CN102673964B - Article transport facility - Google Patents

Article transport facility Download PDF

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Publication number
CN102673964B
CN102673964B CN201210069966.1A CN201210069966A CN102673964B CN 102673964 B CN102673964 B CN 102673964B CN 201210069966 A CN201210069966 A CN 201210069966A CN 102673964 B CN102673964 B CN 102673964B
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CN
China
Prior art keywords
mentioned
path
article
shifting apparatus
junction
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Active
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CN201210069966.1A
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Chinese (zh)
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CN102673964A (en
Inventor
柴田优
小川大介
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Daifuku Co Ltd
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Daifuku Co Ltd
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Publication of CN102673964A publication Critical patent/CN102673964A/en
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B10/00—Power and free systems
    • B61B10/02—Power and free systems with suspended vehicles
    • B61B10/022—Vehicles; trolleys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Abstract

A kind of article transport facility, can promptly be transported into relative to article junction, transport article, prevents blocking up of overline bridge transfer cart on the 1st path as far as possible.Article transport facility is provided with: overline bridge transfer cart (2), along the 1st path of linearity with walk freely with the 2nd path of the linearity of the 1st path parallel, the 1st pathway side intermediate shelf (5n) immediately below 1st path, the 2nd pathway side intermediate shelf (5f) immediately below 2nd path, and at least one of the middle shifting apparatus (6n) of the 1st pathway side or the middle shifting apparatus (6f) of the 2nd pathway side is as middle shifting apparatus, shifting apparatus handle part (7) is made to be elevated in the vertical direction freely and to slide freely on width direction, between the 1st pathway side intermediate shelf (5n), and between the 2nd pathway side intermediate shelf (5f), and and article junction (4) between transfer article (W) freely.

Description

Article transport facility
Technical field
The present invention relates to a kind of article transport facility being provided with overline bridge transfer cart and intermediate shelf, above-mentioned overline bridge transfer cart is to be walked freely along walking path by the state of the walking track guide support being disposed in overline bridge side, and make the handle part lifting of holding articles freely, transfer article freely between the article junction being located at side, ground, above-mentioned intermediate shelf is configured in the top of above-mentioned article junction, the below of above-mentioned overline bridge transfer cart, the interim article placed relative to above-mentioned article junction transfer.
Background technology
In above-mentioned article transport facility, by overline bridge transfer cart the state that hold article is walked mobile by handle part along walking path, the article be transported into relative to article junction, the article that transport from article junction are transported between multiple article junction.Overline bridge transfer cart is generally provided with multiple, each overline bridge transfer cart stops at the controller that transports operation by management as transporting article junction that section start specifies, as transporting directly over the object article junction of specifying, by making handle part be elevated between article junction transfer article.
Transported relative to as the article junction of transporting object by overline bridge transfer cart at article, and article junction is when no longer can receive article, follow-up overline bridge transfer cart standbyly must become the state that can receive article to article junction, become the reason that overline bridge transfer cart blocks up.For this reason, in the past above article junction, the interim intermediate shelf of placing relative to the article of article junction transfer of the below of overline bridge transfer cart configuration, article are placed in intermediate shelf temporarily, thus prevent blocking up of overline bridge transfer cart.And, arrange intermediate shelf by the periphery in article junction, can promptly be transported into relative to article junction when being necessary and transport.
As the previous example of article transport facility being provided with intermediate shelf, there is the 1st path arranged via the linearity of the junction stop position be set in directly over article junction, and be set in the 2nd path of the linearity of positions different on its width direction from the 1st path parallel, intermediate shelf is only configured in the equipment (such as with reference to Fig. 2 of patent documentation 1) immediately below the 2nd path.
In the article transport facility of above-mentioned previous example, the overline bridge transfer cart walked in 1st path makes handle part slide freely on the width direction in the 1st path and the 2nd path, the overline bridge transfer cart walked in 1st path carries out article relative to the transfer of the article junction be positioned at immediately below the 1st path, with article relative to the transfer of intermediate shelf being configured in positions different on the width direction in the 1st path, the overline bridge transfer cart walked in the 2nd path only carries out the transfer relative to the intermediate shelf be positioned at immediately below the 2nd path.
[patent documentation 1] JP 2006-224944 publication
In the article transport facility of above-mentioned previous example, when the article be placed in intermediate shelf are transported into article junction temporarily, the overline bridge transfer cart not maintaining article is walked to along the 1st path the junction stop position be set in directly over this article junction, handle part is slided move and lifting moving, by the article in intermediate shelf to the transfer of article junction.And, article are being transported situation from article junction, make the overline bridge transfer cart not maintaining article walk to along the 1st path the junction stop position be set in directly over this article junction equally, make handle part lifting moving, article are transported from article junction.And then, when the article transported from article junction are placed in intermediate shelf temporarily, keep stopping at this junction stop position on the 1st path and handle part slip is moved and lifting moving, article are placed in intermediate shelf temporarily.
Like this, due to article being transported into and article transporting from article junction relative to article junction, and the interim placement of article in intermediate shelf and to be placed on article in intermediate shelf to being transported into of article junction be all that overline bridge transfer cart by walking on the 1st path carries out, so the working load of the overline bridge transfer cart of walking on the 1st path increases temporarily.Therefore operation is had to concentrate on the possibility overline bridge transfer cart of walking on the 1st path producing and blocks up.
And, owing to only there is intermediate shelf immediately below the 2nd path, so the number of articles that can place is few temporarily, even if in order to increase the number of articles that can place and increase intermediate shelf temporarily, also be that the position leaving article junction on direction of travel arranges intermediate shelf, the transport lengthening distance when the article of intermediate shelf are transported into article junction by the overline bridge transfer cart walked in the 1st path.Therefore, there are article can not promptly relative to the possibility that article junction is transported into.
Summary of the invention
The present invention proposes in view of above-mentioned truth, its object is to provide a kind of article transport facility, article promptly can be transported into relative to article junction, transport, and can prevent blocking up of the overline bridge transfer cart on the 1st path as far as possible.
In order to realize this object, article transport facility involved in the present invention possesses: overline bridge transfer cart, to be walked freely along walking path by the state of the walking track guide support being disposed in overline bridge side, and make the handle part lifting of holding articles freely, transfer article freely between the article junction being located at side, ground; And intermediate shelf, be configured in the below of the top of above-mentioned article junction, above-mentioned overline bridge transfer cart, the interim article placed relative to above-mentioned article junction transfer.As above-mentioned walking path, be provided with the 1st path of the linearity via the junction stop position be set in directly over above-mentioned article junction, and from above-mentioned path parallel, the 2nd path being set in the linearity of different positions on the width direction in above-mentioned 1st path, as above-mentioned intermediate shelf, be provided with immediately below above-mentioned 1st path, be located at the 1st pathway side intermediate shelf of positions different from above-mentioned article junction on the direction of travel of above-mentioned overline bridge transfer cart, and be positioned at the 2nd pathway side intermediate shelf immediately below above-mentioned 2nd path, be provided with middle shifting apparatus, this middle shifting apparatus makes the shifting apparatus handle part of holding articles be elevated in the vertical direction freely and slides freely on the width direction in above-mentioned 1st path and above-mentioned 2nd path, between above-mentioned 1st pathway side intermediate shelf and between above-mentioned 2nd pathway side intermediate shelf and and above-mentioned article junction between transfer article freely, as above-mentioned middle shifting apparatus, be provided with at least one in shifting apparatus in the middle of the middle shifting apparatus of the 1st pathway side or the 2nd pathway side, the state that when shifting apparatus is arranged to observe on the direction of travel of above-mentioned overline bridge transfer cart in the middle of 1st pathway side and above-mentioned 1st path and above-mentioned 1st pathway side intermediate shelf coincide with the upper and lower, direction of travel along above-mentioned overline bridge transfer cart on height between above-mentioned 1st path and above-mentioned 1st pathway side intermediate shelf moves freely, the state that when shifting apparatus is arranged to observe on the direction of travel of above-mentioned overline bridge transfer cart in the middle of above-mentioned 2nd pathway side and above-mentioned 2nd path and above-mentioned 2nd pathway side intermediate shelf coincide with the upper and lower, direction of travel along above-mentioned overline bridge transfer cart on height between above-mentioned 2nd path and above-mentioned 2nd pathway side intermediate shelf moves freely.
According to this structure, if the overline bridge transfer cart of walking on the 1st path is in by handle part the state that hold article, then by making to stop at junction stop position, handle part is declined, article can be transported into the article junction being located at side, ground.Equally, if be in not by handle part the state that hold article, then by stopping at junction stop position, handle part being declined, article can be transported from the article junction being located at side, ground.Like this, the overline bridge transfer cart walked in the 1st path can by being transported into of the article between the article junction of junction stop position, transport, with along leading to the walking motion conveying articles of walking path of junction stop position.
