly, the conveying conveyor 56 which can convey the article W between the conveyance loading target group installed corresponding to the station 4 on the upper right side of FIG. 2 and the conveying loading target group installed corresponding to the station 4 on the lower right side. Is installed. As shown in FIG. 7, these pair of conveying conveyors 56 are connected by the suspension-supported state to each of the upstream side part 55a and the downstream side part 55b of the buffer frame 55. As shown in FIG. Since both are the same structure, the conveyance conveyor 56 connected with the upstream side part 55a of the buffer frame 55 is demonstrated typically hereafter.

As shown in FIG. 6 and FIG. 7, the conveyance conveyor 56 carries the conveyance path | route part 57 and article W which connect the buffer frame 55 provided in correspondence with one and the other station 4 mutually. It is comprised by the conveying moving body 59 which is equipped with the article mounting stand 58 which can mount | support and can carry | support, and is rotatable, and which can carry out the said conveyance path part 57 reciprocally. One end of the conveying path part 57 is connected to the buffer frame 55 provided corresponding to one station 4, and the other end of the conveying path part 57 is connected to the other station 4. It is connected to the buffer frame 55 correspondingly installed, and the conveyance conveyor 56 is supported by the buffer frame 55 for both buffers. In addition, you may connect the intermediate part of the conveyance conveyor 56 and a ceiling to the shelf suspension opening 24 by the same member for reinforcement.

As shown in FIG. 9, the conveyance mobile body 59 is the drive motor 61 which drives a drive wheel rotationally, the lifting motor 62 which raises and lowers the goods mounting base 58, and the goods mounting base 58. As shown in FIG. It is provided with the turning motor 63 which rotates and drives. The article mounting table 58 is engaged with three engagement grooves for positioning formed on the bottom surface of the article W, similarly to the intermediate shelf member 27 forming the intermediate shelf 5 to position the article W. Three positioning pins are provided to protrude upward.

The conveyance path part 57 is comprised by the case body, The slit 60 along the longitudinal direction is formed in the upper surface part. In order to prevent dust from scattering to the outside, the conveyance mobile body 59 is arrange | positioned inside the case body of the conveyance path part 57, and the article mounting stand in the conveyance mobile body 59 ( 58 is connected and supported by the support shaft (not shown) inserted into the slit 60 so as to be able to move up and down with respect to the carrier body for conveyance above the upper surface portion. And the conveying mobile body 59 reciprocates along the longitudinal direction in the inside of the conveyance path part 57 in the state guided by the guide mechanism which is not shown by rotationally driving a drive wheel to one direction and the reverse direction. It is supposed to be.

As shown in FIG. 8, in each movement path of the first intermediate transfer mounting apparatus 6n and the second intermediate transfer mounting apparatus 6f provided in correspondence with one station 4, In the position where the conveyance conveyor 56 is located in a travel direction, the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f are between the edges of the side of the station 4 side of the conveyor 56 at one side. Conveyor transfer mounting position Pc for transporting the article W is set. Similarly, the respective transport paths of the first intermediate transfer mounting apparatus 6n and the second intermediate transfer mounting apparatus 6f provided in correspondence with the other station 4 are transported in the traveling direction of the ceiling transport vehicle 2. At the position where the conveyor 56 is located, the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f are between the ends of the other station 4 side of the conveyor conveyor 56 with the edge part. The conveyor conveyance mounting position Pc for carrying the article W is set.

The 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f provided corresponding to the one station 4 stopped the conveyer in the state which stopped at the conveyor transfer mounting position Pc set to each movement path | route. It is comprised so that the article W may be conveyed and mounted between the droop 64 provided in the one conveyance mounting position which is one end of 56. As shown in FIG. Similarly, in the state where the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f provided corresponding to the other station 4 were stopped at the conveyor transfer mounting position Pc set to each movement path | route, And transfer the article W between the drip tray 64 provided at the other transfer mounting position, which is the other end of the conveying conveyor 56.

