TWI405290B - Reduced capacity carrier, transport, load port, buffer system - Google Patents

Abstract

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

Description

Reduced loader, conveyor, loader and buffer system

Embodiments of the present invention are directed to substrate processing systems and, more particularly, to substrate transport systems, loaders, machine tool interface conveyors, and their equipment.

The main pressure for manufacturing electronic devices is the demand from consumers for electronic devices that are more functional and smaller and less expensive. This major power creates the original pressure on manufacturers for miniaturization and improved manufacturing efficiency. Manufacturers will then seek revenue in all aspects. In the case of a semiconductor device, a conventional manufacturing facility, or FAB, is provided with discrete processing tools, such as cluster tools, in its body (or basic organizational structure) for performing one or more processing operations on the semiconductor substrate. The conventional FAB is then placed around the processing tool to convert the semiconductor substrate into the desired electronic device. For example, processing tools can be processed in a bay-like arrangement in a traditional FAB. The substrate between the tools can be supported by a loader such as an SMF or FOUP to maintain the substrate in process substantially similar to that in the tool. The tool-to-tool relationship is provided by a handling system (such as an automated material handling system, AMHS) that transports the substrate loader to the intended processing tool in the FAB. As an example, the interface between the operating system and the processing tool can be roughly divided into two parts, that is, a loading station between the handling system and the tool for loading and unloading the loader to the processing tool, and a connection loader (ie, individual or group). Group) to the tool for loading and unloading the substrate between the loader and the tool. A variety of custom interface systems connect processing tools to loaders and to material handling systems. Many conventional interface systems result in one or more processing tool interfaces due to complexity, loader interface or material handling system interface with increased cost or lack of efficiency in loading and unloading substrates in processing tools. The embodiments of the present invention, which are described in detail below, will overcome the problems of conventional systems.

Industrial trends indicate that future IC device designs are approximately 45 nm or less. In order to increase efficiency and reduce manufacturing costs, IC devices of this size must be fabricated using larger semiconductor substrates or wafers. Conventional FABs typically operate on wafers of 200mm or 300mm. Industry trends indicate that FABs in the future must be sufficient to handle wafers larger than 300 mm, such as 450 mm wafers. It is important to know that using larger wafers will result in longer processing times per wafer. Therefore, when using larger wafers such as wafers of 300 mm or larger, it is preferable to use a smaller batch size for wafer processing to reduce the processing workload (WIP) in the FAB. At the same time, the smaller wafer batch size can be applied to special batch processing of wafers of any size, or to planar boards such as flat panel displays or any other substrate. While reducing WIP and efficient special batch processing are facilitated by its use, the use of smaller processing lots in the FAB has a negative impact on traditional FAB productivity. For example, smaller batch sizes increase the delivery system load of a particular capacity delivery system (transport wafer batch) compared to larger batch sizes. As shown in Figure 51A. Figure 51A shows the relationship between the batch size and the delivery rate (expressed as the amount of movement per hour) for several different process rates (represented by wafer start amount in a predetermined period such as monthly, such as WSPM). Figure 51A also shows the lines of the highest capacity of a conventional FAB operating system (e.g., about 6000-7000 movements per hour). Therefore, the intersection of the system capacity line and the FAB rate curve can be used to identify the surface of the effective batch size. For example, a particular conventional delivery system achieves a FAB rate of approximately 24,000 WSPM with a minimum batch size of approximately 15 wafers. Using a smaller wafer batch will result in a lower FAB rate. It is therefore desirable to provide a system in which the wafer loader, the interface between the loader and the processing tool, the loader transport system (the tool that transports the loader in the FAB, the storage location, etc.) is available for use. A minimum of one and a maximum expected wafer size will not adversely affect the FAB rate.

The invention provides a semiconductor workpiece processing system. The system is provided with at least one processing device for processing the workpiece, a primary delivery system, a primary delivery system, and one or more interfaces between the first delivery system and the second delivery system. The main conveying system and the secondary conveying system described above each have at least one substantially constant speed conveying zone, and are in communication with the constant velocity zone in the arrangement zone.

The above and other features of the present invention will become more apparent from the following detailed description.

Referring to Figure 1, the work loader 200 forms a compartment 202 for loading the work piece S into an environment that is isolated from the atmosphere outside the cabin. The shape of the loader 200 shown in Fig. 1 is illustrated by way of example only, and the loader in the modified aspect may have any other desired shape. The loader 200 can house a cassette 210 within the cabin to support the workpiece S within the loader as shown. The cassette 210 generally has an elongate support 210S (two are shown as an example in the embodiment) having a workpiece support frame distributed thereon to provide a row or stack of supports or brackets, as illustrated for individually supporting one or Multiple work pieces. The cassette is mounted or attached to the loader structure, as will be described in more detail below. In a variant, the loader may not be provided with a cassette, and the workpiece support is integrally formed or in a unitary configuration with the loader structure. The workpiece is shown as a flat/substrate component, such as a 300 mm, 200 mm or any desired size and shape of semiconductor wafer, or a raster/reticle or flat screen for display or any other suitable item. The loader can be made smaller or smaller than conventional (13 or 25) wafer loaders. The loader can be used to load a small number or even a single work piece, or can be made for less than ten work pieces. A suitable example of a capacity reduction loader similar to that of the loader 200 is described in U.S. Patent Application Serial No. 11/207,231, the entire disclosure of which is incorporated herein by reference. As a reference in this case. A suitable example of a capacity reduction loader similar to the loader 200 for processing tools (eg, semiconductor manufacturing tools, storage, positioners, etc.) and interfaces for transporting the system is described in 8/23/05. U.S. Patent Application Serial No. 11/210,918, the <RTI ID=0.0>>""""" As a reference in this case. Another suitable example of a loader similar to the loader 200 is described in U.S. Patent Application Serial No. 10/697,528, the entire disclosure of which is incorporated herein by reference. It can be seen that a loader similar to the capacity reduction of the loader 200 can provide a reduction in the workload of the FAB processing, because the formation of a smaller work piece will be immediately transferred to the FAB after completion of processing of the specific workstation. Instead of waiting for other work pieces to be processed as if they were larger. While the features in the embodiments are particularly illustrated for a small capacity loader, the features of embodiments of the present invention are equally applicable to any other suitable loader, such as a cover 13 or 25 or any other predetermined number of work pieces. The loader inside it.

Referring again to Figure 1, the loader 200 of the embodiment can function to maintain the workpiece in a vertical (i.e., Z-axis) stacked shape. The loader 200 may be a loader that has a bottom or top opening or a bottom surface that is open to the top. In this embodiment, the top and bottom surfaces are disposed along a vertical or Z-axis, and in the modified aspect, the top and bottom surfaces can be oriented along any other axis. The top and bottom openings, which will be described in more detail below, represent the opening 204 of the loader (which is set by the loader for the workpiece S to move in and out of the cabin) to be substantially aligned with the planar surface of the workpiece held by the loader. In the embodiment, it is substantially diagonal to the Z axis). Loader 200 is also shown below; typically a shroud 212 having a bottom and a switchable or removable door. When closed, the door is locked and sealed to the bottom. The seal between the door and the bottom allows the compartment 202 to be isolated from the outside enclosure. The isolated compartment 202 can maintain any desired isolation enclosure, such as inert gas, or can maintain a vacuum. The door can be opened for loading and unloading the work piece from the loader. In this embodiment, the door system represents a work piece/workpiece support frame that is detachable or removable when the loader is opened to enter therein. In the embodiment shown in Fig. 1, the cover box 200 generally has a hollow portion (hereinafter referred to as a casing) 214 for receiving the work piece therein, and a wall portion (cap/cover, etc.) 216. As will be described in more detail below, the wall portion 216 or outer casing 214 can function as a loader door. The wall is mated with the outer casing to close the loader and separate to open the loader. In an embodiment, the outer casing and the wall are metal such as aluminum alloy or stainless steel made by any suitable procedure. The wall or outer casing or both may be formed as a one-piece member (single construction). In a variation, the loader housing is made of any other suitable material, including a suitable non-metallic material. The cassette 210 can be mounted to the wall 216, and the cassette can be mounted to the housing in a modified manner. The cassette can be optionally mounted to the housing or door for easy removal of the cassette or substrate in the loader when the door is opened. Although the wall portion 216 in the illustrated embodiment is attached to the top side of the outer casing, in a modified aspect, the load hood can have a configuration with an outer top side and a wall portion at the bottom side. In yet another embodiment, the outer casing has a detachable wall portion (i.e., a loader having a top surface and a bottom surface opening) on the top side and the bottom side. In other variations, the detachable wall is attached to the side of the loader. The door in the embodiment is a passive component (e.g., there are substantially no moving parts or components that can be opened between the door and the loader and between the door and the tool interface, as will be detailed below).

Referring to Figure 2A, the loader 200 is shown positioned at the tool interface 2010 of a suitable processing tool. The processing tool is any desired type, such as a sequencer, stacker, or a tool that can perform one or more processing operations, such as material deposition, lithography, reticle, etching, polishing, measuring, or having one or more A tool such as a processing module or a chamber for loading a lock. At least some of the processing tool has a controlled atmosphere, and the tool interface 2010 provides for loading and unloading of the work piece between the tool and the loader 200 without imposing a controlled atmosphere in the tool or loader 200. In an embodiment, the 埠 interface 2010 generally has a cornice or opening 2012 through which the substrate can be loaded into the processing tool and provided with a door, cover or removal component 2014 to close the cornice. The removable component in the modified aspect can partially obscure the opening. The Tuen Mun 2014 in Figure 2A is shown in the closed and open states for illustration. In the embodiment shown in Fig. 2A, the loader 200 is loaded on the bottom side (i.e., moved in the Z direction) to be coupled to the tool set described below. Figure 2A shows the top side wall portion 216 as the door to the loader 200. For example, the wall portion 216 can be attached to the cardia and disassembled in conjunction with the removal of the cardia, such as into the tool to open the tool's interface. Removal of the wall 216 will result in the removal of the cassette (installed thereon) and the work piece (for access by the workpiece transport/automatic handling device) from the loader. Referring again to Figure 1, the configuration of the cassette 210 having the opposing support 210S provides access surfaces 210A, 210B (on both sides in the embodiment) of the cassette over one side for automatic workpiece handling (see also Figure 2A) The work piece can be attached to and detached from the cassette holder. The loader in the modified aspect has any desired number of work piece aggressive zones. The progressive zone is configured to be symmetric about the periphery of the loader or set to an asymmetric configuration. In the embodiment shown in Fig. 2A, the tool has more than one work piece handling automatic manipulators 2016A, 2016B to advance the work piece V, such as in more than one access zone 210A, 210B. In the modified aspect, the tool can have more or fewer work pieces to deliver the automatic manipulator. The multi-faceted automatic manipulator of the cassette is adapted to transfer the workpiece between the automatic controls of the cassette. In addition, the multi-faceted robotic access device of the cassette can relieve the loader from being restricted during transport or connection to the tool magazine. The loader can be closed when the card returns to its closed position, causing the loader wall 216 to revert to mating with the outer casing 214.

Referring to Figure 2B, an interface between the loader 200 of another embodiment and the tool interface is shown. In this embodiment, the outer casing 214 of the loader acts as a door. The tool of the illustrated embodiment has a shape that substantially matches the loader housing to enclose the outer casing to prevent contamination of the interior of the tool from the outside of the outer casing. The loader can be made to be loaded by the top surface (i.e., moved down the (-)Z direction), such as when the loader is descending from the overhead conveyor system. When the loader 200 is opened, the card is moved downward ((-)Z direction), for example into the interior of the tool, while the outer casing 214 is removed from the loader. This refers to the bottom opening of the loader where the loader door (i.e., outer casing 214) is attached to the bottom and is opened by the downward movement of the loader. The opening of the loader will reveal the work piece in the cassette and remain in the wall 216. In this embodiment, the robotic device will be provided with a degree of freedom of the Z-axis to advance the vertically aligned cassette holder or the workpiece therein. A coupler is provided on the automatic manipulator. In a variant, the outer casing 216 has an integrally formed counterpart, such as a beam-transparent pairer, for mating the cassette when the housing is removed. 2A-2B shows that the loader 200 can be a top opening and a bottom opening. In another variation, the outer casing and the wall are reversed in orientation (the outer casing is on the top side of the wall), and the top opening of the loader system is similar to the second embodiment but is a mirror image (ie, the housing is lifted up) and the bottom opening is similar to the second. The figure is opposite (ie lowering the wall down).

Referring again to Figure 1, as previously discussed, the wall portion 216 and the outer casing 214 are of a passive construction and are not provided with moving elements such as stop locks which, when moved, may contaminate the clean space of the tool or container. For example, the wall and the outer casing may be magnetically locked to each other. The magnetic lock can have permanent or electromagnetic elements 226, 228, or a combination thereof, disposed on wall portion 216 or outer casing 214 as needed to lock and unlock the wall and outer casing. The magnetic lock can have a reverse magnetic element that can be switched (ie, turned on or off) when current is passed through. For example, wall portion 216 can include a magnetic element 228 (eg, a ferrous material) and housing 214 can have a magnetic switching element 226 that can be activated to lock and unlock the wall and housing. In the embodiment shown in Figures 2A and 2B, the magnetic elements of the wall and the operative magnet of the housing are designed to cooperate with the magnetic locks 2028', 2026' of the Tuen Mun interface 2010, 2010'. The loader door (wall or casing, see Figure 2A-2B) is locked to the door causing the loader door to unlock from the rest of the loader. In a variant, the magnetic lock between the wall and the outer casing can have any other desired configuration. The loader in the embodiment illustrated in Figure 23 can include a mechanical coupling element 230, such as a pivot pin, a piezoelectric coupler device or a shape memory device to mate the mating coupling feature 2030 to the cardiac interface and to load the loader Locked to the Tuen Mun interface. The device in the embodiment is disposed on the wall, and the device in the modified aspect is locked to the outer casing. As can be seen from Fig. 24, the pivoting device encloses the sealing interface between the removable wall portion and the cardia to trap potential particles generated by the operation of the device itself. Passive loaders and loader doors provide vacuum-compatible clean and washable loaders.

As previously mentioned, the loader door is sealed to the bottom (i.e., wall portion 216 and outer casing 224) to isolate the loader compartment. In addition, when the loader is coupled to the tool magazine (e.g., loading the cassette module), the loader door and the bottom each have a sealing interface to respectively respectively load the loader door (i.e., the wall portion 216 or the outer casing 214 in Fig. 1). The door and the bottom of the loader are sealed to the mouth. In addition, the cardia and the mouth have a sealed interface.

Figures 3A-3C show a loader 220' similar to loader 220, which is coupled to tool TP TP according to an embodiment, wherein the sealing interface (221 'loader door and loader, 222' loader and mouthpiece) , 223's Tuen Mun and Mouth and 224's door and loader door) form an X-shaped structure (see Figure 3B for details). In the illustrated embodiment, the loader sealing interface is shown in the top opening as an example, while in a modified aspect there is a loader with multiple openings (like the opening 204 shown in Figure 1) (eg top and bottom) The sealing interface of the person is provided at each opening. It can be seen that the general X-shaped configuration is only a schematic representation of the surface of the sealing interface, and the sealing interface surface in the modified aspect can have any suitable configuration, for example, the sealing interface surface can be curved. The generally X-shaped sealing formation forms a plurality of sealing interfaces (e.g., 221'-222') with a cut-off volume between the interfaces of substantially zero (0). Thus the opening of any sealing interface will not result in the release of contaminants into the open space of the opening of the sealing interface. Moreover, the seals in other variations have any predetermined orientation (e.g., the orientation of the sealing interface is generally in the form of a + or horizontal arrangement). In the embodiment, the loader 200' is shown with a top opening (the wall 216 is the door that lifts up to open), and the 埠TP is used as the bottom loading (the lifter lifts the loader up to the tool of the platform) as Example description. The outer casing 214' of this embodiment has a sealing interface 214I' which is generally a beveled sealing surface 221C', 222C'. Although the sealing faces 222C', 221C' on the illustrated outer casing are generally flat, the sealing faces in the modified aspect may have an angle or other shape formed thereon to enhance the sealing effect, and the surface is generally inclined The corners form a substantially X-shaped sealing configuration. The wall portion 216' of the loader of the present embodiment has a sealing interface 216I' arrangement (as shown in the embodiment of Figure 3A) that is generally chamfered to form sealing faces 221CD' and 224CD'. As shown in Fig. 3A, the opposing outer and wall sealing faces 221C', 221CD' are substantially complementary to form a sealing interface 221' when the wall and outer casing are closed. The beveled surface 221C' on the loader interface 214' is generally wedge shaped to provide guidance for the wall portion 216' when seated on the outer casing (see Figure 3C). Moreover, the positioning of the loader door and loader sealing interface 221' in the embodiment allows the weight of the wall portion 216' to increase the sealing pressure to the interface. From this, it is understood that the cassette and the workpiece in the present embodiment are supported by the wall portion 216' and the loader door is sealed with the loader. As can be seen from Figures 3A-3B, the sealing faces 222C' and 224CD' are disposed to cooperate with the sealing faces 222P', 224PD' on the 埠P and the haptics PD. Fig. 3B shows that the loader 200' is seated on the cornice and the sealing portions 222', 224' are closed. When the seals 222', 224' are sealed, all external interfaces (i.e., control outer surfaces or isolated compartments on the inside of the loader or tool) will be isolated from potential contamination of the inner/tool and loader compartments. As can be seen in Figure 3B, the generally X-shaped seal portion 220' provides optimum cleanliness as it will form a substantially zero loss volume interface. This means that when the loader door or the door is opened, the sealing shape of the sealing portion 220' does not create a space for the exposed outer side surface (i.e., becomes the inner side surface). As can be seen from Figure 3C, the removal of the loader will not result in any pre-seal/outer side exposure to the inside of the loader/machining tool when the door is removed.

As seen in Fig. 3C, the top opening of the loader door in this embodiment will result in the loader compartment 202' being located in the raised cassette supported by the wall portion 216' in this embodiment. The loader compartment 202' is in communication with the inside of the tool and a mandatory air circulation system (not shown) can be provided, resulting in a flow of tubes in the loader compartment. In this embodiment, the circulating air flow in the loading cabin is located below the working piece of the lifting cassette (suspended from the wall portion 216'), and the deposition of particles due to cyclic interference (deposited from the workpiece) Sex is the lowest. In the embodiment illustrated in Figures 3A-3C, the loader 200' is raised by a suitable lifting device LD to connect and berth in the cornice 2220. A suitable recording device LDR is provided on the loader and the lifting device to position the loader on the device and to position the loader relative to the cornice. In a variant, the loader is supported in the mouth in any suitable manner. The loader door 216' can be locked to the cardia 2214 by a magnetic lock, a mechanical interlock (e.g., a sealing interface disposed between the tips), or a vacuum suction generated in a sealing interface between the tips. The trick 2214 can be turned on/off by an appropriate device capable of indexing a cassette (similar to the cassette 210 of FIG. 1) through an intended pairing sensor (not shown).

