CN103803232B - Article transport device - Google Patents
Article transport device Download PDFInfo
- Publication number
- CN103803232B CN103803232B CN201310543073.0A CN201310543073A CN103803232B CN 103803232 B CN103803232 B CN 103803232B CN 201310543073 A CN201310543073 A CN 201310543073A CN 103803232 B CN103803232 B CN 103803232B
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- CN
- China
- Prior art keywords
- mounting portion
- article
- carrying part
- lower position
- high position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Abstract
The present invention relates to article transport device.High position mounting portion is arranged on the height higher and lower than being placed in the upper end of the article of lower position mounting portion than the height of the mounting surface of the mounting article in lower position mounting portion.The lower position mounting portion motion track be placed in the motion track of the article of high position mounting portion have the repeating part and unduplicated non-duplicate part and the repeating part that repeat and the non-duplicate part along moving direction side by side in the state of, lower position mounting portion is set, the high position mounting portion motion track be placed in the motion track of the article of lower position mounting portion have the repeating part and unduplicated non-duplicate part and the repeating part that repeat and the non-duplicate part along moving direction side by side in the state of, setting high position mounting portion.
Description
Technical field
The present invention relates to article transport device, it is provided with and transports article between the first carrying part and the second carrying part
Carrying device, as first carrying part, be set with and the carrying part of lower position first and be set in than the lower position
The carrying part of high position first of the first carrying part position higher, as second carrying part, is set with lower position
Second carrying part and the carrying part of high position second for being set in the position higher than the carrying part of the lower position second, make
It is the carrying device, is provided with：Lower position carrying device, makes the lower position mounting portion of mounting article move in the horizontal direction,
Article is transported between the carrying part of the lower position first and the carrying part of the lower position second；And high position conveyance dress
Put, the high position mounting portion of mounting article is moved in the horizontal direction, in the carrying part of the high position first and the height
Article is transported between the carrying part of position second.
Background technology
In article transport device as described above, for example, be arranged on the first carrying part and itself between can join and (award
By) the top transport carriage of article, using the top transport carriage, in the carrying part of lower position first or the carrying part of high position first
With article is transported between itself, be arranged on the second carrying part and the derrick crane of article can be joined between itself, using this
Derrick crane, article is transported between the carrying part of lower position second or the carrying part of high position second and itself.And, structure
Turn into：The lower position of lower position carrying device is moved with mounting portion, removed with lower position second in the carrying part of lower position first
Send and transport article between position, the high position of high position carrying device is moved with mounting portion, in the carrying part of high position first
Article is transported between the carrying part of high position second.First carrying part and the second conveyance are arranged on by so dual path
The path of article is transported between position, so as to efficiently transport article.
As an example of article transport device, with following equipment：High position mounting portion and lower position are loaded
Each in portion is with the motion track of the motion track with another mounting portion and the article for being placed in another mounting portion from upper and lower
Direction sees that the state of repetition is set, and seeks high position carrying device and lower position carrying device installation space in the horizontal direction
Save space (for example, referring to Japanese Unexamined Patent Publication 2010-137961 publications (patent document 1)).
And, in the article transport device of above-mentioned patent document 1, it is configured to：High position carrying device is located at than carrying
The upper end of the article of lower position mounting portion height higher is placed in, when article is transported with lower position carrying device, the article
High position carrying device is not interfered.
However, in the article transport device of above-mentioned patent document 1, although by by lower position carrying device and high position
Carrying device is set with the state of the repetition from terms of above-below direction, so as to seek the save space of the installation space of horizontal direction,
But loaded to avoid lower position mounting portion when article is transported with lower position carrying device or being placed in the lower position
The article in portion is arranged on the article than being placed in lower position mounting portion with the interference of high position carrying device, high position carrying device
Upper end height higher.Therefore, high position carrying device and lower position carrying device significantly separating along the vertical direction
State is set, and in order to set high position carrying device and lower position carrying device, big installation space is needed in the vertical direction.
The content of the invention
In view of above-mentioned background, it is desirable to achieve set high position carrying device and lower position carrying device and put forward conveyance efficiency
Height can seek the article transport of the save space of the installation space of high position carrying device and lower position carrying device simultaneously
Equipment.
Article transport device of the invention possesses following：
Carrying device, it transports article between the first carrying part and the second carrying part；
Here, as first carrying part, being set with the carrying part of lower position first and being set in than the low level
Put the carrying part of high position first of the first carrying part position higher；As second carrying part, low level is set with
Put the second carrying part and be set in the carrying part of high position second of the position higher than the carrying part of the lower position second；
As the carrying device, it is provided with：Lower position carrying device, it makes the lower position mounting portion of mounting article move in the horizontal direction
It is dynamic, transport article between the carrying part of the lower position first and the carrying part of the lower position second；And high position is removed
Send device, it makes the high position mounting portion of mounting article move in the horizontal direction, the carrying part of the high position first with
Article is transported between the carrying part of the high position second,
The high position mounting portion is arranged on the mounting surface than the mounting article in the lower position mounting portion
Height height higher and lower than being placed in the upper end of the article of the lower position mounting portion,
In the lower position mounting portion, the motion track and the high position of the article of the lower position mounting portion are placed in
Put with the motion track of mounting portion and the motion track of the article for being placed in the high position mounting portion from terms of above-below direction, have
The repeating part for repeating and unduplicated non-duplicate part, also, the repeating part and the non-duplicate part are with along the low level
The state with the moving direction of mounting portion side by side is put to set,
In the high position mounting portion, the motion track of the high position mounting portion is loaded with the high position is placed in
The motion track of the motion track of the article in portion and the article for being placed in the lower position mounting portion has from terms of above-below direction
The repeating part for repeating and unduplicated non-duplicate part, also, the repeating part and the non-duplicate part are with along the high position
The state with the moving direction of mounting portion side by side is put to set.
That is, the motion track in lower position mounting portion has the moving rail with the article for being placed in high position mounting portion
The motion track of the mark part of repetition and high position mounting portion from terms of above-below direction has and is placed in lower position mounting
The motion track of the article in portion in the state of the part of repetition, sets lower position mounting portion and high position is used from terms of above-below direction
Mounting portion.
Therefore, in high position mounting portion and the article of the high position mounting portion is placed in lower position mounting portion
Motion track from terms of above-below direction under unduplicated state, when the lower position for making mounting article is moved with mounting portion, high position
Will not turn into obstruction with mounting portion or the article for being placed in the high position mounting portion, be moved to mounting portion by making lower position
Corresponding to the position and the position corresponding to the carrying part of lower position second of the carrying part of lower position first such that it is able in low level
Put and transport article between the first carrying part and the carrying part of lower position second.
In addition, being placed in the article of lower position mounting portion and the motion track of high position mounting portion and being placed in this
The motion track of the article of high position mounting portion from terms of above-below direction under unduplicated state, when the high position for making mounting article
When being moved with mounting portion, the article for being placed in lower position mounting portion will not turn into obstruction, be moved with mounting portion by making high position
Move to the position and the position corresponding to the carrying part of high position second corresponding to the carrying part of high position first such that it is able to
Article is transported between the carrying part of high position first and the carrying part of high position second.
