JP2007039237A - Magnetic belt driven type track carrying method and device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an efficient carrying method and its device without reducing throughput by inexpensively imparting high facility extendability for carrying an article to the next processing system in the shortest time even when arrangement order of a mounted article processing system does not coincide with processing order of the article in the system for carrying the article by a track traveling type carrying body. <P>SOLUTION: The carrying body 1 mounted with the article is driven on double tracks by a magnetic metallic endless belt 21 of a traveling track module 2. A short size track module 6a placed with an article 9-mounting carrying body 1 is switched between an ordinary travel position, a work giving-receiving position of the processing system 10 and a track position in the opposite direction of the adjacent traveling track module by a parallel displacement mechanism 7. After processing the article by the article processing system 10, the carrying body 1 transfers to the track in the inverse direction when necessary, and carries by going backward without hindering travel of a succeeding carrying body. A short size track module 6b exists in the ordinary travel position when the 6a exists in the work giving-receiving position, and allows passing travel of the succeeding carrying body. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a technique in which a plurality of transport bodies carrying articles travel on a fixed transport path such as a track to transport the articles, and the transport bodies are free of traffic until a processing apparatus that performs a predetermined process on the transport target articles. The present invention relates to a transfer method and apparatus suitable for efficiently reaching a vehicle in a short time.

For example, in a manufacturing process of an industrial product, a fixed transport path such as a track is provided between processing apparatuses that perform processing necessary for manufacturing, and a processing object is placed in advance on a plurality of transport bodies traveling on the transport path. There is a transport system that moves between the processing devices in accordance with a predetermined processing order.

Conventionally, such a transport system is generally a system in which a plurality of transport bodies travel in the same direction on a closed-loop transport path. In this case, however, the following problems occur and the transport efficiency is lowered. There was a fear.
1. While the preceding transport body exchanges the processing object with the processing apparatus, the subsequent transport body may stop and wait, and traffic jam occurs.
2. In order to transport the processing object in a predetermined order between the plurality of processing apparatuses, it is desirable that the traveling direction of the transport body matches the arrangement order of the processing apparatuses. However, when the processing object is a high-mix low-volume product, the processing apparatus and the processing order are often different depending on the type of the processing object, and therefore it is difficult to arrange the processing apparatuses that satisfy all the conditions. For this reason, the transport body has to go around the closed loop-shaped transport path as many times as necessary, resulting in a decrease in overall transport efficiency, resulting in an increase in the time required for processing the transport object and work in progress waiting for processing, Productivity of the processing process is reduced.
These are problems to be solved in the manufacturing process of semiconductor products of high-mix low-volume production such as system LSIs, for example, where shortening of the development period and reduction of manufacturing costs are strictly required.

In order to solve these problems, for example, means described in Patent Document 1 and Patent Document 2 have been devised in a substrate manufacturing process of a semiconductor or the like.

Japanese Patent Laid-Open No. 10-275017

JP 2003-282669 A

In Patent Document 1, a method is provided in which a plurality of branch points and bypass tracks are provided on a closed loop track on which the transport body travels, and an optimal branch path is selected by calculation in order to increase transport efficiency.

In Patent Document 2, in order to increase the throughput of a process by transporting a substrate in a single-wafer type by a carriage that travels on a closed loop track in the in-process transport, another transport line that can be transported in parallel is provided.

In the above-described prior art, in the case of Patent Document 1, the closed-loop track is divided into regions divided by branch points, and the change in the transport capability of the track region is calculated based on the number of transport vehicles in each region and the operation state. Only when the transfer capability does not decrease, the transfer capability of the entire apparatus is improved by allowing the transfer vehicle to enter the bypass track from the branch point.

This method is effective for improving the overall transport efficiency by utilizing the bypass track provided in the closed-loop track, but is basically limited by the position where the bypass track is installed and the number of bypass tracks. Therefore, there is a technical problem that depending on the position and processing order of the conveyance object processing apparatus, the useless conveyance distance becomes long and there is a limit to improving the conveyance efficiency.