Referring to another embodiment of the loader 300 shown in FIG. 4, the loader 300 is similar to the loader 200 but is reversed and the outer casing 314 is located on top of the wall portion 316. Similar to the loader 200, the loader 300 is a top opening (the outer casing acts as a door) or a bottom opening (the wall portion acts as a door). The loader 300 shown in this embodiment has an integrally formed transport assembly 300M. For example, the loader housing (or wall) 314, 316 has a transport motion support, such as a roller or air bearing and reaction member, which can be activated by a drive or motor to allow the loader to self-deliver within the FAB (ie, without the need for independent use) Conveyor). Fig. 4 shows a loader 300 provided on the loading cassette 3010 (substantially similar to the aforementioned cassette 2010) as an example. In the illustrated embodiment, the loader 300 is top mounted on the jaw interface. The loader door 316 is disposed opposite or adjacent (forming the interface) to the cardia 3014, and the outer casing 314 can form an interface with the file 3012. Loader 300 also has a three-way, four-way or five-way "handover" type (or zero loss volume) seal similar to the X-shaped seal 220' shown in Figure 3B. Figure 4A shows a cross-sectional view of a seal portion 320 of one embodiment. The seal portion 320 in the embodiment is a four-way seal portion of a bottom open configuration, substantially similar to the seal portion 220'.

Fig. 4B is a cross-sectional view showing the interface between the loader and the mouth of the seal portion of the other embodiment, and the seal portion therebetween. In this embodiment, the sealing portion 320' is substantially similar to the sealing portion 320. Figure 4B additionally shows that the housing interface 314I' is provided with support flanges/portions 326', 328'. The flange 326' in this embodiment can operate the wall portion 316', for example, the flange can partially overlap one of the loader doors (although the components of the illustrated embodiment form a door contact surface, and in a modified manner The assembly is in contact with the door) and the magnetic lock 326M' can be positioned to secure the wall portion 316' to the outer casing 314' when the loader door is closed. Additionally, the portion 326' can overlap the magnetic lock 3040' in the cardia 3014. The magnetic lock of the card is used to lock the wall portion 316' to the cardia 3014' to provide loader door removal. The position of the loader housing portion 326' activates the door lock 3040' (to lock the wall portion 316' to the cardia) such that the wall portion 316' is unlocked/closed substantially simultaneously with the lock of the outer casing 314'. Conversely, when the cardia 3014' is closed, unlocking/locking of the cardia lock 3040' can cause the magnetic latch 326M' between the wall portion 316' and the outer casing 314' to lock. The outer casing side portion 328' of the embodiment can engage the positioning/centering portion 3012C' of the tongue 3010' for positioning during loader configuration. The shape of the outer side portion 328' shown in Fig. 4B is illustrated by way of example only, and the loader in the variant may have any desired location. As previously mentioned, the X-shaped configuration of the seal portion 320' eliminates the need to clean the sealing interface in front of the loader door since the purge volume of the seal interface is substantially zero. In an embodiment of the modified aspect (e.g., as shown in Figure 4B), the cornice has a purge line 3010A. Purification line 3010A is any type of sealing interface or interposed therebetween. Figure 4C shows another section of the loader tool interface of another embodiment. The loader of the jaw interface has a seal portion 320" similar to the seal portion 320 described above. In this embodiment, the loader housing 314" has a support portion 328" to provide the loader 300" to sit on the cornice without causing a trick. The PD is loaded on the loader door (wall portion 316") (ie, the loader 300" is supported on the cornice without distributing the loader weight to the cardia. The sealing contact of the door with the loader door seal 321" is substantially fixed during the loader door switch.

Figures 5A-5C show a combination of loader 300A similar to loader 300 with a tool of another embodiment. The loader 300A of the present embodiment is a top opening and a bottom loading type (in the direction indicated by an arrow + z in Fig. 5A). The loader housing 316A acts as a loader door. The sealing interface 320A as shown in Fig. 5B is a so-called three-way seal (approximately zero purge line or loss volume, similar to the aforementioned sealing portions 320, 220), having a substantially Y-shaped configuration (interface 321A wall to shell) The interface 322A wall is opposite the mouth, the interface 323A is the mouth 3012A and the door is 3014A). In this embodiment, the cardia 3014A is identical to the outer casing 316A. For example, the outer casing 316A can be disposed within the cardia 3014A. The matching and fitting of the outer casing 316A with the cardia 3014A in the embodiment will minimize the volume between the interfaces). A seal (not shown) may be provided between the outer casing 316A and the cardia to seal the interface therebetween. As shown in Fig. 5B, the trick 3014A in this embodiment has a vacuum of 3010V to purify the door to the loader door volume.

Referring again to another configuration of the loader and the 埠 interface shown in Figures 2A-2B. The interfaces 220, 220' are generally similar to the embodiments shown in Figures 2A, 2B (bottom loading/top opening, top loading/bottom opening, respectively). The sealing interface 220, 220' is a four-way sealing portion having a substantially "cross" or X-shaped configuration (the interface 221 wall portion 216 is opposite the outer casing 214, the interface 222 is facing the outer casing 214, and the interface 223 is opening the door to the door. 2014 and interface 224 door to wall 216). As shown in FIG. 2A, the sealing interfaces 222, 224 in this embodiment are positioned (eg, perpendicular) substantially parallel to the direction of relative movement of the interface surface (such as when the loader is loaded and when the cardia is closed). In other words, movement of the loader or loader door to the closed position will not result in a sealed closure. One or more of the surfaces forming the sealing interfaces 222, 224 in this embodiment may be provided with an activation seal such as an expansion seal, a piezoelectric actuator seal or a shape memory member, whereby the frictional contact without the sealing interface is required. Start the seal and close the seal interface. The sealed construction is described by way of example only.

Referring to Figure 1, the loader housing 214 has an outer support 240 for handling the loader. The illustrated support 240 is such as a handle, but can be made in other suitable forms. The supports 240 in the embodiment are attached to opposite sides of the outer casing and are isolated as much as possible to optimize the stability of the loader. More or less support can be provided in the variant. Referring to Figure 6A, the loader housing 220A is provided with an aperture or groove member, sheet or filter 260A near the bottom of the housing. The size and shape of the orifice or groove of the member is designed to slow or reduce the strength of the tube or vortex caused by the loader door opening. The vessel flow or vortex mitigation element in the modified aspect may be located at any other suitable location in the loader. The illustrated housing of the loader 200A is shown at the bottom only as an example, while the loader in the modified aspect is attached to the top. Additional flow enhancement spaces and/or conduits (not shown) may be provided within the tool to help maintain substantially smooth/laminar flow of the work piece in the tool. Figure 6B shows a loader 200B of another embodiment. The loader 200B has a thermostat 250 to maintain the work piece in the cabin at a temperature different from normal temperature. For example, the loader housing or wall portions 214, 216 have thermoelectric modules that are thermally coupled to the workpiece by, for example, a cassette support to heat/warn the temperature of the workpiece to above normal temperature. The workpiece temperature higher than normal temperature will drive away the particles and water molecules on the workpiece by thermofuoresis, preventing the workpiece from being contaminated when it leaves the loader. In other variations, any other desired thermostat such as microwave energy may be employed. In another variation, an electrostatic field can be created around each workpiece to repel water molecules and particulate contamination.

Referring to Figures 1A-1B, the cassette 210 (also referred to in Figure 1) of the embodiment has a nested stent 210V to provide a 360 degree forward limit of the workpiece supported by the stent. Each bracket 210V can be comprised of one or more housing seats or supports 210C). As shown in Fig. 1A, the arrangement of the cassette support 210S allows the workpiece to be supported to obtain a straddle mount. Each of the brackets 210V has a lifting surface to provide a restricted perimeter for the workpiece S on the mounting bracket. The lifting surface may also be beveled (relative to the vertical plane) to form a positioning guide 210L for the seating member S. The seating surface of the outer casing 210V is at an oblique angle (with respect to the bottom surface of the workpiece, such as at an oblique angle of 1° with respect to the bottom surface of the workpiece to ensure contact with the bottom surface of the workpiece, such as in the peripheral outer zone. The work piece housing in the aspect can have any suitable configuration to form a passive work piece limit. In another variation, the outer case is not provided with a passive work piece limiter.

Referring to Figures 7A-7B, a loader 200C of another embodiment similar to the loader 200 illustrated in Figure 1 is shown in a closed and open state, respectively. The cassette 210B in this embodiment has a varying height. When the loader 200B is closed, the cassette 210B has the lowest height, and when the loader door (wall portion 216B) is opened, the cassette can be expanded to the highest height. When the cassette is extended from the lowest to the highest height, the bevel angle between the workpiece/stent of the cassette will increase to provide the lowest loader height, providing maximum space between the workpieces when entering and exiting. In the present embodiment, the cassette support 210SB has a bellows type configuration. The support is made of aluminum foil or any other suitable material that provides sufficient flexibility without joint engagement (e.g., shape memory material). As shown, the cassette support is supported at the top by the loader wall portion 216B. The top opening of the loader (such as the removal of the wall portion 216B in Figure 7B) or the bottom opening (like the removal of the outer casing 214B shown in Figure 2B) will cause the cassette (windbox) support 210SB to expand under the force of gravity. The cassette bellows can be compressed by closing the loader door. As shown in Fig. 7C, the bellows 210SB has a workpiece support 210VB for placing a work piece. The workpiece support 210VB in the embodiment is formed in the shape of the joint portion 210PB corresponding to the bellows, and maintains a substantially fixed radial position when the bellows expands/folds (so that the work piece and the work piece support are prevented from being Relative radial movement). It can be seen that the bellows cassette can be folded so that the work piece in the cassette is effectively clamped between the adjacent folds of the bellows. It can be seen from this that the upper clamping portion only contacts the periphery of the workpiece. As shown in Fig. 7B, one of the tool or loader in the embodiment, the beam coupler 2060B or other suitable means can be used to determine the position of the workpiece S when the cassette is expanded. The workpiece automatic control device (not shown) is also provided with an inductor for detecting the proximity of the workpiece to ensure proper positioning of the workpiece.

As previously mentioned, loaders with passive loader doors and seals are suitable for direct interface with vacuum chambers such as load locks. Figure 8 shows a loader 200' that will be directly paired with the top interface 4010 of the vacuum chamber (shown as load lock) 400 of another embodiment. The loader 200' shown in Fig. 8 is substantially similar to the aforementioned loaders 200, 300. The load lock in the embodiment has a positioner 410 that can be used to open/close the door 4014, thereby opening/closing the loader door (the top wall portion 216' in this embodiment) and the raising/lowering cassette 210'. In the present embodiment, the positioner 410 is designed to provide a low or minimum Z-height of the load lock compartment. For example, the positioner 410 is disposed on the outer side of the load lock compartment 400C and arranged along the load lock compartment to reduce the height of the cabin and the load lock. In the embodiment, the positioner 410 has a driving portion 412 and a coupling portion 414. The drive portion 412 shown in the embodiment has a motor drive system with a motor drive belt or bolt drive to raise/lower the shuttle 416. The coupling portion 414 in this embodiment is a magnetic coupling that couples the shuttle 416 on the drive portion to the cardia 4014. The trick has a magnet (permanent or electromagnetic) or a magnetic material disposed thereon to form the interior 414I of the magnetic coupler. The magnetic portion 414I of the door can also lock the card to the door frame 4012. For example, the door frame 4012 can have a suitable magnet (similar to the magnet 2028' shown in FIG. 2B) to accommodate the operation of the magnetic portion/magnet 414I on the card door and the door when the door is in the closed state. Locked with the cornice. In an embodiment, the magnetic lock element in the door frame can cooperate with the magnetic coupling 414I on the door 4014. In a variant, the magnetic coupling between the door and the drive, and the magnetic lock between the door and the door frame can have any suitable configuration. As shown in Fig. 8, the cabin wall portion 400W isolates the drive portion 412 from the interior of the cabin 400C. In a modified version (see also Figures 18-19), the drive portion 412' is a linear motor (e.g., a linear drainage motor, LIM) that operates on the reaction portion 414I' of the cardia 4014' to initiate movement of the cardia. The LIM may also be disposed outside the cabin wall and isolated from the interior of the cabin. In the embodiment illustrated in Figures 18-19, the drive portion can include a magnetic material portion 4122', or the permanent magnet forms a safety lock to maintain the cardiac door 4014' in an open state when the cabin electrical supply fails. In a variant, a suitable accumulator can be connected to the drive for intended control to lower the trick to a closed state. As can be seen from Figures 8 and 18-19, the seal between the cardia and the ankle frame is provided in the embodiment such that the weight of the door helps to seal the interface.

As can be seen from the embodiment shown in Fig. 8, the magnetically coupled counterpart 414I can also interlock the latch 4014 with the loader door 216'. For example, the loader door may be provided with a suitable magnet (eg, a permanent magnet) or a magnetic material 228' that, when activated, cooperates with the coupling portion 414I (eg, including a magnet or a magnet having a variability electric field) to cooperate The port and the loader door are locked to each other. The cardia movement in this embodiment is guided by an introducer that is isolated from the cabin. For example, in the illustrated embodiment, the bellows 400B is used to connect the cardia to the cabin wall and to isolate the cardia travel guide 4006 from the cabin. The introducer in this embodiment is generally a telescopic component. The telescopic introducer shown is made of a hollow cylindrical telescoping tube and may have any suitable configuration in a modified form. In another variation, the positioner can also have any other contemplated configuration. For example, a suitable locating motor can be placed in the wall of the cabin, but is isolated from the interior of the cabin, as described in U.S. Patent Application Serial No. 10/624,987, the entire disclosure of which is incorporated herein by reference. The mechanical guidance of the cardia initiates the controlled movement of the cardia. Pressure on the bellows can help the door close. The bellows 400B can also be used to surround a control system such as a vacuum line, and a power/signal line connected to the door. The trick in this embodiment has a weir PD10 connected to a vacuum source to form a chamber pump jaw, as will be described in more detail below.

Figure 9 shows a loader 300' of another embodiment disposed on a vacuum chamber 400'. As shown in the embodiment, the loader 300' is a bottom open loader (similar to the loader 300 shown in Fig. 3). In this embodiment, the cardia 4014' is lowered to the compartment when it is opened. The positioner (not shown) is similar to that shown in Figures 8 and 18-19, but is used to move the card down. The compartments and shackles have magnetic locks 4028' that are used to lock the closed door to the cabin frame. The door frame of the embodiment has one or more coil elements 4028' formed as shown on the side of the door frame of the magnetic lock. Coil element 4028' can be positioned and create a magnetic field of operable door lock assembly 4026'. The magnetic lock assembly 4026' on the door is a permanent magnet or magnetic material. The coil element 4028' in the embodiment is disposed in the cabin as an example. The coil component in the modified aspect is disposed on the outer side. The wall of the cabin is isolated from the interior of the cabin. The coil elements are fixed or static with respect to the door frame. The magnetic field strength can be reduced when it is expected to reduce the magnetic force of the magnetic lock and to easily move the door. The coil component of the modified aspect is movable, such as a shuttle mounted to the drive system and a magnetic coupling between the stern and the positioner. In a variant, the magnetic lock is similar to the aforementioned locking of the loader door to the loader. A permanent magnet or magnetic material disposed on the door 4014' that activates the magnetic lock to the door frame may also provide a coupling to the positioner, similar to that shown in FIG. The cabin of this embodiment shown in Fig. 9 also has a bellows and a door guide similar to those shown in Fig. 8. The bellows can be pressurized to help raise the shackle and remain closed, especially when the loader door and cassette are seated on the shackle. In a variant, the cabin has a bellows without a door guide. Connect the vacuum to the door to activate the chamber pump through the door and loader door interface. Therefore, in the embodiment shown in Fig. 8, the cabin pumping system is provided at the cardia.

Referring again to Fig. 8, in an embodiment, a load lock chamber pump can be utilized, such as a loader coupled to the cabin raft, and the slamming door is moved from the closed position by the positioner 410. As can be seen from Fig. 8, in the embodiment, the loading operation of the loading lock chamber through the vacuum port PD10 of the door is through the interface of the loader door 216' to the card door 4014. The suction flow of the chamber/loader gas through the loader door to the door interface will create a negative pressure at the interface to prevent contaminants from entering the chamber. Figure 10 shows another embodiment of the loading lock chamber extraction operation through the door 5014. In this embodiment, the door to loader door space 5430 and the loading operation of the loader compartment 202 may be performed prior to the loading lock chamber extraction. For example, vacuum can be applied and the valve can be cracked to the helium seal 5223 (or with a suitable valve) to introduce purge gas into the space 5430. The loader door 216 is cracked for loading the lock chamber 5400 gas into the loader, or the loader 200 can be cleaned by means of a suitable valve. For example, a gas supply originating from the cabin (as indicated by the dashed line in Figure 10) may be provided to the loader to introduce the desired gas sample into the loader 200. As shown in Fig. 10A, the loader compartment 200 and the load lock compartment 5400, which are loaded with the lock compartment 5400 and the loader door, are shown having a through hole (or gas sample supply) 5440 disposed as desired in the load lock wall portion. Thus, the purge line in the embodiment is used for purification, and the exhaust of the cabin can be performed independently without being affected by the loader door to the door interface.

Figure 11 shows an embodiment of the loader door 316A and the door 6414 having a relative mechanical "fail-safe" lock for locking the loader door to the loader 3140 and locking the card to the cornice 6412 or compartment 6400D. Loader 314D, loader door 316D, 埠6412 and 646414 are passive (no joint lock). In this embodiment, the positioner can be used for both Z-axis adjustment of the cardia and for rotating the cardia (eg, along the Z-axis) to engage/disengage the locking tabs to the slamming door and the loader door. In the modified aspect, the Z-axis movement and rotation of the door can be provided by different drive shafts. Figures 12A-12B show bottom views of loader housing 314D and loader door 316D, respectively. Figures 13A-13B show top views of the mouth 6412 of the (load lock) compartment 6400 and the cardia 6414, respectively. The bottom surface of the loader housing of the embodiment has a tab/surface 360D that is joined to the loader door 316D by a joint surface 362D. It can be seen that the engagement/disengagement between the joint faces 360D, 362D can be initiated by the rotation of the loader relative to the loader 314D. The rotation of the loader door is provided by the Tuen Mun 6414, as will be described in more detail below. The joint between the trick and the loader in the modified aspect can have any desired configuration. The loader door 316D has a female/protruding torque coupling location 365D to mate with the torque coupling member on the loader door 6414T. In the illustrated embodiment, the cornice 6412 and the flap 6414 have interlocking or mating faces that are substantially similar to the joints of the loader and the loader door. As shown in Figures 13A, 13B, the jaw has an engagement surface 6460 (e.g., inwardly projecting), while the cardia 6414 has a complementary engagement surface 6462 to overlap and engage the jaw surface 6460. It can be seen that the joint faces 3600, 3620 on the loader in the embodiment and the joint faces 6460, 6462 on the cornice are disposed opposite each other for loading and loading doors and mouth and the door during the rotation of the card. Simultaneous bonding/disengagement.