Used as the path of the conveyance article between the first carrying part and the second carrying part, being provided with loads lower position
Portion moves and transports the path of article and make high position mounting portion movement and transport this two paths of the path of article, therefore energy
It is enough efficiently to transport article between the first carrying part and the second carrying part.
And, by making the motion track of lower position mounting portion and the motion track of high position mounting portion and being placed in
The motion track of the article of high position mounting portion part from terms of above-below direction is repeated such that it is able to seek lower position to transport
The save space of device and high position carrying device installation space in the horizontal direction.
Further, since high position mounting portion is arranged on the mounting surface than the mounting article in lower position mounting portion
Height height higher and lower than being placed in the upper end of the article of lower position mounting portion, it is thus possible to seek lower position to transport
The save space of device and high position carrying device installation space in the vertical direction.
So, high position carrying device and lower position carrying device are set and conveyance efficiency is improved, while can seeks
High position carrying device and lower position carrying device in the horizontal direction with above-below direction on installation space save space.
Hereinafter, the example of the preferred embodiment of the present invention is illustrated.
In the implementation method of article transport device of the invention, it is preferable that the lower position carrying device is set
Being set to makes the lower position mounting portion in rotary moving freely around the axle center along vertical, the high position carrying device quilt
It is arranged to make the high position mounting portion in rotary moving freely around the axle center along vertical.
That is, in the state of article is placed in lower position mounting portion, moved by rotating lower position mounting portion
Move and article can be transported between the carrying part of lower position first and the carrying part of lower position second, in addition, making article quilt
It is placed in the state of the mounting portion of high position, can be removed in high position first by making high position mounting portion in rotary moving
Send and transport article between position and the carrying part of high position second.
And, the in rotary moving of mounting portion can be for example linked to around the axis of rotation along vertical with by mounting portion
The linking part that rotates freely and to rotate the linking part with electro-motor etc. simple constitutes to realize, it is thus possible to seek conveyance
The simplification of the composition of device.
In the implementation method of article transport device of the invention, it is preferable that the lower position mounting portion and institute
Stating high position mounting portion, to be disposed about same axle center in rotary moving freely.
That is, rotated freely because lower position mounting portion and high position mounting portion are disposed about same axle center, because
And compared with around the not concentric situation for rotatably setting these mounting portions, can be sought with the unseparated degree in axle center
The save space of installation space in the horizontal direction.
In the implementation method of article transport device of the invention, it is preferable that the carrying device is configured to certainly
The container for such as accommodating polylith substrate is transported as article, is provided with the substrate board treatment processed the substrate, and set
There is base board delivery device, it takes from the container positioned at second carrying part in the state of the mounting portion is placed in
Go out the substrate, the substrate is transported to the substrate board treatment.
That is, because high position mounting portion is arranged on the high of the mounting surface than the mounting article in lower position mounting portion
Degree height higher and lower than being placed in the upper end of the article of lower position mounting portion, thus high position mounting portion and low level
Put small with the difference in height of mounting portion.Therefore, when base board delivery device is being placed in the container of lower position mounting portion or is being placed in
When transporting substrate between the container and substrate board treatment of high position mounting portion, can suppress required in order to substrate is taken out
Base board delivery device lifting moving amount, base board delivery device can be compactly constituted along the vertical direction.
Further, since can be taken by base board delivery device in the state of container is placed in the mounting portion of carrying device
Go out substrate, thus container need not be transported to the substrate taking-up portion for being set to be taken out from the mounting portion of carrying device substrate
The other positions such as position, can efficiently transport substrate.
In the implementation method of article transport device of the invention, it is preferable that the carrying part of the lower position first
The identical position from terms of above-below direction is set at the carrying part of the high position first.
That is, the carrying part of lower position first and the carrying part of high position first are set at the identical position from terms of above-below direction
Put.Therefore, it is in the situation and the conveyance object position of article that the conveyance object position of article is the carrying part of lower position first
In the case of the carrying part of high position first, due to the position at the conveyance object position of article be in the horizontal direction identical position
Put, thus be easy into the article for being about to the carrying part of lower position first or the carrying part of high position first as conveyance object position
Conveyance.
In the implementation method of article transport device of the invention, it is preferable that be provided with the described first conveyance
Position and the mechanism of article is transported between itself and transport carriage freely is moved in the horizontal direction, the transport carriage is configured to：
Stop at the shape of the stop position to the carrying part of the lower position first and the general setting of carrying part of the high position first
Under state, the transport object freely between the carrying part of the lower position first or the carrying part of the high position first and itself
Product.
That is, the carrying part of lower position first and the carrying part of high position first are set in the identical position from terms of above-below direction
Put, no matter transport carriage transports article between the carrying part of lower position first and itself, or in the conveying unit of high position first
Position and itself between transport article when, article can be transported in the state of general stop position is stopped at.Thus, for example
Container is discharged at after the carrying part of lower position first by transport carriage, the transport carriage is not made, and movement just can be from height in the horizontal direction
The carrying part of position first lifts article etc., can efficiently transport article by transport carriage.
In the implementation method of article transport device of the invention, it is preferable that be provided with top transport carriage, it is being matched somebody with somebody
Possesses freely and lifting freely support along running rail traveling in the state of the running rail guiding support at top
The supporter of article, the top transport carriage is configured to：In order to article is unloaded in the mounting portion, decline the supporter and move
It is dynamic and by article transport to first carrying part, also, in order to lift article from the mounting portion, make on the supporter
Rise mobile and transport article from first carrying part.
That is, because high position mounting portion is arranged on the high of the mounting surface than the mounting article in lower position mounting portion
Degree height higher and lower than being placed in the upper end of the article of lower position mounting portion, thus high position mounting portion and low level
Put small with the difference in height of mounting portion.Therefore, it is possible to the height of lower position mounting portion is arranged on high position, can suppress
The lifting amount of the lifting body between top transport carriage and the carrying part of lower position first during conveyance article, can be in top transport carriage
Article is efficiently transported between the carrying part of lower position first.
Brief description of the drawings
Fig. 1 is the stereogram of article transport device.
Fig. 2 is the top view of article transport device.
Fig. 3 is the side view of article transport device.
Fig. 4 is the stereogram for showing lower position carrying device and high position carrying device.
Fig. 5 is the top view for showing lower position carrying device and high position carrying device.
Fig. 6 is to show the motion track of the container for being placed in lower position mounting portion and high position mounting portion and be placed in
The top view of the motion track of the container of the mounting portion.
Fig. 7 is to show the motion track of the container for being placed in high position mounting portion and lower position mounting portion and be placed in
The top view of the motion track of the container of the mounting portion.
Fig. 8 is the figure of the support structure for showing mounting portion.
Fig. 9 is control block diagram.
Figure 10 is flow chart.
