JP5344366B2 - Transport system - Google Patents

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JP5344366B2
JP5344366B2 JP2008228304A JP2008228304A JP5344366B2 JP 5344366 B2 JP5344366 B2 JP 5344366B2 JP 2008228304 A JP2008228304 A JP 2008228304A JP 2008228304 A JP2008228304 A JP 2008228304A JP 5344366 B2 JP5344366 B2 JP 5344366B2
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transport vehicle
article
transfer device
support means
vehicle
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JP2010058942A (en
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眞 山本
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Murata Machinery Ltd
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Murata Machinery Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To eliminate the need for branching travel of a transport vehicle even in a complicated travelling route while delivering/receiving an article without stopping the transport vehicle. <P>SOLUTION: A first transport vehicle for supporting the article by a first supporting means and transporting it is arranged. A second supporting means, capable of travelling at an equal speed in synchronization with the first transport vehicle in a parallel section, while travelling along an orbit including the section parallel with the travelling route of the first transport vehicle and supporting the article at a position different from that of the first supporting means and a transfer device provided with a lifter for moving the second supporting means up and down are provided. As the result, the article can be delivered without stopping the transport vehicle and the branching travel of the transport vehicle can be eliminated even in the complicated traveling route. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

この発明は、搬送車間などでの物品の受け渡しに関する。   The present invention relates to delivery of articles between transport vehicles and the like.

搬送車システムでは、地上側との間の物品の受け渡しのために、搬送車が停止する必要がある。また走行ルートに分岐があると、搬送車にあるいは軌道などの側に分岐機構を設ける必要がある。そこで発明者は、搬送車が停止せずに物品の受け渡しができ、また大規模な走行ルートでも搬送車を分岐走行させる必要を無くすことを検討して、この発明に到った。なお特許文献1:JP4026073Bは2つのコンベヤシステムの間を移動する台車を設け、台車をコンベヤと等速で同期走行させることにより、コンベヤと台車間で物品を受け渡しすることを提案している。
JP4026073B
In the transport vehicle system, it is necessary to stop the transport vehicle for delivery of articles to and from the ground side. Further, if there is a branch in the travel route, it is necessary to provide a branch mechanism on the transport vehicle or on the track side. Accordingly, the inventor has come to the present invention by studying that the delivery vehicle can be delivered without stopping and the necessity of branching the delivery vehicle even on a large travel route is eliminated. Patent Document 1: JP4026073B proposes that an article is delivered between the conveyor and the carriage by providing a carriage that moves between the two conveyor systems and causing the carriage to run synchronously with the conveyor at a constant speed.
JP4026073B

この発明の課題は、搬送車を停止させずに速やかに物品を受け渡しすることにある。
この発明での追加の課題は、複雑な走行ルートでも、搬送車の分岐走行を不要にすることにある。
An object of the present invention is to quickly deliver an article without stopping the transport vehicle.
An additional problem of the present invention is to eliminate the need for branching of the transport vehicle even on complicated travel routes.

この発明の搬送車システムでは、第1の支持手段により物品を支持して搬送する第1の搬送車と、前記第1の搬送車の走行ルートと平行な区間を含む周回軌道に沿って周回走行すると共に、前記平行な区間で第1の搬送車と同期して等速走行自在で、かつ前記第1の支持手段とは異なる箇所で物品を支持する第2の支持手段と、前記第2の支持手段を昇降させるリフタとを備えた移載装置、とが設けられ、前記物品は底面に位置決め用の長溝を複数備え、前記第1の支持手段と前記第2の支持手段は、長溝内の異なる箇所を支持するように構成されている。 In the transport vehicle system of the present invention, the vehicle travels along a circular track including a first transport vehicle that supports and transports an article by the first support means, and a section parallel to the travel route of the first transport vehicle. And a second support means that is capable of traveling at a constant speed in synchronization with the first transport vehicle in the parallel section, and that supports an article at a location different from the first support means, and the second support means. A transfer device including a lifter for raising and lowering the support means , and the article includes a plurality of positioning long grooves on the bottom surface, and the first support means and the second support means are provided in the long grooves. It is configured to support different locations.