Figure 14 shows the load lock compartment 400E and the positioner 6410E and the loader 300E. The positioner in this embodiment is arranged axially in series with the load lock compartment. Similar to the compartments 200, 300, 3000, the compartment 300E of the embodiment shown in Fig. 4 has a vacuum compatible top or bottom open compartment similar to that previously described. Cabin 6400E is similar to the aforementioned cabin. Figure 15 shows a load lock compartment and loader 300C having a reduced draw volume configuration. In the illustrated embodiment, the loader door 316F has a top 350F and a bottom 321F door for the loader housing 314F seal. As shown in Fig. 15, when the loader door is closed, the bottom seal 3270F (like the seal portion 221) is engaged with the outer casing 314F. When the loader door is opened, the top seal 350C closes the loader housing (eg, the seal portion 350F is seated and sealed to the loader seat surface 351F). The top seal 350F isolates the loader compartment from the load lock compartment, thereby reducing the extraction volume when the extraction lock lock chamber is under vacuum.

Figures 16A-16B show loader 300G and load lock compartment 6400G, respectively, in the inbound and outbound states of another embodiment. The loader 300G has a bottom wall portion 316G, an annular portion 314G, and a top wall portion 314PD. The annular portion 314G or one or more portions in this embodiment operate as a loader door. The top wall portion and the bottom wall portion 316G, 314PD may be fixed together, and the moving portion 314G forming the door has a top and bottom seal 350G, respectively, for sealing the top wall portion and the bottom wall portion. The load compartment compartment 6400G has an opening 埠 6402G through which the loader 300G can be nested into the load lock compartment as shown in FIG. 16B. The load lock compartment 6400G has a recess 6470G to lower the loader door 314G to provide an access opening for the loader. The top wall portion 314PD of the loader seals the load lock chamber 埠, thereby sealing the load lock chamber and providing extraction of the chamber. A suitable lifter/positioner can be provided to raise/low loader door 314G. Figures 17-17C show another top seal loader 300H and load lock compartment 6400H of another embodiment. The loader 300H has a top sealing flange 314H and a side opening 304H (arranged along the loading and unloading load edge of the workpiece). The loader top sealing flange 314H of the embodiment is seated and sealed to the edge 6412H of the compartment 如 as shown in Fig. 17B. The loader door 314DR can be oriented radially outward and rotationally as indicated by arrow 0 of Figure 17C, with the loader opening aligned with the notch valve in the load lock compartment. Although the illustrated embodiment refers to a load lock compartment, the location is equally applicable to a load compartment such as that shown in FIG. The interior of the loading compartment has a controlled atmosphere but may not be isolated.

Referring to Figures 29A and 29B, there is shown a schematic plan view of an automated material handling system 10, 10' of another embodiment. The automated material handling system 10, 10' shown in Figures 29A and 29B generally has one or more compartment delivery system sections 15, one or more compartment conveyor system sections 20, and compartment compartments. 35, conveying the branch line or branching portion 25 and the workpiece loader or conveyor. The term compartment and compartment are used as convenience but are not intended to limit the configuration of the conveyor system 10110' (the term "inter" in the text generally refers to the portion extending through several groups, and the term "inner" is usually Refers to the part that extends within a group). The conveyor system sections 15, 20, 25, 35 can be nested together (i.e., one transport loop is in another transport loop) and arranged for supplies such as 200 mm wafers, 300 mm wafers, flat display screens, and the like. The semiconductor workpieces of the loader and/or its loader are transported at high speed into and out of the processing compartment 45 and associated processing tools 30 in the processing facility. In the variant, any suitable material can be transferred in the automated material handling system. The conveyor system 10 can also provide work pieces that are redirected from one transfer station to another. One of the embodiments of the automatic material handling system for transporting workpieces in the compartments and in the compartments of the compartments is described in U.S. Patent Application Serial No. 10/697,528, the entire disclosure of which is incorporated herein by reference. "Automated Material Handling System", which will be cited below as a reference for this case.

The automated material handling systems 10, 10' shown in Figures 29A and 29B are representative in construction, and the automated material handling systems 10, 10' can be placed in any suitable component to accommodate the processing compartments in the processing facility and/or Or any expected layout of the processing tool. As can be seen from Fig. 29A, the inter-chamber transport portion 15 can be disposed on either side and interconnected by any number of transport portions 20 corresponding to one or more processing bays 45. In the modified aspect, the outer side or side conveying portion is the inner portion of the compartment, and the traversing portion therebetween may connect the inner portion of the compartment to a group or arrangement of processing tools in the same compartment. The inter-vehicle transport portion 15 in the embodiment of Fig. 29A may also be connected by the transfer shunt 50 for the workpiece to be moved directly between the transport portions 15 in the compartment without passing through the processing or process compartment 45. In another modification, the transport unit 15 can be connected to each other by means of an additional compartment transport unit (not shown). In another variation, as shown in Fig. 29B, the inter-compartment transport portion 15 can be disposed between any number of processing bays 45, thereby forming between the bifurcated servo bay or tool set 45. Central Island or transport central road. In another variation, any number of nested loop portions, such as N-number systems (such as systems 10, 10' shown in Figures 29A and 29B) are connected in parallel by the transport portion, directly connecting the partitions. Inter-port transport unit 15. In another variation, the delivery portions 15, 20 and the processing tool can have any suitable configuration. Moreover, any number of compartment/compartment systems can be joined together in any suitable configuration to form a nested machining arrangement.

The compartment transport unit 15 is a modular track system that provides movement of any suitable work piece transport. Each of the track system modules may be provided with suitable mating means (e.g., interlocking cuts, mechanical fasteners, etc.) to provide the modules end to end when the transport portion 15 is installed in the compartment. The track module can be made of any suitable length, such as a few feet long, or in any suitable shape, such as a straight strip or curved shape, to provide for ease of installation and construction flexibility. The track system can support the transport of the work piece from the bottom or in a modified manner, the track system being a suspended track system. The track system can be provided with a roller bearing or any other suitable bearing surface to allow the workpiece to be transported along the track without the resistance of the roller. The roller support is in the shape of a truncated cone or the track is angled to the inside of the curve or corner to provide additional directional stability of the workpiece container as it moves over the track.

The transport unit 15 in the compartment is a belt conveyor system, a track and drum type or a chain belt and a star wheel conveyor system, a wheel drive system or a magnetically driven conveyor system. The motor used to drive the delivery system has any suitable linear motor that can move the workpiece container along the transport portion 15 within the compartment with an unrestricted stroke. The linear motor is a solid state motor without moving parts. For example, a linear motor is a rectified or non-rectified AC or DC motor, a linear pilot motor, or a linear stepper motor. The linear motor can be incorporated into the transport portion 15 of the compartment or into the workpiece transport or container of itself. In a variant, any suitable drive can be added to drive the work piece through the transport system in the compartment. In another variation, the in-cabin transport system is the path of the trackless guide wheel spontaneous conveyor.

As will be explained below, with the sorting portion and the shunt, the inter-chamber transport portion 15 can generally provide a non-interrupted high-speed movement or flow of the work piece along the path of the transport portion 15 in the compartment. This embodiment is preferred in comparison to conventional delivery systems that require material flow to be stopped when the delivery container is added or removed on the conveyor line.

As described above, the inter-vehicle transport unit 20 in the embodiment can form a process or process compartment 45 that can be coupled to the inter-bay transport unit 15 via the bay sorting unit 35. The compartment sorting portion 35 can be disposed on either side of the transport portion 20, 15 in the compartment or compartment, and provides a work piece or work piece container into/out of the transport portion 20 in the compartment without stopping or slowing down The material flow of the conveying portion 15 in the compartment or the material flow of the inter-compartment conveying portion 20. The sorting unit 35 in the embodiment is shown as a separate portion from the transport units 15, 20. The sorting path between the sorting unit or the conveying units 15, 20 in the modified aspect is united with the conveying unit, but a separate sorting conveying path is formed between the conveying units. The sorting section in the change pattern may be located in the compartment or in the compartment as needed. An example of a delivery system having a travel route and an aggressive or sorting route for selective access to switch the travel route without detracting from the travel route is described in the "Transport System" of U.S. Patent Application Serial No. 11/211,236, the following The Department cited the reference as a reference. The compartment transport unit 20 and the compartment sorting unit 35 are similar to those described above for the transport unit 15 in the compartment. In a variant, the sorting section of the transport section in the compartment and the transport section within the compartment and the compartment has any suitable configuration, shape or pattern and can be driven in any suitable manner. As can be seen from Fig. 29A, the compartment sorting unit 35 in the embodiment has an input unit 35A and an output unit 35B corresponding to the moving directions R1 and R2 in the compartment and the inter-compartment conveying units 15, 20. The conventional setting member 35A, which is exemplified herein, is an input (from the member 15) of the member 20 and a member 35B as an outlet/output of the member 20 (input of the member 15). The direction of travel of the sorting section in the altered aspect is achieved as needed. As will be described later in detail, the workpiece container can exit the compartment transport unit 15 through the input portion 35A and enter the inter-chamber transport portion 35B through the output portion 35B. The sorting portion 35 has any suitable length to provide entry and exit of the workpiece transporting in and out of the conveying portions 15, 20.

The inter-chamber transport portion 20 can extend within the passageway connecting any number of processing tools 30 to the transport systems 10, 10'. As shown in Fig. 29A and the foregoing, the inter-chamber transport unit 20 may also connect two or more inter-chamber transport units 15 to each other. The inter-chamber transport portion 20, as shown in Figures 29A and 29B, has a closed loop shape, however, it can have any suitable configuration or shape in a modified form and can be applied to any process facility layout. The inter-chamber transport portion 20 in the embodiment is connected to the processing tool 30 by a transfer branch or branch 25, similar to the sorting portion 35. In the variant, the shunt is placed in the compartment transport section in a similar manner. The branch 25 can effectively grip the workpiece transport "offline" and has a direction of travel R2 such as the input portion 25A and the output portion 25B corresponding to the inter-compartment transport portion 20, as shown in Fig. 29A. The branch 25 can be transported away from the workpiece and into the compartment transport section 20 via the input and output sections 25A, 25B without substantially interrupting the substantially fixed travel speed of the workpiece in the compartment transport section 20. In branch 25, the workpiece container can be stopped at a working interface station (not shown) corresponding to the processing tool station, such that the workpiece and/or the container itself is transferred into the processing tool, or by any suitable means. The transfer device enters any other suitable work piece stacking area, such as a device front end module, an aligner or any other suitable transfer automatic handling device. In a variant, the workpiece transport section is directed to a predetermined split to initiate reordering (recombination) of the conveyor on a particular conveyor.

The transfer or conversion of the workpiece loader between the various components 15, 20, 25, 35 can be controlled by a guidance system (not shown) coupled to a controller (not shown). The guiding system includes positioning means for determining the position of transport along the components 15, 20, 25, 35. The positioning device is of any suitable type, such as a continuous or distributed device, such as an optical, magnetic, bar code or reference strip, etc., along the components 15, 20, 25, 35. The dispensing device can be read or inquired by a suitable reading device provided on the transport portion for the controller to determine the position of the transport portion on the components 15, 20, 25, 35 and the kinetic energy state of the transport portion. Alternatively, the device can sense and/or query a conveyor, a workpiece loader or a sensing item on a work piece, such as an RFID (Fast Frequency Identification Device) to identify position/kinetic energy. The positioning device comprises a separate or combined dispensing device, a discrete positioning device capable of detecting the position of the moving conveying portion (for example, a laser ranging device, an ultrasonic ranging device, or an internal positioning system in contact with an internal GPS or an internal reverse GPS). ). The controller can combine the information from the guidance system with the position feedback information from the delivery unit to determine and maintain the delivery path along the components 15, 20, 25, 35 and between the components.

In a variation, the guiding system can include a groove, track, track or any other suitable structure to form a structural or mechanical guiding surface that mates with a mechanical guiding portion on the workpiece transport portion. In another variation, the components 12, 20, 25, 35 may also include electronic wires, such as printed strips or conductors, to provide electronic guidance of the workpiece transport portion (eg, to deliver appropriate electromagnetic signals by appropriate guidance on the transport portion) The electronic line detected by the system).

Referring again to Figures 29A and 29B, an example of the operation of a delivery system 10, 10' will be described. A work piece container, such as a shunt 25, can enter the delivery system 10, 10'. In order to keep the flow direction of the compartment transport portion 20 substantially uninterrupted and move at a fixed speed, the work piece container can enter the compartment inner transport portion 20 through the shunt 25. The work piece conveyor is accelerated in the shunt 25 to cause the conveyor to travel at the same speed as the material in the inter-vehicle transport portion 20 flows. Since the branch 25 can allow the workpiece conveyor to accelerate, the conveyor will merge into the flow direction of the conveyor 20 within the compartment without obstructing the flow or colliding with any other conveyor traveling in the conveyor 20 in the compartment. . When combined with the inter-compartment transport unit 20, the work piece conveyor will wait for proper advancement in the shunt 25 so that it can freely enter the direction of the inter-chamber transport unit without colliding with any other work loaders or conveyors. Or causing a deceleration of the conveyor across the components in the compartment. The work piece conveyor will continue to travel at a fixed speed along the compartment transport portion 20 and be converted into an output arrangement area or portion 35B according to the right of way to convert the inter-chamber part 15. In one embodiment, if there is no space in the output aligning portion 35B, the conveyor will continue to travel along the compartment inner conveying portion 20 until the output aligning portion 35B has a space. In a modified aspect, a transfer shunt can be provided to connect the relative travel paths of the transport portion for the conveyor to switch between transport paths to the entire circuit, such as a return bypass station, without traveling the transport portion. The conveyor can wait for proper propulsion in the compartment output arranging portion 35B, and then accelerate and merge into the substantially constant fixed velocity flow direction of the inter-compartment conveying portion 15, which is substantially similar to the combination of the above-described reference compartment inner conveying portion 20. The conveyor continues to travel along the inter-compartment transport portion 15 to the predetermined bay at a sustained speed and is diverted into the associated bay alignment input portion 35A to enter the predetermined compartment inner member 20. In one embodiment, if there is no space in the input array portion 35A, the conveyor will continue to travel along the compartment inner conveying portion 15 until the input array portion 35A has space, similarly to the foregoing. The conveyor can wait for proper propulsion and acceleration in the compartment input arranging portion 35A to be merged into the second compartment inner conveying portion 20, and the second compartment inner conveying portion 20 will continue to have a constant fixed speed. The conveyor closes the second compartment inner conveying section 20 and the conveying section 25 that enters the conveying interface and the processing tool 30. If the conveyor has no space in the shunt 25, due to the other conveyors in the shunt 25, the conveyor has access rights to continue along the compartment inner transport 20 until there is space in the shunt 25. Since the material flow direction in the inter-compartment conveying portion 15 and the inter-chamber conveying portion 20 is substantially uninterrupted and travels at a fixed rate, the system can maintain a high workpiece productivity between the processing compartment and the processing tool.

In the embodiment shown in Fig. 29A, the conveyor can be directly connected between the processing compartments by directly connecting the compartment alignment portion 35, the processing tool, the compartment inner conveying portion 20 or the extension portion 40 of the compartment conveying portion 15. Go on. For example, as shown in FIGS. 29A and 29B, the extending portion 40 connects the alignment portions 35 together. In a variation, the extension 40 can provide access from one processing tool to another by joining together the transfer branches of each tool similar to the split 25. In another variation, the extensions can be directly coupled to any number or combination of components of the automated material handling system to provide a short range access path. In larger nested networks, the shorter path between the destinations of the conveyors created by extensions 40 will reduce the travel time of the conveyor, further increasing the productivity of the system.

In yet another variation, the automated material handling system 10, 10' is a two-way flow. The conveying portions 15, 20, 25, 35, 40, 50 have side-to-side parallel traveling paths, each moving in the opposite direction and having an exit chute and a traveling chute surrounding and connecting the opposite traveling paths. The individual parallel tracks of the conveyor portion can be assigned to a particular direction of travel and can be individually or simultaneously converted such that the travel of the respective parallel tracks is reversed in accordance with the transport operation to match the transport loading conditions. For example, the material or conveyor flow along the parallel passages of the conveyors 15, 20, 25, 35, 40, 50 follows their relative directions. However, if several work piece conveyors are later placed in the facility and are to be moved to a position that moves more efficiently along one of the parallel tracks opposite the existing flow direction, then the direction of travel of the parallel tracks will be Will reverse.

In a variant, the two-way path can be stacked (on top of each other). The interface between the processing tool and the transfer branch 25 has an elevator type configuration to raise or lower the conveyor from the shunt to the processing tool load, such as a shunt with a clockwise direction of material flow in the material having a counterclockwise direction Above the flow to the branch. In a variant, the bidirectional shunt and other transport sections may also have any suitable configuration.

Figure 20 shows a portion of a conveyor system track 500 of a conveyor system for transporting a loader between tool stations of another embodiment. The track has a solid state drive system similar to that described in the aforementioned U.S. Patent Application Serial No. 10/697,528. The track has a statically forcible segment that cooperates with a reaction portion that is integrally formed in the loader housing/casing. The loader can then be transported directly by the conveyor. The conveyor system 500, shown in an asynchronous conveyor system, is disconnected from the loading of other loaders on the conveyor system. The track system is designed to eliminate the need to determine the rate at which the load rate of a particular loader is affected by the actions of other loaders. The drive track 500 employs a main conveyor having an on/off fork (see also Figures 297-298) that directs the loader away from the main conveyor to initiate path changes and/or with tool stations (such as buffers) The interface of the stacker, etc. does not affect the transport of the main conveyor. A suitable example of a delivery system having a bifurcated on/off path is described in the aforementioned U.S. Patent Application Serial No. 11/211,236. The segments 500A, C, D in this embodiment have a scrolling set applied to the A1-D linear motor to cause movement along the main travel path 500M (shown in Figure 20A). The segment 500B, such as shown in Fig. 20, has a close/outlet and can be represented as an access path 500S. The scrolling of the forcing device in this segment 500M can be designed to provide activation of the 2-D planar motor to provide both along the main path 500 and when the loader is expected to start moving along the way 500S (see Figure 20B). motion. The motor controller is similar to the distribution control designer described in U.S. Patent Application Serial No. 11/178,615, which is incorporated herein by reference. In this embodiment, the drive/motor section is effectively controlled by a zone controller with appropriate zone control. Conveyor 500 has suitable support to provide a mobile support loader. For example, in segments 500A, 500C, and 500D, supports (eg, rollers, rollers) can provide the loader to move along a 1-degree degree of freedom of path 500M.