And, due to as interim intermediate shelf of placing relative to the article of article junction transfer, be provided with the 1st pathway side intermediate shelf and the 2nd pathway side intermediate shelf, if so the overline bridge transfer cart of walking on the 1st path is in by handle part the state that hold article, then by stopping at the position different on direction of travel from junction stop position, handle part is declined, in the 1st pathway side intermediate shelf immediately below article can being held in place temporarily, if be in not by handle part the state that hold article, then by stopping at the position different on direction of travel from junction stop position, handle part is declined, the article in the 1st pathway side intermediate shelf immediately below being temporarily held in place can be received.Equally, in the 2nd pathway side intermediate shelf immediately below article can be held in place by the overline bridge transfer cart walked in the 2nd path temporarily, or receive the article be temporarily placed in the 2nd pathway side intermediate shelf.
And, due to as making shifting apparatus handle part be elevated in the vertical direction freely, the width direction in the 1st path and the 2nd path slides freely, between the 1st pathway side intermediate shelf, and between the 2nd pathway side intermediate shelf, and and article junction between the middle shifting apparatus of transfer article freely, be provided with at least one in the middle shifting apparatus of the 1st pathway side or the 2nd middle shifting apparatus, so the article be placed in the 1st pathway side intermediate shelf can either be transported into relative to article junction by shifting apparatus in the middle of shifting apparatus in the middle of the 1st pathway side or the 2nd pathway side by the overline bridge transfer cart of walking on the 1st path temporarily, also can move to the 2nd pathway side intermediate shelf.Equally, the article be temporarily placed in the 2nd pathway side intermediate shelf can either be transported into relative to article junction by shifting apparatus in the middle of shifting apparatus in the middle of the 1st pathway side or the 2nd pathway side by the overline bridge transfer cart walked in the 2nd path, also can move to the 2nd pathway side intermediate shelf.So, such as, overline bridge transfer cart need not carry out being transported into from intermediate shelf to article junction and transporting from article junction to intermediate shelf and namely can carry out article and transport (the article junction such as to other is transported) to transporting object from the transport (such as transporting from other article junction) or article of transporting section start.Certainly, the overline bridge transfer cart of walking in the 1st path also can directly carry out article relative to being transported into of article junction, transport.
Like this, because the whole or part that be transported into, transport of article relative to article junction can be undertaken by shifting apparatus in the middle of shifting apparatus in the middle of the 1st pathway side or the 2nd pathway side, as long as so the overline bridge transfer cart of walking on the 1st path carries out article being transported into and article transporting from article junction relative to article junction, and article to the interim placement in intermediate shelf and be placed on temporarily the part be transported into from the article in intermediate shelf to article junction can and without the need to all carrying out.Therefore, it is possible to make the working load of the overline bridge transfer cart of walking on the 1st path alleviate.
Therefore, with only intermediate shelf was set immediately below the 2nd path like that in the past, the structure that the overline bridge transfer cart walked in 1st path makes handle part slide freely on the width direction in the 1st path and the 2nd path is different, and working load on the overline bridge transfer cart of walking on the 1st path can be avoided excessive.So, can prevent overline bridge transfer cart to concentrate on the 1st path walking and blocking up of producing as far as possible.
And, by as intermediate shelf, the 1st pathway side intermediate shelf be positioned at immediately below the 1st path and the 2nd pathway side intermediate shelf be positioned at immediately below the 2nd path are set, when being provided with multiple intermediate shelf, intermediate shelf can be disposed in the position close on walking path direction apart from article junction, so the article be placed in intermediate shelf promptly can either be transported into relative to article junction by shifting apparatus in the middle of shifting apparatus in the middle of the overline bridge transfer cart of walking on the 1st path and the 1st pathway side or the 2nd pathway side temporarily, also can the article of article junction promptly be transported by shifting apparatus in the middle of shifting apparatus in the middle of the overline bridge transfer cart of walking on the 1st path and the 1st pathway side or the 2nd pathway side and be placed in intermediate shelf temporarily.
In addition, due to as intermediate shelf, the overline bridge transfer cart of walking on the 1st path and the overline bridge transfer cart of walking on the 2nd path be provided with the 1st pathway side intermediate shelf be positioned at immediately below the 1st path and the 2nd pathway side intermediate shelf be positioned at immediately below the 2nd path, so can utilize the intermediate shelf immediately below being positioned at respectively.Therefore, because the overline bridge transfer cart of walking on the 1st path and the overline bridge transfer cart of walking on the 2nd path are without the need to making handle part be equivalent to the mechanism arranging the distance at interval in the 1st path and the 2nd path at path width side's upward sliding, so can form overline bridge transfer cart simply in order to article are arranged relative to the transfer of intermediate shelf.
Above, obtain and article promptly can be transported into relative to article junction, transport, and the article transport facility of the generation that can as far as possible prevent the overline bridge transfer cart on the 1st path from blocking up.
In the embodiment of article transport facility involved in the present invention, preferably, shifting apparatus and the middle shifting apparatus both sides of above-mentioned 2nd pathway side in the middle of above-mentioned 1st pathway side are provided with; Free to advance or retreat between the 2nd pathway side position immediately below the 1st pathway side position that above-mentioned 1st shifting apparatus in the middle of pathway side is configured to make above-mentioned shifting apparatus handle part immediately below above-mentioned 1st path and above-mentioned 2nd path, the direction of travel along above-mentioned overline bridge transfer cart under the state making above-mentioned shifting apparatus handle part be positioned at above-mentioned 1st pathway side position moves freely; In the middle of above-mentioned 2nd pathway side, shifting apparatus is configured to make above-mentioned shifting apparatus handle part free to advance or retreat between above-mentioned 2nd pathway side position and above-mentioned 1 pathway side position, and the direction of travel along above-mentioned overline bridge transfer cart under the state making above-mentioned shifting apparatus handle part be positioned at above-mentioned 2nd pathway side position moves freely.
According to this structure, when carry out article relative to being transported into of article junction, transport, in the middle of 1st pathway side, the direction of travel of shifting apparatus along overline bridge transfer cart under the state making shifting apparatus handle part be positioned at the 1st pathway side position moves, and in the middle of the 2nd pathway side, the direction of travel of shifting apparatus along overline bridge transfer cart under the state making shifting apparatus handle part be positioned at the 2nd pathway side position moves.Therefore, move along direction of travel interferingly because shifting apparatus in the middle of the 1st shifting apparatus in the middle of pathway side and the 2nd pathway side can not produce mutually, thus can carry out swimmingly article relative to being transported into of article junction, transport.
And, article junction can be transported into by some in the middle shifting apparatus of shifting apparatus both sides in the middle of shifting apparatus in the middle of the 1st pathway side and the 2nd pathway side owing to being placed on article in intermediate shelf by overline bridge transfer cart temporarily, and, can by the middle shifting apparatus of these both sides some article be transported from article junction and be placed on intermediate shelf temporarily, so can in time carry out article being transported into relative to article junction by the middle shifting apparatus of shifting apparatus both sides in the middle of shifting apparatus in the middle of the 1st pathway side and the 2nd pathway side, transport.
In the embodiment of article transport facility involved in the present invention, preferably, as above-mentioned article junction, be provided with the article junction of side and the article junction of opposite side that are separated on the width direction in above-mentioned 1st path and above-mentioned 2nd path; Above-mentioned 1st path and above-mentioned 2nd path that arrange accordingly with the article junction of above-mentioned side is configured with states parallel spaced apart on the width direction in above-mentioned 1st path and above-mentioned 2nd path, and above-mentioned 1st path arranged accordingly with the article junction of above-mentioned opposite side and above-mentioned 2nd path; At least one in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned side and above-mentioned 2nd path, and the both ends of at least one in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned opposite side and above-mentioned 2nd path are connected with transfer path respectively; The path that above-mentioned overline bridge transfer cart is connected with above-mentioned transfer path in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned side and above-mentioned 2nd path via above-mentioned transfer path, and between the path be connected with above-mentioned transfer path in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned opposite side and above-mentioned 2nd path mobile freely; Be provided with transfer mechanism, at the above-mentioned middle shifting apparatus arranged accordingly with the article junction of above-mentioned side, and between the above-mentioned middle shifting apparatus to arrange accordingly with the article junction of above-mentioned opposite side, conveying articles freely on the width direction in above-mentioned 2nd path and above-mentioned 2nd path.
