JP6051197B2 - Transport robot with multiple arms - Google Patents

Description

  The technology disclosed in the present application relates to a transfer robot having multiple arms, and in particular, the multiple arms can be individually driven, and a transfer object (a substrate or a wafer) loaded up and down at a certain pitch unit. The present invention relates to a transfer robot having multiple arms that can be loaded and unloaded simultaneously.

  In the manufacturing process of a semiconductor device, a liquid crystal display device and the like, a drawing process and a taking-out process are performed on a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device.

  The substrate processing apparatus (transfer robot) has been developed and used as a double arm robot, a transfer robot composed of a large number of arms, and a substrate holding unit that holds a plurality of carriers and a substrate process that processes a substrate. A reversing unit that is vertically stacked between the carrier holding unit and the substrate processing unit, an indexer robot that transports a substrate between each reversing unit and the carrier holding unit, each reversing unit and the substrate processing unit, And a main transfer robot that transfers the substrate between the two.

  Such a transfer robot is basically for more efficiently transferring a wafer, a substrate or a transfer object, and this can reduce the process time and increase the process efficiency. Development will be done in the direction that can be done.

  A transfer robot having a double arm has been developed from a transfer robot having a single arm for transferring a single substrate. For the purpose of improving the structure of the double arm and making the process more efficient, Korean Patent Application Publication No. 10- No. 2008-0047205 (substrate transfer robot) (Patent Document 1) and Korean Patent Application Publication No. 10-2012-0007449 (Substrate Processing Apparatus and Substrate Transfer Method) (Patent Document 2) are disclosed.

  Patent Document 1 discloses a substrate transfer robot that includes a large number of arms capable of independent rotational movement and simultaneous vertical movement and can achieve efficient substrate transfer.

  The invention described in Patent Document 1 has a gain in that it can transport a material installed and positioned in four directions of east, west, north, and south, but operates independently in four directions of east, west, north, and south. Therefore, the inline process and the process advanced in one direction have disadvantages that are not suitable for use.

  The invention described in Patent Document 2 provides a transfer robot for increasing the throughput of the substrate processing apparatus (throughput, the number of substrates processed per unit time) and reducing the waiting time of the indexer robot and the main transfer robot. To do.

  The invention described in Patent Document 2 has the advantage of shortening the process time, but has the disadvantage of having to be driven simultaneously because it has a structure in which a large number of hands are attached to one arm. Due to the hand structure, there is a disadvantage that a large number of transported objects can be transported only when they are positioned at a constant interval.

Korean Published Patent Publication No. 10-2008-0047205 Korean Published Patent Publication No. 10-2012-0007449

  Various embodiments of the present invention provide a transfer robot having multiple arms that can simultaneously or individually transfer a transfer object in the same horizontal linear motion.

  Further, in various embodiments of the present invention, in the in-line process and the process continuous in one direction, the flow of the process is induced by simultaneous transfer of 1 to 4 conveyed items, and the process time is increased. It is possible to provide a transfer robot having a multiple arm that can shorten the process time and increase the process efficiency.

  A transfer robot having multiple arms according to one aspect of the present invention for solving the above-described problems includes first to fourth hands for transferring each of the transfer objects, and has the same movement path and is in a “b” shape. Including the first to fourth robot arms arranged in a form, and the first to fourth robot arms pick up the transported object from one same position to another one same position at the same time or individually, and are transported or loaded. In this way, a large number of articles can be conveyed at the same time, and TACT TIME (tact time) can be reduced.

  In this case, a hand base having a “┐” shape or a “└” shape may be implemented on the outer surface of each of the first to fourth robot arms.

  Here, the inner surface of each of the first to fourth robot arms may be embodied to be horizontally linearly moved by rail coupling with a horizontal guide.

  Here, in the horizontal guide, an upper horizontal guide and a lower horizontal guide are arranged vertically, and the first and second robot arms located on the upper side are rail-coupled to both side surfaces of the upper horizontal guide. The third and fourth robot arms positioned on the lower side may be rail-coupled to both side surfaces of the horizontal guide.

  Here, the upper side surface of the upper horizontal guide and the lower side surface of the lower horizontal guide may be connected to the upper vertical slide and the lower vertical slide through a connecting member, respectively.