In the case of Reference Document 2, it is pointed out that many conventional single-wafer transfer apparatuses having a closed loop transfer path have a single transfer path. In this case, the processing time of the substrate processing apparatus along the transfer path is indicated. The throughput of the substrate processing process is reduced due to the variation in the number of substrates, or the short processing time and the long substrate that are characteristic of small-quantity, multi-product production. It has been described that there are problems that cannot be dealt with because it is in the way, and it has been proposed to provide a parallel conveyance path as a solution to these problems.

Although this proposal is an effective method for increasing the conveyance efficiency in the single wafer conveyance in the process, there is a problem that the conveyance device becomes expensive to provide a parallel conveyance path, and as a more basic problem In any transport path, the transport cart only travels in one direction on the closed loop transport path. For example, when a highly productive substrate processing apparatus is shared between processes or varieties, the transport cart has no loop. There is a technical problem that it is necessary to circulate once and for all, and a decrease in throughput is inevitable.

The present invention solves the above-mentioned technical problems and is flexible and cannot be realized by a conventional closed-loop unidirectional conveyance system with respect to the technology of a conveyance device in which a plurality of conveyance bodies travel on a fixed conveyance path such as a track. The present invention provides an efficient and low-cost transport method and apparatus, and specifically aims to achieve the following objects.
1. When the transport track of the transport body is double-tracked with a simple integrated structure, the transport body carrying the goods is exchanged with the product processing apparatus arranged along the transport path, and reverse if necessary. It is possible to move back in the direction of the trajectory and to carry it back without interfering with the travel of the subsequent transport body. Thereby, even when the arrangement order of the processing devices does not match the processing order of the articles mounted on the conveyance body, efficient conveyance without reducing the throughput is realized.
2. When arranging a device for processing articles mounted on a carrier by making the traveling track of the carrier a double track with a simple integrated structure and realizing the conveyance between devices by a plurality of carriers without making the conveyance path a closed loop It is possible to alleviate the constraints imposed by the transport route, reduce the cost of transport facilities by reducing the transport route length and required floor space, and so on.
3. By adopting a system that drives without supplying power to the transport body, and realizing a transport body traveling track without any constraint condition of the power feeding facility for the transport body self-running, it is easy to simplify the traveling track structure and modularize the structure, Realize cost reduction of transport equipment and expandability of equipment according to production volume.

In order to solve the above-mentioned problems, the present invention employs a method of driving the carrier by a magnetic metal endless belt having a belt surface parallel to the running track of the carrier and perpendicular to the upper surface of the track. That is, a traveling track of the transport body is provided on both sides of the endless belt, and a permanent magnet is attached to the transport body and attracted to the belt, so that the two transport bodies can be driven in opposite directions on both sides of the belt. As a result, bi-directional transfer of double wires was realized by a method called metal belt drive that generates less dust.

Next, a travel track module is configured by the endless belt of an appropriate length and a double track travel track, and a module that is shorter than the travel module and added with a function of parallel translation or rotation is configured as a functional track module. And the system which forms the conveyance path | route of a conveyance body by combining these track modules as needed was employ | adopted.

Among the functional track modules that form the transport path, the role of the parallel trajectory module is to exchange an article such as a cassette containing a substrate mounted on or carried by the transport body with an article processing apparatus. At this time, in order to place the transport body on the parallel motion track module and translate it in front of the apparatus, or to move the transport body in the reverse direction, the connection position with the adjacent track module is set to the track distance of the double line. Shifting and connecting up and down tracks between adjacent track modules.

In particular, the latter is very effective when it is necessary to return the transport body on the transport path in order to send the transport target object to the next processing apparatus, such as when the processing order of the transport target object is different from the arrangement order of the processing devices. Demonstrate. As a result, the transfer body can be changed between the up and down of the double-track traveling track of the track module in any processing device, and returns to the rear without colliding with the subsequent transfer body, and reaches the target processing device. I can do it.