The support in the segment 500B allows the 2-degree degree of freedom of the loader to move. In other embodiments, the support can be provided on a loader. In another embodiment, an air bearing can be used to move the loader on the track. The guidance of the loader between the paths 500M and the guidance to the path 500M may be by a steerable or articulated wheel on the loader, a articulated guide track on the track, or a magnetic manipulator as shown in Fig. 20B. The appropriate guidance system is activated.

Figure 20A shows an embodiment of a transport element 500A of system 500. Embodiments show segments having a single path of travel or path (e.g., path 500M). As shown in Fig. 20A, the segment in the embodiment has a linear motor portion or forcer 502A and a bearing surface 504 (A) as a motion support on the conveyor. As previously mentioned, the delivery segment in the modified aspect can have any other desired configuration. The guide rail 506A in the embodiment is for guiding the conveyor. In a variant, the conveying section has a magnet or a magnetic support instead of the guiding guide. An electromagnet on the loader can be utilized to assist in disengaging the loader from the track. Figure 20B shows another delivery section of the delivery system 500 of another embodiment. The segment 500A' has a plurality of travel routes (e.g., a handover route similar to the segment 500B shown in Fig. 20) or a substantially parallel main travel route (similar to the route 500M) with a converter therebetween. In the embodiment illustrated in Figure 20B, the travel route (similar to route 500M, 500S) is generally formed by 1-D motor portion 500A1 and corresponding loader motion bearing surface/area 504A'. The transition or transition between the travel routes is formed by an arrangement of 2-D motor elements that can create a 2-D force on the conveyor to initiate a traverse between the travel paths 500M', 500S'.

Figure 21 shows the interface or turning section of the drive conveyor system of another embodiment. In the illustrated embodiment, the transport segment 500A" forms a plurality of travel routes 500M", 500S". The travel route is generally similar to route 500M (see Figure 20A). In an embodiment, the transport vehicle can traverse a particular The route 500S", 500M" is until it is substantially aligned with the handover route. The 1-D motor of the scheduled route will move the conveyor along the handover path. In the modified aspect, the interface may not be oriented at 90 degrees. The bottom of the loader 1200 is shown and the reaction elements therein. The opposing reaction elements can be used to conform to the orientation of the opposing compensator components of the interface (see the embodiment of Figure 21). This allows the loader to change orbit at the interface. There is substantially no need to stop. Figure 20D shows the reaction element 1202FA disposed at the pivot of the loader 1200A, which can be rotated to the desired position as described in another embodiment. Figure 22 shows the interface with Figure 21 Similar to the track segment 500H" having a side rail storage position 500S". Figures 23-23A show the arm segment 500 having a cut or opening 1500O to lift the arm of the loader lift or shuttle (not shown) To As will be described in more detail below, in an embodiment, the opening 1500O may allow lateral advancement of the loader to grab the loader from the bottom side of the drive track. Figure 24 shows the offset loader shown in arrow 2500M/ A track segment 2500A of a track centerline forcing device (such as a linear motor) 2502A.

25A-25B shows a linear electric drive 3500 (having a grounding force piece and reaction element embedded in the loader 3200) for transporting the substrate to the semiconductor FAB. In the illustrated embodiment, the conveyor 3500 is reversed (e.g., the loader suspension and under the conveyor) to allow the loader to move directly from the bottom side. The conveyor 3500 can also be similar to the aforementioned conveyor system segments 500A, 500A", 500A'". A magnetic retention forcer 3502 can be employed in the embodiment to maintain the coupling between the conveyor 3500 and the loader 3200. This force is derived from a linear motor coil (eg, in a linear synchronous design) and/or by a permanent magnet (not shown) that is individually electromagnetic and/or specified. The coupling and disengagement of the loader to the conveyor is rapid and preferably achieved without moving parts, such as electromagnetic switches. Fail-safe operation is ensured by the flux path between the loader and the conveyor and/or the passive mechanical holding position.

In an embodiment, the position of the intersection and the branch point (ie, the merge-branch position of the segment 500B in FIG. 20) can be converted by the coil. Rotary or other path guiding means may be employed in the modified aspect to transfer the loader between the travel paths of the conveyor 3200.

The loader 3200 in the embodiment is designed such that the reaction elements are attached to the top and the substrate is advanced from the bottom of the loader. The loader 3200 of the embodiment has a magnetic plate that is configured to mate with the actuator of the conveyor 3500. The loader plate or flat portion includes a roller, support or other action bearing surface (e.g., a reaction surface for air support in the conveyor). The plate also includes an electromagnetic coupling portion for detaching the container portion of the loader from the flat portion that remains attached to the conveyor when the workpiece container portion is loaded on the processing tool 3030.

In an embodiment, when loading the tool, the conveyor 3200 places the loader on the tool magazine and utilizes, for example, a designated vertical transfer mechanism 3040 (see Figures 26A-26B) to reduce the loader from the conveyor height to (control) The load interface 3032 of the tool 3030. The vertical transfer device can also be used as a positioner to set up the wafer for access by the wafer handling robot. A suitable example of a vertical transfer device is described in U.S. Patent Application Serial No. 11/210,918, the disclosure of which is incorporated herein by reference.

In the modified aspect, the transmission is a reverse-set power wheel accumulating conveyor with appropriate magnetic attraction to support the loader on the conveyor wheel. In another variation, the general design can be made retrograde so that the conveyor is below the load weir, and the loader has a reaction section at the top.

Figures 26A-26B show another example of directly lowering/raising the loader from the conveyor system to the loading/tool interface. The loader in the embodiment shown in Figures 26A-26B can be integrally formed with the reaction plate. In another embodiment the slab may be detached from the loader, such as remaining coupled to the conveyor when the loader is removed. In this case, each of the flat plates in the transport system has a substantially 1:1 relationship with the loader in the FAB.

Figure 27 shows a loader 4200 of another embodiment having a hybrid construction of a conveyor motor vehicle. The loader motor vehicle 4200 is used to automatically transfer a payload (such as a loader with a semiconductor substrate). The motor vehicle can carry stored energy for self-propelled, operating systems, at least one motor powered drive wheel, an instrument for measuring and detecting obstacles, and associated control electronics. In addition, the motor vehicle is provided with one or more reactive elements (like the magnetic plates described above) to interact with the static linear motor forcing segment of the conveyor 4500 of a similar conveyor system 500 (see also Figure 20).

In an embodiment, when the motor vehicle 4200 travels along a path formed by one or more forcible segments (like the path 500M, 500J), the drive motor can be disengaged from the drive wheel, and the motor vehicle passes through the conveyor The electromagnetic coupling of the reactive elements in 4500 is passively promoted along the path. If energy storage devices (eg, batteries, ultracapacitors, flywheels, etc.) in a motor vehicle need to be recharged, the movement of the traction sheave along the guides can be used to convert the energy of the linear motor into vehicle storage. In the case of electrical energy storage, the motor drive motor and appropriate monitoring electronics can be reconnected as a generator. This "flying" charging has simplified and durable benefits, and the design has significant flexibility and error tolerance. For example, the motor vehicle 4200 can be used to drive a spontaneously failed conveyor section or along an obstacle or between work areas that are not serviced by the conveyor (see Figures 27A, 27B). The number and length of the conveyor forcing segments can be tailored to operate as a conveyor for the inter-container conveyor and utilizes spontaneous motor vehicle movement such as in a compartment. Self-guided manipulation can be applied to elastic path selection. Self-guided turns can be applied to avoid the use of curve forcing segments. High-speed travel can be initiated along the conveyor travel and can be isolated from the operator with safety barriers as needed. The conveyor components can be applied to long-range operations, such as linking to adjacent FABs. The conveyor can be used for grade changes, using special stored energy to alleviate the difficulties encountered by the vehicle.

Figure 28 shows another example of an integrally formed loader and transport vehicle. In contrast to the conventional motor vehicle type semiconductor automation in which the motor vehicle system is used to dispatch the wafer loader in the FAB, each of the loaders 5200 in the present embodiment is a single motor vehicle. The one-piece formed loader/motor vehicle 5200 in the embodiment is similar to the aforementioned motor vehicle 4200. The motor vehicle 5200 in the modified form includes an integrally formed loader 5202 and a motor vehicle 5204 portion. The loader 5202 shown in Fig. 28 is a front side/side opening. The loader in the modified aspect is open at the top or has other suitable work piece transfer openings. The motor vehicle can be driven directly to the load magazine to which the work piece is to be transferred, or can be joined by another automated component such as a tool bumper. The substantially permanent fixed loader 5202 and the motor vehicle 5204 can eliminate the waiting time for dispatching empty cars when a large amount of transfer is required, and can also dispense with the associated difference in transmission time. In addition, the loader motor vehicle 5200 eliminates empty vehicle movement, thereby reducing the total flow of the conveyor network, thereby improving system performance. In a variant, the loader and the motor vehicle have couplings to disengage the loader from the motor vehicle. Although the ratio of motor vehicles to loaders in the system is 1:1 to avoid delays in loader transport while waiting for the vehicle, system validation in appropriate controllers may be used to allow for separation under restricted conditions (eg, maneuvering) Repair/maintenance of parts of the vehicle or work loader). Loaders and motor vehicles, on the other hand, remain integral when transporting or joining tool loading stations or other automated components of the FAB.

Figure 29C shows a plan view of a buffer system 6000 of a planar configuration of another embodiment of the interface between the transmission system 500 (or any other preloader delivery system) and the tool station 1000. The buffer system can be placed below the tool station or its components or above the tool station. The buffer system can be set to deviate (i.e., above or below) the operator access to the exit. Figure 30 is an elevational view of the buffer system. Figure 29C-30 shows a buffer system disposed on one side of the conveyor 500. The buffer system can be extended as needed to cover portions of the FAB plane as much as possible. In the illustrated embodiment, the operator walkway can be located in an elevated position of the buffer system. For the same reason, the buffer system can be extended overhead anywhere on the FAB. As shown in Fig. 29C-30, the buffer system 6000 of the embodiment has a shuttle system 6100 (which may have a suitable loading elevator or positioner) capable of at least 3-D movement, and a buffer station ST arranged therein. The shuttle system generally includes a guidance system (e.g., rail) 6102 that provides one or more shuttles 6104 that can be at least 2-D traversed on the guidance system. The configuration of the shuttle system illustrated in Figures 29C-30 is for illustrative purposes only, and the shuttle system in the modified aspect may have any other contemplated configuration. In an embodiment, the shuttle system is shuttled or interposed between the conveyor 500, the buffer station ST and the tool loading station LP (see Figure 29C). The shuttle 6102 can shuttle between the horizontally disposed conveyor 500 (e.g., via the access path 602 between the segments 600 of the conveyor) and the buffer storage ST or loading position LP on the tool station to cause the loader 200 therebetween shuttle. As shown in Fig. 30, the shuttle 6104 in the embodiment may include a positioner 6106 to grab/place the loader on the conveyor 600, or the buffer station ST or the tool loading cassette LP. The buffer system is designed in a modular form to facilitate expansion or reduction of the system. For example, each module has a relative storage location ST and a shuttle track and a joint joint for mounting other buffer modules. In a variant, the system has a buffer station module (having one or more integrally formed buffer stations) and a shuttle track module for modular mounting of the shuttle track. An elevational view of the buffer system 6000 in communication with the merge/branch path of the conveyor 500 is shown in FIG. The buffer system shuttle 6104 of the embodiment can advance the loader that is directed to the conveyor's aggressive route. A stop (or lack of an access lane similar to route 602 in Figure 29C) will limit the shuttle's aggressive or interfering travel path. Figure 32 is another elevational view showing multiple arrangements of buffer stations. The buffer system has any expected number of buffer stations arranged in any desired number of columns. The traversing shuttle (as indicated by arrow Y in Figure 32) can be adjusted by the module displacement of the lateral guide 61087. In another variation, the buffer station is arranged in a plurality of horizontal planes or levels (ie, two or more levels - which can be vertically separated to allow the loader height to pass between the levels). Multi-level buffering can be applied to loaders that reduce performance. Figure 33 shows another plan view of a buffer system having an interface with the guided vehicle loader V. Figure 34 shows an elevational view of an overhead buffer system 7000 similar to the aforementioned lower tool cushioning system 6000. The overhead buffer system 7000 can be used in conjunction with a lower tool cushioning system (similar to system 6000). The illustrated overhead buffer system forms an interface with the overhead conveyor 500. In a variant, the overhead system can interface with a floor drive system or a floor-type motor vehicle. Appropriate control interlocks (e.g., hardware) can be provided to prevent horizontal crossings of the shuttle with a reduced payload and contaminate the vertical clarity of the aisle. A top shroud above the aisle can be used to prevent the suspended load from passing through the aisle space.

Figure 35 shows a loop buffer system 8000. The buffer station ST of the system is freely movable, and is mounted on the rail 8100 (closed loop type in the illustrated embodiment) to move the buffer station ST between the loading R positions, wherein the loader can be loaded into the buffer station ST ( For example, the load station LP with an overhead loader and tool interface. The tool interface can have a positioner to load the loader to the tool station.

Referring to the perspective view, side view and bottom view of the substrate loader 2000 of another embodiment shown in Figs. 36A-36C. Loader 2000 is a typical loader and is shown as having an embodiment constructor. The loader 2000 of the illustrated embodiment is a bottom open loader for illustration, and the loader of the modified aspect may have any other desired configuration such as a top opening or a side opening. The loader 2000 of the embodiment shown in Figures 36A-36C is similar to the loaders 200, 200', 300 shown in Figures 1-3, and like parts are indicated by like numerals. The loader 2000 thus has a housing or housing 2012 having one or more openings 2004 (only one opening is shown as an example in Figures 36A-36C) for the wafer input/output loader. The loader housing has a removable wall or member 2016 to form a cover or door for opening and closing the opening 2004. As previously mentioned, the housing 2012 shown in the embodiment has a removable bottom wall 2016 to switch the opening 2004. Any other component or wall of the loader in the modified aspect is removable for input/output of the wafer to the loader. The detachable member 2016 can generally seal the remainder of the housing 2014 as previously described, and the housing can be used to maintain an isolation enclosure, such as inert gas, a high degree of clean air or vacuum with a pressure differential from the atmosphere. The outer casing 2014 is similar to the removable wall portion 2016. The wall portion 216 and the outer casing 214 are passive structures and can be locked to each other by magnetic force or any other intended passive locking. The wall portion 2016 in the embodiment may include a magnetic element 2016C (eg, steel material) and the outer casing 2014 may have a magnetic switch 2014S to initiate unlocking and unlocking of the wall and the outer casing. The magnetic element of the wall and the housing magnet 2014S of the housing can be designed to match the magnetic lock to the door interface (described in more detail below), so when the loader door (wall or housing, see Figures 36A and 36C) Locking the door can cause the loader door and the rest of the loader to be unlocked. In a variant, the magnetic lock between the wall and the outer casing can have any other desired configuration. Metal Passive Loader 2000 and Loader Doors 2016, 2014 provide a vacuum compatible clean washable loader.

In the embodiment illustrated in Figures 36A-36C, loader 2000 is shown as being loadable with multiple wafers. The loader in the modified aspect can be used as a desired size to load a single wafer with or without an integrated wafer buffer, or any desired number of wafers. Similar to the loaders 200, 200', 300 of the previous embodiment, the loader 2000 is a reduced or small batch size loader relative to conventional 13 to 25 wafer loaders. As shown in Figures 36A-36B, the loader housing has a delivery system interface 2060. The conveyor system interface 2060 of the loader 2000 can be configured to interface with any desired delivery system, such as a transmission system similar to the embodiment shown in Figures 20-30. For example, the loader can include an active element, such as a steel magnetic material gasket or member, disposed or attached to the loader housing and can cooperate with a linear or planar motor of the drive train to push the loader along The conveyor travels. An example of a suitable construction of an active element of a linear or planar motor is described in U.S. Patent Application Serial No. 10/697,528, the entire disclosure of which is incorporated herein by reference. In the embodiment shown in Figures 36A-36C, the loader interface 2060 also has a connection to the transport system for supporting the loader on the transport system when the loader is moved and/or stationary on the transport system. Loader support member or surface 2062. The bearing surface is a non-contact or contact bearing surface that can be configured to face or face the side (eg, surface 2062S) or the bottom surface (eg, surface 2062B) or any other desired location or orientation to securely support the loader on the delivery system. A non-contact bearing surface, such as a generally planar, surface or mat surface, is attached or disposed to the housing and formed by any suitable means for attachment to an air bearing (not shown) of the conveyor system to securely support the loader (A combination of actuating forces, such as magnetic forces, etc., based on air support alone or by a conveyor system motor on the loader). In a variation, the loader housing has one or more (active) air supports to direct air (or any desired gas) toward the (passive) delivery system structure to provide buoyancy (eg, non-contact) but still loader Stable support on the structure of the conveyor system. In this embodiment, a suitable air/gas supply (e.g., a fan or air pump) can be coupled to the loader to feed the air support of the loader. In another variation, both the loader housing and the delivery system have an air bearing and a passive air bearing surface (eg, a raised air bearing in the conveyor system and a horizontally guided air bearing in the loader). The loader 2000 can have other gripping members, flanges or surfaces, such as the operating flanges 2068 as shown in Fig. 36B.

