JP6896027B2 - Semiconductor component processing system - Google Patents

Description

An exemplary embodiment described herein relates to a substrate processing system, in particular a substrate transfer system, a transfer machine carrier, transfer to a processing tool contact surface, and placement.

Conventional technology

[Cross-reference of related applications]
This application claims the benefit of U.S. Provisional Application Serial No. 60 / 799,908 filed on May 11, 2006, and U.S. Patent Application No. 60, filed on November 7, 2005. Filed on November 7, 2006, a partial continuation of US Patent Application Serial No. 11 / 556,584, filed November 3, 2006, claiming the interests of No. 60 / 733,813. A partial continuation of US Patent Application Serial No. 11 / 594,365, which is a partial continuation of US Patent Application Serial No. 11 / 787,981 filed on April 18, 2007, all of which. Is incorporated herein by reference in its entirety.

The main driving force in the manufacture of electronic devices is the consumer's desire for cheaper, more capable and smaller electronic devices. The main driving force transforms into the manufacturer's agility for further miniaturization and improvements in manufacturing efficiency. As a result, manufacturers pursue profits as much as possible. In the case of semiconductor devices, conventional manufacturing equipment or FABs have essentially (or knitting structure) separate processing tools, such as assembly tools, to perform one or more processes on the semiconductor substrate. Therefore, conventional FABs may be knitted around a processing tool and placed in a desired configuration to transform a semiconductor substrate into a desired electronic device. For example, the processing tools may be arranged within a conventional FAB in the processing bay. As can be understood, the substrate is held in a carrier such as SMF, FOUR, etc. between the tools so that the substrate being processed between the tools maintains substantially the same cleanliness while in the tool. .. Communication between tools may be provided by a handling system (such as an automated material handling system (AMHS)) that can transport the substrate carrier to a desired processing tool within the FAB. The junction between the handling system and the processing tool is generally two parts, the handling for loading / unloading the carrier into the processing tool's loading station, for illustrative purposes. Having a joint between the system and the tool and a joint between the carrier and the tool (ie, separate or group) that allows loading and unloading of the substrate between the carrier and the tool. You may think. Numerous conventional joining systems are known to join processing tools to carrier and material handling systems. Many conventional bonding systems have processing tool junctions, carrier junctions, or materials that have the undesired mechanism of increasing the cost of loading and unloading the substrate into the processing tool or causing inefficiencies. There is a complexity issue that results in one or more of the handling system joints. An exemplary embodiment that overcomes the problems of conventional systems is described in more detail below.

Industry trends indicate that future IC devices may have structures below about 45 nm. In order to improve efficiency and reduce fabrication costs, it is desirable that IC devices of this scale be manufactured using the largest possible semiconductor substrates or wafers. Conventional FABs can generally handle 200 mm or 300 mm wafers. Industry trends have shown that in the future it is desirable to be able to handle wafers larger than 300 mm, such as wafers with a FAB of 450 mm. As can be understood, using larger wafers can result in longer processing times per wafer. Therefore, when a larger wafer such as a wafer of 300 mm or more is adopted, it may be desirable to use a smaller lot size for wafer processing in order to reduce work in process (WIP) in the FAB. Also, smaller wafer lot sizes may be particularly desirable for lot processing of wafers of any size, or for flat panels including any other substrate or, for example, flat panels for flat screen displays. Lot processing characterized by WIP reduction and efficiency can be performed by using them, but adopting a small processing lot in the FAB may adversely affect the conventional FAB processing amount. .. For example, smaller lot sizes tend to increase the transfer system load of any capacity transfer system (conveying wafer lots) when compared to larger lot sizes. This is illustrated in the graph shown in FIG. 51A. The graph of FIG. 51A shows the relationship between lot size and transport speed (as movement per hour) for many different FAB rates (shown as wafers starting at desired time periods such as per month, eg WSPM). (Shown) is illustrated. The graph of FIG. 51A also shows a line showing the maximum capacity of a conventional FAB handling system (eg, moving about 6000 to 7000 per hour). Therefore, the intersection between the handling system capacitance line and the FAB rate curve identifies the surface for the lot size in which the curve is available. For example, to achieve a FAB rate of about 24,000 WSPM in any conventional transfer system, the minimum lot size is about 15 wafers. Using smaller wafer lots reduces the FAB rate. Therefore, the wafer carrier, the junction between the carrier and the processing tool, and the carrier transfer system (in the FAB) so that one smaller wafer lot and a larger wafer lot of the desired size can be used without adversely affecting the FAB rate. It is desirable to provide a system in which carriers are transported between tools, storage positions, etc.

An exemplary embodiment of a semiconductor component processing system is provided. The system comprises at least one processing device for processing parts, a primary transfer system, a secondary transfer system, and one or more joints between a first transfer system and a second transfer system. Has. Each of the primary and secondary transport systems has one or more substantially constant velocity sections within the queue section leading to the constant velocity section.

The aforementioned aspects of the invention and other mechanisms are described in the following description in connection with the accompanying drawings.

FIG. 5 is a schematic front view of a component carrier incorporating a mechanism according to an exemplary embodiment, and a component or substrate S placed on the carrier. FIG. 3 is a schematic partial plan view of a carrier component support according to another exemplary embodiment. It is a schematic front view of the component support of a carrier according to another exemplary embodiment. FIG. 5 is a schematic cross-sectional front view of the carrier of FIG. 1 and a toolport joint according to another exemplary embodiment. Another schematic cross-sectional front view of a toolport joint and carrier according to another exemplary embodiment. 3A-3C are schematic cross-sectional front views illustrating toolport joints and carriers according to another exemplary embodiment, as viewed from different positions. 3A-3C are schematic cross-sectional front views illustrating toolport joints and carriers according to another exemplary embodiment, as viewed from different positions. 3A-3C are schematic cross-sectional front views illustrating toolport joints and carriers according to another exemplary embodiment, as viewed from different positions. It is a schematic front view of the joint portion of a carrier and a tool according to still another exemplary embodiment. 4A-4C are enlarged cross-sectional views of the joint portion between the carrier and the tool, respectively, and illustrate the joint portion configuration according to different exemplary embodiments. 4A-4C are enlarged cross-sectional views of the joint portion between the carrier and the tool, respectively, and illustrate the joint portion configuration according to different exemplary embodiments. 4A-4C are enlarged cross-sectional views of the joint portion between the carrier and the tool, respectively, and illustrate the joint portion configuration according to different exemplary embodiments. 5A-5C is a schematic partial front view of the carrier-tool joint portion according to yet another exemplary embodiment, showing the carrier-tool joint portion at each position. 5A-5C is a schematic partial front view of the carrier-tool joint portion according to yet another exemplary embodiment, showing the carrier-tool joint portion at each position. 5A-5C is a schematic partial front view of the carrier-tool joint portion according to yet another exemplary embodiment, showing the carrier-tool joint portion at each position. FIG. 6 is a schematic front view of a component carrier according to another different exemplary embodiment. FIG. 6 is a schematic front view of a component carrier according to another different exemplary embodiment. 7A-7C are schematic front views of component carriers according to different exemplary embodiments, showing carriers at different positions. 7A-7C are schematic front views of component carriers according to different exemplary embodiments, showing carriers at different positions. 7A-7C are schematic front views of component carriers according to different exemplary embodiments, showing carriers at different positions. Another schematic front view of the tool joint and carrier according to another exemplary embodiment. Another schematic front view of the tool joint and carrier according to another exemplary embodiment. Another schematic front view of the tool joint and carrier according to another exemplary embodiment. FIG. 3 is a schematic partial front view of a process tool according to another exemplary embodiment and a carrier joined thereto. FIG. 3 is a schematic front view of a process tool section according to another exemplary embodiment and a carrier joined thereto. It is a schematic bottom view of the carrier (part transfer) opening of the carrier of FIG. It is a schematic bottom view of the carrier door of the carrier of FIG. It is a schematic top view of the tool of the joint portion of FIG. 11 and the carrier door joint portion of the tool section. It is a schematic top view of the tool of the joint portion of FIG. 11 and the carrier door joint portion of the tool section. FIG. 3 is a schematic front view of a process tool according to yet another exemplary embodiment and a carrier joined thereto. FIG. 6 is a schematic front view of a tool joint and a carrier according to still another exemplary embodiment. 16A and 16B are schematic front views of tool joints and carriers according to another exemplary embodiment, shown at different positions, respectively. 16A and 16B are schematic front views of tool joints and carriers according to another exemplary embodiment, shown at different positions, respectively. It is a schematic side view of a carrier. It is another schematic front view of the carrier and tool joint part by another exemplary embodiment. It is another schematic front view of the carrier and tool joint part by another exemplary embodiment. It is a top view of the tool joint part by another exemplary embodiment. FIG. 6 is a schematic front view of a tool joint and a carrier according to another exemplary embodiment. FIG. 6 is a schematic front view of a tool joint and a carrier according to another exemplary embodiment. FIG. 3 is a schematic plan view of a transport system according to another exemplary embodiment. It is a schematic partial plan view of the truck part of the transport system of FIG. It is a schematic partial plan view of the truck part of the transport system of FIG. 20C and 20D are schematic bottom views of transport systems with different payloads, respectively, according to other exemplary embodiments. 20C and 20D are schematic bottom views of transport systems with different payloads, respectively, according to other exemplary embodiments. FIG. 3 is a schematic partial plan view of another portion of the transport system according to another exemplary embodiment. Another schematic partial plan view of a portion of the transport system according to other exemplary embodiments. Another schematic partial plan view of a portion of the transport system according to other exemplary embodiments. Another schematic partial plan view of a portion of the transport system according to other exemplary embodiments. Another schematic partial plan view of a portion of the transport system according to other exemplary embodiments. 25A and 25B show different front views of the transport system and processing tool according to different exemplary embodiments. 25A and 25B show different front views of the transport system and processing tool according to different exemplary embodiments. 26A and 26B are different schematic front views of a transfer joining system for transferring carriers between a transfer system and a tool according to different exemplary embodiments. 26A and 26B are different schematic front views of a transfer joining system for transferring carriers between a transfer system and a tool according to different exemplary embodiments. FIG. 6 is a schematic partial front view of a transport system according to another exemplary embodiment. 27A and 27B are other schematic partial front views of the transport system at different positions. 27A and 27B are other schematic partial front views of the transport system at different positions. It is another schematic front view of the transport system according to another exemplary embodiment. FIG. 3 is a schematic plan view of a transport system according to another exemplary embodiment. FIG. 3 is a schematic plan view of a transport system according to another exemplary embodiment. FIG. 3 is a schematic plan view of a transport system and processing tool according to another exemplary embodiment. FIG. 29C is a schematic partial front view of the transport system and processing tool of FIG. 29C. It is another schematic partial front view of the transport system. It is another schematic partial front view of the transport system according to another exemplary embodiment. FIG. 3 is a schematic plan view of another transport system according to other exemplary embodiments. It is a front view of another transport system by another exemplary embodiment. It is still another schematic plan view of the transport system according to another exemplary embodiment. FIG. 3 is a bottom tilt view of the transport device according to another exemplary embodiment. FIG. 5 is a plan view of the transport device according to another exemplary embodiment. It is a bottom plan view of the transport device according to another exemplary embodiment. FIG. 3 is another bottom plan view of the transport device according to another exemplary embodiment. FIG. 3 is a schematic cross-sectional view of a portion of a Comply kinematic connector. It is a perspective view of the tool loading station by an exemplary embodiment. FIG. 5 is an end view of a tool loading station according to an exemplary embodiment. It is a side view of the tool loading station by an exemplary embodiment. FIG. 5 is a plan view of a tool loading station according to an exemplary embodiment. FIG. 5 is a plan view of another tool loading station according to another exemplary embodiment. FIG. 5 is a plan view of yet another tool loading station according to yet another exemplary embodiment. FIG. 5 is a plan view of yet another tool loading station according to yet another exemplary embodiment. It is a flowchart which illustrates the process which is diagrammatically different from each other by different exemplary embodiments. It is a flowchart which illustrates the process which is diagrammatically different from each other by different exemplary embodiments. It is a flowchart which illustrates the process which is diagrammatically different from each other by different exemplary embodiments. Is a cross-sectional view of a tool loading station according to another exemplary embodiment. It is the schematic sectional drawing of the substrate support by an exemplary embodiment. It is the schematic sectional drawing of the substrate support by an exemplary embodiment. It is the schematic sectional drawing of the substrate support by an exemplary embodiment. It is the schematic sectional drawing of the substrate support by an exemplary embodiment. It is a schematic perspective view of the processing system according to still another exemplary embodiment. It is an end front view of the processing system according to still another exemplary embodiment. It is a top view of the processing system according to still another exemplary embodiment. FIG. 4 is a schematic disassembled assembly perspective view of a section of the system of FIG. FIG. 6 is a schematic diagram illustrating different selectable arrangements of systems according to different exemplary embodiments. FIG. 6 is a schematic diagram illustrating different selectable arrangements of systems according to different exemplary embodiments. FIG. 6 is a schematic diagram illustrating different selectable arrangements of systems according to different exemplary embodiments. FIG. 6 is a schematic diagram illustrating different selectable arrangements of systems according to different exemplary embodiments. FIG. 6 is a schematic diagram illustrating different selectable arrangements of systems according to different exemplary embodiments. It is a schematic front view of the system by still another exemplary embodiment. FIG. 3 is a schematic partial perspective view of the system according to still another exemplary embodiment. Another schematic plan view of the processing system according to another exemplary embodiment. FIG. 3 is a schematic plan view of a transport system according to another exemplary embodiment. It is a graph which shows the relationship between a lot size and a transfer speed. FIG. 5 is a schematic partial plan view showing a part of a transport system according to another exemplary embodiment. FIG. 5 is a schematic partial plan view showing a part of a transport system according to another exemplary embodiment. FIG. 3 is another partial plan view of the transport system according to another exemplary embodiment. It is the schematic plan view of the transport vehicle of the transport system shown in FIG. 51. It is a schematic end front view of the transport system according to still another embodiment. FIG. 3 is a schematic end front view of a transport system according to still another exemplary embodiment. It is a schematic partial side perspective view of a transport system. 55B and 55C are partial plan views of a transport system showing carriers transported by transport systems at different positions. 55B and 55C are partial plan views of a transport system showing carriers transported by transport systems at different positions. It is a front view of the joint part of a transport system. FIG. 3 is a schematic plan view of a transport system according to still another exemplary embodiment. FIG. 5 is an end view of a transport system according to still another exemplary embodiment.

Further referring to FIG. 1, the component carrier 200 defines a chamber 202 capable of carrying the component S in an environment that can be isolated from the outside atmosphere of the chamber. The shape of the carrier 200 shown in FIG. 1 is merely an example, and in another embodiment, the carrier may have any other desired shape. As shown, the carrier 200 can accommodate a cassette 210 in the chamber for supporting the component S in the carrier. Generally, the cassette 210 is an elongated support 210S (in embodiments, for example two are shown), or 1 as shown, with component support shelves 210V on top to provide rows or stacks of supports. It has shelves in which one or more parts are supported separately. The cassette may be mounted or mounted on a carrier structure as described in more detail below. In another embodiment, the carrier may not have a cassette and the component support may be integral or formed as a single structure with the carrier structure. The component is shown as a flat / substrate element such as a semiconductor wafer of 350 mm, 300 mm, 200 mm, or any desired size and shape, or a reticle / mask or flat panel for a display or any other suitable article. The carriers may be reduced or smaller lot size carriers as compared to conventional 13 or 25 wafer carriers. The carrier may be configured such that the parts carry only one small lot, or the parts may carry less than ten small lots. Preferable examples of reduced capacity carriers similar to Carrier 200 are described in US Patent Application Serial No. 11 / 207,231, named "Reduced Capacity Carrier and Method of Use", filed August 19, 2005. And shown, the document is incorporated herein by reference in its entirety. Suitable examples of joints and transfer systems between carriers similar to Carrier 200 and processing tools (eg, semiconductor fabrication tools, stockers, classifiers, etc.) are US patents filed August 23, 2005. Application serial number 11 / 210,918, name "Elevator Bases Tool Loading and Buffering System", and serial number 11 / 211,236 filed on August 24, 2005, name "Transportation System". Both of these documents are described and shown and are incorporated herein by reference in their entirety. Other preferred examples of carriers having a mechanism similar to Carrier 200 are described in US Patent Application Serial No. 10 / 697,528, filed October 30, 2003, entitled "Automated Material Handling System". And shown, the document is incorporated herein by reference in its entirety. As can be understood, the parts that form a smaller lot immediately (on any workbench) to a subsequent workbench without waiting for the processing of other parts to complete as could occur in a larger lot. Since the carrier is transported (after the processing of the above is completed), the carrier having a reduced size similar to the carrier 200 can reduce the work-in-process in the FAB. The mechanism of the exemplary embodiment is described and shown with reference to the small volume carriers specifically, but the mechanism of the exemplary embodiment includes 13 or 25, or any other desired number of parts. The same applies to any other suitable carrier, such as a carrier that can be accommodated therein.

Further referring to FIG. 1, in an exemplary embodiment, the carrier 200 may be shaped to hold the parts in a vertical (ie Z-axis) stack. The carrier 200 may be a bottom surface or top surface opening type or a bottom surface and top surface opening type carrier. In the exemplary embodiment shown, the top and bottom surfaces are arranged along a vertical line or Z axis, whereas in another embodiment the top and bottom surfaces are oriented along any of the other axes. May be good. The top and bottom openings, which are described in more detail below, are such that the carrier opening 204 (part S is moved in and out of chamber 202, but is defined by the carrier) is the plane of the part held within the carrier. It means that they are aligned substantially in a straight line (in this embodiment, substantially orthogonal to the Z axis). As shown below, the carrier 200 typically has a casing 212 with a base and a retractable or removable door. When closed, the door may be secured and sealed at the base. The seal between the door and the base may allow the chamber 202 to be isolated from the outside atmosphere. The isolated chamber 202 may retain any desired isolated atmosphere, such as clean air, inert gas, etc., or may be able to maintain a vacuum. The door may be opened so that parts can be loaded / unloaded from the carrier. In an exemplary embodiment, the door means a portion of the carrier that is open and removable or removable when accessing the component support shelves therein. In the exemplary embodiment shown in FIG. 1, casing 200 generally has a generally recessed or hollow portion (hereinafter referred to as a shell) 214, and a wall (hereinafter referred to as a shell), in which a part can be received. It has a cap / cover, etc.) 216. As described below, the entire wall 216 or shell 214 may act as a carrier door. The walls and shell are joined to close the carrier and separated to open the carrier. In an exemplary embodiment, the shell and wall may be a metal such as an aluminum alloy or stainless steel made by any suitable process. The wall and / or shell may be an integral member (single structure). In another embodiment, the carrier casing may be made of any other suitable material, including suitable non-metals. The cassette 210 may be mounted on the wall 216, but in another embodiment the cassette may be mounted on the shell. Mounting the cassette in either the shell or the door may be chosen to facilitate the ease of removing the cassette or substrate inside from the carrier when the door is opened. In the embodiment shown, the wall 216 is located on the top surface of the shell, but in another embodiment the carrier casing may have a configuration having a shell on the top surface and a wall on the bottom surface. Good. In yet other embodiments, the shell may have removable walls on both the top and bottom surfaces (ie, carriers with top and bottom openings). In another other embodiment, the removable wall may be placed laterally to the carrier. In an exemplary embodiment, the door is a passive component (eg, a part that closes and opens between the door and the carrier and between the door and the tool joint, as further described below. There may be virtually no movement of components).

Here, with reference to FIG. 2A, the carrier 200 placed at the toolport junction 2010 of a suitable processing tool is shown. The processing tool may be a classifier, stocker, or tool capable of performing one or more processes such as material deposition, lithography, masking, etching, polishing, metrology, or a process module or chamber such as load lock. It may be a tool having one or more. The processing tool has at least a partial control atmosphere, and the tool joint 2010 allows loading / unloading of parts between the tool and the carrier 200 without affecting the control atmosphere within the tool or carrier 200. You may do so. In an exemplary embodiment, the port junction 2010 typically includes a port or opening 2012 through which the substrate can be loaded into the processing tool, and a door, cover, or removable portion 2014 that closes the port. You may have. In another embodiment, the removable portion may partially close the opening. In FIG. 2A, the port door 2014 is shown in the closed and open positions for illustrative purposes. In the embodiment shown in FIG. 2A, the carrier 200 may be loaded (ie, moved in the Z direction) underneath the junction having the toolport 2012, as shown below. FIG. 2A shows the top wall 216 acting as the door of the carrier 200. For example, the wall 216 may be connected to the port door 2014 and moved into, for example, the tool to open the tool port joint at the same time as the port door is removed. By removing the wall 216, the cassette (mounted on it) and the parts on it are moved from the carrier (for access by the parts carrier / robot). Referring again to FIG. 1, the configuration of the cassette 210 with the facing supports 210S provides access areas 210A, 210B on two or more sides (two sides in the exemplary embodiment) of the cassette, a component robot. Parts may be loaded / unloaded on the cassette shelf (see also FIG. 2A). In another embodiment, the carrier may have any desired number of component access areas. The access areas may be arranged symmetrically around the periphery of the carrier or arranged in an asymmetrical configuration. In the exemplary embodiment shown in FIG. 2A, the tool may have two or more component handling robots 2016A, 2016B, for example, to access component V in two or more access areas 210A, 210B. .. In another embodiment, the tool may have more or less parts transfer robots. Multi-directional robot access to the cassette may enable the handing of parts between robots in the cassette. Also, multi-directional robotic access to parts determines the orientation of the carrier as it is transported or joined to the tool port. Therefore, the carrier 200 may be bonded to the tool joint in one or more orientations with respect to the tool joint. The carrier is closed by returning the port door to its closed position, which returns the carrier wall 216 to join the shell 214.

With reference to FIG. 2B, a joint portion between the carrier 200 and the toolport joint portion 2010'is shown according to another exemplary embodiment. In this embodiment, the carrier shell 214 may act as a door. In the embodiments shown, the toolport door 2014'is relative to the carrier shell so as to surround and seal around the shell to prevent exposure of the inside of the tool to contaminants outside the shell. It may have a substantially equiangular shape. In an exemplary embodiment, the carrier 200 may be loaded on top (ie, moved down along the (−) Z direction), such as when the carrier is lowered from the overhead of the transport system. To open the carrier 200, the shell 214 is removed from the carrier and at the same time the port door is moved downward ((−) Z direction), for example, inside the tool. Here, the carrier door (ie, shell 214) is located on the bottom surface and opens the carrier by downward movement, so this is sometimes referred to as the bottom opening type of carrier. The opening of the carrier exposes the parts in the cassette that remain on the wall 216. In this embodiment, the robot (similar to robots 2016A, 2016B in FIG. 2A) is provided with a degree of freedom in the Z axis to access vertically spaced cassette shelves or components therein. May be good. The robot may have a mapper (not shown) on it. In another embodiment, the shell 216 may have an integrated mapper that allows the passing beam mapper to allow the cassette to be mapped upon removal of the shell. 2A-2B illustrate the carrier 200, which may be of top and bottom open type. In other other embodiments, the orientation of the shell and the wall may be reversed (shell on top of the wall), and the carrier is similar to FIG. 2B but mirror image of top open (ie, raising the shell). And the same method as in FIG. 2A, but the opposite bottom opening type (ie, lowering the wall) may be used.