Also, among the functional track modules that form the transport path, the role of the rotary track module is to carry a carrier by rotating it in any direction and connecting it to an adjacent track module installed at a predetermined angular position. It is to change the traveling direction of the body. It is possible to branch, merge and change the direction of the transport route, and if it is rotated 180 degrees, it changes the direction of the transport body and puts it on the opposite track so that it does not collide with the subsequent transport body in the reverse direction. You can run.

Furthermore, it is clear that if the methods, methods, and means described above are used, articles mounted on a plurality of conveyance bodies can be efficiently conveyed to an arbitrary article processing apparatus without necessarily forming a conveyance path in a closed loop. Compared with the closed-loop transfer method, since the restriction by the transfer device is less when determining the arrangement of the processing devices in the building, a factory with a high area efficiency can be realized as a result.

Next, since many conventional transport devices employ a self-propelled type in which a drive motor is mounted on the transport body, a mechanism for supplying power and control signals to the transport body is required for the travel path of the transport body. For this reason, it is generally disadvantageous in terms of equipment to partially rotate and translate the traveling track of the transport body in order to increase the complexity of the apparatus, decrease the reliability, and increase the cost. In contrast, the present invention employs a system in which the carrier is driven by the magnetic metal endless belt of each track module, so that power for traveling, control signals, etc. are supplied to the carrier, which has been indispensable for many conventional tracks. Ancillary equipment to supply is unnecessary. As a result, it becomes possible to easily form the transport path of the transport body by a plurality of track modules including the parallel track module and the rotary track module. For example, it is possible to flexibly add a transport device according to the production scale. Capable of responding to capital investment.

Further, in the present invention, in order to reduce the traveling resistance of the transport body and minimize dust generation associated with travel, a static pressure air bearing is provided on the travel track surface, and the transport body is levitated by the static pressure air bearing so A method of running by contact was adopted. As a result, the power consumption required for driving the transport body can be reduced, and the load on the magnetic metal endless belt for driving the transport body can be reduced, so the cost of the entire transport apparatus can be reduced. It is also possible to meet the demand for low dust generation required in semiconductor manufacturing facilities.

As described above, according to the present invention, the transport body is driven by a magnetic metal endless belt on a double track with a compact structure and is supported by a hydrostatic air bearing, so that the following effects can be expected.
1. After processing the article mounted on the carrier, it is possible to carry it back without interfering with the traveling of the subsequent carrier, and the article can be processed in the shortest time even when the arrangement order of the article processing devices does not match the article processing order. Can be transported to the next processing apparatus, and efficient transport without lowering the throughput can be realized.
2. It is possible to realize transfer between apparatuses using a plurality of transfer bodies without making the transfer path a closed loop. For this reason, when arranging the processing apparatus of the articles | goods mounted in a conveyance body, the restrictions of a conveyance path | route are relieve | moderated and it is possible to reduce the cost of conveyance equipment by reduction of a conveyance path | route length and a required floor area.
3. There is no need to supply power to the transport body for driving, and it is possible to create a travel path without any restrictions as a power supply system for the self-propelled transport body. This simplifies the travel path and makes the module structure easier, and reduces the cost of the transport equipment. And the expandability of the equipment according to the production amount can be realized.
4). By adopting a magnetic metal endless belt drive method and a carrier support method using a static pressure air bearing, it is possible to realize clean conveyance with little dust generation.