この発明では、第1の搬送車を停止させずに、地上側のロードポートあるいは他の搬送車との間で、物品を受け渡しできる。従って、搬送車の停止に伴う走行ルートの渋滞が無い。さらにこの発明では、搬送車と移載装置とが干渉せずに物品を受け渡しでき、また受け渡しの過程で物品の向きが狂うことがない。 In this invention, goods can be delivered between the ground-side load port or another transport vehicle without stopping the first transport vehicle. Therefore, there is no traffic jam on the travel route due to the stoppage of the transport vehicle. Furthermore, according to the present invention, the article can be delivered without interference between the transport vehicle and the transfer device, and the orientation of the article is not changed in the delivery process.

好ましくは、前記周回軌道に沿って前記移載装置を複数設ける。搬送車は停止も減速もせずに物品を受け渡しできるので、移載装置を複数設けると、多数の搬送車との間で連続的に物品を受け渡しできる。   Preferably, a plurality of the transfer devices are provided along the orbit. Since the transport vehicle can deliver the article without stopping or decelerating, if a plurality of transfer devices are provided, the article can be delivered continuously to a large number of transport vehicles.

好ましくは、前記周回軌道を中間にはさんで、前記第1の搬送車の走行ルートと向き合い、かつ周回軌道と平行な区間を含む、第2の搬送車の走行ルートを設けると共に、第2の搬送車は前記第1の支持手段と同じ箇所で物品を支持して搬送し、さらに前記移載装置を、第2の搬送車の走行ルートでの前記平行な区間で、第2の搬送車と同期して等速走行自在に構成することにより、第1の搬送車と第2の搬送車間で、移載装置を介して物品を受け渡し自在にする。
このようにすると、第1の搬送車と第2の搬送車間で、搬送車を停止させずに物品を受け渡しできる。また搬送車の走行ルートに分岐を設ける必要が無くなる。
Preferably, there is provided a travel route for the second transport vehicle that includes a section that faces the travel route of the first transport vehicle and that is parallel to the travel track with the circuit track in between. The transport vehicle supports and transports the article at the same place as the first support means, and further, the transfer device is connected to the second transport vehicle in the parallel section on the travel route of the second transport vehicle. By being configured to be capable of traveling at a constant speed in synchronization, articles can be delivered between the first transport vehicle and the second transport vehicle via the transfer device.
If it does in this way, goods can be delivered between the 1st conveyance vehicles and the 2nd conveyance vehicles, without stopping a conveyance vehicle. Further, it is not necessary to provide a branch on the traveling route of the transport vehicle.

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図1〜図5に、実施例の搬送車システムを示す。各図において、2は搬送車システムで、4はその走行レールであり、搬送車6を走行させる。搬送車6は天井走行でも地上走行でも良く、例えば地上1次あるいは機上1次のLIM(リニア誘導モータ)により走行し、物品の移載手段を備えていない。なお走行レール4は単なる搬送車の走行ルートでもよい。搬送車6は、第1の支持手段の例としてのピン7を備え、FOUP8などの物品を支持する。またFOUP8はフランジ9とそのネック10とを備え、11はFOUP8の扉である。   1 to 5 show a transport vehicle system according to an embodiment. In each figure, 2 is a conveyance vehicle system, 4 is the traveling rail, and makes the conveyance vehicle 6 drive. The transport vehicle 6 may be traveling on the ceiling or on the ground. For example, the transport vehicle 6 travels by a primary LIM (linear induction motor) on the ground or does not include an article transfer means. The travel rail 4 may be a simple travel route of the transport vehicle. The transport vehicle 6 includes a pin 7 as an example of a first support means, and supports an article such as the FOUP 8. The FOUP 8 includes a flange 9 and a neck 10 thereof, and 11 is a door of the FOUP 8.

20はコンベヤシステムで、コンベヤ22に移載装置24を例えば複数取り付ける。移載装置24はアーム26とピン28と、図4に示すリフタ30とを備え、ピン28は第2の支持手段の例で、ピン7とは異なる位置で、FOUP8の底面の長溝を支持する。   Reference numeral 20 denotes a conveyor system, and a plurality of transfer devices 24 are attached to the conveyor 22, for example. The transfer device 24 includes an arm 26, a pin 28, and a lifter 30 shown in FIG. 4. The pin 28 is an example of a second support means, and supports the long groove on the bottom surface of the FOUP 8 at a position different from the pin 7. .