The loader 2000 of the embodiment has a tool interface 2070 for the loader to be coupled to a loading portion of the processing tool (e.g., load magazine). This processing tool is of any type. In an embodiment, the interface 2070 is attached to the bottom of the loader. The tool interface in the change profile is attached to any other desired side of the loader. In another variation, the loader can have multiple tool interfaces (eg, bottom and side) for different configurations of the loader and tool. The tool interface 2070 of the loader 2000 in the embodiment is shown in detail in Fig. 36C. The construction of the tooling face 2070 shown in Fig. 36C is for illustrative purposes only, and the loader in the modified aspect may have any other desired configuration of the tooling face. The tool interface 2070 in the embodiment has the conditions set by the appropriate SEMI standard for the loader (such as SEMI E.47.1 and E57 and any other suitable SEMI or other standards), all of which are incorporated herein by reference. Therefore, the loader interface 2070 in the embodiment may include a kinetic energy coupling (KC) socket disposed in accordance with the conditions of SEMI standards E.47.1 and E57 for accepting major and/or secondary settings in the conventional load port interface. KC pin (not shown). The loader interface 2070 also has one or more of the information pads that conform to the loader's SEMI standard. The loader interface in the modified aspect may not be provided with one or more SEMI designation components (e.g., the intervening face may not be provided with a kinetic energy coupling component) but has a reserved area on the interface side of the housing corresponding to the component. The loader interface 2070 of an embodiment allows the loader 2000 to be coupled to a conventional loading interface of a conventional processing tool. In addition, the loader interface 2070 of the embodiment is designed to produce a contactless interface between the loader and the loading interface of the processing tool, as will be described in more detail below.

It will thus be appreciated that a wafer loader such as loader 2000 can be placed relative to the processing tool for processing. The loader of the wafer loader and tool requires precise alignment to automatically transport the wafer into the tool. Conventional positioning methods generally use a conventional mechanical coupling to contact the underside of the loader. For example, the conventional mechanical coupling provides an introduction or cam to compensate for the total misalignment and assist in guiding the wafer to the aligned position. Unfortunately, this component relies on the introduction surface of the loader to achieve sliding contact with the mating pin of the loader, thus potentially causing wear and contaminants. The second problem with the application of traditional mechanical coupling is that the loader is roughly placed within the capture range of the effective function of the traditional linkage. The loader conveyor system is used to achieve increased complexity of the conveyor system and/or increased time to initiate proper positioning (eg, retry). The design of the loader conveyor system must therefore be sufficiently reproducible to set the loader within the gripping range of conventional mechanical coupling or in a nominally aligned position in conventional applications to prevent wear. However, the loader conveyor system cannot achieve reproducibility after a number of cycles, thus producing sliding contact-induced particles. The interface of loader 2000 can provide the same reproducibility to set up the wafer loader to the processing tool by means of a non-contact (eg, magnetic) bond. This performance allows the conveyor system to fully implement the introduction feature to relax the set tolerance and subsequently accelerate the loading/unloading steps of the loader. Second, all actions to compensate for set errors can be made without substantial contact between the loader and the load port, reducing any relative slip as a cleaning consideration.

As can be seen from Fig. 36C, the loader interface 2070 of the embodiment can have a non-contact coupling 2071 for the loader to be a contactless interface and to be coupled to the load magazine. The non-contact coupling 2071 can include a substantially non-contact support or lift surface 2072 and a non-contact joint 2074. In an embodiment, the lifting surface 2072 is substantially smooth to engage the air bearing of the loading jaw (described in more detail below) for air support to provide controlled and stable lifting of the loader in the loading magazine. The loader lift face in the embodiment is passive, and the loader in the modified form may include one or more effective air/gas supports to lift the loader. Referring again to Figure 36C, the lifting surface 2072 of the embodiment can have three components that are substantially similar to each other and distributed on the interface (e.g., the bottom side) of the loader housing, thus being lifted by the load weir air support to the loader. The action is generally caused by pressure, applied from the air bearing to the lifting face member, and the resulting lifting system coincides with the mass center of mass (CG) of the loader. The shape and number of lifting surface members 2072 shown in Fig. 36C are for illustrative purposes only, and the lifting surfaces in the modified aspects may have any desired shape and number. For example, the lifting surface can be a single continuum (or substantially non-interrupting component that extends generally along the perimeter of the loader interface). The lifting surface in the embodiment is located in the loader interface 2070 so as not to be connected to a SEMI interface component (eg, a kinetic energy coupling socket, a data pad, etc.). The position of the lifting surface 2072 is as far as possible away from the CG under the constraints of the interface, and is made to the desired size to produce the desired pressure distribution and to allow for the expected translational (eg, x-y plane) misalignment between the loader and the loading magazine as much as possible. The lifting surface 2072 in the embodiment is symmetrically arranged with respect to a single axis (shown as the X-axis in Figure 36C, such as the dual lateral reference axis), but not to any other axis of the loader interface. The loader interface 2070 is thus polarized such that the non-contact interface with the tool loading interface can be achieved by a single suitable orientation. When the loader is set in an incorrect orientation, it can cause instability when the loader is lifted. It can be detected by a suitable sensor of the conveyor system of the loader, or detected by the loader itself or the loader, generating signals and transmitting. To stop the incorrect settings. The lifting surface 2072 can also be provided with a desired bevel or offset to assist in properly aligning the loader with the loading magazine. The lifting surface in the embodiment may be moved or offset by mechanical, electrical, piezoelectric, thermal or any other suitable means, thereby generating an expected horizontal force of different scales and directions in the event of an air bearing impact to the loader. Align the loader with the loader.

Referring again to Fig. 36C, the non-contact coupling portion 2074 in the embodiment has one or more permanent magnets 2074A-2074C (three magnets 2074A-2074C are shown as an example, and may be provided in a modified form) More or fewer magnets). The coupling magnets 2074A-2074C are part of the reaction section of the conveyor system linear/planar motor or are provided separately from the motor reaction section. The coupling magnets 2074A-2074C are of a size sufficient to overlap the loading magnets of the loading cassette (described in more detail below) as the expected misalignment between the loader and the loading magazine. The embodiment shows that the coupling magnets 2074A-2074C are symmetrically disposed along a single axis (e.g., the X-axis in Figure 36C), but are asymmetrical to all other axes of the loader interface. The non-contact coupling of the loader is then polarized to prevent the loader from attaching to the load magazine when the loader is not in the desired orientation relative to the load magazine. In other words, the non-contact coupling of the loader can be "keyed" to the load magazine with the correct orientation, and the joint will not engage all other orientations and therefore cannot attempt to load. A suitable sensor can be placed on the loader or loader to detect that the loader is incorrectly placed on the load port and the link cannot be properly activated, and the appropriate signal is transmitted to cause the conveyor system to be removed or to reposition the loader in the proper orientation. The non-contact coupling and/or lifting surface in the modified aspect can be symmetrically disposed along a plurality of axes of the loader interface.

Referring to Figure 36D, there is shown a bottom plan view of another embodiment loader 2000' similar to the aforementioned loader 2000, like components being numbered similarly. The loader 2000' has a loader interface 2070' having a non-contact coupling 2071' substantially similar to the non-contact coupling 2071 described above with reference to Figures 36A-36C. In the embodiment shown in Fig. 36D, the non-contact coupling portion 2074' has a steel magnetic material portion 2074A', 2074B', 2074C' (may be part or separate part of the motor reaction assembly of the conveyor system in the loader) ) to replace the permanent magnet. The steel material portions 2074A', 2074B', 2074C' have any predetermined shape such as a rectangular shape, a cylindrical shape or a spherical shape. Each of the portions 2074A', 2074B', and 2074C' are similar to each other, and in the modified aspect, the different common portions form the desired magnetic coupling and the directional features used by the portions. The portion has a sufficient size to accommodate the magnetic field of the load port and allows for initial misalignment between the loader and the loader when the loader is initially placed on the load port. The coupling portions 2074A', 2074B', 2074C' are sized and disposed on the loader interface such that the magnetic force acting on the loader biases the loader into an aligned position relative to the load jaw. As can be seen from Fig. 36D, the coupling portions 2074A', 2074B', 2074C' in the embodiment can be distributed on the loader interface to form a single axis of symmetry (axis X) and bonded to the contactless coupling 2071' of the loader. It is connected to the loading raft in a single orientation. The junction in the changed aspect can have any other desired configuration.

Figures 37A-D show perspective, end and side elevation and top views, respectively, of the tool loading station or loading magazine 2300 of another embodiment. The loading cassette of the illustrated embodiment has a configuration for attaching and loading wafers from the bottom opening of a loader similar to the aforementioned loader 2000, 200', 300. The load port in the change pattern can have any other desired configuration. The load cassette 2300 has a suitable mounting interface such as a SEMI STD. A BOLTS interface is included for loading the load to any desired processing tool or workstation. For example, the loading cassette can be mounted/equipped with a control enclosure for EFEM, such as a processing tool (described in more detail below), or can be equipped (in a manner similar to that shown in Figure 14) with an atmospheric isolation compartment for the processing tool (eg Vacuum transfer cabin) or atmospheric open compartment of processing tools. The loading rafts in this embodiment are similar to the aforementioned loading rafts. The load cassette 2300 typically has a loader loading interface 2302, and a loading chamber or chamber 2304 (where individual or wafers in the cassette can be received from the loader or returned to the loader). The compartment 2304 can be used to maintain an isolation enclosure (a load lock that can be loaded as a processing tool) or a controlled (highly clean) air enclosure. The loader loading interface 2302 has a loading plane 2302L that will support the loader when the loading magazine is attached, unlike conventional loading magazines, which have substantially no protrusions in the loader setting area. As can be seen from Figure 37A, the loading plane has an anti-collision or shock absorbing portion disposed outside the loading setting area to move in place of the loader when the loader and the loading magazine are out of alignment. The load loading interface 2302 can have a loading opening and/or a mouth 2308 (in communication with the loading compartment 2304) and a door closing similar to the aforementioned opening. The card 2310 of the embodiment is generally flat and of the same height as the loading plane of the loading interface. The cardia 2310 is sealed to the rim of the rim in a sealing configuration similar to that described above with reference to Figures 4A-4B. It can be seen that when the load port interface 2302 of the load port is connected and coupled, the loader case and the loader door are relatively sealed to the load edge 2308R and the card door 2310, and can be referred to as shown in FIG. 4A-4B. The configuration is roughly "zero volume wash" seal. The seal between the rim, the door, the loader housing and the loader door may have any other desired configuration. The card 2310 of the embodiment can be coupled to the mouth by a passive magnetic coupling or latch in a manner similar to that described above. In an embodiment, the magnetic coupling/latch element disposed between the cardia and the fistula can be configured and designed to activate the passive movement between the loader door and the housing while actuating the latch between the cardia and the fistula. Magnetic latch. Thus, for example, unlocking the slamming door and the cornice will also cause the loader door to unlock the loader and lock the mortise lock to the loader. The load cassette of the embodiment may include a positioner 2306 and a wash/discharge system 2314 similar to those shown in Figures 8-14.

Referring to Figure 37D, the loading loader loading interface of the embodiment has a substantially non-contacting dielectric surface 2371 that can be mated with the non-contacting dielectric surface 2071 of the loader 2000, such as to connect the loader 2000 to the loading magazine 2300. As shown, the interface portion 2371 in the embodiment can have one or more air bearings 2372 and a non-contact coupling portion 2374. The load bearing air support 2372 can be of any suitable type and configuration, such as a "keyed" configuration, generally corresponding to the configuration of the lift zone 2072 on the loader interface. Thus, the air bearing 2372 is symmetrically disposed relative to the reference reference X which sets the alignment of the loader 2000 when coupled to the loading magazine. A suitable air/gas supply (not shown) supports air support. Appropriate regulators (not shown) may be employed to maintain the desired airflow from the air support. The air supply and regulator of the air support are set as required. For example, it is located outside or inside the loading compartment 2304, but is isolated from the interior enclosure of the compartment. The gas supply 2372S of the air bearing 2372 (see Figure 37C) can extend into the bellows or other flexible seals of the air bearing. The casing is used to isolate the gas supply from the loading compartment. In another embodiment, the air bearing gas supply may extend into the bellows seal of the isolation positioner in a manner similar to the wash and exhaust lines shown in FIG. The air/lifting zone of the loader in the embodiment is located at the loader door, so that the air bearing 2372 (located on the underside of the lift zone) of the load in the embodiment is within the limits of the cardia 2310. The air bearing in the modified aspect is provided on the 埠 frame or the 埠 flange, and the air supply of the air bearing is provided on the outer side of the loading compartment of the loading raft. The air bearing 2372 in the embodiment is an orifice support (having a partial discharge port) or a porous medium air support having a substantially even distribution discharge port. The pressure, mass flow and direction of the discharge of each air bearing 2372 (indicated by AB vertical as an example in Fig. 37C) are fixed (substantially unchanged). The air bearing in the modified aspect has a varying drainage for changing the drainage characteristics (e.g., pressure, mass or direction, etc.) to offset the movement of the loader relative to the loading cassette and the alignment of the auxiliary loader with the loading magazine. As can be seen, the dimensions of the air bearing 2372 and the lifting pad 2072 on the loader are designed to provide an expected misalignment limit or set area for the loader to initially be placed on the load magazine.

A plan view of another embodiment of the loading cassette 2300' is shown with reference to Figure 37E. The loading cassette 2300' is similar to the loading cassette 2300, and similar components are indicated by similar symbols. One or more of the air supports 2372' in this embodiment have a row of nozzles. The discharge ports AB1-AB4 of the discharge nozzles are combined to provide a guiding total discharge port. By way of example, each nozzle of the row has a discharge port that is angled relative to the other nozzle discharge port. The discharge port that flows out of one or more nozzles is fixed or varied. When an array of air nozzles are operated under rectification, the resulting exhaust has a first desired direction (i.e., substantially perpendicular). Stopping or reducing flow through one or more nozzles will result in a change in the final discharge direction, resulting in a directional component at the loading plane. The air bearing nozzle in the modified aspect is mobility (for example, an air nozzle mounted on a tiltable platform), or the shape can be changed (for example, using a dielectric material or a shared memory material) to guide the discharge port. . It can be seen that the directional component of the air bearing discharge port in the loading plane gives the impact of the loader mounted on the air bearing of the loading plane in the opposite direction of the directional component of the discharge port and is generated in the loading plane. Lateral movement of the loader.

Referring again to Figures 37A-37D, the non-contact coupling portion 2374 of the loading cassette has magnetic portions 2374A-2374C disposed to match the magnets 2074A-2074C (see Figure 36C) or the magnetic material 2074A'-2074C' of the loader to form A magnetically locked/unlocked connection between the loader and the loader (eg, between the loader door 2016 and the door 2310 and between the loader housing and the load frame). The magnetic portion 2374A-2374C of the loading cassette in the embodiment also cooperates with the magnets 2074A-2074C or the magnetic material portions 2074A'-2074C' of the loader to form a loader position assisting device for adjusting the loader on the loading portion. Position to achieve the positioning described below. The arrangement of the illustrated magnetic portions 2374A-2374C is described by way of example only, and the magnetic portion of the loaded non-contact loader coupling portion in the modified aspect can be configured/constructed as intended. The magnetic part 2374A-2374C is an operating magnet that activates a magnetic switch that, when activated, produces an expected magnetic field to deflect the magnet or magnetic part of the loader in the desired direction (eg, to create a lock/coupling of the loader and loader). And/or corrective force imparted to the loader. As seen in Figures 37A and 37D, the load port interface of the embodiment has a non-contact alignment system 2380 to teach the loader conveyor system about the position/positioning of the load port and to provide an initial setting of the loader on the load port interface. As previously mentioned, the mounting area of the loading cassette is substantially free of flanges, and the initial setting of the loader on the setting area is substantially non-contacting (i.e., without frictional contact) between the loader and the loading cassette. In the illustrated embodiment, alignment system 2380 has a symbol arrangement or pattern that can be imaged by a suitable sensor. The marking pattern shown in Fig. 37D is for illustrative purposes only, and any suitable marking pattern may be used in the modified aspect for imaging by appropriate sensors and setting positioning information for all desired degrees of freedom. A sensor (not shown) is provided on the loader support of the transport system, such as a CCD or CMOS imaging sensor, which forms an image and its spatial characteristics. The imaged data of the pattern can be conveyed to the pattern by a suitable processor for recording and coupling of the loader positioning data to determine the position of the loading cassette setting area relative to the loader conveyor and to teach the position of the loader conveyor.

The loader 2000 of the embodiment is disposed by the transport system on a loading plane having no flanges in the set area 2302P. The set area in the embodiment is the area formed by the size of the loader +/-, for example about 20 mm with respect to the alignment axis of the load cassette. The actual set positioning error is any value and not dependent on the aforementioned values, and can be specified relative to the ratio of the subsidy mechanism after positioning the loader. Therefore, the alignment reproducibility of such a connection is substantially the same as that of the conventional coupling method, and at the same time increases the allowable loader positioning error. After the loader is loaded and sensed, an air film (air bearing) is activated to lift the loader and eliminate friction between the loader and the loading jaw interface. The force acting on the loader at this time is the relative position of its mass and the gravity relative to the horizontal reference surface and the lifting force itself. The loader lifting surface is coupled to the air shims on the loading raft to lift the loader and achieve reproducible positioning (angular and lateral) of the loader relative to the loading ram. The loader floating on the air film will be positioned relative to the loading jaw. As previously mentioned, a magnetic coupling can be utilized to apply a force to the loader to translate or rotate the loader. Any method other than the magnetic method can be used to apply force to the loader as long as it has sufficient impact and predictable target position. The connection between the loader and the loading raft is completed to clamp the two objects together and grasp the positioning.

Referring to the embodiment illustrated in Figures 36A-36C, when the loader 2000 is in the set area, the permanent magnets 2074A-2074C are superimposed on the magnets 2374A-2374C on the load port interface. The air bearing system is energized and the loading magnetic system is activated by an electronic or mechanical device to display the opposing magnetic pole preloader magnets. The absence of friction in the interface will allow the loader to move freely over the X, Y and θZ axes until the poles are naturally aligned but do not make substantial contact. The air bearing system throughout the process is pre-applied with magnetic forces by the loader and the magnets in the loading bowl. Pre-stressing can effectively maintain the control of the loader and increase the toughness of the air bearing. After a predetermined period of time or feedback from the inductor, the air bearing can be stopped, causing the loader to lower to the door of the loader. The magnet at this point is in full contact and provides a clamping force to support the loader to the cardia.

In the embodiment shown in Fig. 36D, the loader 2000 has steel material spacers 2074A and 2074C (see Fig. 36D) sized to be placed in the magnetic field range of the loading and uncoupling point (positioned by the loader conveyor system). Inside. The magnet that activates the air bearing and the loading jaw is electronically or mechanically activated to introduce a magnetic field onto the iron shim of the loader. The absence of friction at the interface will create an attractive force between the magnet and the iron shim to translate or rotate the loader to the aligned position. The air bearing system is pre-applied with a magnetic force. Pre-stressing can effectively maintain the control of the loader and increase the toughness of the air bearing. After a predetermined period of time or feedback from the inductor, the air bearing can be stopped and the loader can be lowered to the door of the loader. The magnetic force on the iron shim will provide a clamping force to support the loader to the cardia.