In this embodiment, the conveyor conveyance mounting position Pc is a conveyance mounting stop position Pn5-Pf5 of the upstream part 55a, or the conveyance mounting stop positions Pn1-Pf1 of the downstream side part 55b, and a 1st intermediate | middle conveyance loading site. It is set to the same position in the moving direction of the apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f. Moreover, since the conveyor conveyance mounting position Pc is located just under the 2nd path L2, the 1st intermediate | middle conveyance mounting apparatus 6n protrudes the holding part 7 for conveyance mounting apparatus to a protrusion position, and the conveyance moving body ( Transfer the article W between 59). The 2nd intermediate transfer mounting apparatus 6f carries the article W with the conveyance mobile body 59, with the holding | maintenance part 7 for conveying installation apparatuses positioned in a retracted position.

As shown in FIG. 4, FIG. 6, and FIG. 7, the drip tray 64 which can mount | support the article W is provided in both the one conveyance mounting position and the other conveyance mounting position of the conveyance conveyor 56. As shown in FIG. In the droop 64, three positioning pins for positioning the article W protrude upwards. These positioning pins are arranged to be engaged with the bottom surface of the article W at a position different from that of the article mounting table 58 in the conveying mobile body 59, and the article positioned in the droop 64 The article mounting table 58 can be raised from the lower side of the W to be supported in a position positioned on the article mounting table 58, and the article W is received from the droop 64 by the transporting body 59. The conveyance mounting to be lifted can be performed without shifting the position and posture of the article W. FIG. Similarly, the conveyance mounting which handes down the opposite article W from the conveyance moving body 59 to the droop 64 can also be performed, without shifting the position and attitude | position of the article W.

Thus, in this embodiment, the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f which were provided corresponding to one station 4, and the agent installed corresponding to the other station 4 were installed. A conveying means for conveying the article W in the transverse width direction of the first path L1 and the second path L2 is provided between the first intermediate conveying device 6n and the second intermediate conveying device 6f. The means mounts and supports the article W at one transfer placement position where the article W is exchanged between the first intermediate transfer placement device 6n and the second intermediate transfer placement device 6f provided corresponding to one station 4. The article W to the other transfer placement position where the article W can be exchanged between the first intermediate transfer placement apparatus 6n and the second intermediate transfer placement apparatus 6f that are capable of being installed in correspondence with the other station 4. On the conveyer 56 It is composed.

In addition, in this embodiment, the conveyance conveyor 56 is the article W transmitted / received by the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f which were provided corresponding to one station 4, respectively. Is transmitted / received by the first intermediate transfer mounting device 6n and the second intermediate transfer mounting device 6f provided in correspondence with the one transfer-mounted position on which the loading platform 64 capable of mounting and supporting the other station 4 is installed. Transport that can carry and transport the article W from the other transport mounting position where the drip tray 64 capable of mounting and supporting the article W can be mounted, and can carry and transport the article W between one transport mounting position and the other transport mounting position. The movable body 59 is comprised.

9 is a control block diagram of an article carrying facility. The ceiling conveyance controller VCq with which the ceiling conveyance vehicle 2 is equipped, the intermediate | middle conveyance apparatus controller VCp with which the intermediate | middle conveyance apparatus 6 is equipped, and the conveyor controller VCr with which the conveyance conveyor 56 are equipped are wirelessly communicated with the host controller HC. The connection is possible. The host controller HC manages the processing stroke of the article W, sets a return source and a carrier line for each article W, and commands a return instruction so that the article W can be appropriately conveyed in accordance with a return request from each processing apparatus. . And based on the conveyance instruction | command instructed by the host controller HC, operation | movement of the ceiling conveyance vehicle 2, the intermediate | middle conveyance installation apparatus 6, and the conveyance conveyor 56 is controlled by said each controller.

For example, when the processing of the article W is completed by a certain processing device 8, the host controller HC takes out the processed article W from the station 4 and returns it to the processing device 8 of the next step. Order the return instruction. The conveyance operation is made to the station 4 or another article (that is, the transport loading target group belonging to the same buffer frame 55 to which the transport loading target group of the station 4 belongs). There is no waiting vehicle 2 in the standby state by temporarily mounting the other article W on the intermediate shelf 5 in the buffer frame 55 in the ceiling carrier 2 carrying W. Even if it is, it is possible to process the said carrying out operation quickly. In addition, by temporarily mounting the intermediate shelf 5, it is possible to eliminate as much as possible the waste of the ceiling carrier car 2 running in an empty state in which the article W does not hold the article W as the whole facility.