Embodiments according to the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of a carrier 1 and a running track module 2 which are components of the present invention. There is a double-track track 22 along a magnetic metal endless belt 21 provided in the track module 2 for traveling, the carrier 1 is guided by the track 22, and the permanent magnet on the opposite side of the illustrated permanent magnet 11 is attracted to the belt 21. Driven. The relationship between the track 22 and the carrier 1 is shown in FIG. The carrier 1 has a leg portion 1 a that fits in the guide groove 22 a of the track and a bottom surface 1 b that contacts the upper surface of the track 22. On the upper surface of the track 22 and the inner surface of the guide groove 22a, the static pressure air bearings 3 are arranged at appropriate intervals in the transport body traveling direction. The static pressure air bearing 3 has a pocket 3a and a peripheral land 3b. Pressurized air is supplied to the pocket 3a from outside via a drawing resistor (not shown). A static pressure distribution of air balanced with the load applied to the carrier is generated between the opposing surfaces. Due to the static pressure distribution of the air, the carrier is lifted from the track surface and can travel in a non-contact manner. In FIG. 1, a magnetic metal endless belt 21 is driven by a motor (not shown) via a pulley 4, and drives the carrier 1 adsorbed to the magnetic metal endless belt 21 by a permanent magnet 11. The hydrostatic air bearing 3 is not limited to the type having the pocket 3a with a fixed throttle and the peripheral land 3b, and may be a distributed type using a porous material on the bearing surface, for example. Further, it goes without saying that the traveling track module 2 is not limited to the floor-standing system shown in the figure, and may be a ceiling-suspended system, for example, according to the gist of the present invention.

FIG. 3 shows a translational trajectory module 5 that carries a carrier on the trajectory and translates in the lateral direction. This module includes a short track module 6 and a parallel movement mechanism 7. The parallel movement mechanism 7 may have any structure as long as it is a combination of a low dust generation type linear guide and an actuator. The carrier 1 is placed in a state where it is on the short track module 6 in order to exchange the mounted article with the article processing apparatus or to change the double track running track with the adjacent track module. Translate in the direction.

FIG. 4 partially shows an example of an embodiment of a magnetic belt drive type orbital transport apparatus according to the present invention. Two transport bodies 1 are shown on the double track of the traveling track module 2, and the respective transport bodies are driven in opposite directions by a magnetic metal endless belt 21 driven by a pulley 4. Reference numeral 5 denotes a parallel orbit module, and 6a and 6b denote short orbit modules for parallel movement. Reference numeral 7 denotes a translation mechanism, and 8 denotes a rotary track module. In addition, although embodiment shown in figure is a floor-standing system, it cannot be overemphasized that these conveying apparatuses may be comprised by a ceiling suspension system.

The function of the parallel movement track module will be described with reference to FIG. Initially, the short track module 6a is connected to the adjacent track module 2 at the normal travel position, and the carrier 1 carries the article 9 to be transported and performs processing on the article 9, so that the processing device 10 Stop on the short track module 6a. In order to increase the transport efficiency of the transport device, it is desirable to place two types of short track modules 6a and 6b on the parallel movement mechanism 7.

In FIG. 6, the short track module 6a carrying the carrier 1 carrying the article 9a moves in parallel to the workpiece transfer position with the processing apparatus 10, and at the same time, the other short track module 6b is used for the adjacent traveling. It translates so that it may connect with the track module 2 in a normal driving position. During the time required for processing the article 9a, the short track module 6b connects the adjacent track modules 2 to each other, so that the subsequent transport body on which the article 9b is mounted is a device regardless of the processing time of the article 9a. 10 and can reach the target processing device (not shown) without delay. In addition, transfer of the articles | goods 9a between the processing apparatus 10 and the conveyance body 1 is performed by the robot or the exclusive handling apparatus (not shown) separately provided in the machine side of the apparatus.

Next, FIG. 7 shows a case where the processing of the article 9 mounted on the carrier 1 is completed by the processing apparatus 10 and the carrier carrying the article is returned in the reverse direction to be sent to the next step. In FIG. 7, the short track module 6 a on which the transport body 1 on which the article 9 a is mounted is moved in parallel by the parallel movement mechanism 7, and the side where the transport body 1 is in the double track (the upward direction) is It connects in the downward direction of the double track of adjacent running track modules. At this time, the short track module 6b is retracted at the stroke end of the parallel movement mechanism 7 so as not to prevent the parallel movement of the short track module 6a. Thereafter, the belt drive pulley 4a of the short track module 6a is driven in a direction opposite to that of the belt drive pulley 4 of the adjacent track module 2 and at a synchronized speed, whereby the carrier 1 on which the article 9a is mounted is moved to the article 9b. It can be transported in the opposite direction without colliding with a subsequent transport body mounted.