Seeing FIG. 1 again, as mentioned above, the walls 216 and shell 214 are passive without movable elements such as fixtures that, when activated, can contaminate the clean space within the tool or container. Structure may be used. For example, the walls and shell may be magnetically fixed to each other. For example, the magnetic fixture may have permanent or electromagnet elements 226, 228 or a combination thereof and may optionally be placed on the wall 216 and shell 214 to secure the wall and shell. The magnetic fixture may have, for example, a reversible magnetic element that is switched (ie, to open or close) by the passage of charge through the reversible element. For example, the wall 216 may include a magnetic element 228 (eg, steel) and the shell 214 may include a magnetic switch element 226 that is actuated to secure the wall to the shell. In the exemplary embodiments shown in FIGS. 2A and 2B, the magnetic elements in the wall and the actuable magnets in the shell make the carrier door (either the wall or the shell, see FIGS. 2A-2B) into the port door. By fixing, the carrier door may be configured to interlock with the magnetic fixtures 2028', 2026' in the port door joints 2010, 2010' so that the carrier door is released from the rest of the carrier. In another embodiment, the magnetic fixture between the wall and the shell may have any other desired configuration. In an exemplary embodiment shown in FIG. 23, the carrier comprises a mechanical connecting element 230 such as a shape storage device that mates with an actuating pin, a pressure connector, or a coupling coupling mechanism 2030 on a port junction. May be connected to the port junction. In an exemplary embodiment, the device is shown to be located on a wall portion, but in another embodiment the device may be secured to the shell. As can be seen from FIG. 24, the actuable device may be encapsulated in a sealed joint between the removable wall portion and the port door, which may occur as the device operates. Certain potential particles may be trapped. Passive carriers and carrier doors provide vacuum compatible, clean and washable carriers.

As mentioned above, the carrier door and base (ie, wall 216 and shell 224) may be sealed to isolate the carrier chamber 202. Also, if the carrier is joined to the port of the tool (eg, loading port module), the carrier door and base respectively have the carrier door (ie, wall 216 or shell 214 in FIG. 1) to the port door, and the carrier base, respectively. May have a sealing joint to seal each port. Further, the port door may have a sealing joint with the port.

In FIGS. 3A to 3C, each of the sealing joint portions (221': carrier door and carrier 222': carrier and port, 223': port door and port, and 224': port door and carrier door) is conveniently shown. A carrier, similar to the carrier 200, bonded to the toolport 2220, according to an exemplary embodiment forming an integral seal 222', sometimes referred to as a substantially X structure (most commonly seen in FIG. 3B). Shows 200'. In the exemplary embodiment shown, the sealing joint portion of the carrier is shown at the top opening for illustrative purposes, but the carrier has multiple openings (similar to the opening 204 shown in FIG. 1). For example, in another embodiment having a top surface and a bottom surface), a sealing joint may be provided at each opening. As can be understood, the substantially X structure is only for schematic depiction of the surface of the sealed joint, and in another embodiment the surface of the sealed joint is such that the surface of the sealed joint is curved, for example. It may be in any suitable arrangement. The substantially X-shaped sealing structure defines a plurality of sealing joints (eg, 221'-222') in which the capacitance confined between the joints is substantially zero (0). Therefore, the opening of any sealed joint does not result in the release of contaminants into the space opened by the opening of the sealed joint. Furthermore, in other other embodiments, the seal may have any desired orientation (eg, a sealing joint that is oriented horizontally or vertically in a substantially + pattern). In an exemplary embodiment, for exemplary purposes, the carrier 200'is illustrated as a top opening type (the wall 216'is a door that is opened by lifting upwards similar to the embodiment illustrated in FIG. 2A. The port 2220 is configured to be bottom loaded (the lifter lifts the carrier 220'up to dock the tool port). In this embodiment, the shell 214'may have a sealing joint portion 214I'and a uniformly sloping sealing surface 221C', 222C'. The sealing surfaces 222C', 221C'on the shell appear to be substantially flat, but in another embodiment the surface is uniformly inclined to give rise to a substantially X-shaped sealing structure. , Comprehensive or exclusive angles or other shapes may be formed on the sealing surface to improve sealing. In this embodiment, the carrier wall 216'is generally oriented to demarcate the sealing surfaces 221CD'and 224CD' (in the exemplary embodiment shown in FIG. 3A, with a gradient). It has a stop joint portion 216I'. As seen in FIG. 3A, the shell and the sealing surfaces of the walls 221C', 221CD', respectively, define the sealing joint portion 221' in a nearly complementary manner when the wall and shell are closed. The surface 221C'on the carrier junction 214' forms a substantially V-shape that provides a guide to the wall 216' when located on the shell (see, eg, FIG. 3C). Also, in an exemplary embodiment, the carrier door of the carrier sealing joint portion 221'may be placed such that the weight of the wall 216' acts to increase the sealing pressure on the joint portion. As can be understood, the cassettes and components supported by the wall 216'in this embodiment facilitate the sealing of the carrier door and carrier. As seen in FIGS. 3A-3B, the sealing surfaces 222C'and 224CD'are arranged to complement the respective sealing surfaces 222P' and 224PD' on the port 2220 and the port door 2214. FIG. 3B shows a carrier 200'docked into port 2220 and closed with seals 221' and 224'. Closing the seal 222'224' allows the inside of the tool and carrier / chamber to be contaminated, so all exposed surfaces (ie, outside the controlled or isolated chamber inside the carrier or tool). (Surface) is sealed and isolated. As most often seen in FIG. 3B, the generally X-shaped encapsulation 220'provides optimal cleanliness by forming an encapsulation that is sometimes referred to as virtually zero capacitance loss at the junction. To do. As mentioned above, this does not create a substantial pocket or space with an outer surface that exposes the sealing shape of the sealing 220'when either the carrier door or the port door is opened (ie). It means that it becomes the inner surface). This is most often seen in FIG. 3C, but the removal of the port door 2214, and thus the removal of the carrier door 216', does not expose either the unsealed / outer surface to the inside of the carrier / process tool.

As shown in FIG. 3C, in this embodiment, the top opening of the carrier door results in the carrier chamber 202'being placed under an raised cassette held by a wall 216'. The carrier chamber 202'may communicate with the interior of a tool that may have a forced air circulation system (not shown), which may result in a general Venturi flow within the carrier chamber. In this embodiment, the circulating airflow in the chamber of the carrier is located below the components on the raised cassette (hanging from the wall 216'), and the possibility of accumulation of particles disturbed by the circulation is minimal. (Settle away from the above parts). In an exemplary embodiment shown in FIGS. 3A-3C, the carrier 200'may be lifted to join and dock at port 2220 with a suitable lifting device LD. A suitable registration mechanism LDR is provided on the carrier and lifting device, and the carrier may be placed on the device and thus the carrier in relation to the port. In another embodiment, the carrier may be held in the port in any suitable way. The carrier door 216'is secured to the port door 2214 by magnetic fixation, mechanical coupling (eg, placed at the sealed joint between the doors) or vacuum suction generated at the sealed joint between the doors. You may. The port door 2214 is opened / closed by a suitable device capable of indexing a cassette (similar to cassette 210 in FIG. 1) through a desired mapping sensor (not shown).

Here, with reference to FIG. 4, a carrier 300 according to another exemplary embodiment is shown, which is generally similar to but opposite to the carrier 200, having a shell 314 on the top surface of the wall 316. .. Like the carrier 200, the carrier 300 may be either a top open type (the shell acts as a door) or a bottom open type (the wall acts as a door). In the exemplary embodiment shown, the carrier 300 may have an integrated carrier component 300M. For example, the shell (or wall) 314, 316 of the carrier may have rollers or air bearings and a carrier starting support such as a reaction member that can be driven by a drive or motor, thereby the carrier in the FAB. May be self-transporting (ie, without using a separate transport vehicle). FIG. 4 illustrates a carrier 300 placed in loading port 3010 (generally similar to port 2010 described above) for illustrative purposes. In the exemplary embodiment shown, the carrier 300 may be top-mounted on the port junction. The carrier door 316 may be placed in line with or adjacent to the port door 3014 (so as to form a joint), and the shell 314 may be joined to the port 3012. Also, the junction between the carrier 300 and the port may have a 3, 4, or 5 direction "crossed" (or no capacity loss) seal similar to the approximately X seal 220'shown in FIG. 3B. Good. FIG. 4A shows a cross-sectional view of the sealing 320 according to one embodiment. In an exemplary embodiment, the seal 320 may be a four-way seal with a bottom open structure, but is otherwise generally similar to the seal 220'.

FIG. 4B shows another cross section of the junction between the carrier and the port, and the sealing between them, according to another exemplary embodiment. In this embodiment, the sealing 320'is substantially similar to the sealing 320. FIG. 4B further shows that the joint portion 314I'of the shell may have a support flange / mechanism 326' 328'. In this embodiment, the flange 326'may operate the wall 316', eg, the flange overlaps a portion of the carrier door (in the embodiments shown, the mechanism defines the door contact surface, but in another embodiment. In the embodiment, the mechanism does not have to come into contact with the door), and a magnetic fixture 326M'to hold the wall 316'to the shell 314' when the carrier door is closed may be positioned. Further, the mechanism 326'may overlap with the magnetic fixture 3040' in the port door 3014. The magnetic fixture 3040'inside the port door may act to secure the wall 316'to the port door 3014' in order to remove the carrier door. By placing the carrier shell mechanism 326', the port door fixture 3040' (fixing the wall 316' to the port door) is activated, eg at about the same time fixing the wall 316'to the shell 314'. It may be canceled / invalidated. Conversely, upon closing the port door 3014', the port door fixture 3040' is unlocked / disabled so that the magnetic latch 326M'between the wall 316'and the shell 314' is fixed. May be good. In an exemplary embodiment, the external mechanism 328'on the shell may be fitted with the positioning / centering mechanism 3012C'of port 3010' to position the carrier when placed. The shape of the external mechanism 328'shown in FIG. 4B is merely an example, and in another embodiment, the carrier may have any desired positioning mechanism. As described above, in the X structure of the sealing 320', the purging capacity of the sealing joint portion is substantially zero, so that it is not necessary to purge the sealing joint portion before opening the carrier door. In another embodiment (see, eg, FIG. 4B), the port may include a purge line 3010A. The purge line 3010A may be on or in between any sealing joints. FIG. 4C shows another cross section of the carrier-toolport junction according to another exemplary embodiment. The carrier-port junction has a sealing 320 ″ that is generally similar to the sealing 320 described above. In this embodiment, the carrier shell 314'' places the carrier 300'' on the port without loading the port door 3014'' (ie, without distributing the carrier weight on the port door 3014''. , Supporting the carrier 300'' on the port) may have a support 328'' with a carrier door (wall) 316''. The sealing contact with the carrier door seal 321 ″ at the port door remains substantially constant when opening and closing the carrier door.

5A-5C illustrate the carrier 300A, similar to the carrier 300, coupled to the toolport, according to another exemplary embodiment. In the present embodiment, the carrier 300A is of the top opening type and may be loaded on the bottom surface (direction indicated by the arrow + z in FIG. 5A). The carrier shell 316A may act as a carrier door. The most commonly seen sealing joint portion 320A in FIG. 5B may be referred to as a three-way sealing (purge or loss capacity is nearly zero and is similar to the sealings 320, 220 described above). The structure (the joint portion 321A of the wall and the shell, the joint portion 322A of the wall and the port, and the joint portion 323A of the port 3012A and the port door 3014A). In this embodiment, the port door 3014A may be approximately equiangular with respect to the shell 316A. For example, the shell 316A may be attached to the port door 3014A. In an exemplary embodiment, the shell 316A and the port door 3014A are fitted and placed so that the capacitance of the junction between them is minimized. A seal (not shown) may be provided between the shell 316A and the port door to seal the junction between them. As seen in FIG. 5B, the port door, which is 3014A in this embodiment, may have a vacuum port 3010V to purge the junction capacitance between the port door and the carrier door.

With reference to FIGS. 2A-2B again, a carrier-port junction is shown with yet another exemplary configuration. The joint portions 220 and 220'are substantially similar to the exemplary embodiments shown in FIGS. 2A and 2B (bottom loading / top opening type, top loading / bottom opening type, respectively). Sealed joints 220, 220'are approximately "crossed" or X structures (wall 216 and shell 214 joints 221; shell 214 and port joints 222, port 2012 and port door 2014 joints 223, and port doors. It may be a four-way sealing having a joint portion 224) between the door and the wall 216. As can be seen in FIG. 2A, in the present embodiment, the sealing joint portions 222 and 224 are oriented substantially parallel to the relative motion of the joint surfaces (during carrier loading and while closing the port door). It may be placed (eg vertically). That is, the movement of the carrier or carrier door to the closing position does not produce a sealing closure. In this embodiment, one or more of the surfaces forming the sealing joints 222 and 224 operate the sealing section at the sealing joint without substantial frictional contact to close the sealing joint. , For example, may be provided with an inflatable seal, a pressure actuated seal, or an actuable seal such as a shape memory member. The sealing structure described is merely exemplary.

Referring again to FIG. 1, carrier shell 214 may have an external support 240 to handle the carrier. The support 240, for example as a handle, may have any suitable shape. In an exemplary embodiment, the support 240 may be placed on the opposite side of the shell as far away as desired to optimize the handling stability of the carrier. In another embodiment, more or less supports may be provided. Here, with reference to FIG. 6A, the carrier shell 220A is shown with a perforated or recessed member, thin film or filter 260A located adjacent to the bottom surface of the shell. The perforations or recesses in the member are sized and shaped to reduce or reduce the strength of the venturi or vortex created in the shell when the carrier door is opened. In another embodiment, the Venturi or vortex mitigation element may be installed at any other suitable location within the carrier. The carrier 200A is shown with a shell on the bottom surface for illustrative purposes, but in another embodiment the carrier may be on the top surface. Additional flow correction spaces and / or vanes (not shown) may be provided inside the tool to help maintain substantially smooth / laminar flow on the part. FIG. 6B shows the carrier 200B according to another exemplary embodiment. The carrier 200B may have a heat regulator 250 to keep the components in the chamber at different temperatures and then at ambient temperatures. For example, the carrier shell or wall 214B or 216B may have a thermoelectric module that is thermally connected to the component, for example via a cassette support, in order to heat / raise the component to a higher temperature than the surroundings. .. Part temperatures higher than the surroundings drive the particles and prevent water molecules from separating from the part by thermophoresis, preventing contamination when the part is outside the carrier or when the carrier door is open. In another embodiment, any other desired thermal regulator, such as microwave energy, may be used. In other other embodiments, an electrostatic field may be generated around each component to prevent contamination by water molecules and particulates.

Here, with reference to FIGS. 1A-1B, in an exemplary embodiment, the cassette 210 (see also FIG. 1) is fitted with a shelf 210V to support the part on the shelf with a positive holding of 360 °. You may. Each shelf 210V may be formed by one or more shelf seats or supports 210C. As seen in FIG. 1A, in an exemplary embodiment, the cassette shelf support 210C may be installed such that the support substantially straddles the component. Each shelf 210V may have a bulging surface to form a perimeter limit for the parts placed on the shelf. The bulging surface may be tilted (relative to a vertical line) to form a positioning guide 210L for placing the component S. Slope the surface on which the part of the shelf 210V is placed (so that it forms an inclination angle of, for example, about 1 ° with respect to the bottom surface of the part), for example, to ensure that it is the bottom surface of the part within the surrounding exclusion area. May be contacted with. In another embodiment, the component shelves may have any suitable configuration that defines passive component containment. In other other embodiments, the shelves do not have to have passive component containment.

Here, with reference to FIGS. 7A-7B, carriers 200C in closed and open positions, similar to the carrier 200 shown in FIG. 1, according to another exemplary embodiment, are shown, respectively. In this embodiment, the height of the cassette 210B can be changed. If the carrier 200B is closed, the cassette 210B may have a minimum height, and if the carrier door (eg, wall 216B) is open, the cassette may be extended to a maximum height. When the cassette extends from the minimum height to the maximum height, the slope between the parts / shelves of the cassette increases, thus minimizing the height of the carrier when accessed and maximizing the space between the parts. Can be done. In this embodiment, the cassette support 210SB may have a substantially bellows structure. The support may be made from, for example, an aluminum sheet, or any other suitable material (eg, a shape memory material), providing sufficient flexibility without articulated joints. As shown, the support of the cassette may be supported on the upper surface of the carrier wall 216B. The top opening (removing the wall 216B as shown in FIG. 7B) or the bottom opening (removing the shell 214B as shown in FIG. 2B) of the carrier expands the cassette (bellows) support 210SB under gravity. .. The bellows of the cassette is compressed by closing the carrier door. As seen in FIG. 7C, the bellows 210SB may have a component support 210VB on which the component rests. In an exemplary embodiment, the component support 210VB remains at a substantially constant radial position with respect to the adjacent portion 210PB of the bellows as the bellows expands / collapses (thus the relative radius between the component and the component seat). May be molded to avoid moving). As will be appreciated, the bellows cassette may be crushed such that the components within the cassette are actively clamped between adjacent pleated sections 210PB of the bellows. As will be appreciated, the upper clamp portion may contact the component along the peripheral edge of the component. As seen in FIG. 7B, in an exemplary embodiment, a passing beam mapper 2060B, or other suitable device within the tool or carrier, is provided to determine the position of the component S when the cassette is extended. May be done. The component robot (not shown) may also have a sensor for detecting the proximity of the component to ensure proper positioning for gripping the component.

As mentioned above, carriers with passive carrier doors and seals are suitable for direct bonding to vacuum chambers such as load locks. FIG. 8 shows a carrier 200'(top opening type) that is directly coupled to the junction 4010 of the port of a vacuumable chamber (referred to as load lock for convenience) 400 according to another exemplary embodiment. .. The carrier 200'shown in FIG. 8 is generally similar to the carriers 200, 300 described above. In an exemplary embodiment, the load lock opens / closes the port door 4014 and thus opens / closes the carrier door (top wall 216'in this embodiment) and raises / lowers the cassette 210'. It has an indexer 410 that works. In an exemplary embodiment, the indexer 410 may be configured to provide a load lock chamber with a low or minimal Z-direction height. For example, the indexer 410 may be placed outside the load lock chamber 400C and along the load lock chamber to reduce the overall height of the chamber and load lock. In an exemplary embodiment, the indexer 410 may have a driving section 412 and a connecting section 414. In the embodiments shown, the drive section 412 may have, for example, an electromechanical drive system with a motor drive belt or screw drive for raising / lowering the shuttle 416. In an exemplary embodiment, the connecting section 414 may be a magnetic coupling that connects the shuttle 416 on the drive section to the port door 4014. The port door may be, for example, a magnet (permanent or electromagnet) or a magnetic material located on it, forming the inner portion 414I of the magnetic connector 414. Further, the magnet portion 414I of the door 4014 may fix the port door to the port frame 4012. For example, the port frame 4012 works with the magnet portion / magnet 414I on the port door and is a suitable magnet arranged to secure the door to the port when the door is in the closed position (magnet 2028'in FIG. 2B). (Similar to). In an exemplary embodiment, the magnetic fixing element within the port frame may operate with the magnetic coupling portion 414I on the door 4014. In another embodiment, the magnetic connector between the door and the drive and the magnetic fixture between the door and the frame may have any suitable configuration. As seen in FIG. 8, the chamber wall 400W isolates the drive section 412 from the inside of the chamber 400C. In another exemplary embodiment (see also FIGS. 18-19), the drive section 412'operates on the reaction portion 414I' of the port door 4014' and moves the port door with a linear motor (eg, a linear induction motor, LIM). ) May be. The LIM may be located outside the walls of the chamber and isolated from the inside of the chamber. In an exemplary embodiment shown in FIGS. 18-19, the drive unit is a magnetic section that forms a fail-safe fixture to hold the port door 4014'in the open position when power to the chamber is stopped. It may include 4122', or a permanent magnet. In another embodiment, a suitable shock absorber may be connected to the drive to allow the desired control for lowering the port door to the closed position. As can be seen from FIGS. 8 and 18-19, in an exemplary embodiment, the seal between the port door and the port frame is positioned such that the weight of the door facilitates the seal of the joint. ..

Also, in the exemplary embodiment shown in FIG. 8, each section 414I of the magnetic connector may secure the port door 4014 and the carrier door 216'to each other. For example, the carrier door is suitable to be placed in conjunction with a connecting section 414I (eg, an electromagnet with a variable magnetic field, or may include a magnet) when actuating to secure the port and carrier door to each other. It may include a magnet (eg, a permanent magnet) or a magnetic material 228'. In an exemplary embodiment, the movement of the port door may be guided by a guide that is also isolated from the chamber. For example, in the embodiment shown, the bellows 400B connects the port door to the wall of the chamber and isolates the port door movement guide 4006 from the chamber. In this embodiment, the guide generally has a telescoping section. The telescoping guide is shown to be made from a hollow cylindrical telescoping section for illustrative purposes, but in other embodiments it may have any suitable configuration. In other other embodiments, the indexer may have any other desired configuration. For example, U.S. Patent Application No. 10 /, filed July 22, 2003, which allows for controlled movement of a port door without mechanical guidance to the port door, which is incorporated herein by reference in its entirety. Suitable indexing motors, such as those disclosed in 624, 987, may be located within the walls of the chamber, but are isolated from the inside of the chamber. The bellows 400B may be pressurized to facilitate the closing of the port door. The bellows may also accommodate an umbilical system such as a vacuum line connected to the port door and a power / signal line. In an exemplary embodiment, the port door may have a port PD10 connected to a vacuum source forming a pump down port for the chamber, as further described below.

Here, with reference to FIG. 9, the carrier 300'on the vacuum chamber 400'is shown according to another exemplary embodiment. In the exemplary embodiment shown, the carrier 300'may be a bottom open carrier (eg, similar to the carrier 300 described above, see also FIG. 3). In an exemplary embodiment, the port door 4014'may be lowered into the chamber when opened. The indexer (not shown) is similar to that shown in FIGS. 8, 18-19, but is arranged to move the port door downwards. The chamber and port doors may have magnetic fixtures 4028', 4026' to secure the door in the closed position to the chamber frame. In an exemplary embodiment, the port frame may have one or more coil elements 4028'(defining what is sometimes referred to as the side of the frame of the magnetic fixture). The coil element 4028'may be placed in a desired position or may generate a magnetic field acting on the door fixture component 4026'. The magnetic fixture component 4026'on the door may be a permanent magnet or a magnetic material. In an exemplary embodiment, the coil element 4028'is shown to be located within the chamber for exemplary purposes. In another embodiment, the coil element may be located on the outside. The walls of the chamber are isolated from the inside of the chamber. The coil elements may be fixed or stationary with respect to the frame. The magnetic field strength may be reduced if desired in order to reduce the magnetic force within the magnetic fixture and facilitate the movement of the port door. In another embodiment, the coil element may be movable, eg, mounted on the shuttle of the drive system, to form part of a magnetic connector between the port door and the indexer. In another embodiment, the magnetic fixture may be similar to that for fixing the carrier door and carrier described above. Further, the permanent magnet or magnetic body 4026'on the port door 4014' that is magnetically fixed to the frame may provide a connector with an indexer in the same manner as that shown in FIG. The chamber of the embodiment shown in FIG. 9 may also have bellows and port door guides similar to those shown in FIG. The bellows may be pressurized to facilitate lifting of the port door and keep it in the closed position, especially when the carrier door and cassette are placed on the port door. In another embodiment, the chamber may have a bellows with no port door guide inside. The vacuum device may be connected to the port door so as to pump down the chamber through the junction of the port door and the carrier door. Therefore, in an exemplary embodiment, such as the exemplary embodiment shown in FIG. 8, the chamber pump down port may be located within the port door.