Symbol description：
1 first carrying part
The carrying part of 1L lower positions first
The carrying part of 1H high positions first
2 second carrying parts
The carrying part of 2L lower positions second
The carrying part of 2H high positions second
3 containers (article)
4 substrates
5 carrying devices
5L lower position carrying devices
5H high positions carrying device
6 top transport carriages (transport carriage)
7 substrate board treatments
8 base board delivery devices
11 mounting portions
11L lower position mounting portions
11H high positions mounting portion
20 running rails
21 supporters
P axle center.
Specific embodiment
Hereinafter, based on brief description of the drawings embodiments of the present invention.
As shown in Figure 1 to Figure 3, it is provided with article transport device：Carrying device 5, it is in the first carrying part (reference picture
2 and Fig. 3) container 3 for accommodating polylith substrate 4 freely is transported and the second carrying part (reference picture 2 and Fig. 3) between；Remove at top
Car 6 is sent, it transports container 3 between the first carrying part and itself；Substrate board treatment 7, it is processed substrate 4；With
And base board delivery device 8, it is transporting substrate 4 between the container 3 and substrate board treatment 7 of the second carrying part 2.At this
In example, top transport carriage 6 has the mechanism that container 3 is transported in the first carrying part 1 and between itself, and is configured to along level
Move freely in direction.
And, article transport device is configured to：Container 3 is transported to the first carrying part, by transporting by top transport carriage 6
Device 5 transports to the second carrying part 2 container 3 from the first carrying part 1, by base board delivery device 8 from positioned at the second conveyance
The container 3 at position 2 takes out substrate 4 and the substrate 4 is transported to substrate board treatment 7.
In addition, article transport device is configured to：It is by base board delivery device 8 that the treatment carried out by substrate board treatment 7 is complete
Substrate 4 after transports from substrate board treatment 7 to the container 3 positioned at the second carrying part 2 and the substrate 4 is contained in into container
3, container 3 is transported to the first carrying part 1 from the second carrying part 2 by carrying device 5, removed from first by top transport carriage 6
Position 1 is sent to transport container 3.
Article transport device is arranged in clean room, as substrate 4, for liquid crystal panel etc., be formed as rectangular-shaped
Glass substrate be housed inside in container 3.Container 3 on horizontal side, is formed with equivalent to the article transported by carrying device 5
The opening of substrate 4 is taken out for being put into, upper surface is located at by the flange part that the supporter 21 of top transport carriage 6 is supported.In addition,
Although diagram is omitted, substrate 4 is formed with the shape in gap with flat-hand position and between substrate 4 adjacent along the vertical direction
Container 3 is housed inside under state.
Additionally, in substrate board treatment 7, the treatment of the regulation such as substrate 4 is coated, exposes and is developed.
As shown in figure 3, be provided with top transport carriage 6 and by the top transport carriage 6 transport container 3 container conveyance region E1 with
It is provided with substrate board treatment 7 and base board delivery device 8 and region E2 is transported by the substrate that the base board delivery device 8 transports substrate 4
Separated by partition wall 9.And, carrying device 5 is configured to：Removed located at substrate with to the container conveyance prominent states freely of region E1
Region E2 is sent, is transported in container and transport container 3 between region E1 and substrate conveyance region E2.
Additionally, the first carrying part 1 is set in container conveyance region E1, the second carrying part 2 is set in substrate and removes
Send region E2.
As shown in Figure 4 and Figure 5, as the first carrying part 1, it is set with lower position the first carrying part 1L and is set in
High position the first carrying part 1H of the position higher than the carrying part of lower position first；As the second carrying part 2, setting
There is lower position the second carrying part 2L and be set in the high position the of the position higher than the second carrying part of lower position 2L
Two carrying part 2H.
And, carrying device 5 is configured to：Moved in the horizontal direction by making the single mounting portion 11 of mounting container 3, so that
Container 3 is transported between the first carrying part 1 and the second carrying part 2.Single mounting portion 11 is formed as by from terms of above-below direction
The plate-shaped member of U-shaped (U-shaped of squarely) is constituted.
As carrying device 5, it is provided with：Lower position carrying device 5L, makes the lower position mounting portion 11L edges of mounting container 3
Horizontal direction is moved, and container 3 is transported between lower position the first carrying part 1L and the second carrying part of lower position 2L；With
And high position carrying device 5H, the high position mounting portion 11H of mounting container 3 is moved in the horizontal direction, in high position first
Container 3 is transported between carrying part 1H and high position the second carrying part 2H.
As shown in figures 1 and 3, the group of lower position carrying device 5L and high position carrying device 5H this pair of carrying device 5
Two groups are set with state along the vertical direction side by side.Lower position carrying device 5L and high position carrying device 5H on the upside of these with
The lower position carrying device 5L of downside is similarly constituted with high position carrying device 5H in addition to height is different.In addition, upside is low
Position carrying device 5L and high position carrying device 5H and the lower position carrying device 5L and high position carrying device 5H quilts of downside
Identical carriage is supported in height different on above-below direction.
Lower position carrying device 5L is arranged to make lower position mounting portion 11L rotate shifting around the axle center P along vertical
Move freely.
If apply explanation, as shown in figure 8, lower position linking part 14L be rotatably linked to around axle center P it is low
The output shaft of position electro-motor 13L, lower position mounting portion 11L is linked to lower position linking part 14L in cantilever manner.And
And be configured to：Make lower position linking part 14L around axle center P rotation drivings by with lower position electro-motor 13L, so that low level
Put with mounting portion 11L around axle center P it is in rotary moving and in lower position the first carrying part 1L and the second carrying part of lower position 2L
Between transport container 3.
In addition, similarly, high position carrying device 5H is also arranged to make high position mounting portion 11H around along vertical side
To axle center P it is in rotary moving freely, be configured to：Make high position linking part 14H around axle center by with high position electro-motor 13H
P rotation drivings so that high position with mounting portion 11H around axle center P it is in rotary moving and high position the first carrying part 1H with
Container 3 is transported between high position the second carrying part 2H.
So, lower position mounting portion 11L and high position mounting portion 11H are disposed about same axle center rotation certainly
Such as.
It is electronic that lower position electro-motor 13L and high position electro-motor 13H is located at high position in lower position electro-motor 13L
Supported by carriage 12 in the state of motor 13H more top.
Lower position electro-motor 13L is set with the posture that output shaft is protruded upward, from the upper of lower position linking part 14L
Side linking portion 14a prominent upward upper teat point 14c is linked to lower position electro-motor 13L with the state for rotating integrally
Output shaft.
In addition, high position electro-motor 13H is set with exporting posture prominent axially below, from high position linking part
It is electronic that the lower teat point 14d that the downside linking portion 14b of 14H is protruded downwards is linked to the high position with the state for rotating integrally
The output shaft of motor 13H.
And, the downside linking portion 14b of lower position linking part 14L is concatenated with the state rotated freely around axle center P
To the lower ledge 14d of high position linking part 14H, the upside linking portion 14a of high position linking part 14H is with around axle center P
The state for rotating freely is linked to the upper ledge 14c of lower position linking part 14L.