Next, the function of the rotary track module 8 will be described with reference to FIGS. The rotary track module 8 has a configuration in which a short track module is mounted on a rotation mechanism (not shown) with its center position aligned, and any type of rotation mechanism can be used as long as the rotation angle can be controlled. It may be. In FIG. 8, the rotary track module 8 connects between the track modules 2 for travel, and the track module 2 b for travel that intersects the track module 2 at a right angle is selected as the transport path of the transport body 1. There is no state. When the travel track module 2b is selected as the transport path of the transport body 1, the rotary track module 8 rotates 90 degrees counterclockwise as shown in FIG. 9, and moves between the branched travel track modules 2b. The transport body 1 travels in the left direction in the figure on the branched travel track module. Similarly, when the rotary track module 8 is rotated 90 degrees clockwise, the transport body 1 enters the other double-track path of the travel track module 2b and travels in the right direction in the figure. 1 enters the other track of the double track of the original travel track module 2 and travels in the opposite direction from the first. Needless to say, the branching angle between the running track modules 2 and 2b is not limited to 90 degrees, and can be set to an arbitrary angle according to the purpose of conveyance.

The method and apparatus of the present invention are effective for an inter-process transfer apparatus for wafers in a semiconductor manufacturing process such as a system LSI, which is produced in a small variety of products.

It is a figure which shows an example of the structure of the track module for driving | running | working, and a static pressure air bearing. It is a figure which shows the relationship between a conveyance body driving | running track and a conveyance body. It is a figure which shows the structure of a parallel movement track module among functional track modules. It is a figure which shows partially an example of embodiment of the magnetic belt drive-type track conveying apparatus concerning this invention. It is a figure which shows the function of a translation track module. In the figure, the translation trajectory is in the normal position. It is a figure which shows the function of a translation track module. In the figure, the parallel movement trajectory is at the workpiece transfer position. It is a figure which shows the function of a translation track module. In the figure, the parallel movement trajectory is at the transport position in the reverse direction. It is a figure which shows the function of a rotation track module among functional track modules. In the figure, the rotation trajectory is in the normal position. It is a figure which shows the function of a rotation track module. In the figure, the rotation trajectory is in a branch position.

Explanation of symbols

1 Conveying body 1a Leg of the conveying body (it fits in the track guide groove)
1b Bottom surface of carrier (supported by static pressure air bearing)
2 Running track module 2b Running track module (branch side)
3 Hydrostatic Air Bearing 3a Hydrostatic Air Bearing Pocket 3b Hydrostatic Air Bearing Peripheral Land 4 Magnetic Metal Endless Belt Drive Pulley 4a Parallel Drive Short Track Module 6a Belt Drive Pulley 5 Parallel Transfer Track Module 6 Parallel Travel Short Length Track module 6a Parallel track short track module (processing equipment side)
6b Short orbit module for parallel movement (retraction side)
7 Parallel movement mechanism 8 Rotating orbit module 9 Conveyance target article 9a Conveyance target article (work transfer position or processed article)
9b Articles to be transported (mounted on subsequent transport body)
DESCRIPTION OF SYMBOLS 10 Material processing apparatus 11 Permanent magnet 21 attached to carrier body Magnetic metal endless belt 22 Double track 22a on track module for driving Double track guide groove on track module for track

Claims (10)