According to this structure, the path that overline bridge transfer cart is connected with transfer path in the 1st path arranged accordingly with the article junction of side and the 2nd path, and the path be connected with transfer path in the 1st path to arrange accordingly with the article junction of opposite side and the 2nd path, and walk in transfer path, the path that can be connected with transfer path in the 1st path arranged accordingly with the article junction of side and the 2nd path, and move between the path be connected with transfer path in the 1st path to arrange accordingly with the article junction of opposite side and the 2nd path.Therefore, overline bridge transfer cart article that the article junction from side can be transported or to be transported from the article junction of this side by middle shifting apparatus and the article be temporarily placed on the intermediate shelf article junction be temporarily placed on to opposite side is transported into or in intermediate shelf for the article junction of this opposite side.
And, according to said structure, owing to being provided with transfer mechanism, middle shifting apparatus is being set accordingly with the article junction of side, and between the middle shifting apparatus to arrange accordingly with the article junction of opposite side, conveying articles freely on the width direction in the 1st path and the 2nd path, so article are transported from the middle shifting apparatus that the middle shifting apparatus that the article junction of side is arranged accordingly is arranged accordingly to the article junction with opposite side by transfer mechanism, can by the middle shifting apparatus that arranges accordingly with the article junction of opposite side by the article transported from the article junction of side by overline bridge transfer cart or middle shifting apparatus or transport from the article junction of this side and be placed on the article intermediate shelf and be transported into the article junction of opposite side or be placed in the intermediate shelf of article junction of this opposite side temporarily temporarily.Therefore, even if not all right the going to of overline bridge transfer cart is connected with the 1st path in transfer path or the end in the 2nd path, with the roundabout mode conveying articles of walking on transfer path, also can by article from the intermediate shelf arranged accordingly with the article junction of side to the article junction of opposite side and the intermediate shelf that arranges corresponding thereto.
Like this, the load of overline bridge transfer cart can be reduced further, and the article that the article junction from side can be transported promptly are transported into the article junction of opposite side.
In the embodiment of article transport facility involved in the present invention, preferably, above-mentioned transfer mechanism is formed by transporting conveyer, the transfer position joining the side of article in the middle of the above-mentioned 1st shifting apparatus in the middle of pathway side arranged accordingly in the article junction of above-mentioned side or above-mentioned 2nd pathway side between shifting apparatus loads holding articles freely, and article are loaded freely the opposite side transfer position joining article between the middle shifting apparatus of above-mentioned 1st pathway side or the middle shifting apparatus of above-mentioned 2nd pathway side being transported to and arranging accordingly in the article junction of above-mentioned opposite side.
According to this structure, in the middle of arrange accordingly with the article junction of side the 1st shifting apparatus in the middle of pathway side or the 2nd pathway side, shifting apparatus is by making shifting apparatus handle part be elevated in the vertical direction stopping under the state directly over transfer position, side, delivers article from top relative to transport conveyer.Become, by the transport conveyer of the state of the transfer position mounting holding articles of side, article mounting is transported to opposite side transfer position.And, in the middle of arrange accordingly with the article junction of opposite side the 1st shifting apparatus in the middle of pathway side or the 2nd pathway side, shifting apparatus makes transfer mounting handle part be elevated in the vertical direction stopping under the state directly over opposite side shifting apparatus, receives the article transporting and support placed by conveyer in opposite side transfer position.
Like this, in the middle of arrange accordingly with the article junction of side the 1st shifting apparatus in the middle of pathway side or the 2nd pathway side, shifting apparatus is by moving or making shifting apparatus handle part be elevated this existing structure in the vertical direction directly over transfer position, subtend side applying the function that namely too large change can realize, and can join article between transfer mechanism.When using when resetting as stop position directly over transfer position, side, the position detecting mechanism of hardware (such as position-detection sensor) or software (such as based on the position discriminating program of the location information on walking path) also can be set.In the middle of the 1st pathway side arranged accordingly with the article junction of opposite side, shifting apparatus or the middle shifting apparatus of the 2nd pathway side are too.
Like this, when being arranged on the conveyer of conveying articles freely between the middle shifting apparatus for the article junction of side and the middle shifting apparatus of the article junction for opposite side, the existing structure of middle shifting apparatus can be utilized to form conveyer.
And, in the embodiment of article transport facility involved in the present invention, preferably, above-mentioned 1st path is set as height identical each other with above-mentioned 2nd path, and above-mentioned 1st pathway side intermediate shelf and above-mentioned 2nd pathway side intermediate shelf are set as height identical each other.So, the structure that equipment is overall and transfer operation etc. are simple.
Accompanying drawing explanation
Fig. 1 is the overall birds-eye view of the article transport facility involved by embodiment;
Fig. 2 is the close-up top view of Fig. 1;
Fig. 3 is the Partial enlarged side view of Fig. 1;
Fig. 4 is the front view observing overline bridge transfer cart from direction of travel;
Fig. 5 is the partial enlargement front view of Fig. 4;
Fig. 6 is the birds-eye view representing the configuration status transporting conveyer;
Fig. 7 is the front view representing the configuration status transporting conveyer;
Fig. 8 is the birds-eye view of the stop position of shifting apparatus in the middle of illustrating;
Fig. 9 is controlling party block diagram;
Figure 10 is the birds-eye view of the conveyer represented involved by other embodiment.
Description of reference numerals:
1: walking track, 2: overline bridge transfer cart, 3: handle part, 4: article junction, 5: intermediate shelf, 5n: the 1 pathway side intermediate shelf, the 5f: the 2 pathway side intermediate shelf, 6: middle shifting apparatus, shifting apparatus in the middle of 6n: the 1 pathway side, shifting apparatus in the middle of the 6f: the 2 pathway side, 7: shifting apparatus handle part, 56: transport conveyer (conveyer), W: article, the L1: the 1 path, the L2: the 2 path, LP1, LP2, LP3: transfer path, Q1a, Q2a, Q3a: junction stop position.
Detailed description of the invention
Be described based on the embodiment of accompanying drawing to article transport facility involved in the present invention.
(integral structure)
Fig. 1 is the overall birds-eye view of the article transport facility involved by present embodiment, and Fig. 2 is the amplification plan view of paper upper left in Fig. 1.At this, upper left when paper upper left is the Reference numeral being configured to by figure see with correct direction in each key element that interpolation is shown in the figure.Equally, in the following description, when use paper left and right, upper and lower etc. represent mean paper configure equally when paper in direction.The above-below direction of paper means direction vertical with paper left and right directions on the direction in paper.This article transport facility is located in semiconductor fabrication factory, and the substrate accommodation containers such as the FOUP of collecting more semiconductor wafers are set as to be walked freely to a direction along walking path by the state of walking track 1 guide support being disposed in overline bridge side as multiple overline bridge transfer carts 2 that article W transports.
Walking track 1 is arranged to the only height of setting height above ground level and overlooks as shown in Figure 1.So, three the cyclic path LP1 ~ LP3 arranged on paper left and right directions are provided with in overline bridge side.These cyclic paths LP1 ~ LP3 integrally extends in the longitudinal direction, there are two straight line portioies extending along this length direction and in end by connected to each other for these straight line portioies two curved portion.Between the 1st cyclic path LP1 and the 2nd cyclic path LP2, be set with the state that upwards arranges of below on paper a pair path that the 1st path L1 of multiple linearity vertically extended by the length direction with cyclic path and the 2nd path L2 formed.Equally, between the 2nd cyclic path LP2 and the 3rd cyclic path LP3, be also provided with multipair (being made up of the 1st path L1 and the 2nd path L2) path.Walking track 1 as shown in Figure 4, possesses pair of tracks parts 1a, 1b of configuring at spaced intervals on the orthogonal in the horizontal direction width direction of the direction of travel relative to overline bridge transfer cart 2.Pair of tracks parts 1a, 1b suspend support in midair by the multipair track support members 9 be located on overline bridge.
The side end being configured in the 1st path L1 between cyclic path LP1 and LP2 and the 2nd path L2 is connected with cyclic path LP1 by connecting bridge K, and end side is connected with cyclic path LP2 by connecting bridge K.Equally, the side end being configured in the 1st path L1 between cyclic path LP2 and LP3 and the 2nd path L2 is connected with cyclic path LP2 by connecting bridge K, and end side is connected with cyclic path LP3 by connecting bridge K.So, overline bridge transfer cart 2 can be walked mobile from the 1st path L1, the 2nd path L2 to cyclic path LP1 ~ LP3, and can from cyclic path LP1 ~ LP3 to the 1st path L1, the 2nd path L2 walks mobile.As shown in Figure 1, the 2nd cyclic path LP2 is made up of dual loop shape path interconnective at multiple position (i.e. a cyclic path be integrally provided in another cyclic path).Because multiple overline bridge transfer cart 2 is only to the walking of direction, so the direction of travel of overline bridge transfer cart 2 on the 1st path L1 be arranged above and below in the paper of Fig. 1 and Fig. 2 and the 2nd path L2 is reverse each other mutually.