In addition, the downside linking part of the upside linking portion 14a and high position linking part 14H in lower position linking part 14L
Between point 14b, intervention has a part 15 supported by carriage 12, the upside linking portion 14a of lower position linking part 14L with around
The state that axle center P is rotated freely is linked to the upper end of part 15, the downside linking portion 14b of high position linking part 14H with
The state rotated freely around axle center P is linked to the bottom of part 15.
So, lower position linking part 14L and high position linking part 14H being held in the electronic horse of lower position along the vertical direction
Set up to the state between 13L and high position electro-motor 13H.And, link by the upside of high position linking part 14H from upper
It is part 14a, the upside linking portion 14a of lower position linking part 14L, the downside linking portion 14b of high position linking part 14H, low
The order arrangement of the downside linking portion 14b of position linking part 14L, makes upside linking portion 14a of lower position linking part 14L
Between the upside linking portion 14a and downside linking portion 14b of high position linking part 14H, under making high position linking part 14H
Linking portion 14b in side is located between the upside linking portion 14a of lower position linking part 14L and downside linking portion 14b.Thus,
Each in lower position linking part 14L and high position linking part 14H can be linked to interval wider along the vertical direction
The side of carriage 12, while seeking the section of lower position linking part 14L and high position linking part 14H installation space in the vertical direction
Space saving.
And, it is linked to the lower position mounting portion 11L of lower position linking part 14L and is linked to high position linking part 14H
High position set under following state with mounting portion 11H：High position is located at than lower position mounting portion 11L with mounting portion 11H
In mounting container 3 mounting surface (upper surface of mounting portion 11H) height it is higher and ratio is placed in lower position mounting portion 11L
Container 3 the lower height in upper end.
Next, explanation lower position is with the in rotary moving of mounting portion 11L and high position mounting portion 11H and from upper and lower
To the position relationship seen.Additionally, the direction by container conveyance region E1 with substrate conveyance region E2 side by side is referred to as equipment front and back
It is referred to as equipment left and right directions to (by direction shown by arrow X in Fig. 2 and Fig. 5) and by the direction orthogonal with equipment fore-and-aft direction
(by direction shown by arrow Y in Fig. 2 and Fig. 5) is illustrated.In this example, it is every in equipment fore-and-aft direction and equipment left and right directions
One is direction parallel to horizontal plane.
As shown in figure 5, carriage 12 is arranged at substrate conveyance region E2, axle center P is located at substrate conveyance region E2.
Lower position mounting portion 11L is configured to：Counterclockwise revolved from terms of above-below direction centered on the P of axle center by making it
Transfer is moved and movement prominent to container conveyance region E1, so that in rotary moving to the position for corresponding to the first carrying part of lower position 1L
Put (by position shown in solid in Fig. 5 (a)).Now, lower position is located at equipment front and back with mounting portion 11L relative to axle center P
To the sides that are located at of container conveyance region E1.
In addition, lower position mounting portion 11L is configured to：By making it clockwise from terms of above-below direction centered on the P of axle center
Direction it is in rotary moving and to substrate conveyance region E2 exit movement so that it is in rotary moving to correspond to the carrying part of lower position second
The position (position in Fig. 5 (a) as shown in imaginary line) of 2L.Now, lower position mounting portion 11L is located at relative to axle center P and sets
The side (the travel direction upstream side of top transport carriage 6) of standby left and right directions.
And, high position mounting portion 11H is configured to：By making it clockwise from terms of above-below direction centered on the P of axle center
Direction is in rotary moving and prominents to container conveyance region E1 movement, so that in rotary moving to corresponding to the carrying part of high position first
The position (by position shown in solid in Fig. 5 (b)) of 1H.Now, high position is located at equipment with mounting portion 11H relative to axle center P
The side that the container conveyance region E1 of fore-and-aft direction is located at.
In addition, high position mounting portion 11H is configured to：By making it counterclockwise from terms of above-below direction centered on the P of axle center
Direction it is in rotary moving and to substrate conveyance region E2 exit movement so that it is in rotary moving to correspond to the carrying part of high position second
The position (position in Fig. 5 (b) as shown in imaginary line) of 2H.Now, mounting portion 11H in high position is located at relative to axle center P and sets
The opposite side (the travel direction downstream of top transport carriage 6) of standby left and right directions.
Additionally, the position for corresponding to carrying part (the first carrying part of lower position 1L etc.) refers to be located at conveyance in container 3
The position existing for the mounting portion 11 of the container 3 is loaded during position.In addition, lower position is loaded with mounting portion 11L and high position
The pendulum angle of each in portion 11H is set to 90 °.
Incidentally, the composition of the lower position carrying device 5L of upside and high position carrying device 5H is Fig. 5 in Fig. 3
B the position relationship shown in (), the composition of the lower position carrying device 5L of downside and high position carrying device 5H is figure in Fig. 3
Position relationship shown in 5 (a).
As shown in figure 5, lower position the first carrying part 1L and high position the first carrying part 1H be all set at relative to
The side that the container conveyance region E1 of axle center P and equipment fore-and-aft direction is located at, lower position the first carrying part 1L and high position
First carrying part 1H is set in the identical position from terms of above-below direction.Then, it is in rotary moving to corresponding to lower position first
The lower position of the position of carrying part 1L mounting portion 11L and in rotary moving to the position for corresponding to high position the first carrying part 1H
The container conveyance region E1 that the high position mounting portion 11H for putting is moved to the equipment fore-and-aft direction relative to axle center P is located at
Side, these lower position mounting portion 11L and high position mounting portion 11H are located at the identical position from terms of above-below direction.
In addition, lower position the second carrying part 2L is set at the side of equipment left and right directions, high position relative to axle center P
Second carrying part 2H is set at the opposite side of equipment left and right directions relative to axle center P, lower position the second carrying part 2L and
High position the second carrying part 2H is set at different positions from terms of above-below direction.Then, it is in rotary moving to corresponding to low level
The lower position mounting portion 11L for putting the position of the first carrying part 1L moves to the side of equipment left and right directions relative to axle center P,
Moved relative to axle center P with mounting portion 11H high position to the position for corresponding to high position the first carrying part 1H in rotary moving
To the opposite side of equipment left and right directions, lower position mounting portion 11L and high position mounting portion 11H are located at from terms of above-below direction not
Same position.
And, as shown in Figures 5 to 7, lower position mounting portion 11L is arranged to：Moving it to correspond to lower position
In the state of the position of the first carrying part 1L, and the motion track of high position mounting portion 11H and it is placed in the high position and uses
Motion track repetition from terms of above-below direction of the container 3 of mounting portion 11H, is moving it to correspond to the conveying unit of lower position second
In the state of the position of position 2L, and the motion track of high position mounting portion 11H and it is placed in high position mounting portion 11H's
The motion track of container 3 is not repeated from terms of above-below direction.
In addition, high position mounting portion 11H is arranged to：Moving it to correspond to high position the first carrying part 1H's
In the state of position, with the motion track of lower position mounting portion 11L and the container 3 of lower position mounting portion 11L is placed in
Motion track repetition from terms of above-below direction, in the state of the position for moving it to correspond to high position the second carrying part 2H
Under, with the motion track of lower position mounting portion 11L and the motion track of the container 3 for being placed in lower position mounting portion 11L
Do not repeated from terms of above-below direction.