The loader of another embodiment can be driven by a pilot air nozzle 2372' (see Fig. 37E), and the pilot air nozzle system shown in Fig. 37E is integrated into the air bearing surface. The air nozzle 2372 in the embodiment provides lateral application of pressure to the bottom surface to create movement of the loader. The motion is controlled by the controller to energize the appropriate nozzle set to guide the X or Y axis of the loader until the magnet on the loader is aligned with the load port. The modified nozzle array is mounted on the plate to intensify the rotation/tilt of the plate to provide the desired orientation of the nozzle. The nozzle guides the discharge port opposite to the direction of movement of the loader. This action will provide a lateral force to translate the loader until the magnet is aligned. Sensor feedback, such as feedback from magnetic coupling, can be used to detect the actual position of the loader and compare alignment positions. This information can be used to determine the direction of the loader's translation and how to apply force to the loader with the air nozzle. The nozzle in the modified aspect is used in combination with a magnetic coupling to align the loader to its intended position.

Figure 37F shows a plan view of another embodiment of the load port interface. The loading cassette 2300" in this embodiment is similar to the above, except that the magnet 2374' provided on the loading cassette is connected to the movable X-Y platform which can be moved in the direction indicated by the arrow of Fig. 37E. In the example, the loader is placed on the loading cassette and the loader magnet is attracted to the loading neodymium magnet coupled to the X-Y platform 2374S" when the air bearing is activated. The X-Y platform 2374S" is an air cylinder, unthreaded bolt or electronic coil that is linearly coded to provide a translational position report. The coupling loader magnet and the loading neodymium magnet are driven back to the aligned position. When the support is stopped and the loader is lowered to the door and clamped. Similarly, the method can be applied to the existing kinetic energy coupling method, in which each kinetic energy pin is coupled to the X-Y platform. The two kinetic pin systems are driven to align X, Y and θZ. Although it is not possible to lift the operation before non-contact, it is a feasible method to increase the loader setting limit with minimum wear.

Figure 37G shows another embodiment of a similar load magazine 2300A, with the difference that the loader is driven by the mechanical start pusher 2374M to position the loader and align the loader's junction point with the load magazine. In the illustrated embodiment, the loading plane is pivotally mounted relative to θX and θY (as indicated by arrows R, P). The combination of degrees of freedom and air support can be used to tilt the loading plane to shift the center of gravity of the loader to produce translation relative to the pivot angle. This method utilizes position feedback to manipulate the loading plane in the proper loader orientation to align the loader with the loading neodymium magnet. When the loader is in place, the air bearing can be stopped and the loader is clamped to the cardia. The final loading plane pivots back to the original position to achieve proper alignment of the card as a removal trick.

As mentioned earlier, the environment within the loader will vary depending on the procedures in the previous procedure and the environment inside the wafer and loader. The environment (e.g., gas type, cleanliness, or pressure) associated with the loader or loader is then different from the environment of the existing program. For example, the specific processing of the wafer of the loader can use inert gas. Thus the interface between the loader and the loading port of a particular tool may allow for the appropriate gas species to be input or discharged as intended to minimize pressure differentials or to introduce undesired gas species when the loader is turned on. In another embodiment, the tool environment is vacuum, and the loader of the mating tool is drawn through the interface to a low pressure for the wafer from the loader to be loaded directly onto the vacuum load lock. The interface between the loader and the loading cassette and the environmental control system provide an environmental fit between the loader and the tool, substantially similar to that described above and shown in Figures 10-10A and 14. Another suitable embodiment of the loader loading interface and environment matching system is described in U.S. Patent Application Serial No. 11/210,918, the entire disclosure of which is incorporated herein by reference. Referring to Figure 38A, a flow chart showing the procedure for loading the environment of the loader with loads of different control environments is shown. In the embodiment illustrated in Figure 38A, both the loader and the load magazine retain the same gas species (e.g., the same type of inert gas). In this embodiment, if the loader has a higher pressure than the process pressure, the loader will vent (via the interface) to the load compartment (or other suitable cavity) until equilibrium is reached, if the loader is at a higher level At low pressure, the gas from the loading bowl or other suitable source can be introduced (via the interface) into the loader until the loader and the mounting/tool environment are in equilibrium. In the embodiment illustrated in Figure 38B, the load weir may have an ambient environment (e.g., highly clean air), and the balance between the loader and the load weir may be achieved in a manner similar to that described above in Figure 38A. Figure 38C shows the procedure for an embodiment in which the load port has a vacuum environment. The loader and load magazine in the modified aspect have an initial difference in gas type, and the initial environment of the loader is extracted and then the gas type in the load port is input (e.g., via load magazine) before the door is opened.

Referring again to Figure 37A, and as previously described, the load magazine of the embodiment has a liftable door 2310 (to open and close the cornice) and a desired height in the wafer cassette on the lift loader to the load compartment. A positioner 2306 for wafer processing. The positioner 2306 is similar to the embodiment shown in Figures 8, 9, 10-10A, 14 and 18 above, and the positioning mechanism is isolated from the volume/environment occupied by the wafer. In summary, a suitable example of a positioning mechanism has the following configuration: 1. A lead screw with a bellows - this mechanism employs a lead screw driven by an electric motor attached to a rafter mounted on a raft. The part of the lead screw that enters the clean area is enclosed by a bellows. The bellows are any materials such as metal, plastic or fiber woven fabric that remain clean and flexible during operation without fatigue. The bellows provides a barrier between the source of the contamination and the clean area where the wafer is placed. The flexible nature of the bellows provides isolation of the entire stroke of the actuator. The feedback of the mechanism is through a rotor encoder on the motor, or a lead screw; or a linear encoder along the path of motion. (See Figure 14)

2. Compressed Cylinder with Bellows - Similar to the previous embodiment, the only difference is that the drive mechanism is a compression cylinder. It can be applied to moving compartments such as between two positions; for example, closing and lowering compartments. (See Figure 9)

3. Compression cylinder remote drive lead screw - similar to the previous embodiment, the only difference is that the drive mechanism is remotely placed outside the wafer body (see Figure 10). The loading raft is connected to the drive by a support structure. The drive is exposed to the clean area but is controlled by air flow paths or labyrinth rings. The use of air flow necessitates that the driver be placed downstream of the wafer such that contaminants that may be generated are located on the underside of the wafer and are swept away. Adding a labyrinth ring or other "non-friction" seal further limits particle intrusion and provides a solid barrier between the drive and the clean zone. Second, the drive can be remotely located outside of the processing tool environment. This would place the potential fouling mechanism in a less dirty FAB environment but use a labyrinth ring to protect the processing tool environment.

4. Zone-action mechanism with magnetically coupled jaws - this embodiment uses magnetic coupling between the jaw and the drive mechanism (see Figure 8 but the reverse example). The magnetic coupling can be passed through the non-ferrous wall portion of the air gap to allow the drive zone to be isolated outside of the clean zone. The driving method is any of the foregoing types, such as a lead screw, a compression cylinder or a linear motor. The latter is located in the clean zone and can be combined with the air bearing guide to limit the direction of motion due to its heritage.

Figure 39 is a cross-sectional view showing the load cassette 2300A and the attached loader 2000A, and the wafer air flow management system of another embodiment. The loader 2000A and the load cassette 2300A are similar to the loader of the previous embodiment. In the embodiment illustrated in Fig. 39, the cardia opening and cassette are positioned to the loading chamber and positioned for processing. When the loader is turned on and the wafer is positioned for processing, air flows around the wafer to maintain wafer cleanliness. For example, depending on the processing procedure, the wafer can remain in a lowered position for a long time to increase the risk of particulate deposition on the wafer surface. In addition to this, when there is no proper air flow, any contaminants generated by the loading mechanism will be deposited on the wafer surface. As shown in the embodiment, at least a portion of the air flow in the processing environment will be "trapped" and redirected to flow through the wafer. The air is then routed downstream of the wafer transfer plane (WTP) of the processing environment. The air flow pattern in the embodiment is horizontally passed in parallel with the top surface of the wafer and discharged from the back side of the wafer cassette. When exiting the cassette, the discharge path will traverse the air vertically and direct it through the discharge port to the ground. This method maintains a clean, fixed air flow through the wafer surface in an open loop or sealed environment. For example, when the load port is operated in an environment of an air type attachment program such as nitrogen or argon, the existing air flow is redirected as shown and reflowed back to the sealed circuit environment used to support the control gas species.

As shown in Fig. 39, the air supply film in the embodiment is mounted on the upper side of the wafer access region to the vertical surface of the processing microenvironment. This position is reserved for the existing SEMI E63 standard FOUP door opener. The air film is designed to trap the volume of the existing laminar flow from the microenvironment and to allow the air flow to be turned from vertical to horizontal. In an embodiment, the diffuser element is placed on the back of the wafer cassette when the interior of the outer side surface of the loading cassette is lowered. The diffuser is constructed, for example, of a solid plate that is partially open depending on the flow characteristics. The diffuser is designed to manage the uniformity of the horizontal air flow through the wafer while providing a pressure differential before the air enters the exhaust end of the pipe. The exhaust end of the circuit in the embodiment is forced to drain to ensure a stable and uniform flow of air through the wafer. For example, an axial fan is mounted inside the exhaust end conduit to direct the output to the processing tool micro-environment port. On the other hand, the unit can be used without a fan and air supply film, and the diffuser and exhaust duct can be configured to ensure a stable and uniform air flow through the wafer.

40A-40D are schematic cross-sectional views showing wafer stoppers of the loader of the embodiment. The embodiment shown in Fig. 40A shows a radial clip wafer stopper. The side wall of the cassette can be translated to provide clamping. The mechanism remains in the cassette and is driven by the loading cassette or pod housing to the cassette interface (Z-axis). The changing aspect is the translation of the interior of the sidewall to the pod housing. The mechanism is retained in the pod shell and is driven by the load weir, the pod shell to the door (the O-axis of OHT) or the pod to the cassette (loaded by the Z-axis). Use advanced materials to drive (ie shape memory metal or magnetic limiters, etc.). The embodiment shown in Fig. 40B shows a wafer stopper that employs a clamping force that substantially tangentially the top surface of the wafer. The vertical translation fingers in the embodiment are integrally formed with the cassette. The mechanism is kept in the box. The mechanism is driven by the loading raft, the nacelle to the stern (the O-axis of the OHT) or the pod to the cassette (the Z-axis of the loading raft). The off-axis translation fingers in the modified aspect are integrally formed with the pod housing or cassette. The fingers are translated toward the wafer at a deviation from the horizontal angle (see Figure 40C). The mechanism is driven by the loading raft, the nacelle to the stern (the O-axis of the OHT) or the pod to the cassette (the Z-axis of the loading raft). In another embodiment, the 2DOF fingers are integrally formed with the pod housing or cassette. The fingers are rotated and then translated vertically to engage the wafer (see Figure 40D). The mechanism is driven by the loading raft, the nacelle to the stern (the O-axis of the OHT) or the pod to the cassette (the Z-axis of the loading raft). The wafers that are limited to the loader in the modified aspect can have any other suitable configuration. For example, a wedge shape is formed between the wafer edge contact supports, such as support fingers that form a linear edge in contact with the wafer on the cassette.

Referring to Figures 41-41b, there are shown schematic perspective views, end elevations and top views, respectively, of a representative processing apparatus having a processing tool PT and a conveyor system of another embodiment. The processing tool PT is like a tool train arranged in the FAB processing compartment. The delivery system 3000 of the embodiment can provide a tool for servicing the processing compartment, such as a compartment internal portion of the delivery system 3000 series FAB wide delivery system. The delivery system 3000 in the embodiment is substantially similar to a portion of the AMHS system shown in Figures 29A-29D above. The delivery system 3000 can be in communication with other (e.g., compartment) portions 3102 of the FAB AMHS system via a suitable delivery interface as shown in FIG. As indicated previously, the configuration of the processing tool PT in the illustrated tool column is for illustrative purposes only, with multiple rows of tool columns (the illustrated embodiment shows two rows R1, R2, and the modified aspect may have more or more Less toolbars). In the illustrated embodiment, the tool trains are configured to be substantially parallel (geometric, but may be disposed at an angle to each other) and may form a substantially parallel machine direction. The machining directions of the different tool rows can be the same or opposite each other. At the same time, the machining direction along a particular arrangement can be reversed such that the machining direction along a portion or region of the tool row is unidirectional, while the machining direction of another portion or region of the same tool train is in the opposite direction. The processing tools of R1 and R2 are assigned to set different processing zones ZA-ZC (see the example in Figure 41). Each processing zone ZA-ZC includes one or more processing tools in the R1, R2 rows. The processing area in the modified aspect has tools set in a single row. From this it can be seen that the processing tools of a particular zone are associated processors, for example with complementary processing and/or with similar tool throughput rates. For example, the tool area ZA has a high throughput tool (eg, about 500 wafers per hour (WPH)), and a medium throughput tool (eg, about 75 WPH to less than 500 WPH) can be placed in the tool zone ZB, but Low throughput tools (eg, approximately 15 WPH to 100 WPH) can be placed in the tool zone ZC. It should be noted that the tool setting is not necessarily the same for any particular area, and one or more tools in a particular area may have different production volumes or processing procedures than other tools in a particular area, but there is a relationship between the tools in the area so that at least The tooling in the same area is managed with a tissue suitability for the purpose of transport. The tool area shown in Figure 41 is for illustrative purposes only, and the tool area in the modified aspect may have any other desired configuration.

As seen in Figure 41, the conveyor system 3000 can be used to transport the loader to and from the tool. The conveyor system 3000 is substantially similar to the embodiment shown in Figures 29-35 above. The delivery system 3000 of the embodiment illustrated in Figures 41-41B has an elevated configuration (e.g., the delivery system is disposed on the upper side/head of the tool). The delivery system in the modified aspect has any other suitable configuration, such as having a substructure (e.g., the delivery system is disposed on the underside of the tool, similar to the delivery system illustrated in Figures 30-33). As can be seen from Figures 41-41B, the delivery system typically has several delivery subsystems or portions. The conveyor system 3000 in the embodiment typically has a batch material/fast delivery portion 3100, such as an actuator (such as the solid state actuator described above with respect to Figures 20-25B or any other suitable actuator). The actuator can extend through all of the tool zones and can be substantially fixed at the delivery rate to deliver the loader without stopping/slowing when the loader is set up/unloaded from the actuator. The transport system 3000 of the embodiment also includes a storage station/location 3000S (see also FIG. 41B), with a shuttle system portion 3200 of the shuttle 3202 that can advance one or more storage stations/locations (see Figure 42), And interface transport system unit 3300. The interface transport system portion of the embodiment can advance the loader transported by the bulk transport drive unit 3100 or at the storage station and transfer the loader to the loading portion of the processing tool. In the storage station of the embodiment, the shuttle system portion 3200 and the interface transport system portion can be formed in a selective mounting portion that can be selectively mounted on the transport system. The conveyor system portions 3100, 3300, 3200 of the embodiment can be modularized to mount portions of the system portion that are selectively installed in the conveyor system. The transport system, the interface system, and the portion of the storage system that are installed along the conveyor system are selected to correspond to the area ZA-ZC of the processing tool. It can be seen that the delivery system 3000 can be designed to correspond to a processing tool or processing tool zone. In addition, the transport system of the embodiment may be constructed in the area TA-TC, generally commensurate with and corresponding to the processing tool area ZA-ZC. The delivery system therefore has different regions of different system configurations. The storage system and the shuttle system in the embodiment are constructed in each area TA-TC of the conveying system. Further, the interface conveying system portion in the embodiment is constructed in each region. The interface transport system of the embodiment has a selectable mounting interface conveyor (additional crane in the embodiment shown in Fig. 41) which can be added, removed and can be installed in various transport system areas TA-TC in several different orientations. Part 3310, 3320. The predetermined interface delivery system can be installed in the delivery system area to provide the desired tool interface and access rate, for example, to match the productivity of the processing tool of the corresponding tool zone ZA-AC. As detailed in FIG. 41A, the interface delivery system portion has a selectively varying number of conveyor travel planes (eg, a partial region TC has a single interface conveyor travel plane, see Figure 48, while other regions TA, TB have more than one Conveyor travel plane ITC1, ITC2, see Figures 41A and 46). Conveyors in areas with multiple planes can span each other. The illustration has two planes, but more or fewer conveyor planes are available. While the transport system in the embodiment is configured with a generally horizontal travel plane, the transport system in the modified aspect can have any other desired configuration including a vertical travel plane for the interface conveyor to bypass.

The overhead crane system (OGS) can be designed for low, medium, or high productivity. Modular assembly through on-site reconstruction can be adapted to changing factors or processing performance. The modular equipment can be divided into three types; low productivity, moderate productivity, and high productivity. The configuration of the various modules depends on a number of factors, including the expected rate of movement, storage capacity, and the distribution of expected productivity in the bay.

Low Productivity: As an illustration, a low productivity tool or tool area can adequately accommodate a single overhead crane 3310. This configuration can provide all of the intended movement without the use of a "feeder" robotic manipulator 3320 or shuttle system 3200. In addition to transferring the loader from the storage to the tool, the overhead crane can grab the loader from the inter-vessel drive and transfer it to a storage location. In order to allow the loader to be moved to an adjacent overhead crane area, the loader is placed in the compartment or placed on the storage base for search by an adjacent overhead crane. This configuration allows an overhead crane to span another elevated crane until the overhead overhead crane has been moved. When two or more overhead cranes are operated together and one of them fails, the adjacent overhead crane will replace the operation of the ineffective. Although the working capacity will be reduced, it will not be completely shut down.

Moderate Productivity: For example, a medium productivity tool or tool zone may be satisfied with the addition of a "feeder" robotic manipulator 3320 (eg, an additional overhead crane/conveyor). This configuration is generally similar to the low productivity configuration, with only one feeder automatic manipulator 3320 and sequencer/shuttle 33200 added. The feeder automatic manipulator and the sequencer/shuttle in the embodiment are used to perform the actuator-to-storage designation of the compartment. Each feeder automatic manipulator can employ two overhead crane loader automatic controls 3310, 3312 on either side of the feeder (see Figure 44). However, the feeder in the modified aspect can be paired with a loader automatic manipulator. The purpose of the sequencer/shuttle is to receive the loader from the feeder and arrange it for storage. Thereby the "loader" automatic manipulator is constructed to focus on the two-way movement of the reservoir to the tool without the additional load of grabbing the loader from the inter-chassis actuator. The system works with adjacent low, medium, or high productivity modules. When the loader automatic manipulator fails, the adjacent loader automatic manipulator will enter and operate within the area of the failed automatic manipulator (see Figures 46 and 47). When a feeder mechanism fails, the individual loader robots will operate in the same manner as the low productivity configuration. It remains effective in both failure scenarios but with reduced capacity.