In this embodiment, the intermediate | middle shelf 5 is provided just under both the 1st path L1 and the 2nd path L2, and all of the ceiling conveyance vehicle 2 which travels the 1st path L1 and the 2nd path L2 is carried out. Since only the conveyance mounting about the underside of the ceiling conveyance vehicle 2 is performed, the problem that the load of a conveyance installation work is concentrated in the ceiling conveyance vehicle 2 which travels on a 1st path can be avoided. In addition, the transfer-mounting operation | work of the article W with respect to the station 4 in the processing apparatus 8 is carried out in many intermediate | middles provided in the buffer frame 55 provided over the station 4 adjacent to the said station in the travel direction. Since the shelf 5 can be utilized, since the number of the intermediate shelves 5 is small, the overhead transport vehicle 2 can temporarily mount the article W carried in the station 4 or the article W carried out on the intermediate shelf 5. This can be done without causing as much trouble as possible. In addition, by providing the intermediate transfer mounting apparatus 6 directly under both of the first route L1 and the second route L2, the load on the transfer placement work of the ceiling transport vehicle 2 can be further reduced. In addition, when conveying the article W to the conveyance target object group with respect to the station 4 which opposes the article W from the conveyance target object group with respect to the station 4, the annular path | route is carried out by the ceiling conveyance vehicle 2 as before. Instead of the route conveyed by the route via LP1-LP3, the article W can be conveyed quickly using the conveyer conveyor 56 between the intermediate transfer mounting apparatuses to the opposing both stations 4.

[Other Embodiments]

As mentioned above, although the invention made by the inventor was demonstrated concretely according to embodiment of this invention, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the summary. Hereinafter, other embodiment of this invention is described.

(1) In the said embodiment, although the both ends of the 2nd path | route L2 were connected with the annular path | route LP1-LP3 as a transit path | route, the both ends of the 2nd path | route L2 may not be connected to any path | route. In this case, the ceiling carrier vehicle 2 traveling on the second path L2 reciprocates on the second movement path L2.

(2) In the said embodiment, the intermediate transfer mounting apparatus 6 shares several adjacent station 4 and buffer frame 55, and the upstream part of this buffer frame 55 is carried out. Although it was illustrated that it can move across both the 55a and the downstream side 55b, instead, the buffer frame 55 is provided exclusively for the single station 4, and the intermediate transfer mounting apparatus ( 6) may move within the range of the buffer frame 55 with respect to the single station 4 in the moving direction.

(3) In the said embodiment, you may comprise so that a ceiling conveyance vehicle may be provided so that a gripping part can slide to the horizontal width direction of a traveling path | route.

(4) In the said embodiment, the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f are a ceiling conveyance vehicle (with the holding part 7 for transfer mounting apparatus located in a retracted position. Although it was illustrated that it was comprised so that it could move along the travel direction of 2), the ceiling conveyance which the 1st intermediate transfer mounting apparatus 6n and the 2nd intermediate transfer mounting apparatus 6f performs the intermediate transfer mounting apparatus and transfer mounting operation of the other side is performed. As long as it does not interfere with the vehicle 2, it is also allowed to allow movement while the conveying device holding device 7 is protruded to a protruding position, and the retracting operation of the conveying device device holding device 7 is also allowed. You may comprise.

(5) In the above embodiment, the first intermediate transfer mounting apparatus 6n and the second intermediate transfer mounting apparatus 6f are provided for one buffer frame 55, respectively. The plurality of first intermediate transfer mounting devices 6n or the second intermediate transfer mounting devices 6f may be provided for the buffer frame 55.

(6) Although the above embodiment exemplifies that the conveying moving body which is capable of moving the conveying path portion as the conveying conveyor is configured to convey the article, instead of this constitution, the conveying mechanism is a winding conveyor such as a belt conveyor or the like. It may be configured to convey the article by reciprocating operation.