Additionally, in figure 6, the moving rail of the container 3 for being placed in lower position mounting portion 11L is represented by a chain-dotted line 3LT
Mark, represents the motion track of high position mounting portion 11H and is placed in high position mounting portion 11H's by a chain-dotted line 11HT
The motion track of container 3.In addition, in the figure 7, the container 3 for being placed in high position mounting portion 11H is represented by a chain-dotted line 3HT
Motion track, by a chain-dotted line 11LT represent lower position mounting portion 11L motion track and be placed in the lower position load
Put the motion track of the container 3 of portion 11L.
So, lower position is with mounting portion 11L, the motion track of lower position mounting portion 11L and is placed in the low level
Put with the motion track of the motion track of the container 3 of mounting portion 11L and high position mounting portion 11H and be placed in high position use
The motion track of the container 3 of mounting portion 11H from terms of above-below direction, with repeat repeating part and unduplicated non-repeating unit
Point, the repeating part and the non-duplicate part are set with the state along lower position with the moving direction of mounting portion 11L side by side.Separately
Outward, high position is with mounting portion 11H, the motion track of high position mounting portion 11H and is placed in the high position mounting portion
The motion track of the container 3 of 11H and the motion track of lower position mounting portion 11L and it is placed in lower position mounting portion 11L
Container 3 motion track from terms of above-below direction, with repeat repeating part and unduplicated non-duplicate part, the repeating portion
Point and the non-duplicate part set with the state along high position with the moving direction of mounting portion 11L side by side.
And, each in high position mounting portion 11H and lower position mounting portion 11L is configured to：The opposing party's
Mounting portion 11L, 11H is located at and do not repeat in the state of position, between the first carrying part 1 and the second carrying part 2 freely
Conveyance container 3.
That is, as shown in Fig. 5 (a), in high position, mounting portion 11H is positioned corresponding to the position of high position the second carrying part 2H
In the state of putting, high position mounting portion 11H can not be contacted or be placed in the container 3 of high position mounting portion 11H and made
Lower position mounting portion 11L is moved to corresponding to the position of the first carrying part of lower position 1L or is transported corresponding to lower position second
The position of position 2L, container 3 is transported to lower position the first carrying part 1L or the second carrying part of lower position 2L.
In addition, as shown in Fig. 5 (b), being positioned corresponding to the second carrying part of lower position 2L's in lower position mounting portion 11L
In the state of position, lower position mounting portion 11L can not be contacted or be placed in the container 3 of lower position mounting portion 11L and
High position mounting portion 11H is set to be moved to corresponding to the position of high position the first carrying part 1H or be removed corresponding to high position second
The position of position 2H is sent, container 3 is transported to high position the first carrying part 1H or high position the second carrying part 2H.
Base board delivery device 8 possesses and is arranged on equipment fore-and-aft direction between carrying device 5 and substrate board treatment 7
Lifting moving lifting platform 17 freely and along equipment left and right directions move freely the lifting platform 17 mobile manipulator 18 and quilt
Constitute.On mobile manipulator 18, lifting moving is exited freely and in the horizontal direction freely, around vertical axle center is in rotary moving
Movably possesses forked supporting part 18a.
The base board delivery device 8 is configured to：By the lifting moving and mobile manipulator 18 of lifting platform 17 along equipment or so
The movement in direction and the lifting of supporting part 18a, rotate and exit, so as to act as follows.That is, base board delivery device 8
It is configured to：Taken out from the container 3 positioned at the second carrying part of lower position 2L in the state of lower position mounting portion 11L is placed in
Substrate 4 and the substrate 4 is transported to substrate board treatment 7, from being located at height in the state of high position mounting portion 11H is placed in
The container 3 of position the second carrying part 2H takes out substrate 4 and transports to substrate board treatment 7 substrate 4, and will be by substrate
Substrate 4 after the end of processing unit 7 treatment to be placed in high position use or lower position mounting portion 11 in the state of be located at the
The container 3 of two carrying parts 2 transports and the substrate 4 is contained in into container 3.
Base board delivery device 8 is configured to：The second carrying part 2 (conveying unit of lower position second at two everywhere is located in container 3
The carrying part 2H of high position second at the 2L and two of position) in the state of any one, be all put into taking-up substrate freely from container 3
4.And, can by it is in the second carrying part 2 everywhere, as base board delivery device 8 be put into take out substrate 4 container 3 existing for
The second carrying part 2 beyond the second carrying part 2 be used as temporarily to preserve the buffering area of container 3.
As shown in Figure 1 to Figure 3, top transport carriage 6 is configured to：It is being equipped on the guiding support of running rail 20 at top
Under state, travelled freely along running rail 20.In addition, top transport carriage 6 is lifted freely and around axle center rotation along the vertical direction
Turn possess freely support container 3 supporter 21 and be configured.Incidentally, top transport carriage 6 is in the vicinity of carrying device 5
Travelled to a direction (in Fig. 1 from left to bottom right) along equipment left and right directions.In addition, top transport carriage 6 equivalent to
Transport carriage freely is moved in the horizontal direction with the mechanism of article is transported in the first carrying part 1 and between itself.At this
In example, supporter 21 is formed between the first carrying part 1 and top transport carriage 6 (transport carriage) mechanism for transporting article.
And, as shown in figure 3, top transport carriage 6 is configured to make supporter 21 rise the state for being moved to lifting position
Downward driving is moved freely.In addition, top transport carriage 6 is configured to：Make supporter 21 from lifting position decline it is mobile and by container 3
Unload in container 3 is transported to the first carrying part 1 under the form of mounting portion 11, lifting position is moved to supporter 21 is risen
And container 3 is transported into container 3 under the form of pull-up in mounting portion 11 from the first carrying part 1.By so, top transport carriage
6 enter to be about to conveyance of first carrying part 1 as the container 3 at conveyance object position, turn between the first carrying part 1 and itself
Move (handing-over) container 3.
If applying explanation, top transport carriage 6 is configured to：Stopping at the stop position directly over the first carrying part 1
In the state of putting, the supporter 21 of support container 3 is declined movement, release supporter 21 to the support of container 3 by container 3 to
Mounting portion 11 is unloaded, and container 3 is transported to the first carrying part 1.
In addition, top transport carriage 6 is configured to：In the state of the stop position directly over the first carrying part 1 is stopped at,
Make not supporting the supporter 21 of container 3 to decline movement, the container 3 positioned at the first carrying part 1 is supported by supporter 21, make support
The supporter 21 of container 3 rises movement, thus transports container 3 from the first carrying part 1.
And, top transport carriage 6 is configured to：Lower position the first carrying part 1L and high position first are transported stopping at
In the state of the stop position of the general settings of position 1H, in lower position the first carrying part 1L or high position the first carrying part 1H
With conveyance (transfer freely) container 3 freely between itself.