With reference to FIG. 8 again, in an exemplary embodiment, the pump down of the load lock chamber may function with, for example, a carrier joined to the chamber port and a port door moved from the closed position by the indexer 410. As can be seen from FIG. 8, in an exemplary embodiment, the pump down of the load lock chamber via the vacuum port PD10 in the port door may pass through the junction of the carrier door 216'and the port door 4014. .. The suction flow of chamber / carrier gas through the joint between the carrier door and the port door creates a negative pressure at the joint, preventing contaminants from accidentally escaping into the chamber. FIG. 10 illustrates pumping down of a load lock chamber through port door 5014 according to another exemplary embodiment. In this embodiment, the port door and carrier door space 5430 and the carrier chamber 202 may be purged prior to pumping down the load lock chamber. For example, the purge gas may be introduced into space 5430 by applying a vacuum and cracking (or suitable valve adjustment) the port door and port seal 5223. The carrier 200 may be purged by cracking the carrier door 216 to allow gas from the load lock chamber 5400 to enter the carrier, or again by suitable valve adjustment. For example, a gas supply from the chamber (shown in the phantom of FIG. 10) may be provided to the carrier in order to introduce the desired gas species into the carrier 200. As seen in FIG. 10A, which illustrates the load lock chamber 5400 and carrier 200 with the port door and carrier door moved to the open position, the load lock chamber 5400 is optionally of a load lock to ventilate the load lock chamber. It may have a vent (or gas type supply) 5440 arranged on the wall. Thus, in an exemplary embodiment, the purge line may be used for parsing and chamber ventilation may be performed independently of the carrier door-port door junction.

FIG. 11 is an exemplary embodiment, wherein each of the carrier door 316A and the port door 6414 has a mechanical "fail-safe" fixture that secures the carrier door and the carrier 3140, and the port door and the port 6412 or the chamber 6400D, respectively. Is illustrated. The carrier 314D, carrier door 316D, port 6412, and port door 6414 may be passive (without articulated fixing parts). In this embodiment, the indexer performs both Z-axis indexing of the port door and rotation of the port door (eg, around the Z-axis) to fit / release the fixed tabs on the port door and carrier door. May be possible. In another embodiment, Z-axis movement and rotation of the port door may be provided via different drive shafts. 12A-12B show bottom views of the carrier shell 314D and carrier door 316D, respectively. 13A-13B show top plans of the (load lock) chamber 6400 and port 6412 in the port door 6414, respectively. In an exemplary embodiment, the lower surface of the carrier shell has a fitting tab / surface 360D fitted by a fitting surface 362D on the carrier door 316D. As can be understood, the fit / release between the fitting surfaces 360D, 362D may be achieved by rotation of the carrier door with respect to the carrier 314D. The rotation of the carrier door is provided by the port door 6414 as described below. In another embodiment, the mating surface between the door and the carrier may have any desired configuration. The carrier door 316D may have a male / female torque coupling mechanism 365D that supplements the torque coupling member on the carrier door 6414T. In the exemplary embodiments shown, port 6412 and port door 6414 may have interlocking or fitting surfaces that are generally similar to the carrier and carrier door fitting function. As most commonly seen in FIGS. 13A, 13B, the port may have a mating surface 6460 (eg, protruding inward), the port door 6414 overlapping and mating with the port surface 6460. It may have a complementary fitting surface 6462. As will be appreciated, in an exemplary embodiment, the mating surfaces 3600, 3620 on the carrier and the mating surfaces 6460, 6462 on the port are located relative to each other as the port door is rotated. , Allows simultaneous mating / releasing between carrier and carrier door and port and port door.

FIG. 14 illustrates a load lock chamber 400E, an indexer 6410E, and a carrier 300E. In an exemplary embodiment, the indexer may be positioned substantially axially in series with the load lock chamber. Similar to the pods 200, 300, 3000, in the exemplary embodiment shown in FIG. 4, the pod 300E may be a vacuum compatible top or bottom opening pod having a mechanism similar to that described above. Good. The chamber 6400E may be similar to the chamber described above. FIG. 15 shows a load lock chamber and carrier 300F with a reduced pump down capacitance configuration. In the exemplary embodiment shown, the carrier door 316F may have a top 350F and bottom 321F doors that seal the carrier shell 314F. The bottom seal 3270F (similar to, for example, seal 221) fits with the shell 314F as shown in FIG. 15 when the carrier door is closed.
The top seal 350F seals the shell of the carrier when the carrier door is opened (eg, the seal 350F may be placed on the carrier sheet surface 351F and seal it). The top-sealed 350F isolates the carrier chamber from the load lock chamber and thus reduces the pump down capacity when the load lock chamber is evacuated by the pump.

16A-16B show the docked and non-docked carrier 300G and load lock chamber 6400G, respectively, according to another exemplary embodiment. The carrier 300G has a bottom wall 316G, an annular section 314G, and a top wall 314PD. In this embodiment, the annular section 314G or one or more portions thereof may operate as a carrier door. The top and bottom walls 316G and 314PD may be fixed to each other, and the movable section 314G defining the door has top and bottom sealing 350G and 321G for sealing the top and bottom walls 316G and 314PD, respectively. It may have both. The load lock chamber 6400G may have an opening port 6402G, through which the carrier 300G may be placed in the load lock chamber, as seen in FIG. 16B. The load lock chamber 6400G may have a recess 6470G for lowering the carrier door 314G to open access to the carrier. The top wall 314PD of the carrier may seal the load lock chamber port, thereby sealing the load lock chamber and allowing the chamber to be pumped down. A suitable elevator may be provided to raise / lower the carrier door 314G. 17-17C show another top sealing carrier 300H and load lock chamber 6400H according to another exemplary embodiment. The carrier 300H may have a top sealing flange 314H and a side opening 304H (along the carrier end for loading / unloading parts). In an exemplary embodiment, the carrier top sealing flange 314H is placed on the edge 6412H of the chamber port and seals it, as best shown in FIG. 17B. The carrier door 314DR may be opened by a radial outward rotational motion, as shown by arrow 0 in FIG. The carrier opening is arranged alongside the slot valve in the load lock chamber. Although exemplary embodiments have been described with reference to load lock chambers, the mechanisms described are equally applicable to load port chambers, as shown in FIG. The interior of the load port chamber may have a control atmosphere, but may be inseparable.

With reference to FIGS. 29A and 29B, schematic plan views of the automated material handling systems 10, 10', according to another exemplary embodiment, are shown. For example, the automated material handling systems 10 and 10'shown in FIGS. 29A and 29B generally include sections 15 of one or more intrabay transfer systems, section 20 of one or more interbay transfer systems, and bay queue sections. 35, transfer siding or shunt section 25, and component carrier or transfer machine. The terms intrabay and interbay are used for convenience and do not limit the placement of transport system 10110'(as used herein, inter refers to sections that generally extend across a large number of groups. Intra generally refers to a section that extends within a group, for example). Sections 15, 20, 25, 35 of the transfer system may be nested together (ie, one transfer loop within another transfer loop) and generally, for example, a 200 mm wafer, a 300 mm wafer, a flat display. Arranged to allow high-speed movement of semiconductor components such as panels and similar items, and / or high-speed transfer of their carriers to and / or, for example, processing bays 45 and related processing tools 30 within processing equipment. .. In another embodiment, suitable materials may be transported in an automated material handling system. The transport system 10 can also direct parts from one transport section to any other transport section. An embodiment of an automated material handling system for transporting parts with interbay and intrabay branches, which is incorporated herein by reference in its entirety, is referred to as "Automated Material Handling." "System", found in the US patent application with serial number 10/697,528.

The configurations of the automated material handling systems 10 and 10'shown in FIGS. 29A and 29B are representative configurations, wherein the automated material handling systems 10, 10'are any desired of the processing bays and / or processing tools in the processing equipment. It may be arranged in any suitable configuration to accommodate the layout of. As seen in FIG. 29A, in an exemplary embodiment, the interbay transport sections 15 are located on one or more sides and are connected to each other by any number of transport sections 20, eg, one or more processing bays 45. May correspond to. In another embodiment, the outer or side transport section may be an intrabay section, and the section traversing between them may link the intrabay section to a group or array of processing tools in the bay. In an exemplary embodiment, the interbay transfer section 15 of FIG. 29A may also be connected by a cross shunt 50, which allows the parts transfer machine to directly interbay transfer without passing through a processing or processing bay 45. Allows you to move between sections 15. In yet another embodiment, the transport sections 15 may be connected to each other by an additional intrabay transport section (not shown). In another exemplary embodiment, as shown in FIG. 29B, the interbay transfer section 15 may be located between any number of processing bays 45, and thus a group of bays or tools between the branch sections. It may form, for example, a generally central islet or transport central route that acts as a 45. In another other embodiment, the intrabay transport section may form a border around it and surround any number of processing bays 45. In yet another embodiment, there may be any number of nested loop sections, such as N systems such as systems 10 or 10'as shown in FIGS. 29A and 29B, each interbaying. It may be connected substantially in parallel by a transport section that directly connects the transport sections 15. In yet another embodiment, the transport sections 15, 20, and the processing tool may have any suitable configuration. In addition, any number of intrabay / interbay systems may be combined together in any suitable configuration to form a nested processing array.

For example, the interbay transport section 15 may be a modular truck system that provides the movement of any suitable component transporter. Each module of the truck system is provided with suitable coupling means (eg, interlocking facets, mechanical fasteners) to allow the modules to couple ends to each other during installation of the intrabay transfer section 15. You may. Rail modules may be provided in any suitable length, such as a few feet, or in any suitable shape, such as straight or curved, for handling and configuration flexibility during installation. The truck system may support the parts carrier from below, or in another embodiment, the truck system may be a suspended truck system. The track system may have roller bearings or any other suitable bearing surface to allow the parts carrier to move along the track without subject to significant resistance on the rollers. Roller bearings may be tapered to provide additional directional stability as the parts container moves along the track, or the tack may be angled inside the curve or towards the corners of the track. May be good.

The intrabay transfer section 15 may be a conveyor system transfer system, a cable and pulley or chain and sprocket system transfer system, a wheel drive system, or a magnetic induction system transfer system. The motor used to drive the transfer system may be any suitable linear motor capable of moving the parts container along the intrabay transfer section 15 and traveling indefinitely. The linear motor may be a solid-state motor with no moving parts. For example, the linear motor may be a brushed or brushless AC or DC motor, a linear induction motor, or a linear stepper motor. The linear motor may be incorporated into the intrabay transfer section 15 or the parts transfer machine, or the container itself. In another embodiment, any suitable drive means may be incorporated to drive the component transfer machine through the intrabay transfer system. In yet another embodiment, the intrabay transport system may be the aisle of a self-contained transport vehicle with wheels without a truck.

As described below, the intrabay transport section 15 generally uses a queue section and a shunt to allow the parts carrier to move at high speed uninterrupted along the aisle of the intrabay transport section 15. Or allow it to flow. This is a great advantage compared to traditional transport systems where the flow of material must be stopped when a transport container is added or removed from the transport line.

As mentioned above, in an exemplary embodiment, the intrabay transfer section 20 may define a processing or processing bay 45 or may be connected to an interbay transfer section 15 through a queue section 35. .. The queue section 35 is located, for example, on either side of the interbay or intrabay transfer sections 15 and 20 and is a flow of material along the interbay transfer section 15 or a flow of material along the intrabay transfer section 20. Either part or component container may be allowed to enter / exit the intrabay transfer section 20 without stopping or decelerating. In an exemplary embodiment, the queue section 35 is schematically shown as a discontinuous section from the transport sections 15 and 20. In another embodiment, the queue section, or the queue aisle between the transport sections 15 and 20, may be formed integrally with the transport section, but defines a discontinuous queue in the transport passage between the transport sections. To do. In another embodiment, the queue may be placed in the interbay and intrabay sections, if desired. An embodiment of a transport system having a traveling lane and an access or queuing lane that allows selective access to the inside and outside of the traveling lane without impairing the traveling lane is given the name "Transportation System", serial number 1. It is described in the US patent application No. 11 / 211,236, which is incorporated herein by reference in its entirety. The intrabay transport section 20 and the queue section 35 may have a truck system similar to that described in the interbay transport section 15 above. In another embodiment, the intrabay transport section and the queue section connecting the intra and inter transport sections may have any suitable configuration, shape or form and may be driven in any suitable manner. As most often seen in FIG. 29A, in an exemplary embodiment, the queuing section 35 comprises the loading section 35A and the fetching section 35B corresponding to the traveling directions R1 and R2 of the intrabay and interbay transport sections 20 and 15. You may have. As is customary herein used for illustrative purposes, section 35A is defined as the inlet to section 20 (out of section 15) and section 35B is the exit from section 20 (inlet to section 15). / Defined as an outlet. In another embodiment, the direction of travel of the queue section may be established, if desired. As described in more detail below, the parts container may exit the interbay transport section 15 via the loading section 35A and enter the interbay transport section 15 via the unloading section 35B. The queue section 35 may have any suitable length that allows the parts carrier to enter and exit inside and outside the transport sections 15 and 20.

The intrabay transfer section 20 may extend within the aisle or path connecting any number of process tools 30 and transfer systems 10, 10'. Intrabay transport sections 20 may also connect two or more interbay transport sections 15 to each other, as shown in FIG. 29A and described above. Intrabay transport sections 20 are shown in FIGS. 29A and 29B to have a closed loop shape, however, in another embodiment, they may have any suitable configuration or shape and may have any suitable configuration or shape. It may also be applicable to production equipment placement. In an exemplary embodiment, the intrabay transport section 20 may be connected to the process tool 30 by a transport siding or shunt 25 which may be similar to the queue section 35. In another embodiment, the shunt may be provided to the interbay transport section in a similar manner. The shunt 25 efficiently "offline" the parts carrier and has, for example, a loading section 25A and an fetching section 25B corresponding to the traveling direction R2 of the interbay transport section 20 as seen in FIG. 29A. The shunt 25 allows the parts carrier to exit the intrabay transport section 20 through the loading and unloading sections 25A, 25B without interrupting the substantially constant velocity flow of the parts carrier on the intrabay transport section 20. , And allows you to get in there. While in the shunt 25, the parts container stops, for example, at the tool joining station corresponding to the position of the process tool station 30, eg, the pre-process module of the equipment, the sorter, or any other suitable transfer robot. The parts and / or the container itself may be transferred to the processing tool loading port or any other suitable part staging area by, or through any suitable means of transfer, such as. In another embodiment, the parts carrier may be directed to a desired shunt to perform a sort (eg, swap) of the carrier in any transport section.

Replacement of component carriers or conveyors from and between different sections 15, 20, 25, 35 may be controlled by a guidance system (not shown) connected to a controller (not shown). The guidance system may include a positioning device that defines the location of the carrier moving along sections 15, 20, 25, 35. The positioning device may be of any suitable type, such as a continuous or distributed device such as an optical, magnetic, barcode, or reference strip that extends along or across sections 15, 20, 25, 35. The distributed device is a suitable read installed on the carrier to allow the controller to position the carrier on sections 15, 20, 25, 35 in addition to checking the motion state of the carrier. It may be read or examined by the device. Alternatively, the device may sense and / or examine sensing items such as a carrier, component carrier, or RFID (radio frequency identification device) on the component to identify position / motion. Positioning devices can also be distributed devices that can sense the position of a moving carrier, separate positioning devices (eg, laser ranging devices, ultrasonic ranging devices, or internal positioning systems similar to internal GPS, or internal. Inverse GPS) alone or a combination thereof may be included. The controller may combine position feedback information from the carrier with information from the guidance system to establish and maintain a carrier path along or between sections 15, 20, 25, 35.

In another embodiment, the guidance system is a groove, rail, track, or any other suitable structure that forms a structural or mechanical guidance surface to interlock with the mechanical guidance function of the parts carrier. May include or have. In yet another embodiment, sections 15, 20, 25, 35 are also printed strips or wires that provide electronic guidance to the parts carrier (eg, suitable electromagnetics detected by a suitable guidance system for the carrier). It may include a transmission line such as a transmission line that transmits a signal).

Further, with reference to FIGS. 29A and 29B, exemplary operations of the transport systems 10 and 10'are described. For example, the parts container placed in the shunt 25 may enter the transport system 10, 10'. The parts container may access the interbay transport section 20 via the shunt 25 in order to maintain a substantially uninterrupted, generally constant velocity flow of the intrabay transport section 20. The parts transfer machine accelerates in the shunt 25 so that the transfer machine travels at the same speed as the material flow in the intrabay transfer section 20. The shunt 25 allows the parts carrier to accelerate, thus allowing the carrier to accelerate the intrabay carrier section 20 without obstructing the flow or colliding with any other carrier traveling within the interbay carrier section 20. Can join the flow of. At the confluence with the intrabay section 20, the parts carrier does not collide with any other component carrier or carrier, or slows down the carrier traversing the intrabay section. You may wait in the shunt 25 for suitable run intervals to allow you to freely enter the flow of the transport section. The parts carrier continues to operate along the intrabay transport section 20 (eg) at substantially constant speed and switches to the withdrawal queue area or section 35B, eg, the interbay section 15, with priority. In one embodiment, if there is no space in the withdrawal queue section 35B, the carrier will continue to travel around the intrabay transport section 20 with priority until the withdrawal queue section 35B becomes available. May be good. In another embodiment, for example, a cross shunt is provided to connect the opposing aisles of the aisle to return to the bypassed station without traveling through the entire loop of the aisle, and the aisle is provided with the aisle. You may be able to go back and forth between them. The carrier waits in the bay of the take-out queue section 35B for a suitable operating interval, then accelerates, and in an interbay transport section 15 in a manner substantially similar to the confluence of the intra-bay transport section 20 described above. It may join a generally continuous and constant velocity flow. The carrier may move, for example, to the connected queue entry section 35A to continue along the interbay transport section 15 at a generally continuous speed and enter the desired intrabay section 20. In one embodiment, if there is no space in the fill queue section 35A, the carrier will be around the intrabay transport section 15 in a manner similar to that described above until the fill queue section 35A is available. May continue to progress. The carrier may wait at the input queue section 35A for a suitable operating interval and accelerate to join the second intrabay transport section 20, again the second intrabay transport section 20. , Has a continuous constant velocity flow. The transfer machine is transferred from the second intrabay transfer section 20 to the transfer shunt 25 where the transfer machine joins the process tool 30. If the shunt 25 does not have space for the carrier due to other carriers in the shunt 25, the carrier will have priority along the perimeter of the intrabay transport section 20 until the shunt 25 is available. May continue to progress. The system is at the height of the parts carrier between the processing bays and the processing tools because the flow of material in the interbay transfer section 15 and the intrabay transfer section 20 is substantially uninterrupted and travels at a generally constant velocity. The processing amount can be maintained.

In an exemplary embodiment shown in FIG. 29A, the transfer machine is via an extension 40 capable of directly connecting the queue section 35, processing tools, intrabay transfer section 20, or interbay transfer section 15 to each other. It may proceed directly between processing bays. For example, as shown in FIGS. 29A and 29B, the extension 40 connects the queue sections 35 together. In another embodiment, the extension 40 may provide access from one processing tool to another by connecting transport shunts for each tool as well as the shunt 25. In yet another embodiment, the extension may directly connect with any number or combination of elements of the automated material handling system to provide a short access route. In larger nested networks, the extension 40 may result in shorter passages between transporter destinations, reducing transporter travel time and further improving system productivity.

In yet another embodiment, the flow of the automated material handling systems 10, 10'may be bidirectional. Transport sections 15, 20, 25, 35, 40, 50 have side-by-side parallel lanes, each with an exit ramp and an inlet ramp that loop and connect around opposite traveling lanes, moving in opposite directions. You may. Each parallel lane in the transport section may be dedicated to any direction of travel, and each parallel lane is flipped according to the transport algorithm so that each travel of the individual parallel lanes meets the transport loading conditions. As such, they may be switched separately or simultaneously. For example, the flow or transfer of material along the parallel lanes of the transfer sections 15, 20, 25, 35, 40, 50 may flow in their separate directions. However, later, some parts carriers are located in the equipment and move along these parallel lanes in the direction opposite to the current flow direction, leading to more efficient positions, and then the direction of travel of the parallel lanes. It is expected that it may be reversed.

In another embodiment, bidirectional traveling lanes may be stacked (ie, one is on top of the other). The junction between the process tool and the transfer shunt 25 is from the shunt to the loading port of the process tool, for example, when the shunt with the clockwise material flow is located above the counterclockwise material flow. It may have an elevator-type configuration to raise or lower the carrier. In another embodiment, the two-way shunt and other transport sections may have any suitable configuration.

FIG. 20 shows a portion of a transport system truck 500 of a transport system for transporting carriers between tool stations, according to another exemplary embodiment. The track may have a solid-state conveyor system similar to that described in US Patent Application Serial No. 10 / 697,528, which is incorporated by reference as described above. The track may have a stationary forcer segment that works with a reaction portion that is integral with the shell / casing of the carrier. As a result, the carriers may be conveyed directly by the conveyor. The transport system 500 shown is in an asynchronous transport system in which the carrier carrier is substantially isolated from the movement of other carriers on the transport system. The truck system is configured to eliminate other determinants of carrier movement that affect the transport speed of any carrier. The conveyor truck 500 feeds carriers away from the main aisle to change routing and / or join with tool stations (shufflers, stockers, etc.) without interfering with the aisle on the main aisle. A main transport passage having a branch passage (see also FIGS. 297-298) is adopted. Suitable examples of transport systems with bifurcated on / off aisles are disclosed in U.S. Patent Application Serial Numbers 11 / 211,236, which are incorporated by reference as described above. In this embodiment, segments 500A, C, D have a winding set for an A1-D linear motor and may move along a main passage 500M, which is shown in FIG. 20A. .. Segment 500B is shown, for example, in FIG. 20 as an off / exit to a passage that may be referred to as access passage 500S. The windings of the forcer within this segment are in the actual two-dimensional plane to allow both movement along the main passage 500M and, if desired, movement of the carrier along the passage 500S (see FIG. 20B). Arranged to provide a motor. The motor controller is similar to the distributed control structure described in U.S. Patent Application Serial No. 11 / 178,615, filed July 11, 2005, which is incorporated herein by reference in its entirety. , It may be a region type controller. In the present embodiment, the drive unit / motor is a region type and may be efficiently controlled by a region controller that appropriately delivers between regions. Conveyor 500 may have suitable bearings to support the carriers in a movable manner. For example, in segments 500A, 500C, and 500D, bearings (eg, rollers, balls) may allow one degree of freedom of movement of the carrier along the passage 500M.

The bearings in the segment 500B may allow two degrees of freedom of movement of the carrier. In other embodiments, the bearings may be provided on the carrier. In yet other embodiments, air bearings may be used to movably support carriers on the track. Guidance of carriers between aisles 500M and directions to aisles 500S are provided by suitable guidance systems such as movable or articulated wheels on carriers, articulated guide rails on trucks, or magnetic maneuvers as shown in FIG. 20B. You may.