コンベヤシステム20を挟んで一対の搬送車システム2,2が向き合っており、これらは共にコンベヤシステム20と平行な区間を含んでいる。またこの区間で、移載装置24と搬送車6は同期して等速で運動し、FOUP8の受け渡しを行う。さらに一対の搬送車システム2,2は走行方向が逆向きである。実施例では一対の搬送車システム2,2間のFOUP8の受け渡しを示すが、搬送車システム2と地上側のロードポートとの間の物品の受け渡しに、コンベヤシステム20を用いてもよい。この場合、図1のいずれかの搬送車システム2に代えて、図5に示すように、地上側のロードポート60を設ける。   A pair of transport vehicle systems 2, 2 face each other across the conveyor system 20, and both include a section parallel to the conveyor system 20. In this section, the transfer device 24 and the transport vehicle 6 move at a constant speed synchronously to deliver the FOUP 8. Further, the traveling directions of the pair of transport vehicle systems 2 and 2 are opposite to each other. In the embodiment, delivery of the FOUP 8 between the pair of transport vehicle systems 2 and 2 is shown. However, the conveyor system 20 may be used for delivery of articles between the transport vehicle system 2 and the load port on the ground side. In this case, instead of any one of the transport vehicle systems 2 in FIG. 1, as shown in FIG. 5, a ground-side load port 60 is provided.

14はコントローラで、搬送車システム2とコンベヤシステム20とを制御し、特に走行車6と移載装置24とが前記の平行な区間で同期して等速で走行するように、搬送車6あるいはコンベヤ22を速度制御する。また図4に示すリフタ30を制御して、移載装置24のピン28を昇降させる。ここでコンベヤ22を常時一定速度で運動させ、これと等速で同期するように搬送車6を制御しても良く、あるいはコンベヤ22の速度を可変にし、搬送車6と物品を受け渡しする際に、等速で同期運動するようにしてもよい。   Reference numeral 14 denotes a controller that controls the transport vehicle system 2 and the conveyor system 20, and in particular, the transport vehicle 6 or the transfer device 24 so that the transport vehicle 6 and the transfer device 24 travel at a constant speed synchronously in the parallel section. The speed of the conveyor 22 is controlled. Further, the lifter 30 shown in FIG. 4 is controlled to move the pins 28 of the transfer device 24 up and down. Here, the conveyor 22 may be constantly moved at a constant speed, and the conveyance vehicle 6 may be controlled so as to synchronize with this at a constant speed, or when the speed of the conveyor 22 is made variable and the article is transferred to and from the conveyance vehicle 6. Alternatively, synchronous motion may be performed at a constant speed.

図2,図3に搬送車6と移載装置24との間のFOUP8のやり取りを示す。FOUP8は例えば3つの長溝16をその底面に備え、ピン7が長溝16の外側で、ピン28が長溝16の内側で、それぞれFOUP8を支持するので、ピン7,28間の干渉を防止できる。また図4に示すように、移載装置24はリフタ30を備えて、アーム26を昇降させると共に、取付部31でコンベヤ22に取り付けられている。なおコンベヤ22はスチールコンベヤでもベルトコンベヤでも、あるいはチェーンコンベヤなどでも良く、好ましくは図示しない給電線を備えて、非接触あるいは接触により、移載装置24に電力を供給すると共に、コントローラ14との通信を可能にする。またここでは移載装置24はコンベヤ22に取り付けたが、移載装置24を周回走行する台車で構成しても良い。そして搬送車6と移載装置24が等速走行する区間で、リフタ30を昇降させると,FOUP8のやりとりができる。   2 and 3 show the exchange of the FOUP 8 between the transport vehicle 6 and the transfer device 24. FIG. The FOUP 8 includes, for example, three long grooves 16 on the bottom surface, and the pin 7 supports the FOUP 8 on the outside of the long groove 16 and the pin 28 on the inside of the long groove 16, so that interference between the pins 7 and 28 can be prevented. Further, as shown in FIG. 4, the transfer device 24 includes a lifter 30, lifts and lowers the arm 26, and is attached to the conveyor 22 by an attachment portion 31. The conveyor 22 may be a steel conveyor, a belt conveyor, a chain conveyor, or the like. Preferably, the conveyor 22 is provided with a power supply line (not shown) to supply electric power to the transfer device 24 by non-contact or contact and to communicate with the controller 14. Enable. Although the transfer device 24 is attached to the conveyor 22 here, the transfer device 24 may be constituted by a cart that travels around the transfer device 24. When the lifter 30 is moved up and down in the section where the transport vehicle 6 and the transfer device 24 travel at a constant speed, the FOUP 8 can be exchanged.