Incidentally, in the state of top transport carriage 6 is stopped at stop position, when lower position is with mounting portion 11L
When position corresponding to the first carrying part 1, container is transported between top transport carriage 6 and the first carrying part of lower position 1L
3；When high position mounting portion 11H is positioned corresponding to the position of the first carrying part 1, transport carriage 6 and the high position the at top
Container 3 is transported between one carrying part 1H.
First carrying part 1 (lower position the first carrying part 1L and the carrying part 1H of high position first) is set at following
Position：In the state of mounting portion 11 is placed in, positioned at the top of the upper end than traveling state of the container 3 of the first carrying part 1
The lower end of the supporter 21 of portion's transport carriage 6 is more located at lower section, and than being traveling the container with the support of top transport carriage 6 of state
3 lower end is more above.
Due to the first carrying part 1 can be set in close to the position of top transport carriage 6, it is thus possible to reduce at top
Transport carriage 6 transports container 3 to the slippage of the supporter 21 during the first carrying part 1, can rapidly by container 3 transport to
First carrying part 1.Even if in addition, container 3 is present in the first carrying part 1, it is also possible to make not supporting the traveling shape of container 3
The top transport carriage 6 of state freely travels movement.
As shown in figure 9, on article transport device, being provided with control carrying device 5, top transport carriage 6 and substrate conveyance
The conveyance control device H of the action of device 8.
Conveyance control device H is configured to be controlled to perform following treatment the action of top transport carriage 6：Traveling before handing-over
Treatment, makes top transport carriage 6 travel the stop position being moved to directly over the first carrying part 1；Traveling treatment after handing-over,
Stop position of the top transport carriage 6 from directly over the first carrying part 1 is set to travel movement；Treatment is unloaded, will by top transport carriage 6
Container 3 is transported to the first carrying part 1；Treatment is fished for, container 3 is transported from the first carrying part 1 by top transport carriage 6.
In addition, conveyance control device H is configured to be controlled to perform following treatment the action of carrying device 5：Exit place
Reason, makes mounting portion 11 that the position corresponding to the second carrying part 2 is moved to from the position corresponding to the first carrying part 1；It is prominent
Treatment, makes mounting portion 11 that the position corresponding to the first carrying part 1 is moved to from the position corresponding to the second carrying part 2.
Next, listing situations below based on the flow chart shown in Figure 10：Place is unloaded by transporting control device H execution
Reason, is transported to lower position the first carrying part 1L container 3 by top transport carriage 6, and place is fished for by transporting control device H execution
Reason, by top transport carriage 6 from high position the first carrying part 1H conveyance containers 3；Illustrate in top transport carriage 6 and carrying device
The conveyance control of container 3 is transported between 5.Additionally, generally, mounting portion 11 is moved to the position corresponding to the second carrying part 2.
If the instruction of moving into that container 3 is transported to the second carrying part of lower position 2L be instructed to, control device H is transported
Traveling treatment and prominent treatment before being first carried out joining.In traveling treatment and prominent treatment before handing-over, in order that support is moved into
The top transport carriage 6 of object container 3 travels the stop position to the first carrying part 1 and makes lower position mounting portion
11L is protruded and is moved to position corresponding to the first carrying part of lower position L1, control top transport carriage 6 and carrying device 5 it is dynamic
Make.Hereafter, conveyance control device H perform unload treatment after perform exit treatment.In treatment is unloaded, in order to by container
3 are discharged on lower position mounting portion 11L and container 3 is transported to lower position the first carrying part 1L, control top transport carriage 6
Action.In addition, in treatment is exited, in order that lower position mounting portion 11L is moved to corresponding to the conveying unit of lower position second
The position of position 2L and container 3 is transported to lower position the second carrying part 2L, control the action of carrying device 5.
Incidentally, in traveling treatment and prominent treatment before handing-over, generally, handing-over one side of preceding traveling treatment needs long
Time, before the stop position that top transport carriage 6 is moved to directly over the first carrying part 1, mounting portion 11 has been completed to right
Should be in the movement of the position of the first carrying part 1.Therefore, top transport carriage 6 is made to travel to the surface of the first carrying part 1
Afterwards, it is not necessary to make to unload treatment start wait for an opportunity to be moved to the first carrying part 1 until mounting portion 11 is protruded, can rapidly by
Container 3 is transported to the first carrying part 1.
As described above, transported container 3 to the second carrying part of lower position 2L to exit treatment in execution, such as
Fruit takes out of instruction and is not instructed to, then travel treatment and make not supporting the top transport carriage 6 of container 3 to be removed from first after performing handing-over
The stop position directly over position 1 is sent to travel, the action of conveyance control device H controls top transport carriage 6.
In addition, if taking out of instruction, then transport control device H and perform prominent treatment.In prominent treatment, in order that high
Mounting portion 11H in position protrudes the position being moved to corresponding to high position the first carrying part 1H, control carrying device 5 it is dynamic
Make.Hereafter, conveyance control device H perform fish for treatment after perform handing-over after travel treatment and exit treatment.Fishing for
In treatment, in order to take out of object container 3, the action of control top transport carriage 6 by the support of top transport carriage 6.In addition, after the handover
Traveling is processed and exited in treatment, in order that the top transport carriage 6 that support takes out of object container 3 just goes up from the first carrying part 1
The stop position traveling of side and high position mounting portion 11H is set to exit the position being moved to corresponding to high position the second carrying part 2H
Put, the action of control top transport carriage 6 and carrying device 5.
And, it is not instructed to and only takes out of in the case that instruction is instructed to instruction is moved into, conveyance control device H is first
First carry out traveling treatment and prominent treatment before handing-over.In traveling treatment and prominent treatment before handing-over, in order that not supporting container 3
Top transport carriage 6 travel the stop position to the first carrying part 1 and high position mounting portion 11 is protruded movement
To the position for corresponding to high position the first carrying part 1H, the action of control top transport carriage 6 and carrying device 5.Hereafter, transport
Control device H to be performed and travel treatment after handing-over and exit treatment after performing and fishing for treatment.In treatment is fished for, in order to
Object container 3, the action of control top transport carriage 6 are taken out of by the support of top transport carriage 6.In addition, after the handover traveling treatment and
Exit in treatment, in order that support takes out of stop position of the top transport carriage 6 of object container 3 from directly over the first carrying part 1
Put traveling and high position mounting portion 11H is exited the position being moved to corresponding to high position the second carrying part 2H, control top
The action of portion's transport carriage 6 and carrying device 5.
So, because lower position the first carrying part 1L and high position the first carrying part 1H are set in from above-below direction
Identical position is seen, thus container 3 is delivered to lower position the first carrying part 1L and high position first in top transport carriage 6 is removed
Send after first carrying part 1 in the 1H of position, the top transport carriage 6 does not travel movement just can be from the another first conveyance
Position 1 receives container 3.
Further, since high position mounting portion 11H is arranged on than the mounting container 3 in lower position mounting portion 11L
The height of mounting surface height higher and lower than being placed in the upper end of the container 3 of lower position mounting portion 11L, it is thus possible to seek
Seek the save space of lower position carrying device 5L installation spaces with high position carrying device 5H in the vertical direction.In addition,
By making the motion track of the motion track of lower position mounting portion 11L and high position mounting portion 11H and being placed in the high position
Put the part repetition from terms of above-below direction with the motion track of the container 3 of mounting portion such that it is able to seek lower position carrying device
The save space of installation spaces of the 5L with high position carrying device 5H in the horizontal direction.