Directly over the station 4 of the article junction equipped as the multiple processing equipment 3 at the upper spread configuration of the paper left and right directions (namely vertical with the length direction of cyclic path direction) of Fig. 1 and Fig. 2, the orientation (the paper left and right directions of Fig. 1 and Fig. 2) along these stations 4 is equipped with the 1st path L1.In the width direction (length direction of the paper above-below direction of Fig. 1 and Fig. 2, i.e. cyclic path) of the 1st path L1, upper different position, is set with the 2nd path L2 abreast with the 1st path L1.
(processing equipment)
Between the 1st cyclic path LP1 and the 2nd cyclic path LP2, and the 2nd between cyclic path LP2 and the 3rd cyclic path LP3, multiple processing equipment 8 is configured with on the ground with the state that direction is in column up and down of the paper along Fig. 1 and Fig. 2, this processing equipment 8 takes out the semiconductor wafer be housed in substrate accommodation container, carries out the process of processing relative to semiconductor wafer or inspection.Be provided with station 4 in the end of processing equipment 8, processing equipment 8 joins article W via this station 4 between overline bridge transfer cart 2 or middle shifting apparatus 6 described later.
Processing equipment 8 arranges in couples with the posture of station 4 subtend on the paper above-below direction of Fig. 1 and Fig. 2.Such as, relative to the processing equipment 8 of the paper upper left of Fig. 2 station 4 arranged and the station 4 arranged relative to the processing equipment 8 of paper lower-left below upwards subtend on paper.Like this, as station 4, be provided with the station 4 of the side left in the orientation of the 1st path L1 and the 2nd path L2 and the station 4 of opposite side.The 1st path L1 arranged accordingly with the station 4 of side and the 2nd path L2, with the 1st path L1 to arrange accordingly with the station 4 of opposite side and the 2nd path L2 configures with states parallel spaced apart on the width direction of the 1st path L1 and the 2nd path L2, all 1st path L1 and the 2nd path L2 are all that its both ends are connected with cyclic path LP1 ~ LP3.Therefore, by the overline bridge transfer cart 2 of walking on the 1st path L1 be configured between cyclic path LP1 and cyclic path LP2 and the 2nd path L2, cyclic path LP1 and cyclic path LP2 as other the 1st path L1, the 2nd path L2 movement riding path of changing play function.Equally, by the overline bridge transfer cart 2 of walking on the 1st path L1 be configured between cyclic path LP2 and cyclic path LP3 or the 2nd path L2, cyclic path LP2 and cyclic path LP3 as other the 1st path L1, the 2nd path L2 movement riding path of changing play function.
As shown in Figure 2 to 4, station 4 is set as and loads holding articles W in the end of processing equipment 8 freely with the height lower than the height of processing equipment 8.The article W handing to station 4 by overline bridge transfer cart 2, middle shifting apparatus 6 is taken into the inside of processing equipment 8, and the article W after process terminates sends to station 4 again, is received by overline bridge transfer cart 2, middle shifting apparatus 6.
In the present embodiment, the length setting of the direction of travel of station 4 becomes and three article W can be supported with the state mounting of arrangement adjacent on the direction of travel of overline bridge transfer cart 2.Namely, station 4 is set with three article delivery positions, on walking path 1, as overline bridge transfer cart 2 relative to the junction stop position Q1 stopped during these article delivery positions handing-over (i.e. transfer) article W, with three the article delivery positions of the upstream of the direction of travel of overline bridge transfer cart 2 on the 1st path L1 successively on station 4 separately directly over be set with the 1st junction stop position Q1a, 2nd junction stop position Q1b, and the 2nd junction these three stop positions of stop position Q1c.
(intermediate shelf)
As shown in Figure 1 to 4, immediately below the 1st path L1 and the 2nd path L2, be positioned at the top of station 4 in the vertical direction, the below of overline bridge transfer cart 2 be configured with interim place the article W that delivers to station 4 or receive from station 4 article W(and temporary transient placing articles W) intermediate shelf 5.In the present embodiment, as processing equipment 8, be configured with the 1st processing equipment 8a and the 2nd processing equipment 8b with adjoining each other with the state arranged along the direction of travel of the overline bridge transfer cart 2 on the 1st path L1 or the 2nd path L2, multiple intermediate shelf 5 arranges the upper side region of the processing equipment 8 of opposite side from the upper side region of the processing equipment 8 of the side of these processing equipment 8.As intermediate shelf 5, be provided with the 1st pathway side intermediate shelf 5n being positioned at positions immediately below the 1st path L1, different from station 4 on the direction of travel of overline bridge transfer cart 2, and be positioned at the 2nd pathway side intermediate shelf 5f immediately below the 2nd path L2.
As shown in Figure 3 and 4, intermediate shelf 5 is to arrange from the bottom state that side is outstanding downwards of the buffering framework 55 of suspending support from overline bridge in midair.As shown in Figure 6, the direction of travel that buffering framework 55 possesses the overline bridge transfer cart 2 of walking on the 1st walking path L1 is positioned at the upstream side part 55a of side, upstream, with the downstream part 55b being positioned at side, downstream, it is each freely shown in Fig. 4, Fig. 5 and Fig. 6, possesses the 1st pathway side framework 55n and the 2nd pathway side framework 55f with the state arranged on the width direction of walking path.Because upstream side part 55a and downstream part 55b are same structures, 55a is divided to be described for representative with upstream portion thus below.
The 1st pathway side framework 55n on upstream side part 55a and the 2nd pathway side framework 55f is configured with the horizontal pane parts 25 of frame-shaped in the vertical direction at spaced intervals, is connected and composed by longitudinal connecting member 26 in the width direction of overline bridge transfer cart 2 and multiple positions of direction of travel.Horizontal pane parts 25 by the multiple longitudinal horizontal member 25Y by the length direction along the 1st path L1 and the 2nd path L2, and are formed along the interconnective framework of transverse horizontal parts 25T of the Width of the 1st path L1 and the 2nd path L2.In addition, longitudinal horizontal member 25Y and longitudinal connecting member 26 are connected to downstream part 55b from upstream side part 55a.
1st pathway side framework 55n and the 2nd pathway side framework 55f is supported from overline bridge suspention by many shelf Suspensions 24.Shelf Suspension 24 only grows the amount of the upper-lower height being equivalent to overline bridge transfer cart 2 than the track support members 9 of suspention support walking track 1.So, when 1st path L1 of overline bridge transfer cart 2, the 2nd path L2 observe on direction of travel between multiple shelf Suspension 24, the 1st pathway side framework 55n of upstream side part 55a is positioned at immediately below the 1st path L1 of overline bridge transfer cart 2, and the 2nd pathway side framework 55f of upstream side part 55a is positioned at immediately below the 2nd path L2 of overline bridge transfer cart 2.
As shown in Figure 6, on the 1st pathway side framework 55n of upstream side part 55a, the side, upstream on the direction of travel of the overline bridge transfer cart 2 of walking on the 1st path L1 and the end of side, downstream are equipped with the intermediate shelf parts 27 of formation the 1st pathway side intermediate shelf 5n.And four positions on the 2nd pathway side framework 55f of upstream side part 55a except the end of the side, downstream on the direction of travel of the overline bridge transfer cart 2 of walking on the 2nd path L2 are provided with the intermediate shelf parts 27 of formation the 2nd pathway side intermediate shelf 5f.
As shown in figs.5 and 6, intermediate shelf parts 27 possess the horizontal mounting surface part 27a being equipped with three locating dowel pins 28, from the end connecting panel part 27b upward of the side of this mounting surface part 27a, and from the end connecting panel part 27c upward of the opposite side of this mounting surface part 27a, above-mentioned locating dowel pin 28 is fastened in three engagement grooves of the location on the bottom surface being formed in article W and positions article W.The upper end of the connecting panel part 27b of side is connected with longitudinal horizontal member 25Y, the upper end of the connecting panel part 27c of opposite side is connected relative to other the longitudinal horizontal member 25Y adjoined with the longitudinal horizontal member 25Y of side on width direction with by linking bracket 29, thus intermediate shelf parts 27 to be only positioned at from the lower end of buffering framework 55 state of the amount of the height of article W downwards with mounting surface part 27a is fixed on buffering framework 55.According to this structure, article W is supported by mounting surface part 27a mounting with the front of article W (face at the opening place before substrate accommodation container) posture (towards the posture of front right direction in Fig. 5) towards the connecting panel part 27b of side.