(7) In the above embodiment, the conveying means is constituted by a conveying conveyor, but as illustrated in FIG. 10, the conveying means is a buffer of a pair of article exchange parts arranged in a direction perpendicular to the longitudinal direction of the travel route. You may comprise with the moving rail provided between the frame bodies, and the intermediate transfer mounting apparatus comprised so that it may change into this moving rail. In the example of FIG. 10, the conveying means is constituted by the moving rail and the second path side intermediate transfer mounting apparatus, but the transfer means may be configured by the moving rail and the first path side intermediate transfer mounting apparatus. In any case, it is preferable to provide moving direction switching means for switching the moving direction of the intermediate transfer mounting apparatus from the direction along the travel direction of the ceiling transport vehicle to the direction along the transverse width direction of the travel path. Specific examples will be described below.

As shown in FIG. 10, when the intermediate | middle conveyance mounting apparatus 6 was comprised so that a run was possible by being suspended and supported by the upper rail 65 along the travel direction of the ceiling conveyance vehicle 2, the ceiling conveyance vehicle 2 Between the buffer frames 55 of the pair of stations 4 arranged along the direction perpendicular to the longitudinal direction of the first path L1 and the second path L2 of the cross-section at the same height as the upper rail 65 cross) A rail 67 is provided. As a part of the upper rail 65 of the 2nd intermediate transfer mounting apparatus 6f in each of these buffer frames 55, the movement direction switching rail 66 (moving direction switching means) which can be rotated about an up-and-down axis This is arrange | positioned at the both ends of the moving rail 67. FIG.

According to such a structure, the 2nd intermediate transfer mounting apparatus 6f which hold | maintained the article W is made to drive along the travel direction of the ceiling conveyance vehicle 2 to the location in which the moving direction changeover rail 66 was installed, and the moving direction changeover rail It stops in the suspension-supported state at 66, and, after that, the moving direction changeover rail 66 is made into the 1st path L1 and the 2nd from the direction along the 1st path L1 and the 2nd path L2 of the ceiling conveyance vehicle 2. By switching in the direction along the widthwise direction of the path L2, the second intermediate transfer mounting device 6f moves the cross rail 67 from one buffer frame 55 to the other buffer frame 55. Can move along.

After the second intermediate transfer mounting device 6f reaches the other buffer frame 55, the moving direction switching rail 66 of the other buffer frame 55 is moved to the ceiling carrier vehicle ( By switching from the direction along the widthwise direction of the 1st path L1 and the 2nd path L2 of 2) to the direction along the 1st path L1 and the 2nd path L2, the 2nd intermediate transfer mounting apparatus 6f is a buffer of the other side. It moves along the upper rail 65 in the frame 55 for the goods exchange position in the other station 4 or in the intermediate shelf 5 in the frame for the buffer relative to the station 4. The article W can be transported with respect. In this way, the same second intermediate transfer mounting apparatus 6f can be used in the buffer frame 55 for the one station 4 and the buffer frame 55 for the other station 4. have.

1: running rail
2: ceiling carrier
3: gripper
4: goods exchange
5: middle shelf
5n: 1st path side intermediate | middle shelf
5f: 2nd path side intermediate | middle shelf
6: intermediate transfer equipment
6n: first path-side intermediate transfer equipment
6f: intermediate path-mounted device on the second path side
7: Holding part for conveying equipment
56: conveying conveyor (conveying means)
W: Goods
L1: first path
L2: second path
LP1, LP2, LP3: Transit Routes
Q1a, Q2a, Q3a: Stop position for the exchange part

Claims (5)