Furthermore, in the state of high position mounting portion 11H is positioned corresponding to the position of high position the second carrying part 2H,
Even if moving lower position mounting portion 11L, high position is not interfered to carry yet by the container 3 that lower position mounting portion 11L is supported
Portion 11H or the container 3 by the high position mounting portion 11H supports are put, can be in lower position the first carrying part 1L and lower position
Container 3 is transported between second carrying part 2L.
In addition, in the state of lower position mounting portion 11L is positioned corresponding to the position of the second carrying part of lower position 2L,
Even if moving high position mounting portion 11H, the appearance that high position supports with mounting portion 11H or by high position mounting portion 11H
Device 3 does not interfere the container 3 supported by lower position mounting portion 11L yet, can be in high position the first carrying part 1H and high position
Container 3 is transported between second carrying part 2H.
Therefore, sought lower position carrying device 5L and high position carrying device 5H in the horizontal direction with above-below direction on
The save space of installation space, while can be by lower position carrying device 5L in lower position the first carrying part 1L and lower position
Container 3 is transported between second carrying part 2L, and can be by high position carrying device 5H in high position the first carrying part 1H
Container 3 is transported between high position the second carrying part 2H.
[other embodiment]
(1) in the above-described embodiment, lower position mounting portion 11L and high position mounting portion 11H are arranged about
Same axle center is in rotary moving freely, but can also be arranged to enclose by lower position mounting portion 11L and high position mounting portion 11H
It is in rotary moving freely around mutually different axle center.
In addition, though each being configured to by making in lower position mounting portion 11L and high position mounting portion 11H is enclosed
It is in rotary moving around the axle center along vertical and move it to correspond to the position of the first carrying part 1 and remove corresponding to second
The position at position 2 is sent, but also be may be configured as：It is every in lower position mounting portion 11L and high position mounting portion 11H by making
One moves linearly in the horizontal direction, moves it to correspond to the position of the first carrying part 1 and corresponding to the second conveying unit
The position of position 2.
(2) in the above-described embodiment, top transport carriage 6 is configured in the first carrying part 1 and transport object between itself
Product, but for example also may be configured as：Lifting freely possess mounting portion 11 and travel mobile mobile flat board freely on the ground
The device of other forms such as car transports article between the first carrying part 1 and itself.
In addition, in the above-described embodiment, being configured to be pointed to by base board delivery device 8 container 3 of the second carrying part 2
Taking-up substrate 4 is put into, but also be may be configured as：Article conveying device is set, and article conveying device is in the second carrying part 2 and certainly
Container 3 (article) is transported between body.
(3) in the above-described embodiment, by lower position the second carrying part 2L and high position the second carrying part 2H settings
In different positions from terms of above-below direction, but it is also possible to by lower position the second carrying part 2L and high position the second carrying part 2H
It is set in the identical position from terms of above-below direction.
Incidentally, it is set in from upper and lower by lower position the first carrying part 1L and high position the first carrying part 1H
To seeing identical position and lower position the second carrying part 2L and high position the second carrying part 2H be set in from above-below direction
In the case of seeing identical position, it is contemplated that in the way of circular motion track is formed from terms of above-below direction by these mounting portions 11
Lower position mounting portion 11L and high position mounting portion 11H is set.
(4) in the above-described embodiment, by lower position the first carrying part 1L and high position the first carrying part 1H settings
In the identical position from terms of above-below direction, but can also be by lower position the first carrying part 1L and the carrying part of high position first
1H is set in different positions from terms of above-below direction.
Incidentally, it is set in from upper and lower by lower position the first carrying part 1L and high position the first carrying part 1H
To seeing different positions and lower position the second carrying part 2L and high position the second carrying part 2H be set in from above-below direction
In the case of seeing different positions, it is contemplated that in the way of X shape motion tracks are formed from terms of above-below direction by these mounting portions 11
Lower position mounting portion 11L and high position mounting portion 11H is set.
(5) in the above-described embodiment, the container 3 that will accommodate polylith substrate 4 is transported as article, but also may be used
By goods plate and to be placed in its goods as article the form that transports or carton is transported and other items as article
Appropriate change.
Alternatively, it is also possible to transport highly different various articles by carrying device 5, the situation is by height highest species
Article be placed in lower position mounting portion 11L in the case of high position mounting portion 11H is set in upper end than the article
Lower height.
(6) in the above-described embodiment, by lower position with mounting portion 11L lower position mounting portion 11L moving rail
Mark has the state of the part and non-repetitive part for repeating with the motion track of high position mounting portion 11H from terms of above-below direction
Lower setting, by high position with mounting portion 11H high position mounting portion 11H motion track and lower position mounting portion 11H
Motion track from terms of above-below direction have repeat part and non-repetitive part in the state of set, but can also be each
From motion track set under unduplicated state from terms of above-below direction these lower position mounting portion 11L and high position mounting
Portion 11H.
Specifically, for example, in the above-described embodiment, it is also possible to be configured to by by the plan view shape shape of mounting portion 11
Make the lower position of the position for corresponding to the first carrying part of lower position 1L as comb teeth-shaped etc. with mounting portion 11L and correspond to height
The high position mounting portion 11H of the position of position the first carrying part 1H is not overlapped from terms of above-below direction, in respective moving rail
Mark unduplicated state from terms of above-below direction is divided into and sets low position mounting portion 11L and high position mounting portion 11H.
(7) in the above-described embodiment, it is configured to be made up of transport carriage top transport carriage 6 and by transporting top
Car 6 makes the lifting moving of supporter 21 and is removed with first in top transport carriage 6 in the state of stopping at directly over the first carrying part 1
Send and transport article between position 1, but also may be configured as：By in the horizontal stroke for making top transport carriage stop at the first carrying part 1
Supporter is set to move horizontally and lifting moving in the state of side, so as to be transported between top transport carriage and the first carrying part
Article.
Claims (7)
1. a kind of article transport device, possesses following：
Carrying device, it transports article between the first carrying part and the second carrying part；
Here, as first carrying part, it is set with the carrying part of lower position first and is set in than the lower position the
The carrying part of high position first of one carrying part position higher；
As second carrying part, it is set with the carrying part of lower position second and being set in and is transported than the lower position second
The carrying part of high position second of position position higher；
As the carrying device, it is provided with：Lower position carrying device, it makes the lower position mounting portion of mounting article along level side
To movement, article is transported between the carrying part of the lower position first and the carrying part of the lower position second；And it is high-order
Carrying device is put, it makes the high position mounting portion of mounting article move in the horizontal direction, in the conveying unit of the high position first
Article is transported between position and the carrying part of the high position second,
It has following characteristics：
The high position mounting portion is arranged on the height of the mounting surface than the mounting article in the lower position mounting portion
Height higher and lower than being placed in the upper end of the article of the lower position mounting portion,
In the lower position mounting portion, the motion track for being placed in the article of the lower position mounting portion is used with the high position
The motion track of mounting portion and be placed in the high position mounting portion article motion track from terms of above-below direction, with repeat
Repeating part and unduplicated non-duplicate part, also, the repeating part and the non-duplicate part use with along the lower position
The moving direction of mounting portion state side by side is set,
In the high position mounting portion, the motion track of the high position mounting portion and the high position mounting portion is placed in
The motion track of the motion track of article and the article for being placed in the lower position mounting portion from terms of above-below direction, with repeating
Repeating part and unduplicated non-duplicate part, also, the repeating part and the non-duplicate part use with along the high position
The moving direction of mounting portion state side by side is set.