As shown in Figure 2 and 6, by two the 1st pathway side intermediate shelf 5n being positioned at the 1st L1 side, path on the upstream side part 55a of buffering framework 55 and be positioned at four the 2nd pathway side intermediate shelf 5f of the 2nd L2 side, path and the station 4 of the 1st processing equipment 8a, constitute the 1st transfer groups of objects G1 as the transfer groups of objects of a group arranged accordingly with the 1st processing equipment 8a.Equally, by two the 1st pathway side intermediate shelf 5n being positioned at the 1st L1 side, path on the downstream part 55b of buffering framework 55 and be positioned at four the 2nd pathway side intermediate shelf 5f of the 2nd L2 side, path and the station 4 of the 2nd processing equipment 8b, constitute the 2nd transfer groups of objects G2 as the transfer groups of objects of a group arranged accordingly with the 2nd processing equipment 8b.Like this, the transfer groups of objects of a group is respectively equipped with relative to the 1st processing equipment 8a and the 2nd processing equipment 8b.
Further, for the transfer object beyond station 4 in the 1st transfer groups of objects G1, the stop position that the stop position being set with overline bridge transfer cart 2 stopping of walking on the 1st path L1 and the overline bridge transfer cart 2 of walking on the 2nd path L2 stop.Namely, as the stop position relative to the 1st transfer groups of objects G1, except the junction stop position Q1a ~ Q1c at three places corresponding except three article delivery positions with station 4, with the 1st junction of the most upstream on the direction along the 1st path L1 with stop position Q1a side, upstream adjoining position and at the junction stop position Q1c with the most downstream on the direction along the 1st path L1 at side, downstream adjoining position, be set with the 1st pathway side intermediate shelf stop position Qn2 of the overline bridge transfer cart 2 transfer article W between the 1st pathway side intermediate shelf 5n for walking on the 1st path L1.And, corresponding with four the 2nd pathway side intermediate shelf 5f the 2nd pathway side intermediate shelf stop position Q2f being set with transfer article W between overline bridge transfer cart 2 for walking on the 2nd path L2 and the 2nd pathway side intermediate shelf 5f everywhere on the 2nd path L2.For the stop position relative to the 2nd transfer groups of objects G2 too.
(overline bridge transfer cart)
As shown in Fig. 3, Fig. 4 and Fig. 7, overline bridge transfer cart 2 comprises the running part 10 of the running wheel possessing walking on walking track 1, to be supported on running part 10 with suspention and holding articles W lifting moving and turn to mobile main part 11 freely, to be provided with the union body linking running part 10 and main part 11 with the state between pair of tracks parts 1a, 1b.In addition, running part 10 is provided with the walking motor 51(reference Fig. 9 driving running wheel to rotate).
As shown in Figure 4, main part 11 possesses the handle part 3 keeping article W, make the lifting steering unit 12 of lifting supporter 22 lifting moving of support handle part 3, steering operation mechanism outside figure handle part 3 being turned to around upper and lower axle center according to each lifting supporter 22, and the cover body 13 in a direction covering the top of the article W kept by handle part 3, fore-and-aft direction both sides and left and right directions.And, main part 11 is provided with the electricity reception coil 14 between pair of tracks parts 1a, 1b, magnetic field is produced by being passed into by alternating current along the walking supply line 15 that arranges of track 1, in electricity reception coil 14, produce the necessary electric power in overline bridge transfer cart 15 side by this magnetic field, power relative to overline bridge transfer cart 2 with contactless state.
Descending operation mechanism 12 possesses lifting motor 52(with reference to Fig. 9) and rotating drum, by the spinning movement of lifting motor 52, rotating drum batches and sends coiling band 16 to a direction and opposite sense rotary actuation thereof, thus operates lifting supporter 22 oscilaltion freely.
Steering operation mechanism possess turn to motor 53(with reference to Fig. 9), turn to the rotary actuation with motor 53 by this, operation lifting supporter 22 turns to around upper and lower axle center.Lifting supporter 22 is provided with switching mechanism, by holding motor 54(application drawing 9) action, the posture blocked operation of handle part 3 become to hold the holding posture of article W or remove the holding held and remove posture.
According to above this structure, overline bridge transfer cart 2 is by walking freely along the 1st path L1 and the 2nd path L2 and cyclic path LP1 ~ LP3 to walk mobile by the state of walking track 1 guide support to a direction.
Under the state that the overline bridge transfer cart 2 that 1st path L1 walks stops at the some positions in multiple junction stop position Q1a ~ Q1c, operate lifting supporter 22 by descending operation mechanism 12 to be elevated, turned to by steering operation mechanism operation lifting supporter 22, by switching mechanism, handle part 3 blocked operation is become to hold posture or holding releasing posture, thus immediately below station 4 article delivery position between transfer article W, equally, under the state stopping at some positions in multiple 1st pathway side intermediate shelf stop position, immediately below the 1st pathway side intermediate shelf 5n between transfer article W.
Under the state that the overline bridge transfer cart 2 that 2nd path L2 walks stops at the some positions in multiple 2nd pathway side intermediate shelf stop position, operate lifting supporter 22 by descending operation mechanism 12 to be elevated, turned to by steering operation mechanism operation lifting supporter 22, by switching mechanism by handle part 3 blocked operation become hold posture or hold remove posture, thus immediately below the 2nd pathway side intermediate shelf 5f between transfer article W.
In Fig. 3 and Fig. 4, the overline bridge transfer cart 2 that 1st path L1 walks to stop in three junction, the place stop position Q1a ~ Q1c of upstream side part 55a the junction stop position Q1a of side, most upstream on the direction of travel shown in arrow a in figure 3, and the overline bridge transfer cart 2 that the 1st path L2 walks to stop in the 2nd pathway side intermediate shelf stop position Q2f everywhere of downstream part 55b the intermediate shelf stop position Q2f of side, most upstream on the direction of travel shown in arrow b in figure 3.
(middle shifting apparatus)
As shown in Fig. 3 ~ Fig. 7, be provided with and will be provided with the buffering framework 55 of intermediate shelf 5 as the middle shifting apparatus 6 arranging object.As middle shifting apparatus 6, be provided with a 1st middle shifting apparatus 6n and a 2nd middle shifting apparatus 6f relative to a buffering framework 55.When 1st middle shifting apparatus 6n is set as to observe on the direction of travel of overline bridge transfer cart 2 and the 1st path L1 and the 1st pathway side intermediate shelf 5n be coincide with the upper and lower state (, the state when direction of travel of overline bridge transfer cart 2 is observed between the 1st path L1 and the 1st pathway side intermediate shelf 5n, is preferably positioned at the state immediately below the 1st path L1, directly over the 1st pathway side intermediate shelf 5n), reciprocate freely on the direction of the direction of travel along overline bridge transfer cart 2 with the height between the 1st path and the 1st pathway side intermediate shelf 5n.When 2nd middle shifting apparatus 6f is set as to observe on the direction of travel of overline bridge transfer cart 2 and the 2nd path L2 and the 2nd pathway side intermediate shelf 5f be coincide with the upper and lower state (, the state when direction of travel of overline bridge transfer cart 2 is observed between the 2nd path L2 and the 2nd pathway side intermediate shelf 5f, is preferably positioned at the state immediately below the 2nd path L2, directly over the 2nd pathway side intermediate shelf 5f), reciprocate freely on the direction of the direction of travel along overline bridge transfer cart 2 with the height between the 2nd path and the 2nd pathway side intermediate shelf 5f.
1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f is all set as and reciprocates freely in the gamut of buffering framework 55 with its moving direction.So, 1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f reciprocates respectively by the gamut of upstream side part 55a and downstream part 55b, relative to any one transfer article W all freely of the 1st transfer groups of objects G1 arranged accordingly with the 1st processing equipment 8a and the 2nd transfer groups of objects G2 that arranges accordingly with the 2nd processing equipment 8b.Below be described in detail.
1st middle shifting apparatus 6n is equipped with holding articles W as shown in Figure 5 and above-below direction moves shifting apparatus handle part 7 freely, and possess that this shifting apparatus handle part 7 of operation walks crosswise on shifting apparatus width direction (in the width direction of the 1st path L1 and the 2nd path L2, Fig. 5 paper left and right directions) walk crosswise operating mechanism 31.
1st middle shifting apparatus 6n is configured to make shifting apparatus handle part 7 as free to advance or retreat between the going-back position of the 1st pathway side position immediately below the 1st path L1 and the extrusion position as the 2nd pathway side position immediately below the 2nd path L2 by walking crosswise operating mechanism 31, and moves freely along the direction of travel of overline bridge transfer cart 2 under the state making shifting apparatus handle part 7 be positioned at going-back position.So, prevent and the interference of the overline bridge transfer cart 2 in move loading action and the interference with device shifting apparatus 6f.
Fig. 4 illustrates and on the direction of travel of overline bridge transfer cart 2, observes the 1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f makes shifting apparatus handle part 7 back to the state of going-back position, Fig. 5 to illustrate on the direction of travel of overline bridge transfer cart 2 observation the 1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f be stopping state, make shifting apparatus handle part 7 mutually be projected into the state of extrusion position.