FIG. 20A illustrates an exemplary transport element 500A for system 500. An exemplary embodiment shown illustrates a segment having a single traveling lane or aisle (eg, aisle 500M). As seen in FIG. 20A, in an exemplary embodiment, the segment has a linear motor portion or forcer 502A and a support surface 504 (A) for the start-up support on the conveyor. As mentioned above, in another embodiment, the transport segment may have any other desired configuration. In an exemplary embodiment, the guide rail 506A may be used to guide the carrier. In another embodiment, the transport segment may have magnets or magnetic bearings instead of the rails that guide the transporter. Electromagnets on the carrier may be used to help separate the carrier from the track. FIG. 20B illustrates another transport segment of transport system 500 according to another exemplary embodiment. Segment 500A'may have multiple travel lanes (eg, intersecting lanes similar to segment 500B shown in FIG. 20) or nearly parallel main travel lanes (similar to passage 500M) that switch between them. As seen in FIG. 20B, in an exemplary embodiment, the traveling lanes (similar to passages 500M, 500S) are generally defined by the 1-D motor section 502A1 and the corresponding carrier drive support surface / area 504A'. Will be done. The intersection or switching between the traveling lanes is formed by an array of 2-D motor elements capable of producing the desired 2-D force on the carrier to traverse between the traveling lanes 500M', 500S'.

FIG. 21 shows an intersection of a conveyor system or a rotating segment of a conveyor according to another exemplary embodiment. In the exemplary embodiment shown, the transport segment 500A ″ defines a plurality of intersecting travel lanes 500M ″, 500S ″. The traveling lane is generally similar to lane 500M (see FIG. 20A). In an exemplary embodiment, the transport vehicle may traverse any lane 500S ″, 500M ″ until it is approximately aligned with the intersecting lanes. When aligned, the 1-D motors in the desired lane begin moving the carrier along the intersecting lanes. In another embodiment, the intersection does not have to be oriented at 90 °. FIG. 20C shows the bottom surface of the carrier 1200 and the reaction elements therein. As can be understood, the reaction elements may be arranged at the intersection to match the orientation of each forcer section (see, eg, FIG. 21). This allows the carrier to change tracks virtually without stopping. FIG. 20D shows the reaction element 1202FA placed on the axis section of the carrier 1200A according to another exemplary embodiment, the reaction element may be rotated to a desired position. FIG. 22 shows a track segment 500H ″ ″ that has a storage position 500S ″ ″ beside the track and is generally similar to the intersection of FIG. 23-23A show a truck segment 500 further having a cutout or opening 1500O for a carrier lift or shuttle lift arm (not shown) as described below. In an exemplary embodiment, the opening 1500O allows lateral access to the carrier in order to grab the carrier from the track of the conveyor to the bottom. FIG. 24 shows a track segment 2500A where the forcer (such as a linear motor) 2502A is offset from the carrier / track centerline indicated by the arrow 2500M.

25A-25B show a linear motor conveyor 3500 (having a forcer segment installed in a carrier 3200 and a built-in reaction element) for transporting a substrate within a semiconductor FAB. In the exemplary embodiment shown, the conveyor 3500 may be flipped so that the carriers can be accessed from directly below (eg, the carriers are suspended from below the conveyor and located under the conveyor). In other respects, the conveyor 3500 may be similar to the segments 500A, 500A ″, 500A ″ of the transport system described above. In an exemplary embodiment, a magnetic retention forcer 3502 may be employed to maintain the connection between the conveyor 3500 and the carrier 3200. This force may be generated specifically from a linear motor coil provided for this purpose (eg, one with a linear synchronous design) and / or via a separate electromagnet and / or permanent magnet (not shown). .. The connection and division of the carrier and the conveyor is rapid and may be achieved without moving parts (eg, electromagnet switches). Fail-safe operation may be guaranteed via a magnetic path between the carrier and the conveyor and / or a passive mechanical holding mechanism.

In an exemplary embodiment, intersections and bifurcations (ie, confluence-differentiation positions similar to, for example, segment 500B in FIG. 20) may be achieved by coil switching. In another embodiment, a rotary table or other rotating device may be used to transfer carriers between the traveling passages of the conveyor 3200.

In an exemplary embodiment, the carrier 3200 may be arranged such that the reaction element is on the top surface and the substrate is accessed from the bottom surface of the carrier. In an exemplary embodiment, the carrier 3200 may have a magnetic platen placed in conjunction with the forcer of the conveyor 3500. The platen, or platen section of the carrier, may include rollers, bearings, or other starting support surfaces (eg, reaction surfaces to air bearings in the conveyor). The platen may also include an electromagnet connector that allows the container portion of the carrier to be separated from the platen portion that may remain connected to the conveyor when the component container portion is loaded onto the processing tool 3030.

In an exemplary embodiment, to load the tool, the conveyor 3200 places the carrier in the tool loading port and lowers the carrier from the altitude of the conveyor to the (control environment) loading junction 3032 of the tool 3030, eg vertical. A transfer-only mechanism 3040 may be used (see FIGS. 26A-26B). A vertical transfer device may also be used as an indexer to place wafers for access by wafer handling robots. Suitable examples of vertical transfer devices are described in US Patent Application Serial No. 11/210,918, filed August 25, 2005, which is incorporated herein by reference as described above. To.

In another embodiment, the conveyor is an engine-equipped wheel that stacks conveyors placed in an inverted arrangement and may have a magnetic attraction suitable for holding the carrier on the wheels of the conveyor. In another other embodiment, the overall arrangement may be reversed such that the conveyor is below the loading port and the carrier has a reaction mechanism on the top surface.

26A-26B show other embodiments in which the carrier is lowered / raised directly from the transport system to the loading port / tool junction. In the exemplary embodiments shown in FIGS. 26A-26B, the carrier may have a reaction platen that integrates with the carrier. In other embodiments, as described above, the platen may be removable from the carrier, for example, remaining on the conveyor when the carrier is removed / remaining connected to the conveyor. In such cases, each platen in the transport system corresponds to a carrier in the FAB in a substantially 1: 1 relationship.

FIG. 27 illustrates a carrier 4200 with a conveyor carrier composite configuration according to another exemplary embodiment. A carrier carrier 4200 may be provided to automate the transport of payloads (carriers including semiconductor substrates, etc.). The carrier may be equipped with stored energy for self-propelling, a steering system, at least one motor-engined drive wheel, sensors for mileage measurement and obstacle detection, and related control electronics. In addition, the carrier has one or more reaction elements (similar to the magnetic platen described above) that can be interlocked with the forcer segment of the stationary linear motor of the conveyor 4500, similar to the conveyor system 500 (see also FIG. 20). You may equip it.

In an exemplary embodiment, when the carrier 4200 travels along a passage (similar to passages 500M, 500J) defined by one or more forcer segments, the drive motor is disconnected from the drive wheels and the carrier is , May be passively prompted along the aisle by an electromagnet connector having a reactive element in conveyor 4500. When the stored energy devices in the carrier (eg batteries, supercapacitors, flywheels, etc.) need to be charged, the movement of the traction wheel along the track is used to convert the energy from the linear motor into the carrier's storage. You may. In the case of electrical energy storage, this may be achieved by reconnecting a haul vehicle drive motor used as a generator with suitable monitoring and conditioning electronics. Such "on-the-fly" charging has the advantages of ease and durability, and the arrangement provides significant flexibility and fault tolerance. For example, the carrier 4200 may be able to travel past spontaneously non-functioning conveyor segments, around obstacles, or between work areas where the conveyor is unavailable (see FIGS. 27A, 28B). The number and length of the forcer segments of the conveyor may be adjusted according to the motion plan of the conveyor or the like for the interbay carrier, for example, the self-sustaining motion of the bay and the carrier may be used. Self-sustaining steering may be used for flexible route selection. Self-contained cornering can be used to remove curved forcer segments. High speed travel may be actuated along the running of the conveyor and, if desired, separated from the operator by a safety barrier. Conveyor sections may be used for long-distance travel such as links to adjacent FABs. Conveyors may be used for grade changes and dedicated stored energy may be used to mitigate the problems faced by the carrier.

FIG. 28 shows another embodiment of the integrated carrier and transport vehicle. In an exemplary embodiment, each carrier 5200 is a carrier, as compared to conventional carrier-based semiconductor automation in which the carrier is delivered to a carrier component carrier in the FAB. In an exemplary embodiment, the integrated carrier / carrier 5200 may be similar to the carrier 4200 described above. In another embodiment, the carrier carrier may have the desired carrier mechanism. In an exemplary embodiment, the carrier 5200 may include an integral portion of an integral carrier 5202 and a carrier 5204. Carrier 5202 is shown in FIG. 28 as a front / side opening type for illustrative purposes. In another embodiment, the carrier may be of the top opening type or may have any other suitable component transfer opening. The carrier may go directly to the loading port to which the parts are transferred, or may be fitted with another automated component, such as another tool shock absorber. By fixing the carrier 5202 and the carrier 5204 almost permanently, the time waiting for the free carrier to be delivered and the associated delivery time variance are eliminated when lot transfer is desired. In addition, the carrier carrier 5200 can eliminate the movement of "empty vehicles" and thus reduce the total traffic on the carrier network and increase the system capacity. In another embodiment, the carrier and carrier may have a connection to separate the carrier from the carrier. Carriers in the system may be assigned to carriers in a 1: 1 relationship to eliminate delays in carrier transport waiting for the carrier, but either in a limited event (eg, carrier or parts carrier section). System knowledge of suitable controllers may be used to allow separation in repair / maintenance). Otherwise, the carrier and carrier remain an integral unit during transport or when mating with the FAB's tool loading station or other automated components.

FIG. 29C shows a horizontally arranged buffer system in which the conveyor system 500 (or any other desired carrier transfer system) and the tool station 1000 may be joined according to another exemplary embodiment. A plan view of 6000 is shown. The buffer system may be located below or part of the tool station, or above the tool station. The buffer system may be placed away from the operator's access path (ie, below or above). FIG. 30 is a front view of the buffer system. Figures 29C-30 show a buffer system located on one side of the conveyor 500 for illustrative purposes. The buffer system may be extended to cover only the desired size of the FAB floor. In the exemplary embodiment shown, the operator's aisle may be lifted above the buffer system. Similarly, the buffer system may extend anywhere within the FAB overhead. As seen in FIGS. 29C-30, in an exemplary embodiment, the buffer system 6000 is a shuttle system 6100 (which may have a suitable carrier lift or indexer) capable of at least three-dimensional movement and a buffer station ST. May include an array of. In general, the shuttle system may include a guidance system 6102 (eg, rail) for one or more shuttles 6104 capable of at least two-dimensional movement on the guidance system. The arrangement of the shuttle system illustrated in FIGS. 29C-30 is merely exemplary and in another embodiment the shuttle system may have any other desired arrangement. In an exemplary embodiment, the shuttle system reciprocates or joins the conveyor 500, the buffer station ST, and the tool loading station LP (see FIG. 29C). The shuttle 6102 traverses between the horizontally arranged conveyor 500 (eg, via access lane 602 between segments 600 of the conveyor) and the buffer storage ST or loading position LP on the tool station to reciprocate the carrier 200. be able to. As most often seen in FIG. 30, in an exemplary embodiment, the shuttle 6104 may include an indexer 6106 for grabbing a carrier / placing it on a conveyor 600, or a buffer station ST or tool loading port LP. The buffer system may be configured in a modular form so that the system can be easily expanded or contracted. For example, each module may have a corresponding storage position ST and shuttle rail, as well as a coupling joint for joining other attached modules of the buffer system. In another embodiment, the system may have a buffer station module (having one or more integrated buffer stations) and a shuttle rail module that allows modular attachment to the shuttle rail. As seen in FIG. 29C, the access lane 60L of the conveyor 500 may have a shuttle approach that allows the shuttle indexer to access the carrier through the conveyor lane. FIG. 31 shows a cross section of the buffer system 6000 leading to the confluence / differentiation lane of conveyor 500. In an exemplary embodiment, the buffer system shuttle 6104 may access a carrier directed to the access lane of the conveyor. Stops (or lack of access paths similar to lane 602 shown in FIG. 29C) may limit the shuttle from accessing or interfering with the traveling lanes of the conveyor. FIG. 32 is yet another cross section showing a plurality of rows of buffer stations. The buffer system may have any desired number of rows and desired number of buffer stations. The longitudinal travel of the shuttle (in the direction indicated by the arrow Y in FIG. 32) may be adjusted by modular replacement of the longitudinal guide 11087, if desired. In another other embodiment, the buffer station is in multiple horizontal planes or tiers (ie, two or more tiers vertically separated (carrier heights can pass between tiers)). It may be arranged. Multilayer buffers may be used with reduced capacitance carriers. FIG. 33 shows another plan view of the shock absorber system having a junction with the guided carrier V. FIG. 34 shows a front view of the overhead shock absorber system 7000, which is otherwise similar to the tool bottom shock absorber system 6000 described above. The overhead buffer system 7000 may be used in conjunction with a subtool buffer system (similar to system 6000). An overhead buffer system that joins with the overhead conveyor 500 is shown. In another embodiment, the overhead system may be joined to a floor conveyor system or a floor-based carrier. Suitable control connections (eg, stiff) are provided to prevent the low-payload shuttle from traversing horizontally and may act on the vertical clearance of the aisle. An upper shield over the aisle may be used to prevent the suspended load from crossing the aisle space.

FIG. 35 shows the annular buffer system 8000. The buffer station ST of the system may be movable and the truck 8100 moves the buffer station ST between loading positions R where the carrier can be loaded onto the buffer station ST and loading station LP at the tool junction (eg, with overhead loading). It may be mounted on (in an exemplary embodiment, it is shown as a closed ring). The tool junction may have an indexer for loading the carrier onto the tool station.

Here, with reference to FIGS. 36A to 36C, a perspective view, a side view, and a bottom view of the substrate carrier 2000 according to still another exemplary embodiment are shown. Carrier 2000 is a representative carrier and is shown to have an exemplary configuration. The carrier 2000 in the embodiments shown is illustrated as a bottom-opening carrier for illustrative purposes, but in another embodiment the carrier is any other desired configuration, such as a top-opening or side-opening carrier. May have. Carriers 2000 in the exemplary embodiments shown in FIGS. 36A-36C may be generally similar to carriers 200, 200', 300 shown in FIGS. 1-3, and similar mechanisms are numbered similarly. .. Thus, the carrier 2000 has a shell or casing 2012 having one or more openings 2004 (for illustrative purposes, only one opening is shown in FIGS. 36A-36C), through which the wafer becomes a carrier. / May be transported from the carrier. The shell of the carrier may have a movable wall or section 2016 that may form an opening closing door that closes the individual openings 2004. As mentioned above, in the exemplary embodiments shown, the shell 2012 may have a bottom wall 2016 that is movable to open and close the opening 2004. In another embodiment, any other section or wall of the carrier shell may be movable to allow the wafer to be transported in and out of the carrier. The movable section 2016 may be sealed in the remaining casing 2014 in a manner similar to that shown and described above, where the casing is, for example, an inert gas, a pressure or vacuum height different from the ambient atmosphere. It may be possible to maintain an isolated atmosphere such as clean air. The shell 2014 and the movable wall 2016 may be passive structures similar to the wall 216 and shell 214 described above and may be secured to each other, for example by magnetism or any other desired passive fixture. May be good. In an exemplary embodiment, the wall 2016 may include a magnetic element 2016C (eg steel) and the shell 2014 may have a magnetic switch 2014S that is actuated to secure and release the wall and shell. .. Magnetic elements in the wall and actuable magnets 2014S in the shell secure the carrier door (either the wall or shell, see FIGS. 36A, 36C) to the port door and unlock the carrier door from the rest of the carrier. As such, it may be configured to interlock with a magnetic fixture within the port door joint (as described further below). In another embodiment, the magnetic fixture between the wall and the shell may have any other desired configuration. The passive metal carriers 2000 and carrier doors 2016, 2014 provide vacuum-compatible, clean and washable carriers.

In the exemplary embodiment shown in FIGS. 36A-36C, the carrier 2000 is illustrated with a configuration for transporting a plurality of wafers. In another embodiment, the carrier may be a single wafer with or without an integrated wafer shock absorber, or the desired dimensions for carrying any desired number of wafers. Similar to the carriers 200, 200', 300 of the exemplary embodiments described above, the carrier 2000 may be a carrier with a reduced or smaller lot size as compared to conventional 13-25 wafer carriers. As most commonly seen in FIGS. 36A-36B, the shell of the carrier may have a transport system junction section 2060. The transport system junction section 2060 of the carrier 2000 may be arranged to join any desired transport system, such as a conveyor system similar to that shown in FIGS. 20-30. For example, the carrier is a steel magnetic pad or member that is placed or connected to the carrier casing and can work with the forcer section of the linear or planar motor of the conveyor of the conveyor system to propel the carrier along the conveyor. Etc. may be included. An example of a suitable configuration of a linear or planar motor reaction element connected to a carrier casing is incorporated herein by reference in a US patent application serial filed on October 30, 2003. No. 10 / 697,528. Also, in an exemplary embodiment shown in FIGS. 36A-36C, the joining portion section 2060 of the carrier supports the carrier from the transport system when it moves on and / or rests on the transport system. It may have a carrier support member or surface 2062 that may be joined to the transport system. The support surface may be a non-contact or contact support surface, on or with a side surface (eg, surface 2062S) or a bottom surface (eg, surface 2062B) to stably support the carrier from the transport system. They may be placed facing each other, or they may be placed at any other desired position or facing position. The non-contact support surface may be, for example, a substantially flat area, surface, or pad, connected to or placed on the casing, formed by any suitable means, and stably retains the carrier. As possible (based on either the air bearing alone or in combination with the starting force (eg, magnetic force) applied by the transfer system motor), it can interact with the air bearing (not shown) of the transfer system. In another embodiment, the carrier casing is floating (eg, non-contact) but is (passive) air (or any other desired gas) in order to stably support the carrier from the transport system structure. There may be one or more (active) air bearings directed at the (specific) transfer system structure. In this embodiment, a suitable source of air / gas for feeding into the carrier's air bearings (eg, a fan or gas pump) may be connected to the carrier. In another other embodiment, the carrier casing and transfer system have both active and passive air bearing surfaces (eg, lift air bearings in the transfer system and horizontal induction air bearings in the carrier). You may. The carrier 2000 may have other handling members, such as a flange or surface such as a handling flange 2068 as shown in FIG. 36B.

In an exemplary embodiment, the carrier 2000 may have a tool joining portion section (tool interface section) 2070 as a coupling interface that allows the carrier to join the loading section (eg, loading port) of the processing tool. The processing tool may be of any kind. In an exemplary embodiment, the junction (interface) 2070 may be located on the bottom surface of the carrier. In another embodiment, the carrier may have a tool junction (tool interface) on any other desired aspect of the carrier. In yet another embodiment, the carrier may have multiple tool joining portions (eg, bottom and sides) that allow the carriers to join the tools in different configurations. The tool junction section 2070 of the carrier 2000 in the exemplary embodiment is most commonly found in FIG. 36C. The configuration of the tool junction section section 2070 shown in FIG. 36C is merely exemplary, and in another embodiment the carrier may have a tool junction section with any other desired configuration. In an exemplary embodiment, the junction section section 2070 has a mechanism and generally with the appropriate SEMI standards for carriers (SEMI E.47.1 and E57, as well as any other suitable SEMI or other standard). All of these standards may be adapted and are incorporated herein by reference in their entirety. Thus, in an exemplary embodiment, the carrier junction section 2070 receives primary and / or secondary KC pins (not shown) located at the conventional loading port junction. It may include a kinematic connection (KC) receiver arranged in accordance with 47.1 and E57. Also, the carrier junction 2070 may have a section with one or more information pads that comply with the carrier's SEMI standards. In another embodiment, the carrier junction section may not be provided with one or more SEMI-designated mechanisms (eg, the junction section may not be provided with a kinematic connection mechanism). Nevertheless, a spare area corresponding to the mechanism may be provided on the side joint portion of the casing. Thus, in an exemplary embodiment, the carrier junction section 2070 may be capable of joining the carrier 2000 to the conventional loading junction of conventional processing tools. To attach the carrier to a loading port that connects the carrier to the process environment (or to maintain a vacuum in the processing equipment, for example), as can be understood and as described with respect to the embodiments described above. Carriers can be bonded so that the interior is substantially sealed to the treatment environment and the surface, sometimes referred to as the dirty surface on the carrier, is substantially isolated and separated from the treatment environment. desirable. As can be understood, the carrier / loading port contacts the junction to seal the carrier, and the kinematic connection between the carrier and the loading port is the carrier and loading port, as described above. Excessive constraints may occur between and. In order to alleviate excessive restraint, the kinematic connection between the carrier and the loading port may be compliant and the carrier may be repeatedly positioned at the loading port junction. Concatenated compliance may be triggered by a preload from the loading port junction. Here, with reference to FIG. 36E, a schematic cross-sectional view of a typical joint portion (interface portion) 2272 of the compliant kinematic connector 2072 according to an exemplary embodiment is shown. Generally, the connecting joint (connecting interface) portion 2072 may be arranged with pins 2274 and grooves or detents 2276 to allow excessive restraint on the carrier to any desired degree of freedom (eg, tilting, rolling, rocking of the carrier). Compliance or flexibility in one or more desired directions (as indicated by arrows X, Z) may be provided to alleviate. As an example, the connecting pin 2274 may be compliant (eg by a spring load, eg, by a generally spherical pin mounted in a bent manner, a pin made of an elastic flexible material, etc.). The connecting groove 2276 may also be consistent (by forming a groove in an elastic flexible material that bends and mounts, the groove surface bends when compressed under a prior load. Etc.).

Further, in an exemplary embodiment, the carrier joint section 2070 is described in more detail below to allow non-contact connection joints between the carrier and the loading joint of the processing tool. It may be further configured.

As can be understood, wafer carriers such as Carrier 2000 may typically be placed in connection with process tools for processing. In order to automatically transfer the wafer to the tool, it is desirable to arrange the wafer carrier and the loading port of the tool in close proximity. Conventional positioning methods can typically use conventional mechanical connectors that come into contact with the bottom surface of the carrier. For example, these conventional mechanical connections provide lead-ins or cams that compensate for all misalignments and help guide the wafer carriers to aligned positions. Unfortunately, this mechanism relies on the lead-in surface of the carrier for sliding contact with the coupling pins of the loading port, which can result in wear and the formation of contaminants. A second problem with the use of conventional mechanical connectors is that it is desirable to place carriers sparsely within the trapping range of conventional bonds in order to function properly. The carrier transfer system is responsible for either the complexity of the transfer system and / or the time required for proper placement (eg, retries). Therefore, the carrier transfer system is designed to be sufficiently repeatable to position the carrier within the coverage of conventional mechanical connectors or, in conventional applications, in a nominally aligned position to prevent wear. Should be. Inevitably, the carrier transfer system cannot achieve repeatability over a large number of cycles, resulting in slip-contacts that produce particles. The joints of the carriers 2000 may provide the same repeatability in positioning the wafer carriers to process tools, but use non-contact (eg, magnetic) connections. This feature allows the transport system to fully recognize the lead-in mechanism, which relaxes placement allowances and, as a result, speeds up carrier loading / unloading steps. Second, all movements to correct placement errors may be performed without any physical contact between the carrier and the loading port, eliminating any sliding movements associated with cleanliness.