High Productivity: For example, overhead crane modules in high-productivity applications are redesigned to meet the needs of specific tools or tool areas. The high productivity is equipped with a loader automatic manipulator on both sides of the compartment, a feeder automatic manipulator similar to the medium productivity zone, and a similar sequencer/shuttle that sorts the loader to the reservoir (see section 45 picture). The loader automatic manipulator corresponds to a tool placed on one side of the compartment, allowing for shorter movements. The loader enters the high productivity zone through the inter-vehicle actuator system. High productivity configurations have failure tolerance limits for loader automatic manipulator failure and/or feeder automatic manipulator failure. If one of the loader automatic manipulators fails, the other loader automatic manipulator will operate on both sides of the compartment after the failed automatic manipulator has been removed from the area. If the feeder fails, the loader automatic manipulator will be responsible for grabbing the loader from the inter-chassis actuator system. If both the loader automatic manipulator and the feeder robotic device fail, one of the loader robotic controls will be responsible for all expected movements.

Various configurations: low productivity, moderate productivity, and high productivity may operate as a single individual or adjacent to any of the three configurations depending on the expected rate of movement. The system does not have any single point of failure and the loader process in the system is completely ineffective. In addition to the failure tolerance limits for individual or multiple component failures, the system provides multiple effective movement paths for the loader. The master controller uses a standard mobile combination with a level of continuity of priority movement of a particular loader under normal operating conditions. To address periodic pulses, tool failures, or upstream restrictions in loader flow, host control logic can be utilized to initiate redirection and diverging loader flow away from problematic areas. Figure 50 shows a number of methods for moving the loader from point A to point B in the embodiment.

The "feeder" robotic manipulator of the embodiment can search the loader from the inter-vehicle actuator system and set it in a suitable storage position. The feeder automatic manipulator can be used to load the robotic manipulator as needed to focus only on the movement of the reservoir to the tool and to increase the overall movement capacity of the system. The feeder utilizes fast short-range movement for limited or uninterrupted movement of the inter-chamber transmission (e.g., no transmission interruption occurs when entering the loader from an access path similar to Figure 20). The feeder mechanism reduces the workload of the overhead crane system. The driving mechanisms that support various sports include linear motors, ball screws, compression drives, belt drives, friction drives, and magnetic thrusters. The following embodiments can be implemented as described above: 1. The feeder automatic handling device is similar to an overhead crane loading automatic operating device, except that it is fixed in the x direction (the length of the compartment) and has y (the lateral direction of the compartment) and Degree of freedom in the z (vertical) direction. The feeder mechanism is placed on a plane below the tool loading robotic manipulator for the loader robotic manipulator to pass without a payload. The area above the loading area allows the loader automatic manipulator to move freely through the feeder under payload conditions. The feeder system is vertically disposed such that when the vehicle is in the raised state, it can pass through the inter-chassis actuator and have sufficient space to move through and grasp the loader. The feeder enters the loader from above and utilizes a short range vertical stroke to grab the set loader from the inter-vehicle actuator system to the desired storage flange. The storage lane of this configuration is on a common plane with the inter-chassis actuator. The storage tank has a two-way sequencer/shuttle mechanism for the loader to shuttle along the storage column to the next position. The shuttle drive mechanism is such that the loader can move at least one pitch along the length of the compartment. A pitch refers to the distance between the overhead crane tool loading automatic manipulator along the feeder automatic manipulator edge for uninterrupted travel and grabbing the loader. The sequencer/shuttle is also used to transport the loader between the adjacent loader robot and the storage tank. For example, the order of movement of the loader is as follows: The inter-chassis actuator temporarily stops at the fixed X position of the feeder automatic manipulator along the length of the compartment.

The feeder automatic manipulator travels from the front item Y position to above the loader on the inter-vessel drive.

The feeder automatic manipulator grabs the loader.

The feeder automatic maneuver travels along the Y direction (transverse to the compartment) to a particular shuttle lane.

The feeder automatic manipulator sets the loader on the shuttle and continues the next action.

The shuttle/sequencer mechanism drives the loader in the X direction.

The overhead crane loading automatic manipulator is moved to the storage position and the loader is then grasped and placed on the appropriate tool.

Advantages of the system of the embodiments include increased wafer productivity over conventional systems, multiple moving paths to complete loader movement, and increased failure tolerance.

According to another embodiment, shown in Fig. 48, the feeder automatic manipulator is a linear machine that resides on a plane below the shuttle and the inter-vehicle actuator system. The machine has the same degree of freedom as in Embodiment 1, and the loader is grabbed from below instead of above. When the loader is grabbed from the inter-chassis actuator, it is driven laterally to the compartment and released to the appropriate shuttle. The advantage of this design is that the drive lane can be placed anywhere between the equipment limits. For example, the inter-chamber actuator may be present at the center rather than the outer side as shown in embodiment 1. Another advantage of this design is that the loader automatic manipulator can pass the feeder mechanism with payload at any Y position within the compartment, while the loader of embodiment 1 is limited to being located only in the loading area. Make this move inside. In addition, the loader automatic manipulator does not need to be in communication with the feeder to prevent impact. Both the feeder and the loader automatic manipulator can occupy the same vertical space with payload and are not connected to each other. The movement sequence of this configuration is the same as that of Embodiment 1, except that the loader is grasped from below rather than from above.

In the variant, the lower overhead or mechanism can be moved along X (slot length), Y (slot lateral), and Z (vertical) directions. In this configuration, the shuttle/sequencer is not required because the 3-axis feeder can be moved to a specific storage lane and channel as needed. For example, the loader is removed from the inter-chassis drive, positioned in the appropriate storage lane and then vertically translated to the loader initial position in the reservoir. As another embodiment shown in Fig. 49, the vertical storage bar can be provided to increase the storage capacity, and the vertical storage column can be stored by the loader in the same shape as the loader that extends the FAB table to the highest arrival point by the OHT system. The volume can be set along the entire length of the compartment.

In a variation, the cylindrical loader slot is set up as needed to provide a higher storage density in the FAB. A cylindrical storage tank mounts the loaders on top of each other and provides a mechanism to lift the loader to a specific height. The mechanism of vertical motion is compression, mechanical, or magnetic.

Figure 51 shows a schematic plan view of a delivery system 4000 of another embodiment. The conveyor system shown in Fig. 51 is a representative portion, such as the inter-chamber portion of the FAB cable conveyor system, and the conveyor system in the modified aspect has any desired size and configuration. The transport system 4000 of the embodiment shown in Fig. 51 is similar to the transport system 3000 shown in the aforementioned 41-50. Similar components are numbered similarly. Similar to the delivery system 3000, the delivery system 4000 illustrated in FIG. 51 has a batch or rapid batch delivery unit 4100 (eg, a conveyor) and a mediator face 4200. The intervening face 4200 in this embodiment is illustrated by way of example only, and may have any contemplated configuration in any variation, with any desired number of sub-components (e.g., storage portions similar to those previously described, shuttle). Typically, the upper face 4200 has a plurality of feeder automatic controls that can be coupled between the bulk conveyor system portion 4100 and the processing tool. The batch delivery system portion 4100 is generally similar to the previously described delivery system 500, with a portion of which is shown in FIG. In the embodiment illustrated in Figure 51, the batch delivery system portion 4100 includes a track having a solid state transmission system. The track is similar to the actuator track described in U.S. Patent Application Serial Nos. 10/697,528 and 11/211,236. In the embodiment illustrated in Figure 51, the conveyor system 4100 is an asynchronous conveyor system (similar to the conveyor system 500) in which the loader conveyor transported by the conveyor system is disconnected from the action of other loaders in transit. Thus one or more loaders can operate independently during the transport (eg, accelerate/decelerate, stop, load/unload) without affecting the delivery rate of other adjacent or adjacent loaders in the loader conveyor stream of the conveyor system.

In the embodiment illustrated in Fig. 51, the batch conveyor system portion (hereinafter referred to as the batch conveyor 4100) generally has a main conveyor track 4100M. The batch conveyor 4100 also has a number of side rails 4100S. The main conveyor track 4100M shown in Fig. 51 is a circuit, and in any other desired shape, may form the main conveyor path (or transport stream) of the loader transported by the bulk conveyor. Although the description in the embodiment is based on a loader, and the features described therein are equally applicable to the modified aspect, the (substrate) loader can be seated on a payload plane or other moving device transported by the bulk conveyor. on. The primary transport path in the embodiment has a continuous and substantially fixed velocity. Thus the loader transported on the main conveyor track 4100M can maintain a high rate of travel productivity of the transport on the main path without being hindered by the loader that stops on the conveyor system. The side rails or rails 4100S can disconnect the conveyor rate measurement operation of the loader on the batch conveyor from the main conveyor path. As previously mentioned, the rate determination operation is performed by the side rails without being affected by the main transport path. The side rails 4100S can then form loader cushioning, loading stations or path switching devices. In the embodiment a side rail is shown as an example, and any desired number of side rails may be provided in the modified aspect. The construction of the side rails of the illustrated embodiment is bifurcated and re-attached to the substantially straight section of the main rail, and is also illustrated by way of example only, and the side rails in the modified aspect have any other contemplated constructors. For example, the side rails may be split between opposite sides of the main rail (in a particular compartment) or in different compartments or compartments - compartments (as shown in Figures 29A, 29B) ) The main track is split between.

The main rail and side rails 4100M, 4100S in the embodiment may include modularized rails A, B, C, D, L that are modularly coupled to assemble the rails of the bulk conveyor. The loader is driven by a linear motor to the track 4100S, 4100M of the bulk conveyor. Similar to the aforementioned track 500, a linear motor forcing can be placed on the rails 4100M, 4100S, and a linear motor reaction portion can be provided on the loader. The loader can be freely supported on the track by suitable means such as a contactless or lubricated support (e.g., air/gas support) maglev system, or contact support (e.g., roller, ball/roller support), suitable for the loader. On the solid support member. The loader in the modified aspect has integrally formed movable supports such as wheels, rollers, gas/air bearings, and the like. The movable support that supports the loader on the main rail and the side rails has any desired configuration on the rail that can stably support the loaders on the rails and can be distributed along the main rails and side rails for the loader to follow along The track is free to move. The linear motor in the embodiment is a linear guided motor (LIM), and any desired linear motor or any type of motor/driver can be used in the modified form to cause the loader to move on the main rail and side rails of the bulk conveyor. As described above, the LIM forcing device (or step reel) 4120, 4120M, 4120S in the embodiment is disposed on the track modules A, B, C, D, L forming the main rail and the side rail of the conveyor. Above, the loader has the reaction rate/component of LIM, as will be detailed below.

Referring again to Fig. 51, the orbital modules A, B, C, D, L of the main rail 4100M and the side rails 4100S are representative, and have any desired configuration in the modified aspect. Track modules A, B, C, D, L are generally similar unless otherwise noted. As shown in Fig. 51, the track segments (modules) in the embodiment generally include a single track segment (e.g., A, C, D, L) and a transfer (track transition) segment. Any other expected modularized track components can be used in the variant. For example, a specific track module in a modified aspect may include a plurality of tracks (various loader transport paths of different shapes) extending substantially and extending, which is referred to as a non-crossover multi-track module. The monorail members of the embodiment may include substantially straight segments A, D, L and curved segments C, while in the modified aspect the monorail members may have any other desired shape. The junction sections B, 4102, 4102' are where the side rails or rails 4100S meet the main rail 4100M. In the embodiment shown in Fig. 51, two transfer track segments 4102, 4102' are shown as an example. The configuration of the transfer rail segments 4102, 4102' shown in Fig. 51 is for illustrative purposes only, with a single rail junction/branch on one side of the main rail 4100M (e.g., relative to the direction indicated by the X-axis of Figure 51). Left side). In the variant, the junction segment can be branched to the right of the main rail. In another variation, the interface segment can have any other desired configuration, such as multiple branches in a segment, on opposite sides of the main rail, generally directly opposite or opposite each other, or in the main rail Multiple branches on one side (eg left and/or right). The monorail members A, C, D, L in the embodiment may have similar shapes although they have different shapes (e.g., straight lines, bends, etc.). Each of the rail members A, C, D, L may be included in a corresponding portion of the LIM enforcer 4120. At the same time, as shown in Fig. 51, when the modular rail members are assembled in the LIM compensator components (different rails) in a combined operation (with appropriate controllers), the substantially continuous continuity of the main rails and the side rails can be formed. The LIM Forcer 4120M, 4120S operates on the reaction plate of the loader and drives the loader to move over the entire length of the main rail and the side rails. The track in the modified aspect may include one or more segments of the integrated body portion.

The forcing device 4120 or the primary coil assembler as the LIM typically includes, for example, a steel laminate and phase windings that may be integrally formed with the rail members or may be enclosed in a compellator housing that is coupled to the rail members. The forcing portion of each of the rail members A, C, D, L (see segment C shown in Fig. 52) may be segmented or continuous. The curved track member C can have a forcing portion 4120C whose phase windings are designed such that the coils are assembled to form a curve that matches the curvature of the track, or have a segmented forcer portion that is designed to form a substantially The forced portion of the bend. The force portion of the rail member in the modified aspect can have any other desired shape. The compensator portions of the rail members A, C, D, and L can be symmetrically disposed on the rail and the loader seated on the rail. The force changer in the change pattern can oppose the loader placed on the track and above. Figure 54 shows a schematic end view of a typical segment A and a typical loader 5000 that is freely supported thereon. As previously mentioned, the track (main rail and side rail) 4100M, 4100S is typically provided with an active force/impacter for the loader 5000, which is movably supported and guided to initiate movement of the loader along the track. As previously mentioned, in the embodiment, the motor that drives the loader is LIM, and the on-track forceers 4120M, 4120S operate on the load plate/element 5100 on the loader. Referring again to Figure 53, a bottom view of a typical loader 5000 and loader reaction plate 5100 is shown. The configuration of the reaction plates on the loader shown in Fig. 53 is for illustrative purposes only, and the reaction plates of the loader in the modified form may have any other suitable design. There may be more or fewer reaction plates in the modified aspect. In an embodiment, the reaction plate 5100 is shown on the bottom side of the loader, and in the modified aspect the reaction plate can be placed on any other desired side or portion of the loader. The reaction plate 5100 in the embodiment may be made of a metal such as steel or aluminum, but may be made of any other suitable material. One or more of the reaction plates may be made of steel (magnetic) as will be described in detail below. The reaction plates on the loader may include one or more plates 5102 corresponding to the forces 4120M, 4120S on the tracks 4100M, 4100S to provide urging forces along the main or side rails. As shown in Figure 54. The reaction plate 5102 in Fig. 53 is illustrated as a single plate, but may also include any desired number of plates, such as those shown in Figures 20C, 20D. As described above, the orbiter 4120 (and the forcing portions 4120A, 4120C of the opposing segments in Figs. 52 and 54) are disposed substantially symmetrically with the corresponding reaction plate 5102 on the loader and the track. The LIM in the change pattern is the opponent.

The loader 5000 of the embodiment shown in Fig. 54 is movably supported on the rail by a suitable air bearing 4200. The distribution of the air bearing shown in Fig. 54 is for illustrative purposes only, and the discharge port in the modified aspect can be used to provide any other desired air pressure distribution to stably support the loader on the track. The vents in the modified aspect are vented on the loader to lift the loader from the track. As previously mentioned, the movable support between the loader and the track in other variations is any other desired type and is attached to the rail member or loader. The air holes of the air bearing 4200 and/or the gas impact zone on the loader can be used to create a directional force to initiate horizontal guidance of the loader relative to the track. In the embodiments illustrated in Figures 51-52 and Figure 54, the rails 4100M, 4100S can include a control and guidance system 4130 to guide movement of the loader as it is pushed along the track. The guiding system 4130 is a non-contact system that extends along the main rail and side rails 4100M, 4100S. Each of the rail members A, C, D, L in the embodiment includes a corresponding portion of the guiding systems 4130A, 4130C (see Figures 52 and 54), which can be combined to form a substantially continuous guide of the rail when the segments are connected Lead system. The guidance system in the modified aspect is independently mounted on the track. The guidance system in other variations is of any suitable type and can be oriented with the support system of the track (eg, a roller or wheel on a track or loader connected thereto to help maintain the orientation of the loader as it moves along the track) The horizontal positioning) is combined and/or integrated with a linear motor (described in more detail below) and/or independently of the loader support and the linear motor. The guidance system 4130 disposed in the track 4100M, 4100S in the embodiment generally has guide tracks 4130M, 4130S extending substantially parallel to the LIM forcing 4120 in the track. The guide track can be actuated with the steel guides/elements in the loader to maintain the loader in a desired horizontal position relative to the track 4100M, 4100S. As previously mentioned, the rail members A, C, D, L of the embodiment may each have a corresponding portion 1430A, 1430L of the guide track as shown in Figures 52 and 54. The guide track portions 1430A, 1430L of the rail members A, C, D, L in the embodiment have two guide tracks 4132, 4134 along the LIM actuator 4120A but disposed on the opposite side (eg, 54th) Figure shows). The position of the illustrated guide track is used as an example. More or fewer guide tracks in the change pattern can be placed at any desired location. The steel guide plate/component of the loader that cooperates with the guide track is the off-axis (relative to the X-axis) linear motor reaction plates 5104R, 5106R, 5104L, 5106L of the other parts of the linear motor described below (see Figure 53), or other suitable steel plates/components that are independently placed with the linear motor reaction plate. In other variations, the loader can direct the magnetic elements, and the track can have a steel/magnetic material track that is configured to cooperate with the magnets on the loader to form the track guide system. The guidance system also includes a position/position sensing system/device coupled to the controller to initiate movement of the loader along the track. The positioning system/device is similar to that described in the previously cited U.S. Patent Application Serial No. 11/211,236. The appropriate Hall effect sensor of the LIM can also be used to provide positioning feedback along the main rail and the side rail.