  Here, the upper vertical slide and the lower vertical slide may be connected to a vertical member to reciprocate vertically.

  Here, the vertical member may be connected to a rotating member at a lower stage, and the robot arm may be rotated by the rotating member.

  Here, the rotating member may be connected to a slide base at a lower stage, and the slide base may be rail-coupled at both ends so as to perform horizontal horizontal linear motion.

  Here, the first to fourth robots are implemented so as to be rotatable via a rotating member, and the first to fourth robot arms and the first to fourth hands are not moved in a horizontal linear motion. When the transported object is loaded, the center point of the transported object and the rotation center axis of the rotating member are located on the same line, thereby reducing the rotation radius of the transport robot and improving the efficiency of the work space. Can be increased.

  Here, when the transported objects are simultaneously taken out, transported or stacked by the first to fourth robot arms, it is preferable that the center points of the transported objects are placed in a vertically aligned state on the same line.

  In addition, the transfer robot including the multiple arms according to one aspect of the present invention includes first to third hands for transferring each transfer object, and has the same movement path and has a “└” shape or a “┐” shape. The first to third robot arms arranged in the same manner, and the first to third robot arms simultaneously or individually take out from one same position to another one same position, and are transported or loaded. Also good.

  According to the various embodiments of the present invention described above, it is possible to simultaneously or individually transport a transported object in the same horizontal linear motion, and in an in-line process and a process that is continuous in one direction, It is possible to induce a rapid process flow by simultaneously transferring three or four conveyed items, shorten the process time, and increase the process efficiency.

It is a perspective view of the conveyance robot provided with the multiple arm by one Embodiment of this invention. It is a front view of the conveyance robot provided with the multiple arm by one Embodiment of this invention. FIG. 6 is a state diagram in which a first robot arm of a transfer robot including multiple arms according to an embodiment of the present invention is moved horizontally. FIG. 6 is a state diagram in which a second robot arm of a transfer robot having multiple arms according to an embodiment of the present invention is moved horizontally. FIG. 5 is a state diagram in which a third robot arm of a transfer robot including multiple arms according to an embodiment of the present invention is moved horizontally. FIG. 6 is a state diagram in which a fourth robot arm of a transfer robot including multiple arms according to an embodiment of the present invention is moved horizontally. FIG. 6 is a state diagram in which the entire multiple arm of the transfer robot including the multiple arm according to the embodiment of the present invention is moved horizontally. It is a block diagram of the conveyance robot provided with the multiple arm by other embodiment of this invention.

  Hereinafter, with reference to the attached drawings, the structure and operational effects of a transfer robot having multiple arms according to various embodiments of the present invention will be described.

  1 is a perspective view of a transfer robot having multiple arms according to an embodiment of the present invention, and FIG. 2 is a front view of the transfer robot having multiple arms according to an embodiment of the present invention. (A) and (B) are perspective views viewed from different angles.

  As shown in FIGS. 1 and 2, a transfer robot 10 having multiple arms according to an embodiment of the present invention includes a base frame 11, a slide base 12, a rail box 13, a rail 14, a rotating member 15a, and a vertical member. 15b, upper and lower vertical slides 17a and 17b, upper and lower connecting members 18a and 18b, upper and lower horizontal guides 19a and 19b, first to fourth robot arms 20a to 20d), upper and lower hand bases 21a and 21b, and first to first It includes fourth hands 22a to 22d.

  The base frame 11 may support the multiple arm robot 10 and may have a square frame shape, and may be equipped with a caster so as to be easily movable as necessary, so as to prevent fluidity during operation of the robot. A number of fixing devices 24 may be attached. In addition, a stopper 25 may be attached to the base frame 11 in order to confirm the lateral movement distance of the multiple arm robot 10.

  A slide base 12 is positioned inside the base frame 11, and rails 14 for horizontally moving the slide base 12 are formed on both sides of the base frame 11.

  The rail 14 may be covered by a rail box 13, and a cable (not shown) for sending power and control signals may be seated in the rail box 13.

  The slide base 12 is connected to the rails 14 on both sides so as to be horizontally movable. A rotating member 15a is formed at the upper center stage, and a vertical member 15b is formed at the tip of the rotating member 15a. Good. A rotation center shaft 16 may be provided at the center of the rotation member 15a.