As shown in Fig. 3 ~ Fig. 5, buffering framework 55 is provided with the middle shifting apparatus 6n of support the 1st and guides along the guide support body 17 of the movement of the direction of travel of overline bridge transfer cart 2, forming handle part 3 and article W when this guide support body 17 is configured to the overline bridge transfer cart 2 transfer article W of the state stopping at junction stop position Q1 and intermediate shelf stop position Q2 can the space passed through of above-below direction.
Specifically, guide support body 17 can be formed by state a pair bottom moving track 18,19 of configuration spaced apart on the shifting apparatus width direction of the 1st middle shifting apparatus 6n in gap of passing through of above-below direction by with the handle part 3 forming the overline bridge transfer cart 2 that remain article W.A pair lower guide track 18,19 is arranged on to link and is positioned at buffering framework 55 top on the lower surface of two track installation parts 20,21 of a pair transverse horizontal parts 25T at the both ends of direction of travel.
At the both ends of shifting apparatus Width of moving substrate 32 on top being located at the 1st middle shifting apparatus 6n, be provided with the slide block 34,35 be fastened on sliding freely on a pair lower guide track 18,19 with stationary state.When direction of travel is observed the side of transfer base material 32 end on be provided with by operation bracket 33.The horizontal component 33a formed by bottom warpage is possessed by operation bracket 33, as shown in Fig. 3 and Fig. 5, be connected to the upper surface of the upside winding part of the move operation synchronous belt 38 in the longitudinal direction winding face on the band tooth drive pulley 36a and follow-up pulley 36b being wound on and rotating around horizontal axis by operation bracket 33.
Further, by driving, the move operation motor 37 of move operation synchronous belt 38 coiling action being rotated to a direction and opposite sense, moving substrate 32 can be operated and come and go straight-line motion along a pair lower guide track 18,19.That is, by controlling the move operation spinning movement of motor 37, the movement of the 1st middle shifting apparatus 6n can be controlled.In addition, the positioning control of the movement of middle shifting apparatus 6 both can be used servomotor as move operation motor 37 and be undertaken by servocontrol, also can arrange multiple opto-electronic pickup as detecting the position detecting mechanism that be configured in along the stop position of the transfer on the mobile route of the direction of travel of the 1st middle shifting apparatus 6n accordingly with each stop position, the Detection Information based on these sensors positions control.
As shown in Figure 5, the upper surface of the moving substrate 32 of the 1st middle shifting apparatus 6n is provided with the ball-screw 40 that operation guide block 39 moves up freely in shifting apparatus width side.The basis that guide block 39 is attached at the sliding york (slidefork) 42 of the multiple stage that operation lifting supporter 41 is retreated at shifting apparatus Width is pitched on the retrogressing side end in the advance and retreat direction of (basefork).Sliding york 42 such as possesses basis fork, fork in the middle of movement of can laterally relative to this basis fork sliding, and the main fork (primaryfork) of movement of can laterally relative to this centre fork sliding.Sliding york 42 at different levels to be linked links by connecting belt 43 by the state that mutually engages of rectilinear movement guide, can make the lifting supporter 41 be connected with main fork via descending operation mechanism 45 and steering operation mechanism 46 retreat by the retreat operation of pitching relative to basis.And, by drive the leading screw 40a of ball-screw 40 is rotated walk crosswise behaviour's acting motors 44 to a direction and opposite sense rotation thereof, guide block 39 can be operated and reciprocate along shifting apparatus width direction (namely vertical with the length direction in the 1st path and the 2nd path direction).Like this, operating mechanism 31 is walked crosswise by what walk crosswise that behaviour acting motors 44, ball-screw 40 and sliding york 42 form that the shifting apparatus handle part 7 of shifting apparatus 6 in the middle of operation walks crosswise on shifting apparatus width direction.
Descending operation mechanism 45 is configured to, by driving lifting motor 47 to rotate to a direction and opposite sense thereof, rotating drum 48 be rotated, coiling band 49 is sent and batched, and can operate the oscilaltion of lifting supporter 41.Steering operation mechanism 46 drives to turn to and rotates with motor 50, and operation shifting apparatus handle part 7 turns to around upper and lower axle center.So, suitable posture can be adjusted to relative to the posture of overlooking of the article W of station 4, intermediate shelf 5.
According to this structure, 1st middle shifting apparatus 6n as shown in Figure 8, stop at the upstream side part 55a of buffering framework 55 and downstream part 55b respective on be set in two the 1st pathway side intermediate shelf 5n separately directly over two place's transfer stop position Pn1, Pn5 and on the moving direction of the 1st middle shifting apparatus 6n, be set in these transfers stop position between three place's transfer stop position Pn2 ~ Pn4 certain state under, make shifting apparatus handle part 7 transverse shifting and lifting, between the 1st pathway side intermediate shelf 5n, and between the 2nd pathway side intermediate shelf 5f, and and each article delivery position of station 4 between transfer article W freely.
2nd middle shifting apparatus 6f be except walk crosswise operating mechanism 31 operate shifting apparatus handle part 7 retreat direction be that except reverse direction this point, shifting apparatus 6n middle with the 1st is same structure.And, 2nd middle shifting apparatus 6f stop at the upstream side part 55a of buffering framework 55 and downstream part 55b respective on be set in four the 2nd pathway side intermediate shelf 5f separately directly over the stop position Pf2 ~ Pf5 and two of transfer everywhere the 1st pathway side intermediate shelf 5n in transfer stop position Pf1 corresponding with the 1st pathway side intermediate shelf 5n of the inner side of buffering framework 55 on the direction of travel of overline bridge transfer cart 2 certain state under, make shifting apparatus handle part 7 transverse shifting and lifting, between the 1st pathway side intermediate shelf 5n, and between the 2nd pathway side intermediate shelf 5f, and and each article delivery position of station 4 between transfer article W freely.
(transport conveyer)
On the direction of travel of overline bridge transfer cart 2 in the pars intermedia of buffering framework 55, Fig. 1 and Fig. 2 the upwards side of subtend configuration, below on paper four stations 4 shown in station 4(Fig. 2 in the station of upper left) and opposite side station 4(Fig. 2 in the station of lower-left) between be provided with and transport conveyer 56, this transport conveyer 56 the transfer groups of objects arranged accordingly with the station 4 of side and and the transfer groups of objects that arranges accordingly of the station 4 of opposite side between conveying articles W freely.Equally, be provided with and transport conveyer 56, this transport conveyer 56 the transfer groups of objects arranged accordingly with the station 4 of upper right in Fig. 2 and and the transfer groups of objects that arranges accordingly of the station 4 of bottom right between conveying articles W freely.As shown in Figure 7, this pair transport conveyer 56 with suspend in midair be respectively supported on buffering framework 55 upstream side part 55a and downstream part 55b on stateful connection.Due to the structure that both are identical, therefore following with the transport conveyer 56 be connected with the upstream side part 55a of buffering framework 55 for representative is described.
Transport conveyer 56 as shown in Fig. 6 and Fig. 7, possess the interconnective transport path part 57 of buffering framework 55 will arranged accordingly with the station 4 of side and opposite side, and the article mounting table 56 loading holding articles W is freely elevated and turns to freely and make above-mentioned transport path part 57 reciprocate conveyance vehicle 59 freely.The end of the side of transport path part 57 and being connected with the buffering framework 55 that the station 4 of side is arranged accordingly, the end of the opposite side of transport path part 57 and being connected with the buffering framework 55 that the station 4 of opposite side is arranged accordingly, transports conveyer 56 and suspends support in midair by two buffering frameworks 55.In addition, also can connect by the parts same with shelf Suspension 24 pars intermedia and overline bridge that transport conveyer 56 to strengthen.
Conveyance vehicle 59 as shown in Figure 9, possesses the walking motor 61 driving drive wheel to rotate, and drives the lifting motor 62 that article mounting tables 58 is elevated, and turning to motor 63 of driving article mounting table 58 to turn to.In article mounting table 58, same with the intermediate shelf parts 27 forming intermediate shelf 5, be provided with upward three locating dowel pins in three engagement grooves of the location be fastened on the bottom surface being formed at article W, article W positioned highlightedly.
Transport path part 57 is made up of housing, and surface element is formed with slit 60 alongst thereon.Conveyance vehicle 59 is configured in the inside of the housing of transport path part 57 in order to prevent dust from externally dispersing, the article mounting table 58 of conveyance vehicle 59 connects support by the pivot shaft outside the figure inserted in slit 60, above upper surface part relative to the lifting of conveyance vehicle main body freely.Further, conveyance vehicle 59 reciprocates freely along its length direction in the inside of transport path part 57 with the state by driving drive wheel to rotate to a direction and opposite sense thereof and guided by the guiding mechanism outside figure.