As seen in FIG. 36C, in an exemplary embodiment, the carrier joint portion section 2070 may have a non-contact connector 2071 for connecting the carrier and the loading port in a contactless junction. The non-contact connector 2071 may typically include a non-contact support or lift area 2072, and a non-contact connecting section 2074. In an exemplary embodiment, the lift area 2072 is interlocked with the air bearings of the loading port (described below), controlled by the air bearings in the loading port, and arranged to stably raise the carrier. , It may be a substantially flat and smooth surface. In an exemplary embodiment, the carrier lift area is passive, but in another embodiment the carrier may have one or more active air / gas bearings to lift the carrier. Referring again to FIG. 36C, in an exemplary embodiment, the lift areas 2072 are similar to each other and the action of lifting the carrier from the air bearings of the loading port is carried out by the pressure from the air bearings which substantially acts on the lift area section. We may have three sections distributed across the joint (eg bottom) sides of the carrier casing so that the resulting lift is substantially aligned with the carrier's center of gravity (CG). The shape and number of lift area sections 2072 shown in FIG. 36C is merely exemplary, and in another embodiment the lift area may have any desired shape and number. For example, the lift area may be a single contiguous one (or a substantially uninterrupted section that extends around the periphery of the carrier junction). In an exemplary embodiment, the lift area is placed on the carrier junction 2070 so as not to interfere with the SEMI-compliant junction mechanism (eg, kinematic junction receiver, infopad, etc.). The lift area 2072 may be placed as far away from the CG as possible within the constraints of the junction, producing the desired pressure distribution and on the desired magnitude of translational motion between the carrier and the loading port (ie). The dimensions may be desired to accommodate the xy plane) misalignment. In an exemplary embodiment, the lift area 2072 is symmetrically located with respect to a single axis (shown by axis X in FIG. 36C, eg, a biaxial reference axis), but any other axis of the carrier junction. Is not the target. Therefore, the carrier joint 2070 is split so that the non-contact joint with the tool loading joint is achieved in only one proper orientation. Placing carriers in the wrong orientation results in carrier lift instability, which is detected by the suitable sensors in the carrier placing carrier system, or by the carriers themselves or the loading port, to present the wrong placement. A signal may be transmitted. Also, the lift area 2072 may have the desired tilt or bias to facilitate proper alignment of the carrier to the loading port. In another embodiment, the lift area is designed to generate variable strength and the desired horizontal resultant force in the variable direction when the air bearing acts to align between the carrier and the loading port. It may be movable or tiltable by mechanical, electrical, piezoelectric, thermal, or any other suitable means.

Further referring to FIG. 36C, in an exemplary embodiment, the non-contact connecting section 074 has one or more permanent magnets 2074A-2074C (for illustrative purposes, three magnets 2074A-2074C are shown, but separately. In the embodiment of, more or less magnets may be provided). The connecting magnets 2074A-2074C may be part of the reaction section of the linear / planar motor of the transfer system or may be independent of the motor reaction section. The connecting magnets 2074A-2074C may be of sufficient size to overturn the connecting magnets (described below) of the loading port due to the desired misalignment between the carrier and the loading port. In the exemplary embodiments shown, the connecting magnets 2074A-2074C may be symmetrically placed with respect to a single axis (such as axis X in FIG. 36C), but with respect to all other axes of the carrier junction. Is asymmetric. Therefore, the non-contact connecting sections of the carriers are separated to prevent the carriers from connecting to the loading port if the carriers are not in the desired orientation with respect to the loading port. That is, the carrier's non-contact connector may still be "locked" to the loading port for the correct orientation, and all other orientations are not fitted by the connector and therefore attempt to load. Absent. To detect if a carrier is improperly placed on the loading port and cannot be properly coupled, send a suitable signal to move it to the transport system and, if possible, reorient the carrier in the proper orientation. May be provided with sensors suitable for the loading port or carrier. In another embodiment, the non-contact connecting section and / or lift area may be arranged symmetrically with respect to the plurality of axes of the carrier junction.

Here, with reference to FIG. 36D, a bottom view of the carrier 2000'according to another exemplary embodiment is shown, the carrier 2000' is substantially similar to the carrier 2000 described above, and similar mechanisms include: It has a similar number. The carrier 2000'may have a joint portion section 2070' of a carrier having a non-contact connector 2071' that is generally similar to the non-contact connector 2071 described above with reference to FIGS. 36A-36C. In an exemplary embodiment shown in FIG. 36D, the non-contact connecting section 2074', instead of a permanent magnet, is a steel magnetic material section 2074A', 2074B', 2074C' (motor reaction component of the transfer system in the carrier). It may be part of or independent of it). The steel sections 2074A', 2074B', 2074C' may have any desired shape, such as a rectangle, a round cylinder, or a sphere. Each of 2074A'to 2074C' may be similar to each other, but in another embodiment different shared sections and directional properties defining the desired magnetic coupling may be used in the respective sections. The section is large enough to fit within the magnetic field of the loading port connection point and to accommodate the desired initial misalignment between the carrier and the loading port when the carrier is first placed on the loading port. May be good. The connecting sections 2074A', 2074B', 2074C' may be arranged on the joint portion of the carrier so that the magnetic force on the carrier biases the carrier to a position aligned with respect to the loading port. As seen in FIG. 36D, in an exemplary embodiment, the connecting sections 2074A', 2074B', 2074C' are distributed on the junction of carriers to define a symmetric single axis (axis X) and thus. The non-contact connection 2071'of the carrier may be locked to allow connection to the loading port in only one orientation. In another embodiment, the connecting section may have any other desired arrangement.

Here, with reference to FIGS. 37A-D, a perspective view, an end sectional view, a side sectional view, and an upper plan view of the tool loading station or the loading port 2300 according to another exemplary embodiment are shown, respectively. .. In the exemplary embodiment shown, the loading port is joined to a wafer and loaded from and loaded onto a bottom open carrier similar to the carriers 2000, 200, 200', 300 described above. It may have a configuration. In another embodiment, the loading port may have any other desired configuration. The loading port 2300 may have a suitable mounting junction, taking the SEMI standard as an example. A BOLTS junction is provided to allow the loading port to be coupled with any desired processing tool or work station. For example, the loading port may be mounted / coupled to the control atmosphere section of the processing tool, such as EFEM (described in more detail), or the atmosphere of the processing tool (in a manner similar to that shown in FIG. 14). It may be coupled to a chamber isolated from (eg, a vacuum transfer chamber) or a chamber open to the atmosphere of the processing tool. The loading port in this exemplary embodiment is similar to the loading port described above. The loading port 2300 may typically have a carrier loading junction 2302 and a loading cavity or chamber 2304 (wafers are received from the carrier individually or in cassettes or returned to the carrier). Chamber 2304 may be capable of retaining an isolated atmosphere or a controlled (high cleanliness) air atmosphere (thus allowing the loading port to act as a load lock for processing tools). Unlike the conventional loading port, the carrier loading joining portion 2302 may have a loading surface 2302L that supports the carrier so that there is substantially no protrusion in the carrier arrangement region when joining to the loading port. As seen in FIG. 37A, the loading surface may have bumpers or snubbers outside the carrier placement area to prevent carrier movement in the event of mutual misalignment between the carrier and the loading port. The loading joint portion 2302 of the loading port may have a loading opening (or port 2308) (leading to the loading chamber 2304) and a port door that closes a port similar to the loading port described above. In an exemplary embodiment, the port door 2310 may be substantially flat and horizontal to the loading surface of the loading joint. The port door 2310 may be sealed at the port edge in a sealing arrangement similar to that shown in FIGS. 4A-4B. As will be appreciated, when joined and coupled to the loading port junction portion 2302 of the loading port, the carrier casing and carrier door are referred to as "zero capacitance purge" sealing at each of the loading port edge 2308R and port door 2310. It is sealed with a seal having a similar arrangement to that shown in FIGS. 4A-4B. In another embodiment, the seal between the port rim, the port door, the carrier casing, and the carrier door may have any other desired configuration. In an exemplary embodiment, the port door 2310 may be coupled to the port using a passive magnetic connector or latch in a manner similar to that described above. In an exemplary embodiment, the magnetic coupling / latch element between the port door and the port provides a passive magnetic latch between the carrier door and the casing at the same time that the latch between the port door and the port is activated. It may be placed and configured to operate. Therefore, for example, when the port door is unfixed from the port, the carrier door is unfixed from the carrier, and the carrier door and the port door that fixes the carrier are fixed. In an exemplary embodiment, the loading port may include an indexer 2306 and a purge / ventilation system 2314 similar to those shown in FIGS. 8-14.

Also referring to FIG. 37D, the carrier loading joint portion of the loading port of the exemplary embodiment is interlocked with the non-contact joint portion section 2071 of the carrier 2000, for example to join and connect the carrier 2000 to the loading port 2300. It may have a substantially non-contact joint portion section 2371. As shown in FIG. 3710, in an exemplary embodiment, the joint section 2371 may have one or more air bearings 2372 and a non-contact connecting section 2374. The air bearing 2372 of the loading port may be of any suitable type and configuration and may be placed, for example, in a "locking" arrangement and typically accommodate an arrangement of lifting areas 2072 over carrier joints. .. Therefore, the air bearing 2372 may be positioned relative to reference reference X, which determines the placement of the carrier 2000 when connected to the loading port. A suitable air / gas source (not shown) supplies the air bearings. A suitable regulator (not shown) may be used to maintain the desired gas flow to the air bearings. If desired, a gas source and regulator for the air bearings may be placed. For example, outside or inside the loading chamber 2304 of the loading port, but may be isolated from the internal atmosphere of the chamber, eg, the gas source 2372S to the air bearing 2372 (see FIG. 37C) is a bellows or other flexible The gas source may extend from within the sealed sleeve to an air bearing that isolates it from the loading chamber. As a further embodiment, the gas source to the air bearings may extend within a bellows seal that isolates the indexing device in a manner similar to the purge and vent lines shown in FIG. In an exemplary embodiment, the carrier air / lift area may be on the carrier door, and thus in the exemplary embodiment, the air bearing 2372 of the loading port (substantially located below the lift area). May be placed within the boundaries of the port door 2310. In another embodiment, the air bearings may be placed on the port frame or port rim, and the gas supply to the air bearings may be placed completely outside the loading chamber of the loading port. In an exemplary embodiment, the air bearing 2372 may be an orifice bearing (having substantially localized exhaust) or a porous medium air bearing with dispersed, nearly uniform exhaust. .. The exhaust flow rate from each air bearing 2372 may be fixed (substantially constant) in terms of pressure, mass flow rate, and direction (shown substantially vertically by AB in FIG. 37C, for example). May continue to exist). In another embodiment, the air bearing has a variable exhaust flow rate, for example to offset the movement of the carrier with respect to the loading port, and to facilitate alignment of the carrier with the loading port, eg, exhaust flow characteristics ( For example, the pressure, mass, or direction) may be changed. As will be appreciated, the air bearings 2372 and lift pads 2072 on the carrier may be sized to provide a desired misalignment tolerance band or placement area for initial placement of the carrier on the loading port. ..

Here, with reference to FIG. 37E, a plan view of the loading port 2300'according to another exemplary embodiment is shown, the loading port 2300'is similar to the loading port 2300, and similar mechanisms have similar numbers. Is attached. In this exemplary embodiment, one or more air bearings 2372'may have an array of nozzles. The exhausts AB1 to AB4 from the array of nozzles may be combined to provide a directional synthetic exhaust. As an example, each nozzle of the array may have an exhaust angle with respect to the exhaust of the other nozzles. The exhaust flow rate from one or more nozzles may be fixed or variable. When the air nozzles of the array are operating at maximum flow rate, the combined exhaust has a first desired direction (eg, substantially vertical). Stopping or reducing the flow rate through one or more nozzles of the array results in a change in the combined exhaust direction, resulting in a directional component on the loading surface. In another embodiment, the air bearing nozzles may be movable (eg, air bearing nozzles mounted on a tiltable board) to control the direction of exhaust, or they can be reshaped. It may be (eg, by using a piezoelectric material or a shape memory material). As can be understood, the directional component of the air bearing exhaust in the loading surface gives the carrier on the air bearing in the loading surface a starting force in the direction opposite to the directional component of the exhaust and is in the loading surface. Causes lateral movement of the carrier.

With reference to FIGS. 37A-37D again, the non-contact connecting section 2374 of the loading port is between the carrier and the loading port (between the carrier door 2016 and the port door 2310, and optionally with the carrier casing and the loading port frame. Magnet sections placed in conjunction with magnets 2074A-2074C (see FIG. 36C) or carrier magnetic sections 2074A'-2074C' to define magnetically fixable / non-fixable connections (such as between). 2374A to 2374C may be provided. Also, in an exemplary embodiment, the carrier magnets 2074A-2074C, or the loading port magnet sections 2374A-2374C interlocking with the magnetic sections 2074A'to 2074C'1, achieve the desired alignment described below. To do so, a carrier position correction device may be formed that can adjust the position of the carrier in the loading portion. The arrangement of the magnet sections 2374A-2374C shown in the figure is only an example, and in another embodiment, the magnet section of the non-contact carrier connecting section of the loading port may be arranged / configured in any desired manner. .. The magnet sections 2374A-2374C, when activated, provide a desired magnetic field that biases the magnets or magnetic sections in the carrier in the desired direction (to cause fixation / connection of the carrier and loading port and / or on the carrier). It may be an operable magnet that serves as a magnetic switch that generates (for example, to apply a correction force). As seen in FIGS. 37A and 37D, in an exemplary embodiment, the loading port junction teaches the carrier transport system the location / location of the loading port, allowing the carrier to be initially placed on the loading port junction. May have a non-contact alignment system 2380. As mentioned above, the loading port placement area is substantially free of protrusions, and in an exemplary embodiment, there is substantial contact between the carrier and the loading port when the carrier is initially placed in the placement area. No (ie no frictional contact). In the exemplary embodiment shown, the alignment system 2380 may have an array or pattern of registration masks from which suitable sensors can acquire images. The mask pattern shown in FIG. 37D is merely exemplary, and in another embodiment any suitable masking pattern may be used that allows a suitable sensor to obtain an image, defining all desired degrees of freedom. .. For example, a sensor (not shown) that may be placed on a carrier holding portion of a transport system (eg, see FIG. 26B) is, for example, a CCD or CMOS image sensor capable of acquiring images of patterns and their spatial characteristics. You may. The image data that embodies the pattern determines the position of the loading port arrangement area with respect to the carrier carrier, and similarly registers and associates the position data of the carrier carrier and the pattern in order to teach the position to the carrier carrier. It may be transmitted to a suitable processor.

In an exemplary embodiment, the carrier 2000 may be placed on a loading surface without protrusions within the placement area 2302P by the transport system. In an exemplary embodiment, the placement area may be an area formed to a size of carrier +/- for example about 20 mm with respect to the alignment axis of the loading port. The actual placement error may be any value, not determined by the values described, but may be specified as a ratio to the correction mechanism used to position the carriers after placement. Therefore, the alignment repeatability of this connection is substantially the same as that of the conventional connection method, and at the same time, the allowable placement error of the carrier carrier is increased. Once the carrier is detected by the loading port, an air film (air bearing) is activated to lift the carrier and eliminate friction at the junction between the carrier and the loading port. At this point, the forces on the carrier are their mass, the position of the center of gravity relative to the horizontal reference plane, and the lifting force itself. The carrier lift area is joined with an air pad on the loading port to lift the carrier and establish repeatable positioning (both angular and horizontal axis) of the carrier to the loading port. Here, the carrier floating on the film of air may be placed in line with the loading port. As mentioned above, the magnetic connector can be used to apply force to the carrier in order to translate and rotate the carrier. As long as the stroke is sufficient and the target position can be predicted, any method other than magnetism may be used to apply force to the carrier. Completion of connection between the carrier and the loading port is to clamp both objects to the holding position.

As an example, and particularly with reference to the exemplary embodiments illustrated in FIGS. 36A-36C, the permanent magnets 2074A-2074C overlap with magnets 2374A-2374C on the loading port junction when the carrier 2000 is in the placement region. .. The air bearings may be excited and the magnetism of the loading port is actuated by electrical or mechanical means to present the opposing magnetic poles to the magnets of the carrier. The absence of friction at the junction allows the carriers to move freely on the X, Y, and θZ axes until the magnetic poles are naturally aligned, but does not create physical contact. Throughout this step, the air bearings are preloaded by magnetic forces in the carriers and loading ports. Preloads are useful in maintaining carrier control and improving the hardness of air bearings. After a predetermined period of time, for example, or by sensor feedback means, the air bearings are stopped to allow the carrier to be lowered onto the port door of the loading port. Here, the magnets are in perfect contact and provide a clamping force to hold the carrier to the port door.

In the exemplary embodiment shown in FIG. 36D, the carrier 2000 is sized to fit within the magnetic field of the loading port connection point after being placed (by the carrier transfer system) 2074A and 2074C (see FIG. 36D). Has. Air bearings may be actuated and magnets on the loading port may be actuated by either electrical or mechanical means to introduce a magnetic field into the steel pads of the carrier. The absence of friction at the joint allows the attractive force between the magnet and the rigid pad to translate or rotate to the position where the carrier is aligned. The air bearing is pre-loaded by magnetic force. Preloads are useful in maintaining carrier control and improving the hardness of air bearings. For example, after a predetermined period of time, or by sensor feedback means, the operation of the air bearing is stopped so that the carrier can be lowered, for example, onto the port door of the loading port. The magnetic force on the steel pad provides a clamping force to hold the carrier to the port door.

According to yet another embodiment, the carrier is driven by a directed air nozzle 2372'(see FIG. 37E) integrated with the air bearing surface, such as that of the exemplary embodiment shown in FIG. 37E. You may. In this embodiment, the air nozzle 2372 may provide laterally applied pressure to the bottom surface that imparts motion to the carrier. The motion can be controlled by a controller that energizes the appropriate set of nozzles to orient the carrier in the X or Y axis until the magnets on the carrier are aligned with the loading port. In another embodiment in which an array of nozzles is mounted on the platen and rotated / tilted, the platen may be supplied with energy to provide the nozzles in the desired direction. The nozzle directs the exhaust in a direction opposite to the intended motion direction of the carrier. This movement provides a lateral force to translate the carrier to magnet alignment. Several forms of sensor feedback may be used to detect the actual position of the carrier and compare it to the aligned position, including feedback from, for example, a magnetic connector. This information may determine in which direction the carrier should be translated and what force should be applied to the carrier by the air nozzle. In another embodiment, nozzles and magnetic connectors may be used in combination to align the carrier in the desired position.

FIG. 37F shows a plan view of the loading port joint according to another exemplary embodiment. In the present embodiment, the loading port 2300'' is described above, except that the magnet 2374'' placed in the loading port is attached to an XY stage that is movable in the moving direction indicated by the arrow in FIG. 37E. Similar to what was done. In this embodiment, the carrier is placed in the loading port, the air bearings are actuated, and the magnet of the carrier is attracted to the magnet of the loading port connected to the XY stage 2374S ″. The XY stage 2374S ″ may be, for example, an air cylinder, a threadless screw, or an electric solenoid and is linearly encoded to report the translated position. The magnets of the connected carriers and the magnets of the loading port are driven back to the taught (aligned) position. Upon arriving at the destination, the air bearings may be deactivated and the carrier lowered to the port door and clamped. Similarly, this method can be adapted to the existing kinematic connection approach used, thereby connecting each kinematic pin to the XY stage. In this embodiment, two of the motion pins are driven to align with X, Y, and θZ. This does not work on the premise of non-contact, but is a viable way to improve carrier placement tolerance with minimal friction.

FIG. 37G is another exemplary embodiment of a similar loading port 2300A, except that the carrier may be driven by a pusher arm 2374M to position the carrier and align the carrier connection point with the loading port. Shows the morphology. In the exemplary embodiments shown, the loading surface may be rotatably mounted about θX and θY (as shown by arrows R, P). In order to tilt the loading plane and move the center of gravity of the carrier, the degrees of freedom combined with the air bearings can be used to provide translation in the angle of rotation. This method uses position feedback to intelligently move the loading plane in the appropriate carrier direction to align the carrier and loading port magnets. Once the carrier is in position, the air bearings may stop working and the carrier may be clamped to the port door. Eventually, the loading plane is rotated and returned to its original position to achieve alignment with the appropriate port for door removal.

As mentioned above, the environment within the carrier may vary, depending on, for example, the wafer and the pre-process and environment applied inside the carrier. Therefore, the carrier connected to the loading port or loading station may have an environment in it that differs from the current process (eg, gas type, cleanliness, or pressure). For example, any process on the carrier wafer may employ an inert gas. Therefore, the junction between the carrier and the loading port of any tool is optionally charged or ejected with the appropriate gas species to minimize pressure differences or unwanted gas species introduction during carrier opening. You may do so. As another embodiment, the tool environment is evacuated and the carrier coupled to the tool loading port through the junction is deflated to a low pressure so that the wafer is loaded directly from the carrier onto the vacuum load lock. You may. The environmental control system that allows the junction between the carrier and the loading port and the environment between the carrier and the tool to be adapted is substantially similar to that previously described and shown in FIGS. 10-10A and 14. May be good. Another suitable embodiment of a carrier loading port junction and environmentally compliant system is incorporated herein by reference in US Patent Application Serial No. 11 /, filed August 25, 2005. 210, 918. Here, with reference to FIG. 38A, a flow chart illustrating a process for adapting the environment within the carrier to a loading port that may have different control environments is shown. In the exemplary embodiment of FIG. 38A, both the carrier and the loading port may hold the same gas type (eg, the same type of inert gas). In this embodiment, if the carrier pressure is higher than the process pressure, from the carrier to, for example, the load port chamber (or other suitable plenum) until an environmental equilibrium between the carrier and the loading port / tool is achieved. Gas may be injected into the carrier (via the junction) from a loading port or other suitable source if the carrier pressure is low. In an exemplary embodiment of FIG. 38B, the loading port has an atmospheric environment (eg, clean air) and the carrier and loading port are associated in a manner similar to that previously described, eg, in connection with FIG. 38A. The equilibrium between them may be established. FIG. 38C illustrates the process in an exemplary embodiment in which the loading port has a vacuum environment. In another embodiment where the carrier and loading port may initially have different gas species, the initial environment of the carrier is evacuated and the gas species etc. in the loading port are charged into the carrier before the door is opened. For example, from the loading port).