  The rotating member 15a rotates the first to fourth robot arms 20a to 20d 360 degrees with the rotation center axis 16 as a reference, and the vertical member 15b can move the first to fourth robot arms 20a to 20d up and down and reciprocate linearly. To.

  A rail is formed on one side surface of the vertical member 15b, and an upper vertical slide 17a and a lower vertical slide 17b are coupled to the rail, and the upper and lower vertical slides 17a and 17b simultaneously perform vertical reciprocating linear motion.

  The upper and lower vertical slides 17a and 17b are formed at the tips of the upper connecting member 18a and the lower connecting member 18b in opposite directions, and the upper horizontal guide 19a is connected to the lower side of the upper connecting member 18a. A lower horizontal guide 19b is connected to the upper side of 18b.

  Rails are formed on both side surfaces of the upper horizontal guide 19a, and the first and second robot arms 20a and 20b are connected to the rails. Rails are formed on both side surfaces of the lower horizontal guide 19b. The fourth robot arms 20c and 20d are coupled.

  The first to fourth robot arms 20a to 20d are arranged in a lattice arrangement, that is, the first and fourth robot arms 20a and 20d and the second and third robot arms 20b and 20c are arranged diagonally to each other. The second robot arms 20a and 20b are arranged in an upper horizontal arrangement, the third and fourth robot arms 20c and 20d are arranged in a lower horizontal arrangement, and the first to fourth hands 22a to 22d and the conveyed product 23 are at the center thereof. To position.

  The first to fourth hand bases 21a to 21d are coupled to the outer surfaces of the first to fourth robot arms 20a to 20d so as to move horizontally, and the first and second hand bases 21a and 21b are shaped like a bowl. In addition, the third and fourth hand bases 21c and 21d are arranged in a “┐” shape.

  The first to fourth hands 22a to 22d are attached to the front end portions of the first to fourth hand bases 21a to 21d, and the conveyed product 23 is positioned on the first to fourth hands 22a to 22d.

  The first to fourth robot arms 20a to 20d may be independently driven, and can be simultaneously driven.

  The center point of the conveyed product 23 placed on the first to fourth hands 22a to 22d is placed on the same line and placed on the same line as the rotation center axis 16 of the rotating member 15a.

  Here, the transported object 23, that is, the four transported objects are arranged at the same position, so that the four transported objects can be simultaneously loaded and transported at the same position, and the center point of the transported object 23 is rotated. The reason why the center axis 16 is formed on the same line is to improve the efficiency of the work space by minimizing the work space of the transfer robot, that is, the turning radius.

  The first to fourth robot arms 20a to 20d perform the horizontal linear motion x in the x-axis direction, the vertical linear motion y in the y-axis direction, the two-stage horizontal linear motions z1 and z2 in the z-axis direction, and the rotational motion θ simultaneously or It will be realized individually.

  The horizontal linear motion x in the x-axis direction can be realized by reciprocating in the x-axis direction of the slide base 12 by coupling the slide base 12 and the rail 14, and the vertical linear motion y in the y-axis direction is vertical. The upper and lower vertical slides 17a and 17b allow vertical movement in the y-axis direction with respect to the member 15b, and the two-stage horizontal linear movements z1 and z2 in the z-axis direction are the first with respect to the upper and lower horizontal guides 19a and 19b. The fourth robot arms 20a to 20d perform a one-step horizontal linear motion z1 in the z-axis direction, and the first to fourth hand bases 21a to 21d in the z-axis direction with respect to the first to fourth robot arms 20a to 20d. A two-stage horizontal linear motion z2 is performed, and the rotational motion θ is due to a 360-degree rotational motion with respect to the rotational center axis 16 of the rotating member 15a.

  The arrangement of the first to fourth robot arms 20a to 20d is arranged in a lattice arrangement, that is, in a "B" shape, and is configured to be able to simultaneously convey and load the conveyed product 23.

  Depending on the arrangement of the first to fourth robot arms 20a to 20d, four objects 23 can be simultaneously or individually conveyed and stacked, but either one or two robot arms are not driven depending on the process. In addition, it is possible to simultaneously convey and individually load three conveyed objects or two conveyed objects by driving three robot arms or two robot arms.

  Alternatively, three robot arms may be configured without configuring any one of the first to fourth robot arms 20a to 20d. The arrangement of the robot arms at this time is “└ An arrangement of “” or “」 ”forms would be possible.