A transport method of a transport device for transporting an article mounted on or carried by a plurality of transport bodies traveling on a track, wherein a permanent magnet is attached to the transport body, and an endless belt made of magnetic metal is attached to a belt surface along the track Is provided so as to be perpendicular to the raceway surface, the permanent magnet of the carrier is attracted to the magnetic metal endless belt, and the magnetic metal endless belt is driven to move the carrier onto the orbit. A magnetic belt driven orbital conveying method, characterized in that an article is carried or carried on a conveying body that runs using such a method. 2. The magnetic belt driven track transport method according to claim 1, wherein a double-track track is formed by providing a carrier running track on both sides of a magnetic metal endless belt, and the double-track track is formed on both sides of the endless belt. It is configured so that a permanent magnet attached to a conveyor is attracted to a belt surface, and by driving the endless belt, the conveyor is caused to travel in opposite directions on a double track formed on both sides of the endless belt, Magnetic belt-driven orbital conveying method characterized in that the articles carried or carried by the conveying body are conveyed in opposite directions. 3. A magnetic belt-driven track transport method according to claim 1 or 2, wherein a track module is formed by a track having an appropriately determined length and a magnetic metal endless belt, and a plurality of the track modules are connected to each other to thereby transport the transport body. The transport body is transferred between the adjacent track modules and is allowed to travel along the transport path by synchronizing the speeds of the magnetic metal endless belts provided in the adjacent track modules. Magnetic belt-driven orbit transfer method 4. The magnetic belt-driven track transport method according to claim 3, wherein a part of the plurality of track modules constituting the transport path is moved in parallel with a short length approximately equal to or less than twice the length of the transport body. Magnetic belt-driven orbital conveying method comprising a functional orbital module with a function of rotating 5. The magnetic belt-driven track transport method according to claim 4, wherein the transport body is stopped laterally on the functional track module having a parallel movement function, and then the functional track module is moved in the lateral direction. A magnetic belt-driven track transport method characterized by connecting the track to a track in the reverse direction of the double track of the adjacent track module to drive the transport body on the track in the reverse direction and traveling in the reverse direction. A transport device that transports an article by being carried or carried on a plurality of transport bodies that travel on a track, wherein the track is configured by connecting a plurality of track modules, and further, as an element constituting the track module, A belt surface is perpendicular to the surfaces of the two transport body travel tracks between the two transport body travel tracks for causing the transport body to travel in a double track and the two transport body travel tracks. A magnetic metal endless belt and a motor for driving the magnetic metal endless belt, and a permanent magnet is attached to a side surface of the carrier, and the magnetic material is placed on the two carrier running tracks. The carrier is attracted to the belt surfaces on both sides of the metal endless belt by the permanent magnet, and the magnetic metal endless belt provided in the adjacent track module is synchronized. Sequentially passed between the track module the carrier by moving, characterized in that to face run at double track along the track, the magnetic belt drive track conveyor apparatus The magnetic belt drive type orbital conveying apparatus according to claim 6, wherein a part of the plurality of orbital modules constituting the traveling orbit of the conveying body is a short length that is approximately twice or less of the conveying body length, A magnetic belt drive type orbital conveying device comprising a functional type orbital module to which a function of parallel movement or rotation is added. 8. The magnetic belt-driven orbital transport device according to claim 7, wherein after the transport body is stopped on the functional track module having a parallel movement function, the functional track module is moved in the lateral direction, and there is a transport body. A magnetic belt drive type orbital conveying apparatus characterized in that the conveying body is placed on a reverse orbit and travels in the reverse direction by connecting the orbit to a reverse orbit among the double track of adjacent track modules. 9. The magnetic belt-driven track transport device according to claim 6, 7, or 8, wherein the two transport body travel tracks have a vertical load support surface that supports the weight of the transport body and a lateral load that supports a lateral load applied to the transport body. Support surfaces are provided, static pressure air bearings are arranged at appropriate intervals in the running direction of each support surface, and the load applied to the transport body is received by the static pressure air bearing so that the transport body is levitated from the support surface. Magnetic belt-driven orbital transport device characterized by enabling non-contact travel of the transport body 10. The magnetic belt drive type track transportation device according to claim 6, 7, 8, or 9, wherein each track module constituting the transport body travel track is provided with a sensor for detecting the presence or absence of the transport body, and each track module is provided with each track module. Upon detecting that the transport body has come to the adjacent track module, the magnetic metal endless belt of each track module and the static pressure air bearing on the track for running the transport body are activated, and then the track modules Magnetic belt-driven track transport device characterized in that the magnetic metal endless belt of each track module and the static pressure air bearing on the track for running the transport body are stopped by detecting that the transport body has left.

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