2. article transport device according to claim 1, with following characteristics：
The lower position carrying device is configured to make the lower position mounting portion rotate shifting around the axle center along vertical
Move freely,
The high position carrying device is configured to make the high position mounting portion rotate shifting around the axle center along vertical
Move freely.
3. article transport device according to claim 2, with following characteristics：
It is in rotary moving freely that the lower position mounting portion and the high position mounting portion are disposed about same axle center.
4. article transport device as claimed in any of claims 1 to 3, with following characteristics：
The container that the carrying device is configured to accommodate freely polylith substrate is transported as article,
The substrate board treatment processed the substrate is provided with,
Base board delivery device is provided with, it is located at described in second carrying part from the state of the mounting portion is placed in
Container takes out the substrate, and the substrate is transported to the substrate board treatment.
5. article transport device as claimed in any of claims 1 to 3, with following characteristics：
The carrying part of the lower position first is set in the identical from terms of above-below direction with the carrying part of the high position first
Position.
6. article transport device according to claim 5, with following characteristics：
Transport carriage is provided with, it has in first carrying part and transported between itself mechanism of article and moves in the horizontal direction
Move freely,
The transport carriage is configured to：Stopping to the carrying part of the lower position first and the carrying part of the high position first
In the state of the stop position of general setting, the carrying part of the lower position first or the carrying part of the high position first with
Article is transported between itself freely.
7. article transport device as claimed in any of claims 1 to 3, with following characteristics：
Top transport carriage is provided with, it is in the state of the guiding support of the running rail at top is equipped on along the running rail row
The supporter for supporting article is sailed freely and lifting freely possesses,
The top transport carriage is configured to：In order to article is unloaded in the mounting portion, make the supporter decline it is mobile and by thing
Product are transported to first carrying part, also, in order to lift article from the mounting portion, make the supporter rise it is mobile and
Article is transported from first carrying part.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012245743A JP5904098B2 (en) | 2012-11-07 | 2012-11-07 | Goods transport equipment |
| JP2012-245743 | 2012-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103803232A CN103803232A (en) | 2014-05-21 |
| CN103803232B true CN103803232B (en) | 2017-05-31 |
Family
ID=50700705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310543073.0A Active CN103803232B (en) | 2012-11-07 | 2013-11-06 | Article transport device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5904098B2 (en) |
| KR (1) | KR102066169B1 (en) |
| CN (1) | CN103803232B (en) |
| TW (1) | TWI594935B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105712072B (en) * | 2016-03-23 | 2018-10-30 | 福州三矩机电设备有限公司 | A kind of transfer mechanism of non-linkage, its method for shifting and vamp laminating apparatus |
| JP6747217B2 (en) * | 2016-09-27 | 2020-08-26 | 株式会社ダイフク | Goods transport facility |
| WO2018088085A1 (en) * | 2016-11-14 | 2018-05-17 | 村田機械株式会社 | Ceiling conveyance system, and relay conveyance apparatus and conveyance method used therefor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10340938A (en) * | 1997-06-10 | 1998-12-22 | Kokusai Electric Co Ltd | Semiconductor manufacturing apparatus |
| JP2007197164A (en) * | 2006-01-27 | 2007-08-09 | Asyst Shinko Inc | Vertical conveyance device |
| CN101533765A (en) * | 2003-03-25 | 2009-09-16 | 玉井忠素 | Vacuum processing system being able to carry process object into and out of vacuum chamber |
| CN101625963A (en) * | 2008-07-07 | 2010-01-13 | 细美事有限公司 | Substrate processing apparatus and method for transferring substrate of the same |
| JP2010080647A (en) * | 2008-09-25 | 2010-04-08 | Muratec Automation Co Ltd | Storage cabinet and conveying system |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2544787Y2 (en) * | 1990-08-24 | 1997-08-20 | ティーディーケイ株式会社 | Separation and supply mechanism for chip components |
| JP2868637B2 (en) * | 1991-02-12 | 1999-03-10 | 東京エレクトロン株式会社 | Plate transfer device |
| JP2580489B2 (en) * | 1993-11-04 | 1997-02-12 | 株式会社ハイテック・プロダクト | Articulated transfer device, control method thereof, and semiconductor manufacturing device |
| JPH1098001A (en) * | 1996-09-20 | 1998-04-14 | Nec Yamagata Ltd | Wafer-heating furnace |
| JP3971601B2 (en) * | 2000-11-28 | 2007-09-05 | 大日本スクリーン製造株式会社 | Substrate delivery apparatus and substrate processing apparatus |
| JP5458563B2 (en) * | 2008-12-11 | 2014-04-02 | 村田機械株式会社 | Storage and entry / exit methods |
| US8851820B2 (en) * | 2009-05-18 | 2014-10-07 | Brooks Automation, Inc. | Substrate container storage system |
-
2012
- 2012-11-07 JP JP2012245743A patent/JP5904098B2/en not_active Expired - Fee Related
-
2013
- 2013-10-17 TW TW102137490A patent/TWI594935B/en active
- 2013-10-24 KR KR1020130127068A patent/KR102066169B1/en active IP Right Grant
- 2013-11-06 CN CN201310543073.0A patent/CN103803232B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10340938A (en) * | 1997-06-10 | 1998-12-22 | Kokusai Electric Co Ltd | Semiconductor manufacturing apparatus |
| CN101533765A (en) * | 2003-03-25 | 2009-09-16 | 玉井忠素 | Vacuum processing system being able to carry process object into and out of vacuum chamber |
| JP2007197164A (en) * | 2006-01-27 | 2007-08-09 | Asyst Shinko Inc | Vertical conveyance device |
| CN101625963A (en) * | 2008-07-07 | 2010-01-13 | 细美事有限公司 | Substrate processing apparatus and method for transferring substrate of the same |
| JP2010080647A (en) * | 2008-09-25 | 2010-04-08 | Muratec Automation Co Ltd | Storage cabinet and conveying system |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140059717A (en) | 2014-05-16 |
| TW201429841A (en) | 2014-08-01 |
| JP5904098B2 (en) | 2016-04-13 |
| KR102066169B1 (en) | 2020-01-14 |
| TWI594935B (en) | 2017-08-11 |
| CN103803232A (en) | 2014-05-21 |
| JP2014094788A (en) | 2014-05-22 |
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