図5に実施例の全体的レイアウトを示すと、50はインターベイシステムで、例えば物品の搬送方向が逆なインターベイシステム50,50が設けられ、これらの間を接続するようにイントラベイシステム52が例えば複数設けられている。コンベヤシステム54はインターベイシステム50とイントラベイシステム52とを接続し、コンベヤシステム56はイントラベイシステム52内のショートカットとして作用する。なおインターベイシステム50,イントラベイシステム52はそれぞれ、搬送車システム2を用いて実現し、コンベヤシステム54,56はコンベヤシステム20を用いて実現する。   FIG. 5 shows an overall layout of the embodiment. Reference numeral 50 denotes an interbay system. For example, interbay systems 50 and 50 having opposite article conveyance directions are provided, and an intrabay system 52 is connected so as to connect them. For example, a plurality of are provided. Conveyor system 54 connects interbay system 50 and intrabay system 52, and conveyor system 56 acts as a shortcut within intrabay system 52. The interbay system 50 and the intrabay system 52 are each realized by using the transport vehicle system 2, and the conveyor systems 54 and 56 are realized by using the conveyor system 20.

このようにすると、インターベイシステム50とイントラベイシステム52間での物品の受け渡しはコンベヤシステム54で実現でき、この部分の分岐部や合流部を不要にできる。またコンベヤシステム56により、イントラベイシステム52内でのFOUPの移動に関するショートカットを実現できる。従って複雑なレイアウトでも、搬送車システム2に分岐部や合流部を設ける必要がなくなる。インターベイシステム50,イントラベイシステム52と、コンベヤシステム54,56間での物品の受け渡しは、搬送車を停止させずに実現できる。従って物品の受け渡しのために搬送車が停止し、走行ルートが渋滞することがない。そしてコンベヤシステム54,56当たりの移載装置24の台数を増せば、受け渡し能力を増すことができる。   If it does in this way, delivery of the article between the interbay system 50 and the intrabay system 52 can be realized by the conveyor system 54, and the branching part and the joining part of this part can be made unnecessary. Further, the conveyor system 56 can realize a shortcut for moving the FOUP in the intrabay system 52. Therefore, even in a complicated layout, it is not necessary to provide a branching part or a joining part in the transport vehicle system 2. The delivery of articles between the interbay system 50, the intrabay system 52, and the conveyor systems 54, 56 can be realized without stopping the transport vehicle. Therefore, the transport vehicle stops for delivery of articles, and the travel route does not become congested. If the number of transfer devices 24 per conveyor system 54, 56 is increased, the delivery capability can be increased.

ロードポート60との間の物品の受け渡しでは、コンベヤシステム58を設けて、搬送車とコンベヤシステムの移載装置24との間の物品の受け渡しと、移載装置24とロードポート60との物品の受け渡しの2段階を行えばよい。この場合コンベヤシステム58を可変速とし、搬送車6との間で物品を受け渡しする際には、移載装置を搬送車と同期して等速走行させ、ロードポート60に対しては移載装置を停止させると良い。ロードポート60との移載では、ロードポート60に図示しない他の移載装置を設けても、あるいはコンベヤシステム58の移載装置24を用いても良い。   In the delivery of articles to and from the load port 60, a conveyor system 58 is provided to deliver articles between the transport vehicle and the conveyor system transfer device 24, and to transfer articles between the transfer device 24 and the load port 60. What is necessary is just to perform two steps of delivery. In this case, when the conveyor system 58 is set to a variable speed and an article is transferred to and from the transport vehicle 6, the transfer device is driven at a constant speed in synchronization with the transport vehicle, and the transfer device is connected to the load port 60. It is good to stop. For transfer with the load port 60, another transfer device (not shown) may be provided in the load port 60, or the transfer device 24 of the conveyor system 58 may be used.

実施例では、移載装置24をコンベヤ22に沿って移動させたが、移載装置を軌道上を走行する走行車で構成してもよい。またロードポート60を、移載装置24と干渉する部分を切り欠いたフリーローラ等で構成すると、移載装置を移動させながらロードポートとの間で荷物の受け渡しができる。
In the embodiment, the transfer device 24 is moved along the conveyor 22. However, the transfer device may be constituted by a traveling vehicle that travels on a track. In addition, when the load port 60 is configured by a free roller or the like in which a portion that interferes with the transfer device 24 is cut out, it is possible to deliver the load to and from the load port while moving the transfer device.