It is possible to move along the travel path while being guided and supported by the travel rail provided on the ceiling side, and to be able to lift up and down to support the goods, so that the goods are exchanged between the goods exchange part installed on the floor side. A ceiling carrier that can be transported,
An article carrying facility provided with an intermediate shelf which is placed above the article exchange section and below the ceiling transfer vehicle and temporarily mounts an article carried on the article exchange section,
As the traveling path, a straight first path via a stop position for the exchange part set directly above the article exchange part, and a straight first path parallel to the first path and set at a different position in the horizontal width direction of the first path; 2 paths are installed,
The intermediate shelf, which is located directly below the first path, is located on the first path side intermediate shelf positioned at a position different from the article exchange part in the traveling direction of the ceiling transport vehicle, and located directly below the second path. The second path side intermediate shelf is installed,
It is provided with a holding unit for the transfer mounting device for supporting the article in the vertical direction and slidably in the horizontal width direction of the first path and the second path, between the first path side intermediate shelf, An intermediate transfer mounting apparatus capable of transfer-mounting the article between the second path-side intermediate shelf and the article exchange unit,
The intermediate transfer mounting apparatus, wherein the first path and the first path-side intermediate shelf are overlapped with the first path and the first path-side intermediate shelf when viewed in a traveling direction of the ceiling transport vehicle. The first path-side intermediate transport mounting apparatus provided in the height between the first and the second path-side intermediate transportation equipments so as to be reciprocated along the traveling direction of the ceiling transport vehicle, or the second path and the second path-side intermediate view Among the second path-side intermediate transfer equipment installed in the state between the second path and the second path-side intermediate shelf in the state of overlapping the shelf, the second path-side intermediate transport mounting apparatus is capable of reciprocating along the traveling direction of the ceiling transport vehicle. The article carrying facility which at least one side is provided. The method of claim 1,
Both the first path side intermediate transfer mounting apparatus and the second path side intermediate transfer mounting apparatus are installed,
The said 1st path side intermediate | middle transfer mounting apparatus is a part of the holding | maintenance part for the transfer mounting apparatus between a 1st path side position immediately under the said 1st path | route, and a 2nd path side position directly under the said 2nd path | route. It is provided so that it can be withdrawn from the movement, and it is comprised so that it can move along the travel direction of the said ceiling conveyance vehicle in the state which located the said holding | maintenance part for transporting apparatus at the said 1st path side position,
The said 2nd path side intermediate | middle transfer mounting apparatus is equipped with the holding | gripping part for the transfer mounting apparatus so that a retreat is possible between the said 2nd path side position and the said 1st path side position, and the holding part for the transfer mounting apparatus An article carrying facility configured to be movable along a travel direction of the ceiling transfer vehicle in a state of being positioned at the second path side position. The method according to claim 1 or 2,
As the goods exchange part, one goods exchange part and the other goods exchange part spaced apart in the horizontal width direction of the said 1st path | route and the said 2nd path | route are provided,
The first path and the second path provided in correspondence with the one article exchange unit, and the first path and the second path provided in correspondence with the other article exchange unit are the first path and the first path. 2 are placed parallel to each other at intervals in the width direction of the path,
Both ends of at least one of the first path and the second path provided in correspondence with the one article exchange part and at least one of the first path and the second path provided in correspondence with the other article exchange part; Each of is connected to a transit route,
The said ceiling conveyance vehicle is connected with the said transit route among the said 1st path | route and the said 2nd route provided corresponding to the said one goods | exchange exchange part, and the said 1st path | route provided corresponding to the said other goods exchange part, and said It is configured to be movable via the transfer route between the second route and the one connected to the transfer route,
The horizontal width direction of the said 1st path | route and the said 2nd path | route between the said intermediate | middle conveyance apparatus installed corresponding to the said one goods | exchange part exchanger, and the said intermediate | middle conveyance apparatus installed in correspondence with the other article | item exchange part. An article carrying facility, wherein a carrying means capable of carrying the article is provided. The method of claim 3,
The conveying means mounts the article at one conveyance placement position where the article is exchanged between the first route side intermediate conveyance device or the second route side intermediate conveyance device installed corresponding to the one article exchange unit. Goods to the other conveyance-mounted position where the article can be exchanged with the first route-side intermediate transfer device or the second route-side intermediate transfer device that is supportable and provided in correspondence with the other article exchange unit. The article carrying facility which is comprised by the conveyance conveyor which can carry and mount | wear. The method according to claim 1 or 2,
The said 1st path | route and the said 2nd path | route are formed in the same height, and the said 1st path side intermediate shelf and the said 2nd path side intermediate shelf are provided with the same height mutually.

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