Referring again to FIG. 37A, as described above, the loading port in the exemplary embodiment raises and lowers the port door 2310 (to open and close the port), and the wafer to process the wafer. Has an indexer 2306 capable of raising the cassette from the carrier to the desired height in the load port chamber. The indexer 2306 is similar to that of an exemplary embodiment having an indexing mechanism isolated from the capacity / environment occupied by the wafer, as described above and shown in FIGS. 8, 9, 10-10A, 14 and 18. May be good. In summary, a preferred embodiment of the indexing mechanism may have the following arrangement:
1. 1. Main screw with bellows-This mechanism employs a main screw driven by an electric motor mounted on the port plate of the loading port. A portion of the main screw that enters the clean area is enclosed in a bellows. The bellows may be any material, such as metal, plastic, or fiber, as long as it is generally clean during operation and remains flexible without fatigue. Bellows provide a barrier between the pollutant generation mechanism and the clean area where the wafer is placed. The flexibility of the bellows provides this isolation over the entire stroke of the actuator. The mechanism feedback may be from a rotary encoder on the motor or main screw, or from a linear encoder along the path of motion. (See Fig. 14)
2. Pneumatic cylinder with bellows-Similar to embodiment (1) above, except that the drive mechanism is by a pneumatic cylinder. It may be used, for example, to move between two positions; for example, a closed and lowered pod. (See Fig. 9)
3. 3. It is similar to the previous embodiment except that the main screw-drive mechanism of the pneumatic cylinder remote drive is located at a remote location outside the wafer capacitance (see FIG. 10). The port plate of the loading port is attached to the drive unit by a support structure. Drives may be exposed to clean areas, but contaminants are controlled by air flow passages or labyrinth seals. The use of airflow requires the drive unit to be located downstream of the wafer so that the contaminants that can be produced are under the wafer, pushed downwards, and away from the wafer. Labyrinth or other "non-friction" encapsulation can further limit the introduction of particles by providing a solid barrier between the drive and the clean area. Second, the drive unit can be located at a distance outside the entire processing tool environment. It is placed in a potentially dirty mechanism within a less clean FAB environment, but uses a labyrinth seal to protect the process tool environment from less clean FABs.
4. Drive mechanism magnetically coupled to the port plate-The present embodiment employs a magnetic connector between the port plate and the drive mechanism (see, eg, FIG. 8, but inverted). The magnetic connector may operate through a non-steel wall across the air gap that allows the drive to be isolated outside the clean area. The driving method may be any of the above-mentioned types such as a main screw, a pneumatic cylinder, and a linear motor. The latter may be present inside the clean area, as it can operate cleanly in combination with an air bearing guide to control the direction of motion.

Here, with reference to FIG. 39, a cross-sectional view of a loading port 2300A, a carrier 2000A joined thereto, and a wafer airflow management system according to another exemplary embodiment is shown. The carrier 2000A and the loading port 2300A may resemble the carrier and loading port of the exemplary embodiments described above, respectively. In the embodiment shown in FIG. 39, the port door is opened for exemplary purposes and the cassette is indexed and placed in the load port chamber for processing. When the carriers are opened and the wafer is placed for processing, the airflow around the wafer may help maintain the cleanliness of the wafer. For example, some processes keep the wafer in a downward position for extended periods of time, increasing the risk of particles in the environment depositing on the wafer surface. Moreover, in the absence of proper airflow, any contaminants produced by the loading port mechanism can deposit on the wafer surface. In the exemplary embodiments shown, at least a portion of the airflow in the process environment may be "captured" and redirected to flow across the wafer. The air is then exhausted to the back of the wafer delivery plane (WTP) downstream of the processing environment. In an exemplary embodiment, the airflow pattern passes horizontally in a direction parallel to the top surface of the wafer and exits the back surface of the wafer cassette. Exhaust routing draws air vertically after it exits the cassette and directs it out of the exhaust port, which is directed to the floor. This approach can maintain a clean, constant flow or air across the wafer surface while operating in an open loop or encapsulation environment. For example, if the loading port operates in an environment with process dependent gas species such as nitrogen or argon, diversion of the existing airflow back to mainstream as shown is used for the control gas species. Supports a closed loop environment.

As seen in FIG. 39, in an exemplary embodiment, for example, above the area where the wafer is accessed, a feed airfoil is mounted against the vertical surface of the process mini environment. This location is a reserved space for the FOUP door opener in the SEMI E63 standard. The airfoil captures the capacity of the existing laminar flow from the mini-environment and bends the air stream from vertical to horizontal. In an exemplary embodiment, when the wafer cassette is lowered inside the outer surface of the loading port, the diffusion element is placed on the back of the wafer cassette. The diffuser may consist of, for example, a partially open solid panel, depending on the flow characteristics. The diffuser is configured to control the uniformity of the horizontal airflow through the wafer while providing a pressure difference before air enters the exhaust side of the duct. In an exemplary embodiment, the exhaust side of the circuit may be force-induced to ensure that the air flow across the wafer is stable and uniform. For example, an axial fan mounted inside an exhaust duct with an output port facing the mini-environment port of the process tool. Alternatively, the unit may be used without a fan and supply airfoil configuration, and the diffuser and exhaust ducts may be arranged to ensure a stable and uniform airflow across the wafer.

Here, with reference to FIGS. 40A-40D, schematic cross-sectional views of wafer restraint of exemplary carriers by individual exemplary embodiments are shown. An exemplary embodiment shown in FIG. 40A illustrates radial clamp wafer suppression. Clamping may be provided by the translational wall of the cassette. The mechanism resides within the cassette and is actuated and driven by either the loading port or the junction between the podshell and the cassette (Z-axis). In another embodiment, there may be a translational side wall inside the pod shell. The mechanism is provided with a pod shell and is actuated by either a loading port, a pod shell to a port door (Z-axis of the OHT), or a pod to a cassette (Z-axis of the loading port). Use advanced materials (ie shape memory materials or magnetic restraint materials, etc.) for operation. An exemplary embodiment shown in FIG. 40B illustrates a wafer controller that employs a clamping force that is substantially perpendicular to the top surface of the wafer. In an exemplary embodiment, it is a vertically translating finger that is integral with the cassette. The mechanism is provided in the cassette. The mechanism is actuated by either a loading port, a pod to the port door (Z-axis of the OHT), or a pod to the cassette (Z-axis of the loading port). In another embodiment, it is an off-axis translational finger integrated with a pod shell or cassette. The mechanism can be provided in either a cassette or a pod shell. The fingers translate at an outside horizontal angle with respect to the wafer (see FIG. 40C). The mechanism is actuated by either a loading port, a podshell to the port door (Z-axis of the OHT), or a podshell to the cassette (Z-axis of the loading port). In another exemplary embodiment, it is a 2DOF finger that is integrated with a pod shell or cassette. The fingers rotate and then translate vertically to fit the wafer (see Figure 40D). The mechanism is actuated by either a podshell to the port door (Z-axis of the OHT) or a podshell to the cassette (Z-axis of the loading port). In another embodiment, the wafer restraint in the carrier may have any other suitable configuration. For example, the wafer may be V-shaped between the support fingers on the cassette that support the wafer edge contact, eg, form a linear edge contact with the wafer.

Here, with reference to FIGS. 41-41B, a schematic perspective view, an end front view, and an upper plan view of a typical processing arrangement having a processing tool PT and a processing arrangement transfer system according to another exemplary embodiment. Each is shown. The processing tool PT is illustrated by an exemplary array of tools and the like arranged in the processing bay of the FAB. In an exemplary embodiment, for example, the transfer system 3000 may provide tools for the processing bay, and the transfer system 3000 may be an intrabay portion of the FAB overall transfer system. In an exemplary embodiment, the transport system 3000 may be generally similar to the section of the AMHS system of the exemplary embodiment described above and shown in FIGS. 29A-29D. The transport system 3000 may communicate with another (eg, interbay) portion 3102 of the FAB AMHS system via a suitable transport junction as seen in FIG. As mentioned above, the arrangement of processing tool PTs in the tool array shown is merely an example with multiple rows of tools (in the examples, two rows R1 and R2 are shown, but in another embodiment. May have more or less rows of tools). In the embodiments shown, the rows of tools may be arranged substantially parallel (geometrically, but may be angled with respect to each other) and define a substantially parallel process orientation. You may. The process directions along the rows of different tools may be the same or opposite to each other. Also, as for the process direction along an arbitrary column, the process direction along a part or area of the tool column is one-way, and the process direction of another part or area of the same tool column is opposite. May be inverted to. The process tools in columns R1 and R2 may be distributed to define different process regions ZA-ZC (see, eg, FIG. 41). Each process region ZA-ZC may include one or more process tools in columns R1, R2. In another embodiment, the tools may be placed in the process area, but in a single row. As can be understood, process tools within any domain may be process related, such as having a complementary process and / or having a similar tool processing rate. For example, the tool region ZA may have a high throughput (eg, about 500 wafers per hour (WPH)) of tools, while a medium throughput (eg, approximately 75 WPH to less than 500 WPH) tools are placed in region ZB. A low throughput (eg, approximately 15 WPH to 100 WPH) tool may be placed in the region ZC. As you can see, the tool to determine any area is
It does not have to be the same, and one or more tools in any area may have a different amount of processing or process than the other tools in any area, but nonetheless, the tools in the area , At least in terms of transport, there may be relationships between the tools so that they are organized within an area. The tool area illustrated in FIG. 41 is merely an example, and in another embodiment the tool area may have any other desired arrangement.

As seen in FIG. 41, the transport system 3000 can transport the carrier to / from the tool. The transport system 3000 may be generally similar to the exemplary embodiments described above and the transport system shown in FIGS. 29-35. In the exemplary embodiment shown in FIGS. 41-41B, the transfer system 3000 may have an overhead configuration (eg, the transfer system is placed above / above the tool). In another embodiment, the transport system has any other suitable configuration, such as a lower configuration (eg, similar to the transport system illustrated in FIGS. 30-33, eg, the transport system is placed under the tool). You may. As seen in FIGS. 41-41B, the transport system may generally have a large number of transport subsystems or sections. In an exemplary embodiment, the conveyor system 3000 is generally such as a conveyor section (eg, one similar to the solid-state conveyor described above and shown in FIGS. 20-25B, or any other suitable conveyor). It may have a bulk material / high speed transfer section 3100. The conveyor section may extend over the entire tool area, eg, transporting carriers at a substantially constant transfer rate without stopping / decelerating when the carrier is placed / moved from, for example, in the conveyor section. You may. Also, in an exemplary embodiment, the transport system 3000 has a shuttle system section having a shuttle 3202 that can access one or more storage stations / positions (see also FIG. 42) at the storage station / position 3000S (see also FIG. 41B). The 3200 and the transfer system section 3300 to be joined may be included. In an exemplary embodiment, the transfer system section to be joined is accessible to the carriers conveyed by the bulk transfer conveyor section 3100, or the carriers of the storage station, even though the carriers can be transferred to the loading section of the processing tool. Good. In an exemplary embodiment, the storage station, shuttle system section 3200, and the transfer system section to be joined may be formed in a selectively installable portion that can be selectively installed along the transfer system. In an exemplary embodiment, the transport system sections 3100, 3300, 3200 may be modular to facilitate the installation of a portion of the system section selected to be installed in the transport system. A portion of the transport system shuttle system, junction system, and storage system section selected to be installed along the transport system may correspond to areas ZA-ZC of the processing tool. As will be appreciated, the transport system 3000 may be configured to correspond to a processing tool or processing tool area. Further, in an exemplary embodiment, the transport system may be configurable within regions TA-TC and generally communicates with and corresponds to processing tool regions ZA-ZC. Therefore, the transport system may have different regions with different system section configurations. In an exemplary embodiment, the storage system and shuttle system sections may be configurable in each of the transport system regions TA-TC. Also, in an exemplary embodiment, the junction transfer system sections may be configurable in their respective regions. In an exemplary embodiment, the joint transfer system may have joint transporter parts 3310, 3320 that can be selectively installed (the gantry of the embodiment shown in FIG. 41), which are added and removed. It may be installed in a number of different orientations in each of the regions TA to TC of the transport system. The desired junction transfer system portion may be installed within the region of the transport system to provide access speeds commensurate with the processing speed of the desired tool junction and, for example, the process tools corresponding to the tool regions ZA-ZC. Good. As most commonly seen in FIG. 41A, the junction transporter system section may have a selectable variable number of transporter travel planes (eg, some of the region TCs may have a single junction transporter travel plane (FIG. 48). The other regions TA, TB may have one or more transporter traveling planes ITC1 and ITC2 (see FIGS. 41A, 46). In regions with multiple planes, the transporters may be able to traverse each other. Two planes are shown, but more or less transporter planes may be provided. In an exemplary embodiment, the transport system is arranged with a substantially horizontal plane of travel, whereas in another embodiment the transport system has a vertical plane of travel for junction transporter bypass. It may have any other desired arrangement, including those.

Overhead gantry systems (OGS) can be configured for low, medium and high throughput. The ability to change factors or treatments can be achieved through field reconstructable modular assemblies. These modular assemblies can be classified into, for example, three categories: low processing amount, medium processing amount, and high processing amount. The placement of the various modules may depend on many factors, such as the desired move side, storage capacity, and distribution of the desired amount of processing into the bay.

Low throughput: As an example, a low throughput tool or tool area can be adequately accommodated in a single gantry 3310. This configuration may provide all desired movements without the use of a "feeder" robot 3320 or shuttle system 3200. In addition to transferring the carrier from the storage to the tool, the gantry grabs the carrier from the conveyor in the intrabay and transfers it to the storage location. To move the carrier to the adjacent gantry area, the carrier may be placed on an intrabay conveyor or in a storage nest for removal by the adjacent gantry. Using this configuration, one gantry traverses another until the intervening gantry moves. If two or more gantry are working side by side and one fails, the adjacent gantry will take over the work of the failed unit. The amount of work is reduced, but it is not completely interrupted.

Medium throughput: For example, the medium throughput tool or tool area is filled by adding a "feeder" robot 3320 (eg, additional gantry / transporter level). The configuration is generally similar to the low throughput arrangement with the addition of the feeder robot 3320 and the classifier / shuttle 33200. In an exemplary embodiment, the feeder robot and classifier / shuttle may be dedicated devices for performing only the transfer from the conveyor to the storage in the intrabay. It may be desirable for all feeder robots to employ two gantry loader robots 3310, 3312 on one side of the feeder (see FIG. 44). However, in another embodiment, the feeder may be paired with one loader robot. The purpose of the classifier / shuttle is to accept carriers from feeders and line up for storage. By using this configuration, the "loader" robot can concentrate only on the movement from storage to the tool and vice versa without the additional addition of grabbing the carrier from the conveyor in the intrabay. The system can work with adjacent low, medium, or high throughput modules. When a failure occurs in the loader robot, the adjacent loader robot moves to the area of the failed robot and works. (See FIGS. 46 and 47). If the feeder mechanism fails, the individual loader robots operate in the same way as the low throughput configuration. In both failure cases, the system remains operational, although capacity is reduced.

High throughput: As an example, for high throughput applications, the gantry module can be configured to meet the demands of a particular tool or tool area. High throughput deployments may have a feeder robot deployment similar to that of the medium throughput region on each side of the loader robot, and a similar classifier / shuttle for lining up carriers in storage. Good. (See FIG. 45). The loader robot involves a tool placed on the side of the bay that allows for shorter distance travel. Carriers enter and exit high processing areas via the intrabay conveyor system. High throughput configurations are fault tolerant to both loader robot failures and / or feeder robot failures. If the loader robot fails, other loader robots may work on either side of the bay after the failed robot has been moved out of the area. In the event of a feeder failure, the loader robot will be responsible for grabbing the carrier from the intrabay conveyor system. If both the loader robot and the feeder robot fail, one loader robot becomes responsible for all desired movements.

The low, medium, and high configurations can operate as a single unit or adjacent to any of the three arrangements, depending on the desired speed of movement. The system does not have any single point of failure that completely disables the flow of carriers across the system. In addition to fault tolerance of individual or multiple components, the system can take advantage of multiple available carrier passageways. The host controller employs a standard set of movements, including levels following significant movements of a particular carrier under normal operating conditions. To overcome temporary carrier traffic spikes, tool failures, or upstream restrictions, host control logic has a scheme for rerouting and reversing carrier flow away from problem areas. You can start. FIG. 50 shows many ways of moving carriers from point A to point B, according to an exemplary embodiment.

In an exemplary embodiment, the "feeder" robot may remove carriers from the conveyor system of the intrabay and place them in appropriate storage locations. If desired, the feeder robot allows the tool loader robot to focus only on the movement from storage to the tool, improving the total amount of movement of the system. The feeder allows the intrabay conveyor to move without limited or obstruction (eg, there may be no conveyor obstruction when accessing the carrier from an access lane similar to that in FIG. 20). Use short-distance travel. The feeder mechanism reduces the workload of the gantry system. Expected drive mechanisms to support a variety of motions include linear motors, ball screws, pneumatic drives, belt drives, friction drives, and magnetic propulsion. The following embodiments can be implemented based on the assumptions described above:
1. 1. The feeder robot is similar to a gantry loader robot, except that it is fixed in the x direction (longitudinal of the bay) and has degrees of freedom in the y (horizontal axis of the bay) and z (vertical) directions. The feeder mechanism is placed on a plane below the tool loader robot so that the loader robot can pass through without payload. The area above the loading port area is open to allow the loader robot to move across the feeder carrying the payload. The feeder system is placed vertically so that when the carrier is in the ascending position, it passes through the conveyor in the intrabay and has enough space to move and grab on the carrier. The feeder accesses the carrier from above and uses a short vertical stroke to grab the carrier from the intrabay conveyor system and place it on the desired storage flange. In this configuration, the storage lanes are coplanar with the conveyor in the intrabay. The storage lane owns a two-way classifier / shuttle mechanism used to reciprocate the carrier to the next position along the storage row. The shuttle drive mechanism is designed to allow the carrier to move, for example, to at least one pitch interval along the length of the bay. The pitch interval can be defined as the distance at which the gantry tool loader robot travels adjacent to the feeder robot and can grab the carrier without hindrance. If desired, classifiers / shuttles are also used to transport carriers between adjacent loader robot areas and storage lanes. For example, a series of career movements is:
-The conveyor of the intra bay stops momentarily at the fixed X position of the feeder robot along the length of the bay.
-The feeder robot travels from the previous Y position to just above the carrier on the conveyor in the intrabay.
・ The feeder robot grabs the carrier.
-The feeder robot travels in the Y direction (horizontal axis of the bay) to a specific shuttle lane.
-The feeder robot places the carrier on the shuttle and proceeds to the next move.
-Shuttle / classifier mechanism propels the carrier in the X direction.
The gantry tool loader robot moves to the storage position, then grabs the carrier and puts it in the appropriate tool.

Examples of some of the advantages of the system according to the exemplary embodiments include improved wafer throughput over traditional systems, multiple aisles to complete carrier transfer, and improved fault tolerance. ..

According to another exemplary embodiment shown in FIG. 48, the feeder robot is implemented as a linear stage on a plane directly beneath the shuttle and intrabay conveyor system. The stage has the same degrees of freedom as in Embodiment 1 and grabs the carrier from below rather than above. Once the carrier is captured from the Intrabay conveyor, it is propelled in the opposite direction of the bay and released onto the appropriate shuttle. The structure has the advantage that the conveyor lane can be placed anywhere between the equipment boundaries. For example, the conveyor of the intrabay may be centered rather than outside, as in Embodiment 1. Another advantage of this arrangement is that in Embodiment 1, the loader can only perform this move if it is located within the loading port area, whereas the loader robot is now in the bay. It means that it can pass through a feeder mechanism with a payload at any Y position. Moreover, the loader robot does not need to communicate with the feeder geometry to avoid collisions. Both the feeder and loader robots have payloads and can occupy the same vertical space without joining each other. The series of movements of this configuration is the same as that of the first embodiment except that the carrier is grasped from below rather than above.

In another embodiment, the overhead or mechanism from below can move in the X (longitudinal), Y (horizontal axis of the bay), and Z (vertical) directions. In this configuration, the 3-axis feeder can be moved to specific storage lanes and slots as needed, eliminating the need for shuttles / classifiers. For example, carriers are moved from the conveyor in the intrabay, placed in the appropriate storage lanes, and then translated vertically towards the initial queue of carriers in the storage. As most often seen in FIG. 49, according to other exemplary embodiments, the capacity of carrier storage that matches the carrier geometry extending from the FAB floor to the highest point reachable by the OHT system allows for carrier storage in the bay. Improved storage capacity may be generated by providing vertical storage columns that can be placed across the longitudinal direction.

In another embodiment, if desired, a cylindrical carrier nest can be placed to improve the storage density within the FAB. Cylindrical storage nests can provide a mechanism for stacking and holding carriers and raising or lowering the carriers to a specified height. The mechanism of vertical motion may be pneumatic, mechanical, or magnetic.

Here, with reference to FIG. 51, a schematic plan view of the transport system 4000 according to still another exemplary embodiment is shown. In the exemplary embodiment illustrated in FIG. 51, the transfer system is a representative section, for example, an interbay portion of the FAB overall transfer system, and in another embodiment, the transfer system has any desired dimensions and It may have a configuration. In an exemplary embodiment shown in FIG. 51, the transport system 4000 may be generally similar to the transport system 3000 described above and illustrated in FIGS. 41-50. Similar mechanisms are numbered similarly. Similar to the transfer system 3000, in the exemplary embodiment shown in FIG. 51, the transfer system 4000 may have a bulk or high speed mass transfer section 4100 (eg, conveyor) and a joining section 4200. The joined section 4200 of this embodiment shown is merely an example, and in another embodiment any desired configuration having any desired number of subsections (eg, storage sections similar to those described above, shuttle sections). May have. In general, the joining section 4200 may have a number of feeder robots capable of joining carriers between the bulk transfer system section 4100 and the process tool. The bulk transfer system section 4100 may be generally similar to the transfer system 500 described above and in part as shown in FIG. In the exemplary embodiment shown in FIG. 51, the bulk transfer system section 4100 may include a truck with a solid state conveyor system. The truck has a solid-state conveyor system similar to that described in US Patent Application Serial No. 10 / 697,528, which is incorporated herein by reference in its entirety. You may. In an exemplary embodiment shown in FIG. 51, the transport system 4100 is an asynchronous transport system (with transport system 500) in which transport of carriers by the transport system is substantially separated from the movement of other carriers being transported. It may be similar). Thus, one or more carriers operate independently during transport without affecting the transport speed of other adjacent or proximity carriers in the carrier transport stream of the transport system (eg, acceleration / deceleration, stop, loading). / Take out) may be possible.

In the exemplary embodiment shown in FIG. 51, the bulk transfer system section, hereinafter referred to as the bulk transfer machine 4100, generally comprises a main transfer truck 4100M. Further, the bulk carrier 4100 may have a large number of siding trucks 4100S. Shown in FIG. 51 as a loop for exemplary purposes, in another embodiment the main transport truck 4100M, which may have any other desired shape, is the main transport aisle of the carrier being transported by the bulk carrier. Define (or stream). Although the description of exemplary embodiments specifically refers to carriers, the mechanisms described herein place the (board) carriers on a platen or other activation device of the payload carried by the bulk carrier. The same can be applied to other embodiments that may be applicable. In an exemplary embodiment, the main aisle may be continuous and substantially constant velocity. Therefore, the carrier transported on the main transport truck 4100M can travel continuously and at high speed over the entire transport machine on the main aisle without any obstacles from the carrier stopped on the transport system. The adopted siding or branch truck 4100S allows the carrier operation on bulk transport, which determines the transport speed, to be separated from the main transport aisle. As mentioned above, the speed determination operation may be performed from the siding truck without disturbing the main aisle. Thus, the siding truck 4100S may define, for example, a carrier shock absorber, loading / unloading position or aisle switching device. In an exemplary embodiment, one siding track is shown, but for example, and in another embodiment, there may be any desired number of siding tracks. Also, the configuration of the siding in the exemplary embodiment shown, which is bifurcated and rejoins in a substantially linear segment, is merely exemplary, in another embodiment the siding track is any other desired. May have the configuration of. For example, the siding track may branch between opposite sides of the main track loop (in any bay), or different interbay (eg, inter-inter) transport sections, such as those shown in FIGS. 29A, 29B, or Branches may be made between the main tracks of the inter-intra (or vice versa) transport section. In another embodiment, the siding may have a different orientation than the main track and may traverse above or below the main track. In other other embodiments, if desired, a substantially right-angled intersection or switch may be located at the intersection between the main track and the siding track.