  FIG. 3 is a diagram illustrating a state in which a first robot arm of a transfer robot having multiple arms according to an embodiment of the present invention is horizontally advanced, and FIG. 4 is a transfer robot having multiple arms according to an embodiment of the present invention. 5 is a state diagram in which the second robot arm is horizontally advanced, FIG. 5 is a state diagram in which the third robot arm of the transfer robot having multiple arms according to an embodiment of the present invention is horizontally advanced, and FIG. FIG. 6 is a state diagram in which a fourth robot arm of a transfer robot including multiple arms according to an embodiment of the present invention is moved horizontally.

  Referring to FIG. 3, the first robot arm 20a may move horizontally in the forward direction with respect to the upper horizontal guide 19a (moving in the first z-axis direction), and the first hand 22a is based on the first robot arm 20a. It may move horizontally in the forward direction (two-step z-axis direction movement).

  Referring to FIG. 4, the second robot arm 20b may move horizontally in the forward direction with respect to the upper horizontal guide 19a (moving in the first z-axis direction), and the second hand 22b may be moved with respect to the second robot arm 20b. It may move horizontally in the forward direction (two-step z-axis direction movement).

  Referring to FIG. 5, the third robot arm 20c may move horizontally in the forward direction with respect to the lower horizontal guide 19b (moving in the first z-axis direction), and the third hand 22c can be based on the third robot arm 20c. It may move horizontally in the forward direction (two-step z-axis direction movement).

  Referring to FIG. 6, the fourth robot arm 20d may move horizontally in the forward direction with respect to the lower horizontal guide 19b (moving in the first z-axis direction), and the fourth hand 22d is based on the fourth robot arm 20d. It may move horizontally in the forward direction (two-step z-axis direction movement).

  FIG. 7 is a diagram illustrating a state in which the entire multiple arm of the transfer robot including the multiple arm according to the embodiment of the present invention is horizontally advanced, and (A) and (B) are perspective views as seen from different angles.

  In the case of FIGS. 3 to 6, for example, FIG. 7 illustrates a case where multiple arms (first to fourth robot arms) are simultaneously driven in the same direction. This is an example. In FIG. 7, each of the reference signs a to e is shown in a form surrounded by a circle. However, for convenience, in the present specification, these reference signs are shown in a form [a] to [e], respectively. Show.

  The first to fourth robot arms 20a to 20d can perform a horizontal linear reciprocating motion [a] by the slide base 12 and the rail 14, and a rotational motion [b] by the rotating member 15a, and the vertical member 15b. Vertical vertical reciprocating motion [c] is possible by the upper and lower vertical slides 17a and 17b, and primary horizontal forward and backward reciprocating motion [d] is possible by rail coupling with the upper and lower horizontal guides 19a and 19b. The fourth hands 22a to 22d are capable of secondary horizontal back-and-forth reciprocating motion [e] as the first to fourth robot arms 20a to 20d are coupled to the side rails.

  In such movements from [a] to [e], the four robot arms may be operated simultaneously, and may be individually operated as necessary, and the order of the movement directions depends on the process in the field. It may be changed accordingly.

  In the past, a double-arm transfer robot was used, but after 3 or 4 transported objects were taken out from the equipment stage at the same time, they were individually stored in the cassette, or taken out from the cassette and then taken into the equipment stage at the same time. It can be stored and TACT TIME (work process time) can be greatly reduced.

  As described above, the transfer robot including the multiple arms according to various embodiments of the present invention can be realized by arranging four robot arms in a square lattice arrangement, but two or three robot arms may be used as necessary. As described above, it is possible to realize the simultaneous operation of the above-described operations, and it is also possible to implement a transfer robot equipped with only three robot arms. Further, the four robot arms can be embodied in a structure that can be attached to and detached from the upper and lower horizontal guides 19a and 19b.

  FIG. 8 is a configuration diagram of a transfer robot including multiple arms according to another embodiment of the present invention.

  FIG. 8 is an example in which any one of the four robot arms 20a to 20d in the embodiment of FIGS. 1 to 7 is removed and configured with three robot arms.