Referring to the schematic plan view of the aforementioned rail member C shown in Fig. 52 and the typical junction section B. The other transfer segments of the bulk conveyor 4100 are generally similar to the transfer segment B. The segment B in the embodiment also has a conversion linear motor forcing portion 4125. In the embodiment, a separate linear motor independent of the linear motor of the main rail and the side rail is provided at the intersection to initiate the conversion of the loader between the main rail and the side rail, as will be described in detail below. The linear motor system LIM is switched in the embodiment, however other suitable linear motors may be employed. Any other suitable electronic or mechanical conversion system can be used to modify the aspect. As shown in Fig. 52, the LIM forcing device 4125 (for the switching motor) in this embodiment is provided offset from the LIM forcing units 4120M, 4120S of the main rail and the side rail. The forcing portion of the main rail can also be further segmented 4122, 4124, 4126 as shown. The segments 4122, 4124, 4126 of the main rail forcing are substantially separated as shown, or may be virtually separated from each other by the controller for independent separation of the segments 4124 across the conversion LIM forcing 4125 without being related. Other main rail LIM enforcer segments 4122, 4126. The guidance system for the forcer segments 4122, 4125, 4124, 4126 and the handover segment as shown in Figure 52 is for illustrative purposes only, and the handover segment in the modified aspect may have any other contemplated configuration. As shown in Fig. 52, the conversion LIM forcing unit 4125 in the embodiment is offset from the main rail and side rail forcing in the direction of the side rail junction/branch (e.g., to the left of the X axis). The conversion LIM forcing 4125 in the embodiment has one end portion 4125M oriented substantially parallel to the main rail direction (shown as the X-axis) and another direction substantially parallel to the side rail local direction (such as the b-axis shown in FIG. 52). One end 4125S. In an embodiment, the side rails are oriented at an acute angle relative to the direction of travel of the main rail (X-axis) in a local direction (b-axis) of the main rail. Therefore, the loader can use the X-axis impulse to initiate the transition and does not release the overall X-axis impulse when moving to the side rail (for example, does not stop at the main rail). In the modified aspect, the angle between the entrance and exit of the side rail and the direction of the main rail is set as desired. (such as diagonal, even in this case, the configuration of the conversion linear motor can utilize the X-axis impulse). As shown in Figures 52-53, the end 4125M of the conversion LIM forcing 4125 is configured to operate one or more of the reaction plates 5104, 5106 of the main rail or side rail LIM. The reaction plates 5104, 5106 are laterally offset (along the Y axis). In addition, the reaction plates 5106L, 5106R can also be longitudinally (along the X-axis) offset from the intended reference point (eg, the center point) of the loader (along the X-axis). The reaction plates in the examples are disposed on a diagonal axis different from the side axis Y by an angle α, β. The loader in the modified aspect may have any other desired reaction plate configurations with more or fewer reaction plates. As previously mentioned, one or more of the reaction plates 5104L, 5106L may employ a conversion LIM forcing 4125 to convert the loader from the main rail 4100M to the side rails 4100S (and at side rails 4100S, segment 4102 as shown in Figure 51). 'The other end of the convergence junction makes the opposite effect.

As shown in Fig. 52, the guiding magnetic portion 4130 in the embodiment is for switching between the main rail and the side rail. As can be seen from Fig. 52, the guide track 4136 (the side adjacent to the side rail inlet) in the embodiment is interrupted, thereby eliminating the magnetic guidance of the loader in the transition zone. The opposing guide track 4132 (opposite side of the side rail inlet) may include a component 4132J having a switchable transmission magnetic field. For example, the rail member 4132J can be made to resemble a magnetic chuck having a permanent magnet and a wound coil that will switch to direct the magnetic field of the magnetic member as it passes through the coil. The transmission magnetic component in the modified aspect can have any other desired configuration. When the loader system continues on the main rail, the guided magnetic component 4132J is "on" and the loader is "closed" when transitioning to the side rail. When the guide magnet member 4132J is "closed", the loader will be allowed to move laterally freely (offward from the main rail) as it may no longer remain on the main rail. The steering magnet in the modified aspect is attached to the loader, and the interface member guiding system can include a suitable coil to create a counterbalance magnetic field relative to the loader disk. The interface member additionally has one or more transmission/operability guide disks (not shown) that are generally aligned with the inlet (b-axis) of the side rails, and will guide the loader when "turned on" ( Moved by the forcing device 4125) into the side rail 4100S. The guiding magnetic component will be "closed" when the loader moves over the handoff and continues on the main rail. Therefore, when the loader is switched from the main rail to the side rail, the LIM forcing portion 4124 is closed and the guiding magnetic member 4132J is "closed". The conversion LIM enforcer 4125 is activated. The loader is moved from power such as the forcing device 4122 until the conversion LIM forcing unit 4125 operates on the corresponding reaction plates 5104L, 5106L. The forcer 4125 will cause the loader to move from the main rail to the side rail inlet and move the loader to the side rail until the side rail LIM enforcer 4120S operates on the corresponding reaction plate 5102 to continue moving along the side rail 4100S. The guide track 4130S obtains the magnetic elements of the loader to guide the loader to move along the side rails 4100S. The position feedback mechanism when the loader is switched to the main rail to the side rail is performed by a guiding/positioning system for obtaining the positioning of the loader on the main rail before handing over the conversion LIM forcing device. When the loader continues to position feedback by converting the conversion of the LIM, and allows the handover to the side rail LIM. The positioning device is therefore positioned by any suitable type, continuous or distributed device (eg optical, magnetic, bar code, reference band, laser/beam range or radio range) for position feedback during conversion.

Referring to another plan view of the transfer section B' of the batch conveyor of another embodiment of Fig. 52A. The junction section B' in this embodiment is similar to the section B shown in Fig. 52, unless otherwise indicated. The guide track in Fig. 52A is not shown. The main rail forcing portion 4120M on the segment B' also has a segment 4124' that is interrupted by the adjacent compensators 4122', 4126'. The side rail LIM enforcer 4120B' in this embodiment can extend along the main rail and is operable to operate the reaction plate 5106L' of the loader when the loader is on the main rail. The reaction plates 5102', 5106L' (shown in phantom) for the loader to initiate the conversion as shown in Fig. 52A. The reaction plate 5102' of the track LIM is disposed on the main rail forcing member 4124' (eg, adjacent to the "upstream" main rail forcing 4122' and the reaction plate away from 5106L') for operation with the side rail LIM forcing 4120B' . Thus, the transition main rail member 4124' may be interrupted and the side rail forcing 4120B' may be activated to guide the loader to the side rail. Switching from the side rail to the main rail is also done in a similar manner. The linear motor of the main rail and the side rail in the modified aspect is any suitable linear motor, such as a DC brushless motor or other brushless core motor. The permanent magnet reaction element in the modified aspect is provided in the loader, and the permanent magnet in the other modification is provided in the rail member (the core motor in the loader). The phase winder in the modified aspect is intended to be placed on the track (similar to those shown in Figures 20A, 20B), or the loader cancels the magnetic field between the magnet and the motor core to avoid magnetic/iron by the motor. The interaction provided by the core elements provides guidance and allows the loader to switch from one track to another.

Referring again to Fig. 51, one or more of the rail members L of the embodiment may have an area I for lifting the loader from the rail by, for example, an automatic manipulator of the interaction portion 4200. The guiding track 4130S in the lifting zone I is provided with a component having a transmission magnetic field, similar to the component 4132J shown in FIG. The phase winder in the modified aspect can be used to cancel the magnetic field between the magnet in the track or loader and the linear motor core or the steel reaction plate in the track or loader, thereby "liberating" being trapped in the track. The loader and helps to lift the loader from the track.

Referring again to Figure 53, one or more of the loaders 5000 of the embodiment can have a coupler 5200 to couple one or more loaders into a loader train. The coupler is of any suitable type, such as a magnetic coupler, operatively coupled to the controller to control the coupling or liberation. The loader couplings in the modified aspect are such as mechanical couplings. The coupler 5200 is schematically illustrated in Figure 53, and in the modified aspect is intended to be placed on the loader. The loader coupler can be used to join together two or more loaders transported by the bulk conveyor 4100. This allows one or more of the loaded loaders to be the engine of the train, while the other loaders in the train are passive. Figure 51 shows one of the loader trains of the embodiment. As can be seen from the figure, the transported loader becomes the entire batch during transport, providing movement of all loaders controlled by the movement of the "starting engine" loader in the train. This can significantly reduce the load on the controller. The location information for a particular loader in the train is recorded in the control of the loader train relative to the intended reference (eg, the "Start Engine" loader benchmark). Thus, the controller can identify and position the loader as needed without having to track each loader as individual loader movements as the train moves. When it is desired to perform individual control of a particular loader in the train, the controller will search for tracks. The location of the train, and the location of the particular loader relative to the train on the train, to identify the approximate location of the loader on the track. Track positioning systems can be used for detailed positioning. In the variant, the positioning after disconnection from the loader train can be achieved by any other intended means. Any loader in the train can be used as a starter engine loader. The positioning of the engine in the loader train can be achieved to support the expected operating parameters. In addition, the position of the engine can be switched by stopping the engine loader and starting another loader of the train to become the engine.

It is to be understood that the foregoing description is only illustrative of the invention. It will be apparent to those skilled in the art that various changes can be made without departing from the invention. Therefore, the scope of the patent application of the present invention covers all modifications.

10,10’. . . Automated material handling system

15. . . Compartment conveyor system

20. . . Compartment conveyor system

35. . . Compartment compartment

25. . . Conveyor branch or branch

45. . . Processing compartment

35A. . . Input section

35B. . . Output department

200. . . Work piece loader

202. . . cabin

204. . . Opening

210. . .匣 box

210S. . . Long support

212. . . Cover box

214. . . Hollow part

216. . . Wall (cap/cover)

220. . . Loader

221C', 222C’. . . Beveled sealing surface

221CD’, 224CD’. . . Sealing surface

222', 224', 320, 320", 321". . . Sealing part

240. . . Outer support

300. . . Loader

314, 314"...shell

316, 316"... wall

314I’. . . Shell interface

326’, 328’. . . Support flange/portion

300"...loader

328"...support

400. . . Vacuum cabin (load lock)

410. . . Positioner

412. . . Drive department

414. . . Connection department

416. . . Shuttle

430. . . Loader door space

440. . . Through hole

300F. . . Loader

400F. . . Loading lock compartment

316F. . . Bottom wall

314F. . . Ring

314PD. . . Top wall

470F. . . Groove

300G. . . Top seal loader

400G. . . Loading lock compartment

314DR. . . Loader door

500. . . Conveyor system track

500A, C, D. . . Segment

500M. . . Main path

500S. . . Access path

1000. . . Tool station

1 is a schematic elevational view of a workpiece loader having the features of the embodiment of the present invention, and a workpiece or substrate S disposed on the loader; and FIGS. 1A-1B respectively showing loading of another embodiment of the present invention FIG. 2A is a schematic cross-sectional view of the loader shown in FIG. 1 and a tool interface of another embodiment; FIG. 2B is another embodiment of the present invention; FIG. 3A-3C is a schematic cross-sectional view showing three different positions of the tool interface and the loader of another embodiment; FIG. 4 is a loading of still another embodiment; A schematic elevational view of the interface between the machine and the tool, and 4A-4C are respectively enlarged cross-sectional views of the interface between the loader and the tool of the interface construction of the different embodiments; FIG. 5A-5C is another A schematic partial elevational view of the loader and tool interface of the embodiment, showing the loader and tool interface in three relative positions; and FIGS. 6A-6B are relative schematic elevational views of the workpiece loader of another embodiment; 7A-7B is a schematic diagram of a workpiece loader of another embodiment The figure shows the loader in different positions, the 7C is an enlarged view of the 7C part of the 7B drawing; the 8th is another schematic elevation of the tool interface and the loader of the other embodiment; Another schematic elevational view of the tool interface and loader of another embodiment; FIG. 10 is another schematic elevational view of the tool interface and loader of another embodiment; and FIG. 10A is another embodiment A schematic partial elevational view of the processing tool and the loader interposed therebetween; FIG. 11 is a schematic elevational view of the machining tool portion of the other embodiment and the loader interposed therebetween; 12A-12B is the 11th Figure 4A-13B is a schematic plan view of the interface of the tool part of Figure 11 and the tool for handling the door interface; Figure 14 is a schematic view of the tool of the loader opening of the loader; 1 is a schematic elevational view of a tool and a loader interposed therebetween; FIG. 15 is a schematic elevational view of a tool interface and a loader in still another embodiment; and FIGS. 16A-16B are another embodiment Schematic elevation of the tool interface and loader in two different positions; Figure 17 FIG. 17A-17C is another plan view of the loader and tool interface of another embodiment and a plan view of the tool interface; and FIGS. 18-19 are tool interfaces of another embodiment. Figure 20 is a schematic plan view of a transport system of another embodiment; 20A-20B is a schematic partial plan view of a portion of the transport system of Figure 10; and 20C-20D Figure 2 is a schematic bottom plan view of another portion of the delivery system of another embodiment; Figure 21 is a schematic partial plan view of another portion of the delivery system of another embodiment; and Figures 22-24 are another embodiment of delivery Another schematic partial plan view of a portion of the system; 25A-25B is a different elevational view of the transport system and processing tool of another embodiment; and FIGS. 26A-26B are another embodiment of transferring the loader to transport A different schematic elevational view of the transfer interface system between the system and the tool; Figure 27 is a schematic partial elevational view of the transport system of another embodiment, and other indications of the 27A-27B system of transport systems at different locations Partial elevation; section 28 Another schematic elevational view of a delivery system of another embodiment; 29A-29B is a schematic plan view of another embodiment of the delivery system; and FIG. 29C is a representation of another embodiment of the delivery system and processing tool - Figure 30 is a schematic partial elevational view of the delivery system and processing tool shown in Figure 29C; Figure 31 is another schematic partial elevational view of the delivery system; Figure 32 is another embodiment of the delivery Another schematic partial elevational view of the system; Figures 33-34 are schematic plan and elevational views, respectively, of another delivery system of another embodiment; Figure 35 is another schematic plan view of another embodiment of the delivery system 36A-36C are a bottom view, an elevation view and a bottom view of the transport device of another embodiment; 36D is another bottom view of the transport device of another embodiment; and 37A-37D is an implementation A perspective view of the tool loading station, an end view and a side view, and a top view; Figure 37E is a plan view of another tool loading station of another embodiment; and Figure 37F is another tool loading of another embodiment. Plan of the station; Fig. 37G is another embodiment A plan view of another tool loading station; Figures 38A-38C are flow diagrams showing different procedures for different embodiments; Figure 39 is a cross-sectional view of another embodiment of the tool loading station; and Figures 40A-40D are another Schematic cross-sectional view of the substrate support of the embodiment; Fig. 41 and 41A-41B are schematic perspective views of the processing system of another embodiment, end elevation and top view; Fig. 42 is the 41st drawing A schematic exploded perspective view of the system shown, and Figures 43-47 are schematic views of different alternative configurations of the system of the different embodiments; Figure 48 is a schematic elevational view of the system of the further embodiment; A schematic partial plan view of a system of another embodiment; Fig. 50 is another schematic plan view of a processing system of another embodiment; and Fig. 51 is a schematic plan view of a transport system of another embodiment; The relationship between the batch size and the transport rate; the 52-52A is a schematic partial plan view of a portion of the transport system of another embodiment; and the 53rd is a schematic plan view of the motor vehicle of the transport system shown in FIG. 51; Figure 54 is a transport system of another embodiment The schematic elevation.

200. . . Work piece loader

202. . . cabin

204. . . Opening

210. . .匣 box

210S. . . Long support

212. . . Cover box

214. . . Hollow part

216. . . Wall (cap/cover)

240. . . Outer support

S. . . Work piece

Claims (11)

A semiconductor workpiece processing system comprising: at least one processing tool for processing a semiconductor work piece; a main transport system, one or more fixed speed transport circuits with a semiconductor work piece, and an automatic motion loader, constructing the one or more a fixed speed conveying circuit and the automatic motion loaders such that the automatic motion loaders automatically travel along the main conveying system at a constant speed; the secondary conveying system has one or more fixed speed conveying circuits, So that the automatic motion loaders automatically travel along the secondary conveyor system at a constant speed, the secondary conveyor system being coupled to the primary conveyor system via an alignment portion, wherein the alignment portions are configured to allow such automatic The sport loader moves between the primary conveyor system and the secondary conveyor system without interfering with the flow of the primary conveyor system or the secondary conveyor system; and one or more interfaces that are connected via an interface to the one of the secondary conveyor systems Multiple delivery circuits to interface with the at least one processing tool, wherein the interface shunts are configured to allow material to be one or more of the delivery systems Movement between the delivery circuit and the one or more interfaces without interfering with the flow of the secondary delivery system; wherein the flow along the material of the primary delivery system and the secondary delivery system is continuous, and the secondary delivery system, and the like At least one of the alignment portion and the interface branches includes a solid state motor and a solid state switch that enables a loader thereon to travel, the solid state switch enabling the delivery system, the alignments, and the like Transfer between at least one of the interface branches. The semiconductor workpiece processing system of claim 1, wherein the solid state switch is configured to leverage the momentum of the automatic motion loader along the secondary delivery system, the alignment portions, and the interfaces One of the branches travels so that it can be transferred. A semiconductor workpiece processing system comprising: at least one processing tool for processing a semiconductor workpiece; at least one semiconductor workpiece loader; and a bulk conveying portion having a first solid state conveying system configured to be along the batch conveying portion Driving the at least one semiconductor workpiece loader at substantially constant speed; and a dielectric portion coupled to the bulk transport portion, the dielectric portion including a second solid state transport system configured to interface with the bulk transport portion The at least one semiconductor workpiece loader between the at least one processing tool; wherein the first solid state delivery system and the second solid state delivery system comprise solid state switches for transfer between the batch transport portion and the intervening face a transport path of the at least one semiconductor workpiece loader. The semiconductor workpiece processing system of claim 3, wherein the batch conveying portion is constructed as an asynchronous conveying portion, so that a conveying operation of a substrate workpiece loading machine on the batch conveying portion is carried out from the batch conveying The conveying action of the other different semiconductor workpiece loaders on the part is decoupled. The semiconductor workpiece processing system of claim 4, wherein the substrate workpiece loader has a different transfer rate The influence of the transfer rate of the semiconductor workpiece loader. A semiconductor workpiece processing system according to claim 3, wherein the interfacial portion comprises a sliding track configured to be substantially constant speed along the bulk conveying portion. The semiconductor workpiece processing system of claim 3, wherein the dielectric portion is configured to utilize the momentum of the at least one substrate workpiece loader for routing the at least one substrate workpiece loader from the The bulk shipping path is transferred to the face. The semiconductor workpiece processing system of claim 3, wherein the batch conveying portion and the interfacial portion comprise a module rail segment. The semiconductor workpiece processing system of claim 8, wherein the solid state switch is integrated in at least one module track segment for transferring the at least one semiconductor substrate loader between the batch conveying portion and the interface portion The path of travel. The semiconductor workpiece processing system of claim 3, wherein the at least one semiconductor workpiece loader includes a coupler for coupling the at least one semiconductor workpiece loader to the other of the at least one semiconductor workpiece loader To form a loader train. A semiconductor workpiece processing system according to claim 10, wherein at least one semiconductor workpiece loader in the loader train is passively moved along one or more of the batch transport portion and the dielectric portion .