In an exemplary embodiment, the main and siding trucks 4100M, 4100S may include modular truck segments A, B, C, D, L connected in modules to combine trucks of a bulk carrier. The carrier may be driven on the trucks 4100S and 4100M of the bulk carrier by, for example, a linear motor. Similar to the track 500 described above, the linear motor forcer may be placed in / on the track 4100M, 4100S, and the reaction portion of the linear motor may be on the carrier. The carrier may be a non-contact or smooth bearing (eg air / gas bearing) magnetic levitation system acting on a suitable solid state support member of the carrier, or a contact bearing (eg roller, ball / roller bearing, etc.). It may be movably supported on the track by a suitable device in the track. In another embodiment, the carrier may have a start-up support integrated therein, such as wheels, rollers, gas / air bearings, and the like. As can be understood, the launching supports that support the carriers on the main and siding tracks may have any desired arrangement on the tracks in order to stably support their respective carriers across the tracks. May be distributed along the main and siding tracks so that can move freely along the track. In an exemplary embodiment, the linear motor may be, for example, a linear induction motor (LIM), a linear brushless DC motor (etc.), but in another embodiment along the main and siding track of the bulk carrier. Any desired linear motor or any other type of motor / drive may be used to facilitate the carrier. As mentioned above, in an exemplary embodiment, the LIM forcers (or phase windings) 4120, 4120M, 4120S are the track modules A, B, C, D, L forming the main and siding tracks of the carrier. Placed within, the carrier has a LIM kinetics / member described in more detail below. In another embodiment, the carrier or carrier platen may be equipped with a motor coil, and the truck may be equipped with a magnetic reaction element.

Further with reference to FIG. 51, the modular segments A, B, C, D, L of the main 4100M and siding 4100S tracks of the exemplary embodiments shown are representative and in another embodiment any desired. May have the configuration of. Track segments A, B, C, D, L are generally similar unless otherwise indicated. As seen in FIG. 51, in an exemplary embodiment, the track segment (module) may generally include a single track segment (eg, A, C, D, L) and a junction (track switching) segment. .. In another embodiment, any other desired modular track section may be used. For example, in another embodiment, any track module may be referred to as a non-joined multitrack module, generally extending parallel to each other, forming a plurality of tracks, each forming a different carrier transport aisle. ) May be included. In an exemplary embodiment, the single track segment may include substantially linear segments A, D, L and curved segment C, but in another embodiment the single track segment may include any other segment. It may have a desired shape. In the exemplary embodiment shown, the track sections are drawn at a substantially common altitude for depiction purposes. In another embodiment, the main and siding tracks may include sections of different altitudes. For example, the siding may be located at a different altitude (eg, lower or higher) than the main track and / or other siding. Also, the main track and / or the siding track may have track sections at different altitudes along the track, such as higher or lower track sections. Suitable ramps (not shown) may join track sections of different altitudes to allow carriers traveling on the track to transition between them. As can be seen from FIG. 51, the junction segment B, 4102, 4102'can be placed where the siding or branch track 4100S merges with the main track 4100M, or where bonding is desirable. In the exemplary embodiment shown in FIG. 51, two junction track segments 4102, 4102'are shown for illustrative purposes. The configuration of the junction segments 4102, 4102'shown in FIG. 51 is merely an example having a single branch track (eg, left side with respect to the direction indicated by axis X in FIG. 51) that merges / differentiates on one side of the main track 4100M. .. In another embodiment, the junction segment may branch to the right of the main track. In another other embodiment, the junction segment is a branch on the opposite side of the main track, with multiple branches within one segment having substantially direct facing or alternating branches, or one side of the main track. It may have any desired configuration, such as multiple branches on (eg left and / or right). In an exemplary embodiment, the single track segments A, C, D, L have different shapes (eg, linear, curved, etc.) but are generally similar in other respects. Each of the track segments A, C, D, L may include a corresponding section within the Forcer 4120 of the motor. As can be understood, and as shown in FIG. 51, when the modular track segment is assembled, the motor's forcer section (of the various track sections) is operably integrated (using a suitable controller). ) In the case of manipulating the reaction plate in the carrier / platen and driving the carrier / platen over the longitudinal direction of the main and siding tracks, a substantially continuous motor forcer 4120M, 4120S on the main and siding tracks. It may be defined. In another embodiment, the track may include one or more segments without an integrated forcer section.

As can be understood, what is sometimes referred to as the Forcer 4120 or linear motor primary coil assembly, for example in the case of a LIM arrangement, generally comprises a steel laminate and phase windings, which are with track segments. It may be integrally formed or housed in a forcer housing joined to a track segment. In another embodiment, the phase windings of the linear motor forcer integrated into the track segment may have any other suitable arrangement. The forcer sections within each of the segments A, C, D, L (see, eg, segment C in FIG. 52) may themselves be segmented or contiguous. The curved track segment C may have a forcer section 4120C in which the phase windings may be arranged such that the coil assembly defines a curve corresponding to the curve of the track and is generally curved. It may have a forcer section having a segment arranged to define the forcer section of the. In another embodiment, the forcer section of the track segment may have any other desired shape. The forcer sections of the track segments A, C, D, L may be arranged symmetrically with respect to the track and the carrier riding the track. In another embodiment, the forcer may be placed asymmetrically with respect to the track and carriers on it.

FIG. 54 shows a schematic end view of a representative track segment A and a representative carrier 5000 movably supported on it. As mentioned above, trucks (main and siding 4100M, 4100S) generally provide activation / propulsion, activation support, and carrier 5000 guidance to provide controlled movement of carriers along the track. .. Also, as described above, in an exemplary embodiment, a linear motor driving a carrier, such as a LIM, biases the forcers 4120M, 4120S in the truck that operate the reaction plate / element 5100 on the carrier. .. Further, referring to FIG. 53, a schematic bottom view of a typical carrier 5000 and a carrier reaction plate 5100 is shown. The arrangement of the reaction plate 5100 on the carrier shown in FIG. 53 is merely an example, and in another embodiment the reaction plate on the carrier may have any other suitable arrangement. In another embodiment, the reaction plates may be more or less. In an exemplary embodiment, the reaction plate 5100 is shown on the bottom surface of the carrier, but in another embodiment the reaction plate may be placed on any other desired side or portion of the carrier. In an exemplary embodiment, the reaction plate 5100, such as those defining a LIM, may be made from a metal such as steel or aluminum, but any other suitable material may be used. One or more of the reaction plates may be made of steel (magnetic) material, as described below. In another embodiment, the reaction element may include permanent magnets arranged to operate in a motor phase winding, such as the phase winding of a linear brushless DC motor. The reaction plate on the carrier may include one or more plates 5102 that correspond to the forcers 4120M, 4120S in the track 4100M, 4100S and provide propulsion along the main or siding track. This is schematically illustrated in FIG. The reaction plate 5102 is schematically shown as one plate in FIG. 53, but may include any desired number of plates having an arrangement as shown, for example, in FIGS. 20C, 20D. As mentioned above, the Forcer 4120 (and thus Forcer Sections 4120A, 4120C, see FIGS. 52, 54 of the individual segments) and the corresponding reaction plates 5102 in the track are arranged substantially symmetrically with respect to the carrier and the track. May be done. In another embodiment, the motor forcer may be asymmetric.

In the exemplary embodiment shown in FIG. 54, the carrier 5000 is movably supported on the track by suitable air bearings 4200. The gas / air / liquid bearing distribution shown in FIG. 54 is merely an example, in another embodiment to provide any other desired gas pressure distribution that stably supports the carrier from the track. An exhaust port may be arranged in the air. In another embodiment, there may be a gas port in the carrier that exhausts to lift the carrier from the truck. As mentioned above, in other other embodiments, the activation support between the carrier and the track may be of any other desired type and is a dependent of either the track segment or the carrier. You may. The gas port and / or gas impact area on the carrier of the air bearing 4200 may be configured to generate a combined directional force that results in horizontal guidance of the carrier to the track. As will be appreciated, the gas port may be communicatively connected to a suitable gas source (not shown). In an exemplary embodiment, the track section may have a gas conduit for feeding gas from the gas source to the gas port of the fluid bearing. Suitable valve adjustments and controls may be included, for example, to operate a gas port close to where the carrier is on the truck. The control may be active (eg, the sensor identifies the presence of the carrier and turns on / off the gas port operated in the track section where the behavior of the carrier is known).

In the exemplary embodiments shown in FIGS. 51-52, 54, the trucks 4100M, 4100S may include a control and guidance system 4130 to guide movement as the carrier travels down the track. The guidance system 4130 may be a non-contact system extending along the main and siding tracks 4100M and 4100S. In an exemplary embodiment, each of the track segments A, C, D, L may include corresponding sections of the guidance systems 4130A, 4130C (see FIGS. 52, 54), where the segments are joined. , May be combined to form a substantially continuous track guidance system. In another embodiment, the guidance system may be independently mountable on the truck. In other other embodiments, the guidance system may be of any suitable type, eg, integrated with a truck support system (eg, orientation and horizontal alignment of carriers moving along the truck). Rollers or wheels on the track or carriers in between) and / or may be integrated with a linear motor (as further described below) and / or carrier supports and linears to facilitate maintenance. It may be independent of the motor. In an exemplary embodiment, the guidance system 4130 in the track 4100M, 4100S may generally include a guidance magnet track 4130M, 4130S extending substantially parallel to the forcer 4120 of the linear motor in the track. .. The induction magnet tracks may include, for example, permanent magnets that are arranged in series to form the magnet tracks. Further, a part of the track such as the OT switching / joining portion may also include an electromagnet, and on / off may be repeated for switching. In another embodiment, the induction may include providing the motor in the track section with windings capable of generating an inductive force on the carrier. The induction winding may be integrated with the linear forcer or may be separated and independent of the linear forcer providing propulsion along the track. As can be understood, the inductive forcer in the track is a suitable inductive plate / element 5104, such as a magnetic material (eg steel) or a permanent magnet in the carrier to keep the carrier in the desired horizontal position with respect to the track 4100M, 4100S. ) May interact with. In another other embodiment, a fixture for generating an inductive force on the carrier may be mounted on the carrier and act with a stator element in the truck to guide the carrier. As mentioned above, in an exemplary embodiment, the track segment modules A, C, D, L may have corresponding sections 1430A, 1430L of the induction track, respectively, as shown in FIGS. 52 and 54. Good. In an exemplary embodiment, the induction track sections 1430A, 1430L of the track sections A, C, D, L are arranged on opposite sides along the forcer 4120A, two induction tracks 4132, 4134 (see, eg, FIG. 54). May be provided. The locations of the guidance tracks shown are exemplary. In another embodiment, more or less guide tracks may be provided at any desired position. The induction plates / elements of the carriers that interact with the induction track are off-axis (relative to axis X) linear motor reaction plates 5104R, 5106R, 5104L, 5106L (relative to axis X) of the other sections of the linear motor, as described below. It may be (see FIG. 53), or it may be another suitable steel plate / element independent of the linear motor reaction plate. In another other embodiment, the carrier may guide the magnet element, and the track is a steel / magnetic track that is arranged to interact with the magnets on the carrier to define the track guidance system. May have. The guidance system may also include a positioning / position detection system / device such as a Hall effect sensor, LVDT, etc. communicatively connected to a controller that controls the movement of the carrier along the track. The positioning system / device may be similar to that described in US Patent Application No. 11 / 211,236, which is incorporated by reference as described above. As an example, positioning feedback along the main and siding tracks may also be provided by a suitable Hall effect sensor in the LIM.

Here again, with reference to FIG. 52, a schematic plan view of the track segment C and the representative junction segment B described above is shown. The other joining segments of the bulk carrier 4100 are generally similar to the joining segment B. In an exemplary embodiment, the junction segment may have forcer sections on both the main and siding tracks 4120M, 4120S. Also, in an exemplary embodiment, segment B may have a forcer section 4125 of the switching linear motor. As will be appreciated, in an exemplary embodiment, a stand-alone linear motor independent of the main track and siding track linear motors is used to switch between the carrier main and siding tracks, as described below. It may be placed at the joint. In an exemplary embodiment, the switching linear motor may be a LIM and any other suitable linear motor such as a brushless DC motor may be used. In another embodiment, any other suitable electrical or mechanical switching system may be used. As seen in FIG. 52, in this embodiment, the Forcer 4125 (of the switching motor) may be placed at an offset position from the Forcer 4120M, 4120S of the main and siding tracks. The forcer section of the main track may be further subdivided into subsections 4122, 4124, 4126 as shown. Subsections 4122, 4124, 4126 of the main track forcers may be physically separated from each other, as shown, or effectively separated from each other by the controller, with section 4124 opposite the switching LIM forcer 4125. , Other adjacent main track LIM forcer sections 4122, 4126 may be able to be turned off independently. The configurations of the forcer sections 4122, 4125, 4124, 4126, and the guidance system on the junction segment shown in FIG. 52 are merely exemplary, and in another embodiment the junction segment has any other desired configuration. You may. As seen in FIG. 52, in an exemplary embodiment, the switching forcer 4125 may be offset from the main and siding track forcers in the direction in which the siding track merges / differentiates (eg, left from axis X). In an exemplary embodiment, the switching forcer 4125 has one end 4125M that can be placed generally parallel to the direction of the main track (indicated by axis X), and the local direction of the siding track (axis b in FIG. 52). It may have another end 4125S which may be arranged generally parallel to (indicated by). In an exemplary embodiment, the local direction of the exit / inlet of the siding (axis b) from the main track is oriented at an acute angle with respect to the direction of movement of the main track (axis X). Therefore, as can be understood, when moving to siding, the carrier may switch using the momentum along the axis X and may not offset the momentum along the axis X as a whole (eg,). It may not stop on the main track). According to another exemplary embodiment (see also FIG. 52C), the junction segment is provided at the switching forcer (4125) position with a switching guide 4130S'(tracks 4132S', 4134S ") and is described below. In order to switch without using the motor A', the switching may be performed by absorbing the momentum of the carrier along the traveling axis (for example, axis X). As described above, in another embodiment, the switching may be performed. If desired, an angle may be provided between the inlet / exit to the siding and the direction of the main track (eg orthogonal, but still the configuration of the switching linear motor utilizes momentum in the X direction). As seen in FIGS. 52-53, in an exemplary embodiment, the end 4125M of the switching LIM forcer 4125 may be placed to operate on one or more of the carrier reaction plates 5104, 5106 (. (See also FIG. 53). Reaction plates 5104, 5106 may be offset laterally (along the axis Y). Further, reaction plates 5106L, 5106R are also longitudinal from a desired reference point (eg, center) of the carrier. It may be offset in the direction (along the axis X). In an exemplary embodiment, the reaction plates may be placed on diagonal axes at different angles α, β with respect to the horizontal axis Y. In another embodiment, the carrier may have any other desired reaction plate arrangement with more or fewer reaction plates. As mentioned above, one or more of the reaction plates 5104L, 5106L. Also used by the switching forcer 4125 to switch carriers from main track 4100M to siding 4100S (and siding 4100S, vice versa at the junctions merging at the other ends of segment 4102'). Good.

As most often seen in FIG. 52B, in an exemplary embodiment, the induction magnet section 4130 is arranged to switch between the main track and the siding track. As seen in FIG. 52B, in an exemplary embodiment, the induction magnet track 4134 (the side closer to the siding inlet) has at least a portion of the switching induction track 4134S'(corresponding to that side) merging with the track 4134M. Interrupted to do. The guide track joints shown in FIG. 52B are merely exemplary, and in another embodiment the track joints / interchanges may be arranged in any other suitable manner. The opposing induction magnet track 4132M (opposite the siding inlet) merges with the corresponding switching induction 4132S'as shown. In an exemplary embodiment, each of the induction tracks 4130M, 4130S'may include section 4132J (see also FIG. 52) with an actuating magnetic field that can be switched on and off. For example, section 4132J of the induction track has an electromagnet coil similar to, for example, a magnetic chuck with a permanent magnet, and the current passing through the coil can effectively switch the magnetic field of the induction magnet section on and off, thus carrier and induction. It may consist of coils arranged around the windings to release the inductive force with the track. In another embodiment, the operable magnetic section may have any other desired arrangement. As can be understood, the induction magnet section 4132J of the desired induction track 4132M, 4132S', 4134S, 4134S' is switched "on" and "off" to make the switch, eg, the carrier is on the main track. If the main guidance track 4132M and 4134M are switched to "on", the switching guidance is switched to "off", and the carrier is switched to siding, the switching guidance 4132S'and 4134S' are "on" if the vehicle continues to travel. The main induction is "off". By switching the inductive magnet sections 4132M and 4134M to "off", the carrier is free to move laterally (outside the main track) because it no longer needs to be held by the main track. In another embodiment where the inductive magnet is in the carrier, the inductive system of the junction segment may include windings suitable for creating a canceling magnetic field in the carrier magnet. The junction segment is actuable / actuated, generally aligned with the siding inlet (axis b), which guides the carrier (moved by the forcer 4125) to the siding track 4100S when switched "on". It may further include one or more possible induction magnets (not shown). These inductive magnet sections may be switched "off" if the carrier moves over the junction and continues on the main track. Thus, as an example, in order to switch the carrier from main track to siding, in an exemplary embodiment, the forceer section 4124 may be stopped and the inductive magnet sections 4132M, 4134M are switched "off" to induce. The switch in 4132S'and 4134S' may be "on". The momentum of the carrier may move along a track with a switching guide that effectively deflects the carrier's trajectory in the direction of arrow b (see FIG. 52) on siding. The Forcer 4125 (if provided) may further drive the carrier from the main track towards the siding entrance, but in an exemplary embodiment the carrier momentum will move along the desired siding track 4100S. To continue, it may be sufficient to move the carrier to the siding until the siding forcer 4120S operates on the corresponding reaction plate 5102. The induction magnet track 4130S acquires the magnetic element of the carrier to guide the carrier along the siding track 4100S. In an exemplary embodiment, carrier switching is generally achieved in a passive manner, and position feedback may not be employed for switching. In another embodiment with active switching, position feedback during carrier switching from main to siding may be performed by a guidance / positioning system, such as when the carrier is on the main track. It may be arranged to obtain the position of the carrier before handing off to the switching LIM forcer, continuing position feedback and allowing handoff to the siding track LIM while the carrier switches through the switching LIM. In this way, the positioning device is arranged to allow position feedback during switching, any suitable type of continuous or distributed device (eg, optical, magnetic, barcode, reference strip, laser / beam ranging or High frequency ranging) may be used.

Here, with reference to FIG. 52A, another plan view of the junction segment B'of the bulk transporter according to another exemplary embodiment is shown. In this exemplary embodiment, the junction segment B'is similar to the segment B shown in FIG. 52, unless otherwise indicated. In FIG. 52A, the induction magnet track is not shown for clarity. Further, the LIM forcer section 4120M'of the main track on the segment B'may have a subsection 4124' that can be turned off independently of the adjacent forcer 4122' and 4126'. In this exemplary embodiment, the siding LIM Forcer 4120B'is directed towards the main track to allow it to operate (if desired) on the carrier's reaction plate 5106L'when the carrier is on the main track. It may be extended sufficiently. This is illustrated in FIG. 52A, which shows the reaction plates 5102', 5106L' (in the phantom) of the carriers placed to make the switch. The reaction plate 5102'of the track LIM may be placed, for example, on the forcer segment 4124'of the main track (and away from, for example, the forcer 4122' of the adjacent "upstream" main track, and the reaction plate) 5106L'. May be placed to work with the siding LIM Forcer 4120B'. Therefore, in order to switch, the main track segment 4124'may be powered off and the siding forcer 4120B' may be energized and directed the carrier towards the siding track. Switching from siding to the main track may be achieved in a similar manner. In another embodiment, the main and siding track linear motors may be any suitable linear motors such as DC brushless motors or other brushless iron core motors. In another embodiment, the permanent magnet reactive element may be in the carrier, and in other embodiments, the permanent magnet may be in the track segment (core motor in the carrier). In another embodiment, the phase winding cancels the magnetic field between the magnet and the motor core, removes the induction provided by the interaction of the magnet / iron core elements of the motor, from one track to another. If desired, they may be placed in either a track (in a manner similar to that shown in FIGS. 20A, 20B) or in a carrier so that the carriers can be switched.

Now, referring again to FIG. 51, in an exemplary embodiment, one or more track segments L may have area I, where the carrier is lifted from the track by a robot or the like in the joining section 4200. May be good. As will be appreciated, the induction magnet track 4130S within the lift area I may be provided with a section having an operable magnetic field similar to section 4132J shown in FIG. In another embodiment, the phase winding "releases" the carrier from capture by the truck and with a magnet in either the truck or the carrier to facilitate the lifting of the carrier from the truck, and the truck. Alternatively, it may be provided to cancel the magnetic field between the iron core of the linear motor or the magnetic material which is the steel reaction plate in any of the carriers.

Referring again to FIG. 53, in an exemplary embodiment, one or more carriers 5000 may have a connector 5200 for connecting one or more carriers in a carrier row to each other. The connector may be of any suitable type, such as a magnetic connector that may be operably connected to the controller for coupling or disengagement. In another embodiment, the carrier-to-carrier connection may be, for example, a mechanical connection. The connector 5200 is schematically shown in FIG. 53, but in another embodiment, it may be placed in a desired position on the carrier. The carrier-to-carrier connection may be used to connect two or more carriers to each other during transfer by the bulk carrier 4100. As can be understood, this allows one or more of the connected carriers to be the institution of the row, while the other carriers in the row may be passive. FIG. 51 shows a row of carriers according to an exemplary embodiment. As can be understood, while connected, the connected carriers are grouped together, allowing all carriers to move by controlling the movement of the "institutional" carriers in the line. This can significantly reduce the load on the controller. The location information of any carrier in the column may be registered in a controlled and relatively desirable reference within the carrier column (eg, "institutional" carrier reference). Thus, if the desired controller travels as a column, it may identify and locate the desired carrier without tracking the movement of individual carriers in each carrier, and of any carrier in the column. If desired to initiate individual control, the controller may search for the position of the column on the track and the position of any carrier with respect to the desired reference on the column to determine the approximate position of the carrier on the track. Highly accurate positioning may be performed using a track positioning system. In another embodiment, the positioning of the carrier from the row may be done in any other desired way. As can be understood, any carrier in the line may be an institutional carrier. The position of the engine in the row of carriers may be established to support the desired operating parameters. Further, the position of the engine may be switched by stopping the operation of the engine carrier and activating another carrier in the line to become the engine.

Here, with reference to FIG. 55, a schematic end front view of the transport system A4000 according to yet another exemplary embodiment is shown. In the exemplary embodiment shown in FIG. 55, the arrangement of the transfer system is merely exemplary, and in another embodiment the transfer system may have any other suitable arrangement. In an exemplary embodiment shown in FIG. 55, the transport system A4000 is generally similar to the transport system 4000 described above and illustrated in FIG. 51 (similar mechanisms are numbered similarly). The transport system A4000 may generally include a high speed bulk or mass transport section A4100 and a junction section 4200.
The high-speed mass transfer section A4100 may have one or more high-speed mass transfer passages A4102 (for illustrative purposes, two passages are shown in the embodiment illustrated in FIG. 55). In an exemplary embodiment, the mass transfer passage A4102 may be configured by the same method as described above so that the carrier A5000 in the FAB can be mass-transported. Also, in an exemplary embodiment, the mass transport aisle A4102 of the mass transport section A4100 transports carriers traveling through the passage in the direction of travel of the passage at substantially constant velocity (at least in some parts of the passage). It may be arranged as follows. The mass transport aisles may be connected to each other in a manner similar to that described above. In the exemplary embodiment shown in FIG. 55, the joining section A4200 may be generally similar to, for example, the joining section 4200 described above and shown in FIG. In an exemplary embodiment, the joining section A4200 is capable of joining carriers between the mass transfer machine and the processing tool. The junction section A4200 may generally have a shuttling section A4202 and a storage section A4204. As mentioned above, the storage section A4204 may be arranged with a storage position A4204A for storing or buffering carriers for multiple processing tools. The storage position A4204A may be arranged in any desired manner to efficiently buffer the carriers of the processing tool. Shutling section A4202 may include a number of feeder robots A4202 capable of joining carriers between the storage location of storage section A4204 and the loading junction (eg, loading port) of the processing tool. In an exemplary embodiment, the transfer system A4000 has a transfer machine handoff section A4300 capable of joining, for example, a carrier A5000 being conveyed through the bulk transfer section aisle A4100 and the joining section A4200 at substantially constant velocity. You may. Thus, in an exemplary embodiment, the transport system A4000 may be an asynchronous transport system, even a portion of the passage of the transport system in which carriers traveling through the passage are transported at substantially constant velocity. In an exemplary embodiment, the carrier handoff section A4300 effectively disrupts the carrier transport speed determination operation while the carrier is being transported by the transport system A4000 from the transport passage A4102 in which the carrier travels at a substantially constant speed. It can be so.

Further referring to FIG. 55, the aisle A4102 of the mass or bulk transport section may be equipped with any desired bulk conveyor system. Here, with reference to FIG. 55A, in the illustrated exemplary embodiment, the aisle A4102 of the mass transfer section A4100 is shown as a belt or ribbon conveyor A4103 for illustrative purposes only. As can be understood, the belt conveyor A4103 has a carrier support or transport surface A4604, and the carrier A5000 is supported from (or on) the belt A4103 for transport. Also, as can be understood, the belt A4103 and thus its carrier transport surface (defined by the belt or dependent on the belt) is in the transport direction of the aisle at a substantially constant transport speed (arrow X in FIG. 55A). May be moved along (indicated by). In another embodiment, the transport system for transporting the carrier along the aisle of the mass transport system section may have any desired configuration. For example, the aisle may have a solid-state conveyor system as described above, or may have mechanically defined transport means (rollers, fluid bearings, etc.). In other other embodiments, the aisle may be a truck for an automatic or semi-automatic carrier. The aisle transport system may be configured to be operable so that the carriers carried by the system are carried at substantially constant speed, or optionally at variable speeds. As a result, the transporter handoff section is the transport system (or part thereof) of the desired aisle in order to maintain a substantially constant transport speed, independent of the transport speed determination operation of the carriers transported by the transport system. ) Can be operated.

In the exemplary embodiment shown in FIG. 55A, the mass transfer section aisle A4102 is shown as an overhead system placed on the overhead of the processing tool. In another embodiment, the mass transport section aisle may be placed at any desired altitude with respect to the tool and the loading junction LP of the tool. Carrier A5000 in the exemplary embodiments shown in FIGS. 55, 55A-55C is representative. The carrier A5000 may be similar to the carrier 2000 described above and shown in FIGS. 36A-36B. In an exemplary embodiment, the carrier A5000 is generally an upper joining section A5002 (eg, generally arranged above or above the carrier so that the carriers can be joined and fitted) and a lower joining section A5004 (eg, generally arranged above or above the carrier). For example, it may have (generally arranged to provide bonding and fitting of carriers from below or below the carrier). The carrier may be a side opening type, a top opening type, or a bottom opening type as described above. In another embodiment, the carrier may have any desired arrangement of joining / fitting surfaces (eg, side fitting) for joining the carrier to the loading joint portion of the transfer system and processing tool. The loading joint LP of the processing tool in the exemplary embodiment shown in FIG. 55 is representative. In an exemplary embodiment, the loading joint LP may be arranged to join the underside joining section A5004 of the carrier, but in another embodiment the tool loading joint may be any desired aspect of the carrier. It may be configured to fit with the complementary carrier fitting function above. The position of the tool loading joint LP with respect to the transfer system A4000 illustrated in FIG. 55 is merely an example, and in another embodiment, the tool loading joint may be placed in a desired relationship with the transfer system. In an exemplary embodiment illustrated in FIGS. 55, 55A, the conveyor system in the aisle A4102 of the mass transfer section has a carrier support A4104 arranged to fit into the upper junction section A5002 of the carrier A5000. May be good. The configuration of the carrier support shown in FIGS. 55 and 55A is representative, where the carrier support of the carrier upper joint portion A5002 is used to releasably capture and hold the carrier from the conveyor during transport. It may have any suitable configuration that complements the fitting function and is operational with it. In an exemplary embodiment, the carrier A5000 may be carried by a conveyor in aisle A4102 that is substantially suspended beneath the aisle. The carrier lower joint portion A5004 may be accessible (from below or from the side of the carrier, etc.) during transport on the aisle A4102. In another embodiment, the carrier support on the aisle conveyor mates and supports the carrier on any desired side or surface of the carrier during transport (eg, the conveyor mates with the bottom of the carrier). Or may have any desired configuration for (may be joined).

Further referring to FIG. 55, as described above, the junction section A4200 of the transport system is an overhead gantry system generally similar to the junction systems 3200, 3300, 4200 described above and shown in FIGS. 41-46 and 51. May be good. The joining system A4200 may have a freely variable number of transporter traveling planes (such as those defined by the gantry A4201) traversed by the shuttle and feeder robot A4202. Also, as mentioned above, in another embodiment, the joining system may have any other desired configuration. In an exemplary embodiment, the gantry A4201 and storage location A4204 may be nested between aisles A4102 in the mass transfer section. The feeder robot A4204 may be configured to fit into the carrier A5000 from the carrier upper joint portion A5002 and support the carrier from above. The shuttle (not shown) may support the carrier from above or below. In another embodiment, the robot and shuttle in the junction section may have any suitable arrangement. As mentioned above, the handoff of the carrier between the mass transfer section A4100 and the junction section 4200 may be performed in the handoff section A4300, as further described below.

As most often seen in FIGS. 55, 55A, the handoff section A4300 generally accesses a carrier (such as at a substantially constant aisle transfer rate) that is conveyed along a mass aisle and provides it. It has a carriage surface on which the carrier can be captured, separated from the aisle, and the carrier can be placed in a drop station where the robot / shuttle in the joining section A4200 can access the carrier. Here, also with reference to FIGS. 55B-55D, in an exemplary embodiment, the handoff section A4300 may have a number of carriers A4302, one of which is shown for illustrative purposes. As seen in the figure, carriage A4302 may be a carrier or any other suitable transport mechanism or system that can be aligned with the carrier when transported over the aisle at transport speeds. .. Therefore, the carriage A4302 can travel in the aisle transport direction (indicated by arrow X) by a distance sufficient to allow the carriage connection with the carrier and the separation of the carrier from the mass transport support A4104. You may. In an exemplary embodiment, carriage A4302 is schematically illustrated as a truck or a carrier on passage A4304. Truck A4304 may be placed under aisle A4102 in the mass transport section (see also FIG. 55). For example, truck A4304 may be suspended from overhead by a hanger. Also, in the exemplary embodiment shown, the track and carriage A4302 on it are also located below the junction section. As mentioned above, in another embodiment, the carriage in the handoff section may have any other suitable configuration. As can be understood, in an exemplary embodiment, the arrangement of the handoff section allows the carriage to access, for example, a carrier on the aisle at a separate portion of the aisle. The handoff sections may be distributed in the appropriate sections of the aisle. As most often seen in FIG. 55D, carriage A4302 may have carrier junction A4306, which may fit and capture carriers on the aisle. The carrier joining portion A4306 of carriage A4302 may have any suitable arrangement. In an exemplary embodiment, the carrier joint portion A4306 may have a fitting function for fitting, for example, the lower joint portion A5004 of the carrier (see FIG. 55A). For example, the carriage junction A4306 complements the kinematic connection mechanism of the carrier and, when mated, results in passive alignment during mating and stable passive fixation between the carrier and the carriage. May have a kinematic connection mechanism that results in. In another embodiment, the carriage junction may have any other desired passive or active coupling or mating system (eg, clamp magnetic chuck, etc.) for capturing carriers. As seen in FIG. 55B, the carriage A4302 may be supported on the track A4304 such that it is well aligned with the carrier A5000 so that the carrier joint portion A4306 of the carriage A4302 is connected. As can be understood, the carriage track A4304 accelerates the carriage A4302 to match the speed of travel of the aisle A4102, aligns with and captures the desired carrier A5000 carried by the aisle, and releases the carrier from the aisle support A4204. It may be enough to do. In an exemplary embodiment, the carriage track A4304 may be sufficient to slow down to the desired speed for the carriage to hand off to the joining system A4200, for example at the drop-off station DS. In an exemplary embodiment, the position of the drop-off station DS may be selectively variable (such as along the handoff section track A4304), but may be stationary. In another embodiment, the carriage may be placed on a track that travels at a speed substantially consistent with the speed of travel of the passage, such as on an endless loop track.

In an exemplary embodiment, the carriage surface of the handoff section A4300 is in close proximity to the carriers on the aisle and in the Z direction to load / remove the carriers from the aisle support, as is most often seen in FIGS. May have a carriage in. In the illustrated exemplary embodiment, the carriage may be provided with a suitable Z drive (main screw, pneumatic, electromagnet, etc.) capable of driving the carriage junction A4306 in the Z direction. Good.

Thus, and as an example, in order to remove the carrier from the aisle, the carriage junction A4306 may be raised to contact the carrier junction A5004 (carriage and carrier line up). The joint portion of the carrier is variable, for example, after connecting the carriers, the carrier A5000 is passed through (for example, in order to promote the release of the carrier from the passage support, the traveling speed of the carriage with respect to the passage is increased / decreased, etc.). May be raised further to free from). The carrier released from the aisle may be lowered by carriage A4302 so that the carrier carried by the aisle removes the carrier envelope. Loading of the carrier onto the aisle by the handoff section A4300 is substantially similar, but may be achieved in the opposite manner. In another embodiment, the Z-direction movement of the carriage junction is a variable height, such as a ramp that raises and lowers the carriage to allow the support track to have a Z drive or lift, or to contact a carrier on the aisle. It may be done by any other desired method, such as having a support surface for the carriage. In other other embodiments, the movement along the axis for closing the carrier and carriage may be carried out by a passage or a suitable drive or other displacement means of the carrier (eg, the passage support, etc.). It may have a Z-axis drive unit). In yet another embodiment, the moving or closing axis that closes the carrier and carriage for the connection and division of the carrier and passage by the handoff section is in any desired direction (relative to the ground reference coordinate system). It may be.

Most commonly seen in FIGS. 55, 55B-C, and as mentioned above, the handoff section A4300 has a drop station DS accessible by, for example, the robot A4202 of the joining section A4200. In an exemplary embodiment, the drop station DS has a passageway in the mass transport section and the transport envelope TE of the carrier transported over it, such as the Y axis (in another embodiment, the offset is any desired axis). May be offset along. The offset of the drop station DS (most commonly seen in FIGS. 55B-55C), commonly referred to as the longitudinal offset from the longitudinal direction defined by the passage, is from the junction section A4200 to the upper carrier junction. Facilitates access to A5002. Also, in an exemplary embodiment, the carrier upper joint portion A500N has a joint section A4200 to allow the carriage to join the carrier at the joint portion A5002 of another carrier when the carrier is placed on the drop station DS by the carriage A4302. May be freely fitted by. Thus, in an exemplary embodiment, the carrier may be transferred directly between the carriage A4302 and the robot A4202 in the junction section without interference with gripping / placement behavior. In another embodiment, the carriage of the handoff system may be placed to place the carrier in the storage position, or the junction section may access the carrier from the storage position. In another other embodiment, the carriage in the handoff section and the robot in the joining section may join the carriers at a common joining portion. In an exemplary embodiment, top surface access to the carrier allows the joining section to employ the feeder robot A4202 to join the carrier from the drop station DS. In another embodiment, the drop station of the handoff section may be offset in any suitable direction from the transport envelope to allow the joining section to access and join the carriers at the drop station.

In an exemplary embodiment, the carrier A5000 may be moved from or to the drop station by carriage A4302, as is most often seen in FIGS. 55B-55C. As an example, the carriage is a suitable Y-drive that allows the carriage to move the carrier to the drop station, because the drive provides freedom of movement in the offset direction to the carriage or at least the portion that joins / supports the carrier. May be what is desired). As an example, the carriage joint portion A4306 may be on a movable support that is movable in the Y direction. In another embodiment, the carriage, such as a unit with a carrier, may be movable in the Y direction to move the carrier to the drop station. In yet another embodiment, the track may have a bend (eg, an endless loop) or the like away from the transport envelope such that the carriage traveling along the track is guided to the drop station.

Here, again with reference to FIGS. 56-56A, schematic plan views and front views of a representative transport system A4000'according to another exemplary embodiment are shown, respectively. In the exemplary embodiment illustrated in FIGS. 56-56A, the transport system A4000'is substantially similar to the transport system A4000 described above (similar mechanisms are numbered similarly). The transport system A4000'would generally include a mass transport section A4100' with a large number of aisles A4102', a junction section A4200'(shown as a gantry for illustrative purposes), and a mass conveyor and junction section. The carrier A5000'is handed off between the carriers and has a handoff section A4300' to allow the carrier transported by the passage of the desired mass transport section to maintain a substantially constant rate of travel. In an exemplary embodiment, the separation or offset between the drop station DS'in the handoff section A4300'and the transport envelope TE' in the aisle A4102' is performed (performing carrier movements / actions that determine transport speed outside the transport envelope). To be able to do this) may be done by changing the direction of passage A4102'. As most often seen in FIG. 56, in an exemplary embodiment, the passages may have sections A4102A', A4102B', A4102C' that have different directions with respect to each other. For example, this may be done at the intersection of the shunt / bypass section, the end section of the aisle (see also FIGS. 29A-29B, and 51). Also, as in the embodiment shown in FIG. 56, the aisle sections A4102A', A4102B', A4102C' with different directions are provided in the FAB region where it is desirable to load / remove carriers from the aisles of the mass transfer system. May be done. In the exemplary embodiment shown in FIG. 56, the arrangement of aisle sections A4102A', A4102B', A4102C' generally defines two bends, each of which is transported to install the drop station DS. It is large enough to provide the desired separation between the envelope TE'and the handoff section. As mentioned above, the orientation and placement of the passage sections shown is only exemplary. In an exemplary embodiment, each section has a handoff section portion A4300', which may be substantially similar to each other and the handoff section A4300 previously described and shown in FIGS. 55A-55D. Each handoff section portion A4300'stands a carriage and longitudinal truck A4304' (see also FIG. 56A) arranged for loading / unloading carrier A5000' from aisle A4102' in a manner similar to that described above. You may have. Each handoff section portion A4300D'may have a drop station DS'for the carrier. In an exemplary embodiment, the drop station DS'may be substantially aligned with track A4304' (along with some downstream or upstream aisle transport envelopes TE' in FIG. 56). In an exemplary embodiment, some parts A4300, A4300B of the handoff section may be used to remove the carrier from the aisle, and the other part may be used to load the carrier into the aisle. As an example, the portions A4300'may be joined and the carrier may be grabbed from the aisle section A4102A'. The removed carrier A5000'may be brought to, for example, a drop station DS' located at the end of track A4304' for handoff to the joining section A4200'. Carriers loaded onto the aisle may be brought into the drop station DSB'of portion A4300B' by the joining section A4200' for handoff. The handoff section portion A4300B'then then moves the carrier, aligns the transport speed and direction with the aisle section A4102C', and loads the carrier into the aisle. In another embodiment, each part of the handoff section may be capable of loading and unloading the carrier into and out of the aisle (eg, because the truck supports loading and unloading the carrier into and out of the aisle). The carriage may have multiple drop stations placed in and / or the carriage may circulate along the truck for both loading and unloading. Therefore, the transport system A4000'is asynchronous. There may be.

Factory automation uses wafer identification displays, for example, to plan, schedule, and track the entire process for each wafer. The ID is machine readable and is managed in a database on the host server. Wafer identification in the database is affected by wafer corruption, equipment outages, or software errors. Therefore, to overcome this, read steps that are repeated in each processing tool may be used. Mechanical reading of the wafer may typically be done, for example, after the carriers have been loaded, the wafers have been removed, and then oriented. The ID is reported to the host for verification and then processing begins after authentication. Traditionally, when a bad wafer is loaded, it can only be known by wasting a considerable amount of time identifying it. In addition, if the tool stops due to an error, the wafer must be removed and re-entered into the carrier / database, creating the possibility of human error. The carrier may have an onboard writable data tag that can store the wafer ID'and is contained within the loading port and is read by it. The carrier according to the exemplary embodiment described above may have an interlock that interlocks the carrier's writable ID tag with the wafer ID'at the loading port. The writable ID tag on the carrier incorporates an external digital I / O signal. The signal is directly connected to a sensor that can detect the removal of the pod door. The sensor may be of any suitable type, such as optical, mechanical, acoustic, capacitive, etc. As an example, low voltage signal lines may pass through conductive pads on both the pod shell and the pod door. When the door is closed and the voltage flow ends, the pads come into local contact. When the door is removed, the voltage flow is cut off and a signal is created on the carrier ID tag.

According to an exemplary embodiment, a wafer reading method is introduced in addition to the software integrity tag and the method for detecting whether the door has been opened. For example, the integrity tag is written to a writable carrier ID after the wafer is loaded and the door is secured to the pod. When the pod arrives at the next tool loading port, the tag will be read along with the integrity tag. If the integrity tag is valid, the wafer ID'has not been tampered with and is considered valid. If the integrity tag is invalid, the door has been removed at some point and the accuracy of the wafer ID is questionable. Based on this information, the host forces the tool to read the wafer to verify its integrity.

According to another exemplary embodiment, the integrated wafer ID reader may be provided at the loading port. The reader is arranged so that the ID'can be read during the continuous door opening to minimize the cycle time. This embodiment has the advantage that the cycle time is reduced as compared with the method in the processing tool, and the entire verification scheme can be executed separately from the processing tool host communication.

According to another exemplary embodiment, a dedicated alphabetic number display for each wafer slot in the carrier may be added to the carrier. The integrated display correlates with the actual wafer ID in the carrier. The character height may be large enough to read from a distance similar to the distance between the operator and the ceiling-mounted storage nest. In this embodiment, the display graphically illustrates ID integrity. If the integrity tag is disabled, it will be shown graphically on the display in different letters or colors.

The external wafer ID reader is integrated according to yet another exemplary embodiment. The external wafer ID reader may be located, for example, outside the loading port and processing tool in the AMHS system. Carriers with suspicious wafer IDs' are loaded onto external readers and verified. Once the operation is complete, the door is fixed and the integrity tag is written to the writable carrier ID. Here, the carrier is moved to the final destination, the storage / loading port position. This has the advantage that it is performed in parallel with the wafer carrier latency rather than being continuous with the tool processing time. In addition, the external reader can incorporate a wafer orientation method.

It should be understood that the above description is merely an example of the present invention. Various alternatives and modifications may be devised by those skilled in the art without departing from the present invention. Accordingly, the present invention is intended to cover all alternatives, modifications, and modifications that are included in the appended claims.

Claims (7)

It is a semiconductor component processing system
It has a portion that interfaces with the board-holding container, and has a transport section that supports and transports the board-holding container.
The transfer section is configured to interface separately with the substrate holding container held and transported by at least one board processing tool and at least one of the interbay transfer section and the intrabay transfer section. At least one of the interbay transfer section and the intrabay transfer section is located above the at least one substrate processing tool.
The interface is separate and separate from each of the interbay transport section and the intrabay transport section.
The interface is located on the at least one substrate processing tool.
Wherein the interface, the transport section, before SL via the interface to the substrate holding containers are and conveyed held the by at least one of the inter-bay conveyance section and the intrabay transport sections engage and the The substrate-holding container is configured to receive the substrate-holding container via the interface, and the substrate-holding container received by the transport section via the interface is separate from the interbay transport section and the intrabay transport section. Carried by the transport section , engagement of the substrate holding container by the interface and acceptance of the substrate holding container by the transport section is done on the at least one substrate processing tool.
The movement of the substrate holding container between the interface of the transport section and the at least one of the interbay transport sections is beyond the at least one board processing tool.
Separate and separate movement of the substrate holding container between the interface of the transport section and the intrabay transport section is made above the at least one board processing tool.
The transport section is configured to transport the substrate holding container between the interbay transport section and at least one of the intrabay transport sections and the at least one board processing tool.
The transport section includes at least one overhead gantry located above the at least one substrate processing tool, the overhead gantry having at least two intersecting and horizontally coplanar independent transport axes. A semiconductor component processing system defined and characterized in that the transport shaft provides transport of the substrate holding container by two-degree-of-freedom operation in operation in a horizontal plane. The semiconductor component processing system according to claim 1, wherein the at least one overhead gantry includes at least one overhead carrier having at least three degrees of freedom. The semiconductor component processing system according to claim 2, wherein the substrate holding container has an access side portion, and the at least one overhead carrier is supported by the at least one overhead carrier. A semiconductor component processing system comprising a rotary drive unit that rotates the access side portion to change the direction in which the access side portion is facing. The semiconductor component processing system according to claim 1, further comprising at least one overhead storage station located above the at least one substrate processing tool, said transport section being said at least one overhead storage station. A semiconductor component processing system characterized in that it is configured to transport a substrate holding container to and from the substrate holding container. The semiconductor component processing system according to claim 1, wherein the at least one overhead gantry is configured to provide load ports of the at least one substrate processing tool arranged opposite to each other. Semiconductor component processing system. The semiconductor component processing system according to claim 5, wherein the at least one overhead gantry includes at least one carrier, and the at least one carrier rotates a substrate holding container supported by the carriers. , A semiconductor component processing system characterized in that the orientation of the substrate holding container is configured to correspond to the orientation of the load ports arranged so as to face each other. The semiconductor component processing system according to claim 1, wherein the overhead gantry includes a mobile platform and at least one overhead carrier movably supported by the mobile platform, wherein the mobile platform is along a common plane. A semiconductor component processing system characterized in that at least one overhead carrier is moved with two degrees of freedom.

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