As shown in Figure 8, in the 1st middle shifting apparatus 6n arranged accordingly with the station 4 of side and the 2nd middle shifting apparatus 6f mobile route separately overline bridge transfer cart 2 direction of travel on transport conveyer 56 place position be provided with conveyer transfer position Pc, for the 1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f transfer article W between the end of station 4 side of the side of conveyer 56.Equally, in the 1st middle shifting apparatus 6n arranged accordingly with the station 4 of opposite side and the 2nd middle shifting apparatus 6f mobile route separately overline bridge transfer cart 2 direction of travel on transport conveyer 56 place position be provided with conveyer transfer position Pc, for the 1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f transport conveyer 56 opposite side station 4 side end between transfer article W.
Arrange accordingly with the station 4 of side the 1st middle shifting apparatus 6n, the 2nd middle shifting apparatus 6f under the state stopping at the conveyer transfer position Pc set in respective mobile route, be located at transport conveyer 56 side end, i.e. side transfer position unloading platform 64 between transfer article W.Equally, arrange accordingly with the station 4 of opposite side the 1st middle shifting apparatus 6n, the 2nd middle shifting apparatus 6f under the state stopping at the conveyer transfer position Pc set in respective mobile route, be located at transport conveyer 56 opposite side end, i.e. opposite side transfer position unloading platform 64 between transfer article W.
In the present embodiment, conveyer transfer position Pc is set in the position identical on the moving direction of the 1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f with transfer stop position Pn1, Pf1 of transfer stop position Pn5, Pf5 of upstream side part 55 and downstream part 55b.And, because conveyer transfer position Pc is positioned at immediately below the 2nd path L2, so the 1st middle shifting apparatus 6n makes shifting apparatus handle part 7 be projected into extrusion position, transfer article W between conveyance vehicle 59.2nd middle shifting apparatus 6f keeps making shifting apparatus handle part 7 at going-back position transfer article W between conveyance vehicle 59.
As shown in Fig. 4, Fig. 6 and Fig. 7, the transfer position, side of transporting conveyer 56 and opposite side transfer position both sides are provided with the unloading platform 64 loading holding articles W freely.Unloading platform 64 is provided with three locating dowel pins upward highlightedly that position article W.These locating dowel pins are configured to be fastened on the bottom surface of article W in the position that conveyance vehicle 59 is different from article mounting table 58, article mounting table 58 is made to increase from the below of the article W located in unloading platform 64, can support with the state of location in article mounting table 58, the position of article W and posture can be made with departing from not to carry out the loading transfer received from unloading platform 64 by article W on conveyance vehicle 59.Equally, can carry out on the contrary making the position of article W and posture not carry out the unloading transfer delivered on unloading platform 64 from conveyance vehicle 59 by article W with departing from.
Like this, conveyer is provided with in present embodiment, at the 1st middle shifting apparatus 6n arranged accordingly with the station 4 of side and the 2nd middle shifting apparatus 6f, and along the width direction conveying articles W of the 1st path L1 and the 2nd path L2 between the 1st middle shifting apparatus 6n to arrange accordingly with the station 4 of the opposing party and the 2nd middle shifting apparatus 6f, this conveyer is formed by transporting conveyer 56, the transfer position, side joining article W between the 1st middle shifting apparatus 6n arranged accordingly at the station 4 of side and the 2nd middle shifting apparatus 6f loads holding articles W freely, and article are loaded freely the opposite side transfer position joining article W between the 1st middle shifting apparatus 6n and the 2nd middle shifting apparatus 6f being transported to and arranging accordingly at the station 4 of opposite side.
And then, in the present embodiment, transport conveyer 56 and possess conveyance vehicle 59, support the transfer position, side of the unloading platform 64 of the article W joined by the 1st middle shifting apparatus 6n arranged accordingly with the station 4 of side and the 2nd middle shifting apparatus 6f being provided with mounting freely, and be provided with mounting freely and support the opposite side transfer position transfer article W freely of the unloading platform 64 of the article W joined by the 1st middle shifting apparatus 6n arranged accordingly with the station 4 of opposite side and the 2nd middle shifting apparatus 6f, and between transfer position, side and opposite side transfer position, load conveying articles W freely.
Fig. 9 is the controlling party block diagram of article transport facility.The overline bridge that overline bridge transfer cart 2 is equipped transports controller VCq, the middle shifting apparatus controller VCp that middle shifting apparatus 6 is equipped, and the conveyor controller VCr that transport conveyer 56 is equipped is connected with master controller HC by wireless telecommunications.The process stroke of master controller HC management article W, according to the transport requirement from each processing equipment, set for each article W transport section start and transport object place send transport instruction, with conveying articles W rightly.Further, based on the transport instruction that master controller HC sends, control overline bridge transfer cart 2, middle shifting apparatus 6 by above-mentioned each controller, and transport the action of conveyer 56.
Master controller HC such as, at the end of the process of article W by a certain processing equipment 6, sends for transporting the article W that this process terminates, the transport instruction of transporting to the processing equipment 8 of subsequent processing from station 4.By the overline bridge transfer cart 2 transported towards this station 4 or the station 4 adjacent with (belonging to the transfer groups of objects of buffering framework 55 identical belonging to the transfer groups of objects with this station 4) in other article W, these other article W is placed in the intermediate shelf 5 of this buffering framework 55 temporarily, even if thus there is not the overline bridge transfer cart 2 of readiness for action, also can promptly carry out this and transport operation.And, by carrying out the interim placement relative to intermediate shelf 5, as Whole Equipment, the waste that overline bridge transfer cart 2 is walked not keep the dummy status of article W can be avoided as far as possible.
In the present embodiment, intermediate shelf 5 is provided with immediately below the 1st path L1 and the 2nd path L2 both sides, because the overline bridge transfer cart 2 of walking on the 1st path L1 or the 2nd path L2 all only carries out relative to the transfer immediately below himself, so the unfavorable condition on the overline bridge transfer cart 2 load of transfer operation can being avoided to concentrate on walk on the 1st path.And, multiple intermediate shelf 5 that the buffering framework 55 in the gamut being located at station 4 adjacent with this station 4 on direction of travel is arranged can be used in due to the transfer operation of the article W relative to station 4 of processing equipment 8 flexibly, not produce so can try one's best the transfer operation that the article W that the few and overline bridge transfer cart 2 of quantity because of intermediate shelf 5 is transported into station 4 or the article W transported carry out above-mentioned article W temporarily with can not being placed on the state of affairs in intermediate shelf 5.And, by arranging middle shifting apparatus 6 immediately below the 1st path L1 and the 2nd path L2 both sides, alleviating further of the load of the transfer operation of overline bridge transfer cart 2 can be sought.And then, when by article W from for station 4 transfer groups of objects from transfer groups of objects to the station 4 for subtend transport, can replace in the past such by overline bridge transfer cart 2 with the approach transported via the approach of cyclic path LP1 ~ LP3, and can be utilized each other by the middle shifting apparatus of two stations 4 for subtend and transport conveyer 56 promptly transfer article W.
(other embodiment)
Above, specifically understand based on working of an invention mode the invention that contriver completes, but the present invention is not limited in above-mentioned embodiment, can carry out various change in the scope not departing from its aim.Below, other embodiment of the present invention is described.
(1) in the above-described embodiment, the both ends exemplified with the 2nd path L2 are connected with the cyclic path LP1 ~ LP3 as transfer path, but the both ends of the 2nd path L2 also can not be connected with a certain path.In this case, the overline bridge transfer cart 2 of the 2nd path L2 walking goes and back running on the 2nd path L2.
(2) in the above-described embodiment, buffering framework 55 is shared at adjacent multiple stations 4 exemplified with middle shifting apparatus 6, move freely with in the upstream side part 55a of framework 55 and the scope of downstream part 55b both sides in this buffering, but also can for for arrange special buffering framework 55 relative to single station 4, middle shifting apparatus 6 with its moving direction in the scope of the buffering framework 55 for single station 4 mobile freely.
(3) in the above-described embodiment, overline bridge transfer cart can be configured to handle part is slid freely on the Width of walking path.
(4) in the above-described embodiment, exemplified with the 1st middle shifting apparatus 6n, 2nd direction of travel that middle shifting apparatus 6f makes shifting apparatus handle part 7 along overline bridge transfer cart 2 under the state of going-back position moves freely, as long as but the 1st middle shifting apparatus 6n, 2nd middle shifting apparatus 6f does not produce with the middle shifting apparatus of the other side side and the overline bridge transfer cart 2 that carries out move loading action and interferes, then also can form the movement under the state of allowing and making shifting apparatus handle part 7 be projected into extrusion position, and carry out the moving back and forth of shifting apparatus handle part 7 while move.