  If a transfer robot is implemented with three robot arms without configuring one robot arm, the arrangement is implemented in an arrangement of a “└” shape or an “┐” shape, and a hand is placed at the center of the three robot arms. A conveyance thing is arranged.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings. However, the technical configuration of the present invention described above is not limited to those skilled in the art belonging to the present invention. It will be understood that the invention can be implemented in other specific forms without changing essential characteristics. Therefore, it should be understood that the above-described embodiment is illustrative in all aspects and not restrictive, and the scope of the present invention will be described later than the above detailed description. All modifications or variations that are indicated by the claims and that are derived from the meaning and scope of the claims and equivalents thereof should be construed as being included within the scope of the present invention.

DESCRIPTION OF SYMBOLS 10 Multiple arm robot 11 Base frame 12 Slide base 13 Rail box 14 Rail 15a Rotating member 15b Vertical member 16 Rotation center axis 17a, 17b Vertical slide 18a, 18b Connecting member 19a, 19b Horizontal guide 20a, 20b, 20c, 20d Robot arm 21a , 21b, 21c, 21d Hand base 22a, 22b, 22c, 22d Hand 23 Carrying object 24 Fixing device 25 Stopper

Claims (10)

Includes first to fourth hand for transporting the respectively conveyed, comprises first to fourth robotic arm to have the same path of movement,
The first to fourth robot arms have a three-dimensional shape extending in one direction and are arranged in a lattice shape when viewed from the outside in the longitudinal direction of the three-dimensional shape.
The inner surface of each of the first to fourth robot arms is rail-coupled with a horizontal guide along the longitudinal direction, so that the first to fourth robot arms perform a first-stage horizontal linear motion,
A hand base having the first to fourth hands at the tip is rail-coupled along the longitudinal direction to the outer surface of each of the first to fourth robot arms, whereby the first to fourth hands are Second stage horizontal linear motion,
A transport robot having a multiple arm, wherein the transported objects are taken out from one same position to another same position at the same time or individually by the first to fourth robot arms and transported or loaded. 2. The transfer robot having multiple arms according to claim 1, wherein the hand base in a “┐” shape or a “└” shape is rail-coupled to an outer surface of each of the first to fourth robot arms. The horizontal guide has an upper horizontal guide and a lower horizontal guide arranged vertically.
The first and second robot arms located on the upper side are rail-coupled to both side surfaces of the upper horizontal guide,
2. The transfer robot having multiple arms according to claim 1 , wherein the third and fourth robot arms positioned on the lower side are rail-coupled to both side surfaces of the lower horizontal guide. 3. 4. The transport robot having multiple arms according to claim 3 , wherein an upper side surface of the upper horizontal guide and a lower side surface of the lower horizontal guide are connected to the upper vertical slide and the lower vertical slide, respectively, via a connecting member. The transport robot having multiple arms according to claim 4 , wherein the upper vertical slide and the lower vertical slide are connected to a vertical member and reciprocate vertically. The transfer robot according to claim 5 , wherein the vertical member is connected to a rotating member at a lower stage portion, and the robot arm is rotated by the rotating member. The transfer robot with multiple arms according to claim 6 , wherein the rotating member is connected to a slide base at a lower stage, and the slide base is rail-coupled to both ends to perform horizontal horizontal linear motion. The first to fourth robot arms are embodied to be rotatable through a rotating member,
When the first to fourth robot arms and the first to fourth hands are loaded with the transported object at a position where there is no horizontal linear movement, a center point of the transported object and a rotation center axis of the rotating member; 2. The transfer robot with multiple arms according to claim 1, which are located on the same line.   The center points of the transported object are placed in a state where they are arranged vertically and vertically on the same line when the transported object is simultaneously taken out, transported or loaded by the first to fourth robot arms. A transfer robot with multiple arms. Including first to third robot arms each having a first to third hand for transporting each transported object and having the same movement path and arranged in a “└” shape or a “┐” shape;
The inner surface of each of the first to third robot arms is rail-coupled with a horizontal guide along the longitudinal direction, so that the first to third robot arms perform a first-stage horizontal linear motion,
A hand base having the first to third hands at the tip is rail-coupled along the longitudinal direction to the outer surface of each of the first to third robot arms, so that the first to third hands are Second stage horizontal linear motion,
A transport robot having multiple arms, wherein the transported objects are taken out from one same position to another one same position and transported or stacked simultaneously or individually by the first to third robot arms.

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