実施例の搬送システムのレイアウトの要部を示す平面図The top view which shows the principal part of the layout of the conveyance system of an Example 移載手段と搬送車間での物品の受け渡しを示す平面図The top view which shows delivery of the article between a transfer means and a conveyance vehicle 移載手段と搬送車間での物品の受け渡しを示す側面図Side view showing delivery of articles between transfer means and transport vehicle 実施例の移載装置の正面図Front view of the transfer device of the embodiment 実施例の搬送システムの全体的レイアウトを示す平面図The top view which shows the whole layout of the conveyance system of an Example

符号の説明Explanation of symbols

2 搬送車システム
4 走行レール
6 搬送車
7 ピン
8 FOUP
9 フランジ
10 ネック
11 扉
12 リセス
14 コントローラ
20 コンベヤシステム
22 コンベヤ
24 移載装置
26 アーム
28 ピン
30 リフタ
31 取付部
50 インターベイシステム
52 イントラベイシステム
54,56 コンベヤシステム
58 コンベヤシステム
60 ロードポート
2 Transport vehicle system 4 Traveling rail 6 Transport vehicle 7 Pin 8 FOUP
9 Flange 10 Neck 11 Door 12 Recess 14 Controller 20 Conveyor system 22 Conveyor 24 Transfer device 26 Arm 28 Pin 30 Lifter 31 Mounting portion 50 Interbay system 52 Intrabay system 54, 56 Conveyor system
58 Conveyor system
60 Loadport

Claims (3)

第1の支持手段により物品を支持して搬送する第1の搬送車と、
前記第1の搬送車の走行ルートと平行な区間を含む周回軌道に沿って周回走行すると共に、前記平行な区間で第1の搬送車と同期して等速走行自在で、かつ前記第1の支持手段とは異なる箇所で物品を支持する第2の支持手段と、前記第2の支持手段を昇降させるリフタとを備えた移載装置、とが設けられ、
かつ前記物品は底面に位置決め用の長溝を複数備え、前記第1の支持手段と前記第2の支持手段は、長溝内の異なる箇所を支持するように構成されていることを特徴とする搬送システム。
A first transport vehicle for supporting and transporting the article by the first support means;
The vehicle travels along a circular track including a section parallel to the travel route of the first transport vehicle, and is capable of traveling at a constant speed in synchronization with the first transport vehicle in the parallel section. A second support means for supporting the article at a location different from the support means, and a transfer device provided with a lifter for raising and lowering the second support means ,
The article includes a plurality of positioning long grooves on the bottom surface, and the first support means and the second support means are configured to support different portions in the long grooves. .
前記周回軌道に沿って前記移載装置を複数設けたことを特徴とする、請求項1の搬送システム。 The transfer system according to claim 1, wherein a plurality of the transfer devices are provided along the orbit. 前記周回軌道を中間にはさんで、前記第1の搬送車の走行ルートと向き合い、かつ周回軌道と平行な区間を含む、第2の搬送車の走行ルートを設けると共に、
第2の搬送車は前記第1の支持手段と同じ箇所で物品を支持して搬送し、
さらに前記移載装置を、第2の搬送車の走行ルートでの前記平行な区間で、第2の搬送車と同期して等速走行自在に構成することにより、
第1の搬送車と第2の搬送車間で、移載装置を介して物品を受け渡し自在にしたことを特徴とする、請求項1または2の搬送システム。
While providing a travel route for the second transport vehicle that includes a section parallel to the travel route and facing the travel route of the first transport vehicle with the circuit track in between,
The second transport vehicle supports and transports the article at the same location as the first support means,
Furthermore, the transfer device is configured to be capable of traveling at a constant speed in synchronization with the second transport vehicle in the parallel section on the travel route of the second transport vehicle.
The transfer system according to claim 1 or 2, wherein an article can be transferred between the first transfer vehicle and the second transfer vehicle via a transfer device.
JP2008228304A 2008-09-05 2008-09-05 Transport system Expired - Fee Related JP5344366B2 (en)

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JP3904772B2 (en) * 1999-09-30 2007-04-11 信越ポリマー株式会社 Precision substrate storage container
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JP2005057078A (en) * 2003-08-05 2005-03-03 Trecenti Technologies Inc Manufacturing method of semiconductor device
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JP5003292B2 (en) * 2006-11-07 2012-08-15 シンフォニアテクノロジー株式会社 Transport system

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CN109649974B (en) * 2017-10-12 2021-10-29 株式会社大福 Conveying system
US20220139750A1 (en) * 2020-11-04 2022-05-05 Semes Co., Ltd. Interface apparatus and container transporting system with the apparatus

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