(5) in the above-described embodiment, exemplified with arranging a 1st middle shifting apparatus 6n, the 2nd middle shifting apparatus 6f respectively relative to a buffering framework 55, but also the middle shifting apparatus 6n of multiple stage the 1st, the 2nd middle shifting apparatus 6f can be set relative to a buffering framework 55.
(6) in the above-described embodiment, become mobile conveyance vehicle conveying articles freely in transport path part exemplified with as transporting conveying mechanism, but also can replace this structure and become the band conveyor conveying articles by function of transportation body coiling action or round action like that as transport conveying mechanism.
(7) in the above-described embodiment, transfer mechanism is formed exemplified with by transport conveyer, but also can as illustrated in Figure 10, by a pair article junction arranged on the direction that the length direction of walking path is vertical buffering framework between arrange deliver track and deliver the middle shifting apparatus changed to freely on track form transfer mechanism at this.
In the example of Figure 10, transfer mechanism is made up of shifting apparatus in the middle of delivering track and the 2nd pathway side, but transfer mechanism also can be made up of shifting apparatus in the middle of delivering track and the 1st pathway side.In either case, the moving direction switching mechanism moving direction of middle shifting apparatus being switched to the width direction along walking path from the direction of travel along overline bridge transfer cart is all preferably set.Below, object lesson is described.
As shown in Figure 10, in the state walking being configured to be suspended in midair by the upper track 65 of the direction of travel along overline bridge transfer cart 2 support at middle shifting apparatus 6 structure freely, along relative to the 1st path L1 of overline bridge transfer cart 2 and the length direction of the 2nd path L2 vertical direction arrangement a pair station 4 buffering framework 55 between, be equipped with the height identical with upper track 65 and deliver track 67.As a part for the upper track 65 of respective the 2nd middle shifting apparatus 6f of this buffering track 55, the moving direction handoff path 66(moving direction switching mechanism rotatable around upper and lower axle center) be configured in the both ends delivering track 67.
According to this structure, to be walked to along the direction of travel of overline bridge transfer cart 2 by the 2nd middle shifting apparatus 6f that makes to remain article W and be provided with the position of moving direction handoff path 66, stop with the state that suspention is supported on moving direction handoff path 66, afterwards by moving direction handoff path 66 from the width direction switched to along the 1st path L1 of overline bridge transfer cart 2 and the direction of the 2nd path L2 along the 1st path L1 and the 2nd path L2, 2nd middle shifting apparatus 6f can from the buffering framework 55 of side along the buffering framework 55 delivering track 67 and move to opposite side.
After the 2nd middle shifting apparatus 6f arrives the buffering framework 55 of opposite side, by the moving direction handoff path 66 of the buffering track 55 by opposite side from the direction be switched to along the 1st path L1 of overline bridge transfer cart 2 and the width direction of the 2nd path L2 along the 1st path L1 and the 2nd path L2,2nd middle shifting apparatus 6f moves along the upper track 65 of the buffering framework 55 of opposite side, the intermediate shelf 5 transfer article W of the article delivery position relative to the station 4 of opposite side or the buffering framework for this station 4.Like this, the 2nd identical middle shifting apparatus 6f can be utilized in the buffering framework 55 of the station 4 for side and the buffering framework 55 for the station 4 of opposite side.

Claims (5)

1. an article transport facility, possess: overline bridge transfer cart, to be walked freely along walking path by the state of the walking track guide support being disposed in overline bridge side, and make the handle part lifting of holding articles freely, transfer article freely between the article junction being located at side, ground, and intermediate shelf, be configured in the below of the top of above-mentioned article junction, above-mentioned overline bridge transfer cart, the interim article placed relative to above-mentioned article junction transfer; It is characterized in that,
As above-mentioned walking path, be provided with the 1st path of the linearity via the junction stop position be set in directly over above-mentioned article junction, and from above-mentioned 1st path parallel, the 2nd path being set in the linearity of different positions on the width direction in above-mentioned 1st path;
As above-mentioned intermediate shelf, be provided with immediately below above-mentioned 1st path, be located at the 1st pathway side intermediate shelf of positions different from above-mentioned article junction on the direction of travel of above-mentioned overline bridge transfer cart, and be positioned at the 2nd pathway side intermediate shelf immediately below above-mentioned 2nd path;
Be provided with middle shifting apparatus, this middle shifting apparatus makes the shifting apparatus handle part of holding articles be elevated in the vertical direction freely and slides freely on the width direction in above-mentioned 1st path and above-mentioned 2nd path, between above-mentioned 1st pathway side intermediate shelf and between above-mentioned 2nd pathway side intermediate shelf and and above-mentioned article junction between transfer article freely;
As above-mentioned middle shifting apparatus, be provided with at least one of shifting apparatus or the middle shifting apparatus of the 2nd pathway side in the middle of the 1st pathway side, the state that when shifting apparatus is arranged to observe on the direction of travel of above-mentioned overline bridge transfer cart in the middle of 1st pathway side and above-mentioned 1st path and above-mentioned 1st pathway side intermediate shelf coincide with the upper and lower, direction of travel along above-mentioned overline bridge transfer cart on height between above-mentioned 1st path and above-mentioned 1st pathway side intermediate shelf moves freely, the state that when shifting apparatus is arranged to observe on the direction of travel of above-mentioned overline bridge transfer cart in the middle of above-mentioned 2nd pathway side and above-mentioned 2nd path and above-mentioned 2nd pathway side intermediate shelf coincide with the upper and lower, direction of travel along above-mentioned overline bridge transfer cart on height between above-mentioned 2nd path and above-mentioned 2nd pathway side intermediate shelf moves freely.
2. article transport facility as claimed in claim 1, is characterized in that,
Be provided with shifting apparatus and the middle shifting apparatus both sides of above-mentioned 2nd pathway side in the middle of above-mentioned 1st pathway side,
Free to advance or retreat between the 2nd pathway side position immediately below the 1st pathway side position that above-mentioned 1st shifting apparatus in the middle of pathway side is configured to make above-mentioned shifting apparatus handle part immediately below above-mentioned 1st path and above-mentioned 2nd path, the direction of travel along above-mentioned overline bridge transfer cart under the state making above-mentioned shifting apparatus handle part be positioned at above-mentioned 1st pathway side position moves freely;
In the middle of above-mentioned 2nd pathway side, shifting apparatus is configured to make above-mentioned shifting apparatus handle part free to advance or retreat between above-mentioned 2nd pathway side position and above-mentioned 1 pathway side position, and the direction of travel along above-mentioned overline bridge transfer cart under the state making above-mentioned shifting apparatus handle part be positioned at above-mentioned 2nd pathway side position moves freely.
3. article transport facility as claimed in claim 1 or 2, is characterized in that,
As above-mentioned article junction, be provided with the article junction of side and the article junction of opposite side that are separated on the width direction in above-mentioned 1st path and above-mentioned 2nd path;
Above-mentioned 1st path and above-mentioned 2nd path that arrange accordingly with the article junction of above-mentioned side is configured with states parallel spaced apart on the width direction in above-mentioned 1st path and above-mentioned 2nd path, and above-mentioned 1st path arranged accordingly with the article junction of above-mentioned opposite side and above-mentioned 2nd path;
At least one in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned side and above-mentioned 2nd path, and the both ends of at least one in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned opposite side and above-mentioned 2nd path are connected with transfer path respectively;
The path that above-mentioned overline bridge transfer cart is connected with above-mentioned transfer path in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned side and above-mentioned 2nd path via above-mentioned transfer path, and between the path be connected with above-mentioned transfer path in above-mentioned 1st path arranged accordingly with the article junction of above-mentioned opposite side and above-mentioned 2nd path mobile freely;
Be provided with transfer mechanism, at the above-mentioned middle shifting apparatus arranged accordingly with the article junction of above-mentioned side, and between the above-mentioned middle shifting apparatus to arrange accordingly with the article junction of above-mentioned opposite side, conveying articles freely on the width direction in above-mentioned 2nd path and above-mentioned 2nd path.
4. article transport facility as claimed in claim 3, is characterized in that,
Above-mentioned transfer mechanism is formed by transporting conveyer, the transfer position joining the side of article in the middle of the above-mentioned 1st shifting apparatus in the middle of pathway side arranged accordingly in the article junction of above-mentioned side or above-mentioned 2nd pathway side between shifting apparatus loads holding articles freely, and article is loaded freely the opposite side transfer position joining article in the middle of shifting apparatus in the middle of above-mentioned 1st pathway side that is transported to and arranges accordingly in the article junction of above-mentioned opposite side or above-mentioned 2nd pathway side between shifting apparatus.
5. article transport facility as claimed in claim 1 or 2, is characterized in that,
Above-mentioned 1st path is set as height identical each other with above-mentioned 2nd path, and above-mentioned 1st pathway side intermediate shelf and above-mentioned 2nd pathway side intermediate shelf are set as height identical each other.
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