JP6630296B2 - Reduced capacity carrier, transporter, loading port, shock absorber system - Google Patents

Description

  The exemplary embodiments described herein relate to a substrate processing system, particularly a substrate transport system, a transport carrier, transport to a processing tool contact surface, and placement.

Conventional technology

[Cross-reference of related applications]
This application claims the benefit of US Provisional Application Serial No. 60 / 799,908, filed May 11, 2006, which is incorporated by reference. No. 60 / 733,813, filed on Nov. 7, 2006, which is a continuation-in-part of U.S. Patent Application Serial No. 11 / 556,584, filed on Nov. 3, 2006, which claims the benefit of US Pat. US Patent Application Serial No. 11 / 787,981, filed April 18, 2007, which is a continuation of US Patent Application Serial No. 11 / 594,365, all of which are incorporated herein by reference. Is incorporated herein by reference in its entirety.

  A major driving force in the manufacture of electronic devices is the consumer's desire for lower cost, more capable and smaller electronic devices. The main impetus translates into manufacturer mobility for further miniaturization and improvements in manufacturing efficiency. As a result, the manufacturer seeks profit as much as possible. In the case of semiconductor devices, conventional fabrication facilities or FABs have essentially (or knitted) separate processing tools, eg, collective tools, to perform one or more processes on a semiconductor substrate. Thus, conventional FABs are knitted around processing tools and may be arranged in a desired configuration to turn a semiconductor substrate into a desired electronic device. For example, processing tools may be arranged in a conventional FAB in a processing bay. As can be appreciated, between the tools, the substrates are held in a carrier such as a SMF, FOUR, etc., such that the substrates being processed between the tools maintain substantially similar cleanliness conditions while in the tools. . Communication between the tools may be provided by a handling system (such as an automatic material handling system (AMHS)) that can transport the substrate carrier to the desired processing tool in the FAB. The interface between the handling system and the processing tool is, for illustrative purposes, generally two parts, the handling for loading / unloading the carrier to / from the loading station of the processing tool. Having a junction between the system and the tool and a junction between the carrier and the tool that allows loading and unloading of the substrate between the carrier and the tool (i.e., a separate or group). You may think. Many conventional joining systems for joining processing tools to carriers and material handling systems are known. Many conventional bonding systems often include processing tool bonding, carrier bonding, or materials that have undesirable features that increase the cost of loading and unloading substrates from the processing tool or cause inefficiencies. There are complexity issues that result in one or more of the handling system interfaces. The following describes in more detail exemplary embodiments that overcome the problems of conventional systems.

  Industry trends indicate that future IC devices may have structures below about 45 nm. To increase efficiency and reduce fabrication costs, IC devices of this size are desirably manufactured using as large a semiconductor substrate or wafer as possible. Conventional FABs can typically handle 200 mm or 300 mm wafers. Industry trends indicate that in the future it would be desirable to be able to handle wafers larger than 300 mm, such as 450 mm FAB wafers. As can be appreciated, using larger wafers can result in longer processing times per wafer. Therefore, when employing a larger wafer, such as a 300 mm or larger wafer, it may be desirable to use a smaller lot size for wafer processing in order to reduce work in process (WIP) in the FAB. Also, smaller wafer lot sizes may be particularly desirable for lot processing of wafers of any size, or any other substrate or flat panel including, for example, a flat panel of a flat screen display. Lot processing characterized by WIP reduction and efficiency can be implemented by using them, but employing small processing lots in the FAB can adversely affect conventional FAB throughput. . For example, a smaller lot size tends to increase the transfer system load of a transfer system of an arbitrary capacity (for transferring a wafer lot) when compared to a larger lot size. This is illustrated in the graph shown in FIG. 51A. The graph of FIG. 51A shows the relationship between lot size and transport speed (as movements per hour) for many different FAB rates (shown as wafers started every desired period, such as per month, for example, WSPM). (Shown). Also, the graph of FIG. 51A shows a line indicating the maximum capacity of a conventional FAB handling system (eg, traveling about 6000-7000 per hour). Thus, the intersection between the handling system capacity line and the FAB rate curve identifies the surface for the lot size for which the curve is available. For example, to achieve a FAB rate of about 24,000 WSPM with any conventional transport system, the minimum lot size is about 15 wafers. The use of smaller wafer lots reduces the FAB rate. Therefore, the wafer carrier, the interface between the carrier and the processing tool, and the carrier transport system (in the FAB) can be used to use one smaller wafer lot and a larger wafer lot of the desired size without adversely affecting the FAB rate. It is desirable to provide a system in which (the carrier is transported between tools, storage locations, etc.).

  1 provides an exemplary embodiment of a semiconductor component processing system. The system includes at least one processing device for processing the parts, a primary transport system, a secondary transport system, one or more junctions between the first transport system and the second transport system, Having. The primary and secondary transport systems each have one or more substantially constant velocity sections in a queue section that leads to constant velocity sections.

  The foregoing aspects and other features of the present invention are described in the following description in connection with the accompanying drawings.

1 is a schematic front view of a component carrier incorporating features according to an exemplary embodiment, and a component or substrate S placed on the carrier. FIG. 4 is a schematic partial plan view of a component support of a carrier according to another exemplary embodiment. FIG. 7 is a schematic front view of a component support of a carrier according to another exemplary embodiment. FIG. 2 is a schematic cross-sectional front view of the carrier of FIG. 1 and a tool port interface according to another exemplary embodiment. FIG. 9 is another schematic cross-sectional front view of a tool port interface and carrier according to another exemplary embodiment. 3A-3C are schematic cross-sectional front views illustrating a tool port interface and a carrier according to another exemplary embodiment, each viewed from a different location. 3A-3C are schematic cross-sectional front views illustrating a tool port interface and a carrier according to another exemplary embodiment, each viewed from a different location. 3A-3C are schematic cross-sectional front views illustrating a tool port interface and a carrier according to another exemplary embodiment, each viewed from a different location. FIG. 9 is a schematic front view of a carrier and tool interface according to yet another exemplary embodiment. 4A-4C are enlarged cross-sectional views of the interface between the carrier and the tool, respectively, illustrating the interface configuration according to different exemplary embodiments. 4A-4C are enlarged cross-sectional views of the interface between the carrier and the tool, respectively, illustrating the interface configuration according to different exemplary embodiments. 4A-4C are enlarged cross-sectional views of the interface between the carrier and the tool, respectively, illustrating the interface configuration according to different exemplary embodiments. 5A-5C are schematic partial front views of a carrier and tool interface in accordance with yet another exemplary embodiment, showing the carrier and tool interface at respective locations. 5A-5C are schematic partial front views of a carrier and tool interface in accordance with yet another exemplary embodiment, showing the carrier and tool interface at respective locations. 5A-5C are schematic partial front views of a carrier and tool interface in accordance with yet another exemplary embodiment, showing the carrier and tool interface at respective locations. FIG. 7 is a schematic front view of a component carrier according to another different exemplary embodiment. FIG. 7 is a schematic front view of a component carrier according to another different exemplary embodiment. 7A-7C are schematic front views of component carriers according to different exemplary embodiments, showing the carrier in different positions. 7A-7C are schematic front views of component carriers according to different exemplary embodiments, showing the carrier in different positions. 7A-7C are schematic front views of component carriers according to different exemplary embodiments, showing the carrier in different positions. FIG. 9 is another schematic front view of a tool interface and carrier according to another exemplary embodiment. FIG. 9 is another schematic front view of a tool interface and carrier according to another exemplary embodiment. FIG. 9 is another schematic front view of a tool interface and carrier according to another exemplary embodiment. FIG. 4 is a schematic partial front view of a process tool and a carrier bonded thereto according to another exemplary embodiment. FIG. 9 is a schematic front view of a process tool section and a carrier bonded thereto according to another exemplary embodiment. FIG. 12 is a schematic bottom view of a carrier (component transfer) opening of the carrier of FIG. 11. FIG. 12 is a schematic bottom view of a carrier door of the carrier of FIG. 11. FIG. 12 is a schematic top view of the tool at the interface of FIG. 11 and at the carrier door interface of the tool section. FIG. 12 is a schematic top view of the tool at the interface of FIG. 11 and at the carrier door interface of the tool section. FIG. 9 is a schematic front view of a process tool and a carrier bonded thereto according to yet another example embodiment. FIG. 10 is a schematic front view of a tool interface and carrier according to yet another example embodiment. 16A and 16B are schematic front views of a tool interface and carrier according to another exemplary embodiment, shown in different positions, respectively. 16A and 16B are schematic front views of a tool interface and carrier according to another exemplary embodiment, shown in different positions, respectively. It is a schematic side view of a carrier. FIG. 9 is another schematic front view of a carrier and tool interface, according to another exemplary embodiment. FIG. 9 is another schematic front view of a carrier and tool interface, according to another exemplary embodiment. FIG. 9 is a plan view of a tool interface, according to another example embodiment. FIG. 6 is a schematic front view of a tool interface and carrier according to another exemplary embodiment. FIG. 6 is a schematic front view of a tool interface and carrier according to another exemplary embodiment. FIG. 4 is a schematic plan view of a transport system according to another exemplary embodiment. FIG. 11 is a schematic partial plan view of a track portion of the transport system of FIG. 10. FIG. 11 is a schematic partial plan view of a track portion of the transport system of FIG. 10. 20C and 20D are schematic bottom views of different payload delivery systems, respectively, according to other example embodiments. 20C and 20D are schematic bottom views of different payload delivery systems, respectively, according to other example embodiments. FIG. 9 is a schematic partial plan view of another portion of the transport system according to another exemplary embodiment. FIG. 9 is another schematic partial plan view of a portion of a transport system according to another exemplary embodiment. FIG. 9 is another schematic partial plan view of a portion of a transport system according to another exemplary embodiment. FIG. 9 is another schematic partial plan view of a portion of a transport system according to another exemplary embodiment. FIG. 9 is another schematic partial plan view of a portion of a transport system according to another exemplary embodiment. 25A and 25B show different front views of a transport system and a processing tool, respectively, according to another exemplary embodiment. 25A and 25B show different front views of a transport system and a processing tool, respectively, according to another exemplary embodiment. 26A and 26B are different schematic front views of a transfer joining system for transferring a carrier between a transfer system and a tool according to another exemplary embodiment. 26A and 26B are different schematic front views of a transfer joining system for transferring a carrier between a transfer system and a tool according to another exemplary embodiment. FIG. 4 is a schematic partial front view of a transport system according to another exemplary embodiment. 27A and 27B are other schematic partial front views of the transport system at different positions. 27A and 27B are other schematic partial front views of the transport system at different positions. FIG. 4 is another schematic front view of a transport system according to another exemplary embodiment. FIG. 4 is a schematic plan view of a transport system according to another exemplary embodiment. FIG. 4 is a schematic plan view of a transport system according to another exemplary embodiment. FIG. 4 is a schematic plan view of a transport system and a processing tool according to another exemplary embodiment. FIG. 29C is a schematic partial front view of the transport system and processing tool of FIG. 29C. FIG. 4 is another schematic partial front view of the transport system. FIG. 9 is another schematic partial front view of a transport system according to another exemplary embodiment. FIG. 7 is a schematic plan view of another transport system according to another exemplary embodiment. FIG. 9 is a front view of another transport system according to another exemplary embodiment. FIG. 9 is yet another schematic plan view of a transport system according to another exemplary embodiment. FIG. 9 is a bottom perspective view of a transport device, according to another exemplary embodiment. FIG. 9 is a plan view of a transport device according to another example embodiment. FIG. 9 is a bottom plan view of a transport device, according to another exemplary embodiment. FIG. 9 is another bottom plan view of a transport device according to another exemplary embodiment. FIG. 4 is a schematic cross-sectional view of a portion of a compliant kinematic coupler. FIG. 4 is a perspective view of a tool loading station according to an exemplary embodiment. FIG. 4 is an end view of a tool loading station, according to an exemplary embodiment. FIG. 4 is a side view of a tool loading station according to an exemplary embodiment. FIG. 4 is a plan view of a tool loading station, according to an exemplary embodiment. FIG. 10 is a plan view of another tool loading station according to another exemplary embodiment. FIG. 15 is a plan view of yet another tool loading station, according to yet another example embodiment. FIG. 15 is a plan view of yet another tool loading station, according to yet another example embodiment. 4 is a flow chart illustrating a respectively different process schematically according to different exemplary embodiments. 4 is a flow chart illustrating a respectively different process schematically according to different exemplary embodiments. 4 is a flow chart illustrating a respectively different process schematically according to different exemplary embodiments. FIG. 4 is a cross-sectional view of a tool loading station according to another example embodiment. FIG. 2 is a schematic cross-sectional view of a substrate support according to an exemplary embodiment. FIG. 2 is a schematic cross-sectional view of a substrate support according to an exemplary embodiment. FIG. 2 is a schematic cross-sectional view of a substrate support according to an exemplary embodiment. FIG. 2 is a schematic cross-sectional view of a substrate support according to an exemplary embodiment. FIG. 9 is a schematic perspective view of a processing system according to yet another example embodiment. FIG. 9 is an end elevation view of a processing system according to yet another example embodiment. FIG. 9 is a plan view of a processing system according to yet another example embodiment. FIG. 42 is a schematic exploded perspective view of a section of the system of FIG. 41. FIG. 3 is a schematic diagram illustrating different selectable arrangements of the system according to different exemplary embodiments. FIG. 3 is a schematic diagram illustrating different selectable arrangements of the system according to different exemplary embodiments. FIG. 3 is a schematic diagram illustrating different selectable arrangements of the system according to different exemplary embodiments. FIG. 3 is a schematic diagram illustrating different selectable arrangements of the system according to different exemplary embodiments. FIG. 3 is a schematic diagram illustrating different selectable arrangements of the system according to different exemplary embodiments. FIG. 9 is a schematic front view of a system according to yet another example embodiment. FIG. 9 is a schematic partial perspective view of a system according to yet another example embodiment. FIG. 4 is another schematic plan view of a processing system according to another exemplary embodiment. FIG. 4 is a schematic plan view of a transport system according to another exemplary embodiment. 5 is a graph illustrating the relationship between lot size and transport speed. FIG. 4 is a schematic partial plan view illustrating a portion of a transport system according to another exemplary embodiment. FIG. 4 is a schematic partial plan view illustrating a portion of a transport system according to another exemplary embodiment. FIG. 9 is another partial plan view of a transport system according to another exemplary embodiment. FIG. 52 is a schematic plan view of a transport vehicle of the transport system shown in FIG. 51. FIG. 9 is a schematic end elevation view of a transport system according to yet another embodiment. FIG. 9 is a schematic end elevation view of a transport system according to yet another exemplary embodiment. FIG. 2 is a schematic partial side perspective view of a transport system. FIGS. 55B and 55C are partial plan views of the transport system showing the carriers transported by the transport systems at different positions. FIGS. 55B and 55C are partial plan views of the transport system showing the carriers transported by the transport systems at different positions. It is a front view of the junction part of a conveyance system. FIG. 6 is a schematic plan view of a transport system according to yet another exemplary embodiment. FIG. 9 is an end view of a transport system according to yet another example embodiment.

  Still referring to FIG. 1, the component carrier 200 defines a chamber 202 that can carry the component S in an environment that can be isolated from the atmosphere outside the chamber. The shape of the carrier 200 shown in FIG. 1 is merely exemplary, and in other embodiments, the carrier may have any other desired shape. The carrier 200 can house a cassette 210 in the chamber for supporting the parts S in the carrier, as shown. Generally, the cassette 210 is an elongated support 210S (in the embodiment, for example, two are shown) with a component support shelf 210V thereon to provide a row or stack of supports, or one as shown. One or more components have shelves that are separately supported. The cassette may be mounted or attached to a carrier structure, as described in more detail below. In another embodiment, the carrier may not have a cassette and the component support may be integral or formed as a unitary structure with the carrier structure. Parts are shown as flat / substrate elements, such as semiconductor wafers of 350 mm, 300 mm, 200 mm or any desired size and shape, or reticles / masks or flat panels for displays or any other suitable articles. The carrier may be a reduced or smaller lot size carrier as compared to a conventional 13 or 25 wafer carrier. The carrier may be configured so that the parts carry only one small lot, or the parts may be configured to carry less than 10 small lots. A preferred embodiment of a reduced capacity carrier similar to carrier 200 is described in U.S. Patent Application Serial No. 11 / 207,231, filed August 19, 2005, entitled "Reduced Capacity Carrier and Method of Use". And are shown and incorporated herein by reference in their entirety. A preferred embodiment of a junction and transport system between a carrier similar to the carrier 200 and a processing tool (eg, a semiconductor fabrication tool, stocker, sorter, etc.) is described in US Pat. Application Serial No. 11 / 210,918, entitled "Elevator Bases Tool Loading and Buffering System", and Serial No. 11 / 211,236, filed August 24, 2005, entitled "Transportation System". Both documents are described and shown, both of which are incorporated herein by reference in their entirety. Another preferred embodiment of a carrier having a mechanism similar to carrier 200 is described in US Patent Application Serial No. 10 / 697,528, filed October 30, 2003, entitled "Automated Material Handling System". And are shown and incorporated herein by reference in their entirety. As can be appreciated, parts forming a smaller lot can be immediately transferred to a subsequent workbench (at any workbench) without waiting for the processing of other parts to be completed, as can occur in a larger lot. (In response to the completion of the above process), the carrier reduced in size similar to the carrier 200 can reduce the work in process in the FAB. Although the features of the exemplary embodiment are described and shown with particular reference to a small volume carrier, the features of the exemplary embodiment may include 13 or 25, or any other desired number of components. It applies equally to any other suitable carrier, such as a carrier that can be accommodated therein.

  Still referring to FIG. 1, in an exemplary embodiment, the carrier 200 may be shaped to hold the components in a vertical (ie, Z-axis) stack. The carrier 200 may be a bottom or top opening type carrier or a bottom and top opening type carrier. In the exemplary embodiment shown, the top and bottom surfaces are positioned along a vertical line or Z-axis, but in other embodiments, the top and bottom surfaces are oriented along any of the other axes. Is also good. The top and bottom openings, described in more detail below, correspond to the carrier opening 204 (part S is moved into and out of the chamber 202, but defined by the carrier). This means that they are substantially aligned (in the present embodiment, substantially perpendicular to the Z axis). As shown below, generally, the carrier 200 has a casing 212 having a base and a closable or removable door. When closed, the door may be secured to the base and sealed. The seal between the door and the base may allow the chamber 202 to be isolated from the outside atmosphere. The isolated chamber 202 may hold any desired isolated atmosphere, such as clean air, an inert gas, etc., or may be able to maintain a vacuum. The door may be opened to allow loading / unloading of parts from the carrier. In the exemplary embodiment, door means a portion where the carrier is opened and is removable or removable when accessing the component support shelf therein. In the exemplary embodiment shown in FIG. 1, the casing 200 generally includes a generally recessed or hollow portion (hereinafter referred to as a shell) 214 that can receive components therein, and a wall ( Cap / cover, etc.) 216. As described below, the entire wall 216 or shell 214 may operate as a carrier door. The wall and shell are joined to close the carrier and separated to open the carrier. In an exemplary embodiment, the shell and wall may be a metal, such as an aluminum alloy or stainless steel, made by any suitable process. The wall or shell or both may be a unitary member (single structure). In another embodiment, the carrier casing may be made of any other suitable material, including suitable non-metals. Cassette 210 may be mounted on wall 216, but in other embodiments, the cassette may be mounted on a shell. The mounting of the cassette on either the shell or the door may be selected to facilitate the ease of removing the cassette or substrate therein from the carrier when the door is opened. In the embodiment shown, the wall 216 is located on the top surface of the shell, but in other embodiments, the carrier casing may have a configuration with a shell on the top surface and a wall on the bottom surface. Good. In yet other embodiments, the shell may have removable walls on both the top and bottom surfaces (ie, a carrier with top and bottom openings). In other alternative embodiments, the removable wall may be placed laterally on the carrier. In an exemplary embodiment, the door is a passive component (e.g., as described further below, between a door and a carrier and between a door and a tool interface and a part that opens and / or opens). (There is substantially no movement of components).

  Referring now to FIG. 2A, a carrier 200 is shown positioned at a tool port interface 2010 of a suitable processing tool. The processing tool may be any desired type, such as a classifier, stocker, or a tool capable of performing one or more processes such as material deposition, lithography, masking, etching, polishing, metrology, etc., or a process module or chamber such as a load lock. A tool having one or more tools may be used. The processing tool has a controlled atmosphere, at least in part, such that the tool interface 2010 can load / unload components between the tool and the carrier 200 without affecting the controlled atmosphere within the tool or carrier 200. You may do so. In an exemplary embodiment, the port interface 2010 generally includes a port or opening 2012 through which a substrate can be loaded into a processing tool, and a door, cover, or removable portion 2014 that closes the port. May have. In another embodiment, the removable portion may partially close the opening. In FIG. 2A, port door 2014 is shown in a closed position and an open position for illustrative purposes. In the embodiment shown in FIG. 2A, the carrier 200 may be loaded (ie, moved in the Z-direction) below the interface having the tool port 2012, as shown below. FIG. 2A shows the top wall 216 acting as a door for the carrier 200. For example, the wall 216 may be connected to the port door 2014 and, for example, moved into the tool to open the tool port interface upon removal of the port door. Removing the wall 216 removes the cassette (mounted thereon) and the components thereon from the carrier (for access by the component transporter / robot). Referring again to FIG. 1, the configuration of the cassette 210 with the opposing supports 210S provides access areas 210A, 210B on more than one side (two sides in the exemplary embodiment) of the cassette, and the component robot. (See also FIG. 2A) may load / unload components on cassette shelves. In another embodiment, the carrier may have any desired number of component access areas. The access areas may be arranged symmetrically around the periphery of the carrier or may be arranged in an asymmetric configuration. In the exemplary embodiment shown in FIG. 2A, the tool may have more than one part handling robot 2016A, 2016B, for example, to access a part V in more than one access area 210A, 210B. . In another embodiment, the tool may have more or fewer part transport robots. Multi-directional robot access to the cassette may allow handing of parts between robots in the cassette. Also, multi-directional robot access to the part defines the orientation when the carrier is transferred or joined to the tool port. Accordingly, carrier 200 may be coupled to the tool interface in one or more orientations relative to the tool interface. The carrier is closed by returning the port door to its closed position, which returns the carrier wall 216 to join the shell 214.

  Referring to FIG. 2B, a junction between the carrier 200 and the tool port junction 2010 'is shown, according to another exemplary embodiment. In this embodiment, the shell 214 of the carrier may operate as a door. In the embodiment shown, the tool port door 2014 ′ is configured to surround and seal around the shell to prevent exposure of the interior of the tool to contaminants outside the shell, such that the tool port door 2014 ′ may be positioned relative to the carrier shell. It may have a substantially conformal shape. In an exemplary embodiment, the carrier 200 may be loaded on top (i.e., moved down along the (-) Z direction), such as when the carrier is lowered from the overhead of the transport system. To open the carrier 200, at the same time as the shell 214 is removed from the carrier, the port door is moved downward (in the (-) Z direction), for example, inside the tool. This is sometimes referred to as a bottom-opening type of carrier, since the carrier door (ie, shell 214) is located on the bottom surface and opens the carrier by downward movement. The openings in the carrier expose parts in the cassette that remain on the wall 216. In this embodiment, a robot (similar to robots 2016A, 2016B of FIG. 2A) is provided with a degree of freedom in the Z-axis to access vertically spaced cassette shelves or components therein. Is also good. The robot may have a mapper (not shown) thereon. In another embodiment, shell 216 may have an integrated mapper that allows the passage beam mapper to map the cassette upon shell removal. 2A-2B illustrate a carrier 200, which may be top and bottom open. In other alternative embodiments, the orientation of the shell and wall may be reversed (shell on top of the wall), and the carrier is open top (ie, raising the shell) similar to FIG. 2A, but may be of the opposite bottom open type (ie, lower the wall).

  Referring again to FIG. 1, as described above, the wall 216 and the shell 214 are passive without movable elements, such as fixtures, that can act to contaminate the clean space in the tool or container. Structure may be used. For example, the wall and the shell may be magnetically fixed to each other. For example, the magnetic fixture may have permanent or electromagnet elements 226, 228, or a combination thereof, and may be placed on wall 216 and shell 214, if desired, to secure the wall and shell. The magnetic fixture may include a reversible magnetic element that is switched (i.e., to open or close) by, for example, passing a charge through the reversible element. For example, wall 216 may include a magnetic element 228 (eg, a steel material) and shell 214 may include a magnetic switch element 226 that is actuated to secure the wall to the shell. In the exemplary embodiment shown in FIGS. 2A, 2B, magnetic elements in the wall and operable magnets in the shell move the carrier door (either wall or shell, see FIGS. 2A-2B) to the port door. The securing may be configured to be operable with the magnetic fasteners 2028 ', 2026' in the port door interface 2010, 2010 'so that the carrier door is released from the rest of the carrier. In another embodiment, the magnetic fixture between the wall and the shell may have any other desired configuration. In the exemplary embodiment shown in FIG. 23, the carrier includes a mechanical coupling element 230, such as a working pin, a pressure coupling, or a shape memory device that mates with a coupling coupling mechanism 2030 on the port interface, and May be connected to the port interface. In the exemplary embodiment, the device is shown as being located on a wall portion, but in other embodiments, the device may be secured to a shell. As can be seen from FIG. 24, the actuatable device is encapsulated in a sealed interface between the removable wall portion and the port door, and may be created therein by operation of the device. Certain potential particulates may be trapped. Passive carriers and carrier doors provide a clean, washable carrier that is vacuum compatible.

  As described above, the carrier door and base (ie, wall 216 and shell 224) may be sealed to isolate carrier chamber 202. Also, when the carrier is mated with a port of a tool (eg, a loading port module), each of the carrier door and base may include the carrier door (ie, wall 216 or shell 214 of FIG. 1) at the port door and the base of the carrier. May be provided with a sealing joint in order to seal each with the port. Further, the port door may have a sealing connection with the port.

  3A to 3C show each of the sealing joint portions (221 ′: carrier door and carrier, 222 ′: carrier and port, 223 ′: port door and port, and 224 ′: port door and carrier door) for convenience. A carrier similar to carrier 200 and joined to tool port 2220 according to an exemplary embodiment forming a unitary seal 222 ', sometimes referred to as a generally X configuration (best seen in FIG. 3B). 200 ′ is shown. In the exemplary embodiment shown, the sealing interface of the carrier is shown in the top opening for illustrative purposes, but the carrier may have multiple openings (similar to opening 204 shown in FIG. 1) ( In other embodiments (e.g., top and bottom surfaces), each opening may be provided with a sealing joint. As can be appreciated, the generally X structure is only for a schematic depiction of the sealing joint surface, and in another embodiment, the sealing joint surface may be curved, e.g. In any suitable arrangement. The generally X-shaped sealing structure defines a plurality of sealing joints (e.g., 221'-222 ') where the volume trapped between the joints is substantially zero (0). Thus, the opening of any sealed joint does not result in contaminants being released into the space opened by the opening of the sealed joint. Further, in other alternative embodiments, the seal may have any desired orientation (eg, a seal joint that is horizontally or vertically oriented in a substantially + pattern). In the exemplary embodiment, the carrier 200 'is shown as a top open type for exemplary purposes (the wall 216' is a door that is opened by lifting upwards as in the embodiment illustrated in FIG. 2A). A), port 2220 is configured for bottom area loading (the lifter lifts carrier 220 'up to dock the tool port). In this embodiment, the shell 214 'may have a sealing interface 214I' and uniformly sloped sealing surfaces 221C ', 222C'. Although the sealing surfaces 222C ', 221C' on the shell are shown as substantially flat, in another embodiment the surface is uniformly sloped, but in order to create a generally X-shaped sealing structure. A comprehensive or exclusive angle or other shape to improve the sealing may be formed on the sealing surface. In this embodiment, the walls 216 'of the carrier are generally oriented to define sealing surfaces 221CD' and 224CD '(in the exemplary embodiment shown in FIG. 3A, with a bevel). It has a stop joint 216I '. As can be seen in FIG. 3A, each of the shell and wall sealing surfaces 221C ', 221CD' substantially complementarily define the sealing interface 221 'when the wall and shell are closed. The surface 221C 'on the interface 214' of the carrier forms a generally V-shape that provides a guide to the wall 216 'when located on the shell (see, eg, FIG. 3C). Also, in the exemplary embodiment, the carrier door of the sealing interface 221 'of the carrier may be positioned such that the weight of the wall 216' acts to increase the sealing pressure on the interface. As can be appreciated, the cassettes and components supported by wall 216 'in this embodiment facilitate sealing of the carrier door and carrier. As seen in FIGS. 3A-3B, sealing surfaces 222C 'and 224CD' are arranged to complement respective sealing surfaces 222P ', 224PD' on port 2220 and port door 2214. FIG. 3B shows the carrier 200 'docked to the port 2220 and the seals 221', 224 'closed. The closure of the seals 222 ', 224' may reduce the risk of contaminating the interior of the tool and carrier / chamber from any exposed surfaces (ie outside the controlled or isolated chamber inside the carrier or tool). Surface) and isolated. As best seen in FIG. 3B, the generally X-shaped seal 220 ′ provides optimal cleanliness because it forms a seal that may be referred to as having substantially zero joint capacity loss. I do. As mentioned above, this does not create a substantial pocket or space with an outer surface where the sealing features of the seal 220 'are exposed when either the carrier door or the port door is opened (i.e., Internal surface). This is best seen in FIG. 3C, but the removal of the port door 2214, and thus the removal of the carrier door 216 ', does not expose any of the unsealed / external surfaces to the interior of the carrier / process tool.

  As shown in FIG. 3C, in this embodiment, the top opening of the carrier door results in the carrier chamber 202 'being placed under an elevated cassette held by the wall 216'. The carrier chamber 202 'may be in communication with the interior of a tool that may have a forced air circulation system (not shown), which may create a general venturi flow within the carrier chamber. In this embodiment, the circulating air flow within the chamber of the carrier is located below the components on the raised cassette (hanging from wall 216 '), and the likelihood of deposition of circulatingly disturbed particulates is minimal. (Settle away from the above parts). In the exemplary embodiment shown in FIGS. 3A-3C, carrier 200 'may be raised to join and dock port 2220 with a suitable lifting device LD. A suitable registration mechanism LDR is provided on the carrier and the lifting device, which may place the carrier on the device and thus the carrier in relation to the port. In another embodiment, the carrier may be held at the port in any suitable manner. The carrier door 216 'is secured to the port door 2214 by magnetic securing, a mechanical connection (e.g., located at the sealed joint between the doors) or vacuum suction created at the sealed joint between the doors. May be. Port door 2214 is opened / closed by a suitable device that can index a cassette (similar to cassette 210 in FIG. 1) through a desired mapping sensor (not shown).

  Referring now to FIG. 4, a carrier 300 according to another exemplary embodiment is shown, which is generally similar but opposite to carrier 200 and has a shell 314 on the top surface of wall 316. . Like the carrier 200, the carrier 300 may be either top-open (the shell operates as a door) or bottom-open (the wall operates as a door). In the exemplary embodiment shown, the carrier 300 may have an integrated transport component 300M. For example, the shells (or walls) 314, 316 of the carrier may have rollers or air bearings and a carrier activation support such as a reaction member that can be driven by a drive or motor, thereby providing a carrier in the FAB. May be self-transportable (ie, without using an independent transport vehicle). FIG. 4 illustrates the carrier 300 placed at a loading port 3010 (similar to the port 2010 described generally above) for illustrative purposes. In the exemplary embodiment shown, the carrier 300 may be overloaded on the port interface. The carrier door 316 may be placed next to or adjacent to the port door 3014 (to form an interface), and the shell 314 may interface with the port 3012. Also, the interface between the carrier 300 and the port may have a three-, four-, or five-way “crossing” type (or no capacity loss) seal similar to the generally X seal 220 ′ shown in FIG. 3B. Good. FIG. 4A illustrates a cross-sectional view of a seal 320, according to one embodiment. In an exemplary embodiment, the seal 320 may be a four-way seal with a bottom-open structure, but is otherwise generally similar to the seal 220 '.

  FIG. 4B illustrates another cross-section of the interface between the carrier and the port, and a seal therebetween, according to another exemplary embodiment. In this embodiment, the seal 320 'is substantially similar to the seal 320. FIG. 4B further illustrates that the shell interface 314I 'can have support flanges / features 326', 328 '. In this embodiment, the flange 326 'may manipulate the wall 316', for example, where the flange overlaps a portion of the carrier door (in the embodiment shown, the mechanism defines a door contact surface, but another implementation). In a form, the mechanism may not contact the door), and may position a magnetic fixture 326M 'to hold the wall 316' to the shell 314 'when the carrier door is closed. Further, mechanism 326 'may overlap magnetic fixture 3040' in port door 3014. The magnetic fixture 3040 'in the port door may operate to secure the wall 316' to the port door 3014 'to remove the carrier door. By placing the carrier shell mechanism 326 ', the port door fixture 3040' (which secures the wall 316 'to the port door) is activated, for example, securing the wall 316' to the shell 314 'almost simultaneously. It may be canceled / disabled. Conversely, upon closure of the port door 3014 ', release / inactivation of the port door fixture 3040' secures the magnetic latch 326M 'between the wall 316' and the shell 314 '. Is also good. In an exemplary embodiment, the external feature 328 'on the shell may mate with the positioning / centering feature 3012C' of the port 3010 'to position the carrier when placed. The shape of the external feature 328 'illustrated in FIG. 4B is merely exemplary, and in other embodiments, the carrier may have any desired positioning features. As described above, the X configuration of the seal 320 'does not require purging the seal joint before opening the carrier door because the purge capacity of the seal joint is substantially zero. In another embodiment (eg, see FIG. 4B), the port may include a purge line 3010A. Purge line 3010A may be on or between any sealing joints. FIG. 4C illustrates another cross-section of the interface between the carrier and the tool port, according to another exemplary embodiment. The carrier-port interface has a seal 320 ″ that is generally similar to the seal 320 described above. In this embodiment, the carrier shell 314 "places the carrier 300" on the port without loading the port door 3014 "(i.e., without distributing the carrier weight on the port door 3014"). To support the carrier 300 '' on the port), a support 328 '' having a carrier door (wall) 316 '' may be provided. The sealing contact with the carrier door seal 321 '' at the port door is still substantially constant when opening and closing the carrier door.

  5A-5C illustrate a carrier 300A, similar to carrier 300, coupled with a tool port, according to another example embodiment. In the present embodiment, the carrier 300A is an open top type, and may be mounted on the bottom area (in the direction indicated by the arrow + z in FIG. 5A). The carrier shell 316A may operate as a carrier door. The seal joint 320A, most commonly seen in FIG. 5B, is generally Y, which may be referred to as a three-way seal (with substantially zero purge or loss capacity and similar to seals 320, 220 described above). It is a structure (joint part 321A of a wall and a shell, joint part 322A of a wall and a port, joint part 323A of a port 3012A and a port door 3014A). In this embodiment, port door 3014A may be substantially equiangular with shell 316A. For example, shell 316A may be attached to port door 3014A. In the exemplary embodiment, shell 316A and port door 3014A are fitted and laid such that the volume of the interface therebetween is minimized. A seal (not shown) may be provided between shell 316A and the port door to seal the interface therebetween. As seen in FIG. 5B, the port door, which in this embodiment is 3014A, may have a vacuum port 3010V to purge the port and carrier door interface volume.

  Referring again to FIGS. 2A-2B, a carrier-port interface is shown according to yet another exemplary configuration. The joining portions 220, 220 'are substantially similar to the exemplary embodiments shown in FIGS. 2A, 2B (bottom area mounting / top opening, top area mounting / bottom opening, respectively). The sealing joints 220, 220 'are generally "intersecting" or X-shaped (joint 221 between wall 216 and shell 214, joint 222 between shell 214 and port, joint 223 between port 2012 and port door 2014, and port door And a four-way seal having a joint 224) between the wall 216 and the wall 216. As can be seen in FIG. 2A, in this embodiment, the sealing joints 222, 224 are in a direction substantially parallel to the relative movement of the mating surfaces (loading the carrier and closing the port door) ( (For example, vertically). That is, movement of the carrier or carrier door to the closed position does not create a sealed closure. In this embodiment, one or more of the surfaces forming the sealing joints 222, 224 are to actuate the sealing section without substantial frictional contact at the sealing joints and to close the sealing joints. For example, it may be provided with an operable seal, such as an inflatable seal, a pressure actuated seal, or a shape memory member. The sealing structures described are merely exemplary.

  Referring again to FIG. 1, the shell 214 of the carrier may have an external support 240 for handling the carrier. The support 240 is shown, for example, as a handle, but may have any suitable shape. In an exemplary embodiment, the support 240 may be located on the opposite side of the shell as far away as desired to optimize the handling stability of the carrier. In another embodiment, more or less supports may be provided. Referring now to FIG. 6A, a carrier shell 220A is shown having a perforated or recessed member, membrane or filter 260A located adjacent to the bottom surface of the shell. The perforations or recesses in the member are sized and shaped to reduce or reduce the intensity of the venturi or vortex created in the shell when the carrier door is opened. In another embodiment, the venturi or vortex mitigation element may be located at any other suitable location within the carrier. Although carrier 200A is shown with a shell on the bottom surface for illustrative purposes, in other embodiments, the carrier may be on the top surface. Additional flow correction spaces and / or vanes (not shown) may be provided inside the tool to help maintain a substantially smooth / laminar flow over the part. FIG. 6B shows a carrier 200B according to another exemplary embodiment. The carrier 200B may have a thermal conditioner 250 to maintain the components in the chamber at different temperatures and then at ambient temperature. For example, the carrier shell or wall 214B, 216B may have a thermoelectric module that is thermally connected to the component, for example, via a cassette support, to heat / rise the component to a higher temperature than ambient. . The part temperature higher than ambient drives the particles and the thermophoresis dislodges water molecules from the part, preventing contamination when the part is outside the carrier or when the carrier door is opened. In other embodiments, any other desired thermal conditioner, such as microwave energy, may be used. In other alternative embodiments, an electrostatic field may be created around each component to prevent contamination by water molecules and particulates.

  Referring now to FIGS. 1A-1B, in an exemplary embodiment, the cassette 210 (see also FIG. 1) is provided with a shelf 210V for supporting components with a 360 ° positive hold on the shelf. You may. Each shelf 210V may be formed by one or more shelf seats or supports 210C. As seen in FIG. 1A, in an exemplary embodiment, the cassette shelf support 210C may be mounted such that the support substantially straddles the component. Each shelf 210V may have a bulged surface to create a perimeter for components placed on the shelf. The bulging surface may be inclined (relative to the vertical) to form a positioning guide 210L for placing the part S. The surface on which the components of the shelf 210V are placed is sloped (to form a tilt angle of, for example, about 1 ° with respect to the bottom surface of the component, relative to the bottom surface of the component), for example to ensure that the bottom surface of the component is within the peripheral exclusion zone May be contacted. In another embodiment, the component shelf may have any suitable configuration that defines passive component suppression. In other alternative embodiments, the shelves may not have passive component restraint.

  Referring now to FIGS. 7A-7B, a carrier 200C is shown in a closed and open position, respectively, similar to the carrier 200 shown in FIG. 1, according to another exemplary embodiment. In the present embodiment, the height of the cassette 210B can be changed. If the carrier 200B is closed, the cassette 210B may be at a minimum height, and if the carrier door (eg, wall 216B) is open, the cassette may be extended to a maximum height. When the cassette extends from a minimum height to a maximum height, the slope between the parts / shelf of the cassette increases, thus minimizing the carrier height when accessed and maximizing the space between the parts. You can do so. In the present embodiment, the support 210SB of the cassette may have a substantially bellows structure. The support may be made, for example, from an aluminum sheet, or any other suitable material (eg, a shape memory material) and provide sufficient flexibility without articulating joints. As shown, the support of the cassette may be supported on the top surface of the wall 216B of the carrier. The top opening of the carrier (removing the wall 216B as shown in FIG. 7B) or the bottom opening (removing the shell 214B as shown in FIG. 2B) expands the cassette (bellows) support 210SB under gravity. . The bellows of the cassette is compressed by closing the carrier door. As seen in FIG. 7C, bellows 210SB may have a component support 210VB on which the components rest. In the exemplary embodiment, the component support 210VB remains at a substantially constant radial position relative to the adjacent portion 210PB of the bellows as the bellows expands / collapses (thus the relative radius between the component and the component seat). To avoid moving). As can be appreciated, the bellows cassette may be collapsed such that components within the cassette are actively clamped between adjacent pleated sections 210PB of the bellows. As can be appreciated, the upper clamp portion may contact the component along a peripheral edge of the component. As seen in FIG. 7B, in an exemplary embodiment, a passing beam mapper 2060B or other suitable device in a tool or carrier is provided to determine the position of the part S when the cassette is extended. May be done. The part robot (not shown) may also have a sensor for detecting the proximity of the part to ensure proper positioning for gripping the part.

  As mentioned above, a carrier with a passive carrier door and seal is suitable for direct bonding to a vacuum enabled chamber such as a load lock. FIG. 8 illustrates a carrier 200 ′ (top open type) that is directly coupled to a port interface 4010 of a vacuum enabled chamber (referred to for convenience as a load lock) 400 according to another exemplary embodiment. . The carrier 200 'shown in FIG. 8 is generally similar to the carriers 200, 300 described above. In an exemplary embodiment, the load lock opens / closes the port door 4014 and thus opens / closes the carrier door (in this embodiment, top wall 216 ') and raises / lowers the cassette 210'. It has an indexer 410 that operates. In an exemplary embodiment, the indexer 410 may be configured to provide a low or minimum load lock chamber in the Z direction. For example, the indexer 410 may be located outside the load lock chamber 400C and positioned along the load lock chamber to reduce the overall height of the chamber and the load lock. In the exemplary embodiment, indexer 410 may have drive section 412 and coupling section 414. In the embodiment shown, the drive section 412 may include an electromechanical drive system having a motor drive belt or screw drive for raising / lowering the shuttle 416, for example. In an exemplary embodiment, coupling section 414 may be a magnetic coupling that connects shuttle 416 on the drive section to port door 4014. The port door may be, for example, a magnet (permanent or electromagnet) or a magnetic body located thereon and forms the inner portion 414I of the magnetic coupling 414. The magnet portion 414I of the door 4014 may fix the port door to the port frame 4012. For example, the port frame 4012 operates with a magnet portion / magnet 414I on the port door and a suitable magnet (magnet 2028 ′ of FIG. 2B) positioned to secure the door and port when the door is in the closed position. And similar). In the exemplary embodiment, a magnetic locking element in the port frame may operate with the magnetic coupling portion 414I on the door 4014. In another embodiment, the magnetic coupling between the door and the drive and the magnetic fixture between the door and the frame may have any suitable configuration. As seen in FIG. 8, chamber wall 400W isolates drive section 412 from inside chamber 400C. In other exemplary embodiments (see also FIGS. 18-19), the drive section 412 ′ operates on the responsive portion 414I ′ of the port door 4014 ′ and moves a linear motor (eg, a linear induction motor, LIM) to move the port door. ). The LIM may be located outside the chamber wall and isolated from the inside of the chamber. In the exemplary embodiment shown in FIGS. 18-19, the drive is a magnetic material that forms a fail-safe fixture to hold the port door 4014 'in the open position when power to the chamber is turned off. Section 4122 ', or may include a permanent magnet. In another embodiment, a suitable shock absorber may be connected to the drive to allow the desired control for lowering the port door to the closed position. As can be seen from FIGS. 8 and 18-19, in an exemplary embodiment, the seal between the port door and the port frame is positioned such that the weight of the door facilitates the sealing of the interface. .

  Also, in the exemplary embodiment shown in FIG. 8, each section 414I of the magnetic coupler may secure the port door 4014 and the carrier door 216 'together. For example, a suitable carrier door is positioned to engage with the coupling section 414I (eg, which may include an electromagnet having a variable magnetic field, or a magnet) when actuated to secure the port and the carrier door to each other. It may include a magnet (eg, a permanent magnet) or a magnetic body 228 '. In an exemplary embodiment, the movement of the port door may be guided by a guide that is also isolated from the chamber. For example, in the illustrated embodiment, the bellows 400B connects the port door to the chamber wall and isolates the port door travel guide 4006 from the chamber. In this embodiment, the guide generally has a telescoping section. The telescoping guide is shown as being made from a hollow cylindrical telescoping section for illustrative purposes, but in other embodiments may have any suitable configuration. In other alternative embodiments, the indexer may have any other desired configuration. For example, US patent application Ser. No. 10/10, filed Jul. 22, 2003, which allows controlled movement of a port door without mechanical guidance to the port door, which is incorporated herein by reference in its entirety. A suitable indexing motor, such as that disclosed in U.S. Pat. No. 624,987, may be located within the chamber wall, but is isolated from the inside of the chamber. Bellows 400B may be pressurized to help close the port door. The bellows may also house umbilical systems such as vacuum lines connected to port doors and power / signal lines. In an exemplary embodiment, the port door may have a port PD10 connected to a vacuum source forming a pump down port of the chamber, as described further below.

  Referring now to FIG. 9, a carrier 300 'on a vacuum chamber 400' is shown, according to another exemplary embodiment. In the exemplary embodiment shown, carrier 300 'may be a bottom-opened carrier (e.g., similar to carrier 300 described above, see also FIG. 3). In an exemplary embodiment, port door 4014 'may be lowered into the chamber when opened. The indexer (not shown) is similar to that shown in FIGS. 8, 18-19, but is arranged to move down the port door. The chamber and port doors may have magnetic fixtures 4028 ', 4026' to secure the door in the closed position to the chamber frame. In an exemplary embodiment, the port frame may have one or more coil elements 4028 '(defining what may be referred to as the sides of the frame of the magnetic fixture). The coil element 4028 'may be placed in a desired location and may generate a magnetic field acting on the door fixture component 4026'. The magnetic fixture component 4026 'on the door can be a permanent magnet or a magnetic material. In the exemplary embodiment, coil element 4028 'is shown positioned within the chamber for illustrative purposes. In another embodiment, the coil elements may be located on the outside. The walls of the chamber are isolated from the inside of the chamber. The coil element may be fixed or stationary with respect to the frame. The magnetic field strength may be reduced as desired to reduce magnetic forces in the magnetic fixture and facilitate movement of the port door. In another embodiment, the coil element may be movable, for example, mounted on a shuttle of the drive system and may form part of a magnetic coupling between the port door and the indexer. In another embodiment, the magnetic fixture may be similar to those described above for securing the carrier door and carrier. Also, a permanent magnet or magnetic body 4026 'on the port door 4014' that magnetically secures to the frame may provide a connection to the indexer, similar to that shown in FIG. Also, the chamber of the embodiment shown in FIG. 9 may have bellows and port door guides similar to those shown in FIG. The bellows may be pressurized to assist in lifting the port door and maintain it in a closed position, especially when the carrier door and cassette are placed on the port door. In another embodiment, the chamber may have a bellows without a port door guide therein. A vacuum may be connected to the port door to pump down the chamber through the interface between the port door and the carrier door. Thus, in an exemplary embodiment, such as the exemplary embodiment shown in FIG. 8, the chamber pump down port may be located in a port door.

  Referring again to FIG. 8, in an exemplary embodiment, the pump-down of the load lock chamber may function with a carrier joined to the chamber port and a port door moved from a closed position by an indexer 410, for example. As can be seen from FIG. 8, in an exemplary embodiment, pumpdown of the load lock chamber via the vacuum port PD10 in the port door may pass through the interface between the carrier door 216 'and the port door 4014. . The suction flow of the chamber / carrier gas through the interface between the carrier door and the port door creates a negative pressure at the interface and prevents contaminants from accidentally escaping into the chamber. FIG. 10 illustrates a pump-down of a load lock chamber through a port door 5014 according to another exemplary embodiment. In this embodiment, the purging of the port door and carrier door space 5430 and the carrier chamber 202 may be performed before the pump down of the load lock chamber. For example, a purge gas may be introduced into the space 5430 by applying a vacuum and cracking (or suitable valve adjustment) the port door and port seal 5223. The carrier 200 may be purged by cracking the carrier door 216 to allow gas in the load lock chamber 5400 to enter the carrier, or, again, by suitable valving. For example, a gas supply from a chamber (shown in the phantom of FIG. 10) may be provided to the carrier to introduce a desired gas species into the carrier 200. As seen in FIG. 10A, which illustrates the load lock chamber 5400 and the carrier 200 with the port door and carrier door moved to the open position, the load lock chamber 5400 may optionally be loaded with a load lock to vent the load lock chamber. There may be a vent (or gas species supply) 5440 located in the wall. Thus, in an exemplary embodiment, the purge line may be used for purging and the venting of the chamber may be performed independently of the interface between the carrier door and the port door.

  FIG. 11 illustrates an exemplary implementation where carrier door 316A and port door 6414 each have a mechanical "fail-safe" fixture that secures carrier door and carrier 3140 and port door and port 6412 or chamber 6400D, respectively. The form is illustrated. Carrier 314D, carrier door 316D, port 6412, and port door 6414 may be passive (without articulation fixing parts). In this embodiment, the indexer does both Z-axis indexing of the port door and rotation (eg, around the Z-axis) of the port door to engage / release locking tabs on the port door and carrier door. May be possible. In another embodiment, the Z-axis movement and rotation of the port door may be provided via different drive shafts. 12A-12B show bottom views of the carrier shell 314D and carrier door 316D, respectively. 13A-13B show top plan views of (load lock) chamber 6400 and port 6412 in port door 6414, respectively. In the exemplary embodiment, the underside of the carrier shell has a mating tab / surface 360D that is mated by a mating surface 362D on the carrier door 316D. As can be appreciated, the mating / releasing between mating surfaces 360D, 362D may be accomplished by rotation of the carrier door relative to carrier 314D. The rotation of the carrier door is provided by a port door 6414, as described below. In another embodiment, the mating surface between the door and the carrier may have any desired configuration. Carrier door 316D may have a male / female torque coupling mechanism 365D that supplements the torque coupling members on carrier door 6414T. In the exemplary embodiment shown, ports 6412 and port doors 6414 may have an interlocking or mating surface that is generally similar to the mating function of the carrier and carrier door. As best seen in FIGS. 13A, 13B, the port may have a mating surface 6460 (e.g., protruding inward), and the port door 6414 may overlap with and mat with the port surface 6460. It may have a complementary mating surface 6462. As can be appreciated, in the exemplary embodiment, the mating surfaces 3600, 3620 on the carrier and the mating surfaces 6460, 6462 on the ports are located relative to each other and as the port door is rotated. , So that the fitting / release between the carrier and the carrier door and between the port and the port door can be performed simultaneously.

  FIG. 14 illustrates a load lock chamber 400E, an indexer 6410E, and a carrier 300E. In an exemplary embodiment, the indexer may be located substantially axially in series with the load lock chamber. Like the pods 200, 300, 3000, in the exemplary embodiment shown in FIG. 4, the pod 300E may be a vacuum-adapted top or bottom opening pod with features similar to those described above. Good. Chamber 6400E may be similar to the chamber described above. FIG. 15 shows a load lock chamber and carrier 300F having a reduced pump down volume configuration. In the exemplary embodiment shown, the carrier door 316F may have a top 350F and a bottom 321F door that seals the shell 314F of the carrier. A bottom seal 3270F (eg, similar to seal 221) mates with shell 314F when the carrier door is closed, as shown in FIG. Top seal 350F seals the shell of the carrier when the carrier door is opened (eg, seal 350F may be placed on and seal carrier sheet surface 351F). The top seal 350F isolates the chamber of the carrier from the load lock chamber, thus reducing pump down capacity when pumping the load lock chamber.

  16A-16B illustrate a carrier 300G and a load lock chamber 6400G, respectively, in a docked position and a non-docked position, according to another exemplary embodiment. The carrier 300G has a bottom wall 316G, an annular section 314G, and a top wall 314PD. In this embodiment, the annular section 314G or one or more portions thereof may operate as a carrier door. The top and bottom walls 316G, 314PD may be fixed to each other, and the movable section 314G defining the door includes a seal 350G, 321G for sealing the top and bottom walls 316G, 314PD, respectively, on the top and bottom. You may have in both. The load lock chamber 6400G may have an open port 6402G, and the carrier 300G may be placed through the load lock chamber as seen in FIG. 16B. The load lock chamber 6400G may have a recess 6470G for lowering the carrier door 314G to open access to the carrier. The top wall 314PD of the carrier may seal the load lock chamber port, thereby sealing the load lock chamber and allowing the chamber to be pumped down. A suitable elevator may be provided to raise / lower the carrier door 314G. 17-17C illustrate another top sealed carrier 300H and a load lock chamber 6400H, according to another exemplary embodiment. The carrier 300H may have a top sealing flange 314H and side openings 304H (along the carrier end for loading / unloading components). In the exemplary embodiment, the carrier top sealing flange 314H is located at and seals to the chamber port edge 6412H, as best shown in FIG. 17B. The carrier door 314DR may be opened by a radially outward rotating motion indicated by arrow 0 in FIG. The carrier opening is arranged alongside the slot valve in the load lock chamber. Although the exemplary embodiment has been described with reference to a load lock chamber, the mechanism described applies equally to a load port chamber, as shown in FIG. The interior of the load port chamber may have a controlled atmosphere, but may not be separable.

  Referring to FIGS. 29A and 29B, there is shown a schematic plan view of an automated material handling system 10, 10 'according to another exemplary embodiment. For example, the automated material handling systems 10, 10 'shown in FIGS. 29A and 29B generally include one or more intrabay transport system sections 15, one or more interbay transport system sections 20, bay queuing sections. 35, a transport siding or shunt section 25, and a component carrier or transporter. The terms intrabay and interbay are used for convenience and do not limit the placement of the transport system 10110 '(as used herein, inter generally refers to a section that extends over a number of groups; Intra generally refers to sections that extend, for example, into groups). The sections 15, 20, 25, 35 of the transport system may be nested with each other (ie one transport loop within another transport loop) and are typically, for example, 200 mm wafers, 300 mm wafers, flat displays Arranged to allow rapid movement of semiconductor components, such as panels and similar items, and / or transfer of their carriers to and from processing bay 45 and associated processing tools 30 in, for example, processing equipment. . In another embodiment, a suitable material may be transported on an automated material handling system. The transport system 10 can also direct components from one transport section to any other transport section. One example of an automated material handling system for transporting parts, with interbay and intrabay branches, is referred to as “Automated Material Handling,” which is incorporated herein by reference in its entirety. System "and is found in the U.S. patent application Ser. No. 10 / 697,528.

  The configuration of the automated material handling system 10, 10 'shown in FIGS. 29A and 29B is a representative configuration, and the automated material handling system 10, 10' may be configured to handle any desired processing bays and / or processing tools within the processing facility. May be arranged in any suitable configuration in order to support the layout of the above. As seen in FIG. 29A, in the exemplary embodiment, the interbay transport sections 15 are located on one or more sides and connected to each other by any number of transport sections 20, for example, one or more processing bays 45. May be supported. In another embodiment, the outer or side transport section may be an intrabay section, and sections running in between may link the intrabay section to a group or array of processing tools in the bay. In an exemplary embodiment, the interbay transport section 15 of FIG. 29A may also be connected by a cross shunt 50, which allows the part transporter to directly interbay transport without passing through the processing or processing bay 45. Allows movement between sections 15. In yet another alternative embodiment, transport sections 15 may be connected to each other by additional intrabay transport sections (not shown). In other exemplary embodiments, as shown in FIG. 29B, the interbay transport section 15 may be located between any number of processing bays 45, and thus, between branch sections, a group of bays or tools. It may serve as 45, for example forming a generally central islet or a transport center path. In other alternative embodiments, the intrabay transport section may form a perimeter and surround any number of processing bays 45. In still other alternative embodiments, there may be any number of nested loop sections, such as N systems, such as system 10 or 10 'as shown in FIGS. 29A and 29B, and each interbay It may be connected substantially in parallel by a transport section that directly connects the transport sections 15. In still other alternative embodiments, the transport sections 15, 20 and the processing tools may have any suitable configuration. Further, any number of intrabay / interbay systems may be combined together in any suitable configuration to form a nested processing array.

  For example, the interbay transport section 15 may be a modular truck system that provides for movement of any suitable component transporter. Each module of the truck system is provided with suitable coupling means (eg, interlocking facets, mechanical fasteners) to enable the modules to couple each other during installation of the intrabay transport section 15. You may. The rail modules may be provided in any suitable length, such as a few feet, or in any suitable shape, such as straight or curved, for handling and configuration flexibility during installation. The truck system may support the part transporter from below, or in another embodiment, the truck system may be a suspended truck system. The track system may have roller bearings or any other suitable bearing surface to allow the part transporter to move along the track without significant resistance on the rollers. Roller bearings may be tapered to provide additional directional stability as the parts container moves along the track, or the tack may be angled toward the inside of the curve or to the corner of the track. Is also good.

  The intrabay transport section 15 may be a conveyor based transport system, a cable and pulley or chain and sprocket based transport system, a wheel drive system, or a magnetically guided transport system. The motor used to drive the transport system can be any suitable linear motor that can move the part container along the intrabay transport section 15 and travels infinitely. The linear motor may be a solid state motor without moving parts. For example, the linear motor may be a brushed or brushless AC or DC motor, a linear induction motor, or a linear stepper motor. The linear motor may be integrated into the intrabay transport section 15 or the component transporter, or into the container itself. In another embodiment, any suitable drive means may be incorporated to drive the part transporter through the intrabay transport system. In yet another alternative embodiment, the intrabay transport system may be a trackless wheeled free-standing transport vehicle.

  As described below, the intrabay transport section 15 generally moves the parts transporter at high speed along the path of the intrabay transport section 15 by using a queuing section and a shunt. Or allow it to flow. This is a significant advantage compared to conventional transport systems where material flow must be stopped when transport containers are added or removed from the transport line.

  As described above, in the exemplary embodiment, the intrabay transport section 20 may define a processing or processing bay 45 and may be connected to the interbay transport section 15 through a queue section 35. . The queuing section 35 is located, for example, on either side of the interbay or intrabay transport section 15, 20, and is for the material flow along the interbay transport section 15 or the material flow along the intrabay transport section 20. A component or component container may be able to enter / exit the intrabay transport section 20 without either stopping or slowing down. In the exemplary embodiment, queue section 35 is schematically shown as a discontinuous section from transport sections 15,20. In another embodiment, the queue section, or the queue path between the transport sections 15, 20, may be formed integrally with the transport section, but define a discontinuous queue in the transport path between the transport sections. I do. In another embodiment, queues may be placed in the interbay and intrabay sections, if desired. One embodiment of a transport system having a traveling lane and an access or queue lane that allows selective access into and out of the traveling lane without disturbing the traveling lane is described by the name “Transportation System”, serial number No. 11 / 211,236, which is incorporated by reference herein in its entirety, as set forth above. Intrabay transport section 20 and queue section 35 may have a truck system that is substantially similar to that described in interbay transport section 15 above. In another embodiment, the intrabay transport section and the queue section connecting the intra and inter transport sections may have any suitable configuration, shape or form and may be driven in any suitable manner. As best seen in FIG. 29A, in the exemplary embodiment, the queue section 35 includes an input section 35A and an output section 35B that correspond to the directions of movement R1, R2 of the intrabay and interbay transport sections 20, 15. May have. For the purposes of this specification used for purposes of illustration, section 35A is defined as the entry to section 20 (exiting section 15) and section 35B is defined as the exit from section 20 (entry to section 15). / Defined as an outlet. In another embodiment, the direction of travel of the queue section may be established, if desired. As described in more detail below, the component containers may exit the interbay transport section 15 via the input section 35A and enter the interbay transport section 15 via the removal section 35B. The queuing section 35 may be of any suitable length to allow the entry and exit of the component transporter into and out of the transport sections 15,20.

  The intrabay transfer section 20 may extend in a passageway or path connecting any number of process tools 30 and the transfer system 10, 10 '. The intrabay transport section 20 may also connect two or more interbay transport sections 15 to each other as shown in FIG. 29A and described above. The intrabay transport sections 20 are shown in FIGS. 29A and 29B as having a closed loop shape; however, in other embodiments, they may have any suitable configuration or shape, and It may be applicable to production equipment arrangements. In the exemplary embodiment, intrabay transport section 20 may be connected to process tool 30 by a transport siding or shunt 25 that may be similar to queue section 35. In another embodiment, the shunt may be provided to the interbay transport section in a similar manner. The shunt 25 effectively takes the part transporter “off-line” and has, for example, an input section 25A and an output section 25B corresponding to the traveling direction R2 of the interbay transport section 20 as seen in FIG. 29A. The shunt 25 allows the component transporter to exit the intrabay transport section 20 through the input and output sections 25A, 25B without substantially blocking the substantially constant velocity flow of the component transporter over the intrabay transport section 20. , And allow you to get in there. While in the shunt 25, the component container stops, for example, at the tool joining station corresponding to the location of the process tool station 30 and, for example, a pre-process module of the equipment, a sorter, or any other suitable transfer robot The component and / or the container itself may be transferred to or via the processing tool loading port or any other suitable component staging area by or via any suitable transport means. In another embodiment, the component transporter may be directed to a desired shunt to reorder (eg, swap) transporters in any transport section.

  The exchange of component carriers or transporters from and between different sections 15, 20, 25, 35 may be controlled by a guidance system (not shown) connected to a controller (not shown). The guidance system may include a locating device for locating the transporter moving along the sections 15,20,25,35. The positioning device may be of any suitable type, such as a continuous or distributed device such as an optical, magnetic, bar code, or reference strip extending along or across sections 15, 20, 25, 35. An appropriate reading device installed on the transporter to enable the controller to locate the transporter on sections 15, 20, 25, 35 in addition to checking the motion status of the transporter. It may be read or examined by the device. Alternatively, the device may sense and / or interrogate a sensing item such as a RFID (rapid frequency identification device) on a transport, a component carrier, or a component to identify position / motion. Also, the positioning device can be a distributed device that can sense the position of the moving transporter, a separate positioning device (eg, a laser ranging device, an ultrasonic ranging device, or an internal positioning system similar to internal GPS, or an internal positioning system). (Inverse GPS) or a combination thereof. The controller may combine position feedback information from the transport and information from the guidance system to establish and maintain the transport path of the transport along or between sections 15, 20, 25, 35.

  In another embodiment, the guidance system includes a groove, rail, track, or any other suitable structure that forms a structural or mechanical guidance surface to interface with the mechanical guidance function of the component carrier. May include or have. In yet another alternative embodiment, sections 15, 20, 25, and 35 also include printed strips or wires that provide electronic guidance to the component carrier (eg, a suitable electromagnetic detection detected by a suitable guidance system of the carrier). Transmission lines for transmitting signals).

  With further reference to FIGS. 29A and 29B, exemplary operations of the transport systems 10, 10 'are described. For example, a component container placed in the shunt 25 may enter the transport system 10, 10 '. To maintain a substantially uninterrupted, generally constant velocity traveling intrabay transport section 20, the component containers may access the interbay transport section 20 via a shunt 25. The part transporter accelerates in the shunt 25 such that the transporter travels at the same speed as the material flow in the intrabay transport section 20. The shunt 25 allows the component transporter to accelerate, thus allowing the transporter to move the intrabay transport section 20 without obstructing flow or colliding with any other transporter traveling within the interbay transport section 20. Can join the flow. At the junction with the intrabay transport section 20, the component transporter can move the intrabay without colliding with any other component carrier or transporter or reducing the speed of the transporter traversing the intrabay section. A suitable operating interval may be waited in the shunt 25 to allow free entry into the transport section flow. The component transporter continues to operate along the intrabay transport section 20 (e.g.) at substantially constant speed and switches with priority to the removal queue area or section 35B, e.g., the interbay section 15. In one embodiment, if there is no space in the removal queue section 35B, the transporter will continue to advance around the intrabay transport section 20 with priority until the removal queue section 35B becomes available. Is also good. In another embodiment, a cross shunt is provided to connect opposing advancing paths of the transport section, e.g., to return to a bypassed station without proceeding through the entire loop of the transport section, wherein You may be able to move back and forth. The transporter waits for a suitable operating interval in the bay of the unload queue section 35B, then accelerates and moves the interbay transport section 15 in substantially the same manner as the intrabay transport section 20 merger described above. It may merge into a generally continuous and uniform flow. The transporter may, for example, continue along the interbay transport section 15 at a generally continuous speed and move to a linked queuing section 35A to enter the desired intrabay section 20. In one embodiment, if there is no space in the input queue section 35A, the transporter may move around the intrabay transfer section 15 until the input queue section 35A becomes available in a manner similar to that described above. May be continued. The transporter may wait for a suitable operating interval in the input queue section 35A and accelerate to join the second intrabay transport section 20, again the second intrabay transport section 20 , Having a continuous constant velocity flow. The transporter is transferred from the second intrabay transport section 20 to a transport shunt 25 where the transporter joins the process tool 30. If there is no space for a transport in the shunt 25 due to other transports in the shunt 25, the transport will preferentially follow the perimeter of the intrabay transport section 20 until the shunt 25 is available. You may continue to progress. Because the flow of material in the interbay transport section 15 and the intrabay transport section 20 is substantially uninterrupted and generally travels at a constant speed, the system is configured with a high level of component transport between the processing bay and the processing tool. The throughput can be maintained.

  In the exemplary embodiment shown in FIG. 29A, the transporter connects via a queue section 35, processing tool, intrabay transport section 20, or interbay transport section 15 via an extension 40 that can directly connect to each other. It may proceed directly between processing bays. For example, as shown in FIGS. 29A and 29B, the extensions 40 connect the queue sections 35 together. In another embodiment, the extension 40 may provide access from one processing tool to another by connecting the transfer shunt of each tool as well as the shunt 25. In yet another alternative embodiment, the extension may directly connect any number or combination of elements of the automated material handling system together to provide a short access route. In larger nested networks, the extension 40 may shorten the path between destinations of the transporter, thereby reducing transport time and increasing system productivity.

  In yet another alternative embodiment, the flow of the automatic material handling system 10, 10 'may be bi-directional. The transport sections 15, 20, 25, 35, 40, 50 have side-by-side parallel lanes with exit and entry ramps looping around and connecting opposing travel lanes, each traveling in opposing directions. May be. Each parallel lane of the transport section may be dedicated to any traveling direction, and each parallel lane is inverted according to the transport algorithm so that the progress of each individual parallel lane meets the transport loading conditions. As such, they may be switched separately or simultaneously. For example, the flow or transport of material along parallel lanes of transport sections 15, 20, 25, 35, 40, 50 may flow in their distinct directions. However, later, some component transporters are located in the facility and move toward more efficient locations to move along these parallel lanes in a direction opposite to the current flow direction, and then the direction of travel of the parallel lanes is reduced. It is expected that it may be inverted.

  In another embodiment, two-way travel lanes may be stacked and placed (ie, one on top of the other). The interface between the process tool and the transfer shunt 25 may be, for example, from the shunt to the loading port of the process tool when the shunt having a clockwise material flow is located above the counterclockwise material flow. To raise or lower the transporter, it may have an elevator type configuration. In another embodiment, the two-way shunt and other transport sections may have any suitable configuration.

  FIG. 20 illustrates a portion of a transport system track 500 of a transport system for transporting carriers between tool stations according to another exemplary embodiment. The truck may have a solid-state conveyor system similar to that described in US patent application Ser. No. 10 / 697,528, which is incorporated by reference above. The truck may have a stationary forcer segment that interfaces with a reaction portion integral with the shell / casing of the carrier. As a result, the carrier may be transported directly by the conveyor. The transport system 500 shown is in an asynchronous transport system, in which the carrier of the carrier is substantially decoupled from movement of other carriers on the transport system. The track system is configured to eliminate crucial factors where other carrier movements affect the transport speed of any carrier. Conveyor trucks 500 may turn carriers on and off to transport carriers away from the main transport path for rerouting and / or mating with tool stations (buffers, stockers, etc.) without obstructing transporters on the main transport path. A main transport passage having a branch passage (see also FIGS. 297 to 298) is employed. A suitable embodiment of a transport system having a branch on / off passage is disclosed in U.S. patent application Ser. No. 11 / 211,236, incorporated herein by reference. In this embodiment, the segments 500A, C, D have winding sets for the A1-D linear motor and may move along the main travel path 500M, which is shown in FIG. 20A. . Segment 500B is shown, for example, in FIG. 20 as an off / out to a passage that may be referred to as access passage 500S. The forcer windings in this segment are in a real two-dimensional plane to allow both movement along the main path 500M and, if desired, movement of the carrier along path 500S (see FIG. 20B). It is arranged to provide a motor. The motor controller is similar to the distributed control structure described in US patent application Ser. No. 11 / 178,615, filed Jul. 11, 2005, which is incorporated herein by reference in its entirety. , An area type controller. In this embodiment, the drive / motor is of the area type and may be efficiently controlled by an area controller that performs appropriate handover between areas. Conveyor 500 may have suitable bearings to movably support the carrier. For example, in segments 500A, 500C, and 500D, bearings (eg, rollers, balls) may allow one degree of freedom of movement of the carrier along path 500M.

  The bearing in segment 500B may allow for two degrees of freedom of movement of the carrier. In other embodiments, the bearing may be provided on a carrier. In still other embodiments, air bearings may be used to movably support a carrier on a truck. Guidance of the carrier between the passages 500M and direction to the passages 500S is provided by a suitable guidance system such as mobile or articulated wheels on the carrier, articulated guide rails on the truck, or magnetic steering as shown in FIG. 20B. You may.

  FIG. 20A illustrates an exemplary transport element 500A of the system 500. The exemplary embodiment shown illustrates a segment having a single travel lane or passage (eg, passage 500M). As seen in FIG. 20A, in the exemplary embodiment, the segment has a linear motor portion or forcer 502A for a starting support on the transporter and a support surface 504 (A). As noted above, in other embodiments, the transport segments may have any other desired configuration. In an exemplary embodiment, guide rails 506A may be used to guide the transport. In another embodiment, the transport segments may have magnets or magnetic bearings instead of rails to guide the transporter. Electromagnets on the carrier may be used to help separate the carrier from the track. FIG. 20B illustrates another transport segment of the transport system 500, according to another exemplary embodiment. Segment 500A 'may have a plurality of travel lanes (e.g., cross lanes similar to segment 500B shown in FIG. 20) or a substantially parallel main travel lane (similar to passage 500M) that switches between. As seen in FIG. 20B, in the exemplary embodiment, the travel lane (similar to passages 500M, 500S) is generally defined by a 1-D motor section 502A1 and a corresponding carrier drive support surface / area 504A ′. Is done. The intersection or switching between the travel lanes is formed by an array of 2-D motor elements that can generate the desired 2-D force on the transport to travel longitudinally between travel lanes 500M ', 500S'.

  FIG. 21 illustrates a turning segment of an intersection or conveyor of a transport system according to another exemplary embodiment. In the exemplary embodiment shown, transport segment 500A "defines a plurality of intersecting travel lanes 500M", 500S ". The traveling lane is generally similar to lane 500M (see FIG. 20A). In an exemplary embodiment, the transport vehicle may traverse any of the lanes 500S ", 500M" until it is substantially aligned with the intersecting lane. When aligned, the 1-D motor in the desired lane begins moving the transport along the intersecting lane. In another embodiment, the intersection may not be at a 90 ° orientation. FIG. 20C shows the bottom surface of the carrier 1200 and the reaction elements therein. As can be appreciated, the reaction elements may be arranged to coincide with the orientation of the respective forcer section (eg, see FIG. 21) at the intersection. This allows the carrier to change tracks without substantially stopping. FIG. 20D shows a reaction element 1202FA placed on a pivotal section of carrier 1200A, which may be rotated to a desired position, according to another exemplary embodiment. FIG. 22 shows a track segment 500H '' '', generally similar to the intersection of FIG. 21, with a storage location 500S '' '' beside the track. FIGS. 23-23A show a track segment 500 having cutouts or openings 1500O for a carrier lift or shuttle lift arm (not shown), which is described further below. In an exemplary embodiment, the opening 1500O provides lateral access to the carrier for grasping the carrier from the conveyor track to the bottom. FIG. 24 shows a track segment 2500A with the forcer (such as a linear motor) 2502A offset from the carrier / track centerline indicated by arrow 2500M.

  FIGS. 25A-25B show a linear motor conveyor 3500 (with forcer segments installed in a carrier 3200 and integrated reaction elements) for transporting substrates within a semiconductor FAB. In the exemplary embodiment shown, the conveyor 3500 may be inverted to allow access to the carrier from beneath (eg, the carrier is suspended from beneath the conveyor and is located beneath the conveyor). Otherwise, the conveyor 3500 may be similar to the segments 500A, 500A ", 500A" "of the transport system described above. In an exemplary embodiment, a magnetic holding forcer 3502 may be employed to maintain a connection between the conveyor 3500 and the carrier 3200. This force may in particular be generated from a linear motor coil provided for this purpose (for example of a linear synchronous design) and / or via a separate electromagnet and / or permanent magnet (not shown). . Coupling and disconnection of the carrier and conveyor is rapid and may be accomplished without moving parts (eg, electromagnetic switches). Fail-safe operation may be ensured via a magnetic path between the carrier and the conveyor and / or a passive mechanical holding mechanism.

  In the exemplary embodiment, intersections and junctions (i.e., merge-differentiate locations similar to, for example, segment 500B of FIG. 20) may be achieved by switching coils. In another embodiment, a turntable or other rotating device may be used to transfer carriers between the traveling paths of conveyor 3200.

  In an exemplary embodiment, carrier 3200 may be positioned such that the reaction elements are on the top and the substrate is accessed from the bottom of the carrier. In an exemplary embodiment, carrier 3200 may have a magnetic platen positioned to work with the forcer of conveyor 3500. The platen, or platen section, of the carrier may include rollers, bearings, or other activation support surfaces (eg, a reaction surface for air bearings in a conveyor). The platen may also include an electromagnet coupling that allows the container portion of the carrier to be separated from the platen portion, which may remain connected to the conveyor when the component container portion is loaded on the processing tool 3030.

  In an exemplary embodiment, to load the tool, the conveyor 3200 places the carrier at the tool loading port and lowers the carrier from the elevation of the conveyor to the (control environment) loading interface 3032 of the tool 3030, eg, vertically. A transfer-only mechanism 3040 may be used (see FIGS. 26A-26B). Also, a vertical transfer device may be used as an indexer, thereby placing a wafer for access by a wafer handling robot. A preferred embodiment of the vertical transfer device is described in US Patent Application Serial No. 11 / 210,918, filed August 25, 2005, which is incorporated herein by reference. You.

  In another embodiment, the conveyor is an engine-powered wheel that stacks the conveyor in an inverted configuration and may have a suitable magnetic attraction to hold the carrier on the conveyor wheel. In other alternative embodiments, the overall configuration may be inverted so that the conveyor is below the loading port and the carrier has a reaction mechanism on the top surface.

  26A-26B show another embodiment of lowering / raising the carrier directly from the transport system to the loading port / tool interface. In the exemplary embodiment shown in FIGS. 26A-26B, the carrier may have a reaction platen that is integral with the carrier. In other embodiments, as described above, the platen may be removable from the carrier, for example, may remain on / be connected to the conveyor when the carrier is removed. In such a case, each platen in the transport system corresponds to a carrier in the FAB in a substantially 1: 1 relationship.

  FIG. 27 illustrates a carrier 4200 having a combined conveyor and truck configuration, according to another example embodiment. A carrier carrier 4200 may be provided to automate the transport of a payload (such as a carrier including a semiconductor substrate). The vehicle may be equipped with stored energy for self-propulsion, a steering system, at least one motor-driven drive wheel, sensors for odometer and obstacle detection, and associated control electronics. In addition, the transport vehicle may include one or more reactive elements (similar to the magnetic platen described above) that may be associated with the forcer segment of the stationary linear motor of the conveyor 4500, similar to the conveyor system 500 (see also FIG. 20). May be equipped.

  In an exemplary embodiment, when the vehicle 4200 travels along a path defined by one or more forcer segments (similar to paths 500M, 500J), the drive motor is disconnected from the drive wheels and the vehicle is , May be passively urged along the path by an electromagnet coupling having a responsive element within the conveyor 4500. When charging of stored energy devices (e.g., batteries, supercapacitors, flywheels, etc.) in the vehicle is required, the movement of the traction wheel along the track is used to convert energy from the linear motor into vehicle storage. You may. In the case of electrical energy storage, this may be achieved by reconnecting a vehicle drive motor used as a generator with suitable monitoring and conditioning electronics. Such "on-the-fly" charging has the advantages of simplicity and durability, and the arrangement provides significant flexibility and fault tolerance. For example, the carrier 4200 may be able to travel past conveyor segments that are not functioning spontaneously, around obstacles, or between work areas where the conveyor is not available (see FIGS. 27A, 28B). The number and length of the forcer segments of the conveyor may be tailored to the motion plan of the conveyor or the like for the interbay transporter, for example, using a free-standing motion of the bay and truck. Autonomous steering may be used to flexibly select a route. Freestanding cornering can be used to remove curved forcer segments. High speed travel may be activated along the conveyor run, and may be separated from the operator by a safety barrier, if desired. The conveyor section may be used for long distance travel, such as a link to an adjacent FAB. Conveyors may be used for grade changes and use dedicated stored energy to mitigate the problems faced by trucks.

  FIG. 28 shows another embodiment of the integrated carrier and transport vehicle. In the exemplary embodiment, each carrier 5200 is a carrier, as compared to conventional carrier-based semiconductor automation in which the carriers are delivered to carrier components carriers in the FAB. In an exemplary embodiment, the integrated carrier / truck 5200 may be similar to the cart 4200 described above. In another embodiment, the carrier vehicle may have a desired vehicle mechanism. In an exemplary embodiment, the carrier 5200 may include an integral portion of the integral carrier 5202 and the carrier 5204. The carrier 5202 is shown in FIG. 28 as a front / side opening for illustrative purposes. In another embodiment, the carrier may be top open or have any other suitable component transfer openings. The truck may go directly to the loading port where the parts are transferred, or may mate with another automation component, such as another tool damper. Securing the carrier 5202 and the carrier 5204 almost permanently eliminates the time to wait for a loose carrier to be dispatched as well as the associated delivery time differences if a lot transfer is desired. Further, the carrier carrier 5200 can eliminate the movement of “empty vehicles”, thus reducing total traffic on the transport network and increasing system capacity. In another embodiment, the carrier and the carrier may have a connection for separating the carrier from the carrier. The vehicles in the system may be assigned to carriers in a 1: 1 relationship to eliminate delays in carrier transport waiting for the vehicle, but only for limited events (eg, either the vehicle or the component carrier section). In order to be able to separate in repair / maintenance, system knowledge of a suitable controller may be used. Otherwise, the carrier and carrier remain an integral unit during transport or when mating with a tool loading station or other automation component of the FAB.

  FIG. 29C illustrates a horizontally arranged buffer system that may interface between the conveyor system 500 (or any other desired carrier transport system) and the tool station 1000 according to another exemplary embodiment. 6000 shows a plan view. The buffer system may be located below or a part of the tool station or above the tool station. The damping system may be located remotely (ie, below or above) from the operator's approach. FIG. 30 is a front view of the shock absorbing system. 29C-30 show a cushioning system located on one side of conveyor 500 for illustrative purposes. The cushioning system may extend to show only the desired size of the FAB floor. In the exemplary embodiment shown, the operator's passage may be lifted above the cushioning system. Similarly, the buffering system may extend anywhere within the overhead of the FAB. As seen in FIGS. 29C-30, in the exemplary embodiment, the buffer system 6000 comprises a shuttle system 6100 (which may have a suitable carrier lift or indexer) capable of at least three-dimensional movement and a buffer station ST. May be included. In general, a shuttle system may include a guidance system 6102 (eg, rails) for one or more shuttles 6104 capable of at least two-dimensional movement on the guidance system. The arrangement of the shuttle system illustrated in FIGS. 29C-30 is merely exemplary, and in other embodiments, the shuttle system may have any other desired arrangement. In the exemplary embodiment, the shuttle system reciprocates or joins between the conveyor 500, the buffer station ST, and the tool loading station LP (see FIG. 29C). The shuttle 6102 traverses the carrier 200 back and forth between a horizontally disposed conveyor 500 (eg, via an access lane 602 between conveyor segments 600) and a buffer storage ST or loading location LP on a tool station. be able to. As best seen in FIG. 30, in an exemplary embodiment, the shuttle 6104 may include an indexer 6106 for grasping / laying the carrier on the conveyor 600, or a buffer station ST or tool loading port LP. The cushioning system may be configured in a modular form, allowing the system to be easily expanded or contracted. For example, each module may have a corresponding storage location ST and shuttle rail, and a coupling joint for joining the other mounted modules of the buffer system. In another embodiment, the system may include a buffer station module (having one or more integrated buffer stations) and a shuttle rail module that allows the modular to be attached to the shuttle rail. As seen in FIG. 29C, access lane 60L of conveyor 500 may have a shuttle approach that allows a shuttle indexer to access a carrier through the conveyor lane. FIG. 31 shows a cross section of the buffer system 6000 leading to the confluence / differentiation lane of the conveyor 500. In an exemplary embodiment, the shuttle 6104 of the buffer system may access a carrier that is directed to the conveyor's access lane. A stop (or lack of approach similar to lane 602 shown in FIG. 29C) may limit the shuttle from accessing or interfering with the conveyor's travel lane. FIG. 32 is yet another cross-section showing multiple rows of buffer stations. The buffer system may have any desired number of rows and any desired number of buffer stations. The traversal of the shuttle (in the direction indicated by arrow Y in FIG. 32) may be adjusted by modular exchange of traversing guide 61087, if desired. In other alternative embodiments, the buffer station is in a plurality of horizontal planes or levels (ie, two or more levels separated vertically (carrier height can pass between levels)). They may be arranged. Multi-layer buffers may be used with reduced volume carriers. FIG. 33 shows another plan view of the cushioning system with a junction with the guided carrier V. FIG. 34 shows a front view of an overhead cushioning system 7000 that is otherwise similar to the below-the-tool cushioning system 6000 described above. The overhead cushioning system 7000 may be used with an under-tool cushioning system (similar to system 6000). An overhead buffering system mating with the overhead conveyor 500 is shown. In another embodiment, the overhead system may interface with a floor conveyor system or a floor based truck. To prevent the low payload shuttle from traversing horizontally, a suitable control connection (eg, stiff) may be provided to affect the vertical clearance of the passage. An upper shield on the aisle may be used to prevent suspended loads from crossing the aisle space.

  FIG. 35 shows an annular cushioning system 8000. The buffer station ST of the system may be mobile and a track 8100 that moves the buffer station ST between loading positions R (eg, with overhead loading) where carriers can be loaded at the buffer station ST and the loading station LP at the tool interface. (Shown as a closed annulus in the exemplary embodiment). The tool interface may have an indexer for loading the carrier on the tool station.

  Referring now to FIGS. 36A-36C, perspective, side, and bottom views, respectively, of a substrate carrier 2000 are shown, according to yet another example embodiment. Carrier 2000 is a representative carrier and is shown having an exemplary configuration. Although the carrier 2000 in the illustrated embodiment is illustrated as a bottom-opened carrier for illustrative purposes, in other embodiments the carrier may be any other desired configuration, such as a top-opened or side-opened type. May be provided. The carrier 2000 in the exemplary embodiment shown in FIGS. 36A-36C may be generally similar to the carriers 200, 200 ', 300 shown in FIGS. 1-3, and similar features are numbered similarly. . Accordingly, carrier 2000 has a shell or casing 2012 having one or more openings 2004 (for illustration purposes, only one opening is shown in FIGS. 36A-36C) through which wafers can enter the carrier. / May be transported from a carrier. The shell of the carrier may have a movable wall or section 2016 that may form a closing door for the opening closing the individual opening 2004. As described above, in the illustrated exemplary embodiment, the shell 2012 may have a bottom wall 2016 that is movable to open and close the opening 2004. In another embodiment, any other sections or walls of the shell of the carrier may be movable to allow transfer of wafers into and out of the carrier. The moveable section 2016 may be sealed to the remaining casing 2014 in a manner similar to that shown and described above, and the casing may be, for example, inert gas, a different pressure than the ambient atmosphere, or a high vacuum. It may be possible to maintain an isolated atmosphere such as clean air. Shell 2014 and movable wall 2016 may be passive structures similar to wall 216 and shell 214 described above, for example, secured to each other by magnetic or any other desired passive fixture. Is also good. In an exemplary embodiment, the wall 2016 may include a magnetic element 2016C (eg, a steel material) and the shell 2014 may have a magnetic switch 2014S that is activated to secure and release the wall and the shell. . Magnetic elements in the wall and operable magnets 2014S in the shell secure the carrier door (either wall or shell, see FIGS. 36A, 36C) to the port door and unlock the carrier door from the rest of the carrier. As such, it may be configured to work with a magnetic fixture in the port door interface (as described further below). In another embodiment, the magnetic fixture between the wall and the shell may have any other desired configuration. The passive metal carrier 2000 and carrier doors 2016, 2014 provide a vacuum compatible, clean and washable carrier.

  In the exemplary embodiment shown in FIGS. 36A-36C, the carrier 2000 is illustrated in a configuration for carrying a plurality of wafers. In another embodiment, the carrier may be a single wafer with or without an integral wafer buffer, or the desired dimensions to carry any desired number of wafers. Similar to carriers 200, 200 ', 300 of the exemplary embodiments described above, carrier 2000 may be a reduced or smaller lot size carrier as compared to conventional 13-25 wafer carriers. As best seen in FIGS. 36A-36B, the shell of the carrier may have a transport system interface section 2060. The transport system interface section 2060 of the carrier 2000 may be arranged to interface with any desired transport system, such as a conveyor system similar to that shown in FIGS. For example, a carrier may be disposed or connected to a carrier casing and may be interlocked with a linear or planar motor forcer section of a conveyor system conveyor to propel the carrier along the conveyor, a steel magnetic pad or member. And the like. One example of a suitable configuration of a linear or planar motor reaction element connected to a carrier casing is described in U.S. Patent Application Serial No. 10/30/2003, which is incorporated herein by reference. No. 10 / 697,528. Also, in the exemplary embodiment shown in FIGS. 36A-36C, the interface section 2060 of the carrier supports the carrier from the transport system when the carrier moves and / or is stationary thereon. A carrier support member or surface 2062, which may be joined with a transport system to do so. The support surface may be a non-contact or contact support surface and may be on or with a side surface (eg, surface 2062S) or a bottom surface (eg, surface 2062B) to stably support the carrier from the transport system. It may be located opposite, or located at any other desired or opposed position. The non-contact support surface may be, for example, a substantially flat area, surface, or pad, connected to or disposed on the casing, formed by any suitable means, and stably holding the carrier. As it can (either based on the air bearing alone or in combination with the motive force (eg, magnetic force) provided by the transport system motor), it can interact with the transport system air bearing (not shown). In another embodiment, the carrier casing is floating (e.g., non-contact), but air (or any other desired gas) (passive) to stably support the carrier from the transport system structure. There may be one or more (active) air bearings directed at the transport system structure. In this embodiment, a suitable source of air / gas (e.g., a fan or gas pump) may be connected to the carrier for feeding into the air bearings of the carrier. In other alternative embodiments, the carrier casing and the transport system have both active and passive air bearing surfaces (eg, a lift air bearing in the transport system and a horizontal guide air bearing in the carrier). May be. Carrier 2000 may have other handling members, for example, a flange or surface such as handling flange 2068 as shown in FIG. 36B.

  In an exemplary embodiment, the carrier 2000 may have a tool interface section (tool interface section) 2070 as a coupling interface that allows the carrier to interface with a loading section (eg, loading port) of a processing tool. The processing tool can be of any kind. In an exemplary embodiment, interface 2070 may be located on the bottom surface of the carrier. In another embodiment, the carrier may have a tool interface on any other desired side of the carrier. In yet another alternative embodiment, the carrier may have multiple tool interfaces (eg, bottom and side surfaces) that allow the carrier to be joined to the tool in different configurations. The tool interface section 2070 of the carrier 2000 in the exemplary embodiment is best seen in FIG. 36C. The configuration of the tool interface section 2070 shown in FIG. 36C is merely exemplary, and in other embodiments, the carrier may have a tool interface section having any other desired configuration. In the exemplary embodiment, the junction section 2070 has features and is generally compatible with the appropriate SEMI standard for carriers (SEMI E.47.1 and E57, and any other suitable SEMI or other standards). All these standards may be adapted, all of which are incorporated herein by reference in their entirety. Thus, in the exemplary embodiment, the carrier interface section 2070 is adapted to accept primary and / or secondary KC pins (not shown) located at a conventional load port interface, according to SEMI standard E.C. It may include a kinematic coupling (KC) receiver arranged in accordance with 47.1 and E57. Also, the carrier interface 2070 may include a section having one or more information pads that conform to the carrier's SEMI standard. In another embodiment, the carrier junction section may not be provided with one or more SEMI-specified features (eg, the junction section may not be provided with a kinematic coupling mechanism), Nevertheless, a spare area corresponding to the mechanism may be provided on the side joint of the casing. Thus, in an exemplary embodiment, the carrier interface section 2070 may be capable of joining the carrier 2000 to a conventional load interface of a conventional processing tool. As can be appreciated, and as described with respect to the previously described embodiments, to couple the carrier to a loading port that couples the carrier to a process environment (or to maintain, for example, a vacuum in the processing equipment). Coupling the carrier may be such that the interior is substantially sealed to the processing environment and a surface, which may be referred to as a dirty surface on the carrier, is substantially isolated and separated from the processing environment. desirable. As can be appreciated, the carrier / loading port contacts the interface to seal the carrier, as described above, and the kinematic coupling between the carrier and the loading port comprises the carrier and the loading port. May cause an excessive constraint. To relieve excessive restraint, the kinematic coupling between the carrier and the loading port may be compliant and allow the carrier to be repeatedly positioned at the loading port interface. Coupling compliance may be triggered by a leading load from the load port interface. Referring now to FIG. 36E, a schematic cross-sectional view of an exemplary interface 2272 of a compliant kinematic coupler 2072 is shown, according to an exemplary embodiment. In general, the coupling interface (coupling interface) portion 2072 may be provided with pins 2274 and grooves or detents 2276 to reduce excess restraint on the carrier to any desired degree of freedom (eg, tilting, rolling, or rocking the carrier). Compliance or flexibility in one or more desired directions (as indicated by arrows X, Z) may be provided. As an example, the connecting pin 2274 may be compliant (eg, by a spring load, such as a bent-mounted generally spherical pin, a pin made of an elastic flexible material, etc.). The connecting groove 2276 may also be conformable (by forming a groove in a resilient, flexible material that bends and mounts, the groove surface bends when compressed under a prior load. Etc.).

  Further, in the exemplary embodiment, the carrier interface section 2070 may include a non-contact articulating interface between the carrier and the loading interface of the processing tool, as described in more detail below, It may be further configured.

  As can be appreciated, a wafer carrier, such as carrier 2000, may be typically associated with a processing tool for processing. In order to automatically transfer the wafer to the tool, it is desirable to arrange the wafer carrier and the loading port of the tool in close proximity. Conventional positioning methods can use conventional mechanical couplings, which typically contact the bottom surface of the carrier. For example, these conventional mechanical linkages provide a lead-in or cam that corrects for any misalignment and helps guide the wafer carrier to the aligned position. Unfortunately, this mechanism relies on the lead-in surface of the carrier to make sliding contact with the coupling pins of the loading port, resulting in potential wear and the generation of contaminants. A second problem with the use of conventional mechanical couplings is that it is desirable for the carrier to be sparse within the capture range of the conventional coupling in order to function properly. The carrier transport system is responsible for either adding complexity of the transport system and / or time for proper placement (eg, retries). Thus, the carrier transport system is designed to be sufficiently repeatable to place the carrier within the capture range of a conventional mechanical coupling, or in conventional applications, in a nominally aligned position to prevent wear. Should. Inevitably, the carrier transport system cannot achieve repeatability over many cycles, resulting in sliding contacts that produce particles. The interface of the carrier 2000 may provide the same repeatability in positioning the wafer carrier to the process tool, but uses non-contact (eg, magnetic) coupling. This feature allows the transport system to fully recognize the lead-in mechanism that relaxes placement tolerances and consequently speeds up the carrier loading / unloading step. Second, all movements to correct for placement errors remove any associated sliding movements for cleanliness and may be performed without physical contact between the carrier and the loading port.

  As seen in FIG. 36C, in an exemplary embodiment, the interface section 2070 of the carrier may include a non-contact coupling 2071 for coupling the carrier and the loading port with a non-contact junction. The non-contact coupling 2071 may typically include a non-contact support or lift area 2072, and a non-contact coupling section 2074. In an exemplary embodiment, the lift area 2072 is operatively associated with a load port air bearing (described below) and is controlled by the load port air bearing and positioned to stably lift the carrier. May be a substantially flat and smooth surface. In an exemplary embodiment, the carrier lift area is passive, but in another embodiment, the carrier may have one or more active air / gas bearings to lift the carrier. Referring again to FIG. 36C, in an exemplary embodiment, the lift areas 2072 are similar to each other, and the operation of lifting the carrier from the load port air bearings is substantially effected by pressure from the air bearings acting on the lift area section. And may have three sections distributed on the joining (eg bottom) side of the carrier casing such that the resulting lift substantially matches the center of gravity (CG) of the carrier. The shape and number of lift area sections 2072 shown in FIG. 36C are merely exemplary, and in other embodiments, the lift areas may have any desired shape and number. For example, the lift area may be a single continuous one (or a substantially continuous section extending around the perimeter of the carrier interface). In an exemplary embodiment, the lift area is placed on the carrier interface 2070 so as not to interfere with the SEMI compliant interface (eg, kinematic coupling receiver, infopad, etc.). The lift area 2072 may be located as far away from the CG as possible within the constraints of the bond, creating the desired pressure distribution and the desired magnitude of translation between the carrier and the loading port (ie, The dimensions may be any desired to accommodate the displacement (xy plane). In the exemplary embodiment, the lift area 2072 is symmetrically positioned with respect to a single axis (shown as axis X in FIG. 36C, eg, a biaxial reference axis), but with any other axis of the carrier interface. Is not a target. Thus, the carrier interface 2070 is split such that a non-contact interface with the tool load interface is achieved in only one suitable orientation. Placing the carrier in the wrong orientation results in carrier lift instability, which can be detected by a suitable sensor in the transport system to place the carrier, or by the carrier itself or the loading port, and exhibit incorrect placement. A signal may be transmitted. Also, the lift area 2072 may have a desired slope or bias to facilitate proper alignment of the carrier with the loading port. In another embodiment, the lift area is configured to create a desired horizontal resultant force of variable strength and variable direction on the carrier when the air bearing acts to align between the carrier and the loading port, It may be movable or tiltable, such as by mechanical, electrical, piezoelectric, thermal, or any other suitable means.

  Still referring to FIG. 36C, in an exemplary embodiment, the non-contact coupling section 074 includes one or more permanent magnets 2074A-2074C (three magnets 2074A-2074C are shown for illustrative purposes, but are different from each other). In embodiments, more or fewer magnets may be provided). The coupling magnets 2074A-2074C may be part of the reaction section of the linear / planar motor of the transport system or may be independent of the motor reaction section. The connecting magnets 2074A-2074C may be of sufficient size to carry the connecting port connecting magnets (described below) due to the desired misalignment between the carrier and the loading port. In the exemplary embodiment shown, the coupling magnets 2074A-2074C may be symmetrically positioned with respect to a single axis (such as axis X in FIG. 36C), but with respect to all other axes of the carrier interface. Are asymmetric. Thus, the non-contact coupling section of the carrier is separated to prevent the carrier from coupling to the loading port if the carrier is not in the desired orientation with respect to the loading port. That is, the non-contact coupling of the carrier may still be "locked" to the loading port for the correct orientation, and all other orientations will not be fitted by the coupling, thus attempting to load. Absent. To detect when a carrier is improperly placed on a loading port and cannot be properly connected, send a signal suitable for moving to a transport system, and, if possible, reorient the carrier to the proper orientation. In addition, a suitable sensor for the loading port or carrier may be provided. In another embodiment, the non-contact connection section and / or the lift area may be arranged symmetrically with respect to a plurality of axes of the carrier interface.

  Referring now to FIG. 36D, a bottom view of a carrier 2000 'is shown, according to another exemplary embodiment, wherein carrier 2000' is substantially similar to carrier 2000 described above, and similar features include: Similar numbers are assigned. The carrier 2000 'may include a carrier mating section 2070' having a non-contact coupler 2071 'generally similar to the non-contact coupler 2071 described above with reference to FIGS. 36A-36C. In the exemplary embodiment shown in FIG. 36D, the non-contact coupling section 2074 'is replaced with a steel magnetic section 2074A', 2074B ', 2074C' (motor responsive component of the transport system in the carrier) instead of a permanent magnet. Or may be independent thereof). The steel sections 2074A ', 2074B', 2074C 'may be of any desired shape, such as rectangular, round, cylindrical, or spherical. Each of 2074A'-2074C 'may be similar to one another, but in other embodiments, different shared sections and directional characteristics defining the desired magnetic coupling may be used in each section. The section is of sufficient size to fit within the magnetic field of the loading port junction and to accommodate the desired initial misalignment between the carrier and the loading port when the carrier is first placed on the loading port. Is also good. The coupling sections 2074A ', 2074B', 2074C 'may be positioned on the carrier interface such that the magnetic force on the carrier biases the carrier to a position aligned with the load port. As seen in FIG. 36D, in the exemplary embodiment, the connecting sections 2074A ′, 2074B ′, 2074C ′ are distributed on the carrier interface to define a single axis of symmetry (axis X), and therefore The non-contact connection 2071 'of the carrier may be locked to allow connection to the loading port in only one orientation. In another embodiment, the connecting section may have any other desired arrangement.

  Referring now to FIGS. 37A-D, perspective, end, side, and top plan views, respectively, of a tool loading station or port 2300 are shown, according to another exemplary embodiment. . In the exemplary embodiment shown, the loading port joins the wafer and loads and loads it from a bottom open carrier similar to the carriers 2000, 200, 200 ', 300 described above. It may have a configuration. In another embodiment, the loading port may have any other desired configuration. The loading port 2300 may have a suitable mounting interface, as exemplified by the SEMI standard. A BOLTS interface is provided to allow the loading port to be coupled to any desired processing tool or work station. For example, the loading port may be mounted / coupled to a control atmosphere section such as an EFEM (described in more detail) of the processing tool, or the atmosphere of the processing tool (in a manner similar to that shown in FIG. 14). It may be coupled to a chamber (eg, a vacuum transfer chamber) that is isolated from or a chamber that is open to the atmosphere of the processing tool. The loading port in the present exemplary embodiment is similar to the loading port described above. The loading port 2300 may typically have a carrier loading interface 2302 and a loading cavity or chamber 2304 (where wafers are received from the carrier individually or in a cassette or returned to the carrier). The chamber 2304 may be capable of maintaining an isolated atmosphere or a controlled (clean) air atmosphere (thus allowing the loading port to function as a load lock for a processing tool). Unlike the conventional loading port, the carrier loading joint 2302 may have a loading surface 2302L for supporting the carrier, which has substantially no protrusion in the carrier placement area when joined to the loading port. As seen in FIG. 37A, the loading surface may have bumpers or snubbers outside the carrier placement area to suppress carrier movement in the event of mutual displacement between the carrier and the loading port. The loading interface 2302 of the loading port may have a loading opening (or port 2308) (which leads to the loading chamber 2304) and a port door that closes a port similar to the loading port described above. In an exemplary embodiment, the port door 2310 may be substantially flat and level with the loading surface of the loading interface. Port door 2310 may be sealed at the port rim in a sealing arrangement similar to that shown in FIGS. 4A-4B. As can be appreciated, when joined and coupled to the loading port interface 2302 of the loading port, the carrier casing and carrier door are referred to as a "zero volume purge" seal at the loading port rim 2308R and the port door 2310, respectively. And may be sealed with a seal having an arrangement similar to that shown in FIGS. In another embodiment, the seal between the port rim, the port door, the carrier casing, and the carrier door may have any other desired configuration. In an exemplary embodiment, port door 2310 may be coupled to the port using a passive magnetic coupling or latch in a manner similar to that described above. In an exemplary embodiment, the magnetic coupling / latch element between the port door and the port provides a passive magnetic latch between the carrier door and the casing upon actuation of the latch between the port door and the port. It may be placed and configured to operate. Therefore, for example, when the port door is unlocked from the port, the carrier door is unlocked from the carrier, and the carrier door and the port door that fixes the carrier are fixed. In an exemplary embodiment, the loading port may include an indexer 2306 and a purge / vent system 2314, similar to those shown in FIGS.

  Also referring to FIG. 37D, the carrier loading interface of the load port of the exemplary embodiment interlocks with the non-contact interface section 2071 of the carrier 2000, for example, to join and couple the carrier 2000 to the load port 2300. And may have a substantially non-contact interface section 2371. As shown in FIG. 3710, in an exemplary embodiment, the interface section 2371 may have one or more air bearings 2372 and a non-contact coupling section 2374. The load port air bearing 2372 may be of any suitable type and configuration, for example, may be located in a "locked" configuration and typically corresponds to the configuration of the lifting area 2072 on the carrier interface. . Thus, the air bearing 2372 may be symmetrically positioned with respect to a reference X that determines the placement of the carrier 2000 when coupled to a loading port. A suitable air / gas supply (not shown) supplies the air bearings. A suitable regulator (not shown) may be used to maintain the desired gas flow to the air bearing. If desired, a gas supply and regulator to the air bearing may be located. For example, a gas supply 2372S to an air bearing 2372 (see FIG. 37C) may be external or internal to the loading chamber 2304 of the loading port, but may be isolated from the interior atmosphere of the chamber. A gas supply may extend from within the sealed sleeve to an air bearing that isolates the gas supply from the loading chamber. As a further example, the gas supply to the air bearing may extend into a bellows seal that isolates the indexing device in a manner similar to the purge and vent lines shown in FIG. In the exemplary embodiment, the air / lift area of the carrier may be on the carrier door, and thus, in the exemplary embodiment, the air bearing 2372 of the loading port (substantially below the lift area). May be located within the boundaries of the port door 2310. In another embodiment, the air bearing may be located on the port frame or port rim, and the gas supply to the air bearing may be located completely outside the loading chamber of the loading port. In an exemplary embodiment, air bearing 2372 may be an orifice bearing (with substantially localized exhaust) or a porous media air bearing with distributed, substantially uniform exhaust. . The exhaust flow from each air bearing 2372 may be fixed (substantially constant) in terms of pressure, mass flow, and direction (illustratively, as shown by AB in FIG. 37C, substantially vertical). It may continue to exist). In another embodiment, the air bearing has a variable exhaust flow rate to offset the movement of the carrier relative to the loading port and to facilitate aligning the carrier with the loading port, for example, by using an exhaust flow characteristic ( For example, pressure, mass, or direction) may be changed. As can be appreciated, the air bearing 2372 and lift pad 2072 on the carrier may be sized to provide a desired misalignment band or placement area for initial placement of the carrier on the loading port. .

  Referring now to FIG. 37E, there is shown a top view of a loading port 2300 ′ according to another exemplary embodiment, wherein the loading port 2300 ′ is similar to the loading port 2300 and similar features are denoted by like numbers. Is attached. In the present exemplary embodiment, one or more air bearings 2372 'may have an array of nozzles. The exhaust AB1-AB4 from the array of nozzles may be combined to provide a directional synthetic exhaust. As an example, each nozzle of the array may have an evacuation angle with respect to the evacuation of the other nozzles. The exhaust flow from one or more nozzles may be fixed or variable. When the air nozzles of the array are operating at maximum flow rate, the resultant exhaust has a first desired direction (eg, substantially vertical). A stop or decrease in flow through one or more nozzles of the array causes a change in the synthetic exhaust direction, resulting in a directional component at the loading surface. In another embodiment, the air bearing nozzle may be movable (eg, an air bearing nozzle mounted on a tiltable base) to control the direction of exhaust, or may be reshaped. (Eg, by using a piezoelectric or shape memory material). As can be appreciated, the directional component of the air bearing exhaust in the loading surface imparts a motive force in a direction opposite to the directional component of the exhaust to the carrier riding on the air bearing in the loading surface, and This causes lateral movement of the carrier.

  Referring again to FIGS. 37A-37D, the non-contact coupling section 2374 of the loading port connects between the carrier and the loading port (between the carrier door 2016 and the port door 2310, and optionally, the carrier casing and the loading port frame). (See FIG. 36C) or magnetic sections 2074A'-2074C 'of the carrier or magnet sections 2074A'-2074C' to define a magnetically lockable / non-lockable connection (e.g. 2374A to 2374C may be provided. Also, in the exemplary embodiment, the magnets 2074A-2074C of the carrier, or the magnet sections 2374A-2374C of the loading port in conjunction with the magnetic sections 2074A'-2074C'1, achieve the desired alignment described below. To this end, a carrier position correction device that can adjust the position of the carrier in the loading portion may be formed. The arrangement of magnet sections 2374A-2374C shown in the figures is merely exemplary, and in other embodiments, the magnet sections of the non-contact carrier coupling section of the loading port may be arranged / configured in any desired manner. . The magnet sections 2374A-2374C, when actuated, bias the magnets or magnetic sections in the carrier in a desired direction (to effect the locking / coupling of the carrier and the loading port and / or on the carrier). An operable magnet that becomes a magnetic switch for generating a correction force or the like may be used. As seen in FIGS. 37A and 37D, in an exemplary embodiment, the load port interface teaches the carrier transport system the location / location of the load port and allows for initial placement of the carrier on the load port interface. A non-contact registration system 2380. As described above, the location area of the loading port is substantially free of protrusions, and in an exemplary embodiment, there is substantial contact between the carrier and the loading port when initially placing the carrier in the location area. No (ie no frictional contact). In the exemplary embodiment shown, the alignment system 2380 may have an array or pattern of registration masks from which a suitable sensor can acquire an image. The pattern of the mask shown in FIG. 37D is exemplary only, and in another embodiment, any suitable masking pattern may be used that allows a suitable sensor to acquire an image, defining all desired degrees of freedom. . For example, a sensor (not shown) that may be placed on a carrier holding portion of a transport system (see, for example, FIG. 26B) is, for example, a CCD or CMOS image sensor that can capture images of the pattern and its spatial characteristics. You may. The image data that embodies the pattern determines the position of the loading port arrangement area with respect to the carrier transporter, and in order to inform the carrier transporter of the position, similarly registers and associates the position data of the carrier transporter and the pattern, It may be communicated to a suitable processor.

  In an exemplary embodiment, the carrier 2000 may be placed on the loading surface without protrusions in the placement area 2302P by the transport system. In an exemplary embodiment, the placement area may be an area formed with a size of the carrier +/- for example about 20 mm with respect to the alignment axis of the loading port. The actual placement error may be any value and is not dependent on the values listed, but may be specified in proportion to the correction mechanism used to position the carrier after placement. Therefore, the alignment repeatability of the main connection is substantially the same as the conventional connection method, and at the same time, increases the allowable placement error of the carrier transporter. Once the carrier is detected by the loading port, a film of air (air bearing) is activated to lift the carrier and eliminate friction at the interface between the carrier and the loading port. At this point, the forces on the carrier are its mass, the position of the center of gravity relative to the horizontal reference plane, and its own lifting force. The carrier lift area interfaces with an air pad on the loading port to lift the carrier and establish repeatable positioning of the carrier to the loading port (both angular and transverse). Here, the carrier floating on the air film may be placed in line with the loading port. As described above, the magnetic coupling can be used to apply a force to the carrier to translate and rotate the carrier. The force may be applied to the carrier using any method other than magnetism as long as the stroke is sufficient and the target position can be predicted. Completion of the connection between the carrier and the loading port is to clamp both objects to the holding position.

  By way of example, and particularly with reference to the exemplary embodiment illustrated in FIGS. 36A-36C, when carrier 2000 is in the deployment area, permanent magnets 2074A-2074C overlap magnets 2374A-2374C on the load port interface. . The air bearing may be energized and the loading port magnetism is actuated by electrical or mechanical means to present opposing poles to the carrier magnet. The lack of friction at the interface allows the carrier to move freely on the X, Y, and θZ axes until the magnetic poles are naturally aligned, but do not create physical contact. Throughout this step, the air bearings are pre-loaded by magnetic forces in the carrier and loading ports. The preload is useful in maintaining control of the carrier and increasing the hardness of the air bearing. For example, the operation of the air bearing is stopped after a predetermined time has elapsed or by the sensor feedback means, so that the carrier can be lowered onto the port door of the loading port. Here, the magnets make full contact and provide a clamping force to hold the carrier to the port door.

  In the exemplary embodiment shown in FIG. 36D, the carrier 2000 has steel pads 2074A and 2074C sized to fit within the magnetic field of the loading port junction after being deployed (by the carrier transport system) (see FIG. 36D). Having. The air bearing may be actuated and the magnet on the loading port actuated by either electrical or mechanical means to introduce a magnetic field to the steel pad of the carrier. The lack of friction at the interface allows the attractive force between the magnet and the ferrous pad to translate or rotate the carrier to the aligned position. The air bearing is pre-loaded by magnetic force. The preload is useful in maintaining control of the carrier and increasing the hardness of the air bearing. For example, the operation of the air bearing is stopped after a predetermined period of time or by sensor feedback means, so that the carrier can be lowered, for example, onto the port door of the loading port. The magnetic force on the steel pad provides a clamping force to hold the carrier to the port door.

  According to yet another example, the carrier is driven by a directed air nozzle 2372 ′ (see FIG. 37E) integrated into the air bearing surface, such as that of the exemplary embodiment shown in FIG. 37E. You may. In such an embodiment, the air nozzle 2372 may provide a laterally applied pressure to the bottom surface that imparts motion to the carrier. Movement can be controlled by a controller that supplies energy to the appropriate set of nozzles to direct the carrier in the X or Y axis until the magnet on the carrier is aligned with the loading port. In another embodiment where the array of nozzles is mounted on a platen and rotates / tilts, the platen may be energized to provide the desired direction to the nozzles. The nozzle directs the exhaust in a direction opposite to the intended direction of motion of the carrier. This motion provides a lateral force to translate the carrier until the magnet is aligned. Several forms of sensor feedback may be used to detect the actual position of the carrier and compare it with the aligned position, including, for example, feedback from a magnetic coupling. This information may determine in which direction the carrier should be translated and what force should be applied to the carrier by the air nozzle. In another embodiment, a nozzle and a magnetic coupling may be used in combination to align the carrier to a desired location.

  FIG. 37F shows a plan view of a load port interface, according to another example embodiment. In this embodiment, the loading port 2300 '' is identical to the loading port 2300 '' described above except that the magnet 2374 '' located in the loading port is mounted on an XY stage that is movable in the direction of movement indicated by the arrow in FIG. 37E. Similar to what was done. In this embodiment, the carrier is placed in the loading port, the air bearing is actuated, and the carrier magnet is attracted to the loading port magnet connected to the XY stage 2374S ''. The XY stage 2374S '' may be, for example, a pneumatic cylinder, a threadless screw, or an electric solenoid, and is linearly encoded to report the translated position. The coupled carrier magnet and the loading port magnet are driven back to the taught (aligned) position. Upon arriving at the destination, the operation of the air bearing may be stopped and the carrier lowered to the port door and clamped. Similarly, the method can be adapted to the existing kinematic coupling approach used, whereby each motion pin is coupled to the XY stage. In this embodiment, two of the motion pins are driven to align with X, Y, and θZ. This is a feasible way to improve the placement tolerance of the carrier with minimal friction, but without operating on non-contact basis.

  FIG. 37G illustrates another exemplary implementation of a similar loading port 2300A, except that the carrier may be driven by a pusher arm 2374M to position the carrier and align the coupling point of the carrier with the loading port. The form is shown. In the exemplary embodiment shown, the loading surface may be mounted rotatably about θX and θY (as indicated by arrows R, P). To tilt the loading plane to move the center of gravity of the carrier, a degree of freedom in combination with an air bearing can be used to provide translation in the direction of the rotational angle. This method uses position feedback to intelligently move the loading plane in the proper carrier direction to align the carrier and loading port magnets. Once the carrier is in position, the operation of the air bearing may be stopped and the carrier may be clamped to the port door. Finally, the loading plane is rotated back to its original position to achieve proper port alignment for door removal.

  As mentioned above, the environment within the carrier may vary depending on, for example, the pre-process and environment applied inside the wafer and the carrier. Thus, a carrier coupled to a loading port or station may have a different environment therein (eg, gas type, cleanliness, or pressure) than the current process. For example, any process of the carrier wafer may employ an inert gas. Thus, the interface between the carrier and the loading port of any tool may be loaded or exhausted with a suitable gas species, as desired, to minimize the pressure differential or the introduction of undesirable gas species in the carrier opening. You may make it so. In another embodiment, the tool environment is vacuum and the carrier coupled to the tool loading port through the interface is evacuated to a low pressure so that the wafer can be loaded directly from the carrier into a vacuum load lock. You may. An environmental control system that allows adaptation of the interface between the carrier and the loading port and the environment between the carrier and the tool is substantially similar to that shown and shown above in FIGS. Is also good. Another suitable embodiment of a carrier-loaded port bonding and environmentally compatible system is described in US Patent Application Serial No. 11/2005, filed August 25, 2005, which is hereby incorporated by reference herein. No. 210,918. Referring now to FIG. 38A, a flowchart is shown illustrating a process for adapting the environment within the carrier to a loading port that may have a different control environment. In the exemplary embodiment of FIG. 38A, both the carrier and the loading port may hold the same gas type (eg, the same type of inert gas). In this embodiment, from the carrier to, for example, a load port chamber (or other suitable plenum) if the pressure of the carrier is higher than the process pressure until an equilibrium of the environment between the carrier and the loading port / tool is achieved. (Via the joint), and if the carrier pressure is low, gas may be inserted into the carrier (via the joint) from a loading port or other suitable source. In the exemplary embodiment of FIG. 38B, the loading port has an atmospheric environment (eg, clean air) and the carrier and loading port may be connected in a manner similar to that described above, for example, with reference to FIG. 38A. An equilibrium between them may be established. FIG. 38C illustrates the process in an exemplary embodiment where the loading port has a vacuum environment. In another embodiment where the carrier and loading port may initially have different gas types, the initial environment of the carrier is evacuated and the gas type, etc. in the loading port is injected into the carrier before the door is opened ( (E.g., from a loading port).

Referring again to FIG. 37A, as described above, the loading port in the exemplary embodiment raises and lowers port door 2310 (to open and close the port), and handles the wafer to process the wafer. Has an indexer 2306 that can raise the cassette from the carrier to a desired height in the load port chamber. Indexer 2306 is similar to that of the exemplary embodiment described above and shown in FIGS. 8, 9, 10-10A, 14 and 18 with an indexing mechanism that is isolated from the capacity / environment occupied by the wafer. Is also good. In summary, a preferred embodiment of the indexing mechanism may have the following arrangement:
1. Main screw with bellows-This mechanism employs a main screw driven by an electric motor mounted on the port plate of the loading port. A portion of the main screw entering the clean area is enclosed in a bellows. The bellows can be any material, such as metal, plastic, or fiber, as long as it is generally clean during operation and can maintain flexibility without fatigue. The bellows provides a barrier between the contaminant generation mechanism and the clean area where the wafer is located. The flexible nature of the bellows provides this isolation over the entire stroke of the actuator. The feedback of the mechanism may be from a rotary encoder on a motor or a lead screw, or from a linear encoder along the path of movement. (See Fig. 14)
2. Pneumatic cylinder with bellows-similar to the previous embodiment (1) except that the drive mechanism is by pneumatic cylinder. For example, it may be used to move between two positions; for example, a closed and lowered pod. (See Fig. 9)
3. Similar to the previous embodiment except that the main screw-drive mechanism of the pneumatic cylinder remote drive is located at a remote location outside the wafer volume (see FIG. 10). The port plate of the loading port is attached to the drive with a support structure. The drive may be exposed to the clean area, but the contaminants are controlled by airflow passages or labyrinth seals. The use of an air flow requires that the drive be located downstream of the wafer so that any contaminants that may be generated can be below the wafer, pushed down, and away from the wafer. A labyrinth or other "non-frictional" seal can further limit the introduction of particles by providing a solid barrier between the drive and the cleaning area. Second, the drive can be remotely located outside the entire processing tool environment. It is placed in a potentially dirty mechanism in a less clean FAB environment, but uses a labyrinth seal to protect the process tool environment from the less clean FAB.
4. Driving Mechanism Magnetically Coupled to Port Plate—This embodiment employs a magnetic coupling between the port plate and the driving mechanism (see, eg, FIG. 8, but inverted). The magnetic coupling may operate through a non-steel wall over an air gap that allows the drive to be isolated outside the clean area. The driving method may be any of the types described above, such as a main screw, a pneumatic cylinder, or a linear motor. The latter may be present inside the clean area because it can operate cleanly in conjunction with an air bearing guide to suppress the direction of movement.

  Referring now to FIG. 39, there is shown a cross-sectional view of a load port 2300A and a carrier 2000A joined thereto, and a wafer airflow management system, according to another exemplary embodiment. Carrier 2000A and loading port 2300A may each be similar to the carrier and loading port of the exemplary embodiment described above. In the embodiment shown in FIG. 39, for illustrative purposes, the port door is opened and the cassette is indexed and placed in the load port chamber for processing. As the carrier is opened and the wafer is placed for processing, the airflow around the wafer may help maintain the cleanliness of the wafer. For example, some processes maintain the wafer in a down position for an extended period of time, increasing the risk of particles in the environment depositing on the wafer surface. Furthermore, without proper airflow, any contaminants created by the loading port mechanism can accumulate on the wafer surface. In the exemplary embodiment shown, at least a portion of the airflow in the process environment may be "captured" and redirected to flow across the wafer. The air is then exhausted to the rear of the wafer delivery plane (WTP) downstream of the processing environment. In the exemplary embodiment, the airflow pattern passes horizontally in a direction parallel to the wafer top surface and exits the back of the wafer cassette. Exhaust routing draws air vertically out of the cassette and directs it out of an exhaust port directed to the floor. This approach can maintain a clean, constant flow or air across the wafer surface when operating in an open loop or sealed environment. For example, if the loading port operates in an environment with a process-dependent gas species such as nitrogen or argon, redirecting the existing airflow back to the mainstream as shown is used for the control gas species Supports a closed loop environment.

  As seen in FIG. 39, in an exemplary embodiment, a supply airfoil is mounted against a vertical surface of the process mini environment, for example, above the area where the wafer is accessed. This location is the reserved space for the FOUP door opener in the SEMI E63 standard. The airfoil captures the volume of existing laminar flow from the mini environment and bends the air stream from vertical to horizontal. In an exemplary embodiment, when the wafer cassette is lowered inside the outer surface of the loading port, the diffusing element is placed on the back of the wafer cassette. The diffuser may consist of a solid panel, for example partially open, depending on the flow characteristics. The diffuser is configured to manage the uniformity of the horizontal airflow passing over the wafer while providing a pressure difference before the air enters the exhaust side of the duct. In an exemplary embodiment, the circuit exhaust side may be force induced to ensure that the air flow across the wafer is stable and uniform. For example, an axial fan mounted inside an exhaust duct with an output port directed to the mini-environment port of the process tool. Alternatively, the unit may be used without a fan and supply airfoil configuration, and the diffuser and exhaust duct may be arranged to ensure a stable and uniform air flow across the wafer.

  Referring now to FIGS. 40A-40D, schematic cross-sectional views of exemplary carrier wafer restraints are shown in accordance with individual exemplary embodiments. The exemplary embodiment shown in FIG. 40A illustrates radial clamp wafer restraint. Clamping may be provided by a translational wall of the cassette. The mechanism resides in the cassette and is activated and moved (Z-axis) either by the loading port or the pod shell-cassette interface (Z-axis). In another embodiment, there may be translational sidewalls inside the pod shell. The mechanism is provided with a pod shell and is operated either by a loading port, a pod shell to a port door (OHT Z-axis), or a pod to a cassette (loading port Z-axis). An advanced material (ie, shape memory material or magnetically constrained material, etc.) is used for operation. The exemplary embodiment shown in FIG. 40B illustrates a wafer control that employs a clamping force oriented substantially perpendicular to the top surface of the wafer. In an exemplary embodiment, it is a vertically translating finger integral with the cassette. The mechanism is provided in the cassette. The mechanism is activated either by a loading port, a pod to a port door (OH axis Z axis), or a pod to a cassette (loading port Z axis). In another embodiment, it is an off-axis translation finger integral with the pod shell or cassette. The mechanism can be provided on either the cassette or the pod shell. The fingers translate at an off-horizontal angle relative to the wafer (see FIG. 40C). The mechanism is actuated by either a loading port, a pod shell to the port door (OH axis Z axis), or a pod shell to the cassette (the loading port Z axis). In another exemplary embodiment, a 2DOF finger that is integral with the pod shell or cassette. The fingers rotate and then translate vertically to mate with the wafer (see FIG. 40D). The mechanism is actuated by either a pod shell to a port door (OH axis Z axis) or a pod shell to a cassette (Z axis of loading port). In another embodiment, the wafer restraint in the carrier may have any other suitable configuration. For example, the wafer may be V-shaped between support fingers on a cassette on which wafer edge contact is supported, for example, forming a linear edge contact with the wafer.

  Referring now to FIGS. 41-41B, schematic perspective, end elevation, and top plan views of an exemplary processing arrangement having a processing tool PT and a processing arrangement transport system, according to another exemplary embodiment, are shown. Each is shown. The processing tool PT is illustrated in an exemplary array of tools or the like arranged in the processing bay of the FAB. In an exemplary embodiment, for example, the transport system 3000 may provide processing bay tools, and the transport system 3000 may be an intrabay portion of an entire FAB transport system. In an exemplary embodiment, the transport system 3000 may be generally similar to the section of the AMHS system of the exemplary embodiment described above and shown in FIGS. 29A-29D. The transport system 3000 may communicate with another (eg, interbay) portion 3102 of the FAB AMHS system via a suitable transport interface as seen in FIG. As mentioned above, the arrangement of the processing tools PT in the tool array shown is merely an example having a plurality of tool rows (in the example, two rows R1, R2 are shown, but another embodiment). May have more or fewer rows of tools). In the embodiment shown, the rows of tools may be arranged substantially parallel (geometrically but may be angled with respect to each other) and define substantially parallel process directions. You may. The process directions along the different rows of tools may be the same or opposite each other. The process direction along an arbitrary row is such that the process direction along a part or area of the tool row is one-way traffic, and the process direction of another part or area of the same tool row is opposite traffic. May be inverted. The process tools in rows R1, R2 may be distributed to define different process areas ZA-ZC (see, for example, FIG. 41). Each process area ZA-ZC may include one or more process tools in rows R1, R2. In another embodiment, the tools may be located in the process area, but in a single row. As can be appreciated, the process tools in any area may be associated with a process, such as having a complementary process and / or having a similar tool throughput. For example, tool zone ZA may have a high throughput (eg, about 500 wafers per hour (WPH)) of tools, while a medium throughput (eg, about 75 WPH to less than 500 WPH) tools may be placed in zone ZB. Alternatively, a tool with a low throughput (for example, approximately 15 WPH to 100 WPH) may be placed in the area ZC. As can be appreciated, the tools that determine any given area may not be the same, and one or more tools in any given area may have a different throughput than other tools in any given area. Or a process, but there is still a relationship between the tools so that the tools in the area are systematically appropriate, at least in terms of transport, and the tools are organized in an area May be. The tool areas illustrated in FIG. 41 are merely exemplary, and in other embodiments, the tool areas may have any other desired arrangement.

  As seen in FIG. 41, the transport system 3000 can transport a carrier to / from a tool. The transport system 3000 may be generally similar to the exemplary embodiment described above and the transport system shown in FIGS. In the exemplary embodiment shown in FIGS. 41-41B, the transport system 3000 may have an overhead configuration (eg, the transport system is located above / above the tool). In another embodiment, the transport system has any other suitable configuration, such as a lower configuration (e.g., similar to the transport system illustrated in FIGS. 30-33, e.g., the transport system is located below the tool). You may. As seen in FIGS. 41-41B, the transport system may generally have multiple transport subsystems or sections. In an exemplary embodiment, the transport system 3000 is generally a conveyor section (eg, similar to the solid state conveyor described above and shown in FIGS. 20-25B, or any other suitable conveyor). It may have a bulk material / high speed transport section 3100. The conveyor section may extend across the entire tool area, for example, transporting the carrier at a substantially uniform transport speed without stopping / decelerating as the carrier is placed on / moved from the conveyor section. May be. Also, in the exemplary embodiment, the transport system 3000 includes a shuttle system section having a shuttle 3202 with access to a storage station / location 3000S (see also FIG. 41B) and one or more storage stations / locations (see also FIG. 42). 3200 and a transfer system section 3300 to join. In an exemplary embodiment, the transfer system section to be joined can access the carrier transported by the bulk transport conveyor section 3100, or the carrier of the storage station, and transfer the carrier to the loading section of the processing tool. Good. In an exemplary embodiment, the storage station, shuttle system section 3200, and joining transport system section may be formed into selectable installable portions that can be selectively installed along the transport system. In an exemplary embodiment, the transport system sections 3100, 3300, 3200 may be modular to facilitate installation of a portion of the system section selected for installation in the transport system. Portions of the transport system shuttle system, bonding system, and storage system section selected to be installed along the transport system may correspond to the processing tool areas ZA-ZC. As can be appreciated, the transport system 3000 may be configurable to correspond to a processing tool or processing tool area. Further, in the exemplary embodiment, the transport system may be configurable in the areas TA-TC and generally communicate with and correspond to the processing tool areas ZA-ZC. Thus, the transport system may have different areas with different system section configurations. In an exemplary embodiment, the storage system and shuttle system sections may be configurable in each of the areas TA-TC of the transport system. Also, in the exemplary embodiment, the junction transport system section may be configurable for each region. In an exemplary embodiment, the junction transport system may include optional junction transporters (the gantry of the example shown in FIG. 41) portions 3310, 3320, which are added and removed. And may be located in a number of different orientations in each of the areas TA-TC of the transport system. The desired joint transfer system part may also be installed in the area of the transfer system in order to provide an access speed commensurate with the processing speed of the process tool corresponding to the desired tool joint and, for example, the tool area ZA-ZC. Good. As best seen in FIG. 41A, a junction transport system section may have a selectable variable number of transporter travel planes (eg, some of the areas TC may have a single junction transporter travel plane (FIG. 48). Other regions TA, TB may have one or more transporter travel planes ITC1, ITC2 (see FIGS. 41A, 46)). In regions with multiple planes, the transporters may be able to traverse past each other. Although two planes are shown, more or fewer transporter planes may be provided. In an exemplary embodiment, the transport system is arranged with a substantially horizontal travel plane, but in another embodiment, the transport system has a vertical travel plane for a junction transporter bypass. It may have any other desired arrangement, including:

  Overhead gantry systems (OGS) can be configured for low, medium and high throughput. The ability to change factors or processes can be provided by a modular reconfigurable assembly of the field. These modular assemblies can be classified, for example, into three categories: low throughput, medium throughput, and high throughput. The placement of the various modules may depend on a number of factors, such as the desired moving side, storage capacity, and distribution of the desired throughput into bays.

  Low Throughput: As an example, a low throughput tool or tool area can be fully accommodated in a single gantry 3310. This configuration may provide all desired movements without using a “feeder” robot 3320 or shuttle system 3200. The gantry, in addition to transferring the carrier from storage to the tool, grabs the carrier from the intrabay conveyor and transfers it to the storage location. To move the carrier to an adjacent gantry area, the carrier may be placed on an intrabay conveyor or in a storage nest for removal by an adjacent gantry. Using this configuration, one gantry traverses another gantry until the intervening gantry moves. If more than one gantry is working side by side and one fails, the adjacent gantry will take over the work of the failed unit. Work is reduced but not completely interrupted.

  Medium throughput: For example, a medium throughput tool or tool area is filled by adding a “feeder” robot 3320 (eg, additional gantry / transporter levels). This configuration is generally similar to the low throughput arrangement with the addition of feeder robot 3320 and sorter / shuttle 33200. In an exemplary embodiment, the feeder robot and sorter / shuttle may be dedicated devices for performing only the transfer from the intrabay conveyor to the storage. It may be desirable for all feeder robots to employ two gantry loader robots 3310, 3312 on one side of the feeder (see FIG. 44). However, in another embodiment, the feeders may be paired with one loader robot. The purpose of the sorter / shuttle is to accept carriers from feeders and queue for storage. By using this configuration, the "loader" robot can focus solely on moving from storage to tools and vice versa without the additional load of grabbing the carrier from the intrabay conveyor. The system can operate with adjacent low, medium, or high throughput modules. When a failure occurs in the loader robot, the adjacent loader robot moves to the area of the failed robot and performs work. (See FIGS. 46 and 47). If the feeder mechanism fails, the individual loader robots operate in the same manner as the low throughput configuration. In both failure cases, the system will continue to operate, although with reduced capacity.

  High Throughput: As an example, in high throughput applications, the gantry module can be configured to meet the needs of a particular tool or tool area. High throughput arrangements may also have loader robots on each side of the bay, with a feeder robot arrangement similar to that of the medium throughput area, and a similar sorter / shuttle to queue the carriers in storage. Good. (See FIG. 45). The loader robot involves a tool located beside the bay that allows for shorter distance travel. Carriers enter and exit the high throughput area via the intrabay conveyor system. High throughput configurations are fault tolerant to both loader robot failures and / or feeder robot failures. If a loader robot fails, other loader robots may work on both sides of the bay after the failed robot has been moved out of the area. In the event of a feeder failure, the loader robot will be responsible for grabbing the carrier from the intrabay conveyor system. If both the loader robot and the feeder robot fail, one loader robot will be responsible for all desired movements.

  Each of the low, medium, and high configurations can operate as a single entity or adjacent to any of the three configurations, depending on the desired speed of travel. The system does not have any single point of failure that completely disables carrier flow across the system. In addition to fault tolerance to individual or multiple component failures, the system can take advantage of multiple available carrier travel paths. The host controller employs a standard set of movements, including levels following significant movements of a particular carrier, under normal operating conditions. To overcome temporary carrier traffic spikes, tool obstructions, or upstream restrictions, the host control logic provides a scheme for rerouting and reversing carrier flow away from problem areas. You can start. FIG. 50 illustrates many ways to move a carrier from points A to B, according to an exemplary embodiment.

In an exemplary embodiment, a “feeder” robot may remove carriers from the intrabay conveyor system and place them in a suitable storage location. If desired, the feeder robot allows the tool loader robot to focus solely on moving from storage to tools, improving the overall travel of the system. The feeder is quick to allow the intrabay conveyor to move with limited or no obstruction (eg, there may be no obstruction of the conveyor when accessing the carrier from an access lane similar to that of FIG. 20). Use short distance travel. The feeder mechanism reduces the workload of the gantry system. Possible drive mechanisms to support various movements include linear motors, ball screws, pneumatic drives, belt drives, friction drives, and magnetic propulsion. The following embodiments can be implemented based on the above assumptions:
1. The feeder robot is similar to the gantry loader robot except that it is fixed in the x-direction (length of the bay) and has degrees of freedom in the y (horizontal axis of the bay) and z (vertical) directions. The feeder mechanism is placed on a plane below the tool loader robot so that the loader robot can pass without payload. The area above the loading port area is open so that the loader robot can move over the feeder with the payload. The feeder system is placed vertically so that it has enough space to pass through the intrabay conveyor, move on the carrier and grab when the truck is in the raised position. The feeder accesses the carrier from above and uses a short vertical stroke to grab the carrier from the intrabay conveyor system and place it on the desired storage flange. In this configuration, the storage lanes are on the same plane as the intrabay conveyor. The storage lane possesses a two-way sorter / shuttle mechanism used to shuttle the carrier to the next location along the storage row. The shuttle drive mechanism is designed, for example, to be able to move the carrier to at least one of the pitch intervals along the length of the bay. Pitch spacing can be defined as the distance that the gantry tool loader robot can travel adjacent to the feeder robot and grab the carrier without obstruction. Also, if desired, a sorter / shuttle is also used to transport carriers between adjacent loader robot areas and storage lanes. For example, the career sequence is as follows:
• The intrabay conveyor stops momentarily at the fixed X position of the feeder robot along the length of the bay.
The feeder robot travels from the previous Y position to just above the carrier on the intrabay conveyor.
・ The feeder robot grabs the carrier.
-The feeder robot travels in the Y direction (horizontal axis of the bay) to a specific shuttle lane.
・ The feeder robot places the carrier on the shuttle and proceeds to the next movement.
A shuttle / sorter mechanism propels the carrier in the X direction.
The gantry tool loader robot moves to the storage position and then grabs the carrier and places it on the appropriate tool.

  Examples of some of the advantages of a system according to exemplary embodiments include improved wafer throughput over conventional systems, multiple travel paths to complete carrier transfer, and improved fault tolerance. .

  According to another exemplary embodiment shown in FIG. 48, the feeder robot is implemented as a linear stage on a plane directly below the shuttle and intrabay conveyor system. The stage has the same degree of freedom as in the first embodiment, and grips the carrier from below rather than above. Once the carrier is captured from the intrabay conveyor, it is propelled back from the bay and released onto the appropriate shuttle. This structure has the advantage that the conveyor lane can be placed anywhere between the machine boundaries. For example, the intrabay conveyor may be central rather than external, as in Embodiment 1. Another advantage of this arrangement is that in Embodiment 1, the loader can perform this movement only if it is located in the loading port area, whereas the loader robot is now in the bay. It is possible to pass through the feeder mechanism with the payload at any Y position. Further, the loader robot does not need to communicate with the feeder geometry to avoid collisions. Both the feeder and the loader robot have a payload and can occupy the same vertical space without joining to each other. A series of movements of this configuration is the same as that of the first embodiment except that the carrier is grasped from below rather than above.

  In another embodiment, the overhead or mechanism from below can move in the X (length of the bay), Y (horizontal axis of the bay), and Z (vertical) directions. In this configuration, a shuttle / sorter may not be used because the 3-axis feeder can move to a particular storage lane and slot as needed. For example, a carrier is moved from an intrabay conveyor, placed in the appropriate storage lane, and then translated vertically toward the initial queue of carriers in storage. As best seen in FIG. 49, another exemplary embodiment allows for carrier storage of a capacity that matches the carrier geometry that extends from the FAB floor to the highest point reachable by the OHT system, Improved storage capacity may be created by providing a vertical storage column that can be located throughout the longitudinal direction.

  In another embodiment, a cylindrical carrier nest can be placed to increase the storage density in the FAB, if desired. Cylindrical storage nests can hold carriers one on top of the other and provide a mechanism to raise or lower the carriers to a specified height. The mechanism of vertical movement may be pneumatic, mechanical, or magnetic.

  Referring now to FIG. 51, there is shown a schematic plan view of a transport system 4000 according to yet another exemplary embodiment. In the exemplary embodiment illustrated in FIG. 51, the transport system is a representative section, such as, for example, an interbay portion of an entire FAB transport system, and in another embodiment, the transport system includes any desired dimensions and It may have a configuration. In the exemplary embodiment shown in FIG. 51, the transport system 4000 may be generally similar to the transport system 3000 described above and illustrated in FIGS. Similar features are given similar numbers. As with the transport system 3000, in the exemplary embodiment shown in FIG. 51, the transport system 4000 may have a bulk or high speed mass transport section 4100 (eg, a conveyor) and a joining section 4200. The junction section 4200 of the present embodiment shown is merely exemplary, and in other embodiments, any desired configuration having any desired number of subsections (eg, storage sections, shuttle sections similar to those described above). May be provided. In general, the joining section 4200 may have a number of feeder robots that can join carriers between the bulk transport system section 4100 and the process tool. The bulk transport system section 4100 may be generally similar to the transport system 500 described above and in part shown in FIG. In the exemplary embodiment shown in FIG. 51, the bulk transport system section 4100 may comprise a truck having a solid state conveyor system. The truck has a solid-state conveyor system similar to that described in US patent application Ser. No. 10 / 697,528, which is hereby incorporated by reference herein in its entirety. You may. In the exemplary embodiment shown in FIG. 51, transport system 4100 is an asynchronous transport system (with transport system 500 and transport system 500) in which transport of carriers by the transport system is substantially decoupled from movement of other carriers being transported. Similar). Thus, one or more carriers may operate independently (e.g., accelerate / decelerate, stop, load) without affecting the transport speed of other adjacent or nearby carriers in the carrier transport stream of the transport system during transport. / Removal) may be possible.

  In the exemplary embodiment shown in FIG. 51, the bulk transport system section, hereinafter referred to as bulk transport 4100, comprises a main transport track 4100M. Further, the bulk transporting machine 4100 may have a large number of siding tracks 4100S. For illustration purposes, shown in FIG. 51 as a loop, in another embodiment, the main transport track 4100M, which may have any other desired shape, is the main transport path of the carrier being transported by the bulk transporter (Or stream). Although the description of the exemplary embodiments specifically refers to a carrier, the mechanisms described herein place the (substrate) carrier on a platen or other activation device of the payload that is transported by the bulk transporter. The same applies to other embodiments that may be applicable. In an exemplary embodiment, the main transport path may be continuous and substantially constant velocity. Therefore, the carrier transported on the main transport truck 4100M can travel continuously and at high speed over the entire transport on the main path without any obstacle from the carrier stopped on the transport system. The employed siding or branch track 4100S allows the operation of the carrier on the bulk transport that determines the transport speed to be separated from the main transport path. As described above, the operation of determining the speed may be performed from the siding track without obstructing the main transport path. Thus, the siding track 4100S may define, for example, a carrier shock absorber, a loading / unloading position or a path switching device. In the exemplary embodiment, one siding track is shown, but, for example, and in another embodiment, there may be any desired number of siding tracks. Also, the configuration of the siding in the illustrated embodiment, which is bifurcated and rejoins at a substantially straight segment, is merely exemplary; in other embodiments, the siding track may have any other desired shape. May be provided. For example, siding tracks may branch between opposing sides of the main track loop (in any bay), or different interbay (eg, inter-inter) transport sections, eg, as shown in FIGS. 29A, 29B, or Branches may be made between main tracks in an inter-intra (or vice versa) transport section. In another embodiment, the siding may have a different orientation than the main track and may traverse above or below the main track. In other alternative embodiments, if desired, a substantially right-angled intersection or switch may be located at the intersection between the main track and the siding track.

  In an exemplary embodiment, the main and siding trucks 4100M, 4100S may comprise modular truck segments A, B, C, D, L connected in modules to combine the trucks of the bulk carrier. The carrier may be driven on the tracks 4100S, 4100M of the bulk carrier by, for example, a linear motor. Similar to the truck 500 described above, the linear motor forcer may be located in / on the trucks 4100M, 4100S, and the responsive portion of the linear motor may be on a carrier. The carrier may be a non-contact or smooth bearing (eg, air / gas bearing) magnetic levitation system acting on a suitable solid state support member of the carrier, or a contact bearing (eg, roller, ball / roller bearing, etc.). It may be movably supported on the track by a suitable device in the track. In another embodiment, the carrier may have a starting support integrated therein, such as wheels, rollers, gas / air bearings, and the like. As can be appreciated, the starting supports supporting the carriers on the main and siding tracks may have any desired arrangement on the tracks to stably support the respective carriers across the tracks, May be distributed along the main and siding tracks so that they can move freely along the tracks. In an exemplary embodiment, the linear motor may be, for example, a linear induction motor (LIM), a linear brushless DC motor (etc.), but in another embodiment, along the main and siding tracks of the bulk conveyor. Any desired linear motor or any other type of motor / drive may be used to facilitate the carrier. As described above, in the exemplary embodiment, the LIM forcers (or phase windings) 4120, 4120M, 4120S are the track modules A, B, C, D, L that form the main and siding tracks of the transporter. The carrier has a LIM reaction rate / member, which is described in further detail below. In another embodiment, the carrier or carrier platen may be equipped with motor coils, and the truck may be equipped with magnetically responsive elements.

  Still referring to FIG. 51, the modular segments A, B, C, D, L of the main 4100M and siding 4100S tracks of the exemplary embodiment shown are representative, and in another embodiment, any desired May be provided. Track segments A, B, C, D, L are generally similar unless otherwise indicated. As seen in FIG. 51, in an exemplary embodiment, track segments (modules) may generally include single track segments (eg, A, C, D, L) and junction (track switching) segments. . In other embodiments, any other desired modular track sections may be used. For example, in another embodiment, any track module may be referred to as a non-bonded multi-track module, a plurality of tracks extending generally parallel to each other, each forming a different carrier transport path. May be included. In an exemplary embodiment, a single track segment may include substantially straight segments A, D, L and a curved segment C, but in other embodiments, the single track segment may include any other It may have a desired shape. In the exemplary embodiment shown, the track sections are rendered at a substantially common elevation for rendering purposes. In another embodiment, the main and siding tracks may include different altitude sections. For example, the siding may be located at a different altitude (eg, lower or higher) than the main track and / or other siding. Also, the main track and / or siding track may have track sections at different altitudes along the track, such as higher or lower track portions. Suitable ramps (not shown) may join the track sections at different altitudes so that the carrier traveling the track can transition between them. As can be seen from FIG. 51, the joining segments B, 4102, 4102 'can be located where the siding or branching track 4100S merges with the main track 4100M or where joining is desired. In the exemplary embodiment shown in FIG. 51, two joining track segments 4102, 4102 'are shown for illustrative purposes. The configuration of the joining segments 4102, 4102 ′ shown in FIG. 51 is merely an example having a single branching track (for example, the left side with respect to the direction indicated by the axis X in FIG. 51) that merges / differents to one side of the main track 4100M. . In another embodiment, the joining segment may branch to the right of the main track. In other alternative embodiments, the joining segment is a branch on the opposite side of the main track, with multiple branches in one segment having branches that are substantially directly opposite or alternating with each other, or one side of the main track. It may have any desired configuration, such as multiple branches on (eg, left and / or right). In the exemplary embodiment, single track segments A, C, D, L have different shapes (eg, straight, curved, etc.), but are otherwise generally similar. Each of the track segments A, C, D, L may include a corresponding section in the forcer 4120 of the motor. As can be appreciated, and as shown in FIG. 51, when modular track segments are assembled, the forcer sections (of the various track sections) of the motor are operably integrated (using a suitable controller). )) In order to operate the reaction plate in the carrier / platen and to drive the carrier / platen over the length of the main and siding tracks, a motor forcer 4120M, 4120S substantially continuous with the main and siding tracks is used. May be defined. In another embodiment, the track may include one or more segments without an integrated forcer section.

  As can be appreciated, what may be referred to as a primary coil assembly of a forcer 4120 or a linear motor, for example in the case of a LIM arrangement, generally comprises a steel laminate and phase windings, which comprise track segments and It may be integrally formed or housed in a forcer housing joined to the track segment. In another embodiment, the phase windings of the linear motor forcer integrated into the track segment may have any other suitable arrangement. The forcer section within each segment A, C, D, L (eg, see segment C in FIG. 52) may itself be segmented or may be continuous. Curved track segment C may have a forcer section 4120C, in which the phase windings may be arranged such that the coil assembly defines a curve corresponding to the curvature of the track, and may be generally curved. May have a forcer section with segments arranged to define a fourth forcer section. In another embodiment, the forcer section of the track segment may have any other desired shape. The forcer sections of the track segments A, C, D, L may be arranged symmetrically with respect to the track and the carrier riding the track. In another embodiment, the forcer may be placed asymmetrically with respect to the track and the carrier thereon.

  FIG. 54 shows a schematic end view of an exemplary track segment A and an exemplary carrier 5000 movably supported thereon. As mentioned above, the trucks (primary and siding 4100M, 4100S) typically provide motive / propulsive forces, motive support and guidance of the carrier 5000 to provide controlled movement of the carrier along the track. . Also, as described above, in the exemplary embodiment, a linear motor driving a carrier, such as a LIM, biases the forcers 4120M, 4120S in the truck that operate the reaction plate / element 5100 on the carrier. . Referring also to FIG. 53, a schematic bottom view of a representative carrier 5000 and a carrier reaction plate 5100 is shown. The arrangement of the reaction plate 5100 on the carrier shown in FIG. 53 is for illustration only, and in other embodiments, the reaction plate on the carrier may have any other suitable arrangement. In another embodiment, there may be more or less reaction plates. In an exemplary embodiment, the reaction plate 5100 is shown on the bottom surface of the carrier, but in other embodiments, the reaction plate may be located on any other desired side or portion of the carrier. In an exemplary embodiment, the reaction plate 5100, such as that defining the LIM, may be made from a metal, such as steel or aluminum, although any other suitable material may be used. One or more of the reaction plates may be made from a steel (magnetic) material, as described below. In another embodiment, the responsive element may include a permanent magnet arranged to operate with a motor phase winding, such as a phase winding of a linear brushless DC motor. The reaction plate on the carrier may include one or more plates 5102 corresponding to the forcers 4120M, 4120S in the trucks 4100M, 4100S and providing propulsion along the main or siding truck. This is schematically illustrated in FIG. The reaction plate 5102 is shown schematically in FIG. 53 as a single plate, but may include any desired number of plates, for example, having an arrangement as shown in FIGS. 20C, 20D. As described above, the forcers 4120 in the track (and thus the forcer sections 4120A, 4120C, see FIGS. 52, 54 of the individual segments) and the corresponding reaction plates 5102 are arranged substantially symmetrically with respect to the carrier and the track. May be done. In another embodiment, the forcer of the motor may be asymmetric.

  In the exemplary embodiment shown in FIG. 54, the carrier 5000 is movably supported on a truck by a suitable air bearing 4200. The distribution of gas / air / liquid bearings shown in FIG. 54 is merely exemplary, and in another embodiment, to provide any other desired gas pressure distribution that stably supports the carrier from the truck. In addition, an exhaust port may be arranged. In another embodiment, a gas port that exhausts to lift the carrier from the truck may be present in the carrier. As mentioned above, in other alternative embodiments, the starting support between the carrier and the track may be of any other desired type and may be a dependent of either the track segment or the carrier. You may. The gas ports of the air bearing 4200 and / or the gas impact area on the carrier may be configured to create a resultant directional force that results in horizontal guidance of the carrier to the track. As can be appreciated, the gas port may be communicatively connected to a suitable gas supply (not shown). In an exemplary embodiment, the track section may include a gas conduit for delivering gas from a gas supply to a gas port of the fluid bearing. Suitable valve adjustments and controls may be included, for example, to operate a gas port proximate to the location of the carrier on the truck. The control may be active (e.g., a sensor determines the presence of the carrier and turns on / off a gas port operated on a track section where the operation of the carrier is known).

  In the exemplary embodiments shown in FIGS. 51-52, and 54, the tracks 4100M, 4100S may include a control and guidance system 4130 to guide the carrier as it moves down the track. Guidance system 4130 may be a non-contact system that extends along main and siding tracks 4100M, 4100S. In the exemplary embodiment, each of the track segments A, C, D, L may include corresponding sections of the guidance systems 4130A, 4130C (see FIGS. 52, 54), where the segments are joined. , May be combined to form a substantially continuous track guidance system. In another embodiment, the guidance system may be independently mountable on a truck. In other alternative embodiments, the guidance system may be of any suitable type, for example, may be integrated with the truck's support system (eg, to provide orientation and horizontal alignment of the carrier moving along the truck). Rollers or wheels on the truck or carrier between them to help maintain) and / or may be integrated with a linear motor (as described further below), and / or carrier support and linear It may be independent of the motor. In an exemplary embodiment, the guidance system 4130 in the tracks 4100M, 4100S may comprise an induction magnet track 4130M, 4130S that extends generally parallel to the linear motor forcer 4120 in the track. . The induction magnet track may for example comprise permanent magnets arranged in series and forming a magnet track. Also, a portion of the track, such as the OT switch / joint, may include an electromagnet, and the on / off may be repeated for switching. In another embodiment, the induction may include providing a winding on the carrier that can generate an induction force to a motor in the track section. The induction winding may be integral to the linear forcer, or it may be separate and independent of the linear forcer that provides propulsion along the track. As can be appreciated, the guide forcer in the track may be a suitable guide plate / element 5104 (such as a magnetic (eg, steel) or permanent magnet in the carrier to maintain the carrier in a desired horizontal position relative to the tracks 4100M, 4100S). ). In other alternative embodiments, a fixture for generating a guiding force on the carrier may be mounted on the carrier and operate with stator elements in the truck to provide carrier guidance. As described above, in the exemplary embodiment, the track segment modules A, C, D, L may also have corresponding sections 1430A, 1430L of the guided track, respectively, as shown in FIGS. Good. In the exemplary embodiment, the guided track sections 1430A, 1430L of track sections A, C, D, L are located on opposite sides along forcer 4120A, with two guided tracks 4132, 4134 (see, eg, FIG. 54). May be provided. The positions of the guidance tracks shown are exemplary. In another embodiment, more or less guidance tracks may be provided at any desired location. The guide plates / elements of the carrier interacting with the guide tracks are the off-axis (relative to axis X) linear motor reaction plates 5104R, 5106R, 5104L, 5106L of the other sections of the linear motor, as described below. 53 (see FIG. 53) or other suitable steel plate / element independent of the linear motor reaction plate. In other alternative embodiments, the carrier may guide the magnet element and the track is a steel / magnetic track arranged to interact with a magnet on the carrier to define a track guiding system. May be provided. The guidance system may also include a positioning / position sensing system / device, such as a Hall effect sensor, LVDT, communicatively connected to a controller that controls the movement of the carrier along the track. The positioning system / device may be similar to that described in US patent application Ser. No. 11 / 211,236, which is incorporated by reference above. As an example, positioning feedback along the main and siding tracks may also be provided by suitable Hall effect sensors of the LIM.

  Referring again to FIG. 52, there is shown a schematic plan view of the track segment C and the representative junction segment B described above. The other joining segments of bulk carrier 4100 are generally similar to joining segment B. In an exemplary embodiment, the joining segment may have forcer sections on both the main and siding tracks 4120M, 4120S. Also, in the exemplary embodiment, segment B may include a switched linear motor forcer section 4125. As can be appreciated, in the exemplary embodiment, a stand-alone linear motor independent of the main track and siding track linear motors is used to perform carrier main and siding track switching, as described below. It may be placed at the junction. In an exemplary embodiment, the switching linear motor may be a LIM, and any other suitable linear motor such as a brushless DC motor may be used. In another embodiment, any other suitable electrical or mechanical switching system may be used. As seen in FIG. 52, in this embodiment, the forcer 4125 (of the switching motor) may be located at an offset from the main and siding track forcers 4120M, 4120S. The main track forcer section may be further partitioned into subsections 4122, 4124, 4126, as shown. The main track forcer subsections 4122, 4124, 4126 may be physically separated from each other as shown, or may be effectively separated from each other by the controller, such that the section 4124 opposite the switching LIM forcer 4125 is Power may be turned off independently of the LIM forcer sections 4122, 4126 of other adjacent main tracks. The configuration of the forcer sections 4122, 4125, 4124, 4126 on the junction segment and the guidance system shown in FIG. 52 is merely exemplary; in another embodiment, the junction segment has any other desired configuration. May be. As seen in FIG. 52, in an exemplary embodiment, the switching forcer 4125 may be offset from the main and siding truck forcers in a direction in which the siding truck merges / differentates (eg, left from axis X). In the exemplary embodiment, the switching forcer 4125 has one end 4125M that can be positioned generally parallel to the direction of the main track (indicated by axis X) and the local direction of the siding track (axis b in FIG. 52). ) May have another end 4125S that may be positioned generally parallel to the end 4125S. In the exemplary embodiment, the local direction of the exit / entrance from the main track of the siding (axis b) is oriented at an acute angle to the direction of movement of the main track (axis X). Thus, as can be appreciated, when moving in siding, the carrier may use the momentum along axis X to switch, and may not offset the momentum along axis X as a whole (eg, May not stop on the main truck). According to another exemplary embodiment (see also FIG. 52C), the joining segment is provided at the location of the switching forcer (4125) with a switching guide 4130S ′ (tracks 4132S ′, 4134S ″) and described below. In order to switch without using the motor A ′, the switching may be performed by absorbing the momentum of the carrier along the advancing axis (eg, the axis X.) As described above, in another embodiment, If desired, an angle may be provided between the entrance / exit to the siding and the direction of the main track (e.g., orthogonal, but the switching linear motor configuration still utilizes momentum in the X direction). 52-53, in an exemplary embodiment, the end 4125M of the switching LIM forcer 4125 is a reactive pre-carrier of the carrier. (See also FIG. 53.) The reaction plates 5104, 5106 may be laterally offset (along axis Y). The reaction plates 5106L, 5106R may also be offset longitudinally (along the axis X) from the desired reference point (eg, center) of the carrier, and in an exemplary embodiment, the reaction plates are relative to the horizontal axis Y. In other embodiments, the carrier may have any other desired reaction plate arrangement, with more or fewer reaction plates. As described above, one or more of the reaction plates 5104L, 5106L may switch the carrier from the main truck 4100M to the siding 4100S (and the carrier). Vice versa the junction meet at other end of the loading 4100S, segment 4102 ', in order see FIG. 51), it may be used by switching forcer 4125.

  As best seen in FIG. 52B, in an exemplary embodiment, the induction magnet section 4130 is arranged to switch between a main track and a siding track. As seen in FIG. 52B, in the exemplary embodiment, the guide magnet track 4134 (the side proximate to the siding entrance) has at least a portion of the switching guide track 4134S ′ (corresponding to that side) merge with the track 4134M. You will be interrupted. The guide track interface shown in FIG. 52B is exemplary only, and in other embodiments, the track interface / interchange may be arranged in any other suitable manner. The opposing guide magnet track 4132M (opposite the siding entrance) merges with the corresponding switching guide 4132S 'as shown. In an exemplary embodiment, each of the guide tracks 4130M, 4130S 'may include a section 4132J (see also FIG. 52) with an actuatable magnetic field that can be turned on / off. For example, the section 4132J of the induction track may be an electromagnet coil, for example, similar to a magnetic chuck with permanent magnets, and the current passing through the coil may effectively switch the magnetic field of the induction magnet section on / off, thus providing carrier and induction It may consist of a coil arranged around the winding to release the inductive force between the track. In another embodiment, the actuatable magnetic section may have any other desired arrangement. As can be appreciated, the guide magnet section 4132J of the desired guide track 4132M, 4132S ', 4134S, 4134S' is switched "on" and "off" to effect the switch, for example, when the carrier is over the main track. If continuing, the main guidance tracks 4132M, 4134M are switched "on" and the switching guidance is switched "off"; if the carrier is switched to siding, the switching guidance 4132S ', 4134S' is "on"; The main lead is "off". Switching the induction magnet sections 4132M, 4134M "off" allows the carrier to move freely in the lateral direction (outside the main track) because it no longer needs to be held in the main track. In another embodiment where the induction magnet is in the carrier, the junction segment induction system may include windings suitable for generating a canceling magnetic field in the carrier magnet. The splicing segment is operable / movable, generally aligned with the siding entrance (axis b), which, when switched on, directs the carrier (moved by the forcer 4125) to the siding track 4100S. It may further include one or more possible induction magnets (not shown). These inductive magnet sections may be switched "off" as the carrier moves over the joint and continues on the main track. Thus, by way of example, in order to switch the carrier from the main track to the siding, in an exemplary embodiment, the operation of the forcer section 4124 may be deactivated, and the induction magnet sections 4132M, 4134M are switched "off" and the induction The switches in 4132S 'and 4134S' may be "ON". The momentum of the carrier may move along a track with switching guidance, effectively deflecting the trajectory of the carrier in the direction of arrow b (see FIG. 52) on siding. Forcer 4125 (if provided) may further urge the carrier from the main track toward the entrance of the siding, however, in an exemplary embodiment, the momentum of the carrier may cause movement along the desired siding track 4100S. To continue, it may be sufficient to move the carrier into the siding until the siding forcer 4120S operates on the corresponding reaction plate 5102. The induction magnet track 4130S acquires the magnetic element of the carrier to guide the carrier along the siding track 4100S. In the exemplary embodiment, the switching of carriers is accomplished in a generally passive manner, and position switching may not employ position feedback. In another embodiment with active switching, position feedback during the switching of the carrier from main to siding may be performed by a guidance / positioning system, for example, when the carrier is on a main track, It may be arranged to obtain the position of the carrier before handing off to the switching LIM forcer, while continuing the position feedback while the carrier switches via the switching LIM, allowing handoff to the siding track LIM. Thus, the positioning device may be any suitable type of continuous or dispersive device (eg, optical, magnetic, bar code, reference strip, laser / beam ranging or laser / beam ranging) that is arranged to allow position feedback during switching. High-frequency ranging).

  52A, another plan view of a junction segment B 'of a bulk transporter is shown, according to another exemplary embodiment. In the present exemplary embodiment, junction segment B 'is similar to segment B shown in FIG. 52 unless otherwise indicated. In FIG. 52A, the induction magnet track is not shown for clarity. Also, the LIM forcer section 4120M 'of the main track on segment B' may have a subsection 4124 'that can be powered off independently of adjacent forcers 4122', 4126 '. In the present exemplary embodiment, the siding LIM forcer 4120B 'is directed toward the main truck to enable operation (if desired) on the carrier's reaction plate 5106L' when the carrier is on the main track. May extend sufficiently. This is illustrated in FIG. 52A, which shows the reaction plate 5102 ', 5106L' (with phantom) of the carrier placed to perform the switch. The reaction plate 5102 'of the truck LIM may be located, for example, on the main truck forcer segment 4124' (and away from, for example, the adjacent "upstream" main truck forcer 4122 'and the reaction plate) 5106L'. May be placed to work with the siding LIM Forcer 4120B '. Thus, to switch, the main track segment 4124 'is powered off and the siding forcer 4120B' may be energized and direct the carrier to the siding track. Switching from siding to main track may be accomplished in a similar manner. In another embodiment, the main and siding track linear motors may be any suitable linear motor, such as a DC brushless motor or other brushless iron core motor. In another embodiment, the permanent magnet responsive element may be in a carrier, and in other alternative embodiments, the permanent magnet may be in a track segment (core motor in the carrier). In another embodiment, the phase winding cancels the magnetic field between the magnet and the motor core, eliminates the induction provided by the magnet / core element interaction of the motor, and moves from one track to another. If desired, the carrier may be placed in either a track (in a manner similar to that shown in FIGS. 20A and 20B) or a carrier to allow the carrier to be switched.

  Referring again to FIG. 51, in an exemplary embodiment, one or more track segments L may have an area I, where the carrier is lifted from the track by a robot or the like in the joining section 4200. Is also good. As can be appreciated, induction magnet track 4130S in lift area I may be provided with a section having an operational magnetic field similar to section 4132J shown in FIG. In another embodiment, the phase windings include a magnet in either the track or the carrier and a track, to "release" the carrier from capture by the track and to facilitate the lifting of the carrier from the track. Or it may be provided to offset the magnetic field between the magnetic body which is the iron core or steel reaction plate of the linear motor in any of the carriers.

  Referring again to FIG. 53, in an exemplary embodiment, one or more carriers 5000 may include a coupler 5200 for coupling one or more carriers in a carrier row to one another. The coupling may be of any suitable type, such as a magnetic coupling that may be operably connected to the controller for coupling or release. In another embodiment, the inter-carrier connection may be, for example, a mechanical connection. The coupling 5200 is shown schematically in FIG. 53, but may be located at a desired location on the carrier in other embodiments. The inter-carrier connection may be used to connect two or more carriers together during transport by the bulk transporter 4100. As can be appreciated, this allows one or more of the tethered carriers to be in the queue, while the other carriers in the queue may be passive. FIG. 51 illustrates a row of carriers, according to an exemplary embodiment. As can be appreciated, while tethered, tethered carriers are grouped together, allowing all carriers to move by controlling the movement of "institution" carriers in the queue. This can significantly reduce the controller load. The position information of any carrier in the queue may be registered with a controlled, relatively desirable reference in the carrier queue (eg, "institution" carrier reference). Thus, when moving as a row, the desired controller may identify and locate the desired carrier without tracking the individual carrier movements of each carrier, and may determine the location of any carrier in the row. If it is desired to initiate individual control, the controller may retrieve the position of the column on the track and the position of any carrier relative to the desired reference on the column, and identify the approximate position of the carrier on the track. High-precision positioning may be performed using a track positioning system. In other embodiments, positioning when disconnecting from a row of carriers may be performed in any other desired manner. As can be appreciated, any carrier in the queue may be an institution carrier. In order to support the desired operating parameters, the positioning of the engine in the row of carriers may be established. Further, the position of the engine may be switched by deactivating the engine carrier and activating another carrier in the queue to become the engine.

  Referring now to FIG. 55, there is shown a schematic end elevation view of a transport system A4000, according to yet another exemplary embodiment. In the exemplary embodiment shown in FIG. 55, the arrangement of the transport system is exemplary only, and in other embodiments, the transport system may have any other suitable arrangement. In the exemplary embodiment shown in FIG. 55, transport system A4000 is generally similar to transport system 4000 described above and illustrated in FIG. 51 (similar features are numbered similarly). The transport system A4000 may generally include a high speed bulk or mass transport section A4100 and a joining section 4200. The high-speed bulk transport section A4100 may have one or more high-speed bulk transport paths A4102 (two paths are shown in the embodiment illustrated in FIG. 55 for illustrative purposes). In an exemplary embodiment, the bulk transport path A4102 may be configured in a manner similar to that described above to enable bulk transport of the carrier A5000 in the FAB. Also, in the exemplary embodiment, the bulk transport path A4102 of the bulk transport section A4100 transports the carriers traveling through the pathway at substantially constant speed (at least in some portions of the pathway) in the direction of travel of the pathway. It may be arranged as follows. The passages of the mass transport section may be connected to one another in a manner similar to that described above. In the exemplary embodiment shown in FIG. 55, junction section A4200 may be generally similar to junction section 4200, for example, described above and shown in FIG. In an exemplary embodiment, the joining section A4200 can join a carrier between a mass transporter and a processing tool. The junction section A4200 may generally have a shuttling section A4202 and a storage section A4204. As mentioned above, the storage section A4204 may be arranged with a storage location A4204A for storing or buffering carriers for multiple processing tools. The storage location A4204A may be arranged in any desired way to efficiently buffer the carrier of the processing tool. The shuttling section A 4202 may have a number of feeder robots A 4202 capable of joining a carrier between a storage location of the storage section A 4204 and a loading interface (eg, loading port) of a processing tool. In the exemplary embodiment, the transport system A4000 has a transporter handoff section A4300 that can bond the carrier A5000 being transported through the bulk transport section path A4100 and the bonding section A4200, for example, at substantially constant speed. You may. Thus, in the exemplary embodiment, the transport system A4000 may be an asynchronous transport system, even a portion of the pathway of the transport system where carriers traveling along the pathway are transported at substantially constant speed. In the exemplary embodiment, the transport handoff section A4300 effectively decouples the transport speed determination operation of the carrier while the carrier is transported by the transport system A4000 from the transport path A4102 where the carrier travels at substantially constant speed. It can be so.

  Referring still to FIG. 55, the passageway A4102 of the bulk or bulk transport section may comprise any desired bulk conveyor system. Referring now to FIG. 55A, in the illustrated exemplary embodiment, the passageway A4102 of the mass transport section A4100 is shown as a belt or ribbon conveyor A4103 for illustrative purposes only. As can be appreciated, belt conveyor A4103 has a carrier support or transport surface A4604, and carrier A5000 is supported from (or on) belt A4103 for transport. Also, as can be appreciated, the belt A4103, and thus its carrier transport surface (defined by or subordinate to the belt), has a substantially constant transport speed with the transport direction of the path (arrow X in FIG. 55A). ). In another embodiment, the transport system for transporting carriers along the path of the mass transport system section may be of any desired configuration. For example, the passage may have a solid state conveyor system as described above, or may have a mechanically defined vehicle (rollers, fluid bearings, etc.). In another alternative embodiment, the aisle may be a truck for an automatic or semi-automatic vehicle. The aisle transport system may be configured to be operable such that the carriers transported by the system are transported at substantially constant speed, or such that the transport speed is variable as desired. As a result, the transport handoff section can be used to maintain a substantially constant transport speed independent of the transport speed determining operation of the carrier transported by the transport system, to maintain the transport system in a desired path (or a portion thereof). ) Can be operated.

  In the exemplary embodiment shown in FIG. 55A, the mass transport section path A4102 is shown as an overhead system placed on the processing tool overhead. In another embodiment, the mass transport section passage may be located at any desired elevation relative to the tool and the loading interface LP of the tool. The carrier A5000 in the exemplary embodiment shown in FIGS. 55, 55A-55C is exemplary. Carrier A5000 may be similar to carrier 2000 described above and shown in FIGS. 36A-36B. In an exemplary embodiment, the carrier A5000 generally includes an upper joining section A5002 (eg, generally arranged to allow carriers to be joined and fitted from above or above the carrier) and a lower joining section A5004 ( (E.g., generally arranged to provide a mating and mating of the carrier from below or below the carrier). The carrier may be side-open, top-open, or bottom-open as described above. In another embodiment, the carrier may have any desired arrangement of mating / mating surfaces (eg, side mating) for joining the carrier to the loading joint of the transport system and processing tool. The loading interface LP of the processing tool in the exemplary embodiment shown in FIG. 55 is exemplary. In an exemplary embodiment, the load interface LP may be positioned to interface with the lower interface section A5004 of the carrier, but in other embodiments, the tool interface may be connected to any desired side of the carrier. It may be configured to fit with the above complementary carrier fitting function. The position of the tool load interface LP with respect to the transport system A4000 illustrated in FIG. 55 is merely exemplary, and in other embodiments, the tool load interface may be placed in any desired relationship with the transport system. In the exemplary embodiment illustrated in FIGS. 55 and 55A, the conveyor system of the mass transport section passageway A4102 has a carrier support A4104 arranged to mate with the upper joining section A5002 of the carrier A5000. Is also good. The configuration of the carrier support shown in FIGS. 55 and 55A is exemplary, and the carrier support may include a carrier upper interface A5002 to releasably capture and hold the carrier from the conveyor during transport. It may have any suitable configuration that complements and is operable with the mating function. In an exemplary embodiment, carrier A5000 may be carried by a conveyor in passage A4102 suspended substantially beneath the passage. The lower carrier interface A5004 may be accessible (e.g., beneath or beside the carrier) during transport on passageway A4102. In another embodiment, the carrier support on the conveyor of the passage fits and supports the carrier on any desired side or surface of the carrier during transport (eg, the conveyor mates with the carrier bottom surface). Or may be joined).

  Still referring to FIG. 55, as described above, the joining section A4200 of the transport system is an overhead gantry system generally similar to the joining systems 3200, 3300, 4200 described above and shown in FIGS. Is also good. Joining system A4200 may have a selectable variable number of transporter travel planes (such as those defined by gantry A4201) traversed by shuttle and feeder robot A4202. Also, as described above, in other embodiments, the joining system may have any other desired configuration. In an exemplary embodiment, gantry A 4201 and storage location A 4204 may be nested between passages A 4102 in the mass transport section. The feeder robot A4204 may be configured to fit into the carrier A5000 from the carrier upper joint portion A5002 and support the carrier from above. A shuttle (not shown) may support the carrier from above or below. In another embodiment, the robots and shuttles in the joining section may have any suitable arrangement. As described above, carrier handoff between mass transport section A4100 and junction section 4200 may be performed in handoff section A4300, as further described below.

  As best seen in FIGS. 55 and 55A, handoff section A4300 generally accesses and conveys a carrier (e.g., at a substantially constant path speed) conveyed along a bulk path. It has a carriage surface that can capture and sever the carrier from the aisle and place the carrier at a drop station where the robot / shuttle at junction section A4200 can access the carrier. Referring now also to FIGS. 55B-55D, in an exemplary embodiment, handoff section A4300 may have multiple carriers A4302 (one shown for illustrative purposes). As can be seen, the carriage A4302 may be a truck or any other suitable transport mechanism or system that can be aligned with the carrier as it is transported over the path at the transport speed. . Accordingly, the carriage A4302 can travel in the transport direction of the path (indicated by arrow X) a distance sufficient to allow for carriage coupling with the carrier and separation of the carrier from the bulk transport support A4104. You may. In the exemplary embodiment, carriage A4302 is schematically illustrated as a truck on a truck or aisle A4304. The truck A 4304 may be located below the path A4102 of the mass transport section (see also FIG. 55). For example, truck A4304 may be hung from overhead with hangers. Also, in the exemplary embodiment shown, the track and the carriage A4302 thereon are also located below the junction section. As mentioned above, in another embodiment, the carriage of the handoff section may have any other suitable configuration. As can be appreciated, in an exemplary embodiment, the placement of the handoff section allows the carriage to access a carrier on the aisle, for example, at a separate portion of the aisle. The handoff sections may be distributed in appropriate sections of the aisle. As best seen in FIG. 55D, the carriage A4302 may have a carrier interface A4306, which may mate and capture the carrier on the passage. The carrier interface A4306 of the carriage A4302 may have any suitable arrangement. In an exemplary embodiment, the carrier interface A4306 may have a mating feature, for example, to mate with a lower interface A5004 of the carrier (see FIG. 55A). For example, the carriage interface A4306 complements the kinematic coupling mechanism of the carrier, and when mated results in passive alignment upon mating and stable passive fixation between the carrier and the carriage. May be provided. In another embodiment, the carriage interface may include any other desired passive or active coupling or mating system (eg, a clamped magnetic chuck, etc.) for capturing the carrier. As seen in FIG. 55B, carriage A4302 may be supported on track A4304 such that carrier interface A4306 of carriage A4302 is sufficiently aligned with carrier A5000 to couple. As can be seen, the carriage track A4304 accelerates such that the carriage A4302 matches the travel speed of the path A4102, aligns with and captures the desired carrier A5000 conveyed by the path, and releases the carrier from the path support A4204. May be enough to do so. In an exemplary embodiment, the carriage track A4304 may be sufficient to slow down the carriage to a desired speed, for example, for handing off to the bonding system A4200 at the drop-off station DS. In the exemplary embodiment, the location of drop-off station DS may be selectively variable (such as along handoff section track A4304), but may be stationary. In another embodiment, the carriage may be located on a track that moves at a speed that substantially matches the advancing speed of the path, such as on a permanent loop track.

  As best seen in FIGS. 55A and 55D, in an exemplary embodiment, the carriage surface of handoff section A4300 is in proximity to the carrier on the aisle and in the Z direction to load / unload the carrier from the aisle support. May have a move in. In the illustrated exemplary embodiment, the carriage may also be provided with a suitable Z drive (primary screw, pneumatic, electromagnet, etc.) that can drive the carriage interface A4306 in the Z direction. Good.

  Thus, and by way of example, to remove the carrier from the passage, the carriage interface A4306 may be raised to contact the carrier interface A5004 (the carriage and carrier are aligned). The carrier interface may be variable, e.g., to speed up / slow the carriage relative to the passage to facilitate release of the carrier from the passage support after the carrier A5000 is coupled to the carrier A5000. May be raised further to release from the The carrier released from the passage may be lowered by the carriage A4302 so that the carrier carried by the passage removes the carrier envelope of the carrier. Loading of the carrier onto the aisle by handoff section A4300 may be accomplished in a substantially similar but opposite manner. In another embodiment, the Z-direction movement of the carriage interface is such that the support track has a Z-drive or lift, or raises and lowers the carriage to make contact with a carrier on the path, a variable height such as a ramp that goes up and down. This may be done in any other desired way, such as by having a support surface for the carriage. In other alternative embodiments, movement along the axis for closing the carrier and carriage may be performed by a passage or a suitable drive or other displacement means of the carrier (e.g., the passage support may be It may have a Z-axis drive unit). In yet another alternative embodiment, the moving or closing axis for closing the carrier and carriage for coupling and disconnection of the carrier and the passageway by the handoff section may have any desired orientation (relative to the ground reference coordinate system). It may be.

  As best seen in FIGS. 55, 55B-C and described above, the handoff section A4300 has a drop station DS that is accessible, for example, by the robot A4202 of the junction section A4200. In the exemplary embodiment, the drop station DS is configured such that the transport envelope TE of the path of the mass transport section and the carrier transported thereon is the Y-axis or the like (in another embodiment, the offset is any desired axis). May be offset). The offset of the drop station DS (most commonly seen in FIGS. 55B-55C), sometimes referred to as the lateral offset from the longitudinal direction defined by the passage, is from the junction section A4200 to the top carrier junction. Facilitates access to A5002. Also, in the exemplary embodiment, the upper joining section A500N of the carrier is provided with a joining section A4200 in order for the carriage to join the carrier at another joining section A5002 of the carrier when the carrier is placed at the drop station DS by the carriage A4302. May be freely fitted. Thus, in an exemplary embodiment, the carrier may be transferred directly between the carriage A4302 and the robot A4202 in the junction section without interfering with the grasping / positioning behavior. In another embodiment, the carriage of the handoff system may be positioned to place the carrier in the storage position, and the junction section may access the carrier from the storage position. In another alternative embodiment, the carriage in the handoff section and the robot in the joining section may join the carriers at a common joint. In the exemplary embodiment, top access to the carrier allows the joining section to employ the feeder robot A 4202 to join the carrier from the drop station DS. In another embodiment, the drop station of the handoff section may be offset from the transport envelope in any suitable direction to allow the joining section to access and join the carrier at the drop station.

  As best seen in FIGS. 55B-55C, in an exemplary embodiment, carrier A5000 may be moved from or to a drop station by carriage A4302. As an example, the carriage may be a suitable Y drive that allows the carriage to move the carrier to the drop station, where the drive provides a degree of freedom of movement in the offset direction to the carriage or at least the part joining / supporting the carrier. May be desired). As an example, the carriage interface A4306 may be on a movable support that is movable in the Y direction. In another embodiment, a carriage, such as a unit with a carrier, may be movable in the Y direction to move the carrier to a drop station. In still other embodiments, the track may be of a shape having a bend away from the transport envelope (eg, a permanent loop) or the like, such that a carriage traveling along the track is guided to a drop station.

  Referring now also to FIGS. 56-56A, schematic plan and front views, respectively, of an exemplary transport system A4000 'are shown, according to another exemplary embodiment. In the exemplary embodiment illustrated in FIGS. 56-56A, transport system A4000 'is substantially similar to transport system A4000 described above (similar features are numbered similarly). The transport system A4000 'generally includes a mass transport section A4100' having a number of passages A4102 ', a junction section A4200' (shown as a gantry for illustrative purposes), and a mass transporter and junction section. Has a handoff section A4300 'for handing off the carrier A5000' and allowing the carrier transported by the desired mass transport section path to maintain a substantially constant travel speed. In the exemplary embodiment, the separation or offset between the drop station DS 'of the handoff section A4300' and the transport envelope TE 'of the path A4102' (performing the carrier action / action to determine the transport speed outside the transport envelope) May be performed by changing the direction of the passage A 4102 '. As best seen in FIG. 56, in the exemplary embodiment, the passage may have sections A4102A ', A4102B', A4102C 'having different directions relative to each other. For example, this may be done at the intersection of the shunt / bypass sections, the end sections of the passages (see also FIGS. 29A-29B and also FIG. 51). Also, as in the embodiment shown in FIG. 56, passage sections A4102A ', A4102B', A4102C 'having different orientations are provided in the FAB area where it is desirable to load / unload carriers from the passage of the mass transport system. May be done. In the exemplary embodiment shown in FIG. 56, the arrangement of passage sections A4102A ', A4102B', A4102C 'generally defines two bends, each of which is transported to install drop station DS. Dimensions are sufficient to provide the desired separation between the envelope TE 'and the handoff section. As mentioned above, the orientation and arrangement of the passage sections shown are exemplary only. In the exemplary embodiment, each section has a handoff section portion A4300 ', which may be substantially similar to each other and to the handoff section A4300 described above and shown in FIGS. Each handoff section section A4300 'includes a carriage and longitudinal track A4304' (see also FIG. 56A) arranged to load / unload carrier A5000 'from passage A4102' (in a manner similar to that described above). May have. Each handoff section portion A4300D 'may have a drop station DS' for the carrier. In the exemplary embodiment, the drop station DS 'may be substantially in line with the track A4304' (along with the transport envelope TE 'of some downstream or upstream passages in FIG. 56). In an exemplary embodiment, some portions A4300, A4300B of the handoff section may be used to remove carriers from the aisle, and other portions may be used to load carriers into the aisle. As an example, portions A4300 'may join and grasp the carrier from passage section A4102A'. The removed carrier A5000 'may be brought to a drop station DS', for example, located at the end of a track A4304 ', for handing off to the junction section A4200'. Carriers loading on the aisle may be brought to drop station DSB 'in section A4300B' by joining section A4200 'for handoff. Handoff section portion A4300B 'then moves the carrier, aligns transport speed and direction with aisle section A4102C', and loads the carrier into the aisle. In another embodiment, each portion of the handoff section may be capable of loading and unloading a carrier into / from a passageway (eg, a truck to support loading or unloading a carrier from / to a passageway). And / or the carriage may circulate along a track to perform both loading and unloading, so that the transport system A4000 'is asynchronous. There may be.

  Factory automation uses wafer identification, for example, to plan, schedule and track the entire wafer process. The ID is machine-readable and is managed in a database on the host server. The wafer identification in the database is affected by wafer breakage, equipment downtime or software errors. Therefore, repeated reading steps in each processing tool may be used to overcome this. Mechanical reading of the wafer may typically be performed, for example, after the carrier is loaded, the wafer is unloaded, and then oriented. The ID is reported to the host for verification and then the process starts after authentication. Conventionally, when a fraudulent wafer is loaded, it cannot be known unless a considerable amount of time is wasted on identification. Further, if the tool stops due to an error, the wafer must be removed and re-entered into the carrier / database, creating a potential for human error. The carrier may have an on-board writable data tag that can store the wafer ID 'and is included in and read by the loading port. The carrier according to the exemplary embodiment described above may have an interlock that interlocks the wafer ID 'with the carrier's writable ID tag at the loading port. A writable ID tag on the carrier incorporates an external digital I / O signal. The signal is coupled directly to a sensor that can detect pod door removal. The sensors may be of any suitable type, such as optical, mechanical, acoustic, capacitive, and the like. As an example, low voltage signal lines may pass through conductive pads on both the pod shell and the pod door. When the door is closed and the voltage flow ends, the pads make local contact. When the door is removed, the voltage flow is interrupted and a signal is created on the carrier ID tag.

  According to one exemplary embodiment, a wafer reading method is introduced in addition to a software integrity tag and a method for detecting whether a door has been opened. For example, the integrity tag is written to a writable carrier ID after the wafer is loaded and the door is secured to the pod. When the pod arrives at the next tool loading port, the tag is read along with the integrity tag. If the integrity tag is valid, the wafer ID 'has not been tampered with and is considered valid. If the integrity tag is invalid, the door has been removed at some point, and the accuracy of the wafer ID is suspect. Based on this information, the host forces the tool to read the wafer to verify its integrity.

  According to another exemplary embodiment, an integrated wafer ID reader may be provided at the loading port. The reader is positioned so that the ID 'can be read during continuous door opening to minimize cycle time. This embodiment has the advantage of reduced cycle time compared to the method in the processing tool, and also allows the entire verification scheme to be performed separately from the processing tool host communication.

  According to another exemplary embodiment, a dedicated alphanumeric display for each wafer slot in the carrier may be added to the carrier. The integrated display correlates to the actual wafer ID in the carrier. The character height may be large enough to read from a distance similar to the distance between the operator and the storage nest mounted on the ceiling. In this embodiment, the display schematically shows the ID integrity. If the integrity tag is invalid, it is shown schematically on the display in a different character or color.

  According to yet another exemplary embodiment, an external wafer ID reader is integrated. The external wafer ID reader may be located, for example, outside of the loading port and processing tool in the AMHS system. The carrier with the suspicious wafer ID 'is loaded on an external reader and verified. Once the operation is completed, the door is fixed and the integrity tag is written to the writable carrier ID. Here, the carrier is moved to the storage / loading port position which is the final destination. This has the advantage that it is performed in parallel with the waiting time of the wafer carrier, rather than continuously with the tool processing time. Further, an external reader can incorporate a wafer orientation method.

  It should be understood that the foregoing description is only illustrative of the present invention. Various alternatives and modifications may be devised by those skilled in the art without departing from the invention. Accordingly, the present invention is intended to embrace all such alternatives, modifications and variances that fall within the scope of the appended claims.

Claims (8)

A semiconductor component processing system,
The semiconductor component processing system includes an overhead gantry feeder robot, wherein the overhead gantry feeder robot interfaces with at least one of an interbay transport section and an intrabay transport section and includes the interbay transport section and the intrabay transport section. Transporting a substrate holding container between at least one of the interbay transport section and the intrabay transport section and at least one fixed substrate holding container storage across a direction of movement of at least one of the sections. Wherein the at least one fixed substrate holding container storage is disposed above at least one substrate processing tool;
The semiconductor component processing system is configured to transport the substrate holding container separate from the at least one of the interbay transport section and the intrabay transport section and on the at least one substrate processing tool. Transport section,
The transport section is configured to interface with at least the at least one fixed substrate holding container storage on the at least one substrate processing tool, such that the transport section and the at least one substrate holding tool are configured. Movement of the substrate holding container to and from the container storage is performed on the at least one substrate processing tool;
The transfer section is configured to transfer the substrate holding container between the at least one substrate holding container storage and the at least one substrate processing tool;
The transport section includes at least one overhead gantry disposed on the at least one substrate processing tool and defining at least two intersecting and horizontally co-planar independent transport axes, the transport axis comprising: The transfer of the substrate holding container is effected by two degrees of freedom operation in a horizontal plane, and the transfer section is disposed on the overhead gantry feeder robot, and the transfer section for transferring the substrate holding container is provided by the overhead gantry feeder robot. A semiconductor component processing system characterized by being able to pass over a semiconductor device. 2. The semiconductor component processing system according to claim 1 , wherein the transport section is disposed above the overhead gantry feeder robot, and the transport section that transports a substrate holding container passes over the overhead gantry feeder robot. A semiconductor component processing system, wherein 2. The semiconductor component processing system according to claim 1 , wherein said at least one overhead gantry includes at least one overhead carrier having at least three or more degrees of freedom. 4. The semiconductor component processing system of claim 3 , wherein the substrate holding container has a shell and a door disposed on a side of the shell to define an access side of the shell; Semiconductor component processing, characterized in that the overhead carrier comprises a rotary drive for rotating a substrate holding container carried by the at least one overhead carrier to change the direction in which the access side of the shell is facing. system. 2. The semiconductor component processing system according to claim 1 , wherein the overhead gantry feeder robot includes a rotation drive configured to rotate a substrate holding container carried by the feeder robot. Semiconductor parts processing system. The semiconductor component processing system of claim 1 , wherein the at least one overhead gantry is configured to provide opposed load ports of the at least one substrate processing tool. Semiconductor parts processing system. 7. The semiconductor component processing system according to claim 6 , wherein the at least one overhead gantry includes at least one carrier, and the carrier rotates a substrate holding container carried by the carrier to hold the substrate. A semiconductor component processing system, wherein the orientation of a container is configured to correspond to the orientation of each of the load ports arranged opposite to each other. 2. The semiconductor component processing system according to claim 1 , wherein the overhead gantry feeder robot has two independent degrees